CN102043070B - Amplitude-modulated dynamometric gradometer for feeding back fixed amplitudes as well as scanning force microscopy and frequency measurement instrument - Google Patents
Amplitude-modulated dynamometric gradometer for feeding back fixed amplitudes as well as scanning force microscopy and frequency measurement instrument Download PDFInfo
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- CN102043070B CN102043070B CN 201010516422 CN201010516422A CN102043070B CN 102043070 B CN102043070 B CN 102043070B CN 201010516422 CN201010516422 CN 201010516422 CN 201010516422 A CN201010516422 A CN 201010516422A CN 102043070 B CN102043070 B CN 102043070B
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Abstract
The invention discloses an amplitude-modulated dynamometric gradometer for feeding back fixed amplitudes. The gradometer provided by the invention comprises a force sensor, a force sensor signal detector, a piezoelectric oscillator, an amplitude detector, a comparator, a variable gain amplifier and a deviation signal amplifier, wherein the force sensor fixed on the piezoelectric oscillator is output to the amplitude detector by the force sensor signal detector; the signal input end and signal output end of the comparator are respectively connected with the output end of the amplitude detector and the input end of the deviation signal amplifier; the gain control input end and gain control output end of the variable gain amplifier are respectively connected with the output end of the deviation signal amplifier and the piezoelectric oscillator; and the output end, frequency input end and amplitude set input end of the dynamometric gradometer are respectively composed of the output end of the deviation signal amplifier, the input end of the variable gain amplifier and the reference input end of the comparator. An XYZ locator is arranged between a sample and the piezoelectric oscillator so as to form a scanning force microscopy. The dynamometric gradometer also can be used for measuring the signal frequency (to be measured) of the frequency input end. According to the invention, the measuring velocity of a traditional amplitude-modulated dynamometric gradometer can be greatly improved, but the loss of frequency resolution is not caused.
Description
Technical field
The present invention relates to a kind of dynamometry gradometer, particularly a kind ofly feed back the Modulation and Amplitude Modulation dynamometry gradometer of fixed ampllitude and with its scanning force microscopy of making and frequency meter, belong to the scanning probe microscopy technical field.
Background technology
The main imaging pattern of atomic force microscope comprises contact mode and noncontact mode.Though the former also can provide periodic product table images, but not real atom definition (because measure be resultant action between many probe atoms and many sample atoms), only having the latter just can provide real Atomic Resolution image (true atomic resolution), is than the former much important imaging pattern.In noncontact mode, probe does not contact with sample, but vibrates above sample by the drive of power sensor, and by measuring power sensor dynamic resonance frequencies omega in the scanning process
0Variation come the acting force gradient F ' of probe and sample room is carried out imaging.So the image quality of noncontact mode directly is subject to it to power sensor dynamic resonance frequencies omega
0Resolution characteristic.Noncontact mode is realized by modulation method in early days: signal generator is with power sensor dynamic resonance frequencies omega
0Near a certain fixed frequency ω
00The driving force sensor vibrates, and can cause the amplitude A of power sensor in the variation of scanning process middle probe and sample room acting force gradient F '
SrChange, this amplitude variations is converted into voltage signal and comes imaging.The advantage of the method is: for the very high power sensor of quality factor q, its amplitude is to its dynamic resonance frequencies omega
0The response sensitivity that changes is very high, very high frequency resolution is arranged, because the resonance peak of the power sensor of high-quality-factor Q is very sharp-pointed.But this method also has a fatal shortcoming: quality factor q is higher, and the time of amplitude-frequency response is longer, causes imaging time long to endurable.So this amplitude modulation noncontact mode is just eliminated by the frequency modulation noncontact mode after coming out soon, although the latter's frequency resolution is lower.This eliminating is very thoroughly, can not see the use of amplitude modulation noncontact mode so far.
The present invention proposes a kind of new amplitude modulation noncontact mode: the frequency of driving force sensor vibration is still fixed, but amplitude is remained unchanged by a close-loop feedback control loop, since power sensor amplitude remains unchanged, just do not needed response time of growing very much, and imaging signal can be from the constant driving modulation signal of maintenance energy sensor amplitude.We have successfully realized fast imaging with this method under high Q vibration condition, and as we expected: image quality was very high, and speed is near the acceptable stage.
