CN102011934A - Safety device to protect non pressure-resistant equipment - Google Patents

Safety device to protect non pressure-resistant equipment Download PDF

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Publication number
CN102011934A
CN102011934A CN2009101951164A CN200910195116A CN102011934A CN 102011934 A CN102011934 A CN 102011934A CN 2009101951164 A CN2009101951164 A CN 2009101951164A CN 200910195116 A CN200910195116 A CN 200910195116A CN 102011934 A CN102011934 A CN 102011934A
Authority
CN
China
Prior art keywords
pressure
safety installations
bypass duct
resistant equipment
release bypass
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN2009101951164A
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Chinese (zh)
Inventor
张玉明
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Messer Griesheim China Investment Co Ltd
Original Assignee
Messer Griesheim China Investment Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Messer Griesheim China Investment Co Ltd filed Critical Messer Griesheim China Investment Co Ltd
Priority to CN2009101951164A priority Critical patent/CN102011934A/en
Priority to DE200910050801 priority patent/DE102009050801B4/en
Publication of CN102011934A publication Critical patent/CN102011934A/en
Pending legal-status Critical Current

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Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/28Safety arrangements; Monitoring
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00Components
    • F04C2240/80Other components

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Filling Or Discharging Of Gas Storage Vessels (AREA)
  • Pressure Vessels And Lids Thereof (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)

Abstract

The invention provides a safety device to protect non pressure-proof equipment, wherein the non pressure-proof equipment is provided with an intake pipe connected with the non pressure-proof equipment. The safety device to protect non pressure-proof equipment comprises a diversion and pressure relief branch pipe connected between the non pressure-proof equipment and the intake end of the intake pipe, and a pressure relief part to release pressure of the intake pipe while pressure in the intake pipe exceeds the predefined value, wherein the diversion and pressure relief branch pipe is provided in an opening at the tail end on which the pressure relief part is arranged. The safety device to protect non pressure-proof equipment has the advantages of simple structure, low cost and high reliability, and can be conveniently placed in working pipelines connected with non pressure-proof equipment to be protected in practice.

