CN101889228A - Optical faceplate and method of manufacture - Google Patents

Optical faceplate and method of manufacture Download PDF

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Publication number
CN101889228A
CN101889228A CN2008801193625A CN200880119362A CN101889228A CN 101889228 A CN101889228 A CN 101889228A CN 2008801193625 A CN2008801193625 A CN 2008801193625A CN 200880119362 A CN200880119362 A CN 200880119362A CN 101889228 A CN101889228 A CN 101889228A
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China
Prior art keywords
layer
fiber
substrate
optic panel
optical fiber
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CN2008801193625A
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Chinese (zh)
Inventor
T·范博梅尔
R·A·M·希克梅特
H·范斯普兰奇
M·A·弗舒伦
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Koninklijke Philips NV
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Koninklijke Philips Electronics NV
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64Fluorescence; Phosphorescence
    • G01N21/645Specially adapted constructive features of fluorimeters
    • G01N21/6452Individual samples arranged in a regular 2D-array, e.g. multiwell plates
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/04Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings formed by bundles of fibres
    • G02B6/06Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings formed by bundles of fibres the relative position of the fibres being the same at both ends, e.g. for transporting images
    • G02B6/08Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings formed by bundles of fibres the relative position of the fibres being the same at both ends, e.g. for transporting images with fibre bundle in form of plate
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64Fluorescence; Phosphorescence
    • G01N21/645Specially adapted constructive features of fluorimeters
    • G01N2021/6484Optical fibres

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  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Biochemistry (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Optics & Photonics (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Measurement Of Radiation (AREA)
  • Shaping Of Tube Ends By Bending Or Straightening (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
  • Solid State Image Pick-Up Elements (AREA)

Abstract

Optical faceplates and methods for manufacturing same are disclosed. An optical faceplate (10) includes a substrate (12) having a major surface, and an array (15) of optical fibers embossed on the substrate. The optical fibers have a length determined in accordance with a layer of material deposited on the substrate from which the optical fibers are formed, a depth of the features in a mold or stamp and a number of processing/stamping steps. A method includes forming (202) a layer on a substrate having a major surface, and processing (204) the layer to form an array of optical fibers transversely disposed to the major surface.

Description

Optic panel and manufacture method
The disclosure relates to the optic panel (faceplate) that uses in the various application that comprise the transmission of light and image, more particularly, relate to the optic panel and the manufacture method of (embossed) optical fiber that adopts the mold pressing that is disposed transversely to optical substrate.
Wherein light transmits can comprising CCD/CMOS coupling, laser array/fiber array coupling, CRT/LCD display, figure image intensifying, remote reviewing, a planarization, x-ray imaging and look like to be used for high resolving power, zero thickness light and image in the application of the molecular diagnosis genomics, proteomics, drug discovery and microfluid system from source transmission or the fibre faceplate that is transferred to detecting device.Although the advantage of optical fiber is clearly and certified, when making these plates, there are various problem and defective.
Current problem in the optic panel manufacturing comprises diameter that the thin optic fibre boundling become is wished, bonds them together, afterwards with the fiber cutting of boundling and be polished to difficulty in the thickness of hope.The fiber that has a less size (below 10 microns) in utilization is made and to be had improved space equally aspect the panel, so that the parallel alignment between control diameter and the independent fiber.In addition, current manufacturing process does not provide the OC effective means that changes between the fiber, and difform fiber (for example ellipse, square, hexagon, octagon or the like) is not provided.
The problem of another understanding is, provides the accurate aligning of the pixel of fiber with respect to the detecting device such as CCD or cmos sensor to crosstalk so that avoid.The complicacy of conventional panel manufacturing causes expensive manufacturing process.
According to the embodiment of the invention, the method for optic panel and manufacturing optic panel is disclosed.Optic panel comprises the substrate with first type surface and is molded into fiber array on the substrate.Optical fiber have according to deposit on the substrate, optical fiber is by its material layer that forms, the quantity of the degree of depth of the feature in mould or the imprinter (stamp) and processing/punching press (stamping) step and definite length.Method is included in cambium layer on the substrate with first type surface and handles this layer so that form the fiber array that is disposed transversely to first type surface.
