CN102180518A - Large-scale preparation method of niobium pentoxide nanowires and hydrogen-sensitive element thereof - Google Patents
Large-scale preparation method of niobium pentoxide nanowires and hydrogen-sensitive element thereof Download PDFInfo
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- CN102180518A CN102180518A CN201110026084.2A CN201110026084A CN102180518A CN 102180518 A CN102180518 A CN 102180518A CN 201110026084 A CN201110026084 A CN 201110026084A CN 102180518 A CN102180518 A CN 102180518A
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- paillon foil
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- niobium pentoxide
- thermal oxidation
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- 239000002070 nanowire Substances 0.000 title claims abstract description 44
- 239000001257 hydrogen Substances 0.000 title claims abstract description 31
- 229910052739 hydrogen Inorganic materials 0.000 title claims abstract description 31
- 238000002360 preparation method Methods 0.000 title claims abstract description 24
- ZKATWMILCYLAPD-UHFFFAOYSA-N niobium pentoxide Inorganic materials O=[Nb](=O)O[Nb](=O)=O ZKATWMILCYLAPD-UHFFFAOYSA-N 0.000 title claims abstract description 17
- URLJKFSTXLNXLG-UHFFFAOYSA-N niobium(5+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Nb+5].[Nb+5] URLJKFSTXLNXLG-UHFFFAOYSA-N 0.000 title claims abstract description 11
- 125000004435 hydrogen atom Chemical class [H]* 0.000 title claims 3
- 239000010955 niobium Substances 0.000 claims abstract description 65
- 239000011888 foil Substances 0.000 claims abstract description 30
- 238000000034 method Methods 0.000 claims abstract description 30
- 238000007254 oxidation reaction Methods 0.000 claims abstract description 27
- 230000003647 oxidation Effects 0.000 claims abstract description 21
- 239000000463 material Substances 0.000 claims abstract description 11
- 238000004140 cleaning Methods 0.000 claims abstract description 8
- 230000008569 process Effects 0.000 claims abstract description 6
- 238000004544 sputter deposition Methods 0.000 claims abstract description 4
- 239000007789 gas Substances 0.000 claims description 23
- 238000010438 heat treatment Methods 0.000 claims description 10
- 238000009413 insulation Methods 0.000 claims description 6
- 238000005520 cutting process Methods 0.000 claims description 5
- 238000005516 engineering process Methods 0.000 claims description 5
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 claims description 4
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 3
- 238000004458 analytical method Methods 0.000 claims description 3
- 238000000605 extraction Methods 0.000 claims description 3
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 2
- 229960000935 dehydrated alcohol Drugs 0.000 claims description 2
- 239000008367 deionised water Substances 0.000 claims description 2
- 229910021641 deionized water Inorganic materials 0.000 claims description 2
- 238000004506 ultrasonic cleaning Methods 0.000 claims description 2
- 238000010792 warming Methods 0.000 claims description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 2
- 150000002431 hydrogen Chemical class 0.000 abstract description 21
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 abstract description 12
- 230000035945 sensitivity Effects 0.000 abstract description 7
- 238000004519 manufacturing process Methods 0.000 abstract description 5
- 230000015572 biosynthetic process Effects 0.000 abstract description 3
- 230000004044 response Effects 0.000 abstract description 3
- 238000005452 bending Methods 0.000 abstract description 2
- 238000003786 synthesis reaction Methods 0.000 abstract description 2
- 238000005265 energy consumption Methods 0.000 abstract 2
- 239000004065 semiconductor Substances 0.000 description 5
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 4
- 239000001301 oxygen Substances 0.000 description 4
- 229910052760 oxygen Inorganic materials 0.000 description 4
- 238000012876 topography Methods 0.000 description 4
- 239000012528 membrane Substances 0.000 description 3
- 238000006555 catalytic reaction Methods 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 239000002086 nanomaterial Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 210000005239 tubule Anatomy 0.000 description 2
- 206010070834 Sensitisation Diseases 0.000 description 1
- 229910006404 SnO 2 Inorganic materials 0.000 description 1
- 229910010413 TiO 2 Inorganic materials 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- 230000001580 bacterial effect Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- RKTYLMNFRDHKIL-UHFFFAOYSA-N copper;5,10,15,20-tetraphenylporphyrin-22,24-diide Chemical compound [Cu+2].C1=CC(C(=C2C=CC([N-]2)=C(C=2C=CC=CC=2)C=2C=CC(N=2)=C(C=2C=CC=CC=2)C2=CC=C3[N-]2)C=2C=CC=CC=2)=NC1=C3C1=CC=CC=C1 RKTYLMNFRDHKIL-UHFFFAOYSA-N 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000002360 explosive Substances 0.000 description 1
- 238000001027 hydrothermal synthesis Methods 0.000 description 1
- 208000015181 infectious disease Diseases 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 239000002071 nanotube Substances 0.000 description 1
- 229910052758 niobium Inorganic materials 0.000 description 1
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 description 1
