CN101994687B - Gate valve drive device of vacuum device - Google Patents
Gate valve drive device of vacuum device Download PDFInfo
- Publication number
- CN101994687B CN101994687B CN 200910161765 CN200910161765A CN101994687B CN 101994687 B CN101994687 B CN 101994687B CN 200910161765 CN200910161765 CN 200910161765 CN 200910161765 A CN200910161765 A CN 200910161765A CN 101994687 B CN101994687 B CN 101994687B
- Authority
- CN
- China
- Prior art keywords
- valve
- subjected
- rotating shaft
- seat
- valve plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Abstract
The invention relates to a gate valve drive device of a vacuum device. The gate valve drive device is set up between a first cavity seat and a second cavity seat and controls the communication and the disconnection of a channel between the first cavity seat and the second cavity seat. The gate valve drive device comprises a substrate, a valve mechanism, a positioning mechanism and a drive mechanism. The valve mechanism comprises a valve plate rotating shaft rotatablely set up on the substrate and a valve plate combined with the valve plate rotating shaft in a linkage way. The valve mechanism can be driven to be switched between a closed position for closing the channel between the first cavity seat and the second cavity seat and an opening position for communicating the first cavity seat and the second cavity seat. The valve mechanism can be fixed at the closed position by the positioning mechanism. The valve mechanism can be driven to rotate and the positioning mechanism can be driven to move simultaneously by arranging a single power unit through the drive mechanism, and the purpose of reducing device cost is achieved.
Description
Technical field
The present invention relates to a kind of gate valve drive unit, particularly between a kind of chamber seat of two intervals that are installed in vacuum equipment, and be used for sealing and open the gate valve drive unit of the vacuum equipment of described chamber gangway.
Background technique
The gate-valve device of known genuine null device is erected between two adjacent chambers seats, and changes control mechanism by one of this gate-valve device and change between an enable possition and a closing position, interconnects to control described chamber seat passage, perhaps is not communicated with.
For example the present patent application people mainly comprises in the gate-valve device of No. 095109638 patent case of TaiWan, China of previous proposition: a pedestal and be installed in one on this pedestal and change control mechanism, a driving mechanism and an assisting agency.The valve control rotating shaft that described driving mechanism can drive this commentaries on classics control mechanism is rotated along an opening direction and a sealing direction, and then passage between the seat of described chamber is connected or is not communicated with mutually.And this assisting agency can be driven and this pedestal move left and right relatively, and then its a plurality of auxilliary pinch rollers can be pressed against on the shut of this commentaries on classics control mechanism, makes this shut reach better sealing and intercepts the effect of chamber seat passage.
Yet, the rotary action of above-mentioned commentaries on classics control mechanism and the migration of this assisting agency independently carry out separately, and therefore, said apparatus arranges two power sources and drives this commentaries on classics control mechanism and the action of this assisting agency respectively, by the driving of turning round respectively of two power sources, the high disappearance of equipment cost will be caused.
Summary of the invention
The purpose of this invention is to provide a kind of gate valve drive unit that reduces the vacuum equipment of equipment cost.
The gate valve drive unit of vacuum equipment of the present invention is erected between the one first chamber seat and one second chamber seat of vacuum equipment, and comprises: a pedestal, a valve mechanism, location mechanism and a driving mechanism.
This pedestal comprises: a slice is engaged between the described first valve wall and the described second valve wall and defines the sidewall of an installing space jointly with the described first valve wall and the described second valve wall adjacent to this second chamber seat and the second valve wall and two with one second valve port adjacent to this first chamber seat and the first valve wall, with one first valve port.This valve mechanism comprises the valve plate that a valve plate rotating shaft and that is set up in this installing space rotationally is combined linkedly with this valve plate rotating shaft, this valve mechanism can be driven and one make this valve plate recline this first valve wall and seal the closing position of this first valve port and one make between the enable possition of this valve plate away from this first valve wall and change.
