CN102081199A - Fiber coupling device of high-power semiconductor laser - Google Patents
Fiber coupling device of high-power semiconductor laser Download PDFInfo
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- CN102081199A CN102081199A CN 201010594694 CN201010594694A CN102081199A CN 102081199 A CN102081199 A CN 102081199A CN 201010594694 CN201010594694 CN 201010594694 CN 201010594694 A CN201010594694 A CN 201010594694A CN 102081199 A CN102081199 A CN 102081199A
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Abstract
The invention provides a fiber coupling device of a high-power semiconductor laser, comprising a coupling seat, a fiber-optical splice, a condenser lens group and three regulating nuts and a lens position regulating mechanism, wherein the coupling seat is taken as the shell of the fiber coupling device, and is internally provided with a cavity; the fiber-optical splice is arranged on an end surface at the laser emergent side of the coupling seat; the condenser lens group is arranged in the cavity of the coupling seat opposite to one end of a through hole of the fiber-optical splice towards the coupling seat; the periphery of the condenser lens group is provided with an inner cylinder of which the periphery is provided with an outer cylinder; and the lens position regulating mechanism is composed of a bolt head and a bolt bar between the outer cylinder of the condenser lens group and the inner wall of the coupling seat, and the lens position regulating mechanism is arranged along with the optical axis direction of the condenser lens group. In the invention, a high-power semiconductor laser can be coupled with an in-and-out power-transmitting fiber, thus improving the coupling efficiency, and being easy to assemble and regulate.
Description
Technical field
The present invention relates to a kind of fiber coupling device, the fiber coupling device that uses in particularly a kind of high power semiconductor lasers.
Background technology
Semiconductor laser has the electro-optical efficiency height, volume is little, the life-span is long, low in energy consumption, reliability advantages of higher, and comparing with traditional solid and gas laser has very big advantage, has all obtained using widely at national defence, industry, scientific research field.Along with improving constantly of output power, the application of semiconductor laser also constantly enlarges thereupon, and particularly along with the continuous growth of industrial processes field to the high power laser demand, the share of semiconductor laser in laser market further increases.In recent years, along with the raising of high power semiconductor lasers electro-optical efficiency, the improvement of output beam quality and the increase of output power, more and more material processing field that are applied directly to, to reach the purpose that improves stability, minimizing energy resource consumption and reduce operation, maintenance cost, traditional solid and CO2 laser instrument have been substituted in a lot of fields even.
But the beam quality of semiconductor laser self is poor, has limited its direct application in a lot of fields.Design a kind of rational semiconductor laser optical fiber coupling device, the high light beam quality high-power semiconductor laser is carried out optical fiber transmit, thereby expand its range of application, significant.
Summary of the invention
The present invention makes in view of the above problems, and its purpose is to provide a kind of fiber coupling device of high power semiconductor lasers, can realize high-power semiconductor laser is coupled into energy-transmission optic fibre, reduces the loss of luminous power, and is easier to assembling and adjusting.
To achieve these goals, the fiber coupling device of the high power semiconductor lasers that one embodiment of the present invention relates to comprises: coupling seat, and as the shell of this coupling device, inside offers cavity; Fibre-optical splice is installed on the end face of laser emitting side of above-mentioned coupling seat, and heart portion transversely offers the through hole that can insert energy-transmission optic fibre therein; Focus lens group is located in the cavity of above-mentioned this coupling seat vis-a-vis with above-mentioned through hole one end towards above-mentioned coupling seat of above-mentioned fibre-optical splice, in the periphery of this focus lens group in conjunction with being provided with inner core, on the periphery of above-mentioned inner core in conjunction with being provided with urceolus; Three setting nuts, along the housing setting of this coupling seat of radially break-through of above-mentioned coupling seat, and mutually across the predetermined angular setting, can be along the position of the above-mentioned focus lens group of radiai adjustment of above-mentioned coupling seat; The lens combination position adjusting mechanism, by constituting at the urceolus of above-mentioned focus lens group and bolt head and the body of bolt between the above-mentioned coupling seat inwall, along the optical axis direction setting of above-mentioned focus lens group, can be along the position of the above-mentioned focus lens group of axial adjustment of above-mentioned coupling seat.