- 210000000056 organ Anatomy 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 230000008313 sensitization Effects 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
- XLOMVQKBTHCTTD-UHFFFAOYSA-N zinc oxide Inorganic materials [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 1
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Abstract
The invention discloses a large-scale preparation method of niobium pentoxide nanowires and a hydrogen-sensitive element thereof. The preparation method particularly comprises the following steps of: strictly cleaning Nb foils cut into suitable sizes, arranging the foils in a vacuum tube type furnace after a bending or folding treatment, and strictly controlling processing conditions (such as Ar flow rate, O2 flow rate, holding temperature, time and the like) of a thermal oxidation process to synthesize large-scale Nb2O5 nanowires with higher length diameter ratios. By adopting the large-scale preparation method disclosed by the invention, the large-scale synthesis of the Nb2O5 nanowires with the higher length diameter ratios can be realized in a limited-volume furnace tube, thus the production cost can be effectively reduced. Hydrogen-sensitive elements manufactured from Pt electrodes, prepared by sputtering Nb2O5 nanowires as sensitive materials, have the characteristics of small size, low energy consumption and the like, and represent higher response speed and higher sensitivity at the room temperature towards a hydrogen-containing atmosphere; and the size, the energy consumption and the production cost of hydrogen sensors can be hopefully reduced.
Description
Technical field
The present invention relates to a kind of large-area preparation method (and hydrogen-sensitive element) of niobium pentoxide nano line, belong to inorganic semiconductor nano material preparation Technology field.
Background technology
Hydrogen is the ideal renewable and clean energy resource, and the inflammable and explosive property that its low-flash causes makes hydrogen gas sensor seem particularly important at chemical industry such as fire alarm, gas leakage, burning control and security fields.In addition, at medical fields such as bacterial detection infection, hydrogen gas sensor also has higher using value.Metal-oxide semiconductor (MOS) (TiO
2, ZnO and SnO
2Deng) the film hydrogen gas sensor is the present maximum class hydrogen gas sensor of research, utilizes the intensity of variation of sensor resistance value in hydrogeneous atmosphere can the concentration of hydrogen be detected.But at present semiconductor film membranous type hydrogen sensor faces the problem of service temperature higher (>200 ℃), makes that the transmitter power consumption is big, to detect cost higher, has limited its application in above-mentioned field greatly.Niobium Pentxoxide (Nb
2O
5) be a class important functional material, its excellent physicochemical property make it all show greatly using value in a series of fields such as comprising electrochromic device, gas sensor, catalyzer and solar cell.It is reported Nb
2O
5Porous film material has shown splendid hydrogen sensitivity characteristic as the semi-conductor type hydrogen gas sensor of sensitive material preparation in the environment more than 200 ℃, but higher service temperature remains the problem that the researchist need overcome.Utilize Nb
2O
5The variation of the caused related physical chemical property of nano wire low latitude, small size and high-specific surface area, be expected to improve the hydrogen sensitivity energy of semi-conductor type hydrogen element under the room temperature, size and the power problems of avoiding heating unit complicated in the device to bring effectively reduce and produce and detect cost.The synthetic Nb of present bibliographical information
2O
5The method of nano wire is less, mainly comprises hydrothermal method
[1], the plasma oxidation method
[2]And thermal oxidation method
[3]Wherein, Hydrothermal Preparation Nb
2O
5The output of nano wire is lower, pattern is wayward, and repeatability is not high, is not suitable for synthetic fast Nb on a large scale
2O
5Nano wire; And being applicable to big area, the plasma oxidation method synthesizes Nb
2O
5Nano wire, but it is with high costs, and equipment and processing method are comparatively complicated; The bibliographical information that people such as Varghese delivered in 2008 Nb of a kind of thermal oxidation method preparation
2O
5Nano wire and field emission characteristic thereof place the tubule of diameter 2.5mm with the Nb paillon foil that is cut into the 0.5mm length and width, are put in and carry out thermal oxidative treatment in the vacuum tube furnace.Although the use of tubule can steady air flow, limited the size of prepared sample and can't realize big area Nb
2O
5The preparation of nano wire sample, this is to based on Nb
2O
5The production of devices such as the various gas sensors of nano wire, dye sensitization solar battery and an emission is totally unfavorable.Therefore, research is a kind of can disposable big area synthesize high length-diameter ratio Nb in the boiler tube of limited bulk
2O
5The method of nano wire for improving hydrogen-sensitive element hydrogen sensitivity energy at room temperature, reduces device size and production, detection cost and is necessary.
