CN101993080B - Polysilicon reducing furnace - Google Patents
Polysilicon reducing furnace Download PDFInfo
- Publication number
- CN101993080B CN101993080B CN 200910144612 CN200910144612A CN101993080B CN 101993080 B CN101993080 B CN 101993080B CN 200910144612 CN200910144612 CN 200910144612 CN 200910144612 A CN200910144612 A CN 200910144612A CN 101993080 B CN101993080 B CN 101993080B
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- Prior art keywords
- chassis
- polysilicon
- shower nozzle
- reducing furnace
- pipe
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Abstract
The invention discloses a polysilicon reducing furnace. The polysilicon reducing furnace comprises a furnace enclosure, a chassis, polysilicon rods, a feeding pipe and nozzles, wherein the furnace enclosure is arranged on the chassis; the chassis is provided with at least one group of polysilicon rods and also provided with the nozzles which are connected with the feeding pipe on the lower part of the chassis; and the number of the nozzles is not less than three. The invention solves the problem that the existing polysilicon reducing furnace adopts the one-pipe jet mode so that the deposition of silicon rods is uneven, thick and not complete and the yield is low. The polysilicon reducing furnace has simple structure; and the reduction rate is greatly increased while the absorption rate is also greatly increased.
Description
Technical field
The invention belongs to chemical industry and be used for the equipment of production of polysilicon, i.e. polycrystalline silicon reducing furnace.
Background technology
Existing polycrystalline silicon reducing furnace all adopts the single tube jet-type, is about to hydrogen, trichlorosilicane mixes the back in certain proportion and gets into reduction furnace by a jet pipe, tends to cause the silicon rod deposition inhomogeneous like this, makes that the low reduction of specific absorption is not thorough.
Summary of the invention
In order to achieve the above object; The present invention has adopted following technical scheme, and a kind of polycrystalline silicon reducing furnace includes bonnet, chassis, polysilicon rod, feed-pipe and shower nozzle; Bonnet is installed on the chassis; At least one group of polysilicon rod is installed on the chassis, also is provided with the shower nozzle that is connected with the feed-pipe and the extraction line of bottom, chassis on the chassis simultaneously, shower nozzle is more than three or three.
Described shower nozzle is combined by three independent tubes, wherein be positioned at the shower nozzle top end opening for the feed-pipe road junction, shower nozzle two sides opening be respectively the extraction line road junction.
The present invention adopts low speed three pipe feeding manners, has improved reduction rate and deposition greatly, make yield from before about 30% brought up to about 80%.Simultaneously feed pipe and discharge pipe are combined, made that also production cost of the present invention is low, occupied ground is little during use.
Description of drawings
Fig. 1 hydrogen reduction furnace for polysilicon structural representation;
Its nozzle structure synoptic diagram of Fig. 2 hydrogen reduction furnace for polysilicon.
Among the figure: 1, bonnet; 2, chassis; 3, polysilicon rod; 4, feed-pipe; 5, extraction line; 6, shower nozzle; 7, guide rail; 8, feed-pipe road junction; 9, the first extraction line road junction; 10, the first extraction line road junction.
Embodiment
Below in conjunction with accompanying drawing the present invention is done further explanation:
As shown in Figure 1, a kind of polycrystalline silicon reducing furnace includes bonnet 1, chassis 2, polysilicon rod 3, feed-pipe 4, extraction line 5 and shower nozzle 6.Bonnet 1 is installed on the chassis 2, and at least one group of polysilicon rod 3 is installed on the chassis 2, and also being provided with shower nozzle 6. shower nozzles 6 that are connected with the feed-pipe 4 and the extraction line 5 of bottom, chassis on the chassis 2 simultaneously is more than three or three.So just, make the charging and the polysilicon rod 3 that get in the stove by shower nozzle 6 that sufficient contact surface is arranged, improved reduction rate and deposition greatly.As shown in Figure 2, described shower nozzle 6 is combined by 3 independent tubes, wherein be positioned at shower nozzle 6 top end openings for feed-pipe road junction 8, shower nozzle 6 two sides openings be respectively the first extraction line road junction 9 and the second extraction line road junction 10.Feed pipe and discharge pipe are combined, made that also production cost of the present invention is low, also favourable condition is provided for making full use of production site.
