CN101860111B - Motor and electric device using the same - Google Patents

Motor and electric device using the same Download PDF

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Publication number
CN101860111B
CN101860111B CN 201010182914 CN201010182914A CN101860111B CN 101860111 B CN101860111 B CN 101860111B CN 201010182914 CN201010182914 CN 201010182914 CN 201010182914 A CN201010182914 A CN 201010182914A CN 101860111 B CN101860111 B CN 101860111B
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CN
China
Prior art keywords
thrust bearing
hole
motor
fixed axis
shape
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Expired - Fee Related
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CN 201010182914
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Chinese (zh)
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CN101860111A (en
Inventor
藤岛真
小泽健
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Nidec Sankyo Corp
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Nidec Sankyo Corp
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Priority claimed from JP2006107147A external-priority patent/JP4716505B2/en
Priority claimed from JP2006180194A external-priority patent/JP2008008222A/en
Application filed by Nidec Sankyo Corp filed Critical Nidec Sankyo Corp
Publication of CN101860111A publication Critical patent/CN101860111A/en
Application granted granted Critical
Publication of CN101860111B publication Critical patent/CN101860111B/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Abstract

The present invention provides a motor and an electric device using the same. The motor of the invention comprises the following components: a fixed shaft; a housing which supports two ends of the fixed shaft; a radial bearing which is configured relatively to the fixed shaft; and a thrust bearing which bears a thrust force of the radial bearing, wherein the housing is provided with a rotation prevention device of the thrust bearing.

