CN101869892B - Cleaning device of sheet attracting table on semiconductor special equipment - Google Patents
Cleaning device of sheet attracting table on semiconductor special equipment Download PDFInfo
- Publication number
- CN101869892B CN101869892B CN2010101835912A CN201010183591A CN101869892B CN 101869892 B CN101869892 B CN 101869892B CN 2010101835912 A CN2010101835912 A CN 2010101835912A CN 201010183591 A CN201010183591 A CN 201010183591A CN 101869892 B CN101869892 B CN 101869892B
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- hairbrush
- bearing
- hairbrush rod
- rod
- cleaning device
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Abstract
The invention relates to a cleaning device, in particular to a cleaning device for cleaning a sheet attracting table on semiconductor special equipment. The device comprises a spraying system, a labyrinth seal system and a hairbrush rod system. A hairbrush rod is arranged on a hairbrush shaft after passing through a hairbrush cover; the hairbrush shaft is sleeved with a seal ring, a bearing, an inner space ring, an outer space ring, a bearing, an end cover and a bearing lock nut in sequence; the bearing lock nut is fixed on the hairbrush shaft through screw threads; a gland and the end cover are fixed on a bearing seat; two water injection pipes are arranged on the hairbrush cover. The hairbrush rod is evenly distributed with dense nylon hairbrushes; the seal ring and the gland form labyrinth seal; the hairbrush cover is provided with the two water injection pipes; the position that each water spray pipe is opposite to the hairbrush rod is provided with dense small-diameter water injection nozzles; and the bottom of the hairbrush cover is provided with a water discharge slot. The invention has the characteristics of delicate and compact structure, simple installation, convenient application and low cost.
Description
Technical field
The present invention relates to a kind ofly be used for cleaning semiconductor manufacturing equipment to inhale the cleaning main body of sheet platform be the cleaning device of hairbrush rod.
Background technology
In the semiconductor equipment at home and abroad, what the cleaning of inhaling the sheet platform was mainly adopted is linear slider formula cleaning device and circumference rotary cleaning device.The shortcoming of linear slider formula cleaning device is low to the cleaning efficiency of suction sheet platform, and structure takes up room bigger; The shortcoming of circumference rotary cleaning device is that the cleaning of suction sheet platform is inhomogeneous, especially can not well clean the shortcoming and the problem that work together and have nothing in common with each other for the centre of inhaling the sheet platform.
Summary of the invention
The purpose of this invention is to provide a kind of sheet attracting table on semiconductor special equipment hairbrush cleaning device; This device have compact conformation, running steadily, the advantage such as little of cleaning evenly, take up room, can be good at solving the various shortcomings of conventional clean device and the problem of existence.
For realizing above-mentioned purpose, the present invention adopts following technical scheme:
The present invention includes outer cover, hairbrush rod part, running part, labyrinth seal part and spray part; Wherein hairbrush rod part is made up of hairbrush rod and the even dense nylon brush hair that is laid on the hairbrush rod that divides, and the hairbrush rod is arranged in the outer cover; Running part comprises brush axle, bearing block, bearing; The through hole that brush axle passes on the outer cover is connected with the hairbrush rod; Bearing is set to two and is fixed on and is provided with inside and outside spacer ring between the bearing block upper bearing (metal); Be provided with bearing locking nut in the bearing end, bearing locking nut compresses bearing through being threaded on the brush axle; Labyrinth seal part is enclosed within gland supporting on the brush axle between bearing block and the outer cover and sealing ring constitutes by being arranged on, and gland is fixed on the bearing block; Said spray part is made up of the sparge pipe that is arranged in the outer cover, evenly is distributed with dense small-bore water jet on the position of the corresponding hairbrush rod of sparge pipe, is provided with discharge sump in the outer cover bottom.
The present invention is provided with end cap in the brush axle outer end, and end cap is detachably connected on the bearing block.Two sparge pipes can be set on outer cover, and two sparge pipes lay respectively at hairbrush rod both sides.The diameter of the single bristle of nylon bristle that is provided with on the said hairbrush rod is 0.32-0.38mm, and the hairbrush rod radially is provided with 8-12 bristle, and the hairbrush rod axially is provided with 10-14 row bristle, and every row's bristle spacing is 4mm---6mm.The said water jet that is arranged on the sparge pipe is provided with specification, and water jet diameter 1-1.2mm, every row are provided with 26 water jets, and every row's spacing is 4-6mm.