These and other purposes of the present disclosure, feature and advantage will become clear according to following detailed description to its illustrative embodiment, and described description should be read in conjunction with the accompanying drawings.
The disclosure will at length provide accompanying drawing below the following reference for the description of preferred embodiment, wherein:
Fig. 1 is the skeleton view that is molded into the optic panel on the substrate according to an embodiment;
Fig. 2 is for being molded into the skeleton view of the optic panel of the optical fiber that piles up on the substrate according to having of another embodiment;
Fig. 3 is according to the Fig. 1 of the photoresist with deposition of an embodiment or the skeleton view of Fig. 2 optic panel;
Fig. 4 is for depositing to the skeleton view of the optic panel of the functional material (for example phosphor material) on the optical fiber according to having of an embodiment;
Fig. 5 is for depositing to the skeleton view of the optic panel of the functional material (for example target-specific affinity probe) on the optical fiber according to having of another embodiment;
Fig. 6 A is the sectional view with substrate of activating molecules solvent layer formed thereon;
Fig. 6 B is the sectional view of solvent layer that changes into Fig. 6 A of gel;
Fig. 6 C is for using rubber imprinter punching press so that fiber is molded into the sectional view of the gel of Fig. 6 B in the solid structure;
Fig. 6 D is the sectional view that illustrates according to the solid structure of the formation optical fiber of an illustrative embodiment;
Fig. 7 A is the sectional view with substrate of UV or heat solidifiable layer;
Fig. 7 B for use template impression (imprint) and utilize the UV of radiation irradiation Fig. 7 A subsequently or the heat solidifiable layer so that start the UV of Fig. 7 A of polymerization or the sectional view of heat solidifiable layer;
Fig. 7 C illustrates according to an illustrative embodiment to remove the sectional view that template stays the solid structure that forms optical fiber;
Fig. 8 A is the sectional view with substrate of the fiber array of having filled packing material;
Fig. 8 B is the sectional view with substrate of the solid structure of having filled packing material, and this solid structure has the layer of impression formation thereon;
Fig. 8 C is for using the template impression and with the sectional view of the layer of Fig. 8 B of the curable resist of after coagulation (solidify) (resist);
Fig. 8 D illustrates according to an illustrative embodiment to remove the sectional view that template stays the solid structure that forms optical fiber;
Fig. 8 E illustrates the sectional view that removes after the packing material according to the solid stacked structure of the formation optical fiber of an illustrative embodiment;
Fig. 9 is the synoptic diagram that illustrates according to the illustrative application of the optic panel of an illustrative embodiment;
Figure 10 is the synoptic diagram that the setting that does not have panel is shown; And
Figure 11 illustrates the block diagram/flow diagram that is used to make according to the illustrative method of the optic panel of the principle of the invention.
The disclosure has been described and can have been included but not limited to charge-coupled device (CCD)/complementary metal oxide semiconductor (CMOS) (CMOS) coupling, laser array/fiber array coupling, cathode-ray tube (CRT)/LCD (CRT/LCD) shows, the figure image intensifying, remote reviewing, the field planarization, x-ray imaging such as radiography and breast photography and picture are in genomics, proteomics, drug discovery, the optic panel that adopts in the application of microfluid system and the molecular diagnosis in other.At present, such plate produces by the diameter that the thin optic fibre boundling is become to wish, the thickness that bonds them together, afterwards device is cut and is polished to hope.This is the difficult procedures with various defectives.According to the principle of the invention, a kind of method that is used to make optical sheet is disclosed.This method relates to mold pressing is wished on the substrate of hope that can be functional unit (detecting device etc.) the height and the structure of aspect ratio.Can be if necessary, to utilize the fiber zone on every side of low-index material or other functional material filled mold pressings after this.Functional material also can deposit on the fiber.These functional materials can comprise the target-specific affinity probe that for example deposits on the optic panel.
Should be understood that, will describe the present invention according to the optic panel of optical fiber below with mold pressing.Yet it is how broadly and go at the attachment method based on array with respect to the fiber on the horizontal orientation of the substrate of carrying or anchoring fiber that instruction of the present invention is wanted.Can use multiple different technology that fiber is installed, located or otherwise is placed on the substrate.Embodiment described herein preferably uses typography manufacturing; Yet, also can adopt offset-printing imaging and processing.Also it is contemplated that other treatment technologies.