This technology is not only applicable to atomic force microscope, is applicable to other scanning force microscopy yet, and such as magnetic force microscopy, scanning friction force microscope scans electrostatic force microscope etc., can also be used to directly measure the frequency of unknown signaling.
Summary of the invention
Purpose of the present invention: for addressing the aforementioned drawbacks, propose a kind of amplitude modulation dynamometry gradometer of the feedback fixed ampllitude that can improve amplitude modulation noncontact dynamometry gradient mode measuring speed and with its scanning force microscopy of making and frequency meter.
The present invention realizes that the technical scheme of above-mentioned purpose is:
The present invention feeds back the amplitude modulation dynamometry gradometer of fixed ampllitude, comprise the power sensor, the force sensor signals detecting device, piezoelectric oscillator, amplitude detector, the power sensor is fixed on the piezoelectric oscillator, the power sensor exports the force sensor signals detecting device to, the force sensor signals detecting device exports the input of amplitude detector to, it is characterized in that also comprising comparer, variable gain amplifier, the deviation signal amplifier, the deviation signal of the signal input and output of described comparer connects respectively the output of amplitude detector and the input of deviation signal amplifier, the gain control input and output of described variable gain amplifier connect respectively the output of deviation signal amplifier and piezoelectric oscillator, and the present invention feeds back the output of the amplitude modulation dynamometry gradometer of fixed ampllitude, frequency input and amplitude arrange input respectively by the output of deviation signal amplifier, the signal input of variable gain amplifier and the reference input of comparer consist of.
Described deviation signal amplifier is one of following: (a) proportional amplifier P, (b) integrator I, (c) ratio-integrator PI, (d) ratio-differentiator PD, (e) integration-differentiator ID, (f) proportional-integral-differential device PID.
Described variable gain amplifier is made of multiplier, and two input consists of respectively signal input and the gain control inputs of described variable gain amplifier.
Described amplitude detector is one of following: (a) root mean square is to direct current transducer, and (b) two input end short circuits become the multiplier of an input end to output to a low-pass filter.
Described power sensor is micro-cantilever or quartz tuning-fork.
Described power sensor is micro-cantilever, and described force sensor signals detecting device is the reflector laser Position-Sensitive Detector.
Described power sensor is quartz tuning-fork, and described force sensor signals detecting device is that electric current is to electric pressure converter.
Described power sensor is the pressure drag micro-cantilever, and described force sensor signals detecting device is to survey conducting bridge.
The scanning force microscopy that the amplitude modulation dynamometry gradometer of feedback fixed ampllitude consists of, it is characterized in that comprising the amplitude modulation dynamometry gradometer of sample, probe, XYZ steady arm and described feedback fixed ampllitude, described probe is fixed on the power sensor, and the XYZ steady arm places between sample and the piezoelectric oscillator.
Feed back the measured frequency device of the amplitude modulation dynamometry gradometer formation of fixed ampllitude, it is characterized in that comprising the amplitude modulation dynamometry gradometer of frequency measured signal and described feedback fixed ampllitude, described frequency measured signal connects the frequency input of the amplitude modulation dynamometry gradometer of described feedback fixed ampllitude.
