CN102175647A - Device and method for measuring electrostriction coefficient by multi-beam laser heterodyne method - Google Patents
Device and method for measuring electrostriction coefficient by multi-beam laser heterodyne method Download PDFInfo
- Publication number
- CN102175647A CN102175647A CN 201110029881 CN201110029881A CN102175647A CN 102175647 A CN102175647 A CN 102175647A CN 201110029881 CN201110029881 CN 201110029881 CN 201110029881 A CN201110029881 A CN 201110029881A CN 102175647 A CN102175647 A CN 102175647A
- Authority
- CN
- China
- Prior art keywords
- glass plate
- thin glass
- measured
- plane mirror
- cos
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Abstract
The invention provides a device and a method for measuring an electrostriction coefficient by a multi-beam laser heterodyne method, relating to the technical field of measurement, in particular to a the electrostriction coefficient measuring technology. The invention solves the problem that the measurement precision of the various traditional method for measuring the electrostriction coefficient of piezoelectric crystal cannot satisfy the requirements of current high-precision measurement fields. The method disclosed by the invention is designed on the basis of the laser heterodyne technology and the Doppler effect; the device modulates the frequency of incident light at different moments in a light path by using a galvanometer so as to obtain a multi-beam laser heterodyne signal, wherein the signal frequency spectrum comprises a plurality of frequency values; each frequency value includes to-be-measured parameter information; a plurality of to-be-measured parameter values can be simultaneously obtained after demodulation; and weighted mean is carried out on the obtained parameter values to obtain high-precision to-be-measured parameters. The method disclosed by the invention is verified by a simulation experiment of lead zirconate titanate (PZT) piezoceramics, and the measurement relative error is only 0.98%.
Description
Technical field
The present invention relates to field of measuring technique, be specifically related to a kind of measuring technique of electrostriction coefficient.
Background technology
Relate in the Mechatronic Systems and device of automatic control at all, driver often is considered to one of the most key factor that limits its performance and life-span, and in numerous type of drivers, the piezoelectric driver is fast because of its response, bearing capacity is high, energy consumption is low and price is low etc., and characteristics receive much concern.At present, the piezoelectric driver successfully is applied in numerous technical fields such as laser resonant cavity, precision positioning, Precision Machining, intelligence structure, bioengineering, Aero-Space, telecommunications, auto industry, joint of robot, medicine equipment, and is forming an industry that has a high potential.Therefore, the exploitation for piezoelectric new material, new technology and driver new technology has been subjected to increasingly extensive attention with application.At occurring in nature, most of crystal all have piezoelectric effect, yet the piezoelectric effect of most of crystal is very faint, does not have practical value.Quartz is a well behaved piezoelectric in the crystal.Along with science and technology development, made piezoelectric ceramics is come out one after another as barium titanate, lead zirconate titanate polycrystalline piezoelectrics such as (PZT), and uses more and more widely.
The electrostriction coefficient of piezoelectric crystal has reflected the attribute of material itself, measures the electrostriction coefficient of material, and is not only significant to the development of new material, and is one of important indicator of the selection of material.At present, the method for mensuration electrostriction coefficient mainly contains laser interferance method, optical lever method, capacitance method, electric vortex method and Digital Speckle Correlation Method etc.But all there is the shortcoming of self in every kind of method, so precision can't improve again, can not satisfy the requirement of present high-acruracy survey.
And in optical measuring method, the laser heterodyne measurement technology enjoys Chinese scholars to pay close attention to, the laser heterodyne measurement technology has been inherited the plurality of advantages of heterodyne technology and Doppler technology, is one of present superhigh precision measuring method, and the relative error of its measurement can reach 1%.Advantage such as this method has that high room and time resolution, measuring speed are fast, precision is high, the linearity good, antijamming capability is strong, dynamic response is fast, good reproducibility and measurement range are big, become one of significant technology of modern ultraprecise detection and surveying instrument, be widely used in ultra precise measurement, detection, process equipment, laser radar system etc.
Traditional difference interference is two-beam interference, and the heterodyne signal frequency spectrum only contains single-frequency information, obtains single parameter value to be measured after the demodulation.
Summary of the invention
For the measuring accuracy of the measuring method of the electrostriction coefficient that solves existing various piezoelectric crystals can not satisfy the problem of the requirement of existing high-accuracy fields of measurement, the present invention proposes a kind of device and method of multi-beam laser heterodyne measurement electrostriction coefficient.
The device of multi-beam laser heterodyne measurement electrostriction coefficient of the present invention is by H
0Solid state laser, quarter-wave plate, galvanometer, first plane mirror, polarizing beam splitter mirror PBS, convergent lens, thin glass plate, second plane mirror, piezoelectric ceramic tube to be measured, two-dimentional adjustment rack, high-voltage power supply, photodetector and signal processing system are formed;
H
0The linearly polarized light that solid state laser sends is incident to polarizing beam splitter mirror PBS after the first plane reflection mirror reflection, light beam after this polarizing beam splitter mirror PBS reflection is incident to the light receiving surface of galvanometer after the quarter-wave plate transmission, light beam through this vibration mirror reflected is sent to polarizing beam splitter mirror PBS once more after the quarter-wave plate transmission, light beam after this polarizing beam splitter mirror PBS transmission is incident to thin glass plate, light beam after this thin glass plate transmission is incident to second plane mirror, this light beam reflects repeatedly between the thin glass plate that is parallel to each other and second plane mirror repeatedly, obtain the light beam of multi beam after the thin glass plate transmission and converge to by convergent lens on the photosurface of photodetector, described photodetector output electric signal is given signal processing system; Distance between the thin glass plate and second plane mirror is d;
Fixedly connected with an end of piezoelectric ceramic tube to be measured in the center, the back side of described second plane mirror, the other end of this piezoelectric ceramic tube to be measured is fixed on the two-dimentional adjustment rack, the inside surface of described piezoelectric ceramic tube to be measured is connected with two voltage output ends of high-voltage power supply by electrode respectively with outside surface, and this piezoelectric ceramic tube to be measured produces axial deformation under the effect of voltage.