This positioning means comprises a push rod that is arranged at this installing space and can moves relative to this valve mechanism, and this positioning means can be fixed on this valve mechanism this closing position.This driving mechanism is erected on the pedestal, and comprise that one links and drive the connection unit that power unit and that the push rod of this positioning means moves links this power unit and this valve mechanism, this connection unit is given the valve plate rotating shaft of this valve mechanism with the transmission of power of this power unit, and then drives this valve plate rotating shaft along a sealing direction and opening direction rotation.
The gate valve drive unit of vacuum equipment of the present invention, the power unit of this driving mechanism comprises that a power source, one are driven by this power source and the line shaft that rotates around self axis and one are erected on this line shaft and adjacent to the part that pushes of this connection unit, described line shaft is a screw rod, and this pushes the part screw lock in the periphery of this line shaft and can be subjected to the driving of rotary action of this line shaft and this connection unit move left and right relatively.
The gate valve drive unit of vacuum equipment of the present invention, this line shaft comprises the second end of a first end and and this first end back span, and this first end is with respect to more contiguous this power source of this second end, this power unit comprises that also one links the second end of this line shaft and the joint seat of this push rod, this joint seat comprises a seat leg, this leg defines the second end screw lock of this line shaft of confession in the space that is spirally connected wherein, described joint seat be subjected to this line shaft rotary action driving and drive this push rod move left and right.
The gate valve drive unit of vacuum equipment of the present invention, this connection unit comprise that one pushes being subjected to part of part adjacent to this, and this is subjected to be subjected to this to push part to part and drives and rotate and rotational power is passed to this valve plate rotating shaft.
The gate valve drive unit of vacuum equipment of the present invention, this driving mechanism comprise that also at least one auxiliary push part with this and be subjected to support the auxiliary cylinder pressure of the direction promotion of part towards this.
The gate valve drive unit of vacuum equipment of the present invention, this connection unit also comprise one with this first gear that is subjected to be combined linkedly to part, one and second gear of this first gear engagement, output shaft and a connection assembly that is connected this output shaft and this valve plate rotating shaft at a center that is arranged on this second gear linkedly.
The gate valve drive unit of vacuum equipment of the present invention, this positioning means also comprises the pivot connecting plate that at least one is fixedly mounted on fixed base and a plurality of each interval on this first valve wall and links this fixed base and this push rod, and described pivot connecting plate all comprises first pin-joint part and second pin-joint part that articulates with this push rod that articulate with this fixed base.
The gate valve drive unit of vacuum equipment of the present invention, this positioning means also comprise and a plurality ofly are erected on this push rod rotationally and are pressed against auxilliary pinch roller on this valve mechanism when this valve mechanism is positioned at this closing position.
The gate valve drive unit of vacuum equipment of the present invention, this valve mechanism also comprises a plurality of axle fitting seat, a plurality of installation frame plate and a plurality of fixed blocks with described installation frame plate and this valve plate secure bond that are installed at each interval in this valve plate rotating shaft that are erected on this first valve wall and assemble rotationally for this valve plate rotating shaft, and described installation frame plate all has one and is installed in fixed end in this valve plate rotating shaft and one and this fixed end interval and is subjected to the pressure side that is subjected to that aforementioned auxilliary pinch roller compresses.
Beneficial effect of the present invention is: by this driving mechanism single power unit is set, just can drives this valve mechanism rotation simultaneously and drive this positioning means and move, reach the advantage that reduces equipment cost.
