CN102248248B - Liquid dropping device - Google Patents
Liquid dropping device Download PDFInfo
- Publication number
- CN102248248B CN102248248B CN201110132507.9A CN201110132507A CN102248248B CN 102248248 B CN102248248 B CN 102248248B CN 201110132507 A CN201110132507 A CN 201110132507A CN 102248248 B CN102248248 B CN 102248248B
- Authority
- CN
- China
- Prior art keywords
- liquid
- nozzle
- inert gas
- dropping device
- dripping
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Coating Apparatus (AREA)
Abstract
The invention provides a liquid dropping device, in which the liquid such as a liquefied soft solder is dropped to an object in an accurate micro amount. The liquid is dropped for retention and a liquid storage section communicated with a nozzle hole is able to linearly drive the front end of a lever along an opening direction of the nozzle hole. The lever is linearly driven by the micro amount so as to generate a compression wave in the retention liquid. The wave energy of the compression wave enables the liquid of the prescribed amount to drop from the nozzle hole.
Description
Technical field
The present invention relates to object (dropping liquid) device under the fluid drips of liquid of pettiness amount that drips.More particularly, relate to the material that maintains under given conditions liquid condition for the illustrated motlten metal of soft solder (scolder) etc., its formal operations with the liquid of pettiness amount can be processed and to the compatibly dripping dripping device of object that drips.
Background technology
For example, in the manufacturing process of magnetic head, by the small ball of the electric conductivity that configuration is formed by soft solder between multiple electrodes, also make further it carry out set for each electrode its melting, carry out this interelectrode electricity and engage (with reference to patent documentation 1).At this, the now microminiaturization of magnetic head, multifunction advancing, and when number of electrodes increases, electrode self also diminishes, as a result of, and the ball of the electric conductivity microminiaturization of also having to.If conductive ball becomes for example diameter below 100 μ m, can produce other operational processes and become difficulty, and in operational processes, so-called pollutant adheres to or the price self of this spheroid uprises high such problem.
Based on such background, as disclosed in patent documentation 2 to 5, once proposed being directly engaged thing spue flow of molten solder the technology that it is adhered to.According to this technology, be accompanied by the use of above-mentioned conductive ball and the problem that produces is resolved.In these technology, there is Volume Changes in the fluid accumulation portion that has made to accumulate motlten metal, utilizes this Volume Changes from the spue motlten metal of ormal weight of this fluid accumulation portion.
Prior art document
Patent documentation 1: TOHKEMY 2009-028781 communique
Patent documentation 2: TOHKEMY 2000-294591 communique
Patent documentation 3: Japanese kokai publication hei 10-137930 communique
Patent documentation 4: TOHKEMY 2003-334654 communique
Patent documentation 5: TOHKEMY 2006-075781 communique
Patent documentation 6: Japanese kokai publication hei 02-175254 communique
Patent documentation 7: TOHKEMY 2001-232245 communique
Patent documentation 8: TOHKEMY 2009-000719 communique
Summary of the invention
At this, as making the micro-method of marginally dripping or spuing of liquid, the also disclosed technology of known patent document 6 or 7.In these methods, with regard to substantially utilizing the Volume Changes of liquid to drip with regard to the situation of liquid of ormal weight, same with above-mentioned prior art.But in the situation that utilizing Volume Changes, if gas is blended in liquid, Volume Changes does not become curve one time with the relation of the variation of applied pressure for Volume Changes.Therefore,, along with the quantitative change of dripping of liquid is small, to entrained gas in liquid, the impact of the precision of dripping is become to large.By above situation, in patent documentation 2 to 7 disclosed technology, by form fluid accumulation portion in the space being sealed that does not have gas, and carry out the Volume Changes in this space, can carry out the dripping of liquid of ormal weight.
For example, in the formation shown in patent documentation 8, by considering to form with the so-called wetability of the liquid of accumulating the inwall in this space, prevent the intrusion of gas to nozzle interior.The document can be described as gas while showing under the fluid drips of pettiness amount by reverse instruction can become large problem to sneaking in nozzle.In addition, in the case of being the nozzle of such structure, in the time that liquid is made up of resin, also can be by decomposing nozzle, the washing of carrying out each parts safeguards.But, in the situation that liquid is motlten metal, must remove curing metal.
The present invention completes in view of above situation, its object is to provide a kind of liquid dropping device, it can be by adopting method beyond above-mentioned Volume Changes to eliminate the impact for the gas intrusion of nozzle etc., and can utilize the simple structure of maintainability excellence to realize under the fluid drips of small quantity.
In order to solve above-mentioned problem, the liquid dropping device the present invention relates to is the liquid dropping device of liquid of ormal weight of dripping, and it is characterized in that having:
Liquid receiving portion, this liquid receiving portion is accumulated liquid and is formed fluid accumulation portion;
Nozzle, this nozzle has and in liquid receiving portion, accumulates the regional connectivity of liquid and the nozzle bore that liquid can pass through;
Actuator (actuator; Actuator); With
Bar, an end of this bar is impregnated in fluid accumulation portion, and the other end is supported by actuator, can move along the formation direction of principal axis of nozzle bore,
Described bar can form rectilinear motion on direction of principal axis by actuator, makes a part for fluid accumulation portion produce wave energy by the rectilinear motion of bar, and liquid drips from nozzle bore because of wave energy.
In addition, above-mentioned liquid dropping device, preferably also has the heating unit that heating is present in the liquid of fluid accumulation portion.In addition, fluid accumulation portion preferably has space on the liquid level of liquid that is present in fluid accumulation portion.In addition, in this case, more preferably also have: can carry out to this space supply and the discharge of inert gas, the inert gas that liquid can be remained in inert gas atmosphere is supplied with discharge path.In addition, more preferably: also having can be for the liquid supply road of liquid receiving portion feed fluid, the madial wall in liquid receiving portion, liquid supply road and space and the region that may contact with liquid in nozzle are formed by the face of lyophobicity.In addition, preferred: also to there is the side atmosphere space of dripping being formed between nozzle flange and nozzle compressing member, described nozzle flange is configured in the side of dripping of the liquid of the peristome of nozzle bore, around the peristome in covering nozzles hole, can make peristome become inert gas atmosphere around, described nozzle compressing member makes nozzle butt be fixed on liquid receiving portion.In addition, more preferably: actuator uses piezoelectric element.In addition, more preferably: the atmosphere in the space of the side of dripping of the liquid in nozzle bore can maintain the temperature more than fusing point of liquid.Further, more preferably: nozzle is formed by corundum.
