CN102071456B - Safety monitoring device for polysilicon ingot furnace - Google Patents
Safety monitoring device for polysilicon ingot furnace Download PDFInfo
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- CN102071456B CN102071456B CN201110020064A CN201110020064A CN102071456B CN 102071456 B CN102071456 B CN 102071456B CN 201110020064 A CN201110020064 A CN 201110020064A CN 201110020064 A CN201110020064 A CN 201110020064A CN 102071456 B CN102071456 B CN 102071456B
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Abstract
The invention relates to a safety monitoring device, in particular to a safety monitoring device for a polysilicon ingot furnace. The safety monitoring device for the polysilicon ingot furnace comprises an ingot furnace, wherein the upper end port of the ingot furnace is connected with a furnace body end cover through an upper flange in a sealing mode; and an ingot crucible is arranged in the ingot furnace. The invention is characterized in that the bottom below the ingot crucible, in the ingot furnace is provided with a monitoring device for monitoring the leakage of the silicon liquid of the ingot crucible, and the monitoring device is connected with a display unit through a main pipeline. Therefore, the invention has the following beneficial effects: the safety monitoring device for the polysilicon ingot furnace can be used for visually monitoring the leakage of the silicone fluid in the ingot casting process of the ingot furnace and people can detect and treat the leakage in time, thereby effectively protecting the thermal field part, preventing the loss caused by false alarm and greatly reducing the economic loss in production.
Description
(1) technical field
The present invention relates to a kind of safety monitoring device, particularly a kind of polycrystalline silicon ingot or purifying furnace safety monitoring device.
(2) background technology
The polycrystalline silicon ingot casting of the present photovoltaic industry interior abnormal conditions that occur of furnace chamber in process of production can't in time be monitored, and ingot casting has the silicon of leakage incident to take place often, directly causes the financial loss more than 300,000, can cause explosion hazard in the time of seriously, jeopardizes personnel safety.It mainly is to wait the high temperature silicon flow that leaks outside to realize high temperature alarm to the bottom that polycrystalline silicon ingot or purifying furnace on the market leaks silicon liquid warning device, because of silicon hydrorrhea flow velocity degree causes the response lag of this device very slowly, flase alarm also can often occur, causes very big loss to production.
(3) summary of the invention
The present invention is in order to remedy the deficiency of prior art, and a kind of visual supervisory control, polycrystalline silicon ingot or purifying furnace safety monitoring device safely and effectively are provided.
The present invention realizes through following technical scheme:
A kind of polycrystalline silicon ingot or purifying furnace safety monitoring device; Comprise ingot furnace; The ingot furnace port is connected with the body of heater end cap seal through upper flange; Be provided with the ingot casting crucible in the ingot furnace, its special character is: corresponding ingot casting crucible lower bottom part place is provided with one and is used to monitor the monitoring device that silicon liquid leaks outside in the ingot casting crucible in the ingot furnace, and monitoring device is connected with indicating meter through total pipeline.
That said total pipeline is provided with is outer, in, interior three layers, skin is a cooling water inlet pipe, the middle level is a CWR, internal layer is the power supply signal spool, is provided with the power supply signal line in the power supply signal spool.
Monitoring device comprises housing and the pick up camera that is fixed in enclosure interior; The pick up camera front portion is fixed with a glass cover-plate; The glass cover-plate middle part is provided with the printing opacity silica glass corresponding to the position of camera lens; Glass cover-plate also is connected with the taper window through fastening screw, and pick up camera is connected with indicating meter through the power supply signal line; The housing rear end is fixed with flange, and flange is tightly connected through secure screw and rear flange lid; The housing periphery is provided with cooling water pipeline; Cooling water pipeline is divided into the outer and water-cooled tube internal layer of water-cooled tube through cooling water sandwich; Be connected through the interlayer through hole between water-cooled tube skin and the water-cooled tube internal layer; The water-cooled tube skin links to each other with cooling water inlet pipe, and the water-cooled tube internal layer links to each other with CWR.