Should be understood that equally the illustrative example of described optic panel can be suitable for comprising additional electronics/optics.These parts can form integral body with substrate or be installed in substrate or miscellaneous part on (for example being installed on the fiber).In addition, the parts that adopted can change according to using and designing.The function that can make up be realized and be provided to the element of drawing in the accompanying drawing can with various hardware combinations in discrete component or a plurality of element.
Now, represent the accompanying drawing of same or analogous element with reference to identical Reference numeral wherein, and when initial with reference to Fig. 1, optic panel 10 comprises substrate 12, multifiber 14 is molded on the substrate 12 with the pattern or the array 15 of hope.Substrate 12 can be functional unit 16 or have the functional unit 16 that forms, for example pixel, pel array, detecting device, sensor or the like thereon.If adopted detecting device or sensor in substrate 12, quality check or measuring fiber array 15 become easily so, because it is easier to detect the function of final products.Fiber 14 preferably has high aspect ratio, for example 1: 2 to 1: 10 or bigger breadth length ratio.
By printing or punching press optic panel 10, advantageously solved conventional to the optical fiber boundling, bond them together, afterwards with their cuttings be polished to the defective of the description in the thickness of hope.Form according to the principle of the invention, especially have than the fiber 14 of minor diameter (for example being lower than 10 microns) and aim at individually and can more easily make.This method also is suitable for producing the fiber (nanofiber) with nano-scale.This manufacture method also allows to control various array sizes (for example center distance between the fiber 14), fiber shape (for example ellipse, square, hexagon, octagon or the like) and fibre tip shape.Such size, shape and spacing advantageously pre-determine in tube core/imprinter or pre-setting (pre-pattern) in the lithographic mask operation.
Should be understood that equally the principle of the invention provides a large amount of dirigibilities at the manufacture view of optical fiber.For example, the cross sectional shape of fiber and the spacing between the fiber can change on identical device or substrate.In other words, each size of the density of fiber and fiber can change from the teeth outwards.Similarly, cross sectional shape and width can change and mix from the teeth outwards.In addition, the end face shape of fiber can change over dome-shaped, smooth, pyramidal, crooked or the like.In addition, the size of fiber also can change along fiber axis.Such structure can change surfacewise and mix.For example, also can produce tapered fibre.
Advantageously, realized the accurate location of optical fiber 14 with respect to substrate 12.For example, if substrate 12 comprises source or detecting device, for example CCD or cmos sensor so can be can optimizations or improve the accurate location that specific location on the substrate 12 of performance provides fiber 14.In addition, improve optic panel to the source or the combination of detecting device, thereby caused transfer efficiency to improve and cost reduces.Fiber can be chemically bound to the surface.This can realize with described layer reactive activity molecule treatment surface by using subsequently.It can only be a physical adherence also.
In the formation of fiber 14, can use various materials.In a useful especially embodiment, can adopt to show the oligomerization contraction and become the sol gel film that chemically is attached to the surface.In one embodiment, carry out crosslinked deposition (for example spinning (spin)) and solidifying liq material by evaporating solvent and/or by heat or light.For optic panel 10, these materials have hope and the optical property (for example optimal values aperture, high transmittance) improvement that is used for this application, are heat and chemically stable (do not degenerate or fade) simultaneously.The example of curable materials can be selected from following group: (methyl) acrylate ((metha) acrylate), the epoxy resin oxetanes, vinyl ether, alkoxide, for example alkoxy silane, tetramethoxy-silicane (tertramethoxysilane, TMOS), and tetraethoxysilane (tetraethoxysilane, TEOS), methyltrimethoxy silane (methyltrimethoxysilane, MTMS) or other suitable materials.
With reference to Fig. 2, show to its illustrative the fibre faceplate 20 that piles up.Ground floor 28 comprises and can deposit or first material of spinning to the substrate 12.The second layer 26 forms on ground floor 28. Layer 26 and 28 processing can be carried out step by step or carry out simultaneously, and this depends on and is used for handling the method for these layers and the material type of every layer of employing.For example, if adopted Sheet Metal Forming Technology, two layers 26 and 28 punching presses simultaneously are so that form the fiber 24 that piles up so.If adopted imprint lithography, these layer etchings simultaneously so, perhaps step-etching under the situation that need regulate etching chemistry at these different layers.
