CN102244339A - Installation device for a plurality of laser windows distributed on periphery - Google Patents
Installation device for a plurality of laser windows distributed on periphery Download PDFInfo
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- CN102244339A CN102244339A CN 201110157904 CN201110157904A CN102244339A CN 102244339 A CN102244339 A CN 102244339A CN 201110157904 CN201110157904 CN 201110157904 CN 201110157904 A CN201110157904 A CN 201110157904A CN 102244339 A CN102244339 A CN 102244339A
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Abstract
The invention discloses an installation device for a plurality of laser windows distributed on periphery, relates to the field of high-power pulse laser devices and solves the problems that the laser windows have short use time and need to be replaced, dismounted and regulated frequently to result in time-consuming troubles because the damage or failure situation of the traditional laser window occurs when the output power of the laser device is up to above several kilowatts. The installation device comprises an adjustable base, a turnplate mirror base, a reference shaft, a window press cover, an adjusting bolt, an external sealing ring, an internal sealing ring and a window sealing ring; the turnplate mirror base is connected with the adjustable base via the reference shaft; the internal sealing ring and the external sealing ring are adopted to seal opposite planes of the adjustable base and the turnplate mirror base; the plurality of laser windows are installed on the same plane outside the turnplate mirror base via the window press cover; the window sealing ring is used for sealing the plurality of the laser windows and the turnplate mirror base; the adjusting bolt can be used for realizing alignment adjustment to the laser window by adjusting the adjustable base. Due to the adoption of the installation device for the plurality of laser windows distributed on the periphery, the use time of the laser windows after installation is prolonged, and the mounting/dismounting and adjusting times are reduced.
Description
Technical field
The present invention relates to high power pulsed laser, be specifically related to the pulsed gas laser output window device of average power more than thousands of watts.
Background technology
The high power pulse gas laser adopts " flat-recessed " optical stabilization chamber more, is made of two speculums, and wherein one is that material is the concave spherical surface completely reflecting mirror of Cu, and another piece is that material is that the planar section speculum of ZnSe promptly is a laser window.Usually, laser window also is a potted component of the airtight working chamber of laser, is installed on the laser optical support front end riser by certain constructional device.At present found such problem in the research, when the power output of pulsed gas laser reached more than thousands of watts, laser window obvious impairment occurred or damages phenomenon, and along with the increase of power, laser window shortens service time greatly.With high power pulse CO
2Laser is an example, and when laser output average power reached 8kW, continuous emission excimer laser a few minutes, its ZnSe window phenomenon promptly occurred damaging at the reflectance coating of inboard, chamber.Do not taking under any technical measures, the window of the pulsed gas laser of average power 8kW accumulative total generally can not surpass (30 minutes, window accumulative total service time of the pulsed gas laser of average power 10kW generally can be above 15 minutes) service time.Also have a special example to be: at pulse CO
2When the laser window inner side plane was subjected to discharging sputter and gaseous impurity pollution, when launching 5 minutes continuously with the 10kW average power, phenomenon appearred bursting in this laser window.
For solving the damage problem of above-mentioned laser window, people have taked a lot of measures, as: improve laser window plated film damage threshold, to laser window holder water flowing cooling, to laser window inner side plane blow antifouling and cooling etc., these measures prolong laser window service time to some extent, but also are difficult to make average power can totally use the time more than two hours at 10kW magnitude laser window.Because the replacing of laser window relates to and is inflated to atmospheric pressure, dismounting, installation, light path adjustment, vacuumizes and re-fill step such as working gas, particularly the light path adjustment also needs than large space and servicing unit, and it is very big to implement difficulty under the restricted condition of the device space.This frequent and window trouble is changed operation and is had a strong impact on the practical application of high power pulse gas laser aspect engineering.
Summary of the invention
The present invention solves existing laser window to damage or the damage phenomenon because of appearance when the power output of laser reaches more than thousands of watts, cause the service time after the laser window once mounting short, the problem that needs frequent replacing, dismounting, the time-consuming trouble of adjustment provides the erecting device of a plurality of laser windows of a kind of circle distribution.