Adopt the device of above-mentioned multi-beam laser heterodyne measurement electrostriction coefficient to realize that the method that electrostriction coefficient is measured is:
At first, by adjusting two-dimentional adjustment rack, the reflecting surface and the thin glass plate of second plane mirror of fixedlying connected with piezoelectric ceramic tube to be measured are parallel to each other, contour between two flat boards, and to make between the reflecting surface of second plane mirror and the thin glass plate be 20mm apart from d;
Then, will be connected with outside surface with the inside surface of piezoelectric ceramic tube to be measured by electrode respectively, and the driving power of opening galvanometer makes galvanometer begin vibration with two electrode outputs of high-voltage power supply; Simultaneously, open H
0Solid state laser,
At last, regulate the output voltage signal U of described high-voltage power supply, the electric signal of synchronous signal disposal system continuous acquisition photodetector output, and the signal that collects handled, and then obtain variable in distance amount between second plane mirror and the thin glass plate, the electromagnetism that obtains piezoelectric ceramic tube to be measured according to the voltage signal of this variable in distance amount and high-voltage power supply output this moment causes coefficient of dilatation:
In the formula, Δ l is the length increment of electroceramics pipe behind the making alive, promptly equals the variable in distance amount between second plane mirror and the thin glass plate, and l is the length of piezoelectric ceramic tube to be measured; d
0It is the wall thickness (all being unit) of piezoelectric ceramic tube to be measured with mm.
The present invention is on the laser heterodyne measurement technical foundation, a kind of scheme of multi-beam laser heterodyne measurement electrostriction coefficient has been proposed, based on this scheme a kind of multi-beam laser heterodyne measurement method that improves the heterodyne measurement precision has been proposed, promptly in light path, utilize galvanometer that difference incident light is constantly carried out frequency modulation (PFM), obtained the multi-beam laser heterodyne signal, comprise a plurality of frequency values in its signal spectrum simultaneously, each frequency values all comprises parameter information to be measured, can obtain a plurality of parameter values to be measured simultaneously through after the demodulation, to the multiple parameter values weighted mean that obtains, improved the precision of parameter to be measured.This paper has carried out theoretical analysis in detail to the method, at last lead zirconate titanate (PZT) piezoelectric ceramics has been carried out the emulation experiment checking, and measuring relative errors only is 0.98%.
Description of drawings
Fig. 1 is the structural representation of the device of multi-beam laser heterodyne measurement electrostriction coefficient of the present invention.
Fig. 2 is the cut-open view of piezoelectric ceramic tube 7 to be measured.
Fig. 3 is the multi-beam laser principle of interference figure between the thin glass plate and second plane mirror.
Fig. 4 is the Fourier transform spectrogram of multi-beam laser heterodyne signal.
Fig. 5 is the spectrogram of PZT length variations measurement amount correspondence under the different voltage condition, among the figure, from left to right, every curve high-voltage power supply output voltage respectively is under the situation of 800V, 700V, 600V, 500V, 400V, 300V, 200V and 100V, the spectrum curve of acquisition.
Embodiment
Embodiment one: referring to Fig. 1 present embodiment is described, the device of the described multi-beam laser heterodyne measurement of present embodiment electrostriction coefficient is by H
0 Solid state laser 2, quarter-wave plate 12, galvanometer 13, first plane mirror 3, polarizing beam splitter mirror PBS11, convergent lens 10, thin glass plate 9, second plane mirror 6, piezoelectric ceramic tube to be measured 7, two-dimentional adjustment rack 8, high-voltage power supply, photodetector 4 and signal processing system 5;
H
0The linearly polarized light that solid state laser 2 sends is incident to polarizing beam splitter mirror PBS11 after 3 reflections of first plane mirror, light beam after this polarizing beam splitter mirror PBS11 reflection is incident to the light receiving surface of galvanometer 13 after quarter-wave plate 12 transmissions, after quarter-wave plate 12 transmissions, be sent to polarizing beam splitter mirror PBS11 once more through these galvanometer 13 beam reflected, light beam after this polarizing beam splitter mirror PBS11 transmission is incident to thin glass plate 9, light beam after these thin glass plate 9 transmissions is incident to second plane mirror 6, this light beam reflects repeatedly between the thin glass plate 9 that is parallel to each other and second plane mirror 6 repeatedly, obtain the light beam of multi beam after thin glass plate 9 transmissions and converge to by convergent lens 10 on the photosurface of photodetector 4, described photodetector 4 output electric signal are given signal processing system 5; Distance between the thin glass plate 9 and second plane mirror 6 is d;
Fixedly connected with an end of piezoelectric ceramic tube 7 to be measured in the center, the back side of described second plane mirror 6, the other end of this piezoelectric ceramic tube 7 to be measured is fixed on the two-dimentional adjustment rack 8, the inside surface 7-1 of described piezoelectric ceramic tube to be measured 7 is connected with two voltage output ends of high-voltage power supply by electrode 1 respectively with outside surface 7-2, and this piezoelectric ceramic tube 7 to be measured produces axial deformation under the effect of voltage.
In the present embodiment is 20mm apart from the general value of d.
Embodiment two: present embodiment is that the structure to the signal processing system 5 in the device of embodiment one described multi-beam laser heterodyne measurement electrostriction coefficient is further qualified, signal processing system 5 in the present embodiment is by filtering circuit 5-1, pre-amplification circuit 5-2, analog to digital conversion circuit A/D and control circuit DSP form, the electric signal that described filtering circuit 5-1 exports the photodetector 4 that receives carries out sending to pre-amplification circuit 5-2 after the filtering, signal after described pre-amplification circuit 5-2 amplifies is exported to analog to digital conversion circuit A/D, and the signal after analog-digital conversion circuit as described A/D will change sends to control circuit DSP.
