CN102175319A - Discrete wavelength interval high-resolution microspectrometer based on planar integrated waveguide grating - Google Patents
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Abstract
The invention discloses a discrete wavelength interval high-resolution microspectrometer based on planar integrated waveguide grating. The microspectrometer comprises a light filter, a light input waveguide, a planar integrated waveguide grating and a photoelectric detector array, wherein one end of the light input waveguide is connected with the light filter while the other end thereof is connected with a free transmission zone of the planar integrated waveguide grating, and the photoelectric detector array is connected with an output plane of the planar integrated waveguide grating. Or, the photoelectric detector array is connected with the output plane of the planar integrated waveguide grating through a light output waveguide array. The microspectrometer diminishes the free spectral scope from entire continuous spectrum to the spectral scope sum of discrete wavelength interval by enabling the grating to work at different orders of diffraction, thereby improving the order of diffraction, reducing the manufacturing difficulty of process as well as lowering the output waveguide and the number of the photoelectric detector arrays and widening the spectral analysis scope of spectrometer without deteriorating the resolution of spectrometer.
Description
Technical field
The present invention relates to micro spectrometer, especially relate to a kind of interval high resolving power low-light of discrete wavelength spectrometer based on the integrated waveguide optical grating in plane.
Background technology
The research of spectrum can be traced back to 1666 the earliest, and newton has resolved into the versicolor spectrum from ruddiness to the purple light to the sunshine by glass prism then, thereby the discovery white light is made up of versicolor light.To today, the application of spectral analysis has been penetrated into every field such as physics, chemistry, biology, medical science.
The needs of spectroscopy applications are also constantly expediting the emergence of the development of spectrometric instrument.Spectrometer is to be the optical instrument of spectrum line with the photolysis in certain wavelength band.For spectrometer, of paramount importance two parameters, one is spectral range of analysis, one is spectrally resolved precision.The large-scale spectrometer of the many gratings of present business-like high-performance can reach very high spectrally resolved precision, also can realize the needs of analyzing simultaneously in the spectral range of broad.Yet this large-scale spectrometer is often not only expensive but also account for volume, especially needs to use under the occasion of rig-site utilization very inconvenient, very restricted in a lot of occasions.
In recent years, along with the development of micro-optic technology and integrated optics technique, the low-light spectrometer has obtained development rapidly, and has obtained using widely.The low-light spectrometer can be realized small size, low cost, small sample quantities, processing time fast, yet, be subjected to the restriction of structure, size and light-splitting method, want to obtain big spectral range of analysis simultaneously and high spectrally resolved precision (Subnano-class) is a very difficult thing to the low-light spectrometer.As P. Cheben, J. H. Schmid etc. is at their article " A high-resolution silicon-on-insulator arrayed waveguide grating microspectrometer with sub-micrometer aperture waveguide " OPTICS EXPRESS, VOL. 15, NO. 5, the low-light spectrometer of mentioning in 2007 can reach the spectrally resolved precision of 0.2nm, but its total spectral range of analysis has only 10nm; Ivan Avrutsky for another example, Kalyani Chaganti, Ildar Salakhutdinov and Gregory Auner is at their article " Concept of a miniature optical spectrometer using integrated optical and micro-optical components " APPLIED OPTICS, VOL. 45, NO. 30, it is that 450nm is the spectrum of the 200nm scope of 650nm to wavelength that the low-light spectrometer of mentioning among the October 2006 can be surveyed wavelength, but its spectral resolution has only 2nm.
For the low-light spectrometer based on the integrated waveguide optical grating in plane, size is little, cost is low, resolving accuracy is high, good stability is its advantage, if but the wavelength analysis scope is bigger, and the order of diffraction time will certainly diminish, and can make the element manufacturing difficulty like this.With the etched diffraction grating is example, and the little order of diffraction is inferior can to cause the undersized of grating tooth, makes the requirement of making precision is improved greatly; Be example again with the array waveguide grating, the little order of diffraction is inferior directly to cause the length difference between the Waveguide array little, and using general design to make can't be separated from each other between the Waveguide array.
In some fluorescence analysis fields, often need some certain wavelengths section is carried out the scanning and the monitoring of spectrum.For example, in plant growth adverse circumstance monitoring field, people will carry out monitoring analysis to chlorophyllous fluorescence excitation spectrum, and its fluorescence Spectra is some discrete wavelength period, concentrates on 440nm, and 520nm is near 685nm and the 740nm.Owing to need large tracts of land that it is carried out real-time monitoring, therefore, the low-light spectrometer is the selection of its best, yet the spectrum span of these wavelength is also bigger, use present low-light spectrometer often or be difficult to realize the high resolving power of spectrum, or can be big especially as the low-light spectrometer manufacture difficulty based on the integrated waveguide optical grating in plane.
