CN102205583A - Method for manufacturing polyurethane guide wheel used for cutting silicon wafer - Google Patents

Method for manufacturing polyurethane guide wheel used for cutting silicon wafer Download PDF

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Publication number
CN102205583A
CN102205583A CN201110030239XA CN201110030239A CN102205583A CN 102205583 A CN102205583 A CN 102205583A CN 201110030239X A CN201110030239X A CN 201110030239XA CN 201110030239 A CN201110030239 A CN 201110030239A CN 102205583 A CN102205583 A CN 102205583A
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polyurethane
mould
liquid material
anchor ear
guide wheel
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CN102205583B (en
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吴伟峰
汤卫东
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Changzhou Jun He Science and Technology Co., Ltd.
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吴伟峰
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Abstract

The invention relates to a method for manufacturing a polyurethane guide wheel used for cutting a silicon wafer. The method comprises the following steps: mixing 0.5-1.0 part by weight of carbodiimide and 3-5 parts by weight of calcium sulfate whisker with 100 parts by weight of polyether polyol; putting the mixture into a reactor, and then stirring, heating and dehydrating in the reactor; adding 30-50 parts by weight of isocyanate into the reactor, thereby performing polymerization and acquiring a prepolymer; de-foaming the prepolymer; mixing the prepared de-foamed prepolymer with a liquid polyurethane curing agent at a ratio of 100:(15-30) in a casting machine, thereby acquiring a polyurethane liquid material; heating an assembled mould and an assembled metal spindle; pouring the polyurethane liquid material into a cavity between the metal spindle and the mould until the polyurethane liquid material reaches the pouring port of a hoop of the mould; placing the mould poured with the polyurethane liquid material into a heating box, and carrying out vulcanization forming treatment; after de-molding, performing the additional vulcanization treatment; and finally, processing a guiding slot on the surface of a prepared polyurethane coated layer. By using the method, air holes in the polyurethane coated layer are reduced, the quality of the polyurethane guide wheel is increased, and the service life is prolonged.