In addition, more preferably: in above-mentioned liquid dropping device, have coaxial with the above-mentioned formation axle of nozzle bore and be communicated with nozzle bore, and thering is the guide hole of the length of regulation; With the inert gas feed system that can supply with from the side direction guide hole being communicated with nozzle bore inert gas, liquid is directed along the direction of dripping by flowing of inert gas in guide hole.
Further, preferred: inert gas feed system can temporarily increase corresponding to the rectilinear motion of the bar being caused by actuator the quantity delivered of inert gas.
Further, preferred: inert gas feed system also has inert gas heating unit, and inert gas heating unit can be heated to the temperature of inert gas the temperature of the fusing point that exceedes liquid.
Further, more preferably: guide hole, in having the peristome arranging in the direction of dripping of liquid, also has drainage opening, described drainage opening is communicated with the space outerpace of the protection nozzle that forms guide hole and guide hole.
According to the present invention, liquid, from the discharge of nozzle, has utilized the wave energy being applied by bar.Therefore, need among fluid accumulation portion, fully not get rid of gas, by removing the formation for air scavenge, can simplify nozzle and form.In addition, owing to being different from the formation that produces Volume Changes, can carry out without any problems gas to the importing in nozzle, so become on maintainability also excellent formation.Further, motlten metal can be remained in inert gas, also can prevent the oxidation of motlten metal.
Brief description of the drawings
Fig. 1 be pattern represent the figure that the summary of the liquid dropping device that the first embodiment of the present invention relates to forms.
Fig. 2 A is illustrated in the liquid dropping device shown in Fig. 1, the figure of the initial stage in operation of dripping of liquid.
Fig. 2 B is illustrated in the liquid dropping device shown in Fig. 1, the figure of the state that to make bar linearity mobile.
Fig. 2 C is illustrated in the liquid dropping device shown in Fig. 1, produces the figure of the state of compressional wave for the liquid of bar leading section periphery.
Fig. 2 D is illustrated in the liquid dropping device shown in Fig. 1, the figure in the stage of dripping of liquid.
Fig. 3 A is in the embodiment shown in Fig. 1, further, in the situation taking motlten metal as object, about preferred formation, represents enlargedly near the figure that nozzle is.
Fig. 3 B is illustrated in the formation shown in Fig. 3 A, the figure of the state that liquid metals is dripped.
Fig. 4 is another mode of the present invention, be pattern the figure of the direction situation different from the mode shown in Fig. 1 that represent to drip.
Fig. 5 be pattern represent to utilize the figure of shape of the electronic unit that the manufacturing installation of the electronic unit that has used the liquid dropping device the present invention relates to manufactures.
Fig. 6 be pattern represented to use the figure of the formation of the manufacturing installation of the electronic unit of the liquid dropping device the present invention relates to.
Fig. 7 A utilizes prior art to carry out the situation of electrode engagement, be pattern represent for the electronic unit of situation that has produced bridge joint (bridge), just carrying out the figure of the situation of observing in the face of it from electrode.
Fig. 7 B is the figure that represents to have observed from electrode side the situation of the formation shown in Fig. 7 A.
Fig. 8 A is about the electronic unit shown in Fig. 7 A and 7B, represents to have observed from electrode front the figure of the state of the initial stage the electrode engagement operation of the situation that has used the liquid dropping device the present invention relates to.
Fig. 8 B is the figure that represents to have observed from electrode side the situation of the formation shown in Fig. 8 A.
Fig. 9 A is the next stage of the operation shown in Fig. 8 A, is to represent to make the clipped wire figure of the state on electrode that dripped.
Fig. 9 B is the figure that represents to have observed from electrode side the situation of the formation shown in Fig. 9 A.
Figure 10 A is the next stage of the operation shown in Fig. 9 A, is to represent clipped wire melting make the figure of its curing state again.
Figure 10 B is the figure that represents to have observed from electrode side the situation of the formation shown in Figure 10 A.
Figure 11 is the figure that adopts the pattern mode same with Fig. 1 and represent the summary formation of the liquid dropping device that the second embodiment of the present invention relates to.
Figure 12 A is illustrated in the liquid dropping device shown in Figure 11, the figure of the initial stage in operation of dripping of liquid.
Figure 12 B is illustrated in the liquid dropping device shown in Figure 11, the figure of the state that to make bar linearity mobile.
Figure 12 C is illustrated in the liquid dropping device shown in Figure 11, produces the figure of the state of compressional wave for the liquid of bar leading section periphery.
Figure 12 D is illustrated in the liquid dropping device shown in Figure 11, the figure in the stage of dripping of liquid.
Figure 13 is the figure of another form of the liquid dropping device that represents that the second embodiment relates to.
Figure 14 is the figure of another form of the liquid dropping device that represents that the second embodiment relates to.
Figure 15 is the figure of the another form of the liquid dropping device that represents that the second embodiment relates to.