The substrate 12 of Fig. 2 can be included within the substrate 12 or on the pixelation optical sensor 16 that forms, for example CMOS or CCD device.Fiber 24 is used for light is directed to sensor, and it is configured to guide the light that is produced by for example phosphor layer above the fiber.Need have the aspect ratio that can not in the action of single impression, obtain as fruit fiber, can use the fiber that the piles up configuration shown in Fig. 2 so.The fiber 24 that piles up can comprise different materials and have different optical characteristics and size.One skilled in the art will appreciate that one of these layers can be used for degrading radiation (light, X ray or the like) or otherwise regulate light and/or radiation (for example filtering certain wavelengths or the like).In one embodiment, the fiber that layer 26 can keep continuously and wherein not form makes fiber only form in layer 28.
Should be understood that quantity can be stacked to over each other greater than a plurality of layers of 2.The several portions of the fiber 24 that piles up in addition, can form as shown in Figure 2 coaxially; Yet these parts of the fiber 24 that piles up can form differently to next layer cross section area from one deck, perhaps can make off-centring to following one deck from one deck.
With reference to Fig. 3, the zone between the fiber 14 or 24 can remain sky or filling or packing material 32 partly.Material 32 can comprise low-index material, radiation blocking material (for example photoresist or comprise heavy metal and the X ray barrier material of ion) or other functional materials or structure.For example, the height reflection or the absorbing material that also can comprise the particle of virtually any size can be used for filling the external structure of fibre faceplate 10 or 20 so that obtain the high image quality of CCD or cmos imaging instrument.Material 32 also can be used for protecting fiber 14 and 24 to avoid owing to the stress/strain of handling or operation causes.Material 32 also can as mask with protection fiber 14 or 24 bottom and top that fiber 14 and 24 are provided be used for handling (for example, etching so that coarse or dirty surface is clean or be used for as following for example with reference to Fig. 4 and the additional feature of the described formation of Fig. 5).
With reference to Fig. 4, comprise in application under the situation of x-ray imaging or other patterns that fibre faceplate 10 (or 20) can comprise functional material 42, for example luminous or phosphor material (phosphor) or scintillator material or other materials.Preferably, this material (for example phosphor) 42 can place in the upper area of fiber 14.Can under specified criteria, shine these material structures 42.
With reference to Fig. 5, also the functional material 52 such as target-specific affinity probe 54 for example can be deposited on optic panel 10 or 20.Can be to comprise contact, following, the multiple mode of point sample (spotting) or target-specific affinity probe 54 to be deposited on optic panel 10 or 20 by any other suitable deposition technique.Target-specific affinity probe 54 is fixed on the optic panel and can realizes by different way, and these modes comprise probe 54 chemical bond to panel 10 or 20.Probe 54 can comprise different biological acceptors, and it is used to detect the biomolecule or the organism interested of DNA, RNA, protein, cell, tissue or any kind of.
Optic panel can be used for the high throughput method of molecular diagnosis.Described parts can be used in many application, lift several examples, for example, and genomics, proteomics, drug discovery and microfluid system.Optic panel has the following advantages: optical element and reactive site with high quantity.They provide the noiseless separation of reactive site by micropore (microwell) or kapillary.Use optical fiber technology, can obtain superior reading independent optical channel.This allows to realize high sensitivity, repeatability and low background fluorescence.
With reference to Fig. 6 A-6D, show to its illustrative the imprint lithography/mould pressing method that is used to make according to the method for the optic panel of the principle of the invention according to a kind of.Can adopt the large area imprinting technology, it is suitable at room temperature making in individual layer and the layer that piles up very much has the structure that is low to moderate nano-scale of high aspect ratio.According to this method, flexible imprinter is used to duplicate structure from the mm size to the nm size.This technology extremely is suitable for making fibre faceplate because it can with the high precision printing have high aspect ratio from the feature of mm size up to the nm size.In addition, manufacturing process is cheaply and has industrial manufacturing capacity.This paper provides and has used imprint lithography to make the manufacturing process of the suggestion of fibre faceplate.
