CN101968461A - Room temperature hydrogen sensor based on palladium-nanometer-scale stannic oxide film type electrode - Google Patents

Room temperature hydrogen sensor based on palladium-nanometer-scale stannic oxide film type electrode Download PDF

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CN101968461A
CN101968461A CN 201010291452 CN201010291452A CN101968461A CN 101968461 A CN101968461 A CN 101968461A CN 201010291452 CN201010291452 CN 201010291452 CN 201010291452 A CN201010291452 A CN 201010291452A CN 101968461 A CN101968461 A CN 101968461A
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palladium
stannic oxide
hydrogen
nano
sensor
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CN101968461B (en
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王敏
温旭光
蒋建中
王岑
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Zhejiang University ZJU
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Zhejiang University ZJU
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Abstract

The invention relates to a micro hydrogen sensor, in particular to preparation and performance detection of a palladium-nanometer-scale stannic oxide film type electrode in a hydrogen sensor. In the micro hydrogen sensor, aluminum oxide is used as a substrate, and palladium and nanometer-scale stannic oxide deposit on the substrate as a hydrogen sensitive material by adopting a method of electrode-free electrolysis. The invention provides a preparation method of the palladium-nanometer-scale stannic oxide film type electrode, the palladium-nanometer-scale stannic oxide film type electrode better enhance the performance of the hydrogen sensor as the hydrogen sensitive material, development and application of a nanometer-scale stannic oxide material are beneficial to enhancing the performance of the stannic oxide hydrogen sensor, and stannic oxide is doped into noble metals such as the palladium and the like to enhance the flexibility, reduce the response time and also lower the operation temperature. The invention has the advantages of shorter response time, better stability, better repeatability, micro sensor size, low processing cost and being beneficial to minaturization, integration and industrialization, is particularly suitable for room temperature detection and can also recycle ceramic wafers of a substrate carrier.