Description of reference numerals
1: drop (motlten metal grain); 3: electronic unit; 4: substrate; 4a: cavity (cavity); 4b: substrate-side electrode; 5: sheet electronic component; 6: resin filling agent; 7: electronic unit; 7a: electrode; 8: soft solder; 9: heat ray irradiator; 10: spray nozzle device (nozzle unit); 11: nozzle; 11a: nozzle bore; 13: nozzle compressing member; 13a: compressing member through hole; 15: nozzle flange; 15a: receiving space; 51b: flange through hole; 17: disk spring; 19: the side of dripping atmosphere space; 21: protection nozzle; 21a: guide hole; 22: the first inert gas feed paths; 22a: first flow control valve; 23: the second inert gas feed paths; 23a: second adjustable valve; 23b: magnetic valve; 25: nitrogen supply source; 26: gas-heated region; 30: actuator system; 31: actuator; 33: bar; 35: shaft coupling (joint); 37: insulation; 39: plate; 50: body (body); 51: liquid receiving portion; 53: fluid accumulation portion; 55: body side flange; 55a: through hole; 57: space in body; 59: heater; 61: body main body; 63: liquid supply road; 65: inert gas is supplied with discharge path; 100,101: liquid dropping device; 200: electronic unit manufacturing installation; 201: substrate delivery system; 203: pre-heating station; 205: coating cloth deck; 207: distributor; 209: measure platform; 211: analyzer; 213: supplement platform; 215: dispenser controller; 217: operational part; 219: controller; 221: monitor; A: form axle; B: arrow; S: displacement; W: compressional wave; Δ d: admissible error; D: engaging zones; α: the angle of inclination of regulation; Da: gap; Dg: guide hole internal diameter; De: protection spray nozzle front end portion external diameter.
Detailed description of the invention
The liquid dropping device the first embodiment of the present invention being related to referring to accompanying drawing describes.
Fig. 1 be pattern represent the concept map that the summary of the liquid dropping device 100 that present embodiment relates to forms.Liquid dropping device 100, is made up of spray nozzle device 10, actuator system 30 and body 50.In addition, the main so that motlten metal of present embodiment drips as object.
Spray nozzle device 10, has: nozzle 11, nozzle compressing member 13, nozzle flange 15, disk spring 17 and the side atmosphere space 19 of dripping.Nozzle 11 has: liquid 1 can by and run through the nozzle bore 11a of this nozzle 11 along the direction of formation axle A of regulation.Nozzle flange 15 has the receiving space 15a that can accommodate nozzle compressing member 13, in the side of dripping of the peristome of nozzle bore 11a, is configured to cover around the peristome of this nozzle compressing member 13 and nozzle bore 11a.Receiving space 15a is the space larger than the profile of nozzle compressing member 13, utilize the disk spring 17 of together being accommodated by it with nozzle compressing member 13 to nozzle compressing member 13 towards body 50 application of forces.Thus, clamp nozzle 11 by means of nozzle compressing member 13 by the liquid receiving portion 51 of itself and body 50 sides, make nozzle 11 adherences be fixed on liquid receiving portion 51.Nozzle compressing member 13 makes nozzle 11 butts be fixed on liquid receiving portion 51.According to above formation, by utilizing the fixed component of not shown screw etc. that nozzle flange 15 is fixing with respect to body 50, thereby by means of disk spring 17, nozzle compressing member 13, nozzle 11 is fixed with the position relationship of regulation with respect to liquid receiving portion 51.In addition, be formed at the space that disposes disk spring 17 between nozzle flange 15 and nozzle compressing member 13, bring into play function as the side atmosphere space 19 of dripping, have around the peristome of covering nozzles 11, make peristome become the effect of the atmosphere gas of regulation around.
In addition, preferably: the region that the liquid with becoming the object that drips of the inside of nozzle 11, especially nozzle bore 11a etc. contacts, utilizes at least covering surfaces of material with lyophobicity.Therefore, preferred: these regions are by teflon, DLC (diamond-like-carbon; The coating such as Diamond-like-Carbon), or utilize these materials to form nozzle 11.In addition, as the manner, in the situation that the object that drips is motlten metal, more preferably utilize the corundum of ruby, sapphire etc. to form nozzle 11.In addition, the side of dripping atmosphere space 19, be the oxidation of the liquid in order to use inhibition, the inhibition of variations in temperature etc., promote liquid be applicable to drip and used.As the manner, in the situation that the object that drips is motlten metal, preferably this side atmosphere space 19 of dripping is full of by the inert gas of nitrogen etc., further preferably forms the atmosphere of the temperature more than melt temperature of metal.Therefore the formation that, preferably the supply of the additional high temperature inert gas that can carry out authorized pressure is discharged or the formation that can heat being present in the gas in this space.
Actuator system 30, has: actuator 31, bar 33, shaft coupling 35, insulation 37 and plate 39.Actuator 31 is supported by plate 39.Bar 33 invades end, 57, one, space in body via the through hole 55a of body side flange 55 described later and is impregnated in the fluid accumulation portion 53 of liquid receiving portion 51.In addition, bar 33 supported by actuator 31 via shaft coupling 35 and insulation 37 in another end, utilizes this actuator 31 to be driven with the coaxial mode of the formation axle A of the regulation of above-mentioned nozzle bore 11a., bar 33 is being supported by actuator 31 along the mode of the formation axle A direction rectilinear movement of regulation.In addition, in the present embodiment, utilized the energy of the fluctuation producing in the time utilizing actuator 31 to make bar 33 rectilinear motion in the fluid accumulation portion 53 around an end of this bar 33.Therefore, preferred: to utilize the piezoelectric element that quick action and responsiveness are high to build this actuator 31.
In addition, preferably: bar 33, at least it,, by an end of liquid infiltration in fluid accumulation portion 53, is formed or by such material covering surfaces by the material with respect to the liquid that becomes the object that drips with lyophobicity.Therefore, preferred: these regions are by teflon, DLC (diamond-like-carbon; Diamond-like-Carbon), the coating such as titanium or utilize these materials to form bar 33 or its part.In addition, as the manner, in the situation that the object that drips is motlten metal, more preferably: adopt Hasiteluoyi hastelloy (Hastelloy; Hastelloy), titanium etc. forms bar 33 or its part.In addition, as the manner, in the situation that the object that drips is motlten metal, because liquid etc. is heated, therefore preferred: to carry out heat partition to being subject to bar 33 and actuator 31 that this is hot.Therefore,, in the manner, between bar 33-shaft coupling 35, configure insulation 37.But, according to service condition of the heat resistance of the melt temperature of liquid, actuator or liquid etc. also this insulation 37 not.
