CN101968569A - 3D-MEMS-based OXC optical switch - Google Patents

3D-MEMS-based OXC optical switch Download PDF

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Publication number
CN101968569A
CN101968569A CN 201010533276 CN201010533276A CN101968569A CN 101968569 A CN101968569 A CN 101968569A CN 201010533276 CN201010533276 CN 201010533276 CN 201010533276 A CN201010533276 A CN 201010533276A CN 101968569 A CN101968569 A CN 101968569A
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China
Prior art keywords
mems
array
oxc
photoswitch
dimensional array
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CN 201010533276
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Chinese (zh)
Inventor
吴励
胡豪成
何亮
李阳
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Photop Technologies Inc
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Photop Technologies Inc
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Priority to CN 201010533276 priority Critical patent/CN101968569A/en
Publication of CN101968569A publication Critical patent/CN101968569A/en
Pending legal-status Critical Current

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Abstract

The invention provides a 3D-MEMS-based optical cross connection (OXC) optical switch, which comprises a two-dimensional array collimator, a reflecting MEMS array adjacent to the two-dimensional array collimator, and an expanding (demagnifying) telescope arranged between the two-dimensional array collimator and the reflecting MEMS array. The 3D-MEMS-based OXC optical switch has controlled optical indexes, simple structure and lower cost, and is more suitable for marketable promotion and application.