Summary of the invention
At disadvantages of background technology, the object of the present invention is to provide a kind of interval high resolving power low-light of discrete wavelength spectrometer based on the integrated waveguide optical grating in plane, inferior by making the integrated waveguide optical grating in plane be operated in the different diffraction level, with Free Spectral Range from whole continuous spectrum be reduced into the discrete wavelength interval spectral range and, it is inferior to have improved the order of diffraction, reduced the technology manufacture difficulty, under the situation of sacrificial light spectrometer resolution not, reduced the number of output waveguide and photodetector array and expanded the spectral range of analysis of spectrometer.
The technical scheme that the present invention solves its technical matters employing is:
The present invention includes optical filter, light input waveguide, the integrated waveguide optical grating in plane and photodetector array; One end of light input waveguide is connected with optical filter, and the other end of light input waveguide is connected with the free transmission range of the integrated waveguide optical grating in plane, and photodetector array is connected with the output plane of the integrated waveguide optical grating in plane.
Between the output plane of photodetector array and the integrated waveguide optical grating in plane, be connected with the optical output waveguide array.
The integrated waveguide optical grating in described plane is an etched diffraction grating.
The integrated waveguide optical grating in described plane is an array waveguide grating.
Described etched diffraction grating comprises free transmission region and diffraction grating zone.
Described array waveguide grating comprises the first free transmission range, the Waveguide array district and the second free transmission range.
The analysis spectrum of described low-light spectrometer is the discrete wavelength interval, and the integrated waveguide optical grating in plane works in the different order of diffraction time to the spectrum in different wave length interval, Free Spectral Range be each discrete wavelength interval spectral range with.
The present invention compares with background technology, and the beneficial effect that has is:
The present invention is inferior by making grating be operated in the different diffraction level, with Free Spectral Range from whole continuous spectrum be reduced into the discrete wavelength interval spectral range and, it is inferior to have improved the order of diffraction, reduced the technology manufacture difficulty, under the situation of sacrificial light spectrometer resolution not, reduced the number of output waveguide and photodetector array and expanded the spectral range of analysis of spectrometer.
Description of drawings
Fig. 1 is one embodiment of the present invention synoptic diagram.
Fig. 2 is the filter effect figure of optical filter.
Fig. 3 is the blazed grating structural representation.
Fig. 4 is based on the interval high resolution micro spectrometer output spectrum of etched diffraction grating discrete wavelength distribution schematic diagram.
Fig. 5 is the array wave-guide grating structure synoptic diagram.
Among the figure: 1, optical filter, 2, the light input waveguide, 3, the integrated waveguide optical grating in plane, 4, optical output waveguide array, 5, photodetector array, 10, the array waveguide grating first free transmission range, 20, the array waveguide grating second free transmission range, 30, array waveguide grating Waveguide array district.
Embodiment
The present invention is further illustrated below in conjunction with drawings and Examples.
First kind of embodiment of the present invention comprises optical filter 1, light input waveguide 2, etched diffraction grating 3 and photodetector array 5; One end of light input waveguide 2 is connected with optical filter 1, and the other end of light input waveguide 2 is connected with the free transmission range of the integrated waveguide optical grating 3 in plane, and photodetector array 5 is connected with the output plane of etched diffraction grating 3.
Second kind of embodiment of the present invention comprises optical filter 1, light input waveguide 2, etched diffraction grating 3 and photodetector array 5; One end of light input waveguide 2 is connected with optical filter 1, and the other end of light input waveguide 2 is connected with the free transmission range of the integrated waveguide optical grating 3 in plane, and photodetector array 5 is connected with the output plane of the integrated waveguide optical grating 3 in plane.Between the output plane of photodetector array 5 and etched diffraction grating 3, be connected with optical output waveguide array 4.
The third embodiment of the present invention comprises optical filter 1, light input waveguide 2, array waveguide grating 3 and photodetector array 5; One end of light input waveguide 2 is connected with optical filter 1, and the other end of light input waveguide 2 is connected with the free transmission range of the integrated waveguide optical grating 3 in plane, and photodetector array 5 is connected with the output plane of array waveguide grating 3.