In addition, the inlet of described coupling seat is the entrance port of laser focusing hot spot, and the exit can be mated with the energy-transmission optic fibre joint of standard.Its feature also is, the inner cooling-water duct of coupling seat is used for to the coupling device heat radiation, and the parasitic light that prevents to be radiated on the coupling seat forms the precision that heat accumulation influences device.
Described fibre-optical splice be meant most widely used in the world Optoscand company that produce with bayonet fibre-optical splice its energy-transmission optic fibre coupling.
In addition, the inside of described urceolus is precision machined through hole, and the internal diameter of urceolus and the external diameter of inner core closely cooperate; Its feature is that also the afterbody of urceolus has a spacer pin, is used to limit the rotation of urceolus; It is groove about 10mm that there is a length at the barrel dliameter of urceolus middle part, and width equates with the external diameter of interior barrel mast, is used to adjust the front and back position of focus lens group; There is a conical ring in the barrel dliameter outside of urceolus near the position of outlet, is used to limit the front and back position of urceolus.
The inside of inner core is the rigging position of focus lens group; The internal diameter precision-fit of the external diameter of inner core and urceolus; Inner core is positioned at the inside of urceolus, and a threaded hole is arranged on the inner tube wall, and with the threaded hole coupling on the interior barrel mast, interior barrel mast is installed on the inner core by the groove of urceolus, can adjust inner core and regulate before and after urceolus inside.
Screw thread has been attacked in the inside of bolt head, and with the screw thread coupling of body of bolt, the outside is the face of cylinder, and one sidewall is equipped with stopper slot and pilot hole.
One side of body of bolt is an external thread, and there is " one " word groove on the top, and opposite side is two short limited posts, barrel mast spacing in being used for, and there is a long limited post at the middle part of body of bolt, is used for that self is spacing.
One end perforate of spring compressor, end sealing, the diameter of interstitial hole is for just putting spring into, and there is the hemispherical end cap of an evagination in the end outside of sealing.
Spring housing is the barrel-like structure of an end opening one end sealing, and external thread has been attacked in the outside, spring housing inner diameter and spring compressor outer diameter coupling, and there are " one " word or " ten " word groove in the closed port outside of spring housing.
Can also be provided with locknut, its internal thread and the external thread coupling of regulating mother are used for locking and regulate female.
External thread has been attacked in the described outside of regulating mother, and there is cavernous structure the inboard, and the diameter in hole is for just putting spring into, and regulating a female end is the outer-hexagonal structure, and internal thread has been attacked at the center.
Described adjuster bar adopts screw-rod structure, screw thread and the screw-internal thread fit of regulating mother.
The internal thread of described nut and the threaded engagement of adjuster bar are used to lock adjuster bar.
Apparatus of the present invention can realize that by structures such as adjusting screw(rod), body of bolt, spring housings the top to bottom, left and right, front and rear of focus lens group are moved, and adjust the optimum position, focus is just in time focused on be coupled into energy-transmission optic fibre, realize the abundant coupling with optical fiber.
Description of drawings
Fig. 1 is the longitudinal sectional view of the fiber coupling device inner structure of the high power semiconductor lasers that the present invention relates to of expression.
Fig. 2 is the stereographic map of the fiber coupling device of the high power semiconductor lasers that the present invention relates to of expression.
Fig. 3 is the transverse sectional view of the fiber coupling device of the high power semiconductor lasers that the present invention relates to of expression.
Description of reference numerals
1, coupling seat, 2, fibre-optical splice,
3, urceolus, 4, inner core,
5, focus lens group, 6, interior barrel mast,
7, bolt head, 8, body of bolt,
9, spring, 10, spring compressor,
11, spring housing, 12, locknut,
13, regulate female, 14, adjuster bar,
15, nut, 16, energy-transmission optic fibre,
17, trip bolt.
Embodiment
Below in conjunction with accompanying drawing, specify embodiments of the present invention.
