CN102267108A - Abrasive tool with modified diamond abrasive material and manufacturing method thereof - Google Patents
Abrasive tool with modified diamond abrasive material and manufacturing method thereof Download PDFInfo
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- CN102267108A CN102267108A CN2010101964097A CN201010196409A CN102267108A CN 102267108 A CN102267108 A CN 102267108A CN 2010101964097 A CN2010101964097 A CN 2010101964097A CN 201010196409 A CN201010196409 A CN 201010196409A CN 102267108 A CN102267108 A CN 102267108A
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Abstract
The invention relates to an abrasive tool with a modified diamond abrasive material and a manufacturing method thereof. The modified diamond abrasive material manufacturing method comprises the steps of providing a plurality of diamond abrasive materials, placing the diamond abrasive materials into an acid solution for reaction, taking out and washing the diamond abrasive materials after being subjected to reaction from the acid solution, introducing oxygen in the environment in which the pH value of the diamond abrasive materials is neutral so as to form epoxide groups on the surfaces of the diamond abrasive materials, thus obtaining the modified diamond abrasive material. Then, the modified diamond abrasive material is combined with polymer resins to manufacture the modified diamond abrasive material polishing tool. The invention solves the problems that the bonding force between the abrasive particles in the abrasive tool and a binding agent is insufficient and the abrasive particles easy to be separated from the abrasive tool, and that the modified diamond abrasive material method is not applicable to manufacturing of small-particle size abrasive particles and the application of the abrasive particles on the abrasive tool is limited.
Description
Technical field
The present invention relates to a kind of milling tool and manufacture method thereof, particularly a kind of milling tool and manufacture method thereof with upgrading diamond abrasive material.
Background technology
In as processing of stone industry or accurate grinding industry, milling tool has been widely used in the multiple uses such as cutting, grinding, polishing and polishing of material or object.For example in semiconductor industry, Silicon Wafer (silicon wafer) is a material very important in the semiconductor industry, usually Silicon Wafer must be earlier through cmp (chemical mechanical polishing, CMP) technology, make the smooth subsequent technique that just can carry out chip manufacturing thereon of silicon wafer surface, to promote the degree of accuracy and the yield rate of technology.
Employed grinding pad in chemical mechanical milling tech (polishing pad), after the grinding of carrying out a period of time, the structure that it is surperficial such as surface detail and surface roughness etc. can be smooth-out because of the mechanical action of lasting polishing.And the chip under the wafer mill can be deposited on the grinding pad surface, makes the speed reduction of its wafer polishing even loses the polishing function.Therefore, when carrying out cmp, need usually grinding pad to be carried out intermittent finishing with milling tool (abrasive too1), promptly strike off the top layer and the abrasive dust of grinding pad, keep the rough surface of grinding pad, with the polishing action that recovers grinding pad and prolong its life-span.
Existing milling tool is that a plurality of abrasive grains (abrasive particles) are bonded to by the bond as macromolecule resin on the surface of base material, for example milling tool such as sand belt and abrasive disk.This kind milling tool is to utilize the high rigidity that abrasive grain has and the characteristic of high abrasion, reaches the function to the grinding pad attrition process.Because diamond is one of industrial materials the hardest known at present, the therefore industrial superabrasive (super-abrasive) that often utilizes diamond to be used as milling tool.Yet, this mode that abrasive grain is bonded to milling tool by bond, when the use amount of bond is not enough, make bond not enough and be exposed on the milling tool to the covering property of abrasive grain, cause milling tool when the operation of grinding or cutting, abrasive grain produces scratch from the milling tool disengaging or in object easily, and causes the damage of object.And the use amount of working as bond is too much, to such an extent as to bond is coated on the thickness on abrasive grain surface when blocked up, then to be embedded in binder course too dark because of abrasive grain easily, make abrasive grain on milling tool to expose rate too low, and directly influence the grinding and the cutting power of milling tool, and cause abrasion loss to descend to grinding work-piece.Therefore, suitable difficulty in the control of bond use amount.
For head it off, modes such as the heat treating process of employing or electric slurry method are arranged at present, upgrading is carried out on the abrasive grain surface to be handled, change by the abrasive grain surface texture, bond strength between itself and the bond is increased, with the use amount of minimizing bond, and then make the expose rate of abrasive grain on milling tool obtain to promote.But this method of abrasive grain being carried out surfaction is carried out under high temperature or vacuum environment, this is for the abrasive grain of small particle diameter (100 microns (μ m) following particle diameters), usually destroying through forming structural disintegration after the high-temperature process easily, or abrasive grain volatilizees totally in vacuum fully.Therefore, heat treating process and electric slurry method and the upgrading that is not suitable for the small particle diameter abrasive grain are handled, and it is restricted on using.