Embodiment three: present embodiment is described to be to adopt the device of embodiment one or two described multi-beam laser heterodyne measurement electrostriction coefficients to realize the method that electrostriction coefficient is measured, and the process of this method is:
At first, by adjusting two-dimentional adjustment rack 8, the reflecting surface and the thin glass plate 9 of second plane mirror 6 of fixedlying connected with piezoelectric ceramic tube 7 to be measured are parallel to each other, contour between two flat boards, and to make between the reflecting surface of second plane mirror 6 and the thin glass plate 9 be 20mm apart from d;
Then, will be connected with outside surface with the inside surface of piezoelectric ceramic tube 7 to be measured by electrode respectively, and the driving power of opening galvanometer 13 makes galvanometer 13 begin vibration with two electrode outputs of high-voltage power supply; Simultaneously, open H
0 Solid state laser 2,
At last, regulate the output voltage signal U of described high-voltage power supply, the electric signal of synchronous signal disposal system 5 continuous acquisition photodetectors 4 outputs, and the signal that collects handled, and then obtain variable in distance amount between second plane mirror 6 and the thin glass plate 9, the electromagnetism that obtains piezoelectric ceramic tube 7 to be measured according to the voltage signal of this variable in distance amount and high-voltage power supply output this moment causes coefficient of dilatation:
In the formula, Δ l is the length increment of piezoelectric ceramic tube 7 to be measured behind the making alive, promptly equals the variable in distance amount between second plane mirror 6 and the thin glass plate 9, and l is the length of piezoelectric ceramic tube 7 to be measured; d
0It is the wall thickness (all being unit) of piezoelectric ceramic tube 7 to be measured with mm.
Object with piezoelectric effect is called piezoelectrics, has now found that the multiple object with piezoelectric property, and monocrystalline, polycrystalline (polycrystalline ceramics) and some amorphous solid are wherein arranged.Piezoelectric ceramic tube to be measured among the present invention is a kind of piezoelectric ceramics of tubular, and its profile and structure are as shown in Figure 2.It is made by lead zirconate titanate (PZT), the surfaces externally and internally of piezoelectric ceramic tube 7 to be measured is silver-plated, as electrode, connect and draw lead, just can execute impressed voltage, when applying positive voltage, inside surface ground connection at its outside surface to it, piezoelectric ceramic tube 7 to be measured prolongs its axial elongation, otherwise when its outside surface applied negative voltage, inside surface ground connection, piezoelectric ceramic tube 7 to be measured prolonged its axial shortening.
After representing that with E piezoelectric ceramic tube 7 surfaces externally and internallies to be measured add voltage, the electric field intensity of the radial electric field that forms between surfaces externally and internally then has:
ε=αE (2)
In the formula, α represents the electrostriction coefficient of piezoelectric ceramic tube 7 to be measured in the almost zone; ε represents the strain that piezoelectric ceramic tube to be measured 7 is axial, and
U is if be added in the voltage of piezoelectric ceramic tube 7 surfaces externally and internallies to be measured, then has:
Finally can obtain:
In the above-mentioned formula, d
0Can directly measure with vernier caliper with l, voltage U can be read by digital voltmeter, because during added change in voltage, the variation delta l of length l is very little, can't solve with conventional length measurement method, so need to adopt high-precision mensuration to measure this small quantity of electrostriction coefficient, present embodiment adopts embodiment one described device to accurately measure this small quantity, and then realizes the accurate measurement of electrostriction coefficient.The principle of the measurement device small quantity under the embodiment one is:
In the time can producing axial telescopic shape change under the effect of piezoelectric ceramic tube 7 to be measured at high tension voltage, drive 6 motions of second plane mirror, make that the distance between this second plane mirror 6 and the thin glass plate 9 changes.Signal processing system in the present embodiment can be carried out demodulation to the electric signal that photodetector obtains, thereby obtain the variable in distance amount Δ d between second plane mirror 6 and the thin glass plate 9, and this Δ d equates with the axial deformation amount Δ l of piezoelectric ceramic tube 7 to be measured, the voltage signal of high-voltage power supply output just can obtain the electrostriction coefficient that this presses piezoelectric ceramic tube 7 to be measured during according to this deformation quantity Δ l and this deformation of generation.
Embodiment four: present embodiment is the further qualification to the method for the measurement of embodiment three described electrostriction coefficients, present embodiment is to the electric signal of signal processing system 5 according to 4 outputs of continuous acquisition photodetector, and the signal that collects handled, and then the process that obtains the variable in distance amount between second plane mirror 6 and the thin glass plate 9 is described further, and this process is:
Light beam oblique incidence after this polarizing beam splitter mirror PBS11 transmission to the incident angle of thin glass plate 9 is θ
0, the incident field of this moment is:
E(t)=E
0exp(iω
0t), (4)
E in the formula
0Be constant, i represents imaginary number, ω
0Be the laser angular frequency, this angular frequency is:
ω
0=(1+at/c)/ω (5)
ω is the incident light frequency of thin glass plate 9 in the formula, and a is the vibration acceleration of galvanometer 13, and c is the light velocity;
Then arrive thin glass plate surface constantly and be by the catoptrical light field of this surface reflection at t-l/c:
In the formula, l represents galvanometer 13 to the distance between the thin glass plate 9, and through the light of thin glass plate transmission in difference constantly by the m-1 secondary reflection of second plane mirror 6, the light field that obtains the m-1 bundle transmitted light of thin glass plate altogether is respectively:
Wherein, α
1=r, α
2=β β ' r ' ..., α
m=β β ' r '
(2m-3), the reflectivity that r is a light when surrounding medium is injected thin glass plate 9, transmissivity is β, and r ' is the reflectivity of second plane mirror 6, and the transmissivity when reflected light penetrates thin glass plate 9 between the thin glass plate and second plane mirror 6 is β '.