The principle of optical fiber coupling is that high-power semiconductor laser beam incides in the fiber coupling device through after the optical transform, focus lens group is focused at the fiber end face place with the light beam focus point, by regulating coupling device, focus is overlapped with end centre of optic fibre, realize the abundant coupling of optical fiber and light source.
Fiber coupling device inner structure of the present invention as shown in Figure 1, it comprises: coupling seat, as the shell of this coupling device, inside offers cavity; Fibre-optical splice is installed on the end face of laser emitting side of above-mentioned coupling seat, and heart portion transversely offers the through hole that can insert energy-transmission optic fibre therein; Focus lens group is located in the cavity of above-mentioned this coupling seat vis-a-vis with above-mentioned through hole one end towards above-mentioned coupling seat of above-mentioned fibre-optical splice, in the periphery of this focus lens group in conjunction with being provided with inner core, on the periphery of above-mentioned inner core in conjunction with being provided with urceolus; Three setting nuts, along the housing setting of this coupling seat of radially break-through of above-mentioned coupling seat, and mutually across the predetermined angular setting, can be along the position of the above-mentioned focus lens group of radiai adjustment of above-mentioned coupling seat; The lens combination position adjusting mechanism, by constituting at the urceolus of above-mentioned focus lens group and bolt head and the body of bolt between the above-mentioned coupling seat inwall, along the optical axis direction setting of above-mentioned focus lens group, can be along the position of the above-mentioned focus lens group of axial adjustment of above-mentioned coupling seat.
The concrete assembling process of above-mentioned fiber coupling device is: body of bolt 8 is screwed into bolt head 7, fills in coupling seat 1 from the place ahead integral body of coupling seat, and by trip bolt 17 that bolt head 7 is spacing then.Focus lens group is installed in the inner core 4, inner core 4 is nested in the urceolus 3, the threaded hole of inner core 4 is aimed at the groove in the urceolus 3, and interior barrel mast 6 is seen through the groove of urceolus 3, links to each other with threaded hole on the inner core 4.The outer barrel component that assembles is carefully put into the endoporus of coupling seat, the limited wall of coupling seat inside is close in the urceolus 3 barrel dliameters outside near the plane of the conical ring of the position of outlet, the outer barrel component that rotation assembles, adjust the front and back position of body of bolt 8, an end of barrel mast 6 is embedded between two limited posts of body of bolt 8 in making, screw in two screws in the coupling seat bottom then, retaining is in the both sides of urceolus afterbody spacer pin, urceolus can not wide-angle be rotated, and barrel mast 6 skids off in the middle of two limited posts in preventing.Spring 9 is inserted between spring compressor 10 and the spring housing 11, is screwed into coupling seat 1 from the bottom of coupling seat, the semi-round ball at spring compressor top withstands on the conical surface of urceolus conical ring; Spring 9 is inserted in spring compressor 10 and regulates between female 13, be screwed into coupling seat 1 from the both sides, top of coupling seat, the semi-round ball at spring compressor top withstands on the conical surface of urceolus conical ring, will regulate female the locking in place with locknut 12 then.Adjuster bar 14 is screwed into adjusting mother 13, and the suitable position of adjustment is locked with nut 15.
Moving forward and backward of focus lens group is by adjusting the front and back position of body of bolt 8, thereby focus lens group in the drive inner core moves forward and backward and realizes, as shown in Figure 1, the specific implementation process is: focus lens group is installed in the inner core 4, the outer wall of inner core 4 closely links to each other with the inwall of urceolus 3, inner core 4 can slide front and back in urceolus 3, inner core 4 links to each other with interior barrel mast 6 by threaded hole, interior barrel mast 6 sees through the groove of urceolus 3, the upper end links to each other with two limited posts of body of bolt 8 rear ends, interior barrel mast 6 by accurate limiting between two limited posts of body of bolt 8, body of bolt 8 outsides are with bolt head 7, by being threaded, bolt head 7 is filled in the coupling seat by straight hole, carry out bolt head 7 spacing with trip bolt 17, " one " word groove with a word screwdriver inserting bolt masthead end, turn screwdriver, body of bolt 8 can be moved forward and backward, the limited post on body of bolt 8 tops drives inner core post 6 by rotation and moves forward and backward, thereby the focus lens group that is fixed in the inner core can be regulated front and back, after being adjusted to suitable position, body of bolt 8 lockings are got final product the front and back position of fixed focus lenses group by trip bolt 17.