Other has and uses chemical method that abrasive grain is carried out the processing mode of upgrading, and is disclosed as the U.S.'s the 6th, 337, No. 060 bulletin patent.It is inserted abrasive grain in the sulfuric acid solution, and be heated to Celsius temperature 250 degree (℃) high temperature under abrasive grain is carried out surface treatment, make the abrasive grain surface produce hydrophily atom and/or functional group, as hydroxyl (OH) with carbonyl (C=O) etc., and by producing chemical bonded refractory between these functional groups and the bond, to increase the adhesion between abrasive grain and the bond.Yet, this combination by hydroxyl or carbonyl and bond generation chemical bonded refractory, for increasing compatible limited between abrasive grain and the bond, and, this upgrading mode is to carry out under the environment of high temperature (250 ℃) equally, therefore for the abrasive grain of small particle diameter, still exist grain structure to be subjected to temperatures involved easily and the problem that crumbles.
Summary of the invention
Technical problem to be solved by this invention provides a kind of milling tool and manufacture method thereof with upgrading diamond abrasive material, with the adhesion deficiency between abrasive grain and the bond in the solution milling tool, and the problem that breaks away from from milling tool easily, and the method for prior art upgrading abrasive grain is not suitable for the manufacturing of small particle diameter abrasive grain, and the problem that abrasive grain is restricted in the application of milling tool.
To achieve these goals, the invention provides a kind of milling tool manufacture method, wherein, comprise following steps with upgrading diamond abrasive material:
A plurality of diamond abrasive materials are provided;
Provide an acid solution to mix, and stir and heat in the environment of Celsius temperature 80～120 degree with those diamond abrasive materials;
In this acid solution, take out reacted those diamond abrasive materials, and wash those diamond abrasive materials, make the pH-value of those diamond abrasive materials be neutral;
Import oxygen and in pH-value is neutral environment, react, make those diamond abrasive surfaces have an epoxide group with those diamond abrasive materials;
Those diamond abrasive materials that the surface had this epoxide group mix with a macromolecule resin; And
Those diamond abrasive materials and this macromolecule resin that mixed surface are had this epoxide group are hardened on the base material, to form a milling tool.
Above-mentioned milling tool manufacture method with upgrading diamond abrasive material, wherein, this acid solution be selected from sulfuric acid, hydrochloric acid, nitric acid, permanganic acid and cross chloric acid one of them and composition thereof.
The above-mentioned milling tool manufacture method with upgrading diamond abrasive material, wherein, this acid solution is the mixture of sulfuric acid and nitric acid.
The above-mentioned milling tool manufacture method with upgrading diamond abrasive material, wherein, this acid solution is mixed by three to one ratio with the volume ratio of sulfuric acid and nitric acid.
Above-mentioned milling tool manufacture method with upgrading diamond abrasive material, wherein, those diamond abrasive materials are inserted in this acid solution, and stirring reaction is 24 hours under Celsius temperature 100 degree environment.
The above-mentioned milling tool manufacture method with upgrading diamond abrasive material wherein, imports oxygen and is the step of reacting with those diamond abrasive materials in the neutral environment in pH-value, also comprises those diamond abrasive materials are carried out the ultrasonic concussion.
The above-mentioned milling tool manufacture method with upgrading diamond abrasive material, wherein, the ultrasonic concussion is 30 to 60 minutes under the frequency that those diamond abrasive materials are in 30 to 50 kilo hertzs.
The above-mentioned milling tool manufacture method with upgrading diamond abrasive material wherein, imports oxygen after this pH-value is the step of reacting with those diamond abrasive materials in the neutral environment, also has the step of a washing and dry those diamond abrasive materials.
Above-mentioned milling tool manufacture method with upgrading diamond abrasive material, wherein, this macromolecule resin be selected from cured at atmosphere resin, ray hardening resin and thermosetting resin one of them.
Above-mentioned milling tool manufacture method with upgrading diamond abrasive material, wherein, this macromolecule resin be selected from UV cured glue, nylon, polyamide-based, epoxy resin, poly-methyl propionyl ester resin, polyacrylic resin, poly-carbonic acid resin resin, urea resin, phenolic resins and unsaturated polyester resin one of them.
Above-mentioned milling tool manufacture method with upgrading diamond abrasive material, wherein, those diamond abrasive materials and this macromolecule resin that mixed surface are had this epoxide group are hardened on this base material, to form the step of this milling tool, also comprise:
Mixed surface is had those diamond abrasive materials of this epoxide group and the side that this macromolecule resin is coated this base material, and this base material is made up of a pliability material; And
Treat the sclerosis of this macromolecule resin, to form a sand belt with upgrading diamond abrasive material.
The above-mentioned milling tool manufacture method with upgrading diamond abrasive material, wherein, the particle diameter that the surface has those diamond abrasive materials of this epoxide group is 0.01 to 300 micron.