The principle of work that the present invention feeds back the amplitude modulation dynamometry gradometer of fixed ampllitude is: the power sensor is fixed on the piezoelectric oscillator, the power sensor exports the force sensor signals detecting device to, and the power sensor is converted into tractable electric signal V to the response of the gradient F ' of testing force by the force sensor signals detecting device
Sr(F '), its amplitude size is measured by amplitude detector thereafter, is made as V
APL, this amplitude signal V
APLBe sent to comparer to obtain it and user in order to the voltage V of set amplitude
Set-pointDeviation signal V between (connect the amplitude that the present invention feeds back the amplitude modulation dynamometry gradometer of fixed ampllitude input is set)
Error, this deviation signal V
ErrorBecome stronger deviation signal V after being amplified, process by thereafter deviation signal amplifier
Error2, this signal is modulated the user feeds back the oscillator signal that the frequency of the amplitude modulation dynamometry gradometer of fixed ampllitude inputs by the present invention amplitude by variable gain amplifier, this Modulation and Amplitude Modulation oscillator signal V
DPDrive piezoelectric oscillator vibration and drive sensor oscillation.Above-mentioned closed-loop path has consisted of the feedback control loop of the permanent amplitude vibration of power sensor: the variation of power sensor amplitude causes non-vanishing deviation signal V
Error, remove to modulate the amplitude of the driving signal of driving force sensor vibration after it is exaggerated, so that deviation signal V
ErrorRemain near the O, i.e. maintenance energy sensor amplitude near constant.Compare with the power gradiometry of traditional amplitude modulation pattern, the present invention with Modulation and Amplitude Modulation the driving signal go the driving force sensor vibration sensor of can exerting all one's strength to do the time spent and still can keep good permanent width of cloth vibration being subject to power gradient F ' from the variation of sample, this does not just need the very long stand-by period of flower to go pointwise to wait for that the amplitude stability of power sensor is to the desired amplitude of this power gradient F ', greatly shorten Measuring Time, realized purpose of the present invention.Since the amplitude constant of power sensor just can not be with its amplitude signal direct imaging, but the modulation forces sensor is done the modulation signal of permanent width of cloth vibration, that is: the output signal of deviation signal amplifier is as the measurement result output of testing force gradient F '.According to our measured data, the present invention can improve measuring speed more than 20 times, and has kept the original high frequency resolution of amplitude modulation pattern.
According to above-mentioned principle, the power sensor vibrates to respond to testing force gradient F ' by it, therefore can be any vibratile power inductor, comprise: micro-cantilever (cantilever), pressure drag micro-cantilever (piezo-resistive cantilever), quartz tuning-fork (quartz fork), piezoelectic oscillatory sheet etc.Described force sensor signals detecting device is that the induction of power sensor output is converted to tractable electric signal, and it is respectively reflector laser Position-Sensitive Detector, survey conducting bridge and electric current to electric pressure converter for micro-cantilever, pressure drag micro-cantilever and quartz tuning-fork power sensor.Described amplitude detector is the amplitude of detection oscillator signal, connects a low-pass filter after can selecting root mean square to become the multiplier of an input end to direct current transducer (RMS to DC converter) or two input end short circuits.Described variable gain amplifier is to modulate for the amplitude that a vibration is driven signal, can be a voltage-controlled amplifier or multiplier, and for the latter, one of two signal being taken advantage of are that vibration to be modulated drives signal, and another is modulation signal.Described deviation signal amplifier is used for stronger control signal is amplified, is processed into to little deviation signal, is chosen as: proportional amplifier (P), integrator (I), ratio-integrator (PI), ratio-differentiator (PD), integration-differentiator (ID) or proportional-integral-differential device (PID).
According to above-mentioned principle, the present invention feeds back the amplitude modulation dynamometry gradometer of fixed ampllitude can be in order to make corresponding scanning force microscopy: be fixedly connected with power sensor and the testing sample of probe with the XYZ steady arm, in order to the regulation and control probe with respect to the position of sample and realize that probe is with respect to the scanning of sample.The amplitude modulation dynamometry gradometer that the present invention feeds back fixed ampllitude also can be in order to make corresponding frequency meter: described frequency measured signal is connect the frequency input of the amplitude modulation dynamometry gradometer of described feedback fixed ampllitude, the frequency of this frequency measured signal can evoke the response that the present invention feeds back the amplitude modulation dynamometry gradometer of fixed ampllitude when changing near described power sensor resonant frequency.
Beneficial effect of the present invention is embodied in: can improve measuring speed more than 20 times (multiple of the higher then speedup of Q is larger), and keep the original high frequency resolution of amplitude modulation pattern.
Description of drawings
Fig. 1 is the structural representation of the amplitude modulation dynamometry gradometer of basic model feedback fixed ampllitude of the present invention.