[1]YAN?C,XUE?D?2008.Formation?of?Nb
2O
5?Nanotube?Arrays?Through?Phase?Transformation.Advanced?Materials[J],20:1055-1058
[2]MOZETI?M,CCARON,CVELBAR?U,et?al.A?Method?for?the?Rapid?Synthesis?of?Large?Quantities?of?Metal?Oxide?Nanowires?at?Low?Temperatures[J].Advanced?Materials,2005,17(17):2138-42
[3]VARGHESE?B,HAUR?S?C,LIM?C-T.Nb
2O
5?Nanowires?as?Efficient?Electron?Field?Emitters?[J].The?Journal?of?Physical?Chemistry?C,2008,112(27):10008-12.
Summary of the invention
The objective of the invention is: provide a kind of with thermal oxidation method large-area preparation Nb
2O
5The method of nano wire and hydrogen-sensitive element thereof, prepared Nb
2O
5Nano wire output height, size is even, and higher length-to-diameter ratio and specific surface area are arranged, and is expected to realize using in fields such as gas sensor, solar cell and photochemical catalysis.Prepared Nb
2O
5The hydrogen-sensitive element that nano wire constitutes has small size, low in power consumption, can at room temperature show the speed of response and higher sensitivity faster to hydrogeneous atmosphere.
To achieve these goals, step of the present invention is:
One, the cutting of Nb paillon foil and cleaning:
1) the Nb paillon foil with purity>99.99%, thickness 0.25~0.35mm is cut to rectangle;
2) pure acetone of operational analysis successively, analytical pure dehydrated alcohol and each ultrasonic cleaning Nb paillon foil 10-30min of deionized water, and in 40-60 ℃ of following air, dry;
Two, adopt thermal oxidation method, at Nb foil surfaces oxidation growth Nb
2O
5Nano wire.Idiographic flow and processing condition are as follows:
1) with cutting with in the crooked or folding boiler tube that is placed on vacuum tube furnace of the Nb paillon foil horizontal after cleaning, assurance Nb paillon foil is positioned at the central position, heating zone.
2) tightness system and be evacuated to intraductal atmospheric pressure 100 ± 10torr, the high-purity Ar gas that feeds purity>99.999% is as shielding gas and omnidistancely keep Ar airshed 10-100sccm;
3) temperature-rise period: keep Ar gas and flow into, with 5-10 ℃ of min
-1Temperature rise rate be warming up to 700-900 ℃;
4) insulation oxidising process: keep Ar gas and flow into, be incubated 700-900 ℃ and feed the O of purity>99.999%
2Gas carries out oxidation, oxidization time 30-120min, O
2Flow 10-100sccm;
5) temperature-fall period: close O
2Gas and heating unit naturally cool to room temperature under the Ar gas shiled.
Three, close Ar gas and open intake valve, treat to open tightness system after the cavity internal gas pressure returns to normal pressure, sample is taken out, can obtain on material N b paillon foil big area evenly the diameter of growth be the 20-30 nanometer, length reaches the Nb of 10-50 micron
2O
5The nano wire film.
This method can uniform preparation has high length-diameter ratio and specific surface area on larger area Nb paillon foil Nb
2O
5Nano wire film, nanowire diameter are about the 20-30 nanometer, and length can reach tens microns.
A kind of hydrogen-sensitive element that constitutes with the niobium pentoxide nano line of thermal oxidation method large-area preparation, its making step is:
1) the niobium pentoxide nano line film of making of above-mentioned method is a sensitive material, covers the electrode pattern mask plate of making in advance;
2) adopt the magnetically controlled DC sputtering technology, prepare rectangle or circular point shape Pt electrode in the upper surface both sides of nano wire film;
3) utilize conductive silver paste to select two places respectively to connect length on the Pt of above-mentioned preparation electrode and be 20-40cm, the Cu lead extraction electrode of diameter 1mm constitutes hydrogen-sensitive element.