Total light field that photodetector 4 receives is:
E(t)=E
1(t)+E
2(t)+…+E
m(t) (8)
Then the photocurrent of photodetector 4 outputs is:
(9)
Wherein, e is an electron charge, and Z is the intrinsic impedance of detector surface medium, and η is a quantum efficiency, and D is the area of detector photosurface, and h is a Planck's constant, and v is a laser frequency;
Because DC terms is through can filtering behind the low-pass filter 5-1, therefore, only to consider here to exchange, this exchanges and is commonly referred to electric current of intermediate frequency, and arrangement can get electric current of intermediate frequency and be:
With (6) formula and (7) formula substitution (10) formula, be by the computed in software integral result:
Ignore 1/c
3Event after can be reduced to:
(12) formula can be designated as:
Wherein:
Here, p gets natural number;
Can see that by (13) formula the information apart from d is all arranged in intermediate frequency item difference on the frequency that multiple beam heterodyne measurement method obtains and the phase differential between the thin glass plate 9 and second plane mirror 6.Be primarily aimed at intermediate frequency item intermediate frequency rate variance and analyze, because adopt Fourier transform to be easy to realize frequency measurement.At this moment, according to (13) formula, can be designated as the frequency of interference signal:
f
p=Ω(p)=K
pd (16)
That is: the distance between second plane mirror 6 and the thin glass plate 9 is:
d=Ω(p)/K
p
According to (14) formula as can be known, the frequency of interference signal is directly proportional with testing distance, and scale-up factor is:
With the light source angle frequencies omega
0, refractive index n, refraction angle θ and the galvanometer 13 constant a of medium are relevant between thin glass plate and second plane mirror 6,
When d changes, measure the variation delta d of corresponding d according to (16) formula, Δ d obtains final variable in distance amount to the measured value weighted mean then.
Should be noted that, by (13) formula and (17) formula as can be seen, the photocurrent of detector output is by the humorous wave component of difference, each respectively corresponding natural multiple of frequency, that is to say that the side frequency difference is a fixed value, after Fourier transform, on frequency spectrum, can see different harmonic frequency crests, by measuring different harmonic frequencies, just can measure between the thin glass plate and second plane mirror 6 apart from d, when d changes, just can measure the variation delta d of corresponding d according to (16) formula, Δ d just can improve the measuring accuracy of Δ d to the measured value weighted mean after handling so then.
Adopted the multi-beam laser principle of interference in the measuring method of present embodiment, referring to shown in Figure 2, because light beam can constantly reflect and reflect between the thin glass plate and second plane mirror, and this reflection and refraction for reflected light and transmitted light at infinity or the interference on the lens focal plane contribution is all arranged, so when interference is discussed, must consider repeatedly reflection and refraction effect, multi-beam laser promptly should be discussed interfere.
Embodiment five: present embodiment is to adopt the method for emulation experiment that the feasibility of the method for the measurement of electrostriction coefficient of the present invention is done further checking
The pressure measurement piezoelectric ceramic tube 7 to be measured for the treatment of in the present embodiment is selected long 15.00mm for use, thickness is the piezoelectric ceramic tube of the PZT material of 1.50mm, adopt the MATLAB software simulation to measure the electrostriction coefficient of this piezoelectric ceramic tube 7 to be measured, this electrostriction coefficient theoretical value of pressing the PZT material of piezoelectric ceramic tube 7 to be measured is 1.85 * 10
-9M/V, the feasibility of checking multi-beam laser heterodyne measurement method below.
Employed H
oSolid state laser wavelength X=2050nm, this laser is to eye-safe; Generally the refractive index of medium is got n=1 between second plane mirror 6 and the thin glass plate; The photosurface aperture of detector is D=1mm.Sensitivity 1A/W.Getting Doppler's galvanometer 13 vibration equations is: x (t)=a (t
2/ 2), get a=4 * 10 in the formula
6M/s
2In experimentation, the voltage that requires to be added in piezoelectric ceramics slowly is increased to about 800V according to certain step-length by 0, simultaneously the numerical value Δ l of record length variable quantity.
Can see by emulation, the Fourier transform frequency spectrum of the multi-beam laser heterodyne signal that obtains through signal Processing as shown in Figure 4, wherein solid line is under the laser oblique incidence situation, the Fourier transform frequency spectrum of corresponding multi-beam laser heterodyne signal when measuring PZT length variations amount Δ l; Dotted line is under the laser normal incidence situation, the Fourier transform frequency spectrum of corresponding multi-beam laser heterodyne signal when measuring PZT length variations amount Δ l.
From Fig. 4 solid line as can be seen, the spectrum distribution of multi-beam laser heterodyne signal, its frequency spectrum is spacedly distributed, and conforms to the front theoretical analysis.Simultaneously, from Fig. 4, can also see, provided the theoretical curve under the situation of normal incidence in the experiment, purpose is: in multi-beam laser heterodyne signal spectrogram, the numerical value of the centre frequency of theoretical curve when the centre frequency of first main peak of multi-beam laser heterodyne signal frequency spectrum and normal incidence in the time of can obtaining oblique incidence simultaneously, like this, be easy to the ratio of two centre frequencies obtaining:
ζ=cosθ (18)
Obtaining under the situation of centre frequency, can calculate the size of laser refraction angle θ behind thin glass plate by (18) formula, and then can obtain incident angle θ according to refraction law
0Size, the K that asks by (16) formula at last
pNumerical value, finally obtain the value of variable in distance amount Δ d between the thin glass plate and second plane mirror 6 because Δ d=Δ l, thereby according to
Can calculate the electrostriction coefficient of PZT under any incident angle situation.