Body 50 has: in liquid receiving portion 51, fluid accumulation portion 53, body side flange 55, body, space 57, heater 59, body main body 61, liquid supply road 63 and inert gas are supplied with discharge path 65.Space 57 is the spaces that are configured on the formation axle A of above-mentioned regulation in body, seals actuator system 30 sides, by liquid receiving portion 51 valve nozzles device 10 sides by body side flange 55.In body side flange 55, be formed with through hole 55a along the formation axle A direction of regulation, above-mentioned bar 33 runs through this through hole 55a and invades the inside in space 57 in body.Liquid receiving portion 51 has container-like shape, forms fluid accumulation portion 53 at recess fluid accumulation body.Nozzle bore 11a is communicated with this fluid accumulation portion 53, can make the liquid in this fluid accumulation portion 53 flow out to the fluid drips downside in nozzle bore 11a peristome.In addition, liquid supply path 63 is being communicated with space 57 in body, can be to the 57 internal feed liquid of space in this body.
Preferred: with an end of bar 33 similarly, there is the inwall on inwall, liquid receiving portion 51 and the liquid supply road 63 in space 57 in the formation body of the possibility contacting with liquid, formed or by such material covering surfaces by the material with respect to the liquid that becomes the object that drips with lyophobicity.Therefore, preferred: these regions are by coatings such as teflon, DLC, titaniums or form these structures by these materials.In addition, as the manner, in the situation that the object that drips is motlten metal, more preferably: adopt Hasiteluoyi hastelloy, titanium etc. to form liquid receiving portion 51 or body main body 61.And then, in order to suppress the oxidation of motlten metal, be preferably formed interior volume on the liquid level on top of the fluid accumulation portion 53 in space 57 in body and be full of by the inert gas of nitrogen etc., inert gas is supplied with discharge path 65 and is used to supply and the discharge of these inert gases.But, be beyond these in the situation that at the object that drips, also can remove this inert gas and supply with discharge path 65.Because the metal of existence is molten condition or is maintained molten condition in the fluid accumulation portion 53 that must make to accumulate in liquid receiving portion 51, therefore heater 59 heats body main body 61, liquid receiving portion 51 and nozzle 11.
The operation principle of the liquid dropping device then, relating to for present embodiment describes.Fig. 2 A～2D is each duty of the liquid dropping device 100 shown in presentation graphs 1 respectively.Fig. 2 A is the state before under fluid drips, represents to have completed for fluid accumulation portion 53 via liquid supply road 63 the supplementary state of liquid.Under fluid drips time, as shown in Figure 2 B, utilize actuator 31, bar 33 displacement s only in arrow B direction (side the direction on the formation axle A of regulation).In addition, in the present embodiment, be 20～40 μ m as the distance s of shift motion, the mobile needed time is 300～500 microseconds (μ sec).By the movement of this bar 33, in the liquid of such front end at bar 33, form compressional wave w as shown in Figure 2 C.There is wave energy in this compressional wave.For example, in liquid, ultrasonic washing is the washing that has utilized this wave energy.Be given the liquid 1 of this wave energy, a part, by nozzle bore 11a, is released to space outerpace as drop 1 as shown in Figure 2 D like that.In above formation, by the combination of the internal diameter of nozzle bore 11a and the shift motion s of bar 33, the diameter of drop can at random be set, and specifically, having obtained liquid-drop diameter is the drop of 30～200 μ m.
As described above, present embodiment dripping as object taking the motlten metal of such as soft solder etc.Below use Fig. 3 A and Fig. 3 B that represent enlargedly spray nozzle device 10 with the pattern identical with Fig. 1, describe for the formation that is suitable for motlten metal.In the manner, the side opening portion of dripping of nozzle bore 11a is made as to the atmosphere being formed by the inert gas of high temperature around, utilize the nitrogen of heating to be full of the side atmosphere space 19 of dripping.Thus, thereby the motlten metal dripping from nozzle bore 11a can viscosity not rise by being exposed to high-temperature atmosphere, and the so-called cuttability of drop improves.Therefore, can obtain more small drop, and, shape inhomogeneous of the motlten metal being dripped also can be suppressed.Meanwhile, also can expect to reduce the effect of adhering to of metal to the peristome periphery of nozzle bore 11a.Especially by as described above, form nozzle 11 etc. by material, the preferred corundum etc. with lyophobicity, this effect becomes more remarkable.Therefore it is applicable to, to form middle use at the projection of for example electronic component-use.In addition, as discussed previously, the fusing point that the temperature of atmosphere is made as motlten metal is more suitable above, for example, in the situation of soft solder, is preferably made as the nitrogen of 300 DEG C.By drive actuator 31 under this condition, as shown in Figure 3 B, can make the drop 1 of motlten metal drip from nozzle 11.
In the manner, spray nozzle device 10 and liquid receiving portion 51 from body 50 unload, the washing of carrying out device by removing of fluid accumulation portion 53 etc. is thus all easy.In the manner, by unloading nozzle flange 15 from body main body 61, utilize disk spring 17 to press on body main body 61 and the nozzle compressing member 13 and the nozzle 11 that are fixed also can unload from body main body 61.Meanwhile, liquid receiving portion 51 also can unload from body main body 61.In the manner, because the part of liquid in fluid accumulation portion 53 contact is set as the face of lyophobicity, so the solidfied material that liquid or motlten metal have solidified also not with set around, can easily remove.Carry out these operations, after the inside in the interior space 57 of washing body etc., utilize and combine each formation with above contrary step, finally nozzle flange 15 is fixed on to body main body 61, thus the assembling of finishing device again.
In addition, in the above embodiment, narrate for the formation direction of principal axis A situation consistent with vertical direction of the regulation of the direction of dripping as liquid.But the use pattern of the liquid dropping device the present invention relates to is not limited thereto.For other use pattern, illustrate this with the pattern same with the mode shown in Fig. 1 and be described with pattern.In addition, because each inscape and the previous homomorphosis of narration, so use identical reference marker etc. and description thereof is omitted.For example, the situation that the track that drips of drop 1 has an angle of regulation with respect to vertical direction is also considered to good situation.Fig. 4 illustrates such situation.