Focus lens group up and down and about mobile by adjusting spring housing 11, regulating female 13, adjuster bar 14 and urceolus 3 integral body are moved realize, as shown in Figure 3, the specific implementation process is: focus lens group is installed in the inner core 4, inner core 4 is nested in the urceolus 3, can move forward and backward, the urceolus 3 barrel dliameters outside is close near the plane of the conical ring of the position of outlet, being used to limit urceolus can not move forward, the conical surface of urceolus 3 conical rings is become hexagonal angle adjuster bar 14 and spring compressor 11 to withstand by two, and urceolus 3 can not be moved backward.
The coupling device of this invention can adjust easily the front and back of focus lamp, up and down, position, the left and right sides, by adjusting the position of focus lens group, optical convergence through lens combination can be incided on the fiber end face to focus, thus the abundant coupling of realization light source and optical fiber.
In addition, also be provided with the cooling-water duct that above-mentioned fiber coupling device is dispelled the heat, form the precision that heat accumulation influences device with the parasitic light that prevents to be radiated on the coupling seat in coupling seat inside.
As above in the mode of example cable jig of the present invention has been described with reference to accompanying drawing.But, it will be appreciated by those skilled in the art that the cable fixture that proposes for the invention described above, can also on the basis that does not break away from content of the present invention, make various improvement.Therefore, protection scope of the present invention should be determined by the content of appending claims.
Claims (2)
1. the fiber coupling device of a high power semiconductor lasers is characterized in that, comprising:
Coupling seat, as the shell of this coupling device, inside offers cavity;
Fibre-optical splice is installed on the end face of laser emitting side of above-mentioned coupling seat, and heart portion transversely offers the through hole that can insert energy-transmission optic fibre therein;
Focus lens group is located in the cavity of above-mentioned this coupling seat vis-a-vis with above-mentioned through hole one end towards above-mentioned coupling seat of above-mentioned fibre-optical splice, in the periphery of this focus lens group in conjunction with being provided with inner core, on the periphery of above-mentioned inner core in conjunction with being provided with urceolus;
Three setting nuts, along the housing setting of this coupling seat of radially break-through of above-mentioned coupling seat, and mutually across the predetermined angular setting, can be along the position of the above-mentioned focus lens group of radiai adjustment of above-mentioned coupling seat;
The lens combination position adjusting mechanism, by constituting at the urceolus of above-mentioned focus lens group and bolt head and the body of bolt between the above-mentioned coupling seat inwall, along the optical axis direction setting of above-mentioned focus lens group, can be along the position of the above-mentioned focus lens group of axial adjustment of above-mentioned coupling seat.
