CN101874312A - Variable operating voltage in micromachined ultrasonic transducer - Google Patents
Variable operating voltage in micromachined ultrasonic transducer Download PDFInfo
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- CN101874312A CN101874312A CN200880118696A CN200880118696A CN101874312A CN 101874312 A CN101874312 A CN 101874312A CN 200880118696 A CN200880118696 A CN 200880118696A CN 200880118696 A CN200880118696 A CN 200880118696A CN 101874312 A CN101874312 A CN 101874312A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/0292—Electrostatic transducers, e.g. electret-type
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Abstract
A cMUT and a cMUT operation method use an input signal that has two components with different frequency characteristics. The first component has primarily acoustic frequencies within a frequency response band of the cMUT, while the second component has primarily frequencies out of the frequency response band. The bias signal and the second component of the input signal together apply an operation voltage on the cMUT. The operation voltage is variable between operation modes, such as transmission and reception modes. The cMUT allows variable operation voltage by requiring only one AC component. This allows the bias signal to be commonly shared by multiple cMUT elements, and simplifies fabrication. The implementations of the cMUT and the operation method are particularly suitable for ultrasonic harmonic imaging in which the reception mode receives higher harmonic frequencies.
Description
Related application
The denomination of invention that the application requires on December 3rd, 2007 to submit to is the benefit of priority of the 60/992nd, No. 046 U.S. Provisional Patent Application of " Optimizing operation of micromachined ultrasonic transducer ", and the full content of this application is incorporated herein by reference.
Background
Capacitive micromachined ultrasonic transducer (cMUT) is widely used electrostatic actuator/transducer in various application.Ultrasonic transducer can be worked in comprising the various media of liquid, solid and gas.Ultrasonic transducer is generally used for diagnosing and the medical imaging for the treatment of, biochemical imaging, nondestructive material evaluation, sonar, means of communication, proximity transducer, gas flow measurement, field process monitoring, acoustic microscope, underwater sensing and imaging and numerous other practical applications.The typical structure of cMUT is to have fixing bottom electrode and be positioned on the flexible membrane or the plane-parallel capacitor of the removable top electrode of flexible membrane, and it is used for the sound wave of transmission/calibration (TX) or reception/detection (RX) adjacent media.Direct current (DC) bias voltage can be applicable between the electrode and is fit to the optimum position that cMUT works so that film is biased to, and turns to target with sensitivity and bandwidth maximum usually.In process of transmitting, exchange (AC) signal application in transducer.Alternately electrostatic force drive membrane between top electrode and the bottom electrode is so that transfer to cMUT medium on every side with acoustic energy.In receiving course, the sound wave bump causes the film vibration, therefore, has changed two interelectrode electric capacity.
The key property of cMUT is its operating voltage, and this operating voltage is the voltage signal that is used for cMUT except the AC signal that is used to produce acoustic energy.In existing cMUT method of work, dc voltage is used to the cMUT that setovers.The TX input signal is applied in cMUT and goes up the output of generation sound.In these methods, the operating voltage of cMUT is only determined by the DC biasing voltage signal.Send with the work that receives both in use identical operational voltage level.Yet in transmission and reception work, the optimal working state that is fit to cMUT work is different.Therefore, in order to obtain optimum overall performance, when selecting suitable operation level, need weigh using fixing operational voltage level.This balance is being provided with obstacle aspect the cMUT performance improvement.
In order to address this problem, proposed under transmission and receiving mode, to use variable operating voltage.This is by using different bias voltage level to realize to two kinds of mode of operations.Particularly, the AC offset signal that has different bias levels in TX and RX work is used for replacing the DC offset signal.This method needs two high voltage AC signals in operating process: the TX input signal, and it is identical with the signal that uses in other conventional methods, only is used for generation sound output; And the AC offset signal, it is used for changing two kinds of operational voltage level between pattern.These two kinds of high voltage AC signal demands are synchronous.CMUT element in the cMUT array can not be shared identical AC offset signal and be used for beam shaping.Therefore, each cMUT element is for two different lines of need of work.The quantity that this has doubled the line that uses in the cMUT system has increased the cost of the complexity and the system of system greatly.When use had the cMUT array of a large amount of elements, these problems were particularly outstanding.
For the performance of optimizing RX and TX and the complexity of simplified system, need the better cMUT method of work of exploitation.
Summary of the invention
CMUT and cMUT method of work are used the input signal of two components with different frequency characteristic.The main frequency of first component is in the frequency response band of cMUT element and outside the frequency response band of main frequency at the cMUT element of second component.First component of input signal is used for generating the sound output that is used for cMUT transmission (TX) work.The second component of offset signal and input signal limits the operating voltage that is applied on the cMUT together.Operating voltage is used to be provided for the operating state (or working point) of cMUT and does not produce influential sound output in the frequency band of cMUT.
Operating voltage is variable between mode of operation is as sending mode and receiving mode.CMUT only needs an AC component just to allow with variable operating voltage operation cMUT.This makes offset signal be shared by a plurality of cMUT elements, therefore is easy to realize the CMUT system, especially has the CMUT array of a large amount of elements.The realization of cMUT and method of work especially is fit to the Ultrasound Harmonic Imaging that receiving mode receives higher harmonic frequency.