Description

Be used to cut the polyurethane guide wheel preparation method of silicon chip
Technical field
The present invention relates to a kind of polyurethane guide wheel preparation method who is used to cut silicon chip, belong to silicon chip cutting equipment technical field.
Background technology
The carbamate groups that contains many repetitions on the polyurethane elastomer macromolecular main chain, it is the novel high polymer synthetic material of a class between rubber and plastics, its macromolecular main chain is to be inlayed by the rigid chain segment that the soft segment of polyalcohols such as polyester or polyethers and isocyanates and chain extender etc. constitute to form, this structure makes polyurethane elastomer have good wearability, favorable mechanical and hardness range are wide, so the coat of the polyurethane guide wheel of polyurethane elastomer conduct cutting at present silicon chip.The polyurethane guide wheel is a polyurethane cladding of 10-15mm in the surface-coated of metal mandrel, clad surface is provided with several gathering sills, the Metal Cutting line is arranged in a plurality of gathering sills of clad surface, one-directional rotation by guide wheel moves the cutting steel wire, form wafer with the Metal Cutting line cutting monocrystalline bar that moves, so the stability of this guide wheel directly influences silicon chip production efficiency and production cost.But in the silicon chip cutting process, produce high-speed friction between high accuracy guide wheel and Metal Cutting line and the silicon carbide abrasive, cause the wearing and tearing of gathering sill on the clad surface and have influence on the cutting accuracy of wafer, so guide wheel is after cutting after a while, need grind away the gathering sill on its surface coating, and the gathering sill that makes new advances of processing again, when each guide wheel through five to six times drive gathering sill after, will remove the polyurethane cladding of guide pulley surface, carry out the polyurethane cladding of guide pulley surface again.When making polyurethane cladding, normally be infused in the mould by polyether-polyurethane, after vulcanizing treatment, make polyurethane cladding.But polyether-polyurethane coating hydrolysis is relatively poor, in the online cutting silicon chip, water has all been supported by the arm in employed cutting liquid and mortar the inside, the polyether-polyurethane material for a long time with the reduction that causes material property after water contacts easily, tensile strength of material reduces probably about 30%, and line cutting silicon chip process can be easy to generate heat, cutting steel wire and gathering sill friction must aggravate gathering sill and wear and tear fast, cause the guide wheel precision to descend fast in the cutting process, so shortened the service life of polyurethane guide wheel.Moreover, when making polyurethane cladding, because the length of polyurethane guide wheel is longer, usually more than 0.5m, when being injected into polyurethane liquid material in the mould, easily in polyurethane cladding, produce bubble, bubble after the sulfuration exists makes formation pore in the polyurethane cladding, after the processing of the gathering sill in later stage, because pore causes the polyurethane guide wheel to scrap, so the passing rate of processing of polyurethane guide wheel and precision are not high.For solving the problem that has pore in the polyurethane guide wheel, present disclosed polyurethane guide wheel reacts raw material step by step, and dewater, deaeration makes polyurethane liquid material, again the polyurethane liquid material that makes is cast in the mould drying, shaping and demoulding, sulfuration.But above-mentioned preparation method is the energy consumption height on the one hand, long processing time, though can reduce the bubble of making in the polyurethane liquid material, but when polyurethane liquid material is injected into mould, on the one hand because the polyurethane liquid material and the temperature difference between cold metal mandrel and the mould of heat are bigger, when injecting, polyurethane liquid material causes the generation of bubble than Da Yi because of the cold and hot temperature difference, on the other hand owing to polyurethane liquid material causes certain impact to vertical injection cold metal mandrel and mould cavity mostly, therefore in the end in the casting process since air enter in the mould, can in polyurethane cladding, cause bubble, and influence the crudy of gathering sill and the yield rate of guide wheel.
Summary of the invention
The purpose of this invention is to provide a kind of polyurethane guide wheel preparation method who is used to cut silicon chip, can reduce the pore in the polyurethane cladding, improve polyurethane guide wheel quality and service life.
The present invention for the technical scheme that solves its technical problem and adopt is: a kind of polyurethane guide wheel preparation method who is used to cut silicon chip is characterized in that:
(1), performed polymer is made: press the mass fraction ratio, earlier the carbodiimides of 0.5-1.0 part and the calcium sulfate crystal whiskers of 3-5 part and 100 parts PPG are mixed, again mixed liquor is added in the reactor and stirs and dewater when being heated to 100-110 ℃, the pressure that is evacuated to reactor is at 2-5mmHg, dewatering time is controlled at 30-60min, water content in mixed liquor<0.05% (mass percent), the mixed liquor temperature is reduced to 50-60 ℃, be heated to 80-90 ℃ in the isocyanates adding reactor with 30-50 part again and carry out polymerisation, reaction time is controlled at 2-3h and makes performed polymer, the performed polymer that makes is carried out deaeration, reactor is evacuated to 700-750mmHg, and the deaeration time is controlled at 30-60min;
