CN102230825A - Posture correction system using phase offset interference technology - Google Patents
Posture correction system using phase offset interference technology Download PDFInfo
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- CN102230825A CN102230825A CN2011100535614A CN201110053561A CN102230825A CN 102230825 A CN102230825 A CN 102230825A CN 2011100535614 A CN2011100535614 A CN 2011100535614A CN 201110053561 A CN201110053561 A CN 201110053561A CN 102230825 A CN102230825 A CN 102230825A
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Abstract
The invention relates to a posture correction system using a phase offset interference technology, which belongs to the technical field of precise measurement and correction technologies. The gesture correction system consists of an X axis plane phase offset interferometer, a Y axis plane phase offset interferometer, a posture adjusting mechanism, a measuring angle lens and a control system, wherein the X axis plane phase offset interferometer and the Y axis plane phase offset interferometer are used for acquiring the posture change of a measured motion system by using the change of angles at which the measuring angle lens surrounds the X axis, the Y axis and the Z axis of a right angle coordinate system, converting three angle change values into a voltage signal and sending the voltage signal into the control system; and the control system is used for performing coordinate transform calculation on the three angle change values and controlling the posture adjusting mechanism to act according to a calculation result to realize the posture correction of the measured motion system. The posture correction system has a simple structure, low cost and high measurement precision and control precision, and is easy to operate, the turning angle change values of three coordinate axes can be simultaneously measured by using the two plane phase offset interferometers, and postures can be corrected.
Description
Technical field
The present invention relates to a kind of attitude update the system of application phase skew interference technique, belong to precision measurement and correction technique field.
Background technology
The phase deviation interference technique has the advantages such as influence that measuring speed is quick, the phase measurement accuracy is higher, noiseproof feature is strong, measurement result is not subjected to the background light intensity, is widely used in the measurement of interference wave surface.In wavefront measurement, the phase deviation interference system generally adopts CCD camera sampling interference image, utilizes digital image processing techniques further to improve resolution characteristic and the measurement level of measuring the corrugated phase place.
Yet in measuring because the existence of guiding error; in the measuring object motion attitude can take place usually changes; the final accuracy that influences measurement result, thus athletic posture to accurately measure and compensate correction significant at aspects such as motion control and accuracy of measurement liftings.
Summary of the invention
The objective of the invention is in order to solve because the inaccurate problem of measurement result that the variation of measuring object attitude produces proposes the attitude update the system that a kind of application phase is offset interference technique.
The present invention is achieved by the following technical solutions.
The attitude update the system of a kind of application phase skew interference technique of the present invention, its peripherals is tested kinematic system, is made up of X-axis plane phase deviation interferometer, Y-axis plane phase deviation interferometer, attitude-adjusting system, measurement angle mirror and control system;
Measuring angle mirror is the orthogonal measuring mirror surface, horizontal positioned also is fixedly mounted on the tested kinematic system, and the minute surface direction that angle mirror is measured in definition is an X-direction, and another minute surface direction is a Y direction, direction perpendicular to surface level is a Z-direction, forms rectangular coordinate system;
The measuring beam of X-axis plane phase deviation interferometer on surface level perpendicular to the Y-axis minute surface direction incident of measuring angle mirror, perpendicular to the X-axis minute surface direction incident of measuring angle mirror, both form orthogonal coordinate system to the measuring beam of Y-axis plane phase deviation interferometer on surface level;
X-axis plane phase deviation interferometer and Y-axis plane phase deviation interferometer change around the attitude that the angle of three of rectangular coordinate system X, Y, Z changes to obtain tested kinematic system by measuring angle mirror, wherein X plane phase deviation interferometer measurement kinematic system is around the angle changing value of Y, Z axle, Y plane phase deviation interferometer measurement kinematic system is around the angle changing value of X, Z axle, get two plane phase deviation interferometer measurements around the mean value of Z shaft angle degree changing value as angle changing value around the Z axle;
Three angle changing values of the tested kinematic system that X-axis plane phase deviation interferometer and Y-axis plane phase deviation interferometer will obtain become voltage signal and send into control system, control system is carried out coordinate transform calculating and according to the action of result of calculation control attitude-adjusting system, is realized the attitude correction to tested kinematic system three angle changing values;
The interference light source of above-mentioned X-axis plane phase deviation interferometer and Y-axis plane phase deviation interferometer is a laser, and interference system adopts the interference wave surface of directional light, and the size of interference wave surface is decided by the accuracy requirement that takes measurement of an angle;
Two of above-mentioned measurement angle mirror measure the face sizes all greater than the bore of sharing the same light of the plane phase deviation interferometer of its corresponding incident direction;
Above-mentioned attitude is adjusted flexible structure or the motion form that topworks is a machinery, and this adjusting mechanism is the flexible hinge form when adopting flexible structure, and this adjusting mechanism then adopts the form of the rotational structure of single-point support when adopting motion; This topworks can adjust the variation of tested kinematic system attitude, and the drive part that attitude is adjusted topworks is piezoelectric device or displacement generator.