In the form shown in Fig. 4, represent as the formation axle A of regulation of axis of central shaft that links nozzle bore 11a center and bar 33 with respect to the tilted situation of predetermined angular α of vertical direction.In this situation, as long as the leading section of bar 33 is impregnated in fluid accumulation portion 53, just can carry out generation and the transmission for the wave energy of liquid.Therefore, can ooze liquid from the opening of nozzle bore 11a.In addition, the track that drips of liquid is not straight line, becomes from the opening portion of nozzle bore 11a and has the angle of regulation and the track that drips that is similar to conic section that starts.Therefore, by preferring in advance this track that drips, can make liquid drip along the direction different from vertical direction, and supply with drop to the desirable position of dripping.
The concrete example of the manufacturing installation of the constructed electronic unit of the liquid dropping device that then, the present invention relates to for use is narrated.Fig. 5 pattern ground represents to utilize this manufacturing installation to carry out the section of recording member resin-enclosed electronic unit.Electronic unit 3, is to configure sheet electronic component 5 in the cavity 4a that is located at substrate 4, and the parts that utilize resin filling agent 6 to carry out encapsulation to it.In this electronic unit 3, for example recess is envisioned for diameter 2.7mm, degree of depth 0.85mm.Liquid level, is confirmed to be the scope of 10 μ m as its admissible error Ad.At this, if the change of shape that supposition is not caused by surface tension, the volume that is equivalent to the admissible error of resin filling agent 6 is (2.7/2)
2× π × 0.010=0.057mm
3.If suppose that the precision that spues of general air distributor is that the proportion ρ of 0.1mg, liquid is 1, due to 1g=ρ cm
3, cm
3=mm
3× 10
3, the precision that spues before is therefore 0.1 ρ cm
3× 10
-3=0.1mm
3, be understood that the management of the volume that is equivalent to previous admissible error is more difficult.
Therefore,, according to such problem, can use the manufacturing installation of the electronic unit shown in design of graphics 6 of the present invention.This manufacturing installation 200 has: substrate delivery system 201; The pre-heating station 203, coating cloth deck 205, mensuration platform 209 and the supplementary platform 213 that in substrate delivery system 201, comprise; Distributor 207; Determinator 211; Dispenser controller 215; Operational part 217; Controller 219; Monitor 221; With the liquid dropping device 100 the present invention relates to.First substrate 4 is preheated at pre-heating station 203 on substrate delivery system 201, utilizes the distributor 207 resin by injection fillers 6 of being controlled by dispenser controller 215 at coating cloth deck 205.Now, the loading of liquid is redefined for to the amount fewer than setting.
Then, utilize determinator 211 to carry out the mensuration of the liquid level of resin filling agent 6 at mensuration platform 209, whether it is suitable, in shortage to utilize operational part 217 mensuration.Measurement results etc. are sent to controller 219 in being shown in monitor 221, are assigned the instruction of magnitude of recruitment by controller 219 for liquid dropping device 100.Supplement the substrate of platform 213 for being sent to, according to the instruction that carrys out self-controller 219, carry out liquid from the dripping, supplement of liquid dropping device 100, obtain suitable encapsulation state.The liquid dropping device 100 the present invention relates to, the drop of the diameter 100 μ m left and right of can dripping, its volume is (4/3) × π × r
3=0.004mm
3, therefore by controlling the number that drips of drop, can be with 0.004mm
3capacity of decomposition drip liquid measure adjustment several.
The concrete example of the manufacturing installation of the electronic unit that the liquid dropping device then, the present invention relates to for use builds is narrated.Fig. 7 A is the state of observing the electrode etc. of the electronic unit of the joint that forms electrode from front, and Fig. 7 B has carried out to it state of observing from the side, and pattern ground represents to utilize existing method to carry out the situation of the joint of these electrodes respectively.In electronic unit 7, be provided with electrode 7a, utilize soft solder 8 that these electrodes 7a is bonded on the substrate-side electrode 4b being arranged on substrate 4.Now, in electrode spacing such as, during lower than situation of 100 μ m etc., narrow between spacing, therefore as illustrated, soft solder paste etc. cause that the danger of so-called bridge joint (short circuit) is high.
Therefore, the device of the application of the invention drips the drop 1 as motlten metal grain repeatedly in the scope of electrode width, and temporary transient set, and then carries out Reflow Soldering (soft heat; Etc. reflow) carry out the joint of electrode.Fig. 8 A, 8B, 9A, 9B, 10A and 10B have periodically represented this operation successively.Fig. 8 A, 9A and 10A have represented electronic unit etc. with the pattern same with Fig. 7 A, and Fig. 8 B, 9B and 10B have represented electronic unit etc. with the pattern same with Fig. 7 B.As shown in Figure 8 A, in the manner, having imagined electrode spacing is the situation of 60～80 μ m.For such electrode 7a and the butted part of substrate-side electrode 4b, the motlten metal grain (drop 1) that repeatedly drips as shown in Fig. 9 A and 9B, temporarily anchors between each electrode them.Then, utilize like that as shown in Figure 10 B the irradiator 9 of the heat ray of laser instrument etc. to irradiate heat ray to engaging zones D (Figure 10 A), make clipped wire 1 melting again.By this again the clipped wire after melting solidify, can carry out electrode 7a and engage with the electricity of substrate-side electrode 4b.In addition, according to the present invention, the clipped wire of diameter lower than 50 μ m be can form, as the metal using in joint shown here, except soft solder, silver, gold (gold brazing filler metal), copper etc. it is also conceivable that.