Fig. 2 is the structural representation that uses the scanning force microscopy that the amplitude modulation dynamometry gradometer of basic model feedback fixed ampllitude of the present invention makes.
Number in the figure: SR power sensor, DP piezoelectric oscillator, SSD force sensor signals detecting device, APD amplitude detector, CP comparer, ESP deviation signal amplifier, VG variable gain amplifier, V
In1The present invention feeds back frequency input, the V of the amplitude modulation dynamometry gradometer of fixed ampllitude
In2The amplitude that the present invention feeds back the amplitude modulation dynamometry gradometer of fixed ampllitude arranges input, V
OutThe present invention feeds back output, XYZ XYZ steady arm, tip probe, the smp sample of the amplitude modulation dynamometry gradometer of fixed ampllitude.
Below the invention will be further described by embodiment and structure accompanying drawing.
Embodiment
Embodiment 1: the amplitude modulation dynamometry gradometer of basic model feedback fixed ampllitude
Referring to accompanying drawing 1, the present embodiment comprises power sensor SR, force sensor signals detecting device SSD, piezoelectric oscillator DP, amplitude detector APD, power sensor SR is fixed on the piezoelectric oscillator DP, power sensor SR exports force sensor signals detecting device SSD to, force sensor signals detecting device SSD exports the input of amplitude detector APD to, it is characterized in that also comprising comparator C P, variable gain amplifier VG, deviation signal amplifier ESP, the deviation signal of the signal input and output of described comparator C P connects respectively the output of amplitude detector APD and the input of deviation signal amplifier ESP, the gain control input and output of described variable gain amplifier VG meet respectively deviation signal amplifier ESP output and piezoelectric oscillator DP, and the present invention feeds back the output V of the amplitude modulation dynamometry gradometer of fixed ampllitude
Out, frequency input V
In1With amplitude input V is set
In2Consisted of by the output of deviation signal amplifier ESP, the signal input of variable gain amplifier VG and the reference input of comparator C P respectively.
The principle of work of the present embodiment is: power sensor SR exports force sensor signals detecting device SSD to, and power sensor SR is converted into tractable electric signal V to the response of the gradient F ' of testing force by force sensor signals detecting device SSD
Sr(F '), its amplitude size is measured by amplitude detector APD thereafter, is made as V
APL, this amplitude signal V
APLBe sent to comparator C P to obtain it and user in order to the voltage V of set amplitude
Set-point(connect the amplitude that the present invention feeds back the amplitude modulation dynamometry gradometer of fixed ampllitude input V is set
In2) between deviation signal V
Error, this deviation signal V
ErrorBecome stronger deviation signal V after being amplified, process by thereafter deviation signal amplifier ESP
Error2, this signal is modulated the frequency input V of the user feeds back fixed ampllitude by the present invention amplitude modulation dynamometry gradometer by variable gain amplifier VG
InlAnd the amplitude of oscillator signal of input, this Modulation and Amplitude Modulation oscillator signal V
DPDrive piezoelectric oscillator DP vibration and drive sensor SR vibration.Above-mentioned closed-loop path has consisted of the feedback control loop of the permanent amplitude vibration of power sensor SR: the variation of power sensor SR amplitude causes non-vanishing deviation signal V
Error, remove to modulate the amplitude of the driving signal of driving force sensor SR vibration after it is exaggerated, so that deviation signal V
ErrorRemain near the O, i.e. maintenance energy sensor SR amplitude near constant.Compare with the power gradiometry of traditional amplitude modulation pattern, the present invention with Modulation and Amplitude Modulation the driving signal go the driving force sensor SR vibration sensor SR that can exert all one's strength to do the time spent and still can keep good permanent width of cloth vibration being subject to power gradient F ' from the variation of sample, this does not just need the very long stand-by period of flower to go pointwise to wait for that the amplitude stability of power sensor SR is to the desired amplitude of this power gradient F ', greatly shorten Measuring Time, realized purpose of the present invention.Since the amplitude constant of power sensor SR just can not be with its amplitude signal direct imaging, but modulation forces sensor SR is done the modulation signal of permanent width of cloth vibration, that is: the output signal of deviation signal amplifier ESP is as the measurement result output of testing force gradient F '.According to our measured data, the present invention can improve measuring speed more than 20 times, and has kept the original high frequency resolution of amplitude modulation pattern.