Simultaneously, emulation has obtained under the different voltage condition, the multi-beam laser heterodyne signal Fourier transform frequency spectrum of correspondence as shown in Figure 5 during multi-beam laser heterodyne measurement PZT length variations amount, as can be seen from Figure 5, along with the increase of voltage, the relative position of frequency spectrum reduces to the increase frequency that the low frequency direction moves promptly along with voltage.Reason is: under the constant situation of PZT electrostriction coefficient, voltage and PZT length variations amount are proportional, and the distance that PZT length increases between the thin glass plate and second plane mirror 6 thereupon when voltage increases reduces thereupon, because frequency f
pAnd the pass apart from d between second plane mirror 6 and the lens is f
p=K
pD, K
pUnder the constant situation, frequency f
pBe linear spectrum with d, therefore, frequency also reduces the increase along with voltage thereupon during reducing apart from d between second plane mirror 6 and the lens, and the relative position of frequency spectrum moves to the low frequency direction, and Fig. 5 has verified the correctness of front theoretical analysis well.Need to prove, for the physical relationship of frequency with change in voltage is described, only provided the situation of the unimodal spectrogram after the multiple beam heterodyne FFT conversion among Fig. 5, launch to see and be similar to Fig. 4 multimodal Fourier transform spectrogram when Fig. 5 being carried out frequency spectrum.Simultaneously, because heterodyne detection is a kind of detection mode of nearly diffraction limit, detection sensitivity is high, so the signal to noise ratio (S/N ratio) of the heterodyne signal of Fig. 4 and Fig. 5 is very high.
In theoretical derivation, ignored the thickness of thin glass plate and promptly do not considered of the influence of the reflected light of device rear surface heterodyne signal, but in fact the thickness of thin glass plate is the 1mm that is generally less than that exists, for overcoming this influence, according to (17) formula as can be seen, the frequency distribution of the multiple beam heterodyne signal that the reflected light of thin glass plate rear surface produces has added the interference that wave filter just can filtering low frequency heterodyne signal in the experiment light path near the zero-frequency of frequency spectrum.Utilize above-mentioned multi-beam laser heterodyne measurement method, eight groups of data of continuous coverage have obtained the simulated measurement result of PZT length variations amount to be measured under the different voltage condition, and are as shown in table 1.
Under the different voltage condition of table 1, the simulated measurement result of PZT length variations amount and corresponding electrostriction coefficient
Need to prove: utilize the emulation experiment data of table 1, the average measurement value that can calculate the electrostriction coefficient of PZT according to (3) formula is 1.83178 * 10
-9M/V, so just can obtain measuring relative errors is 0.98%, the measuring accuracy of this method is very high as can be seen.Simultaneously, the analysis data it can also be seen that, slowly increasing under the voltage condition, systematic error that environment brings and reading error are negligible in emulation, and the error in the emulation experiment mainly comes from trueness error after the Fast Fourier Transform (FFT) (FFT) and the round-off error in the computation process.
The present invention is by introducing galvanometer 13 in light path, make the light signal of different incidents constantly add an optical frequency, satisfying under the condition of interfering through the reflected light of thin glass plate and the light of more than 3 reflection of first plane mirror like this, produce multiple beam difference interference signal, thereby will treat that measurement information successfully is modulated in the difference on the frequency of intermediate frequency heterodyne signal.In measuring samples electrostriction coefficient process, the method has obtained comprising a plurality of frequency values of the information of metal length variable quantity simultaneously at frequency domain, obtain a plurality of length variations amounts after the signal demodulation, can obtain the variable quantity of accurate sample length with electric current by weighted mean.With the iron-nickel alloy is that example experimentizes, and the relative error that electrostriction coefficient is measured is 0.98% only, has significantly improved measuring accuracy.
Compare advantage such as the multi-beam laser process of heterodyning is surveyed electrostriction coefficient and had that high room and time resolution, measuring speed are fast, the linearity good, antijamming capability is strong, dynamic response is fast, good reproducibility and measurement range are big with other measuring method; Experimental provision is simple in structure, power consumption is little, easy to operate; The experimental result error is little, the high many-sided advantage of precision.Simultaneously, because this method experimental phenomena is obvious, experimental data is reliable.Get in touch because the exploitation of this experiment and new material has directly,, can in engineering design fields such as coherent laser windfinding radar, be extensive use of so have actual using value.
Claims (6)
1. the device of multi-beam laser heterodyne measurement electrostriction coefficient, it is characterized in that this device is made up of H0 solid state laser (2), quarter-wave plate (12), galvanometer (13), first plane mirror (3), polarizing beam splitter mirror PBS (11), convergent lens (10), thin glass plate (9), second plane mirror (6), piezoelectric ceramic tube to be measured (7), two-dimentional adjustment rack (8), high-voltage power supply, photodetector (4) and signal processing system (5);
The linearly polarized light that H0 solid state laser (2) sends is incident to polarizing beam splitter mirror PBS (11) after first plane mirror (3) reflection, light beam after this polarizing beam splitter mirror PBS (11) reflection is incident to the light receiving surface of galvanometer (13) after quarter-wave plate (12) transmission, after quarter-wave plate (12) transmission, be sent to polarizing beam splitter mirror PBS (11) once more through this galvanometer (13) beam reflected, light beam after this polarizing beam splitter mirror PBS (11) transmission is incident to thin glass plate (9), light beam after this thin glass plate (9) transmission is incident to second plane mirror (6), this light beam reflects repeatedly between thin glass plate that is parallel to each other (9) and second plane mirror (6) repeatedly, obtain the light beam of multi beam after thin glass plate (9) transmission and converge on the photosurface of photodetector (4) by convergent lens (10), described photodetector (4) output electric signal is given signal processing system (5); Distance between thin glass plate (9) and second plane mirror (6) is d;
Fixedly connected with an end of piezoelectric ceramic tube to be measured (7) in the center, the back side of described second plane mirror (6), the other end of this piezoelectric ceramic tube to be measured (7) is fixed on the two-dimentional adjustment rack (8), the inside surface (7-1) of described piezoelectric ceramic tube to be measured (7) is connected with two voltage output ends of high-voltage power supply by electrode (1) respectively with outside surface (7-2), and this piezoelectric ceramic tube to be measured (7) produces axial deformation under the effect of voltage.