The above-mentioned milling tool manufacture method with upgrading diamond abrasive material, wherein, the particle diameter that the surface has those diamond abrasive materials of this epoxide group is 1 to 15 micron.
Above-mentioned milling tool manufacture method with upgrading diamond abrasive material, wherein, this pliability material be selected from metal, rubber and plastics one of them.
Above-mentioned milling tool manufacture method with upgrading diamond abrasive material, wherein, those diamond abrasive materials and this macromolecule resin that mixed surface are had this epoxide group are hardened on this base material, to form the step of this milling tool, also comprise:
One mould is provided, is pasted with this base material in this mould;
Adhesive surface has those diamond abrasive materials of this epoxide group on this base material;
Pour into this macromolecule resin to this mould, make this macromolecule resin covering surfaces have those diamond abrasive materials of this epoxide group, be fixed in this macromolecule resin so that the surface has those diamond abrasive materials of this epoxide group; And
Make the sclerosis of this macromolecule resin, this macromolecule resin is broken away from this mould together with those diamond abrasive materials that the surface has this epoxide group, to form an abrasive disk with upgrading diamond abrasive material.
The above-mentioned milling tool manufacture method with upgrading diamond abrasive material, wherein, the particle diameter that the surface has those diamond abrasive materials of this epoxide group is at least 50 microns.
The above-mentioned milling tool manufacture method with upgrading diamond abrasive material, wherein, the particle diameter that the surface has those diamond abrasive materials of this epoxide group is 50 to 500 microns.
In order to realize above-mentioned purpose better, the present invention also provides a kind of milling tool with upgrading diamond abrasive material, includes:
One macromolecule resin; And
A plurality of diamond abrasive materials are incorporated in this macromolecule resin, and the surface of those diamond abrasive materials has epoxide group.
Above-mentioned milling tool with upgrading diamond abrasive material, wherein, this macromolecule resin be selected from cured at atmosphere resin, ray hardening resin and thermosetting resin one of them.
Above-mentioned milling tool with upgrading diamond abrasive material, wherein, this macromolecule resin be selected from UV cured glue, nylon, polyamide, epoxy resin, poly-methyl propionyl ester resin, polyacrylic resin, poly-carbonic acid resin, urea resin, phenolic resins and unsaturated polyester resin one of them.
The above-mentioned milling tool with upgrading diamond abrasive material, wherein, the particle diameter of those diamond abrasive materials is at least 50 microns.
The above-mentioned milling tool with upgrading diamond abrasive material, wherein, the particle diameter of those diamond abrasive materials is 50 to 500 microns.
The above-mentioned milling tool with upgrading diamond abrasive material also comprises a flexible substrate, and this macromolecule resin is bonded on the side of this flexible substrate.
Above-mentioned milling tool with upgrading diamond abrasive material, wherein, the composition material of this flexible substrate be selected from metal, plastics and rubber one of them.
The above-mentioned milling tool with upgrading diamond abrasive material, wherein, the particle diameter of those diamond abrasive materials is 0.01 to 300 micron.
The above-mentioned milling tool with upgrading diamond abrasive material, wherein, the particle diameter of those diamond abrasive materials is 1 to 15 micron.
Technique effect of the present invention is: disclosed milling tool and the manufacture method thereof with upgrading diamond abrasive material of the present invention, the diamond abrasive material is mixed with acid solution, and under 80～120 ℃ environment, react, and in follow-up step, import oxygen, make the diamond abrasive surface produce epoxide group (epoxy group) and finish the preparation of upgrading diamond abrasive material.Because it reacts, therefore for the diamond abrasive material, can't destroy its structure under 80～120 ℃ environment.
And, when further this upgrading diamond abrasive material being combined with macromolecule resin with the preparation milling tool, upgrading diamond abrasive material produces chemical bonded refractory by epoxide group and the macromolecule resin that its surface had, and impels compatibility, stability and bond strength between upgrading diamond abrasive material and the macromolecule resin to increase.Therefore in the manufacture process of milling tool, owing to the bond strength between upgrading diamond abrasive material and the macromolecule resin increases, and form the membrane structure that is coated on the upgrading diamond abrasive material, and the fixing intensity of upgrading diamond abrasive material on milling tool is increased.
Describe the present invention below in conjunction with the drawings and specific embodiments, but not as a limitation of the invention.