Embodiment 2: the amplitude modulation dynamometry gradometer of the feedback fixed ampllitude of various dissimilar power sensors
In above-described embodiment, power sensor SR vibrates to respond to testing force gradient F ' by it, therefore can be any vibratile power inductor, comprise: micro-cantilever (cantilever), pressure drag micro-cantilever (piezo-resistivecantilever), quartz tuning-fork (quartzfork), piezoelectic oscillatory sheet etc.Described force sensor signals detecting device SSD converts the induction of power sensor SR output to tractable electric signal, and it is respectively reflector laser Position-Sensitive Detector, survey conducting bridge and electric current to electric pressure converter for micro-cantilever, pressure drag micro-cantilever and quartz tuning-fork power sensor.
Embodiment 3: the amplitude modulation dynamometry gradometer of the feedback fixed ampllitude of various dissimilar amplitude detectors
In above-described embodiment, described amplitude detector APD is the amplitude of detection oscillator signal, connects a low-pass filter after can selecting root mean square to become the multiplier of an input end to direct current transducer (RMS to DC converter) or two input end short circuits.
Embodiment 4: the amplitude modulation dynamometry gradometer of the feedback fixed ampllitude of various dissimilar variable gain amplifiers
In above-described embodiment, described variable gain amplifier VG modulates for the amplitude that a vibration is driven signal, can be a voltage-controlled amplifier or multiplier, for the latter, one of two signal being taken advantage of are that vibration to be modulated drives signal, and another is modulation signal.
Embodiment 5: the amplitude modulation dynamometry gradometer of the feedback fixed ampllitude of various dissimilar deviation signal amplifiers
In above-described embodiment, described deviation signal amplifier ESP is used for stronger control signal is amplified, is processed into to little deviation signal, is chosen as: proportional amplifier (P), integrator (I), ratio-integrator (PI), ratio-differentiator (PD), integration-differentiator (ID) or proportional-integral-differential device (PID).
Embodiment 5: the present invention feeds back the scanning force microscopy that the amplitude modulation dynamometry gradometer of fixed ampllitude is made
In above-described embodiment 1, according to its principle of work, the present invention feeds back the amplitude modulation dynamometry gradometer of fixed ampllitude can be in order to make corresponding scanning force microscopy: be fixedly connected with power sensor SR and the testing sample smp of probe tip with XYZ steady arm XYZ, in order to regulation and control probe tip with respect to the position of sample smp and realize that probe tip is with respect to the scanning of sample smp.
Embodiment 6: the present invention feeds back the frequency meter that the amplitude modulation dynamometry gradometer of fixed ampllitude is made
In above-described embodiment 1, according to its principle of work, the present invention feeds back the amplitude modulation dynamometry gradometer of fixed ampllitude can be in order to make frequency meter: it is characterized in that comprising the amplitude modulation dynamometry gradometer of frequency measured signal and described feedback fixed ampllitude, described frequency measured signal meets the frequency input V of the amplitude modulation dynamometry gradometer of described feedback fixed ampllitude
In1
Claims (10)
1. amplitude modulation dynamometry gradometer that feeds back fixed ampllitude, comprise the power sensor, the force sensor signals detecting device, piezoelectric oscillator, amplitude detector, the power sensor is fixed on the piezoelectric oscillator, the power sensor exports the force sensor signals detecting device to, the force sensor signals detecting device exports the input of amplitude detector to, it is characterized in that also comprising comparer, variable gain amplifier, the deviation signal amplifier, the deviation signal of the signal input and output of described comparer connects respectively the output of amplitude detector and the input of deviation signal amplifier, the gain control input and output of described variable gain amplifier connect respectively the output of deviation signal amplifier and piezoelectric oscillator, the output of the amplitude modulation dynamometry gradometer of described feedback fixed ampllitude, frequency input and amplitude arrange input respectively by the output of deviation signal amplifier, the signal input of variable gain amplifier and the reference input of comparer consist of.