An aspect of the present disclosure is the cMUT system that at least one cMUT element is arranged.The input signal source operation comprises the input signal of two components with different frequency characteristic with application.Offset signal is applied to operating voltage on the cMUT element together with the input signal component with outer frequency of band (as low frequency).It is different comparing with second mode of operation (as receiving mode) in the operating voltage of first mode of operation (as sending mode).Offset signal can be the DC signal.
In one embodiment, the cMUT system is suitable for switchably working in dissimilar imagings.Transmission in first kind imaging with receive in operating voltage be different, be identical but in the second type imaging, be used to send with the operating voltage that receives both.First kind imaging is to from the remote sample areas imaging of system, and the second type imaging comprises near the systematic sample regional imaging.
Another aspect of the present disclosure is the method that is used to operate cMUT.This method provides the cMUT that comprises at least one cMUT element.This method configuration cMUT is so that the input signal source operation comprises the input signal of two components with different frequency characteristic with application and make offset signal and the input signal component with outer frequency of band (as low frequency) together operating voltage is applied on the cMUT element.Is different at different working modes such as sending mode with operating voltage in the receiving mode.
Be the method for a kind of cMUT of operation on the other hand, provide cMUT and configuration cMUT to come so that the operating voltage that is provided by bias voltage and/or input signal is applied on the cMUT element in the course of the work at least in part.Operating voltage is set at zero in sending mode near and in receiving mode, be set to non-zero.Sending mode can be set to carry out second order frequency work.In one embodiment, working signal is provided by outer frequency (as the low frequency) component of the band of input signal at least in part.
The form that content of the present invention is provided to simplify is introduced a kind of selection of thought, and it is further described in detailed description hereinafter.Content of the present invention is not key feature or the essential feature for definite theme required for protection, neither be in order to be used as supplementary means on the scope of determining theme required for protection.
The accompanying drawing summary
Describe in detail all in conjunction with the accompanying drawings.In the drawings, the reference number that occurs first of the leftmost numeral of reference number.Similar or the identical parts of same reference numerals representative that in different figure, use.
Fig. 1 shows the first example cMUT system that uses variable operating voltage;
Figure 1A show use variable operating voltage the first example cMUT system on the other hand;
Fig. 2 shows the second example cMUT system that uses variable operating voltage;
Fig. 3 A-3E shows first embodiment of offset signal and TX input signal and relevant work voltage;
Fig. 4 A and 4B show second embodiment of offset signal and TX input signal and relevant work voltage;
Fig. 5 shows the 3rd embodiment of TX work input signal;
Fig. 6 A-6D shows the 4th embodiment of offset signal and TX input signal and relevant work voltage.
Describe in detail
The execution mode of disclosed cMUT method of work uses variable operating voltage, and when the mode of operation of cMUT changed, this variable operating voltage also changed every now and then.Operating voltage is used for being provided with the operating state (or working point) of cMUT and is not created in the interior any significant sound output of frequency band of CMUT.A feature of the present disclosure is to form operating voltage from the AC component of TX input signal at least in part.The AC component and the offset signal of TX input signal allow to be provided with variable operating voltage together, so that different mode of operations can be used different operating voltages as sending (TX) with (RX) pattern of reception.This method can be optimized the performance of cMUT in transmission and reception work simultaneously.Following discloses the exemplary implementation of this method.
Fig. 1 shows the first exemplary cMUT system that uses variable operating voltage.CMUT system 100 comprises cMUT101.The details of cMUT is not shown, because they are not absolutely necessary for the purpose of the present invention.In principle, can use any cMUT that comprises flexible membrane cMUT and embedded elasticity cMUT (EScMUT).CMUT has first electrode and second electrode of separating a gap, so that there is electric capacity in two interpolars.Elastic component (for example flexible membrane or elastic layer) is supported in two electrodes, so that two electrodes can move towards each other or away from each other.In flexible membrane cMUT, elastic component is a flexible membrane of directly supporting an electrode in two electrodes.In EScMUT, elastic component is the elastic layer of the electrode on the support plate, and this electrode is suspended from elastic layer by the elastic plate connector.
Input signal 111 comprises first input signal component 112 and second input signal component 113.The dominant frequency of first input signal component 112 is in the frequency response band of cMUT101.In the disclosure, first input signal component 112 is used as the TX audio input signal.TX audio input signal component 112 generates acoustic energy (sound output) by cMUT101.Second input signal component 113 is the work input signal, and this work input signal mainly contains band outer frequency (for example being significantly less than the low frequency of the frequency response band of cMUT101).Second input signal component 113 preferably is not mainly used in acoustic energy or the sound output that produces cMUT101, and is used as at least a portion of the operating voltage that is applied to the cMUT101 two ends.In one embodiment, second input signal component 113 does not generate any significant voice output of cMUT101.In the disclosure, second input signal component 113 is as TX work input signal.
Second input signal component 113 and offset signal 105 are used operating voltage together to cMUT101.To describe in detail below operating voltage in different mode of operations as being different in TX and the RX pattern.