Description of drawings
Fig. 1 is the plan view of a preferred embodiment of the gate valve drive unit of vacuum equipment of the present invention, shows that simultaneously a valve mechanism is positioned at a closing position, and a location mechanism is positioned at a position location;
Fig. 2 is the sectional view of taking from the 2-2 line of Fig. 1, illustrates the relativeness of one first chamber seat, one second chamber seat and this preferred embodiment simultaneously;
Fig. 3 is the partial perspective view of this preferred embodiment when being positioned at Fig. 1 state;
Fig. 4 is the front elevation of this preferred embodiment when being positioned at Fig. 1 state;
Fig. 5 is the local vertical view cutaway drawing of this preferred embodiment when being positioned at Fig. 1 state;
Fig. 6 is the plan view of a similar Fig. 1, shows that simultaneously this valve mechanism is positioned at an enable possition, and this positioning means is positioned at a non-position location;
Fig. 7 is the front elevation of this preferred embodiment when being positioned at Fig. 6 state;
Fig. 8 is the sectional view of taking from the 8-8 line of Fig. 6, illustrates the described first chamber seat and the second chamber seat simultaneously;
Fig. 9 is the local vertical view cutaway drawing of this preferred embodiment when being positioned at Fig. 6 state.
Embodiment
The present invention is described in detail below in conjunction with drawings and Examples.
Consult Fig. 1, Fig. 2, Fig. 3, the preferred embodiment of the gate valve drive unit of vacuum equipment of the present invention, be erected at 12 of one first chamber seat 11 of a vacuum equipment and one second chamber seats, and be used for being communicated with and close the passage of 12 of the described first chamber seat 11 and the described second chamber seats.Above-mentioned gate valve drive unit comprises: a pedestal 2 that is folded in 12 of the described first chamber seat 11 and the described second chamber seats, one are erected at the driving mechanisms 5 that valve mechanism 3 in this pedestal 2, are erected in this pedestal 2 and are used for the positioning means 4 and that this valve mechanism 3 is positioned at a closing position can be driven simultaneously this valve mechanism 3 and this positioning means 4 actions.
This pedestal 2 is about rectangular, and comprises: the first valve wall 21 of contiguous this first chamber seat 11 of a slice, one with this first valve wall 21 at interval and be close to the second valve wall 22 and two sidewalls 23 that are connected to the and arranged on left and right sides of the described first valve wall 21 and the described second valve wall 22 of this second chamber seat 12.The described first valve wall 21 and the second valve wall 22 have one first valve port 211 and one second valve port 221 that runs through its inside and outside wall respectively, described first valve port 211 and described second valve port 221 are communicated with the passage of the described first chamber seat 11 and the described second chamber seat 12 respectively, and the first valve wall 21, the second valve wall 22 and sidewall 23 define an installing space 20 jointly.
The valve mechanism 3 of present embodiment is installed in the installing space 20 of this pedestal 2, and comprises: a plurality of each intervals and the axle fitting seat 31, that is set up in this first valve wall 21 be assembled in rotationally valve plate rotating shaft 32 on the described axle fitting seat 31, a plurality of be installed in this valve plate rotating shaft 32 equidistantly and radially outstanding installation frame plate 33, a horizontal stripe shape and area greater than valve plate 34 and a plurality of fixed block 35 that frame plate 33 and these valve plate 34 secure bond will be installed of this first valve port 211.
What wherein, this valve plate rotating shaft 32 had a sidewall 23 that protrudes from the left side is subjected to drive end 321.And described installation frame plate 33 all have one be installed in fixed end 331 in the valve plate rotating shaft 32 and one and this fixed end 331 at interval be subjected to pressure side 332, this be subjected to pressure side 332 have one from its left side ora terminalis the location indentations 333 towards right side depression.And this valve plate 34 has faying surface 341 and the assembling face 342 towards described installation frame plate 33 on the internal face that can abut in this first valve wall 21.And described fixed block 35 stretches through fixing by described installation frame plate 33 towards this valve plate 34 respectively.
Consult Fig. 1, Fig. 3, Fig. 4, described positioning means 4 comprises: a leading edge that is positioned at this valve mechanism 3 also can be driven and push rod 41, a plurality of each interval of move left and right and be fixedly mounted on fixed base 42 on this first valve wall 21, a plurality of pivot connecting plate 43 and a plurality of auxilliary pinch roller 44 that is erected at the inboard of this push rod 41 rotationally and distinguishes the location indentations 333 of corresponding described installation frame plate 33 that links described fixed base 42 and this push rod 41 respectively.The left end of this push rod 41 passes the sidewall 23 in this left side left and links this driving mechanism 5.Described pivot connecting plate 43 all comprises first pin-joint part 431 and second pin-joint part 432 that articulates with this push rod 41 that a fixed base corresponding with it 42 articulates.