The 4th kind of embodiment of the present invention comprises optical filter 1, light input waveguide 2, array waveguide grating 3 and photodetector array 5; One end of light input waveguide 2 is connected with optical filter 1, and the other end of light input waveguide 2 is connected with the free transmission range of the integrated waveguide optical grating 3 in plane, and photodetector array 5 is connected with the output plane of the integrated waveguide optical grating 3 in plane.Between the output plane of photodetector array 5 and array waveguide grating 3, be connected with optical output waveguide array 4.
Fig. 1 is second kind of embodiment synoptic diagram of the present invention.It comprises optical filter 1, light input waveguide 2, etched diffraction grating 3, optical output waveguide array 4 and photodetector array 5.One end of light input waveguide 2 is connected with optical filter 1, and the other end of light input waveguide 2 is connected with the free transmission range of etched diffraction grating 3, is connected with optical output waveguide array 4 between the output plane of photodetector array 5 and etched diffraction grating 3.Described optical filter 1 is used for undesired signal or some ground unrests in the filtering light to be analyzed, the light that sees through the different wave length interval of optical filter 1 enters light input waveguide 2, and propagate in the planar waveguide of etched diffraction grating 3 through optical waveguide, utilize the periodic spectrum of etched diffraction grating 3, make the light in different wave length interval work in the different order of diffraction time, overlapping imaging is not in the output plane of etched diffraction grating, optical output waveguide array 4 is sent light signal into photodetector array 5 and is converted electric signal to, thereby extracts relevant spectral information.Inferior by making etched diffraction grating 3 be operated in the different diffraction level, with Free Spectral Range from whole continuous spectrum scope be reduced into the discrete wavelength interval spectral range and, it is inferior to have improved the order of diffraction, increased the size of grating tooth, reduced the technology manufacture difficulty, under the situation of sacrificial light spectrometer resolution not, reduced the number of output waveguide and photodetector array and expanded the spectral range of analysis of spectrometer.
Fig. 2 has provided the filter effect figure of optical filter 1 described in Fig. 1.The employing optical filter mainly is the stray light for filtering spectrometer inoperative range of wavelengths, because the periodic spectrum of the integrated waveguide optical grating in plane, the light outgoing position of different diffraction level can overlap, and therefore needs these stray lights of filtering.According to the requirement in operation wavelength interval, optical filter can be bandpass filter, band resistance optical filter, short pass filter, long pass filter, duplex bandpass filter or the combination between them.
Among Fig. 1, for etched diffraction grating 3, its diffraction grating partly is reflective blazed grating, as shown in Figure 3.The grating equation that it satisfied is
, wherein
Be the incident angle of grating,
Be the grating diffration angle,
Be the effective refractive index of planar waveguide, d is the distance between the adjacent gratings tooth,
Be operation wavelength, m is that the grating diffration level is inferior.Etched diffraction grating 3 has periodic spectrum, if wavelength
Order of diffraction position, m rank and wavelength
Order of diffraction position, m-1 rank overlap, then
Be oneself
By spectral range (FSR), note is done
Therefore, if their wavelength difference of different input wavelengths just is the integral multiple of Free Spectral Range (FSR), just will on imaging surface, focus on same position.In common spectral analysis, this is the situation that a kind of needs are avoided, because this can cause the entanglement of spectral information.So generally, in the design of etched diffraction grating, all analytical wavelengths all are in the same order of diffraction time, and this there is no too big problem in little spectral range of analysis is used, but when the spectral range span of required analysis is bigger, owing to Free Spectral Range
Increase, can cause the reduction of optical grating diffraction level time m value, according to grating equation
, also will reduce between the adjacent gratings tooth apart from d, this can bring very big difficulty to making.In addition, big wavelength coverage also means under the same spectrally resolved precision situation more output channel, the photodetector array of big figure more, bigger device size.In some fluorescence analysis fields, such as plant growth adverse circumstance monitoring field, people often only need be scanned monitoring to some certain wavelengths section (440nm, 520nm, 685nm and 740nm, especially 685nm and 740nm).These certain wavelengths section spans are also bigger, if all wavelengths section is encompassed in the Free Spectral Range, undoubtedly, will run into the variety of issue that the epimere literal is mentioned.Such as, if make Free Spectral Range be from 430nm to 750nm, the wavelength span is 320nm, then the m value only is about 2, like this between the grating tooth apart from d only less than 500nm, this is a very thing of difficulty for producing high performance device, in addition, adjacent output channel wavelength interval is 0.2nm if make, output optical waveguide array that then needs and photodetector array number are 1600, and this can make encapsulation difficulty more, decrease in yield, it is big that size becomes, thereby increased cost of manufacture.