In the course of the work, cMUT system 100 uses switch 108 to switch between TX and RX pattern, and this switch 108 can be any suitable switch such as electronic switch or mechanical switch.Switch 108 can be by the circuit replacement (as in TX work, the protective circuit of RX testing circuit) of function class like switch.CMUT system 100 can comprise other assemblies, and these other assemblies comprise wave beam forming device, controller, signal processor and other electronic devices.These assemblies are not shown.
Different with the TX input signal in the existing method, the TX input signal 111 in the method for the present disclosure not only is used to produce ultrasonic wave output, and it also is used for offset signal operational voltage level being set.In other words, TX input signal 111 comprises two signal components, and one is the TX acoustic input signal 112 that is used to produce the acoustic output signal of needs, and another is the TX work input signal 113 that is used to change operational voltage level.TX audio input signal 112 can be the input signal that is fit to the output of generation sound arbitrarily, the input signal that uses in for example conventional cMUT method of work.
At frequency domain, the frequency spectrum of TX audio input signal 112 is preferably in the frequency response bandwidth of cMUT101.The frequency spectrum of TX work input signal 113 is preferably outside the sound output bandwidth of cMUT101.Therefore, the frequency of TX work input signal 113 preferably far above or far below the frequency of TX acoustic input signal 112.In a preferred embodiment, TX work input signal 113 has the dominant frequency of the bandwidth of the sound output that is starkly lower than cMUT101.
In one embodiment, offset signal 105 is dc voltage signals, and work has identical voltage level to this dc voltage signal with RX for the TX of cMUT101.So the operational voltage level difference of the TX of cMUT101 and RX workplace is only by 111 decisions of TX input signal.
In another embodiment, offset signal 105 is continuous modulation signals, and the frequency of this modulation signal is apparently higher than the operating frequency (scope that for example exceeds the frequency response bandwidth of cMUT 101) of cMUT.Both have identical voltage level so offset signal 105 is worked with RX for the TX of cMUT 101.Therefore, the operational voltage level difference of the TX of cMUT 101 and RX workplace is also only determined by TX input signal 111 in the present embodiment.
Compare with the existing cMUT method of work that identical operational voltage level is arranged in TX works both with RX, disclosed method because have an opportunity optimize simultaneously TX and RX work both operational voltage level and improved the performance of cMUT potentially, rather than compromise address this problem.
In addition, disclosed cMUT method of work only needs an AC signal, and promptly the TX input signal 111.Offset signal 105 can be dc voltage or high-frequency modulation signal.Do not need between offset signal 105 and the TX input signal 111 synchronously.Therefore, realizing method disclosed by the invention needs by synchronously and need may be much easier with those methods of two AC signals (AC offset signal and AC input signal) of being used for each cMUT by the carrying of two cables than using.
If AC offset signal and AC TX input signal use synchronously, the element of cMUT array can not shared identical AC offset signal, so each cMUT element needs two private cables obtain two AC signals.This may cause the expensive of system, especially when the cMUT array that has a large amount of elements is used.Yet method disclosed by the invention makes it possible to use can be by some or all elements of cMUT array shared DC offset signal or high frequency modulated offset signal.Therefore, in a preferred embodiment, each cMUT element only needs a private cable, to send signal or addressing respectively.
Figure 1A show use variable operating voltage the first exemplary cMUT system on the other hand.The 100A of cMUT system based on the cMUT system of describing with reference to figure 1 100 in employed identical principle, but show cMUT101 and cMUT101A, the configuration mode of each is similar to the configuration mode of cMUT 101 among Fig. 1.
Similar to cMUT 101, cMUT 101A is connected to common bias signal end 102 and input signal end 103A.Common bias signal source 104 links to each other to use identical offset signal to cMUT 101A with common bias signal end 102.Input signal source 110A links to each other with input signal end 103A, and operation is to use input signal to cMUT 101A.Input signal source 110 can be for being sent to a large amount of different input signals unlike signal source or the same signal source of different cMUT with input signal source 110A.
With shown in Figure 1 the same, therefore the offset signal of cMUT101 and cMUT101A share common does not need independent wiring.Instead, the side of cMUT 101 and cMUT 101A can link to each other with shared conductor and wiring that need not be independent in manufacture process.On the other hand, input signal is addressed to each among cMUT101 and the cMUT101A respectively, therefore needs independent wiring.Particularly, different input signals may be used on different cMUT elements.The difference of input signal can be TX acoustic input signal 112 or TX work input signal 113, or all exists in the two.When TX work input signal 113 in different cMUT element (101 and 101A) not simultaneously, the cMUT element has different operating voltages, and can work under different conditions.
Each the input signal that is applied among cMUT 101 and the cMUT 101A comprises TX acoustic input signal and TX work input signal, and is similar to the input signal 111 of cMUT 101 among Fig. 1.Yet the input signal of cMUT101 and cMUT101A can be personalized and their signal level, time, phase place and frequency can be different.
In the course of the work, each among cMUT101 and the cMUT101A uses separately switch (108 and 108A) to switch between TX and RX pattern.CMUT system 100 can have other assemblies, and these other assemblies comprise wave beam forming device, controller, signal processor and other electronic components.
