CN102097748A - Sheet-type surge absorber and producing method thereof - Google Patents

Sheet-type surge absorber and producing method thereof Download PDF

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Publication number
CN102097748A
CN102097748A CN2010105322412A CN201010532241A CN102097748A CN 102097748 A CN102097748 A CN 102097748A CN 2010105322412 A CN2010105322412 A CN 2010105322412A CN 201010532241 A CN201010532241 A CN 201010532241A CN 102097748 A CN102097748 A CN 102097748A
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pair
insulating properties
sheet
forms
properties substrate
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CN2010105322412A
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高桥正训
日向野哲
社藤康弘
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Mitsubishi Materials Corp
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Mitsubishi Materials Corp
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Abstract

The invention provides a sheet-type surge absorber and a producing method thereof. The sheet-type surge absorber reduces the beginning voltage of electric discharge and works under low voltage. The sheet-type surge absorber comprises an insulative substrate, a pair of connection electrodes which are oppositely disposed on one surface of the insulative substrate and respectively extend to different edges of the insulative substrate, a pair of discharge electrodes which are oppositely disposed through a discharging gap and are respectively connected to the pair of connection electrodes, a box-shaped cover body which is fixed to the periphery of the insulative substrate containing the terminal ends of the pair of connection electrodes. An electric discharge space is disposed at the upper part of the insulative substrate. The sheet-type surge absorber also comprises a pair of terminal electrodes which are disposed at two terminal parts of the insulative substrate under the state of being conducted to the pair of connection electrodes exposing from the edge part. While the discharging gap is formed in a band shape of approximately certain width, the tip having the pair of discharge electrodes forms a projection and a recessed flexing part which are oppositely disposed.

Description

Sheet-shape surging absorber and manufacture method thereof
Technical field
The present invention relates to a kind of sheet-shape surging absorber and manufacture method thereof, this sheet-shape surging absorber absorbs and results from the electric current of induction thunder or inductive surge, static surge or noise and protect electric equipment, electronic equipment or their circuit.
Background technology
In order to prevent because the electronic equipment that abnormal voltage produces or carry the fire damage of printed base plate of this equipment or the destruction that causes by catching fire etc., the electronic equipment of using at the communication equipment of telephone set, fax, modulator-demodulator etc. and coupling part and power line, antenna or the CRT drive circuit etc. of order wire, be subject to part, be connected with surge absorber by the caused electric shock of abnormal voltages such as lightning surge or static (surge voltage).
As sheet-shape surging absorber in the past, for example patent documentation 1 is put down in writing, known have by discharging gap make the sheet-shape surging absorber of pair of discharge electrodes arranged opposite in the upper surface of the insulating properties substrate of aluminium oxide etc.In this sheet-shape surging absorber, cut apart sparking electrode by cut or laser processing, apply the discharging gap that is called microgap, reduce discharge ionization voltage thus.
Patent documentation 1: the open 2004-179111 communique of Japan Patent
Leave following problem in the above-mentioned technology in the past.
Promptly, following problem points is arranged: although reduce discharge ionization voltage by microgap is set in sheet-shape surging absorber in the past, but in the discharge mechanism that utilizes between the parallel clearance of Paschen's law, discharge voltage is saturated according to boundary of the arrowbandization of microgap etc., and there is boundary in the lower voltage of discharge ionization voltage.
Summary of the invention
The present invention finishes in view of described problem, and its purpose is to provide a kind of and reduces discharge ionization voltage and can be with the sheet-shape surging absorber and the manufacture method thereof of low-voltage action.
The present invention adopts following structure in order to solve described problem.That is, sheet-shape surging absorber of the present invention possesses: the insulating properties substrate; A pair of connection electrode, arranged opposite are on a face of this insulating properties substrate and extend to the different edge parts of described insulating properties substrate respectively; Pair of discharge electrodes is by the mutual arranged opposite of discharging gap and be connected to described a pair of connection electrode; Case shape lid is fixed on the peripheral part of described insulating properties substrate of the base end part that comprises described a pair of connection electrode, and forms discharge space on the top of this insulating properties substrate; And pair of terminal electrode, with the state of conducting in the described a pair of connection electrode of exposing at described edge part, be configured in the both ends of described insulating properties substrate, it is characterized in that, when described discharging gap forms the band shape of certain width roughly, have the bend or the flexing portion that form mutual opposed protuberance and recess at the tip of a pair of described sparking electrode.