(2), polyurethane liquid material is made: press ratio of quality and the number of copies, to make the performed polymer of deaeration and liquid polyurethane curing agent by 100: 15-30 carries out high-speed mixing in the pouring head of casting machine, make polyurethane liquid material, the temperature of polyurethane liquid material remains on 90-100 ℃;
(3), metal mandrel and mould preheat: will be through rust cleaning, metal mandrel surface coated with adhesive after sandblast and the ungrease treatment, and scribble releasing agent respectively at the anchor ear inner chamber and the two end plates medial surface of mould, anchor ear has transverse opening, the dual-side of anchor ear transverse opening stretches out and as the sprue gate, the locating hole at the two ends of metal mandrel is plugged on the locating shaft of two end plates inboard, clamp the transverse opening of anchor ear, make the inboard positioning step of two end plates and anchor ear two ends and clamping, the mould after the assembling and metal mandrel are put into heating cabinet be heated to 80-90 ℃ of insulation 1-3h;
(4), cast polyurethane liquid material: mould and metal mandrel are taken out in heating cabinet, mould and metal mandrel is horizontal, make the anchor ear transverse opening up, it is tilting at the place, sprue gate of anchor ear to be connected gate spool on the pouring head, polyurethane liquid material is poured in the cavity between metal mandrel and the mould and to the sprue gate of anchor ear;
(5), post processing: the mould that will be cast with polyurethane liquid material is put into heating cabinet and is carried out sulfidization molding handle under 100-110 ℃ of temperature, curing time is controlled at 5-20min, mould is taken out back, cooling, the demoulding, under 70-80 ℃, carry out after cure again, the after cure time is controlled at 8-10h, makes polyurethane cladding;
(6), polyurethane cladding processing: go out gathering sill in the polyurethane cladding Surface Machining.
Performed polymer of the present invention adopts PPG, carbodiimides, calcium sulfate crystal whiskers and isocyanates, reach the hydrolytic resistance that improves polyurethane cladding by adding an amount of carbodiimides, and the resistance to water of increase guide wheel, add an amount of calcium sulfate crystal whiskers simultaneously, utilize the integrality of calcium sulfate crystal whiskers inherence, the atomic arrangement of high-sequential, and the anti-wear performance of increase polyurethane cladding, make the polyurethane guide wheel in long-time the use, can improve the mechanical performance and the machining accuracy of polyurethane guide wheel, so improve the service life of polyurethane guide wheel.The present invention is by detachable mould, earlier releasing agent is coated in the anchor ear inner chamber of mould and the inboard of two end plates, the locating hole at the two ends of metal mandrel is plugged on the locating shaft of two end plates inboard, again two end plates is installed in the two ends of anchor ear, thereby make the cast polyurethane coating can evenly be laid in the periphery of metal mandrel, improved the uniformity of guide pulley surface polyurethane.The present invention together heats metal mandrel and mould, make on the one hand and be coated in the full and uniform surface that is connected the metal mandrel reliably of metal mandrel gluing stick, make polyurethane cladding be connected metal mandrel surface securely, releasing agent after the heating can evenly ooze in mold cavity surfaces simultaneously, make that polyurethane cladding after the moulding is convenient to break away from mould, can not cause destruction, thereby improve the yield rate and the quality of polyurethane cladding polyurethane cladding.The present invention heats mould and metal mandrel earlier, not only reduce the interior moisture and the gas of cavity of mould and metal mandrel, and reduce the temperature difference of polyurethane liquid material and mould and metal mandrel, make polyurethane liquid material in injecting mould, produce bubble less as far as possible, and raising guide pulley surface quality.Mould of the present invention is horizontal, opening after its sprue gate is stretched out by the anchor ear dual-side forms, impulsive force in the time of can reducing the cast of polyurethane liquid material on the one hand, on the other hand also can be fast gas be discharged, improve the production efficiency and the quality of polyurethane guide wheel so can reduce pore in the polyurethane cladding.
Description of drawings
Following structure accompanying drawing is described in further detail embodiments of the invention.
Fig. 1 is the structural representation of mould of the present invention.
Fig. 2 is the structural representation of anchor ear.
Wherein: 1-end plate, 2-anchor ear, 21-sprue gate, 3-metal mandrel.
The specific embodiment
The present invention is used to cut the polyurethane guide wheel preparation method of silicon chip,