The present invention has following advantage:
1. by crooked or folding Nb paillon foil, on guaranteeing the equipment volume basis of invariable, can improve the surface-area of the Nb paillon foil that places in the boiler tube greatly, can realize Nb by adjusting processing parameters such as oxygen flow
2O
5The big area of nano wire is synthetic, thus solved conventional thermal oxidation method can only be on little tinsel oxidation prepare the problem of oxide nano thread, can effectively reduce equipment and production cost;
2. the O during by the adjustment oxidation
2Flow can be realized the regulation and control to product surface topography and nanowire size, for example at different O
2Flow can obtain the Nb perpendicular to substrate down respectively
2O
5Nanoneedle and the interlacing Nb of one deck with high length-to-diameter ratio
2O
5The nano wire membrane structure.By the surface topography of regulation and control product, can realize Nb
2O
5Nano material is in multi-field application such as feds, gas sensor, solar photovoltaic device and photochemical catalysis.
3. constitute hydrogen-sensitive element with the present invention and have characteristics such as small size, reduce power consumption, at room temperature hydrogeneous atmosphere is shown the speed of response and higher sensitivity faster.
Description of drawings
Fig. 1 prepares big area Nb for thermal oxidation method
2O
5The equipment synoptic diagram of nano wire;
Fig. 2 is Nb
2O
5The X ray diffracting spectrum of nano wire;
Fig. 3 makes Nb for different oxygen flows
2O
5The local surfaces pattern SEM photo of nano wire sample
A:10sccm wherein; B:20sccm; C:30sccm; D:40sccm;
Fig. 4 is single Nb
2O
5The microstructure tem analysis result of nano wire;
Fig. 5 is based on Nb
2O
5The hydrogen-sensitive element structural representation of nano wire film;
Fig. 6 for the resistance of lead to/putting hydrogen-sensitive element in the hydrogen process under the room temperature over time;
Fig. 7 is that hydrogen-sensitive element resistance is over time in the atmosphere of different hydrogen concentration under the room temperature;
Fig. 8 is the relation of density of hydrogen in the sensitivity factor of hydrogen-sensitive element and the atmosphere.
Embodiment
Below the present invention is further described with embodiment.
Embodiment one:
Prepare Nb by the aforementioned operation step
2O
5Nano wire, wherein in the step 1, two the Nb paillon foil is cut to the small pieces of 5mm * 10mm, finish after the cleaning and the Nb paillon foil after the cutting of 3-5 sheet to be lain against the central position, heating zone that pottery burns in the boat and is placed on boiler tube, other steps all as hereinbefore, concrete processing condition are as shown in the table:
In the foregoing description one, guaranteeing to change O on the Ar flow basis of invariable
2Flow, the surface topography of gained sample as shown in Figure 3.In order to obtain big area, the Nb of high length-diameter ratio
2O
5Nano wire should be controlled oxygen flow and be no more than 20sccm, the Nb of too high oxygen flow preparation
2O
5Nano wire length-to-diameter ratio and density degree are all lower.The Nb of sequence number 2 conditions preparation
2O
5Have best surface topography, its thing phase and microstructure are the monocrystalline tetragonal phase structure shown in accompanying drawing 2 and 4.
Embodiment two:
Prepare Nb by the aforementioned operation step
2O
5Nano wire, wherein in the step 1, two the Nb paillon foil is cut to the long strip shape paillon foil of 60mm * 30mm-60mm * 50mm, finish after the cleaning process it is bent to cylindricly making it be attached at the boiler tube inwall of vacuum tube furnace and place the central position, heating zone, shown in accompanying drawing 1 (b).
Other steps all as hereinbefore, concrete processing condition are as shown in the table:
In the foregoing description two, determine that Ar flow, temperature rise rate and holding temperature are constant, at lower O
2The insulation oxidization time is longer down for flow, along with O
2Flow increases gradually, and the insulation oxidization time is reduced to 60min gradually, can obtain the evenly Nb of growth of big area in this example
2O
5The nano wire membrane structure.
Embodiment three:
Prepare Nb by the aforementioned operation step
2O
5Nano wire, wherein in the step 1, two the Nb paillon foil is cut to the long strip shape paillon foil of 120mm * 30mm-120mm * 50mm and finishes cleaning process, with it every 2-4mm doubling bending, form the organ shape and be rolled into and cylindricly make its boiler tube inwall that is attached at vacuum tube furnace, and place the central position, heating zone.Other steps all as hereinbefore, concrete processing condition are as shown in the table:
In the above-mentioned example three, determine that Ar flow, temperature rise rate and holding temperature are constant, at lower O
2The insulation oxidization time is longer down for flow, along with O
2Flow increases gradually, and the insulation oxidization time is reduced to 60min gradually, can obtain the evenly Nb of growth of big area in this example
2O
5The nano wire membrane structure.