Description

Protect the safety installations of non-pressure-resistant equipment
Technical field
The present invention relates to a kind of safety installations, especially be applied to a kind of safety installations that can protect non-pressure-resistant equipment that gas charges the field.
Background technique
Gas charges the field has various non-pressure-resistant equipments to need overpressure protection.
As vacuum pump is a non-pressure-resistant equipment that needs overpressure protection.Air pressure storage tank or gas cylinder for once-used filling gas, especially for the gas that charges high value, as rare gas, be exactly the gas that is used to charge the poisonous and harmful deep-etching in addition, the air pressure storage tank or the gas cylinder of inflammable and explosive gas, before charging gas once more, must air pressure storage tank or gas cylinder be vacuumized with vacuum pump, might be present in being polluted in air pressure storage tank or the gas cylinder so that remove, incompatible residual gas is with the quality and the safety of the gas products that guarantees to charge once more in air pressure storage tank or the gas cylinder.When air pressure storage tank or gas cylinder being vacuumized with vacuum pump, have the possibility that misoperation takes place, if do not protect the safety installations of non-pressure-resistant equipment, direct this non-pressure-resistant equipment of damage vacuum pump.A kind of misoperation may be, air pressure storage tank or gas cylinder are not used residual gas in accordance with regulations and are promptly returned, air pressure storage tank or gas cylinder internal air pressure superelevation, the operator does not do corresponding suitable inspection again, in case it is linked vacuum pump, pressurized gas not only make vacuum pump work, also the damage that can cause vacuum pump to repair.What also have a kind of misoperation may be that the diverter switch that connects the extraction residual gas of vacuum pump is got to high-pressure aerated switch by mistake, endlessly high pressure air cognition damage vacuum pump.
And for example being used for collecting from the rubber balloon of the residue rare gas of various pipelines and container, also is the non-pressure-resistant equipment that needs overpressure protection.Open before the high-pressure aerated switch if in time do not close the pipeline that connects rubber balloon, must damage this non-pressure-resistant equipment of rubber balloon, also cause the loss of a large amount of expensive rare gas in rubber balloon.
Need the non-pressure-resistant equipment of overpressure protection to also have normal pressure container or the like.
The device of the non-pressure-resistant equipment of protection commonly used has spring safety valve.But, because what will protect is non-pressure-resistant equipment, require the spring enough soft (sensitivity) of spring safety valve, so that in case superpressure slightly, spring safety valve can the take-off release, plays the effect of this non-pressure-resistant equipment of protection.On the other hand, during non-pressure-resistant equipment proper functioning, wish not have and leak, the spring that requires spring safety valve is (sealing) firmly enough, so that compress sealing surface.Spring soft hard, the sensitivity of safety valve and sealing are a pair of contradiction, are difficult in the practice solve always.
At present, knownly disclosed a kind of safety installations that is used to protect vacuum pump in EP2020508A1, its structure is to add an outlet on vacuum pump body, connects atmosphere.In this outlet, insert simultaneously a rupture disk.When the vacuum pump proper functioning, this rupture disk should be unable to explosion.When vacuum pump work superpressure, the rupture disk explosion, gas release is to atmosphere, vacuum pump release.But vacuum pump structure is various informative, and the normal range of operation of various vacuum pumps is wide, and the rupture disk specification is many.Rupture disk need be inserted vacuum pump, and vacuum pump structure is had requirement, the purchase cost height.Therefore, rarely use in the practice.
In addition; the various character gases that abrupt release is come out after safety valve jumping up and the rupture disk explosion; particularly the inflammable and explosive corrosive gas of poisonous and harmful requires to compile processing; how compiling and handle these special gases, also should be a very problem of significant in today of paying attention to environmental protection.
Summary of the invention
Technical problem to be solved by this invention provides a kind of safety installations of protecting non-pressure-resistant equipment; this protects the safety installations of non-pressure-resistant equipment not have the contradiction of sensitivity and sealing; structure is very simple; can easily this device be placed the working line of the non-pressure-resistant equipment of connection that needs protection in the practice, play the effect of the non-pressure-resistant equipment of protection.
Another technical problem to be solved by this invention provides a kind of safety installations that can compile the non-pressure-resistant equipment of protection of processing easily to release gas.
The technical solution adopted for the present invention to solve the technical problems is: a kind of safety installations of protecting non-pressure-resistant equipment is provided, described non-pressure-resistant equipment has the suction tude that is attached thereto, wherein, the safety installations of the non-pressure-resistant equipment of described protection comprises: be connected the shunting release bypass duct between the inlet end of described non-pressure-resistant equipment and described suction tude, the end of described shunting release bypass duct has opening; And be arranged on the described shunting release bypass duct end openings and when the pressure in the described suction tude exceeds predetermined value, make the pressure relief parts of described suction tude release.
Preferably, described pressure relief parts is the gland that unloads that is enclosed within the described shunting release bypass duct end openings outside, and the described gland that unloads is made by elastic material.
Preferably, increase the parts that rub being provided with on the outer wall of described shunting release bypass duct and/or on the described inwall that unloads gland.