Consult Fig. 1, Fig. 5, the driving mechanism 5 of present embodiment comprises: one links the connection unit 8 of the power unit 6 of the push rod 41 of this positioning means 4, a plurality of auxiliary cylinder pressure 7 and this power unit 6 of binding and this valve plate rotating shaft 32.
Wherein, this power unit 6 comprise a power source 61, driven by this power source 61 and around the pedestal 64 and that the joint seat 63, that the line shaft 62, that self axis rotates links the right-hand member of this line shaft 62 and this push rod 41 is arranged on the periphery of this joint seat 63 regularly be erected at the periphery of this line shaft 62 and be positioned at this joint seat 63 the left side push part 65.
This power source 61 is a motor, and its right end is provided with a coupling 66 and links these line shafts 62, and then the rotational power of a rotating shaft 611 of this power source 61 is passed to this line shaft 62.This line shaft 62 is one to be provided with the screw rod of a plurality of screw threads, and has a first end 621 and one and the second end 622 of these joint seat 63 combinations that links this rotating shaft 611 by this coupling 66.This joint seat 63 comprises a seat leg 631, this leg 631 define an opening towards a left side and for the second end 622 screw locks of this line shaft 62 in the space 632 that is spirally connected wherein, described seat leg 631 corresponding to this position that is spirally connected space 632 be provided with for the internal thread of these line shaft 62 screw locks.This push that part 65 is provided with a plurality of internal threads and screw lock in the periphery of this line shaft 62.This joint seat 63 and this push the drive that part 65 can be subjected to the rotary action of this line shaft 62, and this line shaft 62 move left and right relatively.
The auxiliary cylinder pressure 7 of present embodiment all is the nitrogen cylinder, and all have one link this cylinder body 71 and one that pushes part 65 from this cylinder body 71 towards the affixed cylinder axle 72 of these pedestal 64 projections.This connection unit 8 comprise a periphery that is looped around this line shaft 62 be subjected to be combined in this linkedly to part 81, one and be subjected to the periphery of part 81 and around first gear 82 of this line shaft 62, one and these first gear, 82 engagements and be positioned at output shaft 84 and a connection assembly that is subjected to drive end 321 85 that is connected this output shaft 84 and this valve plate rotating shaft 32 at second gear 83 at the rear of this first gear 82, a center that is arranged on this second gear 83 linkedly.
Wherein, this is subjected to the packing ring 811 that is provided with an annular and made by rubber towards this surface that pushes part 65 to part 81, this packing ring 811 can be tight against by this left end that pushes part 65, be subjected to push frictional force between the part 65 to part 81 and this so as to increasing this, make this push part 65 and be tight against this left and be subjected to when part 81 that this pushes part 65 and can drive this and be subjected to rotate linkedly to part 81.This connection assembly 85 comprises members such as a coupling 851, a deceleration component 852, is used for the rotational power of this output shaft 84 is passed to this valve plate rotating shaft 32.
Consult Fig. 1, Fig. 2, Fig. 3, Fig. 5, when this valve mechanism 3 is positioned at this closing position, this valve plate 34 relies on this first valve wall 21, the faying surface 341 of this valve plate 34 recline this first valve wall 21 internal face and block this first valve port 211, the passage of the described first chamber seat 11 and the described second chamber seat 12 is not communicated with mutually.This moment, this positioning means 4 was positioned at this position location, this push rod 41 is away from this line shaft 62, described pivot connecting plate 43 is oblique extension approximately, its second pin-joint part 432 is positioned at the upper right of first pin-joint part 431, described auxilliary pinch roller 44 is pressed together on the location indentations 333 of described installation frame plate 33, so that this valve mechanism 3 is fixed in this closing position.
