CN101881636B - 一种半导体专用设备的弹性传感装置 - Google Patents
一种半导体专用设备的弹性传感装置 Download PDFInfo
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- CN101881636B CN101881636B CN 201010190145 CN201010190145A CN101881636B CN 101881636 B CN101881636 B CN 101881636B CN 201010190145 CN201010190145 CN 201010190145 CN 201010190145 A CN201010190145 A CN 201010190145A CN 101881636 B CN101881636 B CN 101881636B
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CN 201010190145 CN101881636B (zh) | 2010-06-03 | 2010-06-03 | 一种半导体专用设备的弹性传感装置 |
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CN 201010190145 CN101881636B (zh) | 2010-06-03 | 2010-06-03 | 一种半导体专用设备的弹性传感装置 |
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CN101881636A CN101881636A (zh) | 2010-11-10 |
CN101881636B true CN101881636B (zh) | 2012-12-05 |
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Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1760989A (zh) * | 2004-10-15 | 2006-04-19 | 南京Lg同创彩色显示系统有限责任公司 | 推送式按键装置 |
CN101349578A (zh) * | 2008-08-07 | 2009-01-21 | 苏州德天自动化科技有限公司 | 一种调整座 |
CN201210150Y (zh) * | 2008-06-02 | 2009-03-18 | 林俊明 | 一种半自动旋转探头装置 |
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US6287435B1 (en) * | 1998-05-06 | 2001-09-11 | Tokyo Electron Limited | Method and apparatus for ionized physical vapor deposition |
JP2009192395A (ja) * | 2008-02-15 | 2009-08-27 | Yamatake Corp | センサ取付構造および火炎センサ装置 |
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Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1760989A (zh) * | 2004-10-15 | 2006-04-19 | 南京Lg同创彩色显示系统有限责任公司 | 推送式按键装置 |
CN201210150Y (zh) * | 2008-06-02 | 2009-03-18 | 林俊明 | 一种半自动旋转探头装置 |
CN101349578A (zh) * | 2008-08-07 | 2009-01-21 | 苏州德天自动化科技有限公司 | 一种调整座 |
Non-Patent Citations (1)
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JP特开2009-192395A 2009.08.27 |
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Legal Events
Date | Code | Title | Description |
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PB01 | Publication | ||
ASS | Succession or assignment of patent right |
Owner name: CETC BEIJING ELECTRONIC EQUIPMENT CO., LTD. Free format text: FORMER OWNER: NO.45 INST., CHINA ELECTRONIC SCIENCE AND TECHNOLOGY GROUP CORP. Effective date: 20101215 |
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C41 | Transfer of patent application or patent right or utility model | ||
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Free format text: CORRECT: ADDRESS; FROM: 065201 NO. 20, HAIYOU STREET, YANJIAO ECONOMIC DEVELOPMENT ZONE, SANHE CITY, HEBEI PROVINCE TO: 100176 ROOM A119, NO. 18, XIHUAN SOUTH ROAD, ECONOMIC AND TECHNOLOGY DEVELOPMENT ZONE, BEIJING |
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TA01 | Transfer of patent application right |
Effective date of registration: 20101215 Address after: 100176 room All9, No. 18 West South Road, Beijing economic and Technological Development Zone Applicant after: CETC BEIJING ELECTRONIC EQUIPMENT Co.,Ltd. Address before: 065201 Hebei Province, Sanhe Yanjiao Economic Development Zone, 20 main street Applicant before: THE 45TH Research Institute OF CETC |
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CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20121205 |
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CF01 | Termination of patent right due to non-payment of annual fee |