CN102135106A - Clean fan economizer system - Google Patents
Clean fan economizer system Download PDFInfo
- Publication number
- CN102135106A CN102135106A CN2011100353989A CN201110035398A CN102135106A CN 102135106 A CN102135106 A CN 102135106A CN 2011100353989 A CN2011100353989 A CN 2011100353989A CN 201110035398 A CN201110035398 A CN 201110035398A CN 102135106 A CN102135106 A CN 102135106A
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- China
- Prior art keywords
- card casket
- those
- filter screen
- fan
- energy conserving
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 238000004140 cleaning Methods 0.000 claims abstract description 41
- 230000003287 optical effect Effects 0.000 claims description 22
- 210000000352 storage cell Anatomy 0.000 abstract 3
- 230000000712 assembly Effects 0.000 abstract 1
- 238000000429 assembly Methods 0.000 abstract 1
- 239000000758 substrate Substances 0.000 description 13
- 238000010586 diagram Methods 0.000 description 8
- 239000000428 dust Substances 0.000 description 5
- 208000034699 Vitreous floaters Diseases 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000001914 filtration Methods 0.000 description 2
- 230000000007 visual effect Effects 0.000 description 2
- 230000004913 activation Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000004134 energy conservation Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000007306 turnover Effects 0.000 description 1
Images
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- Air Conditioning Control Device (AREA)
- Ventilation (AREA)
- Cold Air Circulating Systems And Constructional Details In Refrigerators (AREA)
Abstract
An energy-saving system for a cleaning fan comprises a plurality of sensing assemblies, a plurality of filter screen fan units and a plurality of control units. The sensing components are arranged in the cassette storage cells, and each sensing component is used for detecting whether a cassette enters the corresponding cassette storage cell or not. The filter screen fan unit is arranged at one end of the cassette storage grid. The control unit is respectively connected with the sensing assembly, the filter screen fan unit and the management unit so as to control the filter screen fan unit according to signals of the sensing assembly and the management unit. Each filter fan unit is operated after the corresponding sensing component or the management unit detects that the cassette enters the cassette storage cell.
Description
Technical field
The present invention relates to a kind of cleaning equipment, particularly a kind of cleaning fan energy conserving system in order to the power consumption that reduces the filter screen fan unit.
Background technique
In semiconductor or panel technology, a large amount of technology is all carried out on substrate.For fear of particulate in reaction is carried out or dust fall pollutes for substrate; a plurality of filter screen fan units mostly are installed in the chamber of storage substrate at present; avoid particulate or dust fall attached to substrate surface by the air-flow that the filter screen fan unit is sent; simultaneously also can blow down the dust that in transportation process, adheres on the substrate in the lump, to guarantee the technology reliability.
The filter screen that the filter screen fan unit includes fan and is arranged at the fan wind inlet, air is earlier via behind the strainer filtering, and the air of this cleaning blows to substrate to avoid particulate or dust fall attached on the substrate by fan again.Mostly present filter screen fan unit is continual continuous running in chamber.Yet along with the development of environmental consciousness, the continual drive manner of this kind can expend many electric energy and can't reach energy-conservation effect.
Summary of the invention
Technical problem to be solved by this invention provides a kind of cleaning fan energy conserving system, in order to reduce the power consumption of filter screen fan unit.
To achieve these goals, the invention provides a kind of cleaning fan energy conserving system.Cleaning fan energy conserving system is applied in the chamber, and chamber includes a plurality of card casket Coorgs.Cleaning fan energy conserving system comprises a plurality of sensing components, a plurality of filter screen fan unit, and a plurality of control unit.Sensing component is arranged in the card casket Coorg, and whether each sensing component has card casket to enter among the card casket Coorg of correspondence in order to detect.The filter screen fan unit is arranged at an end of card casket Coorg.Control unit connects sensing component and filter screen fan unit respectively, and with the SC sigmal control filter screen fan unit according to sensing component, wherein each filter screen fan unit only detects at the sensing component of correspondence and just can operate after the card casket enters card casket Coorg.