Description

A kind of OXC photoswitch of realizing based on 3D-MEMS
Technical field
The present invention relates to micro photo-electro-mechanical device field, relate in particular to a kind of OXC photoswitch of realizing based on 3D-MEMS.
Background technology
The appearance of Fibre Optical Communication Technology and development have brought revolutionary change to communication industry, and the communication service in the world about 85% at present is through Optical Fiber Transmission, and long distance line net and local trunk network also have been extensive use of optical fiber.Simultaneously, the development of dense wave division multipurpose (DWDM) technology and maturation have been opened up wide space for bandwidth and the capacity of fully using Optical Fiber Transmission, and the dwdm optical communication network with two-forty, big bandwidth clear superiority has become the trend of present communication network development.
Particularly in recent years, Internet business based on IP presents explosive increase, this rising tendency has not only changed the relation of IP network layer and bottom transmission network, and networking mode, design of node, management and the control of whole network has been proposed new requirement.A kind of intelligent network architecture-ASON (ASON:automatic switched optical networks) becomes the focus of current systematic study, its core node is made of optical cross connect (OXC:optical cross connect) equipment, by OXC, can realize dynamic wavelength routing and, effectively management flexible to optical-fiber network.Optical cross connection (OXC) technology is one of gordian technique in complicated day by day DWDM net, and photoswitch then is the key component among the OXC as the function element of switching-over light path.Optical switch matrix is the core of OXC; it can realize functions such as dynamic light path is directly managed, the emergency protection of optical-fiber network, wavelength dynamic assignment; to solving the wavelength contention in the present complex network, improve the Wavelength reuse rate, carrying out the network agile configuration all has important meaning.
At present, focus based on a kind of structure that realizes of the OXC system of the large port number (~ 100 * 100) of Metropolitan Area Network (MAN) as shown in Figure 1.Wherein, main optical element comprises a 2-D collimator array 101, a 3-D MEMS array 102, the 2nd 2-D collimator array 103 and the 2nd 3-D MEMS array 104.Each collimating apparatus emergent light is corresponding with a reflector element in the corresponding 3-D MEMS array 102 in the one 2-D collimator array 101.Lucent and Fujitsu have the product release of this platform at present, Fig. 2 is the product light path of Lucent, and its product comprises first fiber array 201, first lens arra 202, a MEMS array 203, fourier lense 204, the 2nd MEMS array 205, second lens arra 206 and second fiber array 207.
The optics collimator that utilizes classic method to make, because the external diameter of collimating apparatus is subjected to the external diameter restriction of kapillary, glass bushing, lens materials such as (c-lens or Grin-lens), its external diameter minimum also can only be accomplished 1mm.So its outgoing parallel beam of the collimator array of making according to this type of mode is (pitch value) 〉=1mm at interval.In the optical texture of the OXC photoswitch of realizing based on 3D-MEMS, because the restriction of the bin of MEMS mirror unit size and inclination angle scope, when making the OXC photoswitch product of high port number, the interval of collimation device array has proposed littler requirement, and the collimator array that makes classic method make can't meet the demands.
Current, also there is report to mention the method that based semiconductor technology is made lens arra and fiber array, its pitch value can be accomplished 125um.But this kind scheme not only cost of manufacture is high, and the technology difficulty problem is more outstanding, and the important parameter of its product is poor as spot size and pointing accuracy consistance, makes it be restricted in actual applications.
Summary of the invention
The technical matters that the present invention solves is, a kind of OXC photoswitch of realizing based on 3D-MEMS is provided, and optical index is controlled, and is simple in structure, and cost is lower.
A kind of OXC photoswitch of realizing based on 3D-MEMS, its pass comprises:
The two-dimensional array collimating apparatus;
Reflective MEMS array with the adjacent setting of two-dimensional array collimating apparatus; And
Be arranged on expansion (contracting) the bundle telescope between two-dimensional array collimating apparatus and the reflective MEMS array.
According to one preferred embodiment of the present invention, described expansion (contracting) bundle telescope be Galileo type or Kepler's type one of them.
Compare with prior art, a kind of OXC photoswitch of realizing based on 3D-MEMS provided by the invention, realize the MEMS device of little pitch and the big pitch two-dimensional collimation device array coupling that traditional handicraft is made, the conventional two-dimensional collimator array be can be used in the OXC photoswitch, its availability height, optical index is controlled, and it is simple in structure, cost is lower, is more suitable for having extensive market prospects in the applying of market.
Description of drawings
Fig. 1 is a kind of implementation structure synoptic diagram of prior art based on the OXC system of the large port number of Metropolitan Area Network (MAN).
Fig. 2 is the product index path of prior art Lucent.
Fig. 3 is the preferred embodiment module diagram that the present invention is based on the OXC photoswitch of 3D-MEMS realization.
Fig. 4 is the Galileo type beam expanding lens structural representation that the present invention adopts.
Fig. 5 is Kepler's type beam expanding lens structural representation that the present invention adopts.
Embodiment
The present invention is described in detail below in conjunction with drawings and Examples.
Thought of the present invention is, adopt one group of expansion (contracting) bundle telescope to place between two-dimensional array collimating apparatus and the reflective MEMS array, the photoimaging of two-dimensional array collimating apparatus output is dwindled,, adapt to undersized reflective MEMS array to reduce interval between the directional light.Promptly utilize the beam expanding lens (oppositely use and then be beam-shrinked mirror) in the optics, the big pitch two-dimensional collimation device array that reflective MEMS device and the traditional handicraft of little pitch are made is realized coupling.
See also Fig. 3, it is the preferred embodiment module diagram that the present invention is based on the OXC photoswitch of 3D-MEMS realization.
Based on the OXC photoswitch that 3D-MEMS realizes, comprise adjacent setting two-dimensional array incident collimating apparatus 11, bundle telescope 12, the first reflective MEMS array 13, fourier lense 14, the second reflective MEMS array 15, scalable bundle telescope 16 and two-dimensional array outgoing collimating apparatus 17 contract.
Wherein, contract the bundle telescope 12 be arranged between two-dimensional array incident the collimating apparatus 11 and first reflective MEMS array 13; Scalable bundle telescope 16 is arranged between two-dimensional array outgoing the collimating apparatus 17 and second reflective MEMS array 15.
Directional light is entered by two-dimensional array incident collimating apparatus 11, is transferred to the bundle telescope 12 that contracts, and reduces interval between the directional light by the bundle telescope 12 that contracts, and makes that the directional light after reducing at interval mates the first reflective MEMS array 13.Directional light after reducing at interval is transferred to the first reflective MEMS array 13 and reflects, through fourier lense 14, shine the second reflective MEMS array 15, and secondary reflection again, be transferred to scalable bundle telescope 16, increase interval between the directional light by scalable bundle telescope 16, make that the directional light after increasing at interval mates the second reflective MEMS array 17.Directional light after increasing at interval is transferred to two-dimensional array outgoing collimating apparatus 17.
Above-mentioned expansion, beam-shrinked mirror 12,16 can be Galileo type or Kepler's type.
See also Fig. 4, it is the Galileo type beam expanding lens structural representation that the present invention adopts.
Galileo type beam expanding lens comprises input mirror 401 and outgoing mirror 402.Wherein, input mirror 401 is the concavees lens of input, and outgoing mirror 402 is the convex lens of output.Input mirror 401 sends an empty focal length light beam to outgoing mirror 402.
Galileo type beam expanding lens is simple, volume is little, price is low.
See also Fig. 5, it is Kepler's type beam expanding lens structural representation that the present invention adopts.
Kepler's type beam expanding lens adopts convex lens as the input eyeglass, and the light beam that real focal length is focused on sends on the output element.
Compare with prior art, a kind of OXC photoswitch of realizing based on 3D-MEMS provided by the invention, realize the MEMS device of little pitch and the big pitch two-dimensional collimation device array coupling that traditional handicraft is made, the conventional two-dimensional collimator array be can be used in the OXC photoswitch, its availability height, optical index is controlled, and it is simple in structure, cost is lower, is more suitable for having extensive market prospects in the applying of market.
In the above-described embodiments, only the present invention has been carried out exemplary description, but those skilled in the art can carry out various modifications to the present invention after reading present patent application under the situation that does not break away from the spirit and scope of the present invention.