Then, below for the second embodiment of the present invention, with reference to utilize the pattern same with Fig. 1 represent that Figure 11 of the manner narrates.In addition, in the embodiment and aforesaid the first embodiment of following narration, about same construct, use identical reference marker, omitting below for its explanation.As shown in Figure 11, the liquid dropping device 101 that the manner relates to, has the protection nozzle 21 and the second inert gas feed path 23 that are fixed with respect to nozzle flange 15, is being different from the first embodiment aspect this.Protection nozzle 21 has in the time being fixed in nozzle flange 15, with the compressing member through hole 13a of nozzle bore 11a, nozzle compressing member 13 and the coaxial guide hole 21a of the flange through hole 15b of nozzle flange 15.In addition, the front end (part relative with substrate) of protection nozzle 21 is pointed shape, has reduced the part relative with substrate.
In the case of wanting to improve the impact precision of drop 1, preferably make the peristome of nozzle bore 11a and being attached between thing of drop 1 approach.The in the situation that of first method, the inert gas of supplying with from the side atmosphere space 19 of dripping, flows to other space via the gap between substrate subtend face and the substrate of nozzle flange 15.At this, in the case of the substrate subtend face for the area more than having to a certain degree below nozzle flange 15, along with this gap turn narrow necessitates above, the increase of the blast of the inert gas here and/or the disorder of air-flow become remarkable, on the contrary, the impact precision of drop 1 likely reduces.By configuring as in the present embodiment the protection nozzle 21 with pointed shape, the indifferent gas of emitting from spray nozzle front end is known from experience the space that easily flows to other.Therefore, can there is not the extreme increase of blast, the such phenomenon of disorder of air-flow, can obtain playing the effect that precision improves.In addition, by making to protect the fore-end of nozzle 21 sharp-pointed, also can obtain following effect: though while impact at drop on substrate existence can become the material of barrier, also can suppress their impact and supply with drop 1.
In addition, for the structure of protection nozzle 21, change according to size or the material of drop using, but preferably set taking the inner diameter D n of nozzle bore 11a as benchmark.In the present invention, due to the liquid spuing from nozzle bore 11a spuing due to surface tension spheroid, so the liquid external diameter when spuing, its external diameter increases.In addition, although utilize fluctuation to carry out the formation of drop 1, in order to make this drop 1 arrive impact position, preferably give kinetic energy to a certain degree to this drop 1, can think by mobile this process of carrying out of inert gas described later, more applicable the structure of liquid dropping device.By above viewpoint, preferably: consider and the relation of external diameter and the flowing of inert gas of drop 1, about the inner diameter D g of guide hole 21a, be designed to meet the relation of Dn × 2≤Dg.In addition; in order to be suppressed at the delay of the heating nitrogen in the protection front end (tip) of nozzle 21 and the gap of substrate surface; preferred: about the outer diameter D e of protection nozzle 21; meet the relation of De≤Dg × 2; about the clearance D a of described front end and substrate, meet the relation of 0.2mm < Da≤De.
In the first embodiment, the inert gas of the nitrogen of high temperature etc. is fed into and drips in lower side space 19, and this inert gas is supplied with to being attached thing together with drop 1 via flange through hole 15b.In the manner, as the inert gas feed system for import inert gas to this lower side space 19, except the inert gas feed path 22 of configuration in the first embodiment, be also provided with the second inert gas feed path 23.In addition, in the present embodiment, similarly use nitrogen as inert gas with the first embodiment.In addition, the above-mentioned lower side space 19 of dripping, forms the part of this inert gas feed system.In the manner, the nitrogen of supplying with from nitrogen supply source 25, after being heated to set point of temperature, is separated into the first inert gas feed path 22 and the second inert gas feed path 23 through gas-heated region 26.Gas-heated region 26, is constructed as the inert gas heating unit being made up of known heating source, nitrogen can be heated to the temperature of the fusing point that exceedes drop 1.The first inert gas feed path 22 has first flow control valve 22a, is always fed into and is dripped in lower side space 19 by a certain amount of heating nitrogen in this path.Be fed into the heating nitrogen dripping in lower side space 19, towards adhesion locations guiding drop 1, be injected into substrate surface by guide hole 21a together with this drop 1.
The second inert gas feed path 23 has second adjustable valve 23a and carries out the magnetic valve 23b of the switching of moment, and heating nitrogen off and on can circulate.By opening and closing this magnetic valve 23b, can make to be fed into temporary transient or moment of the quantity delivered of heating nitrogen of guide hole 21a and to increase by dripping lower side space 19.By using magnetic valve 23b that the spray volume that heats nitrogen is temporarily increased, can make to produce air-flow in guide hole 21a, drop 1 is transported to pointed portion with the state not contacting with the inwall of guide hole 21a.As the manner, by maintaining the atmosphere of high temperature inert and carrying out the handover in the guide hole 21a of drop 1, can prevent solidifying and oxidation of drop 1.In addition, preferably: the actuation time of magnetic valve 23b, with the straight-line action moment of the bar 33 being caused by actuator 31 (regularly; Timing) synchronous or carry out corresponding to it, be preferably 10 milliseconds (msec) left and right.
The operation principle of the liquid dropping device then, relating to for present embodiment describes.Figure 12 A～12D represents respectively each duty of the liquid dropping device 101 shown in Figure 11.Figure 12 A is the state before under fluid drips, represents to have completed for fluid accumulation portion 53 by liquid supply road 63 the supplementary state of liquid.In the time of the dripping of liquid, as shown in Figure 12 B, by actuator 31, bar 33 is at only displacement s of arrow B direction (direction of the side on the formation axle A of regulation).In addition, as shown by arrows in FIG., utilize above-mentioned the first inert gas feed path 22, heating nitrogen is fed into and drips lower side space 19 inside, flows out to the outside of protection nozzle 21 by guide hole 21a.In addition, in the present embodiment, be 20～40 μ m as the distance s of shift motion, the mobile needed time is 300～500 microseconds.