2. the fiber coupling device of high power semiconductor lasers according to claim 1 is characterized in that, also is provided with the cooling-water duct that above-mentioned fiber coupling device is dispelled the heat in coupling seat inside.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201010594694 CN102081199A (en) | 2010-12-17 | 2010-12-17 | Fiber coupling device of high-power semiconductor laser |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201010594694 CN102081199A (en) | 2010-12-17 | 2010-12-17 | Fiber coupling device of high-power semiconductor laser |
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| CN102081199A true CN102081199A (en) | 2011-06-01 |
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| CN 201010594694 Pending CN102081199A (en) | 2010-12-17 | 2010-12-17 | Fiber coupling device of high-power semiconductor laser |
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Cited By (21)
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| CN103399381A (en) * | 2013-07-30 | 2013-11-20 | 深圳市大族激光科技股份有限公司 | Optical fiber laser outputting head |
| CN104238021A (en) * | 2013-06-17 | 2014-12-24 | 上海中科股份有限公司 | Method for improving coupling performance of optical passive device |
| CN105375244A (en) * | 2015-12-14 | 2016-03-02 | 中国工程物理研究院应用电子学研究所 | Optical fibre cooling head suitable for high-power semiconductor laser optical fibre coupling module |
| CN106094223A (en) * | 2016-07-22 | 2016-11-09 | 江苏瑞祺生命科学仪器有限公司 | Optical wavelength lock |
| CN106125202A (en) * | 2016-08-04 | 2016-11-16 | 中电科天之星激光技术（上海）有限公司 | A kind of optically-based flat board carries out the fiber coupler of fine adjustment |
| CN107037559A (en) * | 2017-06-08 | 2017-08-11 | 苏州艾力光电科技有限公司 | A kind of eccentric wheel optical fiber adjustment mechanism |
| JP2017161686A (en) * | 2016-03-09 | 2017-09-14 | 株式会社アマダホールディングス | Fiber coupling device and fiber laser processing machine |
| CN107678106A (en) * | 2017-11-08 | 2018-02-09 | 长春理工大学 | A kind of portable space light fiber coupling device |
| CN109001872A (en) * | 2018-08-29 | 2018-12-14 | 李涵 | A kind of high-power output fiber coupling device |
| CN109428258A (en) * | 2017-08-30 | 2019-03-05 | 夏普株式会社 | Light supply apparatus and its manufacturing method |
| CN109557615A (en) * | 2019-01-18 | 2019-04-02 | 国网浙江省电力有限公司电力科学研究院 | Laser signal reception device and method of reseptance under a kind of open optical path |
| CN110927900A (en) * | 2019-12-27 | 2020-03-27 | 中国科学院半导体研究所 | Water-cooled laser coupler |
| CN111458802A (en) * | 2020-05-06 | 2020-07-28 | 武汉锐科光纤激光技术股份有限公司 | Light beam coupling device and coupling method thereof |
| CN112433308A (en) * | 2020-12-07 | 2021-03-02 | 中山新诺科技股份有限公司 | Optical fiber coupling adjusting device of high-power laser beam |
| CN113031176A (en) * | 2019-12-24 | 2021-06-25 | 长春长光华大智造测序设备有限公司 | Optical fiber adjusting mechanism |
| CN113130280A (en) * | 2019-12-31 | 2021-07-16 | 中微半导体设备(上海)股份有限公司 | Light intensity monitoring and adjusting mechanism, light intensity monitoring and adjusting method and plasma processing device |
| CN113467015A (en) * | 2021-08-03 | 2021-10-01 | 新疆师范大学 | Center calibrating device of laser coupling platform |
| CN113671641A (en) * | 2021-09-01 | 2021-11-19 | 中国科学院长春光学精密机械与物理研究所 | Energy transmission optical fiber coupling and passive ring control device |
| CN113791472A (en) * | 2021-11-18 | 2021-12-14 | 之江实验室 | Optical fiber coupler capable of being precisely adjusted in multiple dimensions |
| US11828987B2 (en) | 2018-12-13 | 2023-11-28 | Kla Corporation | Axially adjusted, non-rotating barrel fiber collimator |
| CN117503335A (en) * | 2023-12-06 | 2024-02-06 | 南京沃福曼医疗科技有限公司 | Optical coupling laser ablation system |