Description

Room temperature hydrogen gas sensor based on palladium-nano-stannic oxide film like electrode
Technical field
The present invention relates to a kind of miniature hydrogen gas sensor, be specifically related to the preparation and the Performance Detection of palladium in the hydrogen gas sensor-nano-stannic oxide film like electrode.
Technical background
Hydrogen is a kind of desirable novel energy, is subjected to people's favor, be widely used in various workers, agriculture occasion, but hydrogen is inflammable and explosive gas simultaneously, easily blasts with air mixed again, and is therefore extremely urgent to the research of hydrogen gas sensor.Hydrogen gas sensor is mainly used in the detection of density of hydrogen, the hydrogen test leak of aspects such as the separation of mixed gas and gas filtration.
Research about the quick material of hydrogen at present has a lot, as tin ash, Metal Palladium etc.Tin ash is a kind of important quick material of semi-conductor type hydrogen, but it lacks gas-selectively and need be than High Operating Temperature (250-600 ℃) to obtain enough sensitivity.Metal Palladium be because of receiving much concern with hydrogen generation reversible reaction, but because pure palladium membranes has strong adsorptive power to hydrogen, especially when density of hydrogen is high, will lose the sensing capabilities to hydrogen; And hydrogen embrittlement film obscission takes place in palladium film easily, so, the research of the quick material of hydrogen is still being continued, the more dominance of hydrogen gas sensor can be still waiting to improve and excavate.
Summary of the invention
At prior art in deficiency, the invention provides the preparation method of a kind of palladium-nano-stannic oxide film like electrode, as the quick material of hydrogen, improve the performance of hydrogen gas sensor better, the research and development of nano tin dioxide material and application help to improve the performance of tin ash hydrogen gas sensor; Tin ash is mixed noble metal such as palladium and can improve sensitivity, reduce the response time, can also reduce operating temperature.
The present invention is the palladium-nano-stannic oxide film like electrode preparation method in a kind of hydrogen gas sensor, is to make egative film with aluminium oxide, and the method that adopts electrodeless electrolysis deposits on the egative film palladium and nano-stannic oxide as the quick material of hydrogen, and step is as follows:
1) preparation of nano-stannic oxide: use hydro-thermal method synthesis of nano tin ash, two hydrated stannous chlorides are joined in the ethanolic solution, regulate pH to 11, after the suspension that obtains stirred 1 hour, 120 ℃ of down heating 6 hours, centrifugal and after 50 ℃ of dried overnight, obtain faint yellow tin ash;
2) pre-service of alumina ceramic plate: after the chloroazotic acid soaking and washing, used the deionized water cleaned by ultrasonic vibration again 1 minute, 500-600 ℃ of calcination about 2 hours in high temperature furnace at last, the potsherd of cleaning is immersed in freshly prepared stannous chloride solution (30 g/L) and the silver ammino solution (10 g/L) each 10 minutes respectively, activates its surface;
3) composite film coating: on the ceramic substrate of handling well, adopt the method for electrodeless composite film coating, nano-stannic oxide, palladium and deposition of gold are constituted coatings on ceramic substrate, to transfer in the aqueous solution that fills sodium sulphite, palladium bichloride, nano-stannic oxide through pretreated potsherd, add an amount of gold sodium sulfide and formaldehyde, generate one deck grey uniform film after 20 minutes on the potsherd surface;
4) under different temperatures with film drying after, be connected with lead with crocodile clip, become the membranaceous electrode of palladium-nano-stannic oxide in the hydrogen gas sensor.
Alumina ceramic plate of the present invention is of a size of 15mm*15mm*2mm.
Palladium in the coatings of the present invention-Xi proportioning was controlled at 1: 1.
Hydrogen gas sensor is mainly tested its sensing capabilities at normal temperatures, and the lead of Agilent 34901A data acquisition unit can use crocodile clip to link to each other with sensor, and sensor places the quartz ampoule central authorities that gas stream is crossed.Adopt the Performance Detection step of hydrogen gas sensor of the membranaceous electrode of palladium-nano-stannic oxide of the present invention as follows:
● before Performance Detection, feed high pure nitrogen, the steady resistance signal response occurs up to this hydrogen gas sensor;
● continue to feed synthesis of air, treat signal stabilization, obtain stable baseline electrical resistance signal and be designated as R 0
● feed the hydrogen with nitrogen dilution, density of hydrogen is 2%, continues to feed hydrogen and no longer descends and tend to be steady up to signal curve, then, continues to feed synthesis of air and no longer rises and tend towards stability up to signal curve, and repeatable operation is repeatedly;
● use synthesis of air further to dilute hydrogen, obtain a series of variable concentrations hydrogen such as 1%, 0.5% for detecting;
● investigate coating film drying temperature and be respectively room temperature, 100 ℃, 200 ℃ influences sensor performance;
● data processing, sensor electrode is linked to each other with data acquisition unit by lead, by computer program control carrying out data scanning, gather, the sensor response curve under the different test conditions is analyzed.