2. the device of multi-beam laser heterodyne measurement electrostriction coefficient according to claim 1 is characterized in that, described is 20mm apart from d.
3. the device of multi-beam laser heterodyne measurement electrostriction coefficient according to claim 1 is characterized in that, described galvanometer (13) is Doppler's galvanometer, and its vibration equation and rate equation are respectively x (t)=a (t
2/ 2) and v (t)=at, a is the vibration acceleration of galvanometer.
4. the device of multi-beam laser heterodyne measurement electrostriction coefficient according to claim 1, it is characterized in that, described signal processing system (5) is by filtering circuit (5-1), pre-amplification circuit (5-2), analog to digital conversion circuit (A/D) and control circuit DSP form, the electric signal that described filtering circuit (5-1) is exported the photodetector (4) that receives carries out sending to pre-amplification circuit (5-2) after the filtering, signal after described pre-amplification circuit (5-2) amplifies is exported to analog to digital conversion circuit (A/D), and the signal after analog-digital conversion circuit as described (A/D) will be changed sends to control circuit DSP.
5. adopt the device of the described multi-beam laser heterodyne measurement of claim 1 electrostriction coefficient to realize the method that electrostriction coefficient is measured, it is characterized in that the process of this method is:
At first, by adjusting two-dimentional adjustment rack (8), the reflecting surface and the thin glass plate (9) of second plane mirror (6) of fixedlying connected with piezoelectric ceramic tube to be measured (7) are parallel to each other, contour between two flat boards, and to make between the reflecting surface of second plane mirror (6) and the thin glass plate (9) be 20mm apart from d;
Then, will be connected with outside surface by the inside surface of electrode respectively, and the driving power of opening galvanometer (13) makes galvanometer (13) begin vibration with two electrode outputs of high-voltage power supply with piezoelectric ceramic tube to be measured (7); Simultaneously, open H0 solid state laser (2),
At last, regulate the output voltage signal U of described high-voltage power supply, the electric signal of synchronous signal disposal system (5) continuous acquisition photodetector (4) output, and the signal that collects handled, and then obtain variable in distance amount between second plane mirror (6) and the thin glass plate (9), the electromagnetism that obtains piezoelectric ceramic tube to be measured (7) according to the voltage signal of this variable in distance amount and high-voltage power supply output this moment causes coefficient of dilatation:
In the formula, Δ l is the length increment of the piezoelectric ceramic tube to be measured (7) behind the making alive, promptly equals the variable in distance amount between second plane mirror (6) and the thin glass plate (9), and l is the length of piezoelectric ceramic tube to be measured (7); d
0It is the wall thickness of piezoelectric ceramic tube to be measured (7).
6. the method for measurement electrostriction coefficient according to claim 5, it is characterized in that, described signal processing system (5) is according to the electric signal of continuous acquisition photodetector (4) output, and the signal that collects handled, and then the process that obtains the variable in distance amount between second plane mirror (6) and the thin glass plate (9) is described further, and this process is:
Light beam oblique incidence after this polarizing beam splitter mirror PBS (11) transmission to the incident angle of thin glass plate (9) is θ
0, the incident field of this moment is:
E(t)=E
0exp(iω
0t),
E in the formula
0Be constant, i represents imaginary number, ω
0Be the laser angular frequency, this angular frequency is:
ω
0=(1+at/c)/ω
ω is the incident light frequency of thin glass plate (9) in the formula, and a is the vibration acceleration of galvanometer (13), and c is the light velocity;
Then arrive thin glass plate surface constantly and be by the catoptrical light field of this surface reflection at t-l/c:
In the formula, l represents the distance of galvanometer (13) between the thin glass plate (9), and through the light of thin glass plate transmission in difference constantly by the m-1 secondary reflection of second plane mirror (6), the light field that obtains the m-1 bundle transmitted light of thin glass plate altogether is respectively:
Wherein, α
1=r, α
2=β β ' r ' ..., α
m=β β ' r '
(2m-3), the reflectivity that r is a light when surrounding medium is injected thin glass plate (9), transmissivity is β, and r ' is the reflectivity of second plane mirror (6), and the transmissivity when reflected light penetrates thin glass plate (9) between thin glass plate and second plane mirror (6) is β '.