2. the amplitude modulation dynamometry gradometer of feedback fixed ampllitude according to claim 1, it is characterized in that described deviation signal amplifier is one of following: (a) proportional amplifier P, (b) integrator I, (c) ratio-integrator PI, (d) ratio-differentiator PD, (e) integration-differentiator ID, (f) proportional-integral-differential device PID.
3. the amplitude modulation dynamometry gradometer of feedback fixed ampllitude according to claim 1 and 2 is characterized in that described variable gain amplifier is made of multiplier, and two input consists of respectively signal input and the gain control inputs of described variable gain amplifier.
4. the amplitude modulation dynamometry gradometer of feedback fixed ampllitude according to claim 1 and 2, it is characterized in that described amplitude detector is one of following: (a) root mean square is to direct current transducer, and (b) two input end short circuits become the multiplier of an input end to output to a low-pass filter.
5. the amplitude modulation dynamometry gradometer of feedback fixed ampllitude according to claim 1 and 2 is characterized in that described power sensor is micro-cantilever or quartz tuning-fork.
6. the amplitude modulation dynamometry gradometer of feedback fixed ampllitude according to claim 5 is characterized in that described power sensor is micro-cantilever, and described force sensor signals detecting device is the reflector laser Position-Sensitive Detector.
7. the amplitude modulation dynamometry gradometer of feedback fixed ampllitude according to claim 5 is characterized in that described power sensor is quartz tuning-fork, and described force sensor signals detecting device is that electric current is to electric pressure converter.
8. the amplitude modulation dynamometry gradometer of feedback fixed ampllitude according to claim 5 is characterized in that described power sensor is the pressure drag micro-cantilever, and described force sensor signals detecting device is to survey conducting bridge.
9. scanning force microscopy that is consisted of by the amplitude modulation dynamometry gradometer of the described feedback fixed ampllitude of claim 1, it is characterized in that comprising the amplitude modulation dynamometry gradometer of sample, probe, XYZ steady arm and described feedback fixed ampllitude, described probe is fixed on the power sensor, and the XYZ steady arm places between sample and the piezoelectric oscillator.
10. measured frequency device is characterized in that comprising the amplitude modulation dynamometry gradometer of described feedback fixed ampllitude, and the frequency measured signal connects the frequency input of the amplitude modulation dynamometry gradometer of described feedback fixed ampllitude.
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Citations (3)
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| CN1211811A (en) * | 1995-02-15 | 1999-03-24 | Basf公司 | Chemically differentiated imaging by scanning atomic force microscopy |
| JP2001305037A (en) * | 2000-02-14 | 2001-10-31 | Koji Maeda | Scanning probe microscope, light absorbing material detecting method using it, and microspectroscopy method |
| JP2009210361A (en) * | 2008-03-03 | 2009-09-17 | Yokohama National Univ | Atomic force microscopic system |
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| US7603891B2 (en) * | 2006-04-25 | 2009-10-20 | Asylum Research Corporation | Multiple frequency atomic force microscopy |
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Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1211811A (en) * | 1995-02-15 | 1999-03-24 | Basf公司 | Chemically differentiated imaging by scanning atomic force microscopy |
| JP2001305037A (en) * | 2000-02-14 | 2001-10-31 | Koji Maeda | Scanning probe microscope, light absorbing material detecting method using it, and microspectroscopy method |
| JP2009210361A (en) * | 2008-03-03 | 2009-09-17 | Yokohama National Univ | Atomic force microscopic system |
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| lscher 等.Q-controlled amplitude modulation atomic force microscopy in liquids: An analysis.《Appl. Phys. Lett.》.2006,第89卷073117-1至073117-3. * |
| lscher等.Theory of amplitude modulation atomic force microscopy with and withoutQ-Control.《International Journal of Non-Linear Mechanics》.2007,第42卷608-625. * |
| ouml * |
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