Advantage of the present invention: the hydrogen gas sensor of palladium of the present invention-nano-stannic oxide film like electrode, owing to adopt nano tin dioxide material, specific surface increases greatly and helps surface electronic and shift, strengthened the absolute strength of detection signal, and mixing of palladium material can improve detection sensitivity, reduces detected temperatures.This transducer sensitivity is higher, signal intensity reaches 90% and takes and be less than 1 minute, finished desorption about 1 ~ 2 minute, reappearance and stability are also better, increase along with density of hydrogen, the response signal relative intensity strengthens gradually, signal response time reduces slightly along with the increase of density of hydrogen, overcome pure palladium membranes and lost shortcoming as density of hydrogen Gao Shihui the sensing capabilities of hydrogen, also avoided the palladium film that hydrogen embrittlement film obscission takes place easily, simultaneously operating temperature is reduced to room temperature, greatly improved security.Repeatedly measurement performance is good in a middle of the month of placing for the hydrogen gas sensor of palladium of the present invention-nano-stannic oxide film like electrode, response time is shorter, stability and repeatability are all better, being particularly suitable for room temperature detects, and size sensor is small, and processing cost is low, is convenient to microminiaturization, integrated and industrialization, the potsherd of substrate carrier can be recycled.
Description of drawings
Fig. 1 is SnO 2-Pd hydrogen gas sensor is to the response curve of 1% concentration hydrogen.
Fig. 2 is SnO 2-Pd hydrogen gas sensor is to the response curve of variable concentrations hydrogen.
Fig. 3 is under the different hydrogen concentration, SnO 2-Pd film drying temperature is to the influence of hydrogen response.
Embodiment
Palladium in the hydrogen gas sensor-nano-stannic oxide film like electrode preparation method, be to make egative film with aluminium oxide, adopt the method for electrodeless electrolysis that palladium and nano-stannic oxide are deposited on the egative film as the quick material of hydrogen, the processing step of the membranaceous electrode preparation of palladium-nano-stannic oxide in the hydrogen gas sensor comprises: the preparation of nano-stannic oxide, the pre-service of alumina ceramic plate, composite film coating, post-treating and other steps, and specific embodiment is as follows:
● the preparation of nano-stannic oxide: two hydrated stannous chlorides are joined in the ethanolic solution, regulate pH to 11, and make Sn (divalence) concentration reach 15.8 mM.With the white suspension magnetic agitation that obtains after 1 hour, be transferred in the Telflon coating stainless-steel pan in the heating 6 hours down of 120 ℃ of muffle furnaces, centrifugal and after 50 ℃ of dried overnight, obtain faint yellow tin ash;
● the pre-service of alumina ceramic plate (15mm*15mm*2mm): after the chloroazotic acid soaking and washing, used the deionized water cleaned by ultrasonic vibration again 1 minute, 500-600 ℃ of calcination about 2 hours in high temperature furnace at last, the potsherd of cleaning is immersed in freshly prepared stannous chloride solution (30 g/L) and the silver ammino solution (10 g/L) each 10 minutes respectively, activates its surface;
● composite film coating: pretreated potsherd is transferred to fills 0.0143 g Na 2SO 3, a small amount of PdCl 2, and PdCl 2The SnO of same approximately amount 2In the small beaker of powder, 1ml deionized water, sonic oscillation moved to small beaker in the mixture of ice and water after 10 minutes, and added 50 μ L Na in small beaker 3Au (SO 3) 2And 50 μ L formaldehyde, the mixing that vibrates rapidly leaves standstill and generates one deck grey uniform film after 20 minutes on the potsherd surface;
● aftertreatment: under different temperatures with film drying after, be connected with lead with crocodile clip, become the palladium-nano-stannic oxide film like electrode in the hydrogen gas sensor.
The Performance Detection step:
● before Performance Detection, feed high pure nitrogen, the stabilization signal response occurs up to this hydrogen gas sensor under the room temperature;
● continue to feed synthesis of air, treat signal stabilization, feeding concentration is 1% hydrogen sample detection, and sensor is seen accompanying drawing 1 in room temperature to the detection curve of 1% concentration hydrogen.By curve map as can be seen this hydrogen gas sensor have higher sensitivity; The response of sensor is very fast and stable, and signal intensity reaches 90% from baseline and takes and be less than 1 minute, and response signal value tends towards stability, and signal keeps stable when density of hydrogen is constant, shows as a comparatively stabilised platform; After air-flow switched to synthesis of air from 1% hydrogen, about 1 ~ 2 minute of needed time of hydrogen desorption process, stable platform appearred in this hydrogen gas sensor signal value once more, and signal value revert to initial size, had finished one and had detected circulation;
● feed concentration and be the hydrogen of discontinuous concentration such as 0.5%, 1%, 2%, continue feeding mixed gas no longer changes and tends to be steady up to signal curve, then, continue to feed synthesis of air and no longer change and tend towards stability to signal curve, repeatable operation repeatedly, repeated testing result is seen accompanying drawing 2, by Fig. 2 curve map as can be seen, this hydrogen gas sensor has better repeatability, and is basic identical by the resistance fall that same concentration hydrogen causes, and density of hydrogen high value amplitude of variation more is big more;
● will detect response with a slice membrane electrode respectively in room temperature, 100 ℃, 200 ℃ dryings, the results are shown in accompanying drawing 3 variable concentrations hydrogen.As seen from Figure 3, the hydrogen signal response is slightly risen than membrane electrode 100 ℃ of dry backs in drying at room temperature; 200 ℃ of dry backs the hydrogen signal response is significantly weakened, reason is likely that the nano-stannic oxide form of being heated changes, membrane electrode in drying at room temperature has shown enough sensitivity, so generally no longer carry out extra heat treated, technology is more succinct.