Fig. 2 shows the second example cMUT system that uses variable operating voltage.The details of cMUT201 is not shown.In principle, can use and comprise flexible membrane cMUT and both any cMUT of embedded elasticity cMUT (EScMUT).CMUT system 200 is based on being formed for the variable operating voltage of different working modes (as TX and RX) to the similar principle with reference to the described cMUT of figure 1 system 100.For example, TX input signal 211 has the first component TX acoustic input signal 212 and second component TX work input signal 213.TX input signal 211 is provided by signal source 210, and is applied on the cMUT 201 by TX end 203 and switch 208.
Yet cMUT system 200 is different with cMUT system 100 aspect several.Offset signal 205 and TX input signal 211 are applied to the identical electrodes 207 of cMUT201, and in Fig. 1 offset signal 105 and TX input signal 111 be applied to cMUT101 on termination electrode 106 and 107.Another electrode 206 of cMUT 201 links to each other with GND.TX input signal 211 is provided by TX end 203 by signal source 210.Offset signal 205 is provided by offset side 202 by signal source 204.Therefore, in this implementation, be applied to operational voltage level on the cMUT201 be TX work input signal 213 and offset signal 205 and.The ground of comparing, the operational voltage level that is applied in the implementation in Fig. 1 on the cMUT101 is the poor of TX work input signal 113 and offset signal 105.Significantly, the offset signal 205 among Fig. 2 is negative, and the offset signal 105 among Fig. 1 is positive, makes that the variable operating voltage level that produces among both in cMUT 100 and cMUT 200 is identical.In addition, cMUT 200 has a biasing circuit to make things convenient for the design of cMUT system 200, and this biasing circuit comprises decoupling capacitance C 215 and biasing resistor R 216.
Fig. 3 A-3E shows first embodiment according to the offset signal of first illustrative embodiments of the cMUT system among Fig. 1 and TX input signal and relevant work voltage.Fig. 3 A shows offset signal 305 and TX input signal 311.In these signals each is represented by voltage/time diagram.Comprise transition process, signal can comprise during four or the stage: the transformation to the transformation of TX and TX to RX of TX stage, RX stage, RX.In Fig. 3 A and figure subsequently, these stages are used " T ", " R ", " TR " and " RT " expression respectively.Sometimes, can merge with RX or TX stage between one or two limited proportionality.
TX work input signal 313 in the TX input signal 311 should be present in TX stage (T) and RX stage (R) usually at least.CMUT the TX stage as ultrasonic transmitters work, the RX stage as ultrasonic receiver work.Operational voltage level in RX stage and TX stage can differently be provided with.TX work input signal 313 in the TX input signal 311 preferably is set to zero in the RX stage.On the other hand, the TX audio input signal 312 in the TX input signal 311 should be present in TX in the stage usually, but preferably not in other interval appearance.
TX work input signal 313 in the TX input signal 311 can exist in the transformation (TR) of RX to transformation (RT) and the TX of TX at RX.Sometimes, can merge with RX or TX stage between one or two limited proportionality.
Fig. 3 B shows TX acoustic input signal 312 and the TX work input signal 313 in the TX input signal 311 among Fig. 3 A.These two input signals are two components of the TX input signal 311 among Fig. 3 A.TX input signal 311 can have a plurality of voltage levels at its conversion stage.The TX input signal 311 of example send with reception work in two different voltage level V are arranged respectively
OFFAnd V
OV
OUsually be made as zero.TX acoustic input signal 312 mainly is present in the TX stage (T).
Fig. 3 C shows the total voltage that is applied on the cMUT, this total voltage be TX input signal 311 and offset signal 305 difference or and, this depends on the execution mode that uses in the polarity of signal and the cMUT system.In shown embodiment, the total voltage 315 that is applied on the cMUT is the poor of TX input signal 311 and offset signal 305.Total voltage 315 has two effective operational voltage level.The first level V
BHigher absolute voltage is arranged and be used for receiving (RX) work, have the second level V of low absolute voltage
B-V
OFFBe used for sending (TX) work.In transmission work, TX acoustic input signal 312 exists, and is used to produce acoustic energy.Other parts of total voltage 315 are used to set up the suitable operating state of cMUT.The voltage of offset signal 305 and TX input signal 311 is on purpose selected to realize the expected performance of cMUT.
Fig. 3 D shows offset signal 305 and TX work input signal 313, the TX acoustic input signal 312 in the not shown TX input signal 311.
Fig. 3 E shows the total work voltage 316 that is applied on the cMUT, the TX acoustic input signal 312 in the not shown TX input signal 311.Fig. 3 D and Fig. 3 E are used to clearly show that how to use TX work input signal 313 to change operational voltage level 316 together with offset signal 305.