When driving this line shaft 62, this motor rotates towards a first direction, it is mobile towards a non-orientation 401 (Fig. 5) that the rotary action of this line shaft 62 drives this joint seat 63, present embodiment is towards moving left, also spur when joint seat 63 moves this push rod 41 and with the auxilliary pinch roller 44 of push rod 41 combinations towards moving left, make this positioning means 4 move to the non-position location of Fig. 6 to Fig. 9 at last, described auxilliary pinch roller 44 no longer is pressed against on the location indentations 333.
Consult Fig. 6 to Fig. 9, when line shaft 62 rotates towards this first direction, driving this pushes part 65 and also is moved to the left and relies on this gradually and be subjected to part 81, at the same time, the length that the cylinder axle 72 of auxiliary cylinder pressure 7 stretches out this cylinder body 71 lengthens gradually, also bestow this and push 65 1 thrusts towards a left side of part to promote this cylinder body 71, push part 65 up to this and be tight against this when being subjected to packing ring 811 to part 81 right sides as Fig. 9, because this moment, this line shaft 62 still continued to rotate, this pushes the space that part 65 is not moved to the left, this pushes part 65 and then is subjected to part 81 along with these line shaft 62 interlocks rotate and continue to be tight against this towards a left side, strengthen this because the left side of described auxiliary cylinder pressure 7 pushes away effect simultaneously and push strength, therefore pushing part 65 rotates and drives this and be subjected to support part 81 rotations, and then described first gear 82 of interlock, described second gear 83, output shaft 84 is all around self central axis rotation, and drive this valve plate rotating shaft 32 by this connection assembly 85 and rotate towards the opening direction 301 just like Fig. 2, and then to drive valve plate 34 be center of rotation and rotating towards the direction away from this first valve wall 21 with its fixed end 331, and be transformed into the enable possition of Fig. 8, the faying surface 341 of valve plate 34 is away from the internal face of this first valve wall 21 at this moment, this first valve port 211 is no longer sealed, and the passage of the described first chamber seat 11 and the described second chamber seat 12 is connected.
Identical reason, when driving this line shaft 62, this motor rotates towards a second direction, because this pushed part 65 and still was subjected to be tight against combination to part 81 with this this moment, therefore pushing part 65 driven and the power of rotation by this line shaft 62, can drive this valve plate rotating shaft 32 by this connection unit 8 and rotate towards the sealing direction 302 just like Fig. 8, make this valve plate 34 and associated components rotate the closing position of getting back to Fig. 2.Cylinder body 71 relative its cylinder axles 72 of following described auxiliary cylinder pressure 7 move right, therefore the extent of the protrusion of cylinder axle 72 shortens gradually, auxiliary cylinder pressure 7 is tight against this no longer left and pushes part 65, make and push part 65, joint seat 63 and can be subjected to the rotary action of this line shaft 62 and move towards the orientation 402 of a Fig. 9, present embodiment moves right for court, and then promote these push rods 41 by this joint seat 63 and move right, make this positioning means 4 get back to the position location of Fig. 3, Fig. 5, and once again by the effect that compresses of auxilliary pinch roller 44, this valve mechanism 3 is fixed in this closing position.
In sum, can drive 4 actions of this valve mechanism 3 and this positioning means simultaneously by this driving mechanism 5, improve the existing design that separately drives, so the present invention need only arrange one group of power source 61, and then reduce equipment cost.The present invention not only is different from gate valve drive unit in the past, and makes sealing or the location of breakdown action and this positioning means 4 or the action coherent cooperation each other of releasing location of this valve mechanism 3, is innovation really.