Be provided with flange gasket between said flange and the rear flange lid, be provided with rubber sheet gasket between printing opacity silica glass rear end and the glass cover-plate, be provided with the O RunddichtringO between front end and the taper window.
The below, junction of body of heater end cap and cooling water inlet pipe, power supply signal spool, CWR is provided with rubber sheet gasket, and the top is provided with O RunddichtringO, compressing tablet and fitting nut successively.
Power supply signal spool inside is provided with epoxy resin sealant, plays sealing function.
Monitoring device has night vision function, can vision signal be fed back on the indicating meter through the power supply signal line, monitors intuitively, and the interior all abnormal conditions of furnace chamber will be monitored comprehensively and effectively in the production.
Therefore; The invention has the beneficial effects as follows: this polycrystalline silicon ingot or purifying furnace safety monitoring device; Can monitor intuitively whether silicon liquid leaks outside in the ingot furnace ingot casting process, can in time find and handle, protect the thermal field part effectively; Stop the loss that flase alarm causes, significantly reduced the financial loss in producing.
(4) description of drawings
Below in conjunction with accompanying drawing the present invention is further described.
Fig. 1 is the work synoptic diagram of monitoring device of the present invention in furnace chamber;
Fig. 2 is the structural representation of monitoring device;
Fig. 3 is the sealing synoptic diagram that monitoring device is connected with the body of heater outside.
Among the figure, 1 ingot furnace, 2 ingot casting crucibles, 3 body of heater end caps, 4 monitoring devices, 5 indicating meters, 6 power supply signal lines; 7 total pipelines, 8 upper flanges, 9 rear flanges lid, 10 flange gaskets, 11 flanges, 12 housings, 13O RunddichtringO; 14 rubber sheet gaskets, 15 pick up cameras, 16 water-cooled tubes are outer, 17 cooling water sandwich, 18 water-cooled tube internal layers, 19 taper windows, 20 printing opacity silica glasss; 21 glass cover-plates, 22 fastening screws, 23 interlayer through holes, 24 cooling water inlet pipes, 25 power supply signal spools, 26 CWRs, 27 secure screws; 28 fitting nuts, 29 compressing tablets, 30 epoxy resin sealants, 31 cooling water intakes, the outlet of 32 power supply signal lines, 33 water coolant water return outlets.
(5) embodiment
Accompanying drawing is a kind of specific embodiment of the present invention.This embodiment comprises ingot furnace 1, and ingot furnace 1 port is tightly connected through upper flange 8 and body of heater end cap 3, is provided with ingot casting crucible 2 in the ingot furnace 1; Corresponding ingot casting crucible 2 lower bottom part places are provided with one and are used to monitor the monitoring device 4 that the silicon liquid leak outside in the ingot casting crucible 2 in the ingot furnace 1; Monitoring device 4 is connected with indicating meter 5 through total pipeline 7, that total pipeline 7 is provided with is outer, in, interior three layers, skin is a cooling water inlet pipe 24; The middle level is a CWR 26; Internal layer is a power supply signal spool 25, is provided with power supply signal line 6 in the power supply signal spool 25, and monitoring device 4 comprises housing 12 and the pick up camera 15 that is fixed in housing 12 inside; Pick up camera 15 front portions are fixed with a glass cover-plate 21; Glass cover-plate 21 middle parts are provided with printing opacity silica glass 20 corresponding to the position of pick up camera 15 camera lenses, and glass cover-plate 21 also is connected with taper window 19 through fastening screw 22, and pick up camera 15 is connected with indicating meter 5 through power supply signal line 6; Housing 12 rear ends are fixed with flange 11, and flange 11 is tightly connected through secure screw 27 and rear flange lid 9; Housing 12 peripheries are provided with cooling water pipeline; Cooling water pipeline is divided into water-cooled tube outer 16 and water-cooled tube internal layer 18 through cooling water sandwich 17; Be connected through interlayer through hole 23 between water-cooled tube outer 16 and the water-cooled tube internal layer 18, water-cooled tube outer 16 links to each other with cooling water inlet pipe 24, and water-cooled tube internal layer 18 links to each other with CWR 26; Be provided with flange gasket 10 between flange 11 and the rear flange lid 9; Be provided with rubber sheet gasket 14 between printing opacity silica glass 20 rear ends and the glass cover-plate 21, be provided with O RunddichtringO 13 between front end and the taper window 19, body of heater end cap 3 is provided with rubber sheet gasket 14 with the below, junction of cooling water inlet pipe 24, power supply signal spool 25, CWR 26; The top is provided with O RunddichtringO 13, compressing tablet 29 and fitting nut 28 successively, and power supply signal spool 25 inside are provided with epoxy resin sealant 30.