With reference to Fig. 6 A, for example the solidifiable liquid 62 that will have a bioactive molecule such as 2.9wt% (percentage by weight) TMOS, 2.6wt%MTMS, 87.5wt%1-propyl alcohol, 2.3wt% formic acid, 3.7wt% water and 1.0wt% methyl benzoate (methylbenzoate) by spin coating, spraying or blade coating (doctor blading) is applied on the substrate 12.This substrate can comprise functional unit 16, for example pixel or optical sensor or the like.During this technology, the solvent evaporation in the liquid 62, and bioactive molecule begins to form the gel 66 shown in Fig. 6 B.Subsequently, layer is 68 by 70 mold pressings of flexible rubber imprinter, this flexible rubber imprinter as described in the WO2003099463 that is incorporated herein by reference and the EP1511632 with Fig. 6 C in describe like that move with the wave mode that prevents to comprise air and be applied to substrate 12 lightly.Solvent in the liquid 62 also can be diffused into the imprinter 70 from gel rubber material 66 and so that help as shown in the figure solid structure 72 be stayed on substrate 12 and/or the functional unit 16.Rubber imprinter 70 preferably also removes by the wave mode Motion Technology, thereby peels off imprinter and do not damage duplicate as shown in Fig. 6 D.As the material that still exists some to stay between the fruit structure 72, can adopt the engraving method such as active-ion-etch (RIE) and/or ion beam milling so.Alternatively, the solid structure 72 on the substrate 12 can be filled by photoresist such as silver sol gel (referring to for example Fig. 3) or other materials.Same possible is at first to make blockage structures, and utilize the material that allows light therefrom to propagate to fill the gap subsequently.
With reference to Fig. 7 A-C, show to illustrative second imprint lithography/mould pressing method, it is used to make optic panel with ultraviolet (UV) or heat-sensitive material.
With reference to Fig. 7 A, for example UV or heat-sensitive material 164 are applied on the substrate 12 by spin coating or blade coating.As shown in Fig. 7 B, the layer 164 of deposition is by imprinter 170 mold pressings or impression and subsequently by radiation irradiation.This irradiation makes that resist or material 164 are crosslinked or otherwise solidifies.As shown in Fig. 7 C, remove imprinter 170 and on substrate 12, stay fibre structure 172.
With reference to Fig. 8, show according to another illustrative embodiment and make the processing step that uses in the superimposed fiber structure.
With reference to Fig. 8 A, fiber array 180 forms on the substrate 12 that comprises functional unit 16.Fiber array 180 produces by imprint lithography, and wherein the zone between the fiber 14 is filled with material 182 (it can be identical with above-described material 32).With reference to Fig. 8 B, for example curable materials 184 (for example resist) is applied on the fiber array 180 of filling of Fig. 8 A by spin coating or blade coating.As shown in Fig. 8 C, after imprinter 170 is with respect to substrate alignment, the layer 184 of the deposition of Fig. 8 B by imprinter 170 mold pressings and with after coagulation so that form solid structure 186.As shown in Fig. 8 D, remove imprinter 170 and on the fiber array 180 of the filling of Fig. 8 A, stay fibre structure 186.Packing material 182 can remove by for example packing material 182 being dissolved in the appropriate solvent or by burning packing material 182 afterwards, thereby the fiber array 188 that causes piling up (only heat resistanceheat resistant or anti-dissolved material be used to produce under the situation of fiber array just may, sol gel film for example).
With reference to Fig. 9, in an illustrative embodiment, can in using, adopt digital radiography fibre faceplate 190.This compares with lens and causes better pictures resolution and more effective light to be collected and transmission.Fiber array 190 places between scintillater 192 and CCD or the cmos imaging instrument 194.X-ray source 196 produces X ray.Light from x ray scintillation device tends to scattering as shown in Figure 10, but has minimized scattering and protected image intensity and resolution according to the panel of being made by coherent fibre bundle 190 of the principle of the invention.