Description of drawings
Fig. 1 is the manufacturing process schematic diagram of first embodiment of the invention;
Fig. 2 is the making schematic diagram of the sand belt with upgrading diamond abrasive material of first embodiment of the invention;
Fig. 3 is the floor map of the sand belt with upgrading diamond abrasive material of first embodiment of the invention;
Fig. 4 A is the schematic diagram of scanning type electron microscope (SEM) of sand belt of the not upgrading diamond abrasive material of first embodiment of the invention;
Fig. 4 B is the schematic diagram of scanning type electron microscope (SEM) of sand belt of the upgrading diamond abrasive material of first embodiment of the invention;
Fig. 5 is the manufacturing process schematic diagram of second embodiment of the invention;
Fig. 6 A is that the upgrading diamond abrasive material of second embodiment of the invention is arranged at the schematic perspective view in the mould;
Fig. 6 B is second embodiment of the invention is perfused with macromolecule resin in mould a schematic perspective view;
Fig. 6 C is the schematic perspective view that second embodiment of the invention has the abrasive disk of upgrading diamond abrasive material;
Fig. 6 D is the floor map that second embodiment of the invention has the abrasive disk of upgrading diamond abrasive material.
Wherein, Reference numeral
100 upgrading diamond abrasive materials
200 macromolecule resins
300 base materials
400 ultraviolet lamps
500 moulds
S101～S107, S201～S209 step
The specific embodiment
Below in conjunction with accompanying drawing structural principle of the present invention and operation principle are done concrete description:
The disclosed milling tool with upgrading diamond abrasive material of first embodiment of the invention, this milling tool illustrate as an example with a sand belt, but not as limit.
As shown in Figure 1, the disclosed milling tool of first embodiment of the invention with upgrading diamond abrasive material, on making, earlier employed diamond abrasive material being carried out surfaction handles, it is inserted a plurality of diamond abrasive materials in the baking oven, and be heated under Celsius temperature 100 to the 120 degree environment diamond abrasive material is carried out drying (S101), to remove the aqueous vapor that is adsorbed in the diamond abrasive surface.Then provide an acid solution to mix with dried diamond abrasive material, this acid solution be selected from sulfuric acid, hydrochloric acid, nitric acid, permanganic acid and cross chloric acid wherein one and composition thereof, in present embodiment, this acid solution is mixed by sulfuric acid and nitric acid, and sulfuric acid and nitric acid are that ratio with volume ratio three to is mixed.In regular turn dried diamond abrasive material and acid solution are inserted in the flask (flask), and flask is heated with immersion method or bath oiling, make diamond abrasive material and acid solution under 80～120 ℃ environment, carry out stirring reaction (S102), for example make the diamond abrasive material under 100 ℃ sour environment, carry out stirring reaction 24 hours with bath oiling, remove by the impurity dissolving that this acid environment will be attached on the diamond abrasive surface, and the activity of increase diamond abrasive surface.
Diamond abrasive material after reaction finished takes out from acid solution, and the diamond abrasive material is washed and filtered with aqueous solution such as distilled water, secondary water, deionized water or reverse osmosis water, residue in acid solution on the diamond abrasive material with removal, make the pH-value (pH value) of diamond abrasive material be neutral (for example pH-value approximates 7) (S103).Then this pH-value being neutral diamond abrasive material inserts pH-value and is equally in the neutral environment and carries out ultrasonic concussion (S104), for example in the neutral environment of distilled water, frequency with 30 to 50 KHzs (KHz) is carried out ultrasonic concussion 30 to 60 minutes to the diamond abrasive material, avoid the diamond abrasive material to produce cohesion (agglomerate) each other and the formation agglomerate, the active surface that each diamond abrasive material is had all is exposed in the distilled water.And, when the diamond abrasive material being carried out the ultrasonic concussion, speed with 0.1 to 1 liter of per minute imports oxygen in this distilled water, for example the speed with 0.5 liter/per minute (1/min) imports oxygen, make oxygen on the active surface of diamond abrasive material, produce reaction, and form epoxide group in the diamond abrasive surface, its reaction equation is as follows:
Afterwards, clean the diamond abrasive material that these have epoxy group with distilled water again, and the diamond abrasive material after will cleaning is finished the surfaction (S105) of diamond abrasive material under room temperature or insert in the baking oven and carry out the drying processing with 100 to 120 ℃ temperature.
When this upgrading diamond abrasive material being analyzed, can record the absorption collection of illustrative plates (not shown) that the diamond abrasive surface has epoxide group with infrared ray (IR) spectrometer.(EnergyDispersive Spectrometer EDS) is further analyzed upgrading diamond abrasive material, and its result is as shown in table 1 below with the energy dispersive spectroscopy instrument simultaneously.
Table 1
Result in table 1 shows that the oxygen content of upgrading diamond abrasive material significantly is higher than the diamond abrasive material of not handling through surfaction.Therefore, when this upgrading diamond abrasive applications during in the manufacturing of milling tool, can the oxygen content by upgrading diamond abrasive material increase, and characteristic such as the formed epoxide group of upgrading diamond abrasive surface, make the compatibility and covering property lifting of bond (as macromolecule resin) for upgrading diamond abrasive material.