Beneficial effect of the present invention is:
The suction sheet platform cleaning device that the present invention compared with prior art is a kind of simple and practical, easy to use and reliable in structure, operate steadily.Compare with conventional art, evident characteristic of the present invention is: as cleaning main body, be uniform-distribution with dense nylon brush hair with the hairbrush rod on the hairbrush rod, can better must clean inhaling the sheet platform, clean range is wide, cleans well-balanced; Two sparge pipes are installed on the hairbrush cover, and the position of the relative hairbrush rod of each sparge pipe offers dense minor diameter water jet, both can guarantee the pressure of spraying water efficiently to spray again to nylon bristle, sprays effectively, and flow velocity is moderate; The labyrinth seal that sealing ring and gland constitute can waterproof, guarantees the normal operation of bearing simultaneously; Hairbrush cover bottom has discharge sump, makes things convenient for draining.The present invention makes this device compact overall structure owing to adopted the dual structure of hairbrush cover and labyrinth seal to design, and installs simple and easyly, operates also very convenient.
Description of drawings
Fig. 1 is a structure cutaway view of the present invention,
Fig. 2 is a structural representation of the present invention.
Reference numeral: 1-sparge pipe 2-hairbrush cover (also being outer cover) 3-hairbrush rod 4-brush axle 5-sealing ring 6-gland 7-outer ring spacer 8-cone spacer 9-bearing block 10-bearing 11-bearing locking nut 12-end cap 13 bristles.
The specific embodiment
Below in conjunction with accompanying drawing the present invention is done further detailed explanation.
Like accompanying drawing 1, shown in 2; One embodiment of the invention semiconductor manufacturing equipment is with inhaling sheet platform Brush type cleaning device; Mainly form by several parts such as spray system, labyrinth seal system and hairbrush rod systems; Hairbrush rod 3 passes hairbrush cover 2 and is installed on the brush axle 4, is uniform-distribution with dense nylon brush hair 13 on the hairbrush rod 3, can better must clean inhaling the sheet platform; On brush axle 4, be with sealing ring 5, bearing 10, cone spacer 8, outer ring spacer 7, bearing 10, end cap 12, bearing locking nut 11 etc.; Bearing locking nut 11 is fixed on the brush axle 4 through screw thread; Gland 6 is fixed on the bearing block 9 with end cap 12, and two sparge pipes 1 are installed on the hairbrush cover 2.Sealing ring 5 tightly is enclosed within on the brush axle 4, and gland 6 is fixed on the bearing block 9, and the labyrinth seal that sealing ring 5 and gland 6 form can waterproof, guarantees the normal operation of bearing (10).Two sparge pipes 1 are installed on the hairbrush cover 2, and the position of each sparge pipe 1 relative hairbrush rod 3 has dense minor diameter water jet, both can guarantee the pressure of spraying water efficiently to spray again to nylon bristle; Hairbrush cover 2 bottoms have the discharge sump that makes things convenient for draining.
Claims (4)
1. cleaning device of sheet attracting table on semiconductor special equipment is characterized in that: it comprises outer cover (2), hairbrush rod part, running part, labyrinth seal part and spray part; Wherein hairbrush rod part is by hairbrush rod (3) and dense nylon brush hair (13) formation that evenly is laid on the hairbrush rod, and hairbrush rod (3) is arranged in the outer cover (2); Running part comprises brush axle (4), bearing block (9), bearing (10); The through hole that brush axle (4) passes on the outer cover (2) is connected with hairbrush rod (3); Bearing (10) is set to two; Be fixed on and be provided with inside and outside spacer ring (8,7) between bearing block (9) upper bearing (metal), be provided with bearing locking nut (11) in brush axle (4) end, bearing locking nut (11) compresses bearing (10) through being threaded on the brush axle (4); The labyrinth seal part is enclosed within upward supporting gland (6) of brush axle (4) and sealing ring (5) formation by being arranged between bearing block (9) and the outer cover (2), gland (6) is fixed on the bearing block (9), and sealing ring (5) tightly is enclosed within on the brush axle (4); Said spray part is made up of the sparge pipe (1) that is arranged in the outer cover (2), evenly is laid with dense small-bore water jet on the position of the corresponding hairbrush rod of sparge pipe (1) (3), is provided with discharge sump in outer cover (2) bottom.
2. cleaning device of sheet attracting table on semiconductor special equipment according to claim 1 is characterized in that: be provided with end cap (12) in brush axle (4) outer end, end cap (12) is detachably connected on the bearing block (9).