The erecting device of a plurality of laser windows of circle distribution, this device comprises adjustable pedestal, the rotating disk microscope base, reference axis, the window gland, adjust bolt, exterior seal ring, inner seal ring and window sealing ring, described rotating disk microscope base is connected with adjustable pedestal by reference axis, adopt inner seal ring and exterior seal ring sealing between the opposite planar of described adjustable pedestal and rotating disk microscope base, a plurality of laser windows are installed on the same plane, the rotating disk microscope base outside by the window gland, adopt the sealing of window sealing ring between a plurality of laser windows and the rotating disk microscope base, described adjustment bolt is by adjusting the aligning adjustment of adjustable pedestal realization to laser window.
Principle of the present invention: a plurality of laser windows of the present invention are circularly and evenly distributed, and are that benchmark is installed on the outer side plane of rotating disk microscope base by the window gland seal with the plane that is coated with the partial reflection film; The rotating disk microscope base links to each other with adjustable pedestal by reference axis, can be that benchmark rotates with respect to adjustable pedestal with the axle center, be provided with two sealing rings that diameter is different and concentric is installed at the rotating disk microscope base and the relative interplanar of adjustable pedestal, a light hole that communicates with the airtight working chamber of laser on light hole corresponding with a plurality of laser windows on the rotating disk microscope base and the adjustable pedestal is included in the ring packing space; Adjustable pedestal is bolted on the laser optical support front end riser by adjustment.The eyeglass of laser optical resonant cavity needs to aim at adjustment after installation, aligning adjustment of the present invention is implemented adjustable pedestal by adjusting bolt.Because a plurality of laser windows are fixedly mounted on the rotating disk microscope base, and the rotating disk microscope base connects the change of realization integral position by reference axis and adjustable pedestal, the space angle variation that makes each laser window is identical with the space angle variation of adjustable pedestal, therefore can realize adjustment to laser window to the adjustment of adjustable pedestal.And because a plurality of laser windows all position installation with the same plane of rotating disk microscope base, therefore their space angle also is identical, carry out after optical resonator aim to adjust with arbitrary laser window, other laser window also has identical alignment precision after turning to this position.
Beneficial effect of the present invention: a plurality of laser windows of the present invention are installed in formed parts on the rotating disk microscope base by the window gland and can whole being assembled on the reference axis or from reference axis dismantle, a plurality of window integral body are installed, are dismantled and adjust, (the making laser window once) time of installing and using is several times (the laser window numbers of this multiple for installing) of original (window is installed), the dismounting number of times is original part in identical service time in other words, significantly reduce dismounting and adjusted number of times, improved the engineering practical value of laser.
Description of drawings
Fig. 1 is the structural front view of the erecting device of a plurality of laser windows of circle distribution of the present invention,
Fig. 2 is the A-A profile of the erecting device of a plurality of laser windows of circle distribution of the present invention.
Among the figure: 1, adjustable pedestal, 2, the rotating disk microscope base, 3, reference axis, 4, laser window, 5, the window gland, 6, adjust bolt, 7, exterior seal ring, 8, inner seal ring, 9, the window sealing ring.
Embodiment
Embodiment one, in conjunction with Fig. 1 and Fig. 2 present embodiment is described, the erecting device of a plurality of laser windows of circle distribution, this device comprises adjustable pedestal 1, rotating disk microscope base 2, reference axis 3, window gland 5, adjust bolt 6, exterior seal ring 7, inner seal ring 8 and window sealing ring 9, described rotating disk microscope base 2 is connected with adjustable pedestal 1 by reference axis 3, adopt inner seal ring 8 and exterior seal ring 7 sealings between the opposite planar of described adjustable pedestal 1 and rotating disk microscope base 2, a plurality of laser windows 4 are installed on the same plane, rotating disk microscope base 2 outsides by window gland 5, adopt 9 sealings of window sealing ring between a plurality of laser windows 4 and the rotating disk microscope base 2, described adjustment bolt 6 is by adjusting the aligning adjustment that adjustable pedestal 1 is realized laser window 4.
The described device of present embodiment also comprises the laser optical support, and described adjustable pedestal 1 is fixed on the front end riser of laser optical support by adjusting bolt 6.
This position of implementing each laser window 4 of described rotating disk microscope base 2 installations all is provided with light hole, described adjustable pedestal 1 is provided with a light hole with the same diameter circumference that rotating disk microscope base 2 is installed laser window 4 positions, and this light hole communicates with the airtight working chamber of laser.
Exterior seal ring 7 described in the present embodiment is the different and identical sealing ring in installation axle center of diameter with inner seal ring 8.