Embodiment four:
Nb according to the preparation of aforementioned operation step
2O
5The nano wire film is of a size of 10x5mm as sensitive material, and the tinsel that adopts wide 5cm is used the magnetically controlled DC sputtering technology as mask plate, prepares rectangle or circular point shape Pt electrode in nano wire film upper surface both sides; Utilize conductive silver paste to select two places respectively to connect length on the Pt of above-mentioned preparation electrode and be 20-40cm, the Cu lead extraction electrode of diameter 1mm constitutes hydrogen-sensitive element.
The structure of hydrogen-sensitive element and detected result are seen Fig. 5, Fig. 6, Fig. 7, Fig. 8.
Claims (4)
1. method with thermal oxidation method large-area preparation niobium pentoxide nano line is characterized in that step is:
One, the cutting of Nb paillon foil and cleaning:
1) the Nb paillon foil with purity>99.99%, thickness 0.25~0.35mm is cut to rectangle;
2) pure acetone of operational analysis successively, analytical pure dehydrated alcohol and each ultrasonic cleaning Nb paillon foil 10-30min of deionized water, and in 40-60 ℃ of following air, dry;
Two, adopt thermal oxidation method, at Nb foil surfaces oxidation growth Nb
2O
5Nano wire.Idiographic flow and processing condition are as follows:
1) with cutting with in the crooked or folding boiler tube that is placed on vacuum tube furnace of the Nb paillon foil horizontal after cleaning, assurance Nb paillon foil is positioned at the central position, heating zone;
2) tightness system and be evacuated to intraductal atmospheric pressure 100 ± 10torr, the high-purity Ar gas that feeds purity>99.999% is as shielding gas and omnidistancely keep Ar airshed 10-100sccm;
3) temperature-rise period: keep Ar gas and flow into, with 5-10 ℃ of min
-1Temperature rise rate be warming up to 700-900 ℃;
4) insulation oxidising process: keep Ar gas and flow into, be incubated 700-900 ℃ and feed the O of purity>99.999%
2Gas carries out oxidation, oxidization time 30-120min, O
2Flow 10-100sccm;
5) temperature-fall period: close O
2Gas and heating unit naturally cool to room temperature under the Ar gas shiled;
Three, close Ar gas and open intake valve, treat to open tightness system after the cavity internal gas pressure returns to normal pressure, sample is taken out, sample is taken out, can obtain on material N b paillon foil big area evenly the diameter of growth be the 20-30 nanometer, length reaches the Nb of 10-50 micron
2O
5Nano wire.
2. a kind of method according to claim 1 with thermal oxidation method large-area preparation niobium pentoxide nano line, it is characterized in that in step 1, the step 2 Nb paillon foil being cut to long-width ratio 20 10: 1 strip, and it is flat in the boiler tube of vacuum tube furnace, guarantee that the Nb paillon foil is positioned at the central position, heating zone.
3. a kind of method according to claim 1 with thermal oxidation method large-area preparation niobium pentoxide nano line, it is characterized in that in the step 1 Nb paillon foil being cut to long-width ratio 31: 1 rectangle, and, guarantee that the Nb paillon foil is positioned at the central position, heating zone with its crooked or folding being placed in the boiler tube of vacuum tube furnace.
4. hydrogen-sensitive element that constitutes with the niobium pentoxide nano line of thermal oxidation method large-area preparation,, it is characterized in that making step is:
1) the niobium pentoxide nano line film of using the described method making of claim 1 covers the electrode pattern mask plate of making in advance as sensitive material;
2) adopt the magnetically controlled DC sputtering technology, prepare rectangle or circular point shape Pt electrode in nano wire film upper surface both sides;
3) utilize conductive silver paste to select two places respectively to connect length on the Pt of above-mentioned preparation electrode and be 20-40cm, the Cu lead extraction electrode of diameter 1mm constitutes hydrogen-sensitive element.
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CN104965009B (en) * | 2015-07-20 | 2018-04-27 | 湖北大学 | A kind of Hydrogen Concentration Detector |
CN105334245A (en) * | 2015-11-10 | 2016-02-17 | 湖北大学 | Making method for molybdenum oxide nano-fiber paper hydrogen sensor |
CN108607593A (en) * | 2016-01-26 | 2018-10-02 | 苏州大学 | Niobium pentoxide nano stick/nitrogen-doped graphene composite photo-catalyst of cadmium sulfide nano-particles modification and application |
CN108607593B (en) * | 2016-01-26 | 2021-01-12 | 苏州大学 | Cadmium sulfide nanoparticle modified niobium pentoxide nanorod/nitrogen-doped graphene composite photocatalyst and application thereof |
CN114813724A (en) * | 2022-06-28 | 2022-07-29 | 安徽维纳物联科技有限公司 | Nitrogen oxide detection system and preparation method thereof |
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