Preferably, described pressure relief parts is the chock plug of plug in described shunting release bypass duct end openings.
Preferably, described chock plug by with described suction tude in the material of gas compatibility make, or make by elastic material.
Preferably, increase the parts that rub being provided with on the inwall of described shunting release bypass duct and/or on the outer wall of described chock plug.
Preferably, described safety installations also comprises the seal container in the outside that is arranged on described pressure relief parts.
Preferably, an end of described seal container has a dismountable sealing cover.
Preferably, described seal container has a connecting tube that is connected to gas processing device with respect to the other end of shunting release bypass duct.
Preferably, described connecting tube inlet has a Demountable metallic silk screen.
Preferably, on the opening of described shunting release bypass duct the Demountable metallic silk screen is installed.
The invention has the beneficial effects as follows:
No matter the no matter structure and the shape of non-pressure-resistant equipment be which kind of reason causes superpressure in the working line also, is weakest link in the whole system because this protects the safety installations of non-pressure-resistant equipment, thereby guaranteed the safety of non-pressure-resistant equipment well effectively.This protects the safety installations of non-pressure-resistant equipment only to set up shunting release bypass duct on former pipeline, unloads gland or chock plug, and seal container and connecting tube are simple in structure, with low cost.After the release, system recovery normally moves convenient and swift.
Description of drawings
Fig. 1 is the pipeline allocation plan that the present invention is connected with first embodiment's who protects non-pressure-resistant equipment safety installations.
Fig. 2 is first embodiment's of safety installations of the non-pressure-resistant equipment of protection a longitudinal section tectonic maps.
Fig. 3 is the rub structural drawing of parts of increasing of Fig. 2.
Fig. 4 is the safety installations pipeline allocation plan that the present invention is connected with second embodiment of the non-pressure-resistant equipment of protection.
Fig. 5 is second embodiment's of safety installations of the non-pressure-resistant equipment of protection a longitudinal section tectonic maps.
Fig. 6 is the safety installations pipeline allocation plan that the present invention is connected with the 3rd embodiment of the non-pressure-resistant equipment of protection.
Fig. 7 is the 3rd embodiment's of safety installations of the non-pressure-resistant equipment of protection a longitudinal section tectonic maps.
Among the figure:
1 non-pressure-resistant equipment
2 suction tude
3 valves
The indication of 4 pressure
The safety installations of the non-pressure-resistant equipment of 5 protections
6 shunting release bypass duct
7 increase the parts that rub
8 unload gland
9 wire gazes
10 sealing covers
11 seal containers
13 connecting tubes
14 chock plugs
Embodiment
The invention will be further described below in conjunction with drawings and Examples.
Fig. 1 is the pipeline allocation plan that the present invention is connected with first embodiment of safety installations of the non-pressure-resistant equipment of protection.In the embodiment shown in fig. 1, non-pressure-resistant equipment 1, for example vacuum pump or air bag or normal pressure container link to each other with suction tude 2.A valve 3 is arranged in suction tude 2, be used for non-pressure-resistant equipment 1 is connected or separates with suction tude 2.Pressure indication 4 and supporting with it valve are used to indicate system works pressure.Between suction tude 2 inlet ends and described non-pressure-resistant equipment 1, with pressure indicate 4 arranged side by side be the safety installations 5 of the non-pressure-resistant equipment of protection.
Fig. 2 is first embodiment's of safety installations of the non-pressure-resistant equipment of protection a longitudinal section tectonic maps.The safety installations 5 of the non-pressure-resistant equipment of protection comprises a shunting release bypass duct 6 that connects suction tude 2 in Fig. 2.Epimere in shunting release bypass duct 6 is provided with pressure relief parts.In the present embodiment, this pressure relief parts is the end openings outside that is enclosed within this shunting release bypass duct 6, and normal work period make these shunting release bypass duct 6 maintenances airtight unload gland 8.The outer wall of this shunting release bypass duct 6 is provided with and increases the parts 7 that rub increasing and the frictional force of unloading between the gland 8, and to install one on the opening of this shunting release bypass duct 6 be that prevention is unloaded gland 8 and is inhaled into the wire gaze 9 of shunting release bypass duct 6.This frictional force of unloading between gland 8 and shunting release bypass duct 6 outer walls is set for, when the pressure in the suction tude 2 causes the predetermined value of non-pressure-resistant equipment 1 damage more than or equal to meeting, unloading gland 8 can be washed out, and shunting release bypass duct 6 is communicated with atmosphere, reaches the release purpose.The material that unloads gland 8 comprises rubber, or the elastic material of rubber like.When unloading in the normal range of operation of gland 8 at non-pressure-resistant equipment, in the time of can not being inhaled into shunting release bypass duct 6, can cancel wire gaze 9.
The material of shunting release bypass duct 6 can be consistent with the material of suction tude 2, and diameter can be smaller.
Fig. 3 is the rub structural drawing of parts 7 of increasing of Fig. 2.The parts 7 that rub that increase shown in Figure 3 can be the lines that are parallel to the longitudinal axis that form on shunting release bypass duct 6 outer walls, perpendicular to the lines of the longitudinal axis, favour the lines of the longitudinal axis, or the projection that forms on the outer wall of shunting release bypass duct 6.Perhaps just the outer wall hacking or the cancellation of shunting release bypass duct 6 are increased the parts 7 that rub, can tolerate the normal range of operation of the non-pressure-resistant equipment that needs protection to unload gland 8, air tight, can not washed out and be as the criterion.Perhaps, this increases the parts that rub and also can be arranged on the inwall that unloads gland 8, perhaps is arranged on the outer wall of shunting release bypass duct 6 simultaneously and unloads on the inwall of gland 8.