Adjustable pedestal 1 described in the present embodiment can be fixedlyed connected by modes such as interference fit, retainingf key or pins with reference axis 3.Rotating disk microscope base 2 and reference axis 3 can adopt high-precision gap to cooperate or bearing is connected, and the axle head head can adopt that nut or axle sleeve fix rotating disk microscope base 2 etc.
Embodiment two, present embodiment are the embodiment of the erecting device of a plurality of laser windows of embodiment one described circle distribution: present embodiment is an example with eight laser windows of once mounting:
Described eight laser windows 4 are benchmark with the plane that is coated with the partial reflection film all, on the same plane, the outside that is fixedly mounted on rotating disk microscope base 2 by eight laser window glands 5, and adopt window sealing ring 9 to implement seal approach between laser window 4 and the rotating disk microscope base 2.The position that laser window 4 is installed on the described rotating disk microscope base 2 all is processed with light hole, rotating disk microscope base 2 links to each other with adjustable pedestal 1 by reference axis 3, be fixedlying connected of can not moving axially or circumferentially rotate between adjustable pedestal 1 and the reference axis 3, between rotating disk microscope base 2 and reference axis 3 and the adjustable pedestal 1 for can not move axially being connected of can only circumferentially rotating.Described adjustable pedestal 1 is processed with a light hole installing on the same diameter circumference of the window's positions with rotating disk microscope base 2, makes rotating disk microscope base 2 can make arbitrary window of its installation be in coaxial corresponding position with this light hole by rotating.Adopt inner seal ring 8 and exterior seal ring 7 between the opposite planar of described adjustable pedestal 1 and rotating disk microscope base 2, light hole on the adjustable pedestal 1 and 8 light holes on the rotating disk microscope base 2 are included in the annular sealed space, no matter be static or all be in sealing state when rotating.Described adjustable pedestal 1 is installed on the front end riser of laser optical support, during installation its light hole adjusted to the laser optical resonant cavity after the completely reflecting mirror opposite position, and be connected and sealed (being connected) as adopting metal bellows with the laser works cavity.Adjustable pedestal 1 is installed on the laser optical support front end riser by adjustment bolt 6 and implements light path simultaneously and adjust function.
The described rotating disk microscope base 2 of present embodiment can adopt manually or automated manner with respect to the rotating function of adjustable pedestal 1 and reference axis 3, and between rotating disk microscope base 2 and adjustable pedestal 1, location structure is set, use the position that stops when rotating by turns with the laser window of installing on the control rotating disk microscope base 2.Manual mode for example can be provided with turning handle on rotating disk microscope base 2; Automated manner for example adopts the multiple kinds of drive such as belt, sprocket wheel, gear, can both realize with any type of drive such as electricity, gas, liquid.
For reducing the window degree of injury, improve window service time and the technical measures taked all can continue to adopt in the present embodiment for laser window of original installation.The antifouling cooling provision of air blowing as to laser window 4 plating partial reflection films can add the light hole place that is located on the adjustable substrate seat 1, and arbitrary laser window 4 is turned to when use this position can both be arrived by air-blowing.All can add the water flowing cooling provision as the correct position in rotating disk microscope base 2 and window gland 5 structures.
Be the octuple that originally only were installed 4 service times of laser window the service time after laser window 4 once mounting of the present invention, increased considerably the service time of laser window 4 once mounting.Described eight laser windows 4 are installed in formed parts on the rotating disk microscope base 2 by eight window glands 5, but integral installation is fitted on the reference axis 3 or from reference axis 3 and disassembles in use, this invention makes laser window in certain service time installation or removal then also can be described and adjust number of times and reduce significantly, as install eight laser windows its to adjust number of times be that 1/8th of a laser window is installed.
The invention is not restricted to install eight laser windows, the condition that can allow at laser structure and satisfy the laser window that more or lesser amt are installed under the actual instructions for use.The seal approach that adopts in the device of the present invention also is not limited to the sealing ring form mentioned in the present embodiment, and other effective seal means all may be used among the present invention.
Claims (6)
1. the erecting device of a plurality of laser windows of circle distribution, comprise adjustable pedestal (1), rotating disk microscope base (2), reference axis (3), window gland (5), adjust bolt (6), exterior seal ring (7), inner seal ring (8) and window sealing ring (9), it is characterized in that, described rotating disk microscope base (2) is connected with adjustable pedestal (1) by reference axis (3), adopt the sealing of inner seal ring (8) and exterior seal ring (7) between the opposite planar of described adjustable pedestal (1) and rotating disk microscope base (2), a plurality of laser windows (4) are installed on the same plane, rotating disk microscope base (2) outside by window gland (5), adopt window sealing ring (9) sealing between a plurality of laser windows (4) and the rotating disk microscope base (2), described adjustment bolt (6) is by adjusting the aligning adjustment of adjustable pedestal (1) realization to laser window (4).