Please continue to consult Fig. 1, diamond abrasive material after will cleaning is under room temperature or insert in the baking oven and to carry out drying with 100 to 120 ℃ temperature and handle, after finishing the step of surfaction (S105) of diamond abrasive material, make the cooling of upgrading diamond abrasive material, then upgrading diamond abrasive material is mixed (S106) with a macromolecule resin, wherein upgrading diamond abrasive material 100 is selected the upgrading diamond abrasive material of 0.01 to 300 micron grain size for use, for example for having 15 microns, 50 microns, the upgrading diamond abrasive material of 100 microns and 200 micron grain sizes, and, employed macromolecule resin is selected from cured at atmosphere resin or ray hardening resin, as UV cured glue (UV glue), nylon (Nylone), polyamide-based (polyamide), epoxy resin (epoxy resin), poly-methyl propionyl ester (polymethacrylate), polyacrylic resin (polyacrylate) and poly-carbonic acid resin macromolecule resins such as (polycarbonate).
Please cooperate Fig. 2 and Fig. 3, in the present embodiment upgrading diamond abrasive material 100 is mixed with UV cured glue (macromolecule resin 200), and provide a base material 300, the flexible substrate that this base material 300 is formed with the pliability material, for example be polyester substrate or flexible metal, rubber and plastic basis material etc., (polyethylene terephthalate, PET) explanation as an example is not so as limit with polyethylene terephthalate in the present embodiment.Then in the mode of scraper coating with upgrading diamond abrasive material 100 and macromolecule resin 200 formed mixtures, be coated on the side of base material 300.Then shine, macromolecule resin 200 is hardened (as shown in Figure 3) on base material 300, upgrading diamond abrasive material 100 is bonded on the base material 300, and form sand belt (S107) with upgrading diamond abrasive material with ultraviolet lamp 400.
Shown in Fig. 4 A and Fig. 4 B, by scanning type electron microscope (scanning electronmicroscope, SEM) sand belt with upgrading diamond abrasive material after completing is carried out the abrasive material surface structure analysis of (being made up of upgrading diamond abrasive material and ultraviolet light photopolymerization glue), and compare with the sand belt of upgrading diamond abrasive material not.Fig. 4 A is the scanning type electron microscope picture of the sand belt of not upgrading diamond abrasive material, and Fig. 4 B then is the scanning type electron microscope picture with sand belt of upgrading diamond abrasive material.In Fig. 4 A, because the compatibility between upgrading diamond abrasive material and the macromolecule resin is not good, the not upgrading diamond abrasive material (position that especially has acute angle) of part is protruded in outside the macromolecule resin (ultraviolet light photopolymerization glue), and can't be subjected to the complete coating of macromolecule resin, therefore in the use of the sand belt of upgrading diamond abrasive material not, will cause scratch to object easily, or the adhesion deficiency between upgrading diamond abrasive material and the macromolecule resin not, take place from the situation that milling tool comes off easily.
And in Fig. 4 B, because upgrading diamond abrasive material has epoxide group and has higher oxygen content with respect to upgrading diamond abrasive material not, therefore compared to upgrading diamond abrasive material not, effectively promote the compatibility between upgrading diamond abrasive material and the macromolecule resin (ultraviolet light photopolymerization glue), make upgrading diamond abrasive material be subjected to the complete coating of macromolecule resin, macromolecule resin and be coated on the acute angle of upgrading diamond abrasive material simultaneously with the form of film, by compatibility and the covering property that is had between upgrading diamond abrasive material and the macromolecule resin, make upgrading diamond abrasive material be difficult on sand belt, breaking away from, and because upgrading diamond abrasive material is subjected to the complete coating of macromolecule resin, make sand belt can not cause the scratch infringement in the use, and promote the finished product rate of target target with upgrading diamond abrasive material.
If further to the sand belt of upgrading diamond abrasive material not, carry out the compare test of severity of grind with the sand belt with upgrading diamond abrasive material, its result is as shown in table 2 below.
Table 2
By tests such as the test of hundred lattice, optical fiber lapping life test and abrasion tests, measure the bond strength between upgrading diamond abrasive material and the ultraviolet light photopolymerization glue and the grinding of sand belt or cutting power.Wherein, hundred lattice tests with the optical fiber lapping life test respectively to abrasive material on base material, vertically reach the test of horizontal adhesive force.The test of hundred lattice is divided into six levels such as 0B to 5B with vertical adhesive force, and 0B represents the rate that is removed more than 65%, and it is zero that 5B then represents the rate of being removed.The optical fiber lapping life test be with by grinding work-piece and sand belt with each two minutes (returning) testing times, per minute 200 changes (Rotate Per Minute, RPM) rotation that rubs mutually of rotating speed, calculating makes the grinding number of times (returning) that the abrasive material of sand belt comes off required then, to assess the tack between this abrasive material and the base material.Abrasion test then is to by the abrasion effect of grinding work-piece in order to the assessment sand belt.It wears away sand belt under certain loading, and through after fixedly the abrasion of the number of turns are operated, calculates sand belt in unit interval (per minute; Min) can remove in by the weight number of grinding work-piece (milligram; Mg).