Adopt polycrystalline silicon ingot or purifying furnace safety monitoring device of the present invention; Water coolant gets into cooling water inlet pipe 24 through cooling water intake 31; Behind water-cooled tube outer 16, get into water-cooled tube internal layer 18 through interlayer through hole 23 again, water-cooled tube internal layer 18 links to each other with CWR 26; Discharge by water coolant water return outlet 33 at last, accomplish the full cycle process.Housing 12 peripheries are provided with cooling water pipeline, and hyperthermia radiation causes damage to pick up camera 15 when preventing ingot casting, use printing opacity silica glass 20, O RunddichtringO 13 and rubber sheet gasket 14 sealings to keep vacuum tightness.Power supply signal line 6 one ends are connected with pick up camera 15, and the other end is connected with indicating meter 5 through power supply signal line outlet 32 backs, the ingot casting process that pick up camera 15 is kept watch on ingot furnace 1 through printing opacity silica glass 20 and taper window 19.
During polycrystalline silicon ingot casting is produced; Pick up camera 15 is aimed at the lower bottom part of ingot casting crucible 2; If the silicon accident takes place to leak, the silicon liquid of missing flows into ingot casting crucible 2 lower bottom parts along ingot casting crucible 2 outers, takes strictly according to the facts leaking the silicon situation through pick up camera 15; Import vision signal into indicating meter 5 through power supply signal line 6 then, situ production personnel can promptly handle it as the case may be.Therefore; The invention has the beneficial effects as follows: this polycrystalline silicon ingot or purifying furnace safety monitoring device; Can monitor intuitively whether silicon liquid leaks outside in the ingot furnace ingot casting process, can in time find and handle, protect the thermal field part effectively; Stop the loss that flase alarm causes, significantly reduced the financial loss in producing.
Claims (4)
1. polycrystalline silicon ingot or purifying furnace safety monitoring device; Comprise ingot furnace (1); Ingot furnace (1) port is tightly connected through upper flange (8) and body of heater end cap (3); Be provided with ingot casting crucible (2) in the ingot furnace (1), it is characterized in that: corresponding ingot casting crucible (2) lower bottom part place is provided with one and is used to monitor the monitoring device (4) that the interior silicon liquid of ingot casting crucible (2) leaks outside in the ingot furnace (1), and monitoring device (4) is connected with indicating meter (5) through total pipeline (7); That said total pipeline (7) is provided with is outer, in, interior three layers, skin is cooling water inlet pipe (24), the middle level is CWR (26), internal layer is power supply signal spool (25), is provided with power supply signal line (6) in the power supply signal spool (25); Monitoring device (4) comprises housing (12) and is fixed in the inner pick up camera (15) of housing (12); Pick up camera (15) front portion is fixed with a glass cover-plate (21); Glass cover-plate (21) middle part is provided with printing opacity silica glass (20) corresponding to the position of pick up camera (15) camera lens; Glass cover-plate (21) also is connected with taper window (19) through fastening screw (22), and pick up camera (15) is connected with indicating meter (5) through power supply signal line (6); Housing (12) rear end is fixed with flange (11), and flange (11) is tightly connected through secure screw (27) and rear flange lid (9); Housing (12) periphery is provided with cooling water pipeline; Cooling water pipeline is divided into water-cooled tube skin (16) and water-cooled tube internal layer (18) through cooling water sandwich (17); Be connected through interlayer through hole (23) between water-cooled tube outer (16) and the water-cooled tube internal layer (18); Water-cooled tube outer (16) links to each other with cooling water inlet pipe (24), and water-cooled tube internal layer (18) links to each other with CWR (26).