Fig. 4 A and Fig. 4 B show second embodiment of offset signal and TX input signal and corresponding work voltage.Except different voltage level settings, signal in a second embodiment all with first embodiment shown in Fig. 3 A-3E in signal similar.Similarly, offset signal 305 is DC offset signal (V
B).TX input signal 411 comprises two signal components: TX acoustic input signal 412 and TX work input signal 413.In the present embodiment, the bias voltage (V of offset signal 405
B) be configured to TX input signal 411 in the voltage level V of TX work input signal 413
OFFIdentical, make this two voltage in process of transmitting, balance out.Therefore, in process of transmitting, the operational voltage level that is applied to the total voltage 415 on the cMUT is zero or approaches zero.
Second illustrative embodiments is applicable to the disclosed special cMUT operating technology that is called the second order frequency method in No. 11/965919 U.S. Patent application that is called " signal controlling of micromachined ultrasonic transducer (SIGNAL CONTROL IN MICROMACHINED ULTRASONICTRANSDUCER) ", and the full content of this application mode by reference is incorporated herein.In second order frequency work, acoustic output signal and TX acoustic input signal 412 square proportional, and be fit to produce the voice output of the expectation that does not have harmonic component.This carries out harmonic imaging to cMUT may be vital.
The second order frequency method of an example is provided with the special TX acoustical signal of cMUT, for example V
TX∝ sin (ω t/2), it has fundamental frequency omega/2 and produces is the sound output of the main second order frequency component of output signal frequency with ω without any higher frequency harmonics.Fundamental frequency omega/2 can selectedly be operating frequency ω 0 only about half of of the expectation of cMUT, so output signal frequency 2 ω are near the operating frequency ω 0 of expectation.Operating frequency ω 0 usually in the frequency band of the frequency response of cMUT, and can be preferably near the centre frequency of frequency band.More embodiment is disclosed in No. 11/965919 U.S. Patent application that merges.
Be used in the second order frequency method cMUT system of between two kinds of mode of operations, switching herein.Particularly, in one embodiment, the cMUT system switches to the second order frequency method of work sending, but turns back to different method of works to receive.Be applied to operational voltage level on the cMUT along with the change of mode of operation respective change.Be in zero or approaching zero operating voltage and be particularly suitable for the second order frequency mode of operation.
It should be noted that any cMUT of being suitably for provides the method for variable operating voltage to can be used for the realization of above-mentioned second order frequency technology.
TX audio input signal (as 312 or 412) is used to produce required sound output.Any proper A C signal or waveform can be used.This signal can be any electronic signal that is used for producing the sound output of expectation, for example single sine pulse, a plurality of sine pulse, gaussian-shape pulse, half cosine impulse and square-wave pulse etc.The TX acoustical signal is limited by the demand of imaging system.
Fig. 5 shows the 3rd embodiment of TX work input signal.TX work input signal 513 is similar to the TX work input signal shown in Fig. 3-4, and be designed to further reduce frequency component in the cMUT operating frequency interval (bandwidth), TX work input signal 513, make TX work input signal 513 can not provide very influential ultrasonic output at the cMUT working stage.Realize at this angle by sphering TX work input signal 515.
The higher frequency components of TX work input signal 513 comes between the limited proportionality that signal voltage level changes.Therefore, the shape of TX between the limited proportionality in (513a and 513b) work input signal 513 (313,413) and width preferably be designed to make between these limited proportionalities as RX to not generating the output acoustical signal of disturbing mutually with the TX acoustic input signal with TX to the transformation wayside signaling of RX (TR) between the limited proportionality of TX (RT).Usually, this can finish by following operation, that is, the frequency component of control TX work input signal 513 (313,413) remains on outside the bandwidth of cMUT them, so that TX work input signal 513 (313,413) produces minimum ultrasonic output by cMUT.Go out as shown, the wedge angle of TX work input signal 513 (313,413) is by sphering. Signal 513a and 513b in the transition process among Fig. 5 are exactly example.Any other signal shape that is designed to be minimized in the ultrasonic generation in the interested frequency band of cMUT can be used.
Other any TX work input signals that TX work input signal 513 or be intended to minimizes its frequency component in the cMUT operating frequency range can be generated, use the suitable low pass or the bandpass filters of higher cutoff frequency to filter then with the operating frequency interval that is lower than cMUT, then with the TX audio input signal (as 312,412) combination, to produce total TX input signal (as 311,411).
Fig. 6 A-6D shows the 4th embodiment of offset signal and TX input signal and relevant work voltage.In the present embodiment, the TX stage (T) of TX input signal 611 is designed to have identical length (time) with TX acoustic input signal 612.The TX stage (T) of TX acoustic input signal 612 and TX work input signal 613 is synchronously to have identical time started and/or identical concluding time.In the present embodiment, the part that (RT and TR) one or both of all can be used as TX audio input signal 612 between the limited proportionality of TX work input signal 613 is handled.Between these limited proportionalities corresponding to the rising edge or the trailing edge of TX work input signal 613.This has caused comprising the complete TX audio input signal of the transformation segment part of original TX acoustic input signal 612 and TX work input signal 613.This may be minimized in the imaging process the pseudo-shadow that the acoustical signal of not expecting that produced by TX work input signal 613 causes.