But, if utilize the periodic spectrum of etched diffraction grating, make the light of different range of wavelengths work in the different order of diffraction time, just can with Free Spectral Range from whole continuous spectrum be reduced into the discrete wavelength interval each spectral range and, thereby it is inferior to improve the order of diffraction, can increase the size of grating tooth on the one hand, reduce the technology manufacture difficulty; On the other hand for etched diffraction grating, changing Free Spectral Range can't influence the mould spot size of input light field, so just can not change the optical field distribution on the grating, though the increase of grating tooth can make required grating tooth total number N diminish, but because the order of diffraction time m is also improving simultaneously, therefore the chromatic resolving power R (R=mN) of grating can't change, if adjacent output channel wavelength interval does not change yet, so just can under the situation of sacrificial light spectrometer resolution not, reduce the number of output waveguide and photodetector array, and expand the spectral range of analysis of spectrometer.
Be exemplified below:
Now need the plant chlorophyll fluorescence Spectra is monitored, detecting wavelength period is 680nm ~ 690nm and 735nm ~ 745nm.
If take from by spectral range is that channel spacing is less than 0.2nm between the adjacent output optical waveguide about two discrete wavelength section spectral ranges and 20nm.Wavelength period 680nm ~ 690nm work the order of diffraction time is 33, and wavelength period 735nm ~ 745nm work order of diffraction time is 30, during design, the light of 680nm ~ 690nm wavelength period is mapped near the 750nm according to periodic spectrum.Figure 4 shows that the output spectrum distribution plan of the interval spectrometer of this discrete wavelength at output terminal, wherein wavelength period is the not overlapping each other output of light of light and the wavelength period 735nm ~ 745nm of 680nm ~ 690nm.
And if take from by spectral range for whole when interval from 680nm to 745nm, then this moment, Free Spectral Range was about 65nm, and the order of diffraction of grating work time then is 10.More than the design result contrast tabulation of two kinds of methods as shown in table 1.
Table 1
The more than comparison of two groups of data in the table, the design that the continuous wavelength interval is compared in the design in proof discrete wavelength interval can improve the order of diffraction time really, increase the grating teeth size, reduce manufacture difficulty, simultaneously such as previously analyzed, under and the situation that input light field mould spot size is constant constant in the adjacency channel wavelength interval, sacrificial light spectrometer resolution not, can reduce the number of output waveguide and photodetector array, and spectral range of analysis that can the spread spectrum instrument.
If the interval span in discrete wavelength interval is bigger, then effect can be more obvious, and following table is depicted as other one group of design parameter, still the plant chlorophyll fluorescence Spectra is monitored, detecting wavelength period is 435nm ~ 445nm and 735nm ~ 745nm, and this moment, the interval span in discrete wavelength interval was bigger.
Table 2
Fig. 5 is in the 4th kind of embodiment, the synoptic diagram of light input waveguide, array waveguide grating and output optical waveguide array.Comprise light input waveguide 2, array waveguide grating 3, the defeated waveguide array 4 of light.Array waveguide grating 3 is again by the first free transmission range 10, and Waveguide array district 30, the second free transmission ranges 20 constitute.Wherein the branch light action is played in Waveguide array district 30, is equivalent to grating.Light to be analyzed enters the array waveguide grating 3 from light input waveguide 2, utilize the periodic spectrum of array waveguide grating 3, make the light in different wave length interval work in the different order of diffraction time, overlapping imaging is not in the output plane of the array waveguide grating second free transmission range 20.Inferior by making array waveguide grating 3 be operated in the different diffraction level, with Free Spectral Range from whole continuous spectrum scope be reduced into the discrete wavelength interval spectral range and, it is inferior to have improved the order of diffraction, increased the length difference between the Waveguide array, reduced the technology manufacture difficulty, under the situation of sacrificial light spectrometer resolution not, reduced the number of output waveguide and photodetector array and expanded the spectral range of analysis of spectrometer.
The foregoing description is used for the present invention that explains, rather than limits the invention.In the protection domain of spirit of the present invention and claim, any modification and change to the present invention makes all fall into protection scope of the present invention.
Claims (7)
1. the interval high resolving power low-light of the discrete wavelength spectrometer based on the integrated waveguide optical grating in plane is characterized in that: comprise optical filter (1), light input waveguide (2), the integrated waveguide optical grating in plane (3) and photodetector array (5); One end of light input waveguide (2) is connected with optical filter (1), and the other end of light input waveguide (2) is connected with the free transmission range of the integrated waveguide optical grating in plane (3), and photodetector array (5) is connected with the output plane of the integrated waveguide optical grating in plane (3).