Chamber comprises a passage, and card casket Coorg is stacked in the passage both sides, and cleaning fan energy conserving system also comprises the central fan that is arranged at the passage top.Each card casket Coorg comprises relative entry end with terminal, and the filter screen fan unit is arranged at end.The filter screen fan unit comprises filter screen and fan, and filter screen is arranged at the wind inlet of fan.Sensing component can be contact-making switch, and contact-making switch is arranged at the end of card casket Coorg respectively.Sensing component can be photoelectric sensor, sensing component optical transmitting set and optical receiver, and optical transmitting set and optical receiver are arranged at respectively on the two lateral walls of card casket Coorg.Cleaning fan energy conserving system also comprises power supply unit, and power supply unit is connected with the filter screen fan unit respectively.Cleaning fan energy conserving system also comprises Database Unit, and the data of Database Unit are sent to control unit.
Technique effect of the present invention is: cleaning fan energy conserving system can see through the sensing component that is installed in the card casket Coorg, whether be placed with the card casket in the sensor card casket Coorg, this sensing signal can be sent in the control unit, open the filter screen fan unit of correspondence when in card casket Coorg, being placed with card casket, and close corresponding filter screen fan unit when in card casket Coorg, not being placed with card casket, to realize the purpose of the saving energy.
Describe the present invention below in conjunction with the drawings and specific embodiments, but not as a limitation of the invention.
Description of drawings
Fig. 1 cleans fan energy conserving system first embodiment's side view for the present invention;
Fig. 2 is cleaning fan energy conserving system first an embodiment's of the present invention block diagram;
Fig. 3 is cleaning fan energy conserving system second an embodiment's of the present invention partial schematic diagram;
Fig. 4 is cleaning fan energy conserving system the 3rd an embodiment's of the present invention partial schematic diagram;
Fig. 5 is cleaning fan energy conserving system the 4th an embodiment's of the present invention block diagram.
Wherein, reference character
100 chambers, 110 card casket Coorgs
112 entry ends, 114 ends
120 card caskets, 121 the first side walls
122 fins, 123 second sidewalls
125 the 3rd sidewalls 127 the 4th sidewall
130 substrates, 140 sensing components
142 optical transmitting sets, 144 optical receivers
150 filter screen fan units, 151 wind inlets
152 fans, 153 exhaust outlets
154 filter screens, 160 control units
170 passages, 180 central fan
190 power supply units, 200 management units
210 Database Unit, 220 display floaters
Embodiment
Below in conjunction with accompanying drawing structural principle of the present invention and working principle are done concrete description:
With reference to Fig. 1, it cleans fan energy conserving system first embodiment's sectional view for the present invention.Cleaning fan energy conserving system is for being applied among the chamber 100.Chamber 100 includes a plurality of card casket Coorgs 110, and each card casket Coorg 110 is in order to ccontaining at least one card casket 120.Card casket 120 is in order to ccontaining a plurality of substrates (figure does not show).Cleaning fan energy conserving system includes a plurality of sensing components 140, a plurality of filter screen fan unit 150, and a plurality of control unit 160.Wherein sensing component 140 is arranged in the card casket Coorg 110, and filter screen fan unit 150 is arranged at an end of card casket Coorg 110.160 of control units are to connect sensing component 140 and filter screen fan unit 150 respectively.
Have a passage 170 in the chamber 100, card casket Coorg 110 for being arranged on the relative both sides of passage 170 with embarking on journey.The card casket Coorg 110 of each row is for piling up setting.Wherein each card casket Coorg 110 includes a relative entry end 112 and an end 114.Card casket 120 can be sent into chamber 100 by passage 170, is entered in the card casket Coorg 110 by each entry end 112 and places.
Whether sensing component 140 is arranged in the card casket Coorg 110, have card casket 120 to enter in the card casket Coorg 110 in order to detect.For example, when card casket 120 does not enter card casket Coorg 110, sensing component 140 can continue to send forbidden energy (Disable) signal to control unit 160, and after card casket 120 entered card casket Coorg 110, sensing component 140 can send activation (Enable) signal to control unit 160.
150 of filter screen fan units are arranged on the end 114 of card casket Coorg 110, and the air-flow that filter screen fan unit 150 is blown out then is to blow to entry end 112 by terminal 114.Whether 160 of each control units are to operate according to the indivedual filter screen fan units 150 of the SC sigmal control of the sensing component 140 of correspondence.Wherein each filter screen fan unit 150 has only sensed at the sensing component 140 of correspondence and just can turn round when card casket 120 enters this card casket Coorg 110.