Description

Motor and use the electrical equipment of this motor
The application is dividing an application of application number 200710096853.X, and the applying date of its female case is on April 4th, 2007, and its denomination of invention is pump unit, motor and the electrical equipment that uses this motor.
Technical field
The present invention relates to pump unit, applicable to the motor of this pump unit and the electrical equipment that uses this motor.
Background technology
As pump unit, propose between the lower cover that covers shape and upper cover, to configure dividing plate in the past and divided formation armature chamber and pump chamber, in armature chamber, configure on the one hand stator, the rotor configuration (with reference to patent documentation 1) in pump chamber that will be formed by pump impeller and drive magnet on the other hand.
In addition, proposition after dividing plate also forms as one, overlaps cover on the dividing plate when utilizing the moulded resin body with seal stator, division is formed with pump chamber between dividing plate and cover, and disposes the rotor (with reference to patent documentation 2) that is integrally formed into by pump impeller and drive magnet in pump chamber.
In addition, but said pump device example as having fixed axis as the motor of axle.This motor with fixed axis can be used in various electrical equipments, to send pump that discharge rate controls as its typical example (with reference to patent documentation 3) to liquid equal pressure fluid (for example liquid).In the pump shown in the patent documentation 3, as shown in figure 12, have the motor 150 and fixed axis 108 relative configurations of fixed axis 108, comprising: rotatable radial bearing 120 and bear the thrust bearing 109,110 of the thrust of this radial bearing 120.
Thrust bearing 109,110 is supported by cover 103 or shell 107 respectively, can slide at the end face of the axial formation of radial bearing 120.Therefore, thrust bearing 109,110 can bear the thrust that does not live radial bearing 120 and move in the circumferential direction of the circle with the rotation of radial bearing 120 sometimes.
Therefore, at the two ends of fixed axis 108, as shown in figure 13, be formed with tangent plane 108a, the 108b of D type in the part of periphery wall.Similarly, thrust bearing 109,110 has been formed centrally therein as illustrated in fig. 13 D and has cut hole 109a, 110a, and these Kong Zaiyu are formed under the state of D tangent plane 108a, 108b engaging at fixed axis 108 two ends and connect for the two ends of fixed axis 108.Thereby prevent that thrust bearing 109,110 from rotating.
And, thrust bearing 109,110 D are cut hole 109a, 110a form and support fixed axis 108 and make its shape that can not rotate and size, and D cuts, and hole 109a, 110a are punched to the D tangent plane 108a of fixed axis 108,108b is identical shaped and engage under the state of being close to as far as possible fixed axis 108 is not shaken.
Patent documentation 1: Japanese Patent Laid-Open 2005-73325 communique
Patent documentation 2: Japanese Patent Laid-Open 2005-48675 communique
Patent documentation 3: Japanese Patent Laid-Open 2001-123996 communique
Yet, in the pump unit shown in the patent documentation 1,2, owing to adopting the structure of configuration dividing plate between the lower cover that covers shape and upper cover, or adopt the structure when utilizing the moulded resin body with seal stator, dividing plate is formed as one, therefore both need dividing plate is prepared as a part, thereby number of spare parts is increased, cause cost to improve.In addition, no matter adopt the arbitrary structure in the patent documentation 1,2, all adopt the formed products of the thermoplastic resin such as PPS resin as dividing plate, yet the restriction of this type of resin forming product when being shaped must form suitable thickness.Therefore, between stator and drive magnet across equate with block board thickness at least than broad gap, cause the inefficient problem of magnetic circuit.
In addition, pump 100 shown in the patent documentation 3 is employed to have in the motor 150 of fixed axis 108, is formed with the fixed axis 108 of D tangent plane 108a, 108b and is formed with the thrust bearing 109,110 that D cuts hole 109a, 110a must keep higher assembly precision for preventing that axle from shaking.Therefore, must make each part have higher machining accuracy, cause consuming process time more problem.
Therefore and the pottery of difficulty or stainless steel can make as material that the flow chart that forms D tangent plane 108a, 108b increases, the cost of parts of fixed axis 108 improves because fixed axis 108 is with hard, following process.
In addition, pump shown in the patent documentation 3 100 is employed to have in the motor 150 of fixed axis 108, is formed with on the thrust bearing 109,110 to prevent that it from cutting hole 109a, 110a with D that radial bearing 120 rotates.That is to say that the thrust of the radial bearing 120 that thrust bearing 109,110 is rotated, and be subject to counter-force from fixed axis 108 has 2 above-mentioned power than concentrating on the thin and little thrust bearing 109,110 of radial bearing 120 and fixed axis 108.Therefore, can make thrust bearing 109,110 the lost of life.
In view of above problem, the first technical problem to be solved by this invention provides a kind of pump unit that reduces number of spare parts and improve the efficient of magnetic circuit by the electromagnetic combination between raising stator and drive magnet.
In addition, the second technical problem to be solved by this invention provides the motor of a kind of machining accuracy that improves each part and assembly precision and uses the electrical equipment of this motor.This motor can be used in the pump unit of the first technical problem, and one of electrical equipment that uses this motor is pump unit.
Summary of the invention
For solving above-mentioned the first technical problem, in the pump unit of the present invention, comprising: have drive coil and supply the stator of the stator core of this drive coil coiling; Cover the shell of this stator; And divide the cover that is formed with pump chamber between this shell; And be configured in the described pump chamber, have the drive magnet that relatively configures with described stator core and the rotor of the pump impeller that rotates with this drive magnet with being integral, it is characterized in that, described shell is made of the moulded resin body that covers described drive coil and described stator core, divides the separator face that is formed with described pump chamber between the wall formation of this moulded resin body and described cover.