2. the erecting device of a plurality of laser windows of circle distribution according to claim 1 is characterized in that, the position of each laser window (4) that described rotating disk microscope base (2) is installed all is provided with light hole.
3. the erecting device of a plurality of laser windows of circle distribution according to claim 1 is characterized in that, described adjustable pedestal (1) is provided with a light hole installing on the same diameter circumference of laser window (4) position with rotating disk microscope base (2).
4. the erecting device of a plurality of laser windows of circle distribution according to claim 1 is characterized in that, described exterior seal ring (7) is the sealing ring that diameter is different and the axle center is identical with inner seal ring (8).
5. the erecting device of a plurality of laser windows of circle distribution according to claim 1 is characterized in that, between described adjustable pedestal (1) and the reference axis (3) by interference fit, retainingf key or sell and fixedly connected.
6. the erecting device of a plurality of laser windows of circle distribution according to claim 1 is characterized in that, cooperates by high-precision gap between described rotating disk microscope base (2) and the reference axis (3) or bearing circumferentially is rotationally connected.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110157904A CN102244339B (en) | 2011-06-13 | 2011-06-13 | Installation device for a plurality of laser windows distributed on periphery |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110157904A CN102244339B (en) | 2011-06-13 | 2011-06-13 | Installation device for a plurality of laser windows distributed on periphery |
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| CN102244339A true CN102244339A (en) | 2011-11-16 |
| CN102244339B CN102244339B (en) | 2012-09-19 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201110157904A Expired - Fee Related CN102244339B (en) | 2011-06-13 | 2011-06-13 | Installation device for a plurality of laser windows distributed on periphery |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104966981A (en) * | 2015-07-14 | 2015-10-07 | 京东方科技集团股份有限公司 | Laser device |
| CN108847568A (en) * | 2018-06-01 | 2018-11-20 | 武汉华星光电半导体显示技术有限公司 | Excimer laser and its laser window element replacement method |
| CN111934167A (en) * | 2020-08-19 | 2020-11-13 | 京东方科技集团股份有限公司 | Excimer laser annealing system |
Citations (3)
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|---|---|---|---|---|
| CN2919613Y (en) * | 2006-01-13 | 2007-07-04 | 中国科学院长春光学精密机械与物理研究所 | Structure for keeping stability of laser cavity resonator |
| CN101431208A (en) * | 2008-12-08 | 2009-05-13 | 中国科学院长春光学精密机械与物理研究所 | Output window switching mechanism used for alternation output of laser with two and above kinds of wavelength |
| US20090180503A1 (en) * | 2008-01-10 | 2009-07-16 | Mitsubishi Electric Corporation | Laser oscillator |
-
2011
- 2011-06-13 CN CN201110157904A patent/CN102244339B/en not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2919613Y (en) * | 2006-01-13 | 2007-07-04 | 中国科学院长春光学精密机械与物理研究所 | Structure for keeping stability of laser cavity resonator |
| US20090180503A1 (en) * | 2008-01-10 | 2009-07-16 | Mitsubishi Electric Corporation | Laser oscillator |
| CN101431208A (en) * | 2008-12-08 | 2009-05-13 | 中国科学院长春光学精密机械与物理研究所 | Output window switching mechanism used for alternation output of laser with two and above kinds of wavelength |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104966981A (en) * | 2015-07-14 | 2015-10-07 | 京东方科技集团股份有限公司 | Laser device |
| CN104966981B (en) * | 2015-07-14 | 2018-03-13 | 京东方科技集团股份有限公司 | Laser |
| US10133061B2 (en) | 2015-07-14 | 2018-11-20 | Boe Technology Group Co., Ltd. | Laser device |
| CN108847568A (en) * | 2018-06-01 | 2018-11-20 | 武汉华星光电半导体显示技术有限公司 | Excimer laser and its laser window element replacement method |
| CN111934167A (en) * | 2020-08-19 | 2020-11-13 | 京东方科技集团股份有限公司 | Excimer laser annealing system |
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| CN102244339B (en) | 2012-09-19 |
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