Result of the test by table two is learnt, though in test of hundred lattice and optical fiber lapping life test, the abrasive material of being formed by not upgrading diamond abrasive material and upgrading diamond abrasive material respectively, has identical test result, but in the result of abrasion test, the wear characteristic with sand belt of upgrading diamond abrasive material significantly is better than the not made sand belt (being increased to 0.7mg/min by 0.65mg/min (milligram/minute)) of upgrading diamond abrasive material.Itself since upgrading diamond abrasive material by forming chemical bonded refractory between epoxide group that its surface had and macromolecule resin, compatibility and covering property between upgrading diamond abrasive material and the macromolecule resin have been increased, and the bond strength that makes upgrading diamond abrasive material be bonded to sand belt increases, avoid the diamond abrasive material in process of lapping, to break away from, and then promote the grainding capacity of sand belt with macromolecule resin.
Simultaneously, because the compatibility between upgrading diamond abrasive material and the macromolecule resin increases, upgrading diamond abrasive material in the sand belt can be kept with the interlaminar resin interface to be combined, therefore in the making of sand belt with upgrading diamond abrasive material, can save the use amount of macromolecule resin, and the manufacturing cost of sand belt is reduced.
The disclosed upgrading diamond of first embodiment of the invention abrasive material is except the application of sand belt, and can be applicable in the preparation of abrasive disk.As shown in Figure 5, the disclosed milling tool with upgrading diamond abrasive material of second embodiment of the invention is the abrasive disk of a tool upgrading diamond abrasive material.At first, a plurality of diamond abrasive materials are inserted in the baking oven, and be heated under 100～120 ℃ the environment diamond abrasive material is carried out drying (S201), to remove the aqueous vapor that is adsorbed in the diamond abrasive surface.Then provide an acid solution to mix with dried diamond abrasive material, acid solution is mixed by sulfuric acid and nitric acid, and sulfuric acid is mixed with the ratio of volume ratio three to nitric acid, in addition, acid solution also can be sulfuric acid, hydrochloric acid, nitric acid, permanganic acid and cross chloric acid wherein one and composition thereof.Then dried diamond abrasive material and acid solution are inserted in the flask (flask), and flask is heated with bath oiling, make diamond abrasive material and acid solution stirring reaction 24 hours (S202) under 80～120 ℃ environment, the impurity dissolving that is attached on the diamond abrasive surface is broken away from, to increase the activity of diamond abrasive surface.
Afterwards, the diamond abrasive material that reaction is finished separates from acid solution, and with distilled water the diamond abrasive material is washed and filtered, and makes the pH-value (pH value) of diamond abrasive material be neutral (for example pH-value approximates 7) (S203).Then this pH-value being neutral diamond abrasive material inserts pH-value and is equally in the neutral distilled water, and the diamond abrasive material is carried out 30 to 60 minutes (S204) of ultrasonic concussion, formation agglomerate to avoid the diamond abrasive material to produce cohesion (agglomerate) each other with the frequency of 30 to 50 KHzs (KHz).When carrying out ultrasonic concussion, import oxygen in this distilled water with the speed of 0.1 to 1 liter of per minute, make oxygen on the surface of diamond abrasive material, react the formation epoxide group, its reaction equation is as follows:
Then, clean the diamond abrasive material that these have epoxide group with distilled water again, and the diamond abrasive material after will cleaning inserts in the baking oven and to carry out drying with 100 to 120 ℃ temperature and handle, finish the surfaction (S205) of diamond abrasive material.Afterwards, upgrading diamond abrasive material is taken out from baking oven, and make its cooling in order to follow-up application.
Please consult Fig. 5 and Fig. 6 A simultaneously, a mould 500 is provided, have base material 300 (S206) in this mould 500, this base material is made up of a soft plastic material, for example has adhering soft material for low adhesive tape or clay etc.
The upgrading diamond abrasive material 100 that then will have the particle diameter more than 50 microns is implanted in (S207) on the base material 300, for example selecting with grain size is that the upgrading diamond abrasive material of 50 microns, 100 microns, 250 microns, 300 microns or 500 microns carries out the making of abrasive disk, and applies a suitable pressure and make upgrading diamond abrasive material 100 adhere to base material 300.Shown in Fig. 6 B, pour into a macromolecule resin 200 to mould 500, and be covered in upgrading diamond abrasive material 100 fully, make upgrading diamond abrasive material 100 be fixed in (S208) on the macromolecule resin 200.This macromolecule resin 200 be selected from thermosetting resin, cured at atmosphere resin and ray hardening resin one of them, for example urea resin (urea resin), phenolic resins (phenolic resin), unsaturated polyester resin (unsaturated polyester resin), UV cured glue, nylon, polyamide-based, epoxy resin, poly-methyl propionyl ester, polyacrylic resin and poly-carbonic acid resin etc.