Among the present invention, division is formed with pump chamber between the moulded resin body of covering stator and cover, divides the separator face that is formed with pump chamber between the wall of moulded resin body self formation and cover.Thereby need not to consist of dividing plate by other parts, can reduce number of spare parts, thereby realize cost degradation.In addition, be folded with the part of moulded resin body between stator and drive magnet, shared part is from different, considerably thin as the dividing plate that other part forms by ester moulding.Stator and drive magnet are approached, thereby improve the efficient of magnetic circuit.
In the pump unit of the present invention, preferably make the described separator face side on the described moulded resin body be formed with the 1st axis hole, and position relative with described the 1st axis hole on the described cover is formed with the 2nd axis hole, dispose both ends in the described pump chamber and remain on fixed axis in described the 1st axis hole and described the 2nd axis hole, described rotor can be supported rotatably around described fixed axis.If the employing said structure then is different from axle rotary-type, need not to form radial bearing etc. at the moulded resin body, therefore can simplify the structure of moulded resin body.
In the pump unit of the present invention, described moulded resin body has to the recess of the opposition side depression of described pump chamber in described separator face side, described stator forms and surrounds described recess ring-type on every side, makes the described drive magnet of described rotor relative with described stator in described recess.
In the pump unit of the present invention, preferably make described stator by carrying out the resin molded inside that is sealed in described moulded resin body.Therefore if the employing said structure, then the fixed position of the stator core of configuration relative to drive magnet can not misplace, and can accurately guarantee the relative position with drive magnet, thereby further improves the efficient of magnetic circuit.
In the pump unit of the present invention, preferably make described cover cover described recess and surround described recess described wall the upper surface be fixed on the described moulded resin body, and described moulded resin body disposes endless member in being formed at the ditch section of described upper surface.If the employing said structure then can be guaranteed the seal between cover and moulded resin body, can guarantee to be divided by cover and moulded resin body the seal of the pump chamber that forms.
In the pump unit of the present invention, described moulded resin body preferably adopts thermoset resin material.If the employing said structure then is different from thermoplastic resin, can make the part that is located between stator and drive magnet of moulded resin body form thinlyyer, therefore can improve the efficient of magnetic circuit.In addition, if the employing thermosetting resin then can consist of the moulded resin body by the resin material that the BMC take unsaturated polyester resin as main component (Bulk Molding Compound) etc. has good heat resistance, atmospheric corrosion resistance, chemical resistance and an insulating properties.In addition, because the thermoset resin materials such as BMC almost do not shrink (shrinkage is roughly 0) when being shaped, therefore can consist of the moulded resin body by high dimensional accuracy.And even under high temperature, high humidity environment, the moulded resin body that is made of BMC also has good dimensional stability.Thus, for example: even flow in pump chamber when high temperature fluid is arranged, the size that consists of the moulded resin body of pump chamber also is difficult for changing, therefore the size of pump chamber also is difficult for changing.Therefore, can suppress the characteristic variations of the pump unit that the change in size because of pump chamber causes, so that the characteristic of pump unit is not suffered a loss.
In addition, for solving above-mentioned the second technical problem, motor of the present invention is characterised in that, comprising: fixed axis; Support the shell at the two ends of described fixed axis; Relatively configure and rotatable radial bearing with described fixed axis; Bear the thrust bearing of the thrust of this radial bearing, be formed with the anti-rotation device of described thrust bearing on the described shell.
Utilize motor of the present invention, can prevent reliably that thrust bearing from rotating with respect to shell, and improve machining accuracy and the assembly precision thereof of each part.
And in the motor of the invention described above, described anti-rotation device is the hole of non-circular shape preferably, and the non-circular shape that preferably engages with the hole of described non-circular shape of the peripheral shape of described thrust bearing.Thus, can prevent from reliably rotating by simple processing, improve the machining accuracy of each part such as shell and thrust bearing, and improve assembly precision.
In the motor of the present invention, described non-circular shape can be that the part of the periphery of described thrust bearing is cut off formed D section configuration, better, described D section configuration is that 2 places along on the relative periphery of radial direction with described thrust bearing cut off formed shape.In addition, described anti-rotation device can be the hole that the part has the non-circular shape of protuberance, and the peripheral shape of described thrust bearing is the non-circular shape that is formed with the recess that engages with described protuberance, at this moment, described protuberance preferably from the periphery in the hole of described non-circular shape inwardly week the outstanding protruding wall of engaging.
In addition, among the present invention, described fixed axis preferably has the bayonet unit that engages with described shell.Thus, fixed axis is not subjected to the impact of thrust bearing machining accuracy, can be buckled on the shell reliably.
In the motor of the present invention, preferably make on the described fixed axis and to be formed with buckle along the