Beneficial effect
The present invention is simple in structure, easy to operate, cost is low, measure and the control accuracy height, adopt two plane phase deviation interferometers can measure the corner changing value of three coordinate axis simultaneously, and can realize the attitude correction, solved in the geometric measurement small attitude owing to tested motion object and changed and cause final measurement inaccurate problem.
Description of drawings
Fig. 1 is a structural representation of the present invention;
Wherein, 1 for measuring angle mirror, and 2 is X-axis plane phase deviation interferometer, and 3 is Y-axis plane phase deviation interferometer, and 4 is attitude-adjusting system, and 5 is control system, and 6,7 are respectively the direction of measurement of X, Y phase deviation interferometer;
Fig. 2 is the fundamental diagram of midplane phase deviation interferometer of the present invention;
Wherein, wherein 8 is LASER Light Source, and 9 is lens combination, and 10 is light splitting piece, and 11 for measuring mirror, and 12 is phase shifter and reference mirror, and 13 is imager and detector, and 14 is phase shifter direction of motion;
Fig. 3 is the schematic diagram of Phase Shifting Interferometer with Nanometer Accuracy angle changing value of the present invention.
Embodiment
The present invention will be further described below in conjunction with drawings and Examples.
Embodiment
A kind of attitude update the system of application phase skew interference technique, be applied to the attitude measurement of kinematic system in the geometric sense coordinate measuring system and correction in real time, as shown in Figure 1, form by X-axis plane phase deviation interferometer, Y-axis plane phase deviation interferometer, attitude-adjusting system, measurement angle mirror and control system;
Measuring angle mirror is the orthogonal measuring mirror surface, horizontal positioned also is fixedly mounted on the tested kinematic system, move with tested kinematic system, the minute surface direction that angle mirror is measured in definition is an X-direction, another minute surface direction is a Y direction, direction perpendicular to surface level is a Z-direction, forms rectangular coordinate system;
The measuring beam of X-axis plane phase deviation interferometer on surface level perpendicular to the Y-axis minute surface direction incident of measuring angle mirror, perpendicular to the X-axis minute surface direction incident of measuring angle mirror, both form orthogonal coordinate system to the measuring beam of Y-axis plane phase deviation interferometer on surface level;
X-axis plane phase deviation interferometer and Y-axis plane phase deviation interferometer change around the attitude that the angle of three of rectangular coordinate system X, Y, Z changes to obtain tested kinematic system by measuring angle mirror, wherein X plane phase deviation interferometer measurement kinematic system is around the angle changing value of Y, Z axle, Y plane phase deviation interferometer measurement kinematic system is around the angle changing value of X, Z axle, get two plane phase deviation interferometer measurements around the mean value of Z shaft angle degree changing value as angle changing value around the Z axle;
Three angle changing values of the tested kinematic system that X-axis plane phase deviation interferometer and Y-axis plane phase deviation interferometer will obtain become voltage signal and send into control system, control system is carried out coordinate transform calculating and according to the action of result of calculation control attitude-adjusting system, is realized the attitude correction to tested kinematic system three angle changing values;
Above-mentioned X-axis plane phase deviation interferometer and Y-axis plane phase deviation interferometer all adopt safe graceful Green's formula interferometer, and designing its clear aperture is 40mm, and the single face level crossing size height of measuring angle mirror is 60mm, and width is 200mm.