Be the situation of inert gas for working medium specifically, during normal running, gas leads to non-pressure-resistant equipment 1, system's proper functioning through suction tude 2.Boost in case system is improper; since be enclosed within on the shunting release bypass duct 6 to unload gland 8 with respect to the non-pressure-resistant equipment 1 that needs overpressure protection be a more weak link; only rely on friction knot to lump together between itself and the shunting release bypass duct 6; elevated pressure at first can be washed out the gland 8 that unloads that is enclosed within on the shunting release bypass duct 6; or unloading gland 8 towards quick-fried; at this moment a whole set of working line and atmosphere UNICOM reach the purpose of the non-pressure-resistant equipment 1 of unloading pressure protection.After the release, only need to unload gland 8 and be enclosed within again on the shunting release bypass duct 6, perhaps change one and unload gland 8, system gets final product proper functioning.
Fig. 4 is the pipeline allocation plan that the present invention is connected with second embodiment of safety installations of the non-pressure-resistant equipment of protection.In the embodiment shown in fig. 4, protect the safety installations 5 of non-pressure-resistant equipment can be connected to gas processing device such as gas purification adsorption tower (not shown) or be connected to suitable gas emptying height.
Fig. 5 is second embodiment's of safety installations of the non-pressure-resistant equipment of protection a longitudinal section tectonic maps.In Fig. 5, in shunting release bypass duct 6 and unload a seal container 11 is set gland 8 outside, sealing container 11 has a connecting tube 13 with respect to the other end of shunting release bypass duct 6, is connected to gas processing device such as gas purification adsorption tower.Connecting tube 13 inlet is equipped with one for preventing that unloading gland 8 is washed out, or quilt is inhaled into the wire gaze 9 of connecting tube 13 after quick-fried.
Specifically running into working medium is situation poisonous, harmful, inflammable, explosion hazard gases, and during normal running, gas leads to non-pressure-resistant equipment 1, system's proper functioning through suction tude 2.Boost in case system is improper; since be enclosed within on the shunting release bypass duct 6 to unload gland 8 with respect to the non-pressure-resistant equipment 1 that needs overpressure protection be a more weak link; elevated pressure at first can be washed out the gland 8 that unloads that is enclosed within on the shunting release bypass duct 6; or unloading gland 8 towards quick-fried; gas arrives the logical atmosphere of gas processing device by seal container 11 through connecting tube 13; at this moment a whole set of working line is communicated with atmosphere; in the purpose that reaches the non-pressure-resistant equipment of unloading pressure protection simultaneously; to poisonous; harmful; inflammable; explosive gas is handled back emptying, has protected environment effectively.
A shunting release bypass duct 6 and an end that unloads the outer seal container of gland 8 have a dismountable sealing cover 10.After the release, open sealing cover 10, will unload gland 8 and be enclosed within again on the shunting release bypass duct 6, perhaps change one and unload gland 8, re-cover tightly sealing cover 10, system gets final product proper functioning.
Fig. 6 is the pipeline allocation plan that the present invention is connected with the 3rd embodiment of safety installations of the non-pressure-resistant equipment of protection.In the embodiment shown in fig. 6, the safety installations 5 of protecting non-pressure-resistant equipment except that can being connected to gas processing device such as gas purification adsorption tower, protect non-pressure-resistant equipment safety installations material behavior should with gas (working medium) compatibility in the working line.
Fig. 7 is the 3rd embodiment's of safety installations of the non-pressure-resistant equipment of protection a longitudinal section tectonic maps.In Fig. 7, the chock plug 14 that pressure relief parts is made for gas compatible material in plug on shunting release bypass duct 6 and the working line, and add a seal container 11 in shunting release bypass duct 6 and chock plug 14, seal container 11 has a connecting tube 13 with respect to the other end of shunting release bypass duct 6, is connected to gas processing device.Connecting tube 13 inlets can have a wire gaze 9.
Equally, can be provided with on the inwall of shunting release bypass duct 6 and/or on the outer wall of chock plug 14 and similar the increasing of first embodiment parts 7 that rub.
Specifically running into working medium is also to have under the situation of corrosive gas, and during normal running, gas goes non-pressure-resistant equipment 1, system's proper functioning through suction tude 2.Boost in case system is improper; because the chock plug 14 of plug on shunting release bypass duct 6 is a more weak link with respect to the non-pressure-resistant equipment 1 that needs overpressure protection; elevated pressure can at first be washed out the chock plug 14 of plug on shunting release bypass duct 6; gas is through the logical atmosphere of gas processing device; at this moment a whole set of working line and atmosphere UNICOM reach the purpose of the non-pressure-resistant equipment of unloading pressure protection.After the release, open sealing cover 10, change a new chock plug 14 on shunting release bypass duct 6, from the tight capping 10 of new lid, system gets final product proper functioning.
The safety installations pipeline allocation plan that the present invention is connected with the 3rd embodiment of the non-pressure-resistant equipment of protection is equally applicable to noncorrosive gas.The material of chock plug 14 can be that the elastic material or the metal of rubber like adds elastic material when the time comes.Protect the safety installations 5 of non-pressure-resistant equipment can be connected to gas processing device such as gas purification adsorption tower (not shown) or be connected to suitable gas emptying height.