Although it is clearly that optical fiber is used for the advantage of digital radiography, may have problems aspect scintillater and CCD or the cmos imaging instrument using the such fibre faceplate of conventional technology manufacturing and it is attached to.Importantly, the alignment of pixels of fiber and detecting device.The distortion and the response heterogeneity of deteriroation of image quality should be reduced.Fiber with respect to the aligning of the higher degree of pixel by according to the principle of the invention with fiber in conjunction with or be molded into substrate (for example directly to CCD or cmos imaging instrument) and realize.Accurately, robust, reliably attachedly use photolithography to provide by the punching press fiber gel or to cross-linked layer.In addition, higher picture quality provides the fiber number that light is transported to each sensor pixel by increase.For example, 6 micrometer fibers diameters can provide 16 fibers to 24 microns pixels; Yet, can provide much more fiber according to the principle of the invention, because can make fiber with minor diameter (even on nanoscale).Can extend across density, size, shape and position that substrate changes fiber easily.
The principle of the invention provides the transfer efficiency of the improvement of fibre faceplate, accurately and robust attached and the distortion and the response heterogeneity that reduce, with maximum picture quality and persistence.In addition, panel can utilize the fiber with given shape (for example ellipse, square, hexagon, octagon or the like) and less size (for example be lower than 15 microns and enter in the nanometer range) as described above to make.Similarly, the end face alteration of form of fiber can be become dome-shaped, smooth, pyramidal, crooked or the like.In addition, the manufacture method cost according to the embodiment of the invention is lower.
In an embodiment of the present invention, used cross-linked material to make fibre faceplate.Have made on the various surfaces of different roughness or profile have different shape and high aspect ratio (1: 10) the micron and even nanostructured.
With reference to Figure 11, drawn to illustrative method according to the manufacturing optic panel of the principle of the invention.In frame 202, cambium layer on the first type surface of substrate.This layer is preferably when cure/dry the material of the electromagnetic radiation of the wavelength of can transmission wishing or wavelength coverage.This layer can spinning or blade coating to substrate surface.Substrate can comprise image device (for example pixel or the like).Described material can comprise the liquid or the cross-linked material that can solidify, and for example becomes the liquid of gel at evaporating solvent or after by heat and radiation polymerization solvent.In one embodiment, layer material can solidify during the mold pressing of this layer.In frame 204, the processed fiber array that is disposed transversely to substrate main surface with formation of layer.This can be included in before the mold pressing step in the frame 206 or during form gel or solid, perhaps during the mold pressing step, use radiation (for example UV) or heat curing resist layer.
In optional step 203, packing material can form around the fibrage formerly.This makes and can form a plurality of layers so that create the optic panel that piles up.After the processing in finishing frame 202-210 as required, what replace (frame 210) radiation blocking material is or except this radiation blocking material, applies the filling material material.As required, form and handle the second layer (frame 202) according to step 202,204,206,208 and 210.This can continue for the as many layer with needs.Described a plurality of layers form described fiber arrays, make every layer of part that the length of whole optical fiber is provided.
In frame 206, described processing can comprise that punching press or the described layer of mold pressing are so that form fiber array.After aiming at, punching press preferably includes and utilizes for example undulatory motion to apply imprinter to avoid vacuum and air bubble.Punching course also comprises at least one in the tip geometry of the cross sectional shape of spacing between the controlling fiber, fiber and fiber.This can use the feature that provides on the imprinter to realize.
In frame 208, can etching or heat described fiber array so that remove material between the fiber.Etching can comprise for example active-ion-etch technology.In frame 210, can around fiber array, form radiation (light, X ray or the like) barrier material.In frame 212, functional material can be deposited to the top of optical fiber.Functional material can comprise phosphorescence or luminescent material and/or affinity probe (for example target-specific affinity probe).Also it is contemplated that other functional materials.
When explaining appended claims, should be understood that:
A) word " comprises/comprise " that eliminating does not exist other elements or action unlisted in the given claim;
B) word " " before the element or " one " do not get rid of and have a plurality of such elements;
C) any Reference numeral in the claim does not limit its scope;
D) some " devices " can be represented by the structure or the function of same project or hardware or software realization; And
E) unless offer some clarification on, do not expect to require specific sequence of movement.