By the movement of this bar 33, as shown in Figure 12 C, in the liquid of the front end of bar 33, form compressional wave w.There is wave energy in this compressional wave.For example, in liquid, ultrasonic washing is the washing that utilizes this wave energy.Be given the liquid 1 of this wave energy, a part, by nozzle bore 11a, is released to space outerpace as drop 1 as shown in Figure 12 D.Be accompanied by the action of bar 33, magnetic valve 23b can make to supply with heating nitrogen from the second inert gas feed path 23 temporarily to carry out, and makes the movement of the drop 1 in guide hole 21a easier.It is identical or with the action moment of the scope staggering of several milliseconds that the action moment (action timing) of bar 33 and magnetic valve 23b is adjusted to, but consider that roughly the same action moment to comprise in fact them carrys out drive rod 33 and magnetic valve 23b is better.In above formation, by the combination of the internal diameter of nozzle bore 11a and the shift motion s of bar 33, the diameter of drop can at random be set, and particularly, can obtain as liquid-drop diameter is the drop of 30～200 μ m.
Then, describe for the another form of the second embodiment with reference to accompanying drawing.The external diameter of drop 1 for example using becomes in less situation, for the heating nitrogen amount in order to need transferring drop 1 in guide hole 21a, also considers the situation of the impact that can not ignore the blast between leading section and the substrate of protection nozzle 21.Even such situation, required heating nitrogen amount when drop 1 is supplied with, be not suitable for according to the internal diameter of guide hole 21a and widely reduce situation be also considered.In the form shown in Figure 13, as the correspondence of the situation to such, in the opening front that arrives guide hole 21a, add the drain hole 21b that arrives guide hole 21a from the outside of protection nozzle 21.Drain hole 21b extends in the direction different from the bearing of trend of guide hole 21a, and guide hole 21a is communicated with the space of the surrounding of protection nozzle 21.By such drain hole 21b is set, produce and flow out to outside heating nitrogen from this drain hole 21b, suppress the heating nitrogen amount of the peristome that arrives guide hole 21a, can carry out the supply accurately of drop 1.
In addition, when only with this drain hole 21b, arrive in the inadequate situation of inhibition of heating nitrogen amount of substrate surface, the drainage ditch 21c of the slit-shaped of extending along guide hole 21a also can be set as shown in Figure 14, seek the expansion in the path of the outflow use that heats nitrogen.This drainage ditch 21c, in the direction different from the bearing of trend of guide hole 21a, especially in perpendicular direction extension, is communicated with the space of the surrounding of protection nozzle 21 this guide hole 21a.By with on, in the present invention, these drain holes 21b and drainage ditch 21c, hold as the drainage opening of the excess electron excess fraction that can flow out inert gas.In addition, in as the form shown in the second embodiment, also consider to reduce relative with substrate surface, to produce the protection nozzle 21 of the detention space of heating nitrogen leading section.Another form shown in Figure 15, the situation of the outer diameter D g of the fore-end of protection nozzle 21 is further dwindled in expression in this wise.Specifically, from the front end of protection nozzle 21, the scope of regulation is made as the form of tubulose.In addition, in the embodiment of above narration, carry out the switching of the second inert gas feed path with magnetic valve, but just can use the valve of known various forms as long as the valve gear that can synchronize with the piezoelectric element spuing that carries out drop 1.In addition, can not be to form by oneself protection nozzle 21 yet, but by nozzle flange 15 is implemented to various processing, undertake the effect of the protection nozzle 21 in the manner.In addition, the second inert gas feed path 23 configures as required, also can remove this path according to the characteristic of the drop 1 using etc.In addition, the length of guide hole 21a is subject to the flow of the inert gas that is fed into guide hole 21a, the impact of the spouting velocity of drop 1 while spraying from nozzle bore 11a etc.Therefore, preferably: subsidiaryly consider these various conditions, as give drop 1 and have regulation directionality, and the length of the needed regulation of amount of exercise that can spue from guide hole 21a hold.
As described above, the present invention relates to be suitable for generating the fine droplet of liquid metals and by its dripping dripping device.But applicable object of the present invention is not limited thereto, as shown in Figure 5, also can utilize as the dripping device of the liquid of resin etc.
Claims (11)
1. a liquid dropping device, is the liquid dropping device of liquid of ormal weight of dripping, and it is characterized in that having:
Liquid receiving portion, this liquid receiving portion is accumulated described liquid and is formed fluid accumulation portion;
Nozzle, this nozzle has and in described liquid receiving portion, accumulates the regional connectivity of described liquid and the nozzle bore that described liquid can pass through;
Actuator; With
Bar, an end of this bar is impregnated in described fluid accumulation portion, and the other end is supported by described actuator, can move along the formation direction of principal axis of described nozzle bore, and
Coaxial with the described formation axle of described nozzle bore and be communicated with described nozzle bore, and there is the guide hole of the length of regulation; With
Can supply with from guide hole described in the side direction being communicated with described nozzle bore the inert gas feed system of inert gas,
Described bar by described actuator can be on described formation direction of principal axis rectilinear motion, make a part for described fluid accumulation portion produce wave energy by the described rectilinear motion of described bar, described liquid drips from described nozzle bore because of described wave energy,
Described liquid is guided along the direction of dripping by flowing of described inert gas in described guide hole,
Described liquid dropping device also has:
Be formed at the side atmosphere space of dripping between nozzle flange and nozzle compressing member, described nozzle flange is configured in the side of dripping of the described liquid of the peristome of described nozzle bore, cover around the peristome of described nozzle bore, can make described peristome become inert gas atmosphere around, described nozzle compressing member makes described nozzle butt be fixed on described liquid receiving portion; With
Disk spring, the side atmosphere of dripping described in described disk spring is disposed at space is by the described nozzle flange application of force and press described nozzle and described liquid receiving portion via described nozzle compressing member and form described fluid accumulation portion.
2. liquid dropping device according to claim 1, is characterized in that, also has the heating unit that heating is present in the described liquid of described fluid accumulation portion.
3. liquid dropping device according to claim 1, is characterized in that, in described fluid accumulation portion, on the liquid level of described liquid that is present in described fluid accumulation portion, has space.
4. liquid dropping device according to claim 3, wherein, also has: can carry out to described space supply and the discharge of inert gas, the inert gas that described liquid can be remained in inert gas atmosphere is supplied with discharge path.