Fig. 6 A shows offset signal 605 and TX input signal 611.Fig. 6 B shows and regularly be mutual TX audio input signal 612 that overlaps and TX work input signal 613 in transition process.Fig. 6 C shows the total voltage 615 on the resulting cMUT of being applied in, and TX audio input signal 612 has been shown.Fig. 6 D shows the operating voltage 616 in the total voltage 615, not shown TX audio input signal 612.This has illustrated how voltage level changes under different mode of operation (TR and RX).
TX input signal disclosed by the invention (as 111) can be provided as signal generator arbitrarily by any appropriate signal source.It can generate at low voltage level earlier, is amplified to the voltage level of expectation then.The TX input signal also can synthesize by merging the TX voice signal and the TX working signal that generate respectively.In this case, the TX working signal can use low pass or bandpass filters to filter before stack.At the TX input signal of stack with before offset signal is applied to CMUT, if desired, the TX input signal of stack can be amplified to desired intensity.
Disclosed cMUT method of work also can help the toe of cutting of cMUT array.In existing method, finish by the offset signal of on each cMUT element, using expectation and to cut toe.No matter which kind of offset signal is used, and each the cMUT element in array needs independent bias signal line, to have personalized or discrepant operational voltage level.Therefore, each element needs two different holding wires, i.e. offset line and holding wire.This makes the transducer interconnection complicated more.Use disclosed method, the sound output of each element and operational voltage level are only by the TX input signal decision that is applied to this element.Therefore, personalization of any signal (as addressing) and differentiation (as cutting toe) all can be finished by using the TX input signal.This makes the shared identical offset line of some or all elements in the array become possibility.In addition, method disclosed by the invention only need a high voltage/power signal and not need from a plurality of AC signals in different AC source synchronously.This also makes some operating technology easier than existing method as the realization of cutting toe.
The method disclosed in the present is intended to work and improve the cMUT performance by optimizing TX and RX.The closed loop sensitivity that a most important target of cMUT performance optimization is an increase equipment is deeper infiltrated medium to increase to the picture interval with activation.Yet, if make between TX voltage level and RX voltage level switch speed need for low with minimize in the cMUT frequency band, TX work input signal is to the influence of sound output, increasing sensitivity so may be cost with the dead band that increases system.The time-delay decision that the dead band is being ready to detect after the TX acoustical signal finishes by system.
In order to overcome this problem, the present invention proposes two imaging cMUT method and systems.This method provides cMUT and has made cMUT be adapted to work in the first kind imaging and the second type imaging, make that the operating voltage in the transmission of first kind imaging is different with operating voltage in receiving, and the operating voltage in the transmission neutralization of the second type imaging receives is identical.In one embodiment, first kind imaging is to the remote sample areas imaging from cMUT, and the second type imaging is to the sample areas imaging near cMUT.For remote imaging, provide the method for work (for example disclosed herein) of variable operating voltage to can be used to increase sensitivity.For near imaging, traditional method (or minimize any other method of the dead band) is used for making cMUT work.Doing does not like this influence image quality, because at the imaging area near cMUT, the requirement of closed loop sensitivity is much smaller.In the course of the work, the dependent imaging demand is switched in the cMUT system between two kinds of imaging patterns.It should be noted that each imaging pattern can comprise sending mode and receiving mode.
Alternatively, in the cMUT system, can use two different cMUT (different cMUT elements or different cMUT arrays) for said process.First cMUT is suitable for using the variable operating voltage method to carry out work, and second cMUT is suitable for using conventional operation voltage method (or other minimize the method in dead band) to carry out work.
It should be noted that except the method that is used for variable operating voltage disclosed herein any cMUT of being suitably for provides the method for variable operating voltage to can be used for the above-mentioned realization of two imagings or many imaging techniques.
An example application of disclosed cMUT and method of work is popular Ultrasound Harmonic Imaging.In Ultrasound Harmonic Imaging, transducer generates the sound output of expectation usually, and in TX work, send it to medium and in RX work from medium reception of echoes signal.A part of center of received signal is centered around the centre frequency (fundamental frequency that is called system) of TX output and another part center of received signal is centered around the harmonic frequency interval (harmonic frequency that is called system) that TX exports.Usually, the fundamental frequency of system and harmonic frequency are in the frequency band of cMUT.In the cMUT of routine work, dominant frequency is occupied usually than half frequency band of lower frequency side, and harmonic frequency is occupied half frequency band of higher-frequency side usually.The harmonic imaging method uses the harmonic wave part of signal of reception to improve imaging resolution usually.This is because harmonic signal is positioned at higher frequency, and sound wave is long shorter herein, and this makes axial resolution better.
Existing harmonic imaging Technique on T X works with RX and uses identical transducer or the transducer array with single operating state.In these technology, the response frequency of the transducer in TX and RX work is identical basically.Use method described herein, variable operating voltage can be used for switching the cMUT between two kinds of different operating states that different sound characteristicses are arranged.The embodiment that suitable duplex is made state cMUT or double mode cMUT and corresponding changing method is disclosed in the international patent application of submitting same date with the application, be called " double mode work micromachined ultrasonic transducer (DUAL-MODE OPERATIONMICROMACHINED ULTRASONIC TRANSDUCER) " (attorney docket phnl No.KO1-0010PCT).The full content mode by reference of the PCT patent application of being quoted is incorporated this paper into.