Please consult Fig. 5, Fig. 6 C and Fig. 6 D simultaneously, make macromolecule resin 200 sclerosis by normal temperature or thermmohardening method, then macromolecule resin 200 is broken away from from mould 500 together with upgrading diamond abrasive material 100, and form abrasive disk (S209) with upgrading diamond abrasive material 100.
The present invention is disclosed to have upgrading diamond abrasive material and manufacture method thereof, the diamond abrasive material is carried out the upgrading of abrasive surface with steps such as acid solution, ultrasonic concussion and logical oxygen processing, the oxygen content of the diamond abrasive material behind the upgrading is increased, and form epoxide group in the surface of diamond abrasive material.By this characteristic, increase the compatible and lifting bond strength between the two between upgrading diamond abrasive material and the macromolecule resin.In view of the above, when upgrading diamond abrasive applications during, make upgrading diamond abrasive material be difficult in the operating process of milling tool, breaking away from, therefore the grinding and the cutting power of having promoted milling tool from milling tool in milling tools such as sand belt and abrasive disks.And, because macromolecule resin forms a film like structures on upgrading diamond abrasive material, make upgrading diamond abrasive material be subjected to complete coating, can avoid upgrading diamond abrasive material that target is produced the situation of scraping damage and take place.
Certainly; the present invention also can have other various embodiments; under the situation that does not deviate from spirit of the present invention and essence thereof; those of ordinary skill in the art work as can make various corresponding changes and distortion according to the present invention, but these corresponding changes and distortion all should belong to the protection domain of the appended claim of the present invention.
Claims (26)
1. the milling tool manufacture method with upgrading diamond abrasive material is characterized in that, comprises following steps:
A plurality of diamond abrasive materials are provided;
Provide an acid solution to mix, and stir and heat in the environment of Celsius temperature 80～120 degree with those diamond abrasive materials;
In this acid solution, take out reacted those diamond abrasive materials, and wash those diamond abrasive materials, make the pH-value of those diamond abrasive materials be neutral;
Import oxygen and in pH-value is neutral environment, react, make those diamond abrasive surfaces have an epoxide group with those diamond abrasive materials;
Those diamond abrasive materials that the surface had this epoxide group mix with a macromolecule resin; And
Those diamond abrasive materials and this macromolecule resin that mixed surface are had this epoxide group are hardened on the base material, to form a milling tool.
2. the milling tool manufacture method with upgrading diamond abrasive material as claimed in claim 1 is characterized in that, this acid solution be selected from sulfuric acid, hydrochloric acid, nitric acid, permanganic acid and cross chloric acid one of them and composition thereof.
3. the milling tool manufacture method with upgrading diamond abrasive material as claimed in claim 2 is characterized in that this acid solution is the mixture of sulfuric acid and nitric acid.
4. the milling tool manufacture method with upgrading diamond abrasive material as claimed in claim 3 is characterized in that, this acid solution is mixed by three to one ratio with the volume ratio of sulfuric acid and nitric acid.
5. the milling tool manufacture method with upgrading diamond abrasive material as claimed in claim 1 is characterized in that those diamond abrasive materials are inserted in this acid solution, and stirring reaction is 24 hours under Celsius temperature 100 degree environment.
6. the milling tool manufacture method with upgrading diamond abrasive material as claimed in claim 1, it is characterized in that, import oxygen and be the step of reacting with those diamond abrasive materials in the neutral environment, also comprise those diamond abrasive materials are carried out the ultrasonic concussion in pH-value.
7. the milling tool manufacture method with upgrading diamond abrasive material as claimed in claim 6 is characterized in that, the ultrasonic concussion is 30 to 60 minutes under the frequency that those diamond abrasive materials are in 30 to 50 kilo hertzs.
8. the milling tool manufacture method with upgrading diamond abrasive material as claimed in claim 1, it is characterized in that, import oxygen after this pH-value is the step of reacting with those diamond abrasive materials in the neutral environment, also have the step of a washing and dry those diamond abrasive materials.
9. the milling tool manufacture method with upgrading diamond abrasive material as claimed in claim 1 is characterized in that, this macromolecule resin be selected from cured at atmosphere resin, ray hardening resin and thermosetting resin one of them.
10. the milling tool manufacture method with upgrading diamond abrasive material as claimed in claim 9, it is characterized in that, this macromolecule resin be selected from UV cured glue, nylon, polyamide-based, epoxy resin, poly-methyl propionyl ester resin, polyacrylic resin, poly-carbonic acid resin resin, urea resin, phenolic resins and unsaturated polyester resin one of them.