In this sheet-shape surging absorber, when discharging gap forms the band shape of certain width roughly, have the bend or the flexing portion that form mutual opposed protuberance and recess at the tip of a pair of described sparking electrode, therefore at the protuberance that forms by bend or flexing portion, produce electric field locally and concentrate and discharge ionization voltage decline, move with low-voltage.
And sheet-shape surging absorber of the present invention preferably is provided with described bend in many places or described flexing portion.
Promptly, in this sheet-shape surging absorber, by many places bend or flexing portion are set, there to be many places electric field concentrated part, even cause deterioration (because dispersing of sparking electrode waits that the discharge interval broadens etc.) by the damage that causes because of discharge at the tip portion of bend or flexing portion thus, also can discharge and can improve life characteristic to damage few sparking electrode.
Especially by even number bend or flexing portion are set, discharge shape at interval becomes symmetry and polarity can not take place.
And, when the preferred described discharging gap of sheet-shape surging absorber of the present invention forms the band shape of roughly certain width of 20~50 μ m, have radius of curvature and be the described bend of 10~75 μ m or angle more than 15 ° and less than 180 ° described flexing portion.
In this sheet-shape surging absorber, when discharging gap forms the band shape of above-mentioned width range, have the flexing portion of the bend or the above-mentioned angular range of above-mentioned range of curvature radius, therefore, operation voltage is stable and can obtain good low-voltage action.
In addition, the width setup of above-mentioned discharging gap is become the reasons are as follows of above-mentioned scope: if during less than 20 μ m, because the fragment that takes place when discharging first, it is unstable that operation voltage becomes, if when surpassing 50 μ m, even the form (bend or flexing portion) that is formed for making electric field to concentrate also is difficult to carry out the low-voltage action.
And, set the radius of curvature of above-mentioned bend for above-mentioned scope the reasons are as follows: if during, become with the surface roughness same levels and can't obtain above-mentioned effect,, can't obtain the effect that electric field is concentrated if when surpassing 75 μ m less than 10 μ m.
In addition, the angle initialization of above-mentioned flexing portion is become the reasons are as follows more than 15 °:, can't in the width dimensions scope of above-mentioned discharging gap, design if during less than 15 °.
The manufacture method of sheet-shape surging absorber of the present invention is the method for the sheet-shape surging absorber of making the invention described above, it is characterized in that, have: connection electrode forms operation, forms arranged opposite on a face of insulating properties substrate and extend to a pair of connection electrode of the different edge parts of this insulating properties substrate respectively; Sparking electrode forms operation, forms by the mutual opposed while of discharging gap, is connected to the pair of discharge electrodes of described a pair of connection electrode; Closing step, on the peripheral part of the described insulating properties substrate of the base end part that comprises described a pair of connection electrode, fixed case shape lid; And terminal electrode formation operation, form the pair of terminal electrode at the both ends of described insulating properties substrate, so that described pair of terminal electrode and the described a pair of connection electrode conducting of exposing at described edge part; Form in the operation at described sparking electrode, have following operation: the operation that on the face of described insulating properties substrate, becomes the strip-shaped conductive film of described sparking electrode; At the pars intermedia of this strip-shaped conductive film laser, and cut apart described strip-shaped conductive film and form the operation of described discharging gap with repetition rate 10~200kHz and sweep speed 15~1000mm/s illumination wavelength 190~550nm.
Promptly, in the manufacture method of this sheet-shape surging absorber, shine the laser of above-mentioned wavelength with above-mentioned repetition rate and above-mentioned sweep speed at the pars intermedia of strip-shaped conductive film, and cut apart the strip-shaped conductive film and form discharging gap, therefore, can form the trickle form of above-mentioned bend and flexing portion at interval accurately in discharge.
In addition, set Wavelength of Laser for the reasons are as follows more than the 190nm:, be difficult in the air in the vacuum ultraviolet (VUV) zone and propagate and the working (machining) efficiency variation if during less than 190nm.And set Wavelength of Laser for the reasons are as follows below the 550nm: if when surpassing 550nm, because the effect of diffraction limit, becoming is difficult to optically focused.
And set repetition rate for above-mentioned scope the reasons are as follows: if during less than 10kHz, the ability of removing greatly is too high can not carry out trickle above-mentioned form processing because of pulse energy becomes, if when surpassing 200kHz, it is unstable that the action of Q switching becomes.
In addition, set the sweep speed of laser for above-mentioned scope the reasons are as follows: if during less than 15mm/s, be difficult to because of the overlapping change ability of removing of the light beam of laser is too high to carry out trickle form processing more,, be difficult to the light beam of the overlapping laser in optimum ground if when surpassing 1000mm/s.
In addition, the peak power density of laser preferably sets into 0.5~10MW/cm 2
According to the present invention, embody following effect.
Promptly, according to sheet-shape surging absorber involved in the present invention, when discharging gap forms the band shape of certain width roughly, have the bend or the flexing portion that form mutual opposed protuberance and recess at the tip of pair of discharge electrodes, therefore, on the protuberance that forms by bend or flexing portion, produce electric field locally and concentrate and discharge ionization voltage decline, can seek lower voltage.Thereby sheet-shape surging absorber of the present invention can begin purposes such as voltage response and suitable communication equipment with low discharge.
And, manufacture method according to sheet-shape surging absorber involved in the present invention, pars intermedia at this strip-shaped conductive film, shine the laser of above-mentioned wavelength with above-mentioned repetition rate and above-mentioned sweep speed, cut apart the strip-shaped conductive film and form discharging gap, therefore, can form the trickle form of above-mentioned bend and flexing portion accurately at interval in discharge, and can obtain high performance sheet-shape surging absorber.
Description of drawings
Fig. 1 is in the 1st execution mode of sheet-shape surging absorber involved in the present invention and manufacture method thereof, the stereogram of expression sheet-shape surging absorber.
Fig. 2 is in the 1st execution mode, the profile of expression sheet-shape surging absorber.
Fig. 3 is in the 1st execution mode, the expression sheet-shape surging absorber unload vertical view under the lower cover portion state.
Fig. 4 is in the 2nd execution mode of sheet-shape surging absorber involved in the present invention and manufacture method thereof, the expression sheet-shape surging absorber unload vertical view under the lower cover portion state.
Fig. 5 is in the 3rd execution mode of sheet-shape surging absorber involved in the present invention and manufacture method thereof, the expression sheet-shape surging absorber unload vertical view under the lower cover portion state.
Symbol description
1,21, the 31-sheet-shape surging absorber, 2-insulating properties substrate, 3-connection electrode, 4,24, the 34-discharging gap, 4a-flexing portion, 5-sparking electrode, 6-lid, 7-terminal electrode, 34a-bend.
Embodiment
Below, with reference to Fig. 1~Fig. 3 the 1st execution mode of sheet-shape surging absorber involved in the present invention and manufacture method thereof is described.In addition, in each used accompanying drawing of following explanation, can discern or discern the size of each one easily and suitably change reduced scale in order to be made as.
Sheet-shape surging absorber 1 as Fig. 1~present embodiment shown in Figure 3 possesses: insulating properties substrate 2; A pair of connection electrode 3, arranged opposite are on a face of this insulating properties substrate 2 and extend to the different edge parts of insulating properties substrate 2 respectively; Pair of discharge electrodes 5, discharging gap 4 mutual arranged opposite by being called microgap and be connected to a pair of connection electrode 3; Case shape lid 6 is fixed on the peripheral part of insulating properties substrate 2 of the base end part that comprises a pair of connection electrode 3, and forms discharge space on the top of this insulating properties substrate 2; And pair of terminal electrode 7, with conducting in the state configuration of a pair of connection electrode of exposing at described edge part 3 both ends at insulating properties substrate 2.
Insulating properties material as the raw material that becomes above-mentioned insulating properties substrate 2 and lid 6 for example uses aluminium oxide, corundum, mullite, corundum-mullite, or their mixture etc.
As shown in Figure 3, when above-mentioned discharging gap 4 forms the band shape of certain width W roughly, has the 4a of flexing portion that forms mutual opposed protuberance and recess at the tip of pair of discharge electrodes 5.In addition, when this discharging gap 4 forms the band shape of roughly certain width W of 20~50 μ m, set for the angle θ of the 4a of flexing portion more than 15 ° and less than 180 °.And the 4a of flexing portion is set at many places.In addition, in the present embodiment, the 4a of flexing portion of 90 ° of 3 place's angles is set.
Above-mentioned sparking electrode 5 is for example by Al, Ti, SnO 2, W, Ni, Nb, TiN, Ba, Cu or Fe, contain perhaps that the alloy material more than 2 forms in these materials.
Above-mentioned connection electrode 3 is for example formed by the conductive material of Ag etc.
And gold-plated or weldering plating etc. forms above-mentioned terminal electrode 7 by the conductive paste of Ag cream etc. or by Ni.For example, calcine by the conductive paste of coating Ag cream etc. and form pair of terminal electrode 7.
In addition, be formed in the discharge space between above-mentioned insulating properties substrate 2 and the lid 6, be full of the predetermined discharge control gaseous of suitable discharge.
Above-mentioned discharge control gaseous for example is He, Ar, Ne, Xe, SF 6, CO 2, C 3F 8, C 2F 6, CF 4, H 2And the inert gas of their mist etc.
In this sheet-shape surging absorber 1, if overvoltage or overcurrent invasion, at first the 4a of flexing portion by discharging gap 4 produces glow discharge, between pair of discharge electrodes 5, trigger, and discharge makes progress in the mode of creeping discharge and produces arc discharge each other at the base end side of pair of discharge electrodes 5, and surge voltage is absorbed thus.
Then, the manufacture method to the sheet-shape surging absorber 1 of present embodiment describes.
At first, form a pair of connection electrode 3, its arranged opposite is on a face of insulating properties substrate 2 and extend to the different edge parts (connection electrode formation operation) of this insulating properties substrate 2 respectively.
For example, by with Ag cream etc. by screen painting, on insulating properties substrate 2, form pattern and make its sintering, make the connection electrode 3 that forms by Ag etc.
Secondly, form pair of discharge electrodes 5, it is connected to a pair of connection electrode 3 (sparking electrode formation operation) by the 4 mutual opposed whiles of discharging gap.
For example, except the cream that will comprise above-mentioned material passes through screen painting, after the upper surface of insulating properties substrate 2 forms pattern, carry out sintering, thereby form outside the sparking electrode 5, can adopt general film formation methods such as sputtering method, vapour deposition method, ion plating method, CVD method, baking process.
Form in operation at this sparking electrode, at first on the face of insulating properties substrate 2, become the strip-shaped conductive film of sparking electrode 5, and at the pars intermedia irradiating laser of this strip-shaped conductive film, cut apart the strip-shaped conductive film and form discharging gap 4.At this moment, with the laser of repetition rate 10~200kHz and sweep speed 15~1000mm/s illumination wavelength 190~550nm.In addition, the peak power density of laser preferably sets into 0.5~10MW/cm 2And, in the present embodiment, laser is come and gone 1 time and formation discharging gap 4.In addition, the groove depth in the discharging gap 4 at this moment is about 20 μ m.
Then, on the peripheral part of the insulating properties substrate 2 of the base end part that comprises a pair of connection electrode 3, fixed case shape lid 6.
For example, on the peripheral part of the insulating properties substrate 2 of the base end part that comprises a pair of connection electrode 3, bonding agent is formed pattern by screen painting etc., and in above-mentioned discharge control gaseous atmosphere, heat with the state of on bonding agent, placing lid 6, thereby when engaging lid 6 and insulating properties substrate 2, form discharge space (closing step) with sealing state in inside.
At this,, can use SiO as bonding agent 2, B 2O 3, PbO, Na 2O, Li 2O, BaO, CaO, ZnO, MgO, TiO 2, Al 2O 3, P 3O 5In, a kind of or mix the glass that forms more than two kinds.And, form pair of terminal electrode 7 at the both ends of insulating properties substrate 2, so that described pair of terminal electrode 7 and a pair of connection electrode 3 conductings (terminal electrode formation operation) of exposing at described edge part.
For example, the conductive paste of Ag cream etc. is arranged on the both ends of insulating properties substrate 2 and lid 6, and this is carried out sintering and forms terminal electrode 7 by impregnating.
Like this, made the sheet-shape surging absorber 1 of present embodiment.
As mentioned above, in the sheet-shape surging absorber 1 of present embodiment, when discharging gap 4 forms the band shape of certain width W roughly, has the 4a of flexing portion that forms mutual opposed protuberance and recess at the tip of pair of discharge electrodes 5, therefore, at the protuberance that forms by the 4a of flexing portion, produce electric field locally and concentrate and discharge ionization voltage decline, move with low-voltage.
And, when discharging gap 4 forms the band shape of above-mentioned width range, have the 4a of flexing portion of above-mentioned angular range, therefore, operation voltage is stable and can obtain good low-voltage action.
And, by being set, the 4a of many places flexing portion has many places electric field concentrated part, even thus by the damage that causes because of discharge, cause deterioration (because the discharging gap 4 such as disperse of sparking electrode 5 broaden etc.) at the tip portion of the 4a of flexing portion, also can discharge, and can improve life characteristic to damage few sparking electrode 5.
In addition, according to the method for making of present embodiment, shine the laser of above-mentioned wavelength at the pars intermedia of strip-shaped conductive film with above-mentioned repetition rate and above-mentioned sweep speed, and cut apart the strip-shaped conductive film and form discharging gap 4, therefore, can form the trickle form of the 4a of flexing portion accurately at discharging gap 4.
Then, with reference to Fig. 4 and Fig. 5, the 2nd and the 3rd execution mode of sheet-shape surging absorber involved in the present invention and manufacture method thereof is carried out following explanation.In addition, in the explanation of each following execution mode,, omit its explanation for the additional prosign of the same inscape that has illustrated in the above-mentioned execution mode.
The difference of the 2nd execution mode and the 1st execution mode is, in the 1st execution mode, is provided with 3 4a of place flexing portion in discharging gap 4, relative therewith, in the sheet-shape surging absorber 21 of the 2nd execution mode, as shown in Figure 4, in discharging gap 24, be provided with 2 4a of place flexing portion.
That is, in the sheet-shape surging absorber 21 of the 2nd execution mode, be provided with the even number flexing 4a of portion in discharging gap 24, therefore, the discharge of discharging gap 24 shape at interval becomes symmetry and can not cause polarity.
And the difference of the 3rd execution mode and the 2nd execution mode is, in the 2nd execution mode, in discharging gap 24, be provided with the 4a of flexing portion, relative therewith, in the sheet-shape surging absorber 31 of the 3rd execution mode, as shown in Figure 5, be provided with bend 34a at discharging gap 34.
That is, in the 3rd execution mode, when discharging gap 34 forms the band shape of certain width W roughly, have 2 bend 34a that form mutual opposed protuberance and recess at the tip of pair of discharge electrodes 5.These 2 bend 34a have flex point in mutual centre and mutually to the opposition side bending.In addition, when above-mentioned discharging gap 34 formed the band shape of roughly certain width W of 20~50 μ m, the radius of curvature R of above-mentioned bend 34a was configured to 10~75 μ m.
Like this, in the sheet-shape surging absorber 31 of the 3rd execution mode, when discharging gap 34 forms the band shape of certain width W roughly, have the bend 34a that forms mutual opposed protuberance and recess at the tip of pair of discharge electrodes 5, therefore, at the protuberance that forms by bend 34a, producing electric field locally concentrates, the same with the 2nd execution mode, discharge ionization voltage descends, and moves with low-voltage.
[embodiment 1]
Then, to embodiment, the result who measures discharge ionization voltage is described with the sheet-shape surging absorber of above-mentioned the 3rd execution mode of above-mentioned method for making actual fabrication.
The present embodiment of making is set at the radius of curvature R that 30 μ m, groove depth are set at 20 μ m, bend with the width W of discharging gap and is set at 30 μ m.And the repetition rate that the laser processing condition when making discharging gap is set laser for is that 120kHz, wavelength are 355nm.In addition, as a comparative example, also made the sheet-shape surging absorber that forms discharging gap with linearity.
About these, the result that the discharge ionization voltage when direct voltage is boosted with 100V/s is measured is in the comparative example of the discharging gap with linearity, discharge ionization voltage is 130V, relative therewith, in the present embodiment, discharge ionization voltage is 110V and has confirmed lower voltage.
In addition, technical scope of the present invention is not limited to above-mentioned execution mode and the foregoing description, in the scope that does not break away from aim of the present invention, can apply various changes.
For example, though be provided with sparking electrode and connection electrode, the also electrode that can adopt these to become one in the above-described embodiment respectively.

Claims (5)

1. sheet-shape surging absorber possesses:
The insulating properties substrate;
A pair of connection electrode, arranged opposite are on a face of this insulating properties substrate and extend to the different edge parts of described insulating properties substrate respectively;
Pair of discharge electrodes is by the mutual arranged opposite of discharging gap and be connected to described a pair of connection electrode;
Case shape lid is fixed on the peripheral part of described insulating properties substrate of the base end part that comprises described a pair of connection electrode, and forms discharge space on the top of this insulating properties substrate; And
The pair of terminal electrode with the state of conducting in the described a pair of connection electrode of exposing at described edge part, is configured in the both ends of described insulating properties substrate, it is characterized in that,
When described discharging gap forms the band shape of certain width roughly, have bend or flexing portion, this bend or flexing portion form mutual opposed protuberance and recess at the tip of a pair of described sparking electrode.
2. sheet-shape surging absorber as claimed in claim 1 is characterized in that,
Described bend in many places or described flexing portion are set.
3. sheet-shape surging absorber as claimed in claim 1 or 2 is characterized in that,
When described discharging gap forms the band shape of roughly certain width of 20~50 μ m, has radius of curvature and is the described bend of 10~75 μ m or angle more than 15 ° and less than 180 ° described flexing portion.
4. the manufacture method of a sheet-shape surging absorber, it makes claim 1 or 2 described sheet-shape surging absorbers, it is characterized in that having following operation:
Connection electrode forms operation, forms arranged opposite on a face of insulating properties substrate and extend to a pair of connection electrode of the different edge parts of this insulating properties substrate respectively;
Sparking electrode forms operation, forms by the mutual opposed while of discharging gap, is connected to the pair of discharge electrodes of described a pair of connection electrode;
Closing step, on the peripheral part of the described insulating properties substrate of the base end part that comprises described a pair of connection electrode, fixed case shape lid; And
Terminal electrode forms operation, forms the pair of terminal electrode at the both ends of described insulating properties substrate, so that described pair of terminal electrode and the described a pair of connection electrode conducting of exposing at described edge part;
Form in the operation at described sparking electrode, have following operation:
On the face of described insulating properties substrate, become the operation of the strip-shaped conductive film of described sparking electrode;
At the pars intermedia of this strip-shaped conductive film,, and cut apart described strip-shaped conductive film and form the operation of described discharging gap with the laser of repetition rate 10~200kHz and sweep speed 15~1000mm/s illumination wavelength 190~550nm.
5. the manufacture method of a sheet-shape surging absorber, it makes the described sheet-shape surging absorber of claim 3, it is characterized in that having following operation:
Connection electrode forms operation, forms arranged opposite on a face of insulating properties substrate and extend to a pair of connection electrode of the different edge parts of this insulating properties substrate respectively;
Sparking electrode forms operation, forms by the mutual opposed while of discharging gap, is connected to the pair of discharge electrodes of described a pair of connection electrode;
Closing step, on the peripheral part of the described insulating properties substrate of the base end part that comprises described a pair of connection electrode, fixed case shape lid; And
Terminal electrode forms operation, forms the pair of terminal electrode at the both ends of described insulating properties substrate, so that described pair of terminal electrode and the described a pair of connection electrode conducting of exposing at described edge part;
Form in the operation at described sparking electrode, have following operation:
On the face of described insulating properties substrate, become the operation of the strip-shaped conductive film of described sparking electrode;
At the pars intermedia of this strip-shaped conductive film,, and cut apart described strip-shaped conductive film and form the operation of described discharging gap with the laser of repetition rate 10~200kHz and sweep speed 15~1000mm/s illumination wavelength 190~550nm.
CN2010105322412A 2009-12-10 2010-10-29 Sheet-type surge absorber and producing method thereof Pending CN102097748A (en)

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JP2013101911A (en) * 2011-10-14 2013-05-23 Tdk Corp Electrostatic surge suppressor
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Application publication date: 20110615