In other words; when sensing component 140 detects when being placed with card casket 120 in the card casket Coorg 110; receive this control unit of placing information 160 and can start corresponding filter screen fan unit 150 and make its running, rest on the substrate (scheming not show) in the card casket 120 to avoid particulate in the chamber 100 or dust fall.When sensing component 140 detects in the card casket Coorg 110 when placing card casket 120, receive 160 of this control units of not placing information and can close corresponding filter screen fan unit 150 it is shut down, to reach effect of saving energy.
Cleaning fan energy conserving system also includes a central fan 180, and central fan 180 is arranged on the top of passage 170.The air-supply wind direction of central fan 180 is for to be blowed to the bottom by passage 170 tops, and producing down current at passage 170 places, and then the air-flow in the stable chamber 100 is avoided the flow-disturbing doubt.
With reference to Fig. 2, it is cleaning fan energy conserving system first an embodiment's of the present invention block diagram.Cleaning fan energy conserving system includes a plurality of sensing components 140, a plurality of filter screen fan unit 150, a plurality of control unit 160, and a power supply unit 190.Wherein sensing component 140, filter screen fan unit 150 are configuration in groups with control unit 160.150 of filter screen fan units are parallel with one another.Whether each sensing component 140 enters in the card casket Coorg in order to the sensor card casket.The signal of sensing component 140 is for being sent in the corresponding control unit 160, to open by control unit 160 or to close filter screen fan unit 150.190 of power supply units provide the required electric power of filter screen fan unit 150.
With reference to Fig. 3, it is cleaning fan energy conserving system second an embodiment's of the present invention partial schematic diagram.This figure describes with single card casket Coorg 110, and the visual angle of card casket Coorg 110 is to see terminad 114 from the entry end 112 of Fig. 1.Card casket 120 includes the relative the first side wall 121 and second sidewall 123, and other relative the 3rd sidewall 125 and the 4th sidewall 127.Wherein the first side wall 121 and second sidewall 123 are connected with the 3rd sidewall 125 and the 4th sidewall 127 respectively.Card casket 120 is respectively opening in the face of the two sides of entry end 112 (see figure 1)s and terminal 114 (see figure 1)s.Be respectively arranged with a plurality of fins 122 on the card the first side wall 121 of casket 120 and second sidewall 123, substrate 130 can be placed on the fin 122 and locate.Filter screen fan unit 150 is arranged on the terminal (see figure 1) of card casket Coorg 110, and the air-flow that filter screen fan unit 150 is blown out is entered in the card casket 120 by the opening of card casket 120, to keep the turbidity test of substrate 130.
Sensing component can be photoelectric sensor.Sensing component comprises an optical transmitting set 142 and an optical receiver 144.Optical transmitting set 142 and optical receiver 144 are for to be separately positioned on the relative two side.Optical transmitting set 142 can be separately positioned on the first side wall 121 and second sidewall 123 with optical receiver 144.Perhaps, optical transmitting set 142 can be separately positioned on the 3rd sidewall 125 and the 4th sidewall 127 with optical receiver 144.
After card casket 120 enters card casket Coorg 110, card casket 120 can interdict the light that is sent to optical receiver 144 by optical transmitting set 142, sensing component 140 senses card casket 120 and enters card casket Coorg 110, and this obstruction signal is sent in the control unit 160, make control unit 160 open corresponding filter screen fan unit 150.Relatively, after card casket 120 left card casket Coorg 110, optical receiver 144 just can receive the light that optical transmitting set 142 is sent again, and the signal of connecting is sent to control unit 160, made control unit 160 close corresponding filter screen fan unit 150.
With reference to Fig. 4, it is cleaning fan energy conserving system the 3rd an embodiment's of the present invention partial schematic diagram.This figure describes with single card casket Coorg 110, and the visual angle of card casket Coorg 110 is a side view.Card casket Coorg 110 includes entry end 112 and terminal 114.Filter screen fan unit 150 is arranged on the end 114 of card casket Coorg 110.Filter screen fan unit 150 includes a fan 152 and a filter screen 154.Fan 152 has a wind inlet 151 and an exhaust outlet 153.The exhaust outlet 153 of fan 152 is in the face of card casket Coorg 110, and 154 of filter screens are arranged on the exhaust outlet 153 of fan 152, enter the air of card casket Coorg 110 with pre-filtering.