(1), performed polymer is made.The component of performed polymer of the present invention comprises PPG, carbodiimides, calcium sulfate crystal whiskers and isocyanates, press ratio of quality and the number of copies, PPG: carbodiimides: calcium sulfate crystal whiskers: the ratio of isocyanates is 100: (0.5-1.0): (3-5): (30-50), earlier the carbodiimides of 0.5-1.0 part and the calcium sulfate crystal whiskers of 3-5 part and 100 parts PPG are mixed, again mixed liquor is added in heating and stirring in the reactor, the whisker aggregate of calcium sulfate crystal whiskers is dispersed in the feed liquid, make the polyurethane guide wheel reach higher anti-wear performance, when being heated to 100-110 ℃, mixed liquor dewaters, the pressure that is evacuated to reactor is at 2-5mmHg, dewatering time is controlled at 30-60min, connect mass percent, when the water content in the mixed liquor<0.05%, the mixed liquor temperature is reduced to 50-60 ℃, isocyanates with 30-50 part adds in the reactor again, and be heated to 80-90 ℃ and carry out polymerisation, reaction time is controlled at 2-3h and makes performed polymer, the performed polymer that makes is carried out deaeration, reactor is evacuated to 700-750mmHg, and the deaeration time is controlled at 30-60min, make axenic bubble in the performed polymer, above-mentioned PPG can adopt polyoxypropyleneglycol or polytetrahydrofuran diol.
(2), polyurethane liquid material is made: press ratio of quality and the number of copies, with the performed polymer that makes and liquid polyurethane curing agent by 100: 15-30 carries out high-speed mixing in the pouring head of casting machine, can mix polyurethane liquid material by the making of high-precision measuring pump of heat resisting and pressure resisting on the casting machine, the temperature of polyurethane liquid material remains on 90-100 ℃.
(3), metal mandrel and mould preheat: will be through the metal mandrel surface coated with adhesive after the rust cleaning blasting treatment, and scribble releasing agent respectively in anchor ear 2 inner chambers and two end plates 1 inboard of mould, this sees Fig. 1, shown in 2, this mould is made of anchor ear 2 and two end plates 1, anchor ear 2 has transverse opening, the dual-side of anchor ear 2 transverse openings stretches out and as sprue gate 21, the width 30-80mm at this sprue gate 21, the inboard of end plate 1 is provided with the locating shaft of metal mandrel 3 location and the positioning step that anchor ear 2 peripheries are positioned, the locating hole at the two ends of metal mandrel 3 is plugged on the locating shaft of two end plates 1 inboard, clamp the transverse opening of anchor ear 2, the inboard positioning step of two end plates 1 and anchor ear 2 both ends of the surface clampings, metal mandrel 3 is installed in the mould, with the assembling after mould and the metal mandrel put into heating cabinet be heated to 80-90 ℃ the insulation 1-3h.Former polyurethane cladding on the virgin metal mandrel can be peeled off, with routine techniques the metal mandrel is eliminated rust and sandblast again, rust cleaning can adopt machinery or chemical method to carry out, and reach better rust cleaning effect by sandblast, and can also make metal mandrel surface reach suitable roughness, degreasing of the present invention can be adopted chemical method, as adopt carrene or dimethylbenzene etc. to clean, make adhesive can be connected metal mandrel surface, adhesive of the present invention can adopt the adhesive as Kai Muluoke, CHEMLOCK-218, THIXON422 or NA-1 one of them, but and releasing agent DEHUI-9815 type or 6150X67 etc.
(4), cast polyurethane liquid material: mould and metal mandrel are taken out in heating cabinet, mould and metal mandrel is horizontal, make anchor ear 2 transverse openings up, be connected gate spool on the pouring head tilting at anchor ear 2 21 places, sprue gate and be attached on anchor ear 2 inwalls, make polyurethane liquid material along the inwall of anchor ear 2 and descend, polyurethane liquid material is poured in the cavity between metal mandrel 3 and the mould and to 21 places, sprue gate of mould anchor ear 2, gate spool is obliquely installed, the angle of this gate spool and sprue gate 21 horizontal planes is controlled between 30-60 °, sweeps along bubble when preventing to water material to greatest extent.
(5), post processing: the mould that will be cast with polyurethane liquid material is put into heating cabinet and is carried out sulfidization molding handle under 100-110 ℃ of temperature, curing time is controlled at 5-20min, mould is taken out back, cooling, the demoulding, the metal mandrel that will have a polyurethane cladding is put into heating cabinet and carry out after cure again under 70-80 ℃, the after cure time is controlled at 8-10h, makes polyurethane cladding at last.
(6), polyurethane cladding processing: the metal-cored axle clamp that will have polyurethane cladding is held on smooth turning lathe or the high-precision grinder, and the polyurethane cladding surface is cut or grinding, goes out gathering sill in the polyurethane cladding Surface Machining.
Each component of performed polymer of the present invention and concrete ratio of quality and the number of copies parameter see Table 1.
Table 1
Figure BSA00000428510600041
The concrete preparation technology parameter of performed polymer of the present invention sees Table 2.
Table 2
Figure BSA00000428510600042
Polyurethane liquid material component of the present invention, concrete mass fraction expect that when warm parameter sees Table 3
Figure BSA00000428510600051
Metal mandrel of the present invention and mould preheats and the concrete technological parameter of cast and post processing sees Table 4.
Figure BSA00000428510600052
The performance parameter of the polyurethane guide wheel that makes with the inventive method sees Table 5.
This shows that material hardness, hot strength and the wear hardness of the polyurethane guide wheel that makes with the present invention increase, and can keep the machining accuracy of polyurethane guide wheel, prolong the service life of polyurethane guide wheel.