Claims (2)

1. OXC photoswitch of realizing based on 3D-MEMS is characterized in that described OXC photoswitch comprises:
The two-dimensional array collimating apparatus;
Reflective MEMS array with the adjacent setting of two-dimensional array collimating apparatus; And telescope is restrainted in the expansion (contracting) that is arranged between two-dimensional array collimating apparatus and the reflective MEMS array.
2. the OXC photoswitch of realizing based on 3D-MEMS according to claim 1 is characterized in that, described expansion (contracting) bundle telescope be Galileo type or Kepler's type one of them.
CN 201010533276 2010-11-05 2010-11-05 3D-MEMS-based OXC optical switch Pending CN101968569A (en)

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CN 201010533276 CN101968569A (en) 2010-11-05 2010-11-05 3D-MEMS-based OXC optical switch

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103901615A (en) * 2014-03-14 2014-07-02 北京理工大学 Foveated imaging optical system
WO2015070563A1 (en) * 2013-11-15 2015-05-21 华为技术有限公司 3d-mems optical switch

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1393711A (en) * 2001-06-29 2003-01-29 朗迅科技公司 Micro-electromechanical system switch with convergence light beam

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1393711A (en) * 2001-06-29 2003-01-29 朗迅科技公司 Micro-electromechanical system switch with convergence light beam

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2015070563A1 (en) * 2013-11-15 2015-05-21 华为技术有限公司 3d-mems optical switch
US9733432B2 (en) 2013-11-15 2017-08-15 Huawei Technologies Co., Ltd. 3D-MEMS optical switch
CN104635334B (en) * 2013-11-15 2017-09-12 华为技术有限公司 A kind of 3D mems optical switches
CN103901615A (en) * 2014-03-14 2014-07-02 北京理工大学 Foveated imaging optical system
CN103901615B (en) * 2014-03-14 2016-05-25 北京理工大学 Little recessed imaging optical system

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Application publication date: 20110209