It should be noted that, although method is illustrated as the use micromachined ultrasonic transducer, especially capacitive micromachined ultrasonic transducer (cMUT), but method of work disclosed herein may be used on multiple mode of operation for example send and receiving mode with any electrostatic transducer of work voltage power supply.
Be understood that herein the potential advantage discussed and advantage should not be understood as that restriction or the constraint to the scope of claims.
Although theme moves with architectural feature and/or method with concrete language and describes, be to be understood that the theme that appended claim limits not necessarily is restricted to described concrete structure or action.But concrete structure or method are disclosed as the exemplary form that realizes claim.
Claims (30)
1. a capacitive micromachined ultrasonic transducer (cMUT) system, described system comprises:
The offset signal end;
The input signal end;
At least the one cMUT element, it is connected to described offset signal end and described input signal end;
The offset signal source, it links to each other with described offset signal end offset signal is applied to a described cMUT element; And
Input signal source, it links to each other with described input signal end, described input signal source operation is to be applied to input signal a described cMUT element, described input signal comprises first input signal component and second input signal component, described first input signal component mainly contains the acoustic frequency in the frequency response band of a described cMUT element, and described second input signal component mainly contains the acoustic frequency outside the described frequency response band of a described cMUT element in fact, and wherein said second input signal component and described offset signal limit the operating voltage that is applied to a described cMUT element together, described operating voltage in first mode of operation with second mode of operation in different.
2. the system as claimed in claim 1, wherein said offset signal is the DC signal.
3. the system as claimed in claim 1, wherein said first mode of operation are to send (TX) pattern, and described second mode of operation is to receive (RX) pattern.
4. the system as claimed in claim 1, wherein said first mode of operation is in the work of first frequency scope, and described second mode of operation substantially is different from the second frequency scope work of described first frequency scope.
5. the system as claimed in claim 1, a wherein said cMUT element operation is to carry out harmonic imaging, and described first mode of operation is with the fundamental frequency work of described system, and described second mode of operation is with the harmonic frequency work of described system.
6. the system as claimed in claim 1, wherein said operating voltage are about zero in described first mode of operation.
7. system as claimed in claim 6, wherein said first mode of operation send (TX) pattern.
8. system as claimed in claim 6, wherein said first mode of operation comprises second order frequency work.
9. the system as claimed in claim 1, wherein said first input signal component has the waveform that is in fundamental frequency omega/2 in described first mode of operation, described waveform generates output signal by a described cMUT element, and this output signal has the main second order frequency component that is in output signal frequency ω.
10. system as claimed in claim 9, wherein said fundamental frequency omega/2 are the operating frequency ω of described cMUT element expectation
0Only about half of, make described output signal frequency ω near the operating frequency ω of described expectation
0
11. system as claimed in claim 9, wherein said first mode of operation send (TX) pattern, and the operating voltage in described first mode of operation is about zero.
12. the system as claimed in claim 1, described system operation is switched between the first kind imaging and the second type imaging, wherein, operating voltage in described first kind imaging under described first mode of operation is different with the operating voltage of described second mode of operation, and it is identical with the operating voltage of described second mode of operation to be used for described first mode of operation in the described second type imaging.
13. system as claimed in claim 12, wherein said first kind imaging comprises from the remote first sample areas imaging of described system, and the described second type imaging comprises the second sample areas imaging near described system.
14. the system as claimed in claim 1, also comprise the 2nd cMUT element with unaltered second operating voltage between sending and receiving, wherein said system is suitable for working under the first kind imaging and the second type imaging, a described cMUT element is used in described first kind imaging, and described the 2nd cMUT element is used in the described second type imaging.
15. the system as claimed in claim 1 also comprises:
The 2nd cMUT element, it links to each other with the described second offset signal end, makes a described cMUT element and shared described offset signal end of described the 2nd cMUT element and described offset signal.
16. the system as claimed in claim 1 also comprises:
The 2nd cMUT element, wherein second input signal is applied to described the 2nd cMUT element, and described second input signal is different with described first input signal that is applied to a described cMUT element.
17. a method that is used for operating capacitance micromachined ultrasonic transducer (cMUT), described method comprises:
Capacitive micromachined ultrasonic transducer (cMUT) is provided, this capacitive micromachined ultrasonic transducer (cMUT) comprises offset signal end, input signal end, is connected at least one cMUT element of described offset signal end and described input signal end, links to each other with described offset signal end with offset signal source that offset signal is applied to described cMUT element and the input signal source that links to each other with described input signal end, and described input signal source operation is to be applied to input signal a described cMUT element; And
Dispose described cMUT so that described input signal comprises first input signal component and second input signal component, described first input signal component mainly contains the acoustic frequency in the frequency response band of described cMUT element, and described second input signal component mainly contains the frequency outside the described frequency response band of described cMUT element in fact, and make described second input signal component and described offset signal limit the operating voltage that is applied on the described cMUT element together, described operating voltage in first mode of operation with second mode of operation in different.