2. the interval high resolving power low-light of a kind of discrete wavelength based on the integrated waveguide optical grating in plane according to claim 1 spectrometer is characterized in that: be connected with optical output waveguide array (4) between the output plane of photodetector array (5) and the integrated waveguide optical grating in plane (3).
3. a kind of interval high resolving power low-light of discrete wavelength spectrometer based on the integrated waveguide optical grating in plane according to claim 1, it is characterized in that: the integrated waveguide optical grating in described plane (3) is an etched diffraction grating.
4. a kind of interval high resolving power low-light of discrete wavelength spectrometer based on the integrated waveguide optical grating in plane according to claim 1, it is characterized in that: the integrated waveguide optical grating in described plane (3) is an array waveguide grating.
5. a kind of interval high resolving power low-light of discrete wavelength spectrometer based on the integrated waveguide optical grating in plane according to claim 3, it is characterized in that: described etched diffraction grating comprises free transmission region and diffraction grating zone.
6. a kind of interval high resolving power low-light of discrete wavelength spectrometer based on the integrated waveguide optical grating in plane according to claim 4, it is characterized in that: described array waveguide grating comprises the first free transmission range, the Waveguide array district and the second free transmission range.
7. a kind of interval high resolving power low-light of discrete wavelength spectrometer according to claim 1 based on the integrated waveguide optical grating in plane, it is characterized in that: the analysis spectrum of described low-light spectrometer is the discrete wavelength interval, the integrated waveguide optical grating in plane (3) works in the different order of diffraction time to the spectrum in different wave length interval, Free Spectral Range be each discrete wavelength interval spectral range with.
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105547478A (en) * | 2016-01-27 | 2016-05-04 | 浙江大学 | Imaging spectrometer on the basis of etched diffraction grating |
| CN106441573A (en) * | 2016-09-09 | 2017-02-22 | 电子科技大学 | Small spectrometer based on multimode optical waveguide |
| WO2017063330A1 (en) * | 2015-10-14 | 2017-04-20 | 厦门大学 | Spectrometer integrated chip and manufacturing method |
| CN106707409A (en) * | 2015-08-14 | 2017-05-24 | 清华大学 | Device and method for realizing spatial light dispersion |
| CN113280918A (en) * | 2021-04-28 | 2021-08-20 | 厦门大学 | Dispersion detection chip and manufacturing method thereof |
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| CN1715976A (en) * | 2005-06-29 | 2006-01-04 | 浙江大学 | Single fiber multiple wave-length division multiplexer based on wave guide grating |
| US20060023212A1 (en) * | 2002-09-20 | 2006-02-02 | Junji Nishii | Spectrometer using diffraction grating |
| CN101672695A (en) * | 2009-09-23 | 2010-03-17 | 广西大学 | Diffraction grating spectrometer |
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| US20060023212A1 (en) * | 2002-09-20 | 2006-02-02 | Junji Nishii | Spectrometer using diffraction grating |
| CN1715976A (en) * | 2005-06-29 | 2006-01-04 | 浙江大学 | Single fiber multiple wave-length division multiplexer based on wave guide grating |
| CN101672695A (en) * | 2009-09-23 | 2010-03-17 | 广西大学 | Diffraction grating spectrometer |
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| 《OPTICS EXPRESS》 20070305 P. Cheben etal A high-resolution silicon-on-insulator arrayed waveguide grating microspectrometer with sub-micrometer aperture waveguides 第15卷, 第5期 * |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106707409A (en) * | 2015-08-14 | 2017-05-24 | 清华大学 | Device and method for realizing spatial light dispersion |
| WO2017063330A1 (en) * | 2015-10-14 | 2017-04-20 | 厦门大学 | Spectrometer integrated chip and manufacturing method |
| CN105547478A (en) * | 2016-01-27 | 2016-05-04 | 浙江大学 | Imaging spectrometer on the basis of etched diffraction grating |
| CN106441573A (en) * | 2016-09-09 | 2017-02-22 | 电子科技大学 | Small spectrometer based on multimode optical waveguide |
| CN106441573B (en) * | 2016-09-09 | 2018-03-27 | 电子科技大学 | A kind of miniature spectrometer based on multimode lightguide |
| CN113280918A (en) * | 2021-04-28 | 2021-08-20 | 厦门大学 | Dispersion detection chip and manufacturing method thereof |
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