11. the milling tool manufacture method with upgrading diamond abrasive material as claimed in claim 1, it is characterized in that, those diamond abrasive materials and this macromolecule resin that mixed surface are had this epoxide group are hardened on this base material, to form the step of this milling tool, also comprise:
Mixed surface is had those diamond abrasive materials of this epoxide group and the side that this macromolecule resin is coated this base material, and this base material is made up of a pliability material; And
Treat the sclerosis of this macromolecule resin, to form a sand belt with upgrading diamond abrasive material.
12. the milling tool manufacture method with upgrading diamond abrasive material as claimed in claim 11 is characterized in that, the particle diameter that the surface has those diamond abrasive materials of this epoxide group is 0.01 to 300 micron.
13. the milling tool manufacture method with upgrading diamond abrasive material as claimed in claim 12 is characterized in that, the particle diameter that the surface has those diamond abrasive materials of this epoxide group is 1 to 15 micron.
14. the milling tool manufacture method with upgrading diamond abrasive material as claimed in claim 11 is characterized in that, this pliability material be selected from metal, rubber and plastics one of them.
15. the milling tool manufacture method with upgrading diamond abrasive material as claimed in claim 1, it is characterized in that, those diamond abrasive materials and this macromolecule resin that mixed surface are had this epoxide group are hardened on this base material, to form the step of this milling tool, also comprise:
One mould is provided, is pasted with this base material in this mould;
Adhesive surface has those diamond abrasive materials of this epoxide group on this base material;
Pour into this macromolecule resin to this mould, make this macromolecule resin covering surfaces have those diamond abrasive materials of this epoxide group, be fixed in this macromolecule resin so that the surface has those diamond abrasive materials of this epoxide group; And
Make the sclerosis of this macromolecule resin, this macromolecule resin is broken away from this mould together with those diamond abrasive materials that the surface has this epoxide group, to form an abrasive disk with upgrading diamond abrasive material.
16. the milling tool manufacture method with upgrading diamond abrasive material as claimed in claim 15 is characterized in that, the particle diameter that the surface has those diamond abrasive materials of this epoxide group is at least 50 microns.
17. the milling tool manufacture method with upgrading diamond abrasive material as claimed in claim 16 is characterized in that, the particle diameter that the surface has those diamond abrasive materials of this epoxide group is 50 to 500 microns.
18. the milling tool with upgrading diamond abrasive material is characterized in that, includes:
One macromolecule resin; And
A plurality of diamond abrasive materials are incorporated in this macromolecule resin, and the surface of those diamond abrasive materials has epoxide group.
19. the milling tool with upgrading diamond abrasive material as claimed in claim 18 is characterized in that, this macromolecule resin be selected from cured at atmosphere resin, ray hardening resin and thermosetting resin one of them.
20. the milling tool with upgrading diamond abrasive material as claimed in claim 19, it is characterized in that, this macromolecule resin be selected from UV cured glue, nylon, polyamide, epoxy resin, poly-methyl propionyl ester resin, polyacrylic resin, poly-carbonic acid resin, urea resin, phenolic resins and unsaturated polyester resin one of them.
21. the milling tool with upgrading diamond abrasive material as claimed in claim 18 is characterized in that, the particle diameter of those diamond abrasive materials is at least 50 microns.
22. the milling tool with upgrading diamond abrasive material as claimed in claim 21 is characterized in that, the particle diameter of those diamond abrasive materials is 50 to 500 microns.
23. the milling tool with upgrading diamond abrasive material as claimed in claim 18 is characterized in that, also comprises a flexible substrate, this macromolecule resin is bonded on the side of this flexible substrate.
24. the milling tool with upgrading diamond abrasive material as claimed in claim 23 is characterized in that, the composition material of this flexible substrate be selected from metal, plastics and rubber one of them.
25. the milling tool with upgrading diamond abrasive material as claimed in claim 23 is characterized in that, the particle diameter of those diamond abrasive materials is 0.01 to 300 micron.
26. the milling tool with upgrading diamond abrasive material as claimed in claim 25 is characterized in that, the particle diameter of those diamond abrasive materials is 1 to 15 micron.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010101964097A CN102267108A (en) | 2010-06-03 | 2010-06-03 | Abrasive tool with modified diamond abrasive material and manufacturing method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010101964097A CN102267108A (en) | 2010-06-03 | 2010-06-03 | Abrasive tool with modified diamond abrasive material and manufacturing method thereof |
Publications (1)
| Publication Number | Publication Date |
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| CN102267108A true CN102267108A (en) | 2011-12-07 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010101964097A Pending CN102267108A (en) | 2010-06-03 | 2010-06-03 | Abrasive tool with modified diamond abrasive material and manufacturing method thereof |
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| Country | Link |
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| CN (1) | CN102267108A (en) |
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| CN106222730A (en) * | 2016-08-31 | 2016-12-14 | 山东山田新材科研有限公司 | A kind of surface modifying method of ultra-fine diamond scroll saw diadust |
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