2. polycrystalline silicon ingot or purifying furnace safety monitoring device according to claim 1; It is characterized in that: be provided with flange gasket (10) between said flange (11) and the rear flange lid (9); Be provided with rubber sheet gasket (14) between printing opacity silica glass (20) rear end and the glass cover-plate (21), be provided with O RunddichtringO (13) between front end and the taper window (19).
3. polycrystalline silicon ingot or purifying furnace safety monitoring device according to claim 1; It is characterized in that: body of heater end cap (3) is provided with rubber sheet gasket (14) with the below, junction of cooling water inlet pipe (24), power supply signal spool (25), CWR (26), and the top is provided with O RunddichtringO (13), compressing tablet (29) and fitting nut (28) successively.
4. according to claim 1 or 3 described polycrystalline silicon ingot or purifying furnace safety monitoring devices, it is characterized in that: power supply signal spool (25) inside is provided with epoxy resin sealant (30).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110020064A CN102071456B (en) | 2011-01-18 | 2011-01-18 | Safety monitoring device for polysilicon ingot furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110020064A CN102071456B (en) | 2011-01-18 | 2011-01-18 | Safety monitoring device for polysilicon ingot furnace |
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| Publication Number | Publication Date |
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| CN102071456A CN102071456A (en) | 2011-05-25 |
| CN102071456B true CN102071456B (en) | 2012-09-05 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201110020064A Expired - Fee Related CN102071456B (en) | 2011-01-18 | 2011-01-18 | Safety monitoring device for polysilicon ingot furnace |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN110747508A (en) * | 2019-09-29 | 2020-02-04 | 扬州荣德新能源科技有限公司 | Circuit for automatically judging false silicon leakage alarm of polycrystalline furnace |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1276026A (en) * | 1997-10-16 | 2000-12-06 | Memc电子材料有限公司 | Process for preparing silicon melt from polysilicon charge |
| CN101092740A (en) * | 2007-07-17 | 2007-12-26 | 佳科太阳能硅(厦门)有限公司 | Method for purifying polysilicon, and solidification device |
| CN201133766Y (en) * | 2007-11-30 | 2008-10-15 | 上海普罗新能源有限公司 | Polycrystalline silicon fine ingot furnace adopting gradient temperature reduction |
| CN201351184Y (en) * | 2008-12-29 | 2009-11-25 | 嘉兴嘉晶电子有限公司 | Anti-burnout graphite unit for single-crystal furnace |
| CN202054928U (en) * | 2011-01-18 | 2011-11-30 | 山东舜亦新能源有限公司 | Polysilicon ingot furnace safety monitoring device |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB0712618D0 (en) * | 2007-06-29 | 2007-08-08 | Durham Scient Crystals Ltd | Semiconductor device structure and method of manufacture thereof |
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2011
- 2011-01-18 CN CN201110020064A patent/CN102071456B/en not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1276026A (en) * | 1997-10-16 | 2000-12-06 | Memc电子材料有限公司 | Process for preparing silicon melt from polysilicon charge |
| CN101092740A (en) * | 2007-07-17 | 2007-12-26 | 佳科太阳能硅(厦门)有限公司 | Method for purifying polysilicon, and solidification device |
| CN201133766Y (en) * | 2007-11-30 | 2008-10-15 | 上海普罗新能源有限公司 | Polycrystalline silicon fine ingot furnace adopting gradient temperature reduction |
| CN201351184Y (en) * | 2008-12-29 | 2009-11-25 | 嘉兴嘉晶电子有限公司 | Anti-burnout graphite unit for single-crystal furnace |
| CN202054928U (en) * | 2011-01-18 | 2011-11-30 | 山东舜亦新能源有限公司 | Polysilicon ingot furnace safety monitoring device |
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Granted publication date: 20120905 Termination date: 20140118 |