Total light field that photodetector (4) receives is:
E(t)=E
1(t)+E
2(t)+…+E
m(t)
Then the photocurrent of photodetector (4) output is:
Wherein, e is an electron charge, and Z is the intrinsic impedance of detector surface medium, and η is a quantum efficiency, and D is the area of detector photosurface, and h is a Planck's constant, and v is a laser frequency;
Arrangement can get electric current of intermediate frequency:
Formula substitution following formula with all light fields by the computed in software integral result is:
Ignore 1/c
3Event after can be reduced to:
Following formula can be designated as:
Wherein:
Here, p gets natural number;
Then can be designated as the frequency of interference signal:
f
p=Ω(p)=K
pd
That is: the distance between second plane mirror (6) and the thin glass plate (9) is:
d=Ω(p)/K
p
When d changes, according to d=Ω (p)/K
pMeasure the variation delta d of corresponding d, Δ d obtains final variable in distance amount Δ d to the measured value weighted mean then.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2011100298816A CN102175647B (en) | 2011-01-27 | 2011-01-27 | Device and method for measuring electrostriction coefficient by multi-beam laser heterodyne method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2011100298816A CN102175647B (en) | 2011-01-27 | 2011-01-27 | Device and method for measuring electrostriction coefficient by multi-beam laser heterodyne method |
Publications (2)
Publication Number | Publication Date |
---|---|
CN102175647A true CN102175647A (en) | 2011-09-07 |
CN102175647B CN102175647B (en) | 2012-11-07 |
Family
ID=44518854
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2011100298816A Expired - Fee Related CN102175647B (en) | 2011-01-27 | 2011-01-27 | Device and method for measuring electrostriction coefficient by multi-beam laser heterodyne method |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN102175647B (en) |
Cited By (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103940353A (en) * | 2014-05-15 | 2014-07-23 | 黑龙江大学 | Linear frequency modulation multi-beam laser heterodyne second harmonic method based glass thickness measuring device and method |
CN103941585A (en) * | 2014-01-23 | 2014-07-23 | 吉林大学 | Duhem-model-based piezoelectric ceramic actuator modeling method |
CN103940365A (en) * | 2014-05-15 | 2014-07-23 | 黑龙江大学 | Device and method for measuring electrostrictive coefficients through linear frequency modulation multi-beam laser heterodyne |
CN103954591A (en) * | 2014-05-15 | 2014-07-30 | 黑龙江大学 | Device and method for measuring electrostrictive coefficient by linear frequency modulation multi-beam laser heterodyne quadratic harmonic method |
CN103954224A (en) * | 2014-05-15 | 2014-07-30 | 黑龙江大学 | Device and method for measuring glass thickness through linear frequency modulation double-beam laser heterodyning |
CN103969514A (en) * | 2014-05-15 | 2014-08-06 | 黑龙江大学 | Device and method for measuring electrostriction coefficient through linear frequency modulation double-beam laser heterodyne |
CN103983609A (en) * | 2014-05-12 | 2014-08-13 | 复旦大学 | Transparent material refractive index and thickness measuring device and measuring method based on spectrum interference |
CN107015074A (en) * | 2017-03-30 | 2017-08-04 | 信丰县包钢新利稀土有限责任公司 | A kind of measuring system of rear-earth-doped ferroelectric material piezoelectric modulus |
CN108801154A (en) * | 2018-07-02 | 2018-11-13 | 中国计量科学研究院 | Using the measuring apparatus and method of the magnetostriction material in large of Double passage laser displacement method |
CN114414529A (en) * | 2021-12-07 | 2022-04-29 | 广东科学技术职业学院 | Multi-band double-optical-fiber end-face interference salinity detection method, computer device and computer readable storage medium |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6351312B1 (en) * | 1997-07-23 | 2002-02-26 | Mitsubishi Denki Kabushiki Kaisha | Interference-type distance measuring device |
CN1477379A (en) * | 2003-07-11 | 2004-02-25 | 天津大学 | Laser vibration detestion method and its equipment |
CN1699914A (en) * | 2004-05-21 | 2005-11-23 | 安捷伦科技有限公司 | Heterodyne laser interferometer for measuring wafer stage translation |
CN101216286A (en) * | 2007-12-26 | 2008-07-09 | 上海微电子装备有限公司 | Heterodyne interferometer measuring system for measuring displacement and its measurement method |
KR20100081535A (en) * | 2009-01-06 | 2010-07-15 | 성균관대학교산학협력단 | Compensating apparatus and method for heterodyne laser interferometer |
-
2011
- 2011-01-27 CN CN2011100298816A patent/CN102175647B/en not_active Expired - Fee Related
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6351312B1 (en) * | 1997-07-23 | 2002-02-26 | Mitsubishi Denki Kabushiki Kaisha | Interference-type distance measuring device |
CN1477379A (en) * | 2003-07-11 | 2004-02-25 | 天津大学 | Laser vibration detestion method and its equipment |
CN1699914A (en) * | 2004-05-21 | 2005-11-23 | 安捷伦科技有限公司 | Heterodyne laser interferometer for measuring wafer stage translation |
CN101216286A (en) * | 2007-12-26 | 2008-07-09 | 上海微电子装备有限公司 | Heterodyne interferometer measuring system for measuring displacement and its measurement method |
KR20100081535A (en) * | 2009-01-06 | 2010-07-15 | 성균관대학교산학협력단 | Compensating apparatus and method for heterodyne laser interferometer |
Cited By (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103941585A (en) * | 2014-01-23 | 2014-07-23 | 吉林大学 | Duhem-model-based piezoelectric ceramic actuator modeling method |
CN103983609A (en) * | 2014-05-12 | 2014-08-13 | 复旦大学 | Transparent material refractive index and thickness measuring device and measuring method based on spectrum interference |
CN103954591B (en) * | 2014-05-15 | 2016-09-21 | 黑龙江大学 | The device and method of linear frequency modulation measuring electrostrictive coefficient by using multi-beam laser heterodyne quadratic harmonic method |
CN103954224B (en) * | 2014-05-15 | 2017-01-04 | 黑龙江大学 | The device and method of linear frequency modulation double light beam laser heterodyne measurement thickness of glass |
CN103954224A (en) * | 2014-05-15 | 2014-07-30 | 黑龙江大学 | Device and method for measuring glass thickness through linear frequency modulation double-beam laser heterodyning |