Claims (4)

1. palladium-nano-stannic oxide film like the electrode preparation method in the hydrogen gas sensor is characterized in that making egative film with aluminium oxide, and the method that adopts electrodeless electrolysis deposits on the egative film palladium and nano-stannic oxide as the quick material of hydrogen, and step is as follows:
1) preparation of nano-stannic oxide: use hydro-thermal method synthesis of nano tin ash, two hydrated stannous chlorides are joined in the ethanolic solution, regulate pH to 11, after the suspension that obtains stirred 1 hour, 120 ℃ of down heating 6 hours, centrifugal and after 50 ℃ of dried overnight, obtain faint yellow tin ash;
2) pre-service of alumina ceramic plate: after the chloroazotic acid soaking and washing, used the deionized water cleaned by ultrasonic vibration again 1 minute, 500-600 ℃ of calcination about 2 hours in high temperature furnace at last, the potsherd of cleaning is immersed in freshly prepared stannous chloride solution (30 g/L) and the silver ammino solution (10 g/L) each 10 minutes respectively, activates its surface;
3) composite film coating: on the ceramic substrate of handling well, adopt the method for electrodeless composite film coating, nano-stannic oxide, palladium and deposition of gold are constituted coatings on ceramic substrate, to transfer in the aqueous solution that fills sodium sulphite, palladium bichloride, nano-stannic oxide through pretreated potsherd, add an amount of gold sodium sulfide and formaldehyde, generate one deck grey uniform film after 20 minutes on the potsherd surface;
4) under different temperatures with film drying after, be connected with lead with crocodile clip, become the membranaceous electrode of palladium-nano-stannic oxide in the hydrogen gas sensor.
2. the membranaceous electrode preparation method of palladium-nano-stannic oxide in the hydrogen gas sensor according to claim 1 is characterized in that described alumina ceramic plate is of a size of 15mm*15mm*2mm.
3. the membranaceous electrode preparation method of palladium-nano-stannic oxide in the hydrogen gas sensor according to claim 1 is characterized in that the palladium-Xi proportioning in the described coatings was controlled at 1: 1.
4. the method for testing performance of the hydrogen gas sensor of the membranaceous electrode of palladium-nano-stannic oxide that preparation method according to claim 1 obtains the steps include:
The lead of a, data acquisition unit can use crocodile clip to link to each other with sensor, and sensor places the quartz ampoule central authorities that gas stream is crossed;
B, before Performance Detection, feed high pure nitrogen, the steady resistance signal response appears up to this hydrogen gas sensor;
C, the lasting synthesis of air that feeds are treated signal stabilization, obtain stable resistance signal and are designated as R 0
D, feed the hydrogen with nitrogen dilution, density of hydrogen is 2%, continues to feed hydrogen and no longer descends and tend to be steady up to signal curve, then, continues to feed synthesis of air and no longer rises and tend towards stability up to signal curve, and repeatable operation repeatedly;
E, use synthesis of air further to dilute hydrogen, obtain a series of variable concentrations hydrogen such as 1%, 0.5% for detecting;
F, investigation coating film drying temperature are respectively room temperature, 100 ℃, the 200 ℃ influences to sensor performance;
G, data processing link to each other by lead sensor electrode with data acquisition unit, by computer program control carrying out data scanning, gather, and the sensor response curve under the different test conditions is analyzed.
CN2010102914521A 2010-09-26 2010-09-26 Room temperature hydrogen sensor based on palladium-nanometer-scale stannic oxide film type electrode Expired - Fee Related CN101968461B (en)