3. cleaning device of sheet attracting table on semiconductor special equipment according to claim 1 is characterized in that: outer cover (2) is provided with two sparge pipes (1), and two sparge pipes lay respectively at the both sides of hairbrush rod (3).
4. cleaning device of sheet attracting table on semiconductor special equipment according to claim 1; It is characterized in that: said hairbrush rod (3) is gone up the nylon brush hair (13) that is provided with; The diameter of its single bristle (13) is 0.32-0.38mm; Hairbrush rod (3) radially is provided with 8-12 bristle, and hairbrush rod (3) axially is provided with 10-14 row bristle, and every row's bristle spacing is 4mm---6mm; The said water jet that is arranged on the sparge pipe (1) is provided with specification and does, the water jet diameter is at 1-1.2mm, and every row is provided with 26 water jets, and every row's spacing is 4-6mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010101835912A CN101869892B (en) | 2010-05-27 | 2010-05-27 | Cleaning device of sheet attracting table on semiconductor special equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010101835912A CN101869892B (en) | 2010-05-27 | 2010-05-27 | Cleaning device of sheet attracting table on semiconductor special equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101869892A CN101869892A (en) | 2010-10-27 |
| CN101869892B true CN101869892B (en) | 2012-08-29 |
Family
ID=42995086
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010101835912A Expired - Fee Related CN101869892B (en) | 2010-05-27 | 2010-05-27 | Cleaning device of sheet attracting table on semiconductor special equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN101869892B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109127510B (en) * | 2018-08-21 | 2020-10-13 | 武汉华星光电技术有限公司 | Brushing device and cleaning equipment |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2429032Y (en) * | 2000-07-21 | 2001-05-09 | 中国科学院植物研究所 | Washing brush with water filling through hollow shaft |
| CN2796405Y (en) * | 2005-05-18 | 2006-07-19 | 杨成迁 | Turnip strip washing machine |
| CN2912837Y (en) * | 2005-12-19 | 2007-06-20 | 林珍如 | Cleaning brush holding device for wafer cleaning equipment |
| CN101409224A (en) * | 2007-10-11 | 2009-04-15 | 细美事有限公司 | Brush assembly and substrate cleaning device having the same |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6666925B2 (en) * | 2000-11-01 | 2003-12-23 | Dynamic Cleaning Technologies Llc | Paint brush cleaning device |
-
2010
- 2010-05-27 CN CN2010101835912A patent/CN101869892B/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2429032Y (en) * | 2000-07-21 | 2001-05-09 | 中国科学院植物研究所 | Washing brush with water filling through hollow shaft |
| CN2796405Y (en) * | 2005-05-18 | 2006-07-19 | 杨成迁 | Turnip strip washing machine |
| CN2912837Y (en) * | 2005-12-19 | 2007-06-20 | 林珍如 | Cleaning brush holding device for wafer cleaning equipment |
| CN101409224A (en) * | 2007-10-11 | 2009-04-15 | 细美事有限公司 | Brush assembly and substrate cleaning device having the same |
Also Published As
| Publication number | Publication date |
|---|---|
| CN101869892A (en) | 2010-10-27 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| ASS | Succession or assignment of patent right |
Owner name: CETC BEIJING ELECTRONIC EQUIPMENT CO., LTD. Free format text: FORMER OWNER: NO.45 INST., CHINA ELECTRONIC SCIENCE AND TECHNOLOGY GROUP CORP. Effective date: 20101214 |
|
| C41 | Transfer of patent application or patent right or utility model | ||
| COR | Change of bibliographic data |
Free format text: CORRECT: ADDRESS; FROM: 065201 NO.20, HAIYOU AVENUE, ECONOMIC DEVELOPMENT ZONE, YANJIAO, SANHE CITY, HEBEI PROVINCE TO: 100176 ROOMA119, NO.18, XIHUAN SOUTH ROAD, ECONOMIC AND TECHNOLOGICAL DEVELOPMENT ZONE, BEIJING |
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| TA01 | Transfer of patent application right |
Effective date of registration: 20101214 Address after: 100176 room All9, No. 18 West South Road, Beijing economic and Technological Development Zone Applicant after: CETC Beijing Electronic Equipment Co., Ltd. Address before: 065201 Hebei Province, Sanhe Yanjiao Economic Development Zone, 20 main street Applicant before: No.45 Inst., China Electronic science and Technology Group Corp. |
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| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20120829 Termination date: 20180527 |