With reference to Fig. 5, it is cleaning fan energy conserving system the 4th an embodiment's of the present invention block diagram.Cleaning fan energy conserving system also includes a management unit 200 and sensing component 140, filter screen fan unit 150, control unit 160, and power supply unit 190 electrically connects.Management unit 200 can be a computer.Management unit 200 includes the Database Unit 210 of card casket Coorg, and Database Unit 210 can be a software, and in order to management and the turnover state of record card casket in card casket Coorg, wherein the data of Database Unit 210 are for being sent in the control unit 160.Management unit 200 can also be connected with display floater 220, and wherein display floater 220 is according to whether having deposited the card casket in the Database Unit 210 display card casket Coorgs.
Whether have in utilizing sensing component 140 sensor card casket Coorgs in the present embodiment the card of the placement casket, whether the card casket in the Database Unit 210 of also can arranging in pairs or groups is deposited information decision filter screen fan unit 150 and is operated.Particularly, when Database Unit 210 shows that these card casket Coorgs are placed with card casket and sensing component 140 and have also sensed the card casket when entering, the filter screen fan unit 150 commentaries on classics wind speed of correspondence are strong.When Database Unit 210 shows that but these card casket Coorgs are placed with card casket sensing component 140 and have not sensed the card casket when entering, the filter screen fan unit 150 of correspondence turns round a little less than wind speed are.But do not place card casket sensing component 140 and sensed the card casket when entering when Database Unit 210 shows these card casket Coorgs, the filter screen fan unit 150 of correspondence turns round a little less than wind speed are.Do not place card casket and sensing component 140 and also do not sensed the card casket when entering when Database Unit 210 shows these card casket Coorgs, the filter screen fan unit 150 of the correspondence wind speed that turn round are weak or directly close this filter screen fan unit 150.
Following table is cleaning fan energy conserving system one embodiment's of use Fig. 5 truth table:
Cleaning fan energy conserving system 100 can decide the running wind speed of corresponding filter screen fan unit 150 according to the starting state of content of being put down in writing in the card casket Database Unit 210 and sensing component 140.Especially can be according in the Database Unit 210, whether this card casket is placed with substrate and regulates the running wind speed of filter screen fan unit 150 further.Certainly, those skilled in the art can change according to the actual requirements to some extent, do not repeat them here.
By the invention described above preferred embodiment as can be known, use the present invention and have following advantage.Cleaning fan energy conserving system can see through the sensing component that is installed in the card casket Coorg, whether be placed with the card casket in the sensor card casket Coorg, this sensing signal can be sent in the control unit, open the filter screen fan unit of correspondence when in card casket Coorg, being placed with card casket, and close corresponding filter screen fan unit when in card casket Coorg, not being placed with card casket, to reach the purpose of the saving energy.
Certainly; the present invention also can have other various embodiments; under the situation that does not deviate from spirit of the present invention and essence thereof; those of ordinary skill in the art work as can make various corresponding changes and distortion according to the present invention, but these corresponding changes and distortion all should belong to the protection domain of the appended claim of the present invention.
Claims (10)
1. a cleaning fan energy conserving system is applied in the chamber, and this chamber comprises a plurality of card casket Coorgs, it is characterized in that, this cleaning fan energy conserving system comprises:
A plurality of sensing components are arranged in those card casket Coorgs, and whether each those sensing component has a card casket to enter in this corresponding card casket Coorg in order to detect;
A plurality of filter screen fan units are arranged at the end that those block the casket Coorgs; And
A plurality of control units, connect those sensing components and those filter screen fan units respectively, with those filter screen fan units of SC sigmal control according to those sensing components, wherein each those filter screen fan unit only detects at this sensing component of correspondence and just can operate after this card casket enters this card casket Coorg.
2. cleaning fan energy conserving system as claimed in claim 1 is characterized in that this chamber comprises a passage, and those card casket Coorgs are stacked in this passage both sides, and this cleaning fan energy conserving system also comprises a central fan, is arranged at this passage top.
3. cleaning fan energy conserving system as claimed in claim 1 is characterized in that, each those card casket Coorg comprises a relative entry end and an end, and those filter screen fan units are arranged at this end.