Above-mentioned attitude is adjusted the form that topworks adopts motor-driven flexible hinge structure, can adjust the variation of tested kinematic system attitude, and attitude is adjusted the drive part of topworks for being motor;
Plane phase deviation interferometer is by LASER Light Source, lens combination, light splitting piece, measure mirror, phase shifter and reference mirror, imager and detector constitute, its principle of work as shown in Figure 2, driving reference mirror by phase shifter makes in the interferometer reference beam do along optical axis direction equidistantly mobile in interference periods 2 π, phase shifter direction of motion is shown among Fig. 2 14, the relative detector of equal thick interference fringe can produce regular translation, corresponding each moving can obtain a width of cloth interference image, by extracting the light distribution information of this group interference image, synthesize to restore and calculate, can accurately obtain the pattern value on tested corrugated; The Measurement Phase of arbitrfary point on the interferogram on the corrugated that the Phase Shifting Interferometer with Nanometer Accuracy method can obtain, this information comprise self pattern of measure introducing amount of phase modulation and measurement face between reference mirror and the measurement face;
A kind of attitude update the system of application phase skew interference technique, the principle of its Phase Shifting Interferometer with Nanometer Accuracy angle changing value is:
As shown in Figure 3, when measurement face small attitude takes place in interference system changed, its measurement face can make around the rotation of X, Y-axis that striped changes on the interferogram.When angle changing was very little, himself pattern can be thought and not change in the interferogram, changes the variation that is equal to amount of phase modulation at interference image, promptly interferes the density and the rotation of striped;
With the interferogram horizontal direction is X-axis, and vertical direction is that Y-axis is set up two-dimentional rectangular coordinate system, with measuring the phase value of putting on the initial interference figure as formulate is:
φ wherein
i(x y) is the phase place of arbitrfary point on the interferogram,
Be the amount of phase modulation of introducing, σ (x, y) the pattern phase place of measurement face.If the relative original state of measurement face has a small attitude to change, then respective change can take place in interference fringe.The phase place of calculating before changing and variation back interferogram respectively can obtain:
φ wherein
1(x y) is Measurement Phase before changing,
Amount of phase modulation before changing, φ
2(x y) is Measurement Phase after changing,
Change the back amount of phase modulation;
Two formulas are subtracted each other this measurement point phase differential that causes that obtains owing to the variation of the face of measurement attitude:
So far can calculate the phase difference value on two corrugateds before and after attitude changes.Know that by principle of interference measure phase difference relative reference point optical path axis is h=λ φ/4 π to height relationships, λ is the measuring light wavelength.The height value of the variation that the measurement face that obtains is like this had a few.Obtain the corresponding X of interference image, Y coordinate by the way of demarcating, the height difference of each phase vegetarian refreshments correspondence is the Z coordinate, set up plane, space, the space normal of trying to achieve the plane can obtain the angle that the plane changes, and has finally obtained the angular metric of the part attitude variation of the face of measuring.Need explanation measurement face to change around the angle of the direction of optical axis Z and can not show on interferogram, the single interference system is the angle that changes around X, Y-axis of energy measurement only.
The above is preferred embodiment of the present invention, and the present invention should not be confined to the disclosed content of this embodiment and accompanying drawing.Everyly do not break away from the equivalence of finishing under the spirit disclosed in this invention or revise, all fall into the scope of protection of the invention.
Claims (8)
1. the attitude update the system of application phase skew interference technique, its peripherals is tested kinematic system, form by X-axis plane phase deviation interferometer, Y-axis plane phase deviation interferometer, attitude-adjusting system, measurement angle mirror and control system, it is characterized in that:
Measuring angle mirror is the orthogonal measuring mirror surface, horizontal positioned also is fixedly mounted on the tested kinematic system, and the minute surface direction that angle mirror is measured in definition is an X-direction, and another minute surface direction is a Y direction, direction perpendicular to surface level is a Z-direction, forms rectangular coordinate system;
The measuring beam of X-axis plane phase deviation interferometer on surface level perpendicular to the Y-axis minute surface direction incident of measuring angle mirror, perpendicular to the X-axis minute surface direction incident of measuring angle mirror, both form orthogonal coordinate system to the measuring beam of Y-axis plane phase deviation interferometer on surface level;
X-axis plane phase deviation interferometer and Y-axis plane phase deviation interferometer change around the attitude that the angle of three of rectangular coordinate system X, Y, Z changes to obtain tested kinematic system by measuring angle mirror, wherein X plane phase deviation interferometer measurement kinematic system is around the angle changing value of Y, Z axle, Y plane phase deviation interferometer measurement kinematic system is around the angle changing value of X, Z axle, get two plane phase deviation interferometer measurements around the mean value of Z shaft angle degree changing value as angle changing value around the Z axle;
Three angle changing values of the tested kinematic system that X-axis plane phase deviation interferometer and Y-axis plane phase deviation interferometer will obtain become voltage signal and send into control system, control system is carried out coordinate transform calculating and according to the action of result of calculation control attitude-adjusting system, is realized the attitude correction to tested kinematic system three angle changing values.