5. liquid dropping device according to claim 3, is characterized in that,
Also there is the liquid supply road that can supply with to described liquid receiving portion described liquid,
The madial wall in described liquid receiving portion, liquid supply road and space and the region that may contact with described liquid in described nozzle are formed by the face of lyophobicity.
6. liquid dropping device according to claim 1, is characterized in that, described actuator uses piezoelectric element.
7. liquid dropping device according to claim 1, is characterized in that, the atmosphere in the space of the side of dripping of the described liquid in described nozzle bore can maintain the temperature more than fusing point of described liquid.
8. liquid dropping device according to claim 1, is characterized in that, described nozzle is formed by corundum.
9. liquid dropping device according to claim 1, is characterized in that, described inert gas feed system can temporarily increase corresponding to the rectilinear motion of the described bar being caused by described actuator the quantity delivered of described inert gas.
10. liquid dropping device according to claim 1, it is characterized in that, described inert gas feed system also has inert gas heating unit, and described inert gas heating unit can be heated to the temperature of described inert gas the temperature of the fusing point that exceedes described liquid.
11. liquid dropping devices according to claim 1; it is characterized in that; described guide hole, in having the peristome arranging in the direction of dripping of described liquid, also has drainage opening, and described drainage opening is communicated with the space outerpace of the protection nozzle that forms described guide hole and described guide hole.
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010116912 | 2010-05-21 | ||
| JP116912/2010 | 2010-05-21 | ||
| JP2011109065A JP5553795B2 (en) | 2010-05-21 | 2011-05-16 | Liquid dripping device |
| JP109065/2011 | 2011-05-16 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410042814.1A Division CN103817393A (en) | 2010-05-21 | 2011-05-20 | Device for dripping liquid |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102248248A CN102248248A (en) | 2011-11-23 |
| CN102248248B true CN102248248B (en) | 2014-07-23 |
Family
ID=44976014
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201110132507.9A Expired - Fee Related CN102248248B (en) | 2010-05-21 | 2011-05-20 | Liquid dropping device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN102248248B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102810489B (en) * | 2012-08-17 | 2015-01-21 | 杭州士兰集成电路有限公司 | Chip packaging system, chip packaging method, injecting device, and stamping and injecting linkage device |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000294591A (en) * | 1999-04-07 | 2000-10-20 | Mitsubishi Electric Corp | Bump forming apparatus, semiconductor manufacturing apparatus and bump forming method |
| JP2001064702A (en) * | 1999-08-30 | 2001-03-13 | Hitachi Metals Ltd | Prodution of fine spherical metal powder |
| JP2001199535A (en) * | 2000-01-13 | 2001-07-24 | Mitsui High Tec Inc | Spherical article conveying device and conveying method |
| JP2009101395A (en) * | 2007-10-24 | 2009-05-14 | Seitec Co Ltd | Partial soldering apparatus |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2803328B2 (en) * | 1990-06-15 | 1998-09-24 | 三菱マテリアル株式会社 | Milling tool |
| JPH09246707A (en) * | 1996-03-12 | 1997-09-19 | Matsushita Electric Ind Co Ltd | Solder discharging device |
-
2011
- 2011-05-20 CN CN201110132507.9A patent/CN102248248B/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000294591A (en) * | 1999-04-07 | 2000-10-20 | Mitsubishi Electric Corp | Bump forming apparatus, semiconductor manufacturing apparatus and bump forming method |
| JP2001064702A (en) * | 1999-08-30 | 2001-03-13 | Hitachi Metals Ltd | Prodution of fine spherical metal powder |
| JP2001199535A (en) * | 2000-01-13 | 2001-07-24 | Mitsui High Tec Inc | Spherical article conveying device and conveying method |
| JP2009101395A (en) * | 2007-10-24 | 2009-05-14 | Seitec Co Ltd | Partial soldering apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| CN102248248A (en) | 2011-11-23 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP7541485B2 (en) | Metering system having a piezoelectric ceramic actuator. | |
| TWI409887B (en) | Rotational fill techniques for injection molding of solder | |
| CN103402774B (en) | There is the low profile MEMS thermal printhead die of dorsal part electrical connection | |
| CN101136311A (en) | Method for placing material onto a target board by means of a transfer board | |
| US8740040B2 (en) | Solder injection head | |
| CN103817393A (en) | Device for dripping liquid | |
| US20080272177A1 (en) | Conductive bonding material fill techniques | |
| CN101422763A (en) | Fluid dispensers and methods for dispensing viscous fluids with improved edge definition | |
| CN101511491A (en) | Method and apparatus for dispensing a viscous meterial on a substrate | |
| CN102446776A (en) | Method of manufacturing electronic device and electronic device | |
| US20130334290A1 (en) | Solder paste droplet ejection apparatus, patterning system having the same, and control method thereof | |
| JP6810709B2 (en) | Piezoelectric injection system and injection method with amplification mechanism | |
| CN102248248B (en) | Liquid dropping device | |
| CN100592485C (en) | Electronic component mounting method | |
| US10280571B2 (en) | Assembly and method for manufacturing a piston rod and a tamper bar | |
| US8167408B2 (en) | Ink jet recording head, and method for manufacturing ink jet recording head | |
| CN101978803A (en) | Apparatus and method for fluid dispensing | |
| JP2008260019A (en) | Viscous fluid application method | |
| CN104871300B (en) | The manufacture method of electronic component mounting equipment and electronic component | |
| CN107300033A (en) | Mould component and its manufacture with underground | |
| TWI717042B (en) | Underfill method and underfill apparatus of semiconductor package | |
| US20140292939A1 (en) | Liquid ejection head and production process thereof | |
| JP2010225732A (en) | Liquid droplet ejection head, and liquid droplet ejection device | |
| CN102069641A (en) | Liquid-ejecting recording head and method of producing the same | |
| KR100258382B1 (en) | Method for manufacturing a solder ball and device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20140723 Termination date: 20190520 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |