CN102086123A - Nitrogen-based ceramic material - Google Patents
Nitrogen-based ceramic material Download PDFInfo
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- CN102086123A CN102086123A CN 201010580663 CN201010580663A CN102086123A CN 102086123 A CN102086123 A CN 102086123A CN 201010580663 CN201010580663 CN 201010580663 CN 201010580663 A CN201010580663 A CN 201010580663A CN 102086123 A CN102086123 A CN 102086123A
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Abstract
The invention provides a nitrogen-based ceramic material, relating to a novel functional ceramic material, particularly to the nitrogen-based ceramic material. The invention aims to solve the problem that multiple nitrogen-based ceramic materials are not synthesized so far. The nitrogen-based ceramic material provided by the invention is prepared from the following materials in parts by weight: 20-40 parts of nitrogen source, 60-150 parts of solvent and 10-60 parts of liquid chloride. The nitrogen-based ceramic material synthesized by the invention is not synthesized and represented so far. The nitrogen-based ceramic material is applied to the field of ceramic materials.
Description
Technical field
The present invention relates to the new function stupalith, especially nitride-based ceramic material.
Background technology
Research and development new function pottery is a key areas in the Materials science at present.Traditional ceramics mainly adopts materials such as natural rock, mineral, clay to do raw material.It is raw material that new ceramics then adopts the high purity mineral compound of synthetic, makes the inorganic materials with fine crystalline tissue through moulding, sintering and other processing under the condition of strictness control.It has a series of superior physics, chemistry and biological property, and its range of application is that traditional ceramics is incomparable far away, and this class pottery is called special cermacis or fine ceramics again.Nitride-based ceramic material is the class in the new function pottery, and it can be used as novel semiconductor material, novel texture stupalith, new function device material, also can be used as sintex and carries out mechanical workout, has very wide application prospect.Yet there are a lot of nitride-based ceramic materials not to be synthesized as yet at present.
Summary of the invention
The present invention is the problem that has a lot of nitride-based ceramic materials not to be synthesized as yet at present in order to solve, and nitride-based ceramic material is provided.
Nitride-based ceramic material is made by 20～40 parts nitrogenous source, 60～150 parts solvent and 10～60 parts liquid phase chlorination thing by ratio of weight and the number of copies, wherein nitrogenous source is solid-state ammonium carbamate, solvent is one or more the combination in hexanaphthene, normal hexane, benzene,toluene,xylene, glycol dimethyl ether, diethylene glycol dimethyl ether, tetraethyleneglycol dimethyl ether, tetrahydrofuran (THF), ether, the acetone, and the liquid phase chlorination thing is SiCl
4, TiCl
4, BCl
3, PCl
3, SnCl
4In one or more combination, perhaps the liquid phase chlorination thing is SiCl
4, TiCl
4, BCl
3, PCl
3, SnCl
4In the combination of one or more and chlorosilane, described chlorosilane is one or more the combination in methyl ethylene dichlorosilane, vinyl trichloro silane, methyl hydrogen dichlorosilane, vinyl hydrogen dichlorosilane, phenmethyl dichlorosilane, the styryl dichlorosilane.
Nitride-based ceramic material of the present invention reacts under very gentle condition and obtains, do not separating out the corresponding crystal phase time, the multicomponent element presents unordered close pile structure, simultaneously, interaction between the heterogeneous element atom, original energy level is changed, embody certain characteristic of semiconductor, can be used as the novel semi-conductor device; When nitride-based ceramic material of the present invention is separated out the corresponding crystal phase time at a certain temperature, a part wherein can be used as sintex and is used, the sintered ceramic of going again after nitride-based ceramic material of the present invention and traditional technology are mixed several ceramic powders is compared, owing to be directly from undefined structure, to separate out, therefore can accomplish the mixing uniformity from the atomic scale, the composite ceramics mechanical property after the sintering is made moderate progress.The present invention has enriched the kind of nitride-based ceramic material.
Embodiment
Technical solution of the present invention is not limited to following cited embodiment, also comprises the arbitrary combination between each embodiment.
Embodiment one: the nitride-based ceramic material of present embodiment is made by 20～40 parts nitrogenous source, 60～150 parts solvent and 10～60 parts liquid phase chlorination thing by ratio of weight and the number of copies, wherein nitrogenous source is solid-state ammonium carbamate, solvent is one or more the combination in hexanaphthene, normal hexane, benzene,toluene,xylene, glycol dimethyl ether, diethylene glycol dimethyl ether, tetraethyleneglycol dimethyl ether, tetrahydrofuran (THF), ether, the acetone, and the liquid phase chlorination thing is SiCl
4, TiCl
4, BCl
3, PCl
3, SnCl
4In one or more combination, perhaps the liquid phase chlorination thing is SiCl
4, TiCl
4, BCl
3, PCl
3, SnCl
4In the combination of one or more and chlorosilane, described chlorosilane is one or more the combination in methyl ethylene dichlorosilane, vinyl trichloro silane, methyl hydrogen dichlorosilane, vinyl hydrogen dichlorosilane, phenmethyl dichlorosilane, the styryl dichlorosilane.
When the described solvent of present embodiment is mixture, can be between all kinds of SOLVENTS by any than mixing; When described liquid phase chlorination thing is mixture, can be between various liquid phase chlorination things by any than mixing; When described chlorosilane is mixture, can be between various chlorosilanes by any than mixing.
The preparation method of the described nitride-based ceramic material of present embodiment is: one, nitrogenous source and solvent are placed reactor, behind the capping still reactor is vacuumized, pour argon gas or nitrogen as shielding gas to reactor then, afterwards the liquid phase chlorination thing is joined in the reactor, reactor temperature is-10～300 ℃, reaction times is 4～480h, obtains product; Two, the question response still is chilled to room temperature and opens reactor, and the product that step 1 is obtained carries out separating treatment, and the material that is obtained is the nitride precursor; Three, the nitride precursor is put into alumina tube furnace, under argon gas or protection of nitrogen gas, carry out cracking, under 800～1300 ℃ of temperature condition, be incubated 0.5～6h, be cooled to room temperature then, promptly obtain nitride-based ceramic material.
Embodiment two: the nitride-based ceramic material of present embodiment is made by 25 parts nitrogenous source, 100 parts solvent and 45 parts liquid phase chlorination thing by ratio of weight and the number of copies, and wherein nitrogenous source is solid-state ammonium carbamate, and solvent is an ether, and the liquid phase chlorination thing is SiCl
4And BCl
3Mixture; SiCl wherein
4And BCl
3Volume ratio be 3: 1.
The nitride-based ceramic material of present embodiment is the Si-N-B stupalith.
Embodiment three: the nitride-based ceramic material of present embodiment is made by 33 parts nitrogenous source, 121 parts solvent and 42 parts liquid phase chlorination thing by ratio of weight and the number of copies, wherein nitrogenous source is solid-state ammonium carbamate, solvent is a diethylene glycol dimethyl ether, and the liquid phase chlorination thing is SiCl
4And TiCl
4Mixture; SiCl wherein
4And TiCl
4Volume ratio be 1: 1.
The nitride-based ceramic material of present embodiment is the Si-N-Ti stupalith.
Embodiment four: the nitride-based ceramic material of present embodiment is made by 30 parts nitrogenous source, 109 parts solvent and 42 parts liquid phase chlorination thing by ratio of weight and the number of copies, wherein nitrogenous source is solid-state ammonium carbamate, solvent is a diethylene glycol dimethyl ether, and the liquid phase chlorination thing is SiCl
4And PCl
3Mixture; SiCl wherein
4And PCl
3Volume ratio be 4: 1.
The nitride-based ceramic material of present embodiment is the Si-N-P stupalith.
Embodiment five: the nitride-based ceramic material of present embodiment is made by 36 parts nitrogenous source, 115 parts solvent and 35 parts liquid phase chlorination thing by ratio of weight and the number of copies, and wherein nitrogenous source is solid-state ammonium carbamate, and solvent is a hexanaphthene, and the liquid phase chlorination thing is SiCl
4And SnCl
4Mixture; SiCl wherein
4And SnCl
4Volume ratio be 3: 2.
The nitride-based ceramic material of present embodiment is the Si-N-Sn stupalith.
Embodiment six: the nitride-based ceramic material of present embodiment is made by 20 parts nitrogenous source, 100 parts solvent and 25 parts liquid phase chlorination thing by ratio of weight and the number of copies, and wherein nitrogenous source is solid-state ammonium carbamate, and solvent is a toluene, and the liquid phase chlorination thing is TiCl
4
The nitride-based ceramic material of present embodiment is the TiN stupalith.
Embodiment seven: the nitride-based ceramic material of present embodiment is made by 25 parts nitrogenous source, 120 parts solvent and 22 parts liquid phase chlorination thing by ratio of weight and the number of copies, wherein nitrogenous source is solid-state ammonium carbamate, solvent is a glycol dimethyl ether, and the liquid phase chlorination thing is SnCl
4
The nitride-based ceramic material of present embodiment is Sn
3N
4Stupalith.
Embodiment eight: the nitride-based ceramic material of present embodiment is made by the solvent of 95 parts in 20 parts nitrogenous source and 30 parts liquid phase chlorination thing by ratio of weight and the number of copies, and wherein nitrogenous source is solid-state ammonium carbamate, and solvent is a tetraethyleneglycol dimethyl ether, and the liquid phase chlorination thing is BCl
3
The nitride-based ceramic material of present embodiment is the BN stupalith.
Embodiment nine: the nitride-based ceramic material of present embodiment is made by the solvent of 105 parts in 30 parts nitrogenous source and 33 parts liquid phase chlorination thing by ratio of weight and the number of copies, and wherein nitrogenous source is solid-state ammonium carbamate, and solvent is a hexanaphthene, and the liquid phase chlorination thing is TiCl
4And SnCl
4Mixture; TiCl wherein
4And SnCl
4Volume ratio be 2: 3.
The nitride-based ceramic material of present embodiment is the Ti-N-Sn stupalith.
Embodiment ten: the nitride-based ceramic material of present embodiment is made by the solvent of 112 parts in 28 parts nitrogenous source and 38 parts liquid phase chlorination thing by ratio of weight and the number of copies, and wherein nitrogenous source is solid-state ammonium carbamate, and solvent is a dimethylbenzene, and the liquid phase chlorination thing is TiCl
4And BCl
3Mixture; TiCl wherein
4And BCl
3Volume ratio be 6: 1.
The nitride-based ceramic material of present embodiment is the Ti-N-B stupalith.
Embodiment 11: the nitride-based ceramic material of present embodiment is made by the solvent of 137 parts in 35 parts nitrogenous source and 45 parts liquid phase chlorination thing by ratio of weight and the number of copies, and wherein nitrogenous source is solid-state ammonium carbamate, and solvent is a dimethylbenzene, and the liquid phase chlorination thing is TiCl
4And PCl
3Mixture; TiCl wherein
4And PCl
3Volume ratio be 3: 7.
The nitride-based ceramic material of present embodiment is the Ti-N-P stupalith.
Embodiment 12: the nitride-based ceramic material of present embodiment is made by the solvent of 108 parts in 40 parts nitrogenous source and 48 parts liquid phase chlorination thing by ratio of weight and the number of copies, and wherein nitrogenous source is solid-state ammonium carbamate, and solvent is a dimethylbenzene, and the liquid phase chlorination thing is TiCl
4With the mixture of chlorosilane, described chlorosilane is the mixture of methyl ethylene dichlorosilane and vinyl hydrogen dichlorosilane; TiCl wherein
4With the volume ratio of chlorosilane be 3: 1, the volume ratio of methyl ethylene dichlorosilane and vinyl hydrogen dichlorosilane is 8: 7.
The nitride-based ceramic material of present embodiment is the Ti-N-Si-C stupalith.
Embodiment 13: the nitride-based ceramic material of present embodiment is made by the solvent of 130 parts in 24 parts nitrogenous source and 27 parts liquid phase chlorination thing by ratio of weight and the number of copies, and wherein nitrogenous source is solid-state ammonium carbamate, and solvent is a tetrahydrofuran (THF), and the liquid phase chlorination thing is TiCl
4, SnCl
4And PCl
3Mixture; TiCl wherein
4, SnCl
4And PCl
3Volume ratio be 1: 4: 3.
The nitride-based ceramic material of present embodiment is the Ti-N-Sn-P stupalith.
Embodiment 14: the nitride-based ceramic material of present embodiment is made by the solvent of 147 parts in 52 parts nitrogenous source and 13 parts liquid phase chlorination thing by ratio of weight and the number of copies, and wherein nitrogenous source is solid-state ammonium carbamate, and solvent is a benzene, and the liquid phase chlorination thing is TiCl
4, BCl
3And PCl
3Mixture; TiCl wherein
4, BCl
3And PCl
3Volume ratio be 3: 7: 4.
The nitride-based ceramic material of present embodiment is the Ti-N-B-P stupalith.
Embodiment 15: the nitride-based ceramic material of present embodiment is made by the solvent of 115 parts in 26 parts nitrogenous source and 33 parts liquid phase chlorination thing by ratio of weight and the number of copies, and wherein nitrogenous source is solid-state ammonium carbamate, and solvent is a hexanaphthene, and the liquid phase chlorination thing is TiCl
4, SnCl
4And BCl
3Mixture; TiCl wherein
4, SnCl
4And BCl
3Volume ratio be 5: 6: 1.
The nitride-based ceramic material of present embodiment is the Ti-N-Sn-B stupalith.
Embodiment 16: the nitride-based ceramic material of present embodiment is made by the solvent of 88 parts in 29 parts nitrogenous source and 50 parts liquid phase chlorination thing by ratio of weight and the number of copies, and wherein nitrogenous source is solid-state ammonium carbamate, and solvent is a benzene, and the liquid phase chlorination thing is TiCl
4, SnCl
4With the mixture of chlorosilane, described chlorosilane is the methyl ethylene dichlorosilane; TiCl wherein
4, SnCl
4With the volume ratio of chlorosilane be 3: 7: 1.
The nitride-based ceramic material of present embodiment is the Ti-N-Sn-Si-C stupalith.
Embodiment 17: the nitride-based ceramic material of present embodiment is made by the solvent of 109 parts in 32 parts nitrogenous source and 35 parts liquid phase chlorination thing by ratio of weight and the number of copies, and wherein nitrogenous source is solid-state ammonium carbamate, and solvent is a tetrahydrofuran (THF), and the liquid phase chlorination thing is TiCl
4, BCl
3With the mixture of chlorosilane, described chlorosilane is the mixture of vinyl hydrogen dichlorosilane and phenmethyl dichlorosilane; TiCl wherein
4, BCl
3With the volume ratio of chlorosilane be 6: 5: 2, the volume ratio of vinyl hydrogen dichlorosilane and phenmethyl dichlorosilane is 4: 9.
The nitride-based ceramic material of present embodiment is the Ti-N-B-Si-C stupalith.
Embodiment 18: the nitride-based ceramic material of present embodiment is made by the solvent of 130 parts in 22 parts nitrogenous source and 25 parts liquid phase chlorination thing by ratio of weight and the number of copies, wherein nitrogenous source is solid-state ammonium carbamate, solvent is a glycol dimethyl ether, and the liquid phase chlorination thing is TiCl
4, PCl
3With the mixture of chlorosilane, described chlorosilane is the mixture of phenmethyl dichlorosilane and styryl dichlorosilane; TiCl wherein
4, PCl
3With the volume ratio of chlorosilane be 1: 2: 7, the volume ratio of phenmethyl dichlorosilane and styryl dichlorosilane is 4: 5.
The nitride-based ceramic material of present embodiment is the Ti-N-P-Si-C stupalith.
Embodiment 19: the nitride-based ceramic material of present embodiment is made by the solvent of 112 parts in 36 parts nitrogenous source and 45 parts liquid phase chlorination thing by ratio of weight and the number of copies, and wherein nitrogenous source is solid-state ammonium carbamate, and solvent is an acetone, and the liquid phase chlorination thing is TiCl
4, BCl
3, PCl
3With the mixture of chlorosilane, described chlorosilane is a vinyl trichloro silane; TiCl wherein
4, BCl
3, PCl
3With the volume ratio of chlorosilane be 1: 3: 1: 4.
The nitride-based ceramic material of present embodiment is the Ti-N-B-P-Si-C stupalith.
Embodiment 20: the nitride-based ceramic material of present embodiment is made by the solvent of 145 parts in 20 parts nitrogenous source and 20 parts liquid phase chlorination thing by ratio of weight and the number of copies, wherein nitrogenous source is solid-state ammonium carbamate, solvent is a diethylene glycol dimethyl ether, and the liquid phase chlorination thing is SnCl
4And BCl
3Mixture; SnCl wherein
4And BCl
3Volume ratio be 2: 9.
The nitride-based ceramic material of present embodiment is the Sn-N-B stupalith.
Embodiment 21: the nitride-based ceramic material of present embodiment is made by the solvent of 135 parts in 24 parts nitrogenous source and 28 parts liquid phase chlorination thing by ratio of weight and the number of copies, and wherein nitrogenous source is solid-state ammonium carbamate, and solvent is a hexanaphthene, and the liquid phase chlorination thing is SnCl
4, BCl
3With the mixture of chlorosilane, described chlorosilane is a vinyl trichloro silane; SnCl wherein
4, BCl
3With the volume ratio of chlorosilane be 9: 1: 3.
The nitride-based ceramic material of present embodiment is the Sn-N-B-Si-C stupalith.
Embodiment 22: the nitride-based ceramic material of present embodiment is made by the solvent of 139 parts in 26 parts nitrogenous source and 32 parts liquid phase chlorination thing by ratio of weight and the number of copies, wherein nitrogenous source is solid-state ammonium carbamate, solvent is a tetraethyleneglycol dimethyl ether, and the liquid phase chlorination thing is SnCl
4And PCl
3Mixture; SnCl wherein
4And PCl
3Volume ratio be 1: 5.
The nitride-based ceramic material of present embodiment is the Sn-N-P stupalith.
Embodiment 23: the nitride-based ceramic material of present embodiment is made by the solvent of 120 parts in 36 parts nitrogenous source and 42 parts liquid phase chlorination thing by ratio of weight and the number of copies, and wherein nitrogenous source is solid-state ammonium carbamate, and solvent is a toluene, and the liquid phase chlorination thing is SnCl
4, PCl
3With the mixture of chlorosilane, described chlorosilane is the phenmethyl dichlorosilane; SnCl wherein
4, PCl
3With the volume ratio of chlorosilane be 4: 7: 1.
The nitride-based ceramic material of present embodiment is the Sn-N-P-Si-C stupalith.
Embodiment 24: the nitride-based ceramic material of present embodiment is made by the solvent of 115 parts in 30 parts nitrogenous source and 35 parts liquid phase chlorination thing by ratio of weight and the number of copies, wherein nitrogenous source is solid-state ammonium carbamate, solvent is a diethylene glycol dimethyl ether, and the liquid phase chlorination thing is SnCl
4, BCl
3And PCl
3Mixture; SnCl wherein
4, BCl
3And PCl
3Volume ratio be 2: 1: 1.
The nitride-based ceramic material of present embodiment is the Sn-N-B-P stupalith.
Embodiment 25: the nitride-based ceramic material of present embodiment is made by the solvent of 132 parts in 40 parts nitrogenous source and 52 parts liquid phase chlorination thing by ratio of weight and the number of copies, and wherein nitrogenous source is solid-state ammonium carbamate, and solvent is a normal hexane, and the liquid phase chlorination thing is SnCl
4, BCl
3, PCl
3With the mixture of chlorosilane, described chlorosilane is the mixture of methyl ethylene dichlorosilane and styryl dichlorosilane; SnCl wherein
4, BCl
3, PCl
3With the volume ratio of chlorosilane be 1: 1: 1: 1, the volume ratio of methyl ethylene dichlorosilane and styryl dichlorosilane is 1: 4.
The nitride-based ceramic material of present embodiment is the Sn-N-B-P-Si-C stupalith.
Embodiment 26: the nitride-based ceramic material of present embodiment is made by the solvent of 141 parts in 26 parts nitrogenous source and 40 parts liquid phase chlorination thing by ratio of weight and the number of copies, and wherein nitrogenous source is solid-state ammonium carbamate, and solvent is a dimethylbenzene, and the liquid phase chlorination thing is PCl
3And BCl
3Mixture; PCl wherein
3And BCl
3Volume ratio be 1: 3.
The nitride-based ceramic material of present embodiment is the B-N-P stupalith.
Embodiment 27: the nitride-based ceramic material of present embodiment is made by the solvent of 119 parts in 36 parts nitrogenous source and 28 parts liquid phase chlorination thing by ratio of weight and the number of copies, and wherein nitrogenous source is solid-state ammonium carbamate, and solvent is a normal hexane, and the liquid phase chlorination thing is BCl
3, PCl
3With the mixture of chlorosilane, described chlorosilane is a vinyl trichloro silane; BCl wherein
3, PCl
3With the volume ratio of chlorosilane be 3: 4: 1.
The nitride-based ceramic material of present embodiment is the P-N-B-Si-C stupalith.
Claims (10)
1. nitride-based ceramic material, it is characterized in that, nitride-based ceramic material is made by 20～40 parts nitrogenous source, 60～150 parts solvent and 10～60 parts liquid phase chlorination thing by ratio of weight and the number of copies, wherein nitrogenous source is solid-state ammonium carbamate, solvent is one or more the combination in hexanaphthene, normal hexane, benzene,toluene,xylene, glycol dimethyl ether, diethylene glycol dimethyl ether, tetraethyleneglycol dimethyl ether, tetrahydrofuran (THF), ether, the acetone, and the liquid phase chlorination thing is SiCl
4, TiCl
4, BCl
3, PCl
3, SnCl
4In one or more combination, perhaps the liquid phase chlorination thing is SiCl
4, TiCl
4, BCl
3, PCl
3, SnCl
4In the combination of one or more and chlorosilane, described chlorosilane is one or more the combination in methyl ethylene dichlorosilane, vinyl trichloro silane, methyl hydrogen dichlorosilane, vinyl hydrogen dichlorosilane, phenmethyl dichlorosilane, the styryl dichlorosilane.
2. nitride-based ceramic material according to claim 1, it is characterized in that nitride-based ceramic material made by 25 parts nitrogenous source, 100 parts solvent and 45 parts liquid phase chlorination thing by ratio of weight and the number of copies, wherein nitrogenous source is solid-state ammonium carbamate, and solvent is an ether, and the liquid phase chlorination thing is SiCl
4And BCl
3Mixture; SiCl wherein
4And BCl
3Volume ratio be 3: 1.
3. nitride-based ceramic material according to claim 1, it is characterized in that nitride-based ceramic material made by 33 parts nitrogenous source, 121 parts solvent and 42 parts liquid phase chlorination thing by ratio of weight and the number of copies, wherein nitrogenous source is solid-state ammonium carbamate, and solvent is a diethylene glycol dimethyl ether, and the liquid phase chlorination thing is SiCl
4And TiCl
4Mixture; SiCl wherein
4And TiCl
4Volume ratio be 1: 1.
4. nitride-based ceramic material according to claim 1, it is characterized in that nitride-based ceramic material made by 30 parts nitrogenous source, 109 parts solvent and 42 parts liquid phase chlorination thing by ratio of weight and the number of copies, wherein nitrogenous source is solid-state ammonium carbamate, and solvent is a diethylene glycol dimethyl ether, and the liquid phase chlorination thing is SiCl
4And PCl
3Mixture; SiCl wherein
4And PCl
3Volume ratio be 4: 1.
5. nitride-based ceramic material according to claim 1, it is characterized in that nitride-based ceramic material made by 36 parts nitrogenous source, 115 parts solvent and 35 parts liquid phase chlorination thing by ratio of weight and the number of copies, wherein nitrogenous source is solid-state ammonium carbamate, and solvent is a hexanaphthene, and the liquid phase chlorination thing is SiCl
4And SnCl
4Mixture; SiCl wherein
4And SnCl
4Volume ratio be 3: 2.
6. nitride-based ceramic material according to claim 1, it is characterized in that nitride-based ceramic material made by the solvent of 112 parts in 28 parts nitrogenous source and 38 parts liquid phase chlorination thing by ratio of weight and the number of copies, wherein nitrogenous source is solid-state ammonium carbamate, and solvent is a dimethylbenzene, and the liquid phase chlorination thing is TiCl
4And BCl
3Mixture; TiCl wherein
4And BCl
3Volume ratio be 6: 1.
7. nitride-based ceramic material according to claim 1, it is characterized in that nitride-based ceramic material made by the solvent of 145 parts in 20 parts nitrogenous source and 20 parts liquid phase chlorination thing by ratio of weight and the number of copies, wherein nitrogenous source is solid-state ammonium carbamate, and solvent is a diethylene glycol dimethyl ether, and the liquid phase chlorination thing is SnCl
4And BCl
3Mixture; SnCl wherein
4And BCl
3Volume ratio be 2: 9.
8. nitride-based ceramic material according to claim 1, it is characterized in that nitride-based ceramic material made by the solvent of 139 parts in 26 parts nitrogenous source and 32 parts liquid phase chlorination thing by ratio of weight and the number of copies, wherein nitrogenous source is solid-state ammonium carbamate, and solvent is a tetraethyleneglycol dimethyl ether, and the liquid phase chlorination thing is SnCl
4And PCl
3Mixture; SnCl wherein
4And PCl
3Volume ratio be 1: 5.
9. nitride-based ceramic material according to claim 1, it is characterized in that nitride-based ceramic material made by the solvent of 115 parts in 30 parts nitrogenous source and 35 parts liquid phase chlorination thing by ratio of weight and the number of copies, wherein nitrogenous source is solid-state ammonium carbamate, and solvent is a diethylene glycol dimethyl ether, and the liquid phase chlorination thing is SnCl
4, BCl
3And PCl
3Mixture; SnCl wherein
4, BCl
3And PCl
3Volume ratio be 2: 1: 1.
10. nitride-based ceramic material according to claim 1, it is characterized in that nitride-based ceramic material made by the solvent of 141 parts in 26 parts nitrogenous source and 40 parts liquid phase chlorination thing by ratio of weight and the number of copies, wherein nitrogenous source is solid-state ammonium carbamate, and solvent is a dimethylbenzene, and the liquid phase chlorination thing is PCl
3And BCl
3Mixture; PCl wherein
3And BCl
3Volume ratio be 1: 3.
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