The preferred embodiment (its expection is illustrative and not restrictive) of having described optic panel and manufacture method should be pointed out that those skilled in the art should make some modifications and modification according to top instruction afterwards.Therefore, should be understood that, can in disclosed specific embodiment of the present disclosure, make a change that these changes are in the scope and spirit of the embodiment disclosed herein that appended claims summarizes.Described like this after desired details of Patent Law and the feature, set forth the content that requires and wish the patent certificate protection in the appended claims.

Claims (25)

1. method that is used to make optic panel comprises:
Has formation (202) layer on the substrate of first type surface; And
Handle (206) this layer so that form horizontally set and the attached fiber array that adds to first type surface.
2. the method for claim 1 wherein forms (202) layer and comprises the part that formation is crosslinked.
3. the method for claim 1 wherein forms crosslinked layer and comprises one of UV/ heat solidifiable layer and gel layer.
4. the method for claim 1, wherein form (202) layer and comprise a plurality of layers of formation (203), and handle (204) this layer so as to form fiber array comprise handle described a plurality of layers so that form this fiber array, make every layer of part that fiber lengths is provided.
5. the method for claim 1 is wherein handled and is comprised that the described layer of punching press (206) is so that form described fiber array.
6. method as claimed in claim 5, wherein punching press (206) comprise the flexible imprinter of employing.
7. method as claimed in claim 5, wherein punching press (206) comprise at least one in the pointed shape of the cross sectional shape of spacing between the controlling fiber, fiber and fiber.
8. the method for claim 1 also comprises the described fiber array of etching (208) so that remove material between the fiber.
9. the method for claim 1 also is included in described fiber array and forms (208) radiation blocking material on every side.
10. the method for claim 1 also is included in top deposition (212) functional material of optical fiber.
11. method as claimed in claim 10 wherein comprises one of depositing light-emitting material, phosphor material, affinity probe or its combination at the top of optical fiber deposition (212) functional material.
12. a method that is used to make optic panel comprises:
On substrate, apply (202) layer; And
Exist under the situation of imprinter by applying imprinter and solidifying that this layer comes this layer of mold pressing (206) so that form fiber array.
13. method as claimed in claim 12, wherein said layer comprises cross-linked material.
14. method as claimed in claim 12, wherein said layer comprise fluent material, and are included in mold pressing (206) and solidify (204) this layer before at least in part.
15. method as claimed in claim 12 also comprises a plurality of layer of formation (203) and handles these layers so that form the fiber array that piles up, and makes each layer in described a plurality of layer that the part of fiber lengths is provided.
16. method as claimed in claim 12 also comprises the described fiber array of etching (208) so that remove material between the fiber.
17. method as claimed in claim 12 also is included in described fiber array and forms (210) radiation blocking material on every side.
18. method as claimed in claim 12, the top that also is included in optical fiber deposits (212) functional material, and described functional material comprises one of luminescent material, phosphor material and affinity probe.
19. an optic panel comprises:
Substrate (12), it has first type surface; And
Be molded into optical fiber (14) array (15) on the substrate, described optical fiber have by deposit on the substrate, optical fiber is by the layer thickness of its material that forms and/or be used for the length that the degree of depth of the feature on the imprinter of mold pressing optical fiber determines.
20. optic panel as claimed in claim 19, wherein substrate comprises optical sensor (16).
21. optic panel as claimed in claim 19 also is included in the radiation blocking material (32) that forms around the described fiber array.
22. optic panel as claimed in claim 19 also is included in the functional material (42) on the top of optical fiber, this functional material comprises one of phosphor material, luminescent material and affinity probe.
23. optic panel as claimed in claim 19, wherein said layer comprises a plurality of layers (26,28), and described length is determined according to described a plurality of layers.
24. optic panel as claimed in claim 19, wherein optical fiber (14) comprises at least 1: 10 Breadth-Length aspect ratio.
25. optic panel as claimed in claim 19, wherein optical fiber (14) has non-circular cross sectional shape.
CN2008801193625A 2007-12-06 2008-12-03 Optical faceplate and method of manufacture Pending CN101889228A (en)

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TW201003160A (en) 2010-01-16
WO2009072072A1 (en) 2009-06-11

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