Claims (8)
1. the gate valve drive unit of a vacuum equipment is erected between the first chamber seat and second chamber seat of vacuum equipment, and comprises: a pedestal and be erected at a valve mechanism on this pedestal, a positioning means and a driving mechanism;
This pedestal comprise a slice adjacent to this first chamber seat and the first valve wall, with first valve port adjacent to this second chamber seat and have the second valve wall of second valve port and two be engaged between the described first valve wall and the described second valve wall and define the sidewall of an installing space jointly with the described first valve wall and the described second valve wall;
This valve mechanism comprises the valve plate that a valve plate rotating shaft that is set up in this installing space rotationally and a slice and this valve plate rotating shaft are combined linkedly, this valve mechanism driven and one make this valve plate recline this first valve wall and seal the closing position of this first valve port and one make and change between the enable possition of this valve plate away from this first valve wall;
This positioning means comprises a push rod that is arranged at this installing space and can moves relative to this valve mechanism, and this positioning means is fixed on this closing position with this valve mechanism;
It is characterized in that, this driving mechanism comprises power unit and connection unit that links this power unit and this valve mechanism that a push rod that links and drive this positioning means moves, this connection unit is given the valve plate rotating shaft of this valve mechanism with the transmission of power of this power unit, and then drives this valve plate rotating shaft along a sealing direction and an opening direction rotation;
Wherein, the power unit of this driving mechanism comprises that a power source, one are driven by this power source and the line shaft that rotates around self axis and one are erected on this line shaft and adjacent to the part that pushes of this connection unit, described line shaft is a screw rod, and this pushes the part screw lock in the periphery of this line shaft and can be subjected to the driving of rotary action of this line shaft and this connection unit move left and right relatively.
2. the gate valve drive unit of vacuum equipment according to claim 1, it is characterized in that, this line shaft comprises the second end of a first end and and this first end back span, and this first end is with respect to more contiguous this power source of this second end, this power unit comprises that also one links the second end of this line shaft and the joint seat of this push rod, this joint seat comprises a seat leg, this leg defines the second end screw lock of this line shaft of confession in the space that is spirally connected wherein, described joint seat be subjected to this line shaft rotary action driving and drive this push rod move left and right.
3. the gate valve drive unit of vacuum equipment according to claim 1 is characterized in that, this connection unit comprises that one pushes being subjected to part of part adjacent to this, and this is subjected to be subjected to this to push part to part and drives and rotate and rotational power is passed to this valve plate rotating shaft.
4. the gate valve drive unit of vacuum equipment according to claim 3 is characterized in that, this driving mechanism comprises that also at least one auxiliary push part with this and be subjected to support the auxiliary cylinder pressure of the direction promotion of part towards this.
5. the gate valve drive unit of vacuum equipment according to claim 3, it is characterized in that, this connection unit also comprise one with this first gear that is subjected to be combined linkedly to part, one and second gear of this first gear engagement, output shaft and a connection assembly that is connected this output shaft and this valve plate rotating shaft at a center that is arranged on this second gear linkedly.
6. the gate valve drive unit of vacuum equipment according to claim 1, it is characterized in that, this positioning means also comprises the pivot connecting plate that at least one is fixedly mounted on fixed base and a plurality of each interval on this first valve wall and links this fixed base and this push rod, and described pivot connecting plate all comprises first pin-joint part and second pin-joint part that articulates with this push rod that articulate with this fixed base.
7. the gate valve drive unit of vacuum equipment according to claim 6 is characterized in that, this positioning means also comprises and a plurality ofly is erected on this push rod rotationally and is pressed against auxilliary pinch roller on this valve mechanism when this valve mechanism is positioned at this closing position.