4. cleaning fan energy conserving system as claimed in claim 3 is characterized in that, each those filter screen fan unit comprises a filter screen and a fan, and this filter screen is arranged at an exhaust outlet of this fan.
5. cleaning fan energy conserving system as claimed in claim 1 is characterized in that those sensing components are a plurality of contact-making switches.
6. cleaning fan energy conserving system as claimed in claim 5 is characterized in that, each those card casket Coorg comprises a relative entry end and an end, and those contact-making switches are arranged at this end of those card casket Coorgs respectively.
7. cleaning fan energy conserving system as claimed in claim 1 is characterized in that those sensing components are a plurality of photoelectric sensors.
8. cleaning fan energy conserving system as claimed in claim 7, it is characterized in that, each those card casket Coorg comprises relative two side, and each those photoelectric sensor comprises an optical transmitting set and an optical receiver, and those optical transmitting sets and those optical receivers are arranged at respectively on this two side.
9. cleaning fan energy conserving system as claimed in claim 1 is characterized in that, also comprises a power supply unit, is connected with those filter screen fan units respectively.
10. cleaning fan energy conserving system as claimed in claim 1 is characterized in that also comprise a Database Unit, the data of this Database Unit are sent to this control unit.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW099146960 | 2010-12-30 | ||
| TW099146960A TWI499725B (en) | 2010-12-30 | 2010-12-30 | Cleaning fan power saving system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN102135106A true CN102135106A (en) | 2011-07-27 |
Family
ID=44294989
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011100353989A Pending CN102135106A (en) | 2010-12-30 | 2011-01-31 | Clean fan economizer system |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN102135106A (en) |
| TW (1) | TWI499725B (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108885058A (en) * | 2016-03-21 | 2018-11-23 | 韩商蓄积者公司 | The more purpose pneumatic control devices of closeness to life type |
| CN110778508A (en) * | 2018-07-31 | 2020-02-11 | 山洋电气株式会社 | Fan control device and fan control method |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0272141A2 (en) * | 1986-12-19 | 1988-06-22 | Applied Materials, Inc. | Multiple chamber integrated process system |
| CN1631751A (en) * | 2004-12-28 | 2005-06-29 | 友达光电股份有限公司 | Cartridge storage system and its forming method |
| CN201336787Y (en) * | 2008-08-22 | 2009-10-28 | 杭州华三通信技术有限公司 | Communication electronic device |
| CN101672295A (en) * | 2009-10-12 | 2010-03-17 | 乐普四方（北京）节能技术有限公司 | Energy-saving control device of frequency converter cabinet fan set and control method |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010153769A (en) * | 2008-11-19 | 2010-07-08 | Tokyo Electron Ltd | Substrate position sensing device, substrate position sensing method, film forming device, film forming method, program, and computer readable storage medium |
-
2010
- 2010-12-30 TW TW099146960A patent/TWI499725B/en active
-
2011
- 2011-01-31 CN CN2011100353989A patent/CN102135106A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0272141A2 (en) * | 1986-12-19 | 1988-06-22 | Applied Materials, Inc. | Multiple chamber integrated process system |
| CN1631751A (en) * | 2004-12-28 | 2005-06-29 | 友达光电股份有限公司 | Cartridge storage system and its forming method |
| CN201336787Y (en) * | 2008-08-22 | 2009-10-28 | 杭州华三通信技术有限公司 | Communication electronic device |
| CN101672295A (en) * | 2009-10-12 | 2010-03-17 | 乐普四方（北京）节能技术有限公司 | Energy-saving control device of frequency converter cabinet fan set and control method |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108885058A (en) * | 2016-03-21 | 2018-11-23 | 韩商蓄积者公司 | The more purpose pneumatic control devices of closeness to life type |
| CN110778508A (en) * | 2018-07-31 | 2020-02-11 | 山洋电气株式会社 | Fan control device and fan control method |
| CN110778508B (en) * | 2018-07-31 | 2023-08-25 | 山洋电气株式会社 | Fan control device and fan control method |
Also Published As
| Publication number | Publication date |
|---|---|
| TWI499725B (en) | 2015-09-11 |
| TW201226719A (en) | 2012-07-01 |
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Application publication date: 20110727 |
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| WD01 | Invention patent application deemed withdrawn after publication |