Claims (3)

1. polyurethane guide wheel preparation method who is used to cut silicon chip is characterized in that:
(1), performed polymer is made: press the mass fraction ratio, earlier the carbodiimides of 0.5-1.0 part and the calcium sulfate crystal whiskers of 3-5 part and 100 parts PPG are mixed, again mixed liquor is added in the reactor and stirs and dewater when being heated to 100-110 ℃, the pressure that is evacuated to reactor is at 2-5mmHg, dewatering time is controlled at 30-60min, water content in mixed liquor<0.05% (mass percent), the mixed liquor temperature is reduced to 50-60 ℃, be heated to 80-90 ℃ in the isocyanates adding reactor with 30-50 part again and carry out polymerisation, reaction time is controlled at 2-3h and makes performed polymer, the performed polymer that makes is carried out deaeration, reactor is evacuated to 700-750mmHg, and the deaeration time is controlled at 30-60min;
(2), polyurethane liquid material is made: press ratio of quality and the number of copies, to make the performed polymer of deaeration and liquid polyurethane curing agent by 100: 15-30 carries out high-speed mixing in the pouring head of casting machine, make polyurethane liquid material, the temperature of polyurethane liquid material remains on 90-100 ℃;
(3), metal mandrel and mould preheat: will be through rust cleaning, metal mandrel surface coated with adhesive after sandblast and the ungrease treatment, and scribble releasing agent respectively at the anchor ear inner chamber and the two end plates medial surface of mould, anchor ear has transverse opening, the dual-side of anchor ear transverse opening stretches out and as the sprue gate, the locating hole at the two ends of metal mandrel is plugged on the locating shaft of two end plates inboard, clamp the transverse opening of anchor ear, make the inboard positioning step of two end plates and anchor ear two ends and clamping, the mould after the assembling and metal mandrel are put into heating cabinet be heated to 80-90 ℃ of insulation 1-3h;
(4), cast polyurethane liquid material: mould and metal mandrel are taken out in heating cabinet, mould and metal mandrel is horizontal, make the anchor ear transverse opening up, it is tilting at the place, sprue gate of anchor ear to be connected gate spool on the pouring head, polyurethane liquid material is poured in the cavity between metal mandrel and the mould and to the sprue gate of anchor ear;
(5), post processing: the mould that will be cast with polyurethane liquid material is put into heating cabinet and is carried out sulfidization molding handle under 100-110 ℃ of temperature, curing time is controlled at 5-20min, mould is taken out back, cooling, the demoulding, under 70-80 ℃, carry out after cure again, the after cure time is controlled at 8-10h, makes polyurethane cladding;
(6), polyurethane cladding processing: go out gathering sill in the polyurethane cladding Surface Machining.
2. the described polyurethane guide wheel preparation method who is used to cut silicon chip of claim 1, it is characterized in that: the width at sprue gate is at 30-80mm on the described anchor ear.
3. the described polyurethane guide wheel preparation method who is used to cut silicon chip of claim 1, it is characterized in that: the described tilting gate spool and the angle of the sprue gate horizontal plane on the anchor ear are controlled between 30-60 °.
CN 201110030239 2011-01-27 2011-01-27 Method for manufacturing polyurethane guide wheel used for cutting silicon wafer Expired - Fee Related CN102205583B (en)

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103770261A (en) * 2014-01-24 2014-05-07 致恒(天津)实业有限公司 Polyurethane and metal binding technology
CN107321624A (en) * 2017-06-29 2017-11-07 广州艮业信息科技有限公司 A kind of Flexible Transmission rod for sorting induction system
CN108748824A (en) * 2018-07-11 2018-11-06 中国人民解放军海军工程大学 A kind of PBE type polyurethanes vibration isolator manufacturing method
CN110000977A (en) * 2019-04-18 2019-07-12 核心驱动科技(金华)有限公司 A kind of producing device and production method of electric machine iron core coating

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CN2863433Y (en) * 2005-09-06 2007-01-31 盐都县方正橡胶制品厂 Special preparing apparatus for rubble roll
EP1372938B1 (en) * 2001-03-22 2007-03-14 Nuova Astra SRL Method for producing roller means for decorating objects
CN101028737A (en) * 2006-03-03 2007-09-05 胡成泉 Production of spinning rubber roll from polyurethane
CN101588903A (en) * 2007-01-24 2009-11-25 日本聚氨酯工业株式会社 Method for producing conductive polyurethane molded body and conductive roll

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EP0577248A1 (en) * 1992-05-29 1994-01-05 Gencorp Inc. Method of making embossing rolls
EP1372938B1 (en) * 2001-03-22 2007-03-14 Nuova Astra SRL Method for producing roller means for decorating objects
CN2863433Y (en) * 2005-09-06 2007-01-31 盐都县方正橡胶制品厂 Special preparing apparatus for rubble roll
CN101028737A (en) * 2006-03-03 2007-09-05 胡成泉 Production of spinning rubber roll from polyurethane
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Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103770261A (en) * 2014-01-24 2014-05-07 致恒(天津)实业有限公司 Polyurethane and metal binding technology
CN103770261B (en) * 2014-01-24 2016-08-31 致恒(天津)实业有限公司 A kind of polyurethane and the bonding process of metal
CN107321624A (en) * 2017-06-29 2017-11-07 广州艮业信息科技有限公司 A kind of Flexible Transmission rod for sorting induction system
CN108748824A (en) * 2018-07-11 2018-11-06 中国人民解放军海军工程大学 A kind of PBE type polyurethanes vibration isolator manufacturing method
CN108748824B (en) * 2018-07-11 2023-05-02 中国人民解放军海军工程大学 Manufacturing method of PBE type polyurethane vibration isolator
CN110000977A (en) * 2019-04-18 2019-07-12 核心驱动科技(金华)有限公司 A kind of producing device and production method of electric machine iron core coating
CN110000977B (en) * 2019-04-18 2023-10-13 浙江盘毂动力科技有限公司 Manufacturing device and manufacturing method for motor iron core coating

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