18. method as claimed in claim 17, wherein said first mode of operation are to send (TX) pattern, and described second mode of operation is to receive (RX) pattern.
19. method as claimed in claim 17, wherein said first mode of operation are with the fundamental frequency work of described system, and described second mode of operation is with the harmonic frequency work of described system.
20. method as claimed in claim 17 wherein disposes described cMUT and is included under described first mode of operation near zero described operating voltage is set.
21. method as claimed in claim 20, wherein said first mode of operation are transmission (TX) pattern that comprises second order frequency work.
22. method as claimed in claim 17, wherein disposing described cMUT comprises and makes described cMUT be suitable for working under the first kind imaging and the second type imaging, wherein, in described first kind imaging, described first mode of operation is compared with described second mode of operation, described operating voltage is set to difference, is set to identical in first mode of operation described in the described second type imaging with the described operating voltage of described second mode of operation.
23. method as claimed in claim 22, wherein, described first kind imaging comprises that to from the remote first sample areas imaging of described system the described second type imaging comprises the second sample areas imaging near described system.
24. method as claimed in claim 17, wherein said first input signal component has identical time started and/or identical concluding time with described second input signal component under described first mode of operation, make can handle as the part of described first input signal component between at least one limited proportionality of described second input signal component.
25. a method that is used for operating capacitance micromachined ultrasonic transducer (cMUT), described method comprises:
Capacitive micromachined ultrasonic transducer (cMUT) is provided, this capacitive micromachined ultrasonic transducer (cMUT) comprises offset signal end, input signal end, is connected at least one cMUT element of described offset signal end and described input signal end, links to each other with described offset signal end with offset signal source that offset signal is applied to described cMUT element and the input signal source that links to each other with described input signal end, and described input signal source operation is to be applied to input signal described cMUT element; And
Disposing described cMUT makes and at work operating voltage to be applied on the described cMUT element, described operating voltage is provided by described bias voltage and/or described input signal at least in part, and described operating voltage is about zero and non-vanishing under receiving mode under sending mode.
26. method as claimed in claim 25, wherein said input signal comprises first input signal component and second input signal component, described first input signal component mainly contains the acoustic frequency in the frequency response band of described cMUT element, and described second input signal component mainly contains the frequency outside the frequency response band of described cMUT element in fact, and wherein said operating voltage is provided by described second input signal component at least in part.
27. method as claimed in claim 25, wherein said sending mode comprises second order frequency work.
28. a method that is used for operating capacitance micromachined ultrasonic transducer (cMUT), described method comprises:
Capacitive micromachined ultrasonic transducer (cMUT) is provided, this capacitive micromachined ultrasonic transducer (cMUT) comprises the offset signal end, the input signal end, be connected at least one cMUT element of described offset signal end and described input signal end, link to each other with offset signal source that offset signal is applied to described cMUT element and the input signal source that links to each other with described input signal end with described offset signal end, described input signal source operation makes the operating voltage that is provided by described bias voltage and/or described input signal at least in part at work be applied on the described cMUT element input signal is applied to described cMUT element; And
Make described cMUT be suitable in the first kind imaging and the second type imaging, switchably working, make operating voltage described in the described first kind imaging in transmission with receive in different, and operating voltage described in the described second type imaging in transmission with receiving mode in identical.
29. method as claimed in claim 28, wherein said first kind imaging comprise from the remote first sample areas imaging of described cMUT, and the described second type imaging comprises the second sample areas imaging near described cMUT.
30. method as claimed in claim 28, wherein said input signal comprises first input signal component and second input signal component, described first input signal component mainly contains the acoustic frequency in the frequency response band of described cMUT element, and described second input signal component mainly contains the frequency outside the frequency response band of described cMUT element in fact, and wherein said operating voltage is provided by described second input signal component at least in part.
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| US60/992,046 | 2007-12-03 | ||
| PCT/US2008/085025 WO2009073561A1 (en) | 2007-12-03 | 2008-11-26 | Variable operating voltage in micromachined ultrasonic transducer |
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| CN104238606A (en) * | 2013-06-07 | 2014-12-24 | 佳能株式会社 | Capacitive transducer drive device and object information acquiring device |
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- 2008-11-26 WO PCT/US2008/085025 patent/WO2009073561A1/en active Application Filing
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| CN104238606A (en) * | 2013-06-07 | 2014-12-24 | 佳能株式会社 | Capacitive transducer drive device and object information acquiring device |
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| JP2011523234A (en) | 2011-08-04 |
| EP2227835A1 (en) | 2010-09-15 |
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| US8363514B2 (en) | 2013-01-29 |
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| US20100278015A1 (en) | 2010-11-04 |
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Effective date of registration: 20220218 Address after: Room 305, building A5, bio nano Park, No. 218, Xinghu street, Suzhou Industrial Park, Suzhou, Jiangsu Patentee after: Kolo Medical, Ltd. Address before: California, USA Patentee before: Kona Medical Co.,Ltd. Effective date of registration: 20220218 Address after: California, USA Patentee after: Kona Medical Co.,Ltd. Address before: California, USA Patentee before: KOLO TECHNOLOGIES, Inc. |