CN103969514A (en) * | 2014-05-15 | 2014-08-06 | 黑龙江大学 | Device and method for measuring electrostriction coefficient through linear frequency modulation double-beam laser heterodyne |
CN103940365A (en) * | 2014-05-15 | 2014-07-23 | 黑龙江大学 | Device and method for measuring electrostrictive coefficients through linear frequency modulation multi-beam laser heterodyne |
CN103969514B (en) * | 2014-05-15 | 2016-05-11 | 黑龙江大学 | The devices and methods therefor of linear frequency modulation double light beam laser heterodyne measurement electrostriction coefficient |
CN103940353A (en) * | 2014-05-15 | 2014-07-23 | 黑龙江大学 | Linear frequency modulation multi-beam laser heterodyne second harmonic method based glass thickness measuring device and method |
CN103954591A (en) * | 2014-05-15 | 2014-07-30 | 黑龙江大学 | Device and method for measuring electrostrictive coefficient by linear frequency modulation multi-beam laser heterodyne quadratic harmonic method |
CN103940353B (en) * | 2014-05-15 | 2017-02-22 | 黑龙江大学 | Linear frequency modulation multi-beam laser heterodyne second harmonic method based glass thickness measuring device and method |
CN107015074A (en) * | 2017-03-30 | 2017-08-04 | 信丰县包钢新利稀土有限责任公司 | A kind of measuring system of rear-earth-doped ferroelectric material piezoelectric modulus |
CN107015074B (en) * | 2017-03-30 | 2018-05-08 | 信丰县包钢新利稀土有限责任公司 | A kind of measuring system of rear-earth-doped ferroelectric material piezoelectric modulus |
CN108801154A (en) * | 2018-07-02 | 2018-11-13 | 中国计量科学研究院 | Using the measuring apparatus and method of the magnetostriction material in large of Double passage laser displacement method |
CN114414529A (en) * | 2021-12-07 | 2022-04-29 | 广东科学技术职业学院 | Multi-band double-optical-fiber end-face interference salinity detection method, computer device and computer readable storage medium |
CN114414529B (en) * | 2021-12-07 | 2023-09-19 | 广东科学技术职业学院 | Salinity detection method, computer device and computer readable storage medium |
Also Published As
Publication number | Publication date |
---|---|
CN102175647B (en) | 2012-11-07 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN102175647B (en) | Device and method for measuring electrostriction coefficient by multi-beam laser heterodyne method | |
CN102175376B (en) | Multi-laser-beam heterodyne micro-impulse-measuring device and method | |
CN102353856B (en) | Method for measuring electrostrictive coefficient by using multi-beam laser heterodyne quadratic harmonic method | |
CN102353916B (en) | Method for measuring magnetoconstriction coefficient through multi-beam laser heterodyne secondary harmonic method | |
CN102176022A (en) | Multi-beam laser heterodyne distance measurement device and method for measuring young modulus by adopting device | |
CN102305682B (en) | Device and method for measuring micro impulse by torsional pendulum method for modulating multi-beam laser heterodyne by using doppler galvanometer sine | |
CN102252652B (en) | Method for measuring incident angle of laser by multi-beam laser heterodyne quadratic harmonic method | |
CN102323555A (en) | Method for measuring magnetostriction constant by using multi-beam laser heterodynes | |
CN102338680B (en) | Method for measuring micro-impulse based on multi-beam laser heterodyne second harmonic method and torsion pendulum method | |
CN102252622B (en) | Device and method for measuring glass thickness by adopting sinusoidal modulation multi-beam laser heterodyning of Doppler galvanometer | |
CN102221355B (en) | Device and method for measuring laser incident angle by sinusoidally modulating multi-beam laser heterodyne with Doppler galvanometer | |
CN102323497B (en) | Device and method for measuring electrostriction coefficient through sinusoidal modulation multiple-beam laser heterodynes of Doppler galvanometer | |
CN102353490B (en) | Micro impulse measuring apparatus using torsion pendulum method of using Doppler vibrating mirror to carry out sine modulation on multiple-beam laser heterodyne and method thereof | |
CN102253002B (en) | Method for measuring electrostriction coefficient of sinusoidal modulation multi-beam laser heterodyne second harmonic waves by utilizing Doppler vibration mirror | |
CN102331235A (en) | Device and method for measuring thickness of glass through multi-beam laser heterodyne second harmonic method | |
CN102221356B (en) | Device and method for measuring laser incident angle by sinusoidally modulating multi-beam laser heterodyne secondary harmonics with Doppler galvanometer | |
CN103994848B (en) | Linear frequency modulation double light beam laser process of heterodyning and Inertia Based on Torsion Pendulum Method is adopted to measure the device of micro-momentum and the measuring method of this device | |
CN103954390B (en) | Linear frequency modulation double light beam laser process of heterodyning and Inertia Based on Torsion Pendulum Method is adopted to measure the device of micro-momentum and the measuring method of this device | |
CN102253075B (en) | Device and method for measuring metal linear expansion coefficient based on multi-beam laser heterodyne second harmonic | |
CN103954391B (en) | The method of micro-momentum is measured based on linear frequency modulation multi-beam laser heterodyne second harmonic method and Inertia Based on Torsion Pendulum Method | |
CN102353593B (en) | Device for measuring young modulus by doppler vibrating mirror sinusoidal modulation multi-beam laser heterodyne and method thereof | |
CN103954591B (en) | The device and method of linear frequency modulation measuring electrostrictive coefficient by using multi-beam laser heterodyne quadratic harmonic method | |
CN103968989A (en) | Device and method for measuring micro impulse by means of linear frequency modulation multi-beam laser heterodyne quadratic harmonic method and torsional pendulum method | |
CN103940365B (en) | Method for measuring electrostrictive coefficients through linear frequency modulation multi-beam laser heterodyne | |
CN103969514B (en) | The devices and methods therefor of linear frequency modulation double light beam laser heterodyne measurement electrostriction coefficient |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
CF01 | Termination of patent right due to non-payment of annual fee | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20121107 Termination date: 20130127 |