Claims (1)
1. polycrystalline silicon reducing furnace; Include bonnet (1), chassis (2), polysilicon rod (3), feed-pipe (4), extraction line (5) and shower nozzle (6); It is characterized in that: bonnet (1) is installed on the chassis (2); At least one group of polysilicon rod (3) is installed on the chassis (2); Simultaneously also be provided with the shower nozzle (6) that is connected with the feed-pipe (4) and the extraction line (5) of bottom, chassis on chassis (2), and shower nozzle (6) is more than three or three, described shower nozzle (6) is combined by three independent tubes; Wherein be positioned at the shower nozzle top end opening for feed-pipe road junction (8), shower nozzle two sides opening be respectively the first extraction line road junction (9) and the second extraction line road junction (10).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200910144612 CN101993080B (en) | 2009-08-21 | 2009-08-21 | Polysilicon reducing furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200910144612 CN101993080B (en) | 2009-08-21 | 2009-08-21 | Polysilicon reducing furnace |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101993080A CN101993080A (en) | 2011-03-30 |
| CN101993080B true CN101993080B (en) | 2012-12-19 |
Family
ID=43783918
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 200910144612 Expired - Fee Related CN101993080B (en) | 2009-08-21 | 2009-08-21 | Polysilicon reducing furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN101993080B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104677105A (en) * | 2015-02-25 | 2015-06-03 | 内蒙古鄂尔多斯电力冶金股份有限公司氯碱化工分公司 | Reducing furnace |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1884068A (en) * | 2005-06-24 | 2006-12-27 | 刘雅銘 | Reducing furnace for producing polysilicon |
| CN201050940Y (en) * | 2007-05-31 | 2008-04-23 | 无锡中彩科技有限公司 | Inlet and outlet pipe device of high temperature reducing furnace |
| CN201232028Y (en) * | 2008-04-20 | 2009-05-06 | 徐州东南多晶硅材料研发有限公司 | Polycrystalline silicon reducing furnace with adjustable air inlet pipe nozzle |
| CN201362597Y (en) * | 2009-01-13 | 2009-12-16 | 张家港市华菱化工机械有限公司 | Polysilicon reduction furnace |
-
2009
- 2009-08-21 CN CN 200910144612 patent/CN101993080B/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1884068A (en) * | 2005-06-24 | 2006-12-27 | 刘雅銘 | Reducing furnace for producing polysilicon |
| CN201050940Y (en) * | 2007-05-31 | 2008-04-23 | 无锡中彩科技有限公司 | Inlet and outlet pipe device of high temperature reducing furnace |
| CN201232028Y (en) * | 2008-04-20 | 2009-05-06 | 徐州东南多晶硅材料研发有限公司 | Polycrystalline silicon reducing furnace with adjustable air inlet pipe nozzle |
| CN201362597Y (en) * | 2009-01-13 | 2009-12-16 | 张家港市华菱化工机械有限公司 | Polysilicon reduction furnace |
Non-Patent Citations (1)
| Title |
|---|
| JP特开2007-145663A 2007.06.14 |
Also Published As
| Publication number | Publication date |
|---|---|
| CN101993080A (en) | 2011-03-30 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CI01 | Correction of invention patent gazette |
Correction item: Patentee Correct: Zhangjiagang City Hualing Chemical Machinery Co., Ltd. False: Zhangjiagang City Hualing Chemical Machinery Co., Ltd. Number: 51 Volume: 28 |
|
| CI03 | Correction of invention patent |
Correction item: Patentee Correct: Zhangjiagang City Hualing Chemical Machinery Co., Ltd. False: Zhangjiagang City Hualing Chemical Machinery Co., Ltd. Number: 51 Page: The title page Volume: 28 |
|
| ERR | Gazette correction | ||
| RECT | Rectification | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20121219 Termination date: 20160821 |