8. the gate valve drive unit of vacuum equipment according to claim 7, it is characterized in that, this valve mechanism also comprises a plurality of axle fitting seat, a plurality of installation frame plate and a plurality of fixed blocks with described installation frame plate and this valve plate secure bond that are installed at each interval in this valve plate rotating shaft that are erected on this first valve wall and assemble rotationally for this valve plate rotating shaft, and described installation frame plate all has one and is installed in fixed end in this valve plate rotating shaft and one and this fixed end interval and is subjected to the pressure side that is subjected to that aforementioned auxilliary pinch roller compresses.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200910161765 CN101994687B (en) | 2009-08-14 | 2009-08-14 | Gate valve drive device of vacuum device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200910161765 CN101994687B (en) | 2009-08-14 | 2009-08-14 | Gate valve drive device of vacuum device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101994687A CN101994687A (en) | 2011-03-30 |
| CN101994687B true CN101994687B (en) | 2013-07-17 |
Family
ID=43785288
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 200910161765 Expired - Fee Related CN101994687B (en) | 2009-08-14 | 2009-08-14 | Gate valve drive device of vacuum device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN101994687B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102813974A (en) * | 2012-09-04 | 2012-12-12 | 南昌贝欧特医疗设备有限公司 | Infusion alarming device |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2186334Y (en) * | 1993-03-12 | 1994-12-28 | 机械电子工业部西安重型机械研究所 | Sway vacuum pneumatic valve |
| CN101046256A (en) * | 2006-03-30 | 2007-10-03 | 北儒精密股份有限公司 | Gate valve unit for vacuum equipment |
| JP2008121859A (en) * | 2006-11-15 | 2008-05-29 | Ckd Corp | Vacuum valve |
-
2009
- 2009-08-14 CN CN 200910161765 patent/CN101994687B/en not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2186334Y (en) * | 1993-03-12 | 1994-12-28 | 机械电子工业部西安重型机械研究所 | Sway vacuum pneumatic valve |
| CN101046256A (en) * | 2006-03-30 | 2007-10-03 | 北儒精密股份有限公司 | Gate valve unit for vacuum equipment |
| JP2008121859A (en) * | 2006-11-15 | 2008-05-29 | Ckd Corp | Vacuum valve |
Also Published As
| Publication number | Publication date |
|---|---|
| CN101994687A (en) | 2011-03-30 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| EP3406947B1 (en) | Valve | |
| CN1861973A (en) | Rotary sliding door system | |
| CN101994687B (en) | Gate valve drive device of vacuum device | |
| CN103906956A (en) | Pinch valve device | |
| CN101121031B (en) | Locking sealing device for door cover of sterilization device | |
| CA2824345C (en) | Planetary gear ball valve | |
| CN105221768A (en) | A kind of double rocking lever is without friction hard-sealing butterfly valve | |
| CN102294938B (en) | Wheel assembly and travelling mechanism with same | |
| CN101549164B (en) | Fast-open type manual door sterilizing chamber bidirectional eccentric center jointed connectig rod mechanism manual fast open door | |
| CN215794508U (en) | Machine nest flip mechanism and machine nest | |
| CN207892582U (en) | A kind of well drilling blowout prevention device | |
| CN113217689B (en) | Two-way high performance butterfly valve with outage canceling release mechanical system | |
| CN213236097U (en) | Long service life's butterfly valve | |
| CN210600394U (en) | Online linkage and isolation structure of switching valve | |
| CN110176369A (en) | A kind of power-off auto-cutout power down switch | |
| CN208456388U (en) | A kind of novel single-layer plate sealed door | |
| KR200478596Y1 (en) | Opening and shutting structure of door | |
| RU112271U1 (en) | TURN-LOCK SHUT-HOUSE PROTECTIVE-SEALED DOUBLE-WING | |
| CN220764679U (en) | Aircraft cabin and aircraft | |
| CN201944331U (en) | Four-way reversing valve | |
| CN215861783U (en) | Four-connecting-rod heat-preservation butterfly valve sealed by metal wire without leakage | |
| CN213264731U (en) | Flap gate for discharging of scraper conveyor | |
| CN115288537B (en) | Unpowered split watertight porthole | |
| CN217581772U (en) | Train sealing end door | |
| CN217762101U (en) | Electric butterfly valve |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130717 Termination date: 20140814 |
|
| EXPY | Termination of patent right or utility model |