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| CN104238021A (en) * | 2013-06-17 | 2014-12-24 | 上海中科股份有限公司 | Method for improving coupling performance of optical passive device |
| CN104238021B (en) * | 2013-06-17 | 2017-12-01 | 上海中科股份有限公司 | Improve the method for optical passive component coupling performance |
| CN103399381A (en) * | 2013-07-30 | 2013-11-20 | 深圳市大族激光科技股份有限公司 | Optical fiber laser outputting head |
| CN103399381B (en) * | 2013-07-30 | 2016-08-10 | 大族激光科技产业集团股份有限公司 | Optical-fiber laser delivery |
| CN105375244A (en) * | 2015-12-14 | 2016-03-02 | 中国工程物理研究院应用电子学研究所 | Optical fibre cooling head suitable for high-power semiconductor laser optical fibre coupling module |
| JP2017161686A (en) * | 2016-03-09 | 2017-09-14 | 株式会社アマダホールディングス | Fiber coupling device and fiber laser processing machine |
| CN106094223A (en) * | 2016-07-22 | 2016-11-09 | 江苏瑞祺生命科学仪器有限公司 | Optical wavelength lock |
| CN106125202A (en) * | 2016-08-04 | 2016-11-16 | 中电科天之星激光技术（上海）有限公司 | A kind of optically-based flat board carries out the fiber coupler of fine adjustment |
| CN107037559A (en) * | 2017-06-08 | 2017-08-11 | 苏州艾力光电科技有限公司 | A kind of eccentric wheel optical fiber adjustment mechanism |
| CN109428258B (en) * | 2017-08-30 | 2021-07-20 | 夏普株式会社 | Light source device and method for manufacturing the same |
| CN109428258A (en) * | 2017-08-30 | 2019-03-05 | 夏普株式会社 | Light supply apparatus and its manufacturing method |
| CN107678106A (en) * | 2017-11-08 | 2018-02-09 | 长春理工大学 | A kind of portable space light fiber coupling device |
| CN109001872A (en) * | 2018-08-29 | 2018-12-14 | 李涵 | A kind of high-power output fiber coupling device |
| US11828987B2 (en) | 2018-12-13 | 2023-11-28 | Kla Corporation | Axially adjusted, non-rotating barrel fiber collimator |
| CN109557615A (en) * | 2019-01-18 | 2019-04-02 | 国网浙江省电力有限公司电力科学研究院 | Laser signal reception device and method of reseptance under a kind of open optical path |
| CN113031176A (en) * | 2019-12-24 | 2021-06-25 | 长春长光华大智造测序设备有限公司 | Optical fiber adjusting mechanism |
| CN113031176B (en) * | 2019-12-24 | 2023-01-03 | 长春长光华大智造测序设备有限公司 | Optical fiber adjusting mechanism |
| CN110927900A (en) * | 2019-12-27 | 2020-03-27 | 中国科学院半导体研究所 | Water-cooled laser coupler |
| CN113130280B (en) * | 2019-12-31 | 2024-03-12 | 中微半导体设备(上海)股份有限公司 | Light intensity monitoring and adjusting mechanism, adjusting method and plasma processing device |
| CN113130280A (en) * | 2019-12-31 | 2021-07-16 | 中微半导体设备(上海)股份有限公司 | Light intensity monitoring and adjusting mechanism, light intensity monitoring and adjusting method and plasma processing device |
| CN111458802A (en) * | 2020-05-06 | 2020-07-28 | 武汉锐科光纤激光技术股份有限公司 | Light beam coupling device and coupling method thereof |
| CN111458802B (en) * | 2020-05-06 | 2024-02-13 | 武汉锐科光纤激光技术股份有限公司 | Light beam coupling device and coupling method thereof |
| CN112433308A (en) * | 2020-12-07 | 2021-03-02 | 中山新诺科技股份有限公司 | Optical fiber coupling adjusting device of high-power laser beam |
| CN113467015A (en) * | 2021-08-03 | 2021-10-01 | 新疆师范大学 | Center calibrating device of laser coupling platform |
| CN113671641A (en) * | 2021-09-01 | 2021-11-19 | 中国科学院长春光学精密机械与物理研究所 | Energy transmission optical fiber coupling and passive ring control device |
| CN113791472A (en) * | 2021-11-18 | 2021-12-14 | 之江实验室 | Optical fiber coupler capable of being precisely adjusted in multiple dimensions |
| CN117503335A (en) * | 2023-12-06 | 2024-02-06 | 南京沃福曼医疗科技有限公司 | Optical coupling laser ablation system |
| CN117503335B (en) * | 2023-12-06 | 2024-06-04 | 南京沃福曼医疗科技有限公司 | Optical coupling laser ablation system |
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Application publication date: 20110601 |