Claims (13)

  1. One kind the protection non-pressure-resistant equipment safety installations, described non-pressure-resistant equipment (1) has the suction tude (2) that is attached thereto, and it is characterized in that, the safety installations (5) of the non-pressure-resistant equipment of described protection comprises:
    Be connected the shunting release bypass duct (6) between the inlet end of described non-pressure-resistant equipment (1) and described suction tude (2), the end of described shunting release bypass duct (6) has opening; And
    Be arranged on described shunting release bypass duct (6) end openings and when the pressure in the described suction tude (2) exceeds predetermined value, make the pressure relief parts of described suction tude (2) release.
  2. 2. safety installations according to claim 1 is characterized in that: described pressure relief parts is unloaded gland (8) for being enclosed within outside described shunting release bypass duct (6) end openings, and the described gland (8) that unloads is made by elastic material.
  3. 3. safety installations according to claim 2 is characterized in that: increase the parts that rub (7) being provided with on the outer wall of described shunting release bypass duct (6) and/or on the described inwall that unloads gland (8).
  4. 4. safety installations according to claim 1 is characterized in that: described pressure relief parts is the chock plug (14) of plug in described shunting release bypass duct (6) end openings.
  5. 5. safety installations according to claim 4 is characterized in that: described chock plug (14) is by making with the material of the middle gas compatibility of described suction tude (2).
  6. 6. safety installations according to claim 4 is characterized in that: described chock plug (14) is made by elastic material.
  7. 7. safety installations according to claim 4 is characterized in that: increase the parts that rub (7) being provided with on the inwall of described shunting release bypass duct (6) and/or on the outer wall of described chock plug (14).
  8. 8. according to any described safety installations among the claim 1-7, it is characterized in that: the seal container (11) that also comprises the outside that is arranged on described pressure relief parts.
  9. 9. safety installations according to claim 8 is characterized in that: an end of described seal container (11) has a dismountable sealing cover (10).
  10. 10. safety installations according to claim 9 is characterized in that: described seal container (11) has one to be connected to connecting tube (13) gas processing device or that be connected to suitable gas emptying height with respect to the other end of shunting release bypass duct (6).
  11. 11. safety installations according to claim 10 is characterized in that: described connecting tube (13) inlet has a Demountable metallic silk screen (9).
  12. 12., it is characterized in that: Demountable metallic silk screen (9) is installed on the opening of described shunting release bypass duct (6) according to any described safety installations among the claim 1-3.
  13. 13. according to any described safety installations among the claim 1-7, it is characterized in that: described non-pressure-resistant equipment is vacuum pump or air bag.
CN2009101951164A 2009-09-04 2009-09-04 Safety device to protect non pressure-resistant equipment Pending CN102011934A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
CN2009101951164A CN102011934A (en) 2009-09-04 2009-09-04 Safety device to protect non pressure-resistant equipment
DE200910050801 DE102009050801B4 (en) 2009-09-04 2009-10-27 Safety device for protection of devices operating without pressure

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN2009101951164A CN102011934A (en) 2009-09-04 2009-09-04 Safety device to protect non pressure-resistant equipment

Publications (1)

Publication Number Publication Date
CN102011934A true CN102011934A (en) 2011-04-13

Family

ID=43842210

Family Applications (1)

Application Number Title Priority Date Filing Date
CN2009101951164A Pending CN102011934A (en) 2009-09-04 2009-09-04 Safety device to protect non pressure-resistant equipment

Country Status (2)

Country Link
CN (1) CN102011934A (en)
DE (1) DE102009050801B4 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102011100878B3 (en) 2011-05-07 2012-04-26 Messer Group Gmbh Device for pelleting or granulating a liquid or pasty substance

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1007346B (en) * 1954-01-20 1957-05-02 Draegerwerk Ag Closing cap for gas bottles
DE1035339B (en) * 1956-04-10 1958-07-31 Eugen Laible K G Badeapp Fabri United overpressure and ventilation valve
US3954118A (en) * 1973-07-20 1976-05-04 Stewart Wilcox Fluid pressure relief device
DE3226216A1 (en) * 1982-07-13 1984-01-26 Linde Ag, 6200 Wiesbaden VALVE
DE3615169A1 (en) * 1986-05-05 1987-11-12 Siemens Ag Pressure-relief device for tanks exposed to excess gas pressures
DE4015354C2 (en) * 1990-05-12 1999-12-23 Rembe Gmbh Mes Und Regeltechni Pressure relief device
DE9012886U1 (en) * 1990-09-10 1990-11-15 Erwin Weh Gmbh, 7918 Illertissen Safety valve for a gas cylinder filling device
EP2020508A1 (en) 2007-07-30 2009-02-04 VARIAN S.p.A. Overpressure safety device for a vacuum pump

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Publication number Publication date
DE102009050801B4 (en) 2013-01-31
DE102009050801A1 (en) 2011-08-18

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Application publication date: 20110413