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Cited By (17)

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CN104076066A (en) * 2014-06-10 2014-10-01 桂林电子科技大学 Resistive hydrogen sensor based on nano composite material and preparation method thereof
CN106093134A (en) * 2016-05-31 2016-11-09 重庆大学 The compensation method of metal oxide sensor array response drift
CN106198648A (en) * 2016-09-14 2016-12-07 扬州大学 A kind of preparation method of room-temperature hydrogen sensor
CN107884449A (en) * 2017-11-06 2018-04-06 钟永松 One kind is directed to H2The high gas sensor of selectivity
CN108642471A (en) * 2018-04-26 2018-10-12 江汉大学 A kind of preparation process and its hydrogen gas sensor of palladium nano-particles film
CN108918633A (en) * 2018-07-02 2018-11-30 北京镭硼科技有限责任公司 Pd-SnO2Nanocomposite preparation and the application in hydrogen gas sensor
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CN112083046A (en) * 2020-07-30 2020-12-15 中国电力科学研究院有限公司 Platform and method for detecting hydrogen monitoring device
CN112924498A (en) * 2021-01-22 2021-06-08 华中科技大学 Palladium monoatomic modified tin oxide composite material and preparation method and application thereof
CN113249685A (en) * 2021-04-09 2021-08-13 杭州电子科技大学 Preparation method of silver sulfide film gas sensor
CN113791123A (en) * 2021-07-30 2021-12-14 浙江工业大学 Tin oxide and noble metal based double-nanoparticle lattice hydrogen sensor and preparation method thereof
CN114295690A (en) * 2021-12-30 2022-04-08 电子科技大学长三角研究院(衢州) Hydrogen sensitive film, sensor and preparation method
CN115963151A (en) * 2022-10-25 2023-04-14 绍兴市特种设备检测院 Hydrogen sensor and intelligent monitoring system

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JP2008298649A (en) * 2007-05-31 2008-12-11 National Institute Of Advanced Industrial & Technology Hydrogen sensor using magnesium-titanium alloy thin film
CN101813657A (en) * 2009-12-15 2010-08-25 中国科学院上海微系统与信息技术研究所 Sensitive layer of palladium alloy electrochemical nano hydrogen sensor for hydrogen leakage detection and method

Cited By (25)

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CN104076066A (en) * 2014-06-10 2014-10-01 桂林电子科技大学 Resistive hydrogen sensor based on nano composite material and preparation method thereof
CN106093134A (en) * 2016-05-31 2016-11-09 重庆大学 The compensation method of metal oxide sensor array response drift
CN106198648B (en) * 2016-09-14 2020-12-01 扬州大学 Preparation method of room temperature hydrogen sensor
CN106198648A (en) * 2016-09-14 2016-12-07 扬州大学 A kind of preparation method of room-temperature hydrogen sensor
CN107884449A (en) * 2017-11-06 2018-04-06 钟永松 One kind is directed to H2The high gas sensor of selectivity
CN108642471A (en) * 2018-04-26 2018-10-12 江汉大学 A kind of preparation process and its hydrogen gas sensor of palladium nano-particles film
CN108918633A (en) * 2018-07-02 2018-11-30 北京镭硼科技有限责任公司 Pd-SnO2Nanocomposite preparation and the application in hydrogen gas sensor
CN108918633B (en) * 2018-07-02 2020-12-22 河北镭传科技有限责任公司 Preparation of Pd-SnO2 nano composite material and application thereof in hydrogen sensor
CN111024775A (en) * 2018-10-09 2020-04-17 中国科学院物理研究所 Gas-sensitive sensing device for ozone gas sensor and preparation method
CN111024775B (en) * 2018-10-09 2021-05-25 中国科学院物理研究所 Gas-sensitive sensing device for ozone gas sensor and preparation method
CN111855756A (en) * 2019-04-28 2020-10-30 中国科学院上海微系统与信息技术研究所 Hydrogen sensor based on Pd-Ag alloy nanocrystalline and preparation method thereof
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