2. the attitude update the system of a kind of application phase skew interference technique according to claim 1, it is characterized in that: the interference light source of described X-axis plane phase deviation interferometer and Y-axis plane phase deviation interferometer is a laser, interference system adopts the interference wave surface of directional light, and the size of interference wave surface is decided by the accuracy requirement that takes measurement of an angle.
3. the attitude update the system of a kind of application phase skew interference technique according to claim 1 is characterized in that: two of described measurement angle mirror measure the face sizes all greater than the bore of sharing the same light of the plane phase deviation interferometer of its corresponding incident direction.
4. the attitude update the system of a kind of application phase skew interference technique according to claim 1, it is characterized in that: it is the mechanicalness flexible structure of flexible hinge form that described attitude is adjusted topworks.
5. the attitude update the system of a kind of application phase skew interference technique according to claim 1 is characterized in that: described attitude is adjusted the rotational structure form of topworks for adopting single-point to support.
6. according to the attitude update the system of claim 4 or 5 described a kind of application phase skew interference techniques, it is characterized in that: the drive part that described attitude is adjusted topworks is piezoelectric device or displacement generator.
7. the attitude update the system of a kind of application phase skew interference technique according to claim 6, it is characterized in that: the drive part that described attitude is adjusted topworks is a motor.
8. the attitude update the system of a kind of application phase skew interference technique according to claim 1, it is characterized in that: described X-axis plane phase deviation interferometer and Y-axis plane phase deviation interferometer are safe graceful Green's formula interferometer.
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104634459A (en) * | 2013-11-07 | 2015-05-20 | 南京理工大学 | Phase-shifting and phase-tilting switchable dual-mode interference measuring device and measuring method thereof |
| CN107167097A (en) * | 2017-06-01 | 2017-09-15 | 中国航发湖南动力机械研究所 | Corner measuring apparatus |
| CN109947141A (en) * | 2019-04-15 | 2019-06-28 | 中国航空工业集团公司北京长城计量测试技术研究所 | Optics balancing method micro-nano kinematic system attitude-control device |
| CN111623775A (en) * | 2020-05-15 | 2020-09-04 | 天津时空经纬测控技术有限公司 | Vehicle attitude measurement system, method, device, and storage medium |
| JP2022504734A (en) * | 2018-10-12 | 2022-01-13 | マジック リープ， インコーポレイテッド | Staging system to verify the accuracy of the motion tracking system |
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| US6020964A (en) * | 1997-12-02 | 2000-02-01 | Asm Lithography B.V. | Interferometer system and lithograph apparatus including an interferometer system |
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| US6020964A (en) * | 1997-12-02 | 2000-02-01 | Asm Lithography B.V. | Interferometer system and lithograph apparatus including an interferometer system |
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Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104634459A (en) * | 2013-11-07 | 2015-05-20 | 南京理工大学 | Phase-shifting and phase-tilting switchable dual-mode interference measuring device and measuring method thereof |
| CN104634459B (en) * | 2013-11-07 | 2017-09-22 | 南京理工大学 | Phase shift and mutually incline changeable double mode interferometric measuring means and its measuring method |
| CN107167097A (en) * | 2017-06-01 | 2017-09-15 | 中国航发湖南动力机械研究所 | Corner measuring apparatus |
| JP2022504734A (en) * | 2018-10-12 | 2022-01-13 | マジック リープ， インコーポレイテッド | Staging system to verify the accuracy of the motion tracking system |
| JP7434303B2 (en) | 2018-10-12 | 2024-02-20 | マジック リープ， インコーポレイテッド | Staging system for verifying the accuracy of movement tracking systems |
| CN109947141A (en) * | 2019-04-15 | 2019-06-28 | 中国航空工业集团公司北京长城计量测试技术研究所 | Optics balancing method micro-nano kinematic system attitude-control device |
| CN109947141B (en) * | 2019-04-15 | 2021-11-30 | 中国航空工业集团公司北京长城计量测试技术研究所 | Attitude control device of optical balance method micro-nano motion system |
| CN111623775A (en) * | 2020-05-15 | 2020-09-04 | 天津时空经纬测控技术有限公司 | Vehicle attitude measurement system, method, device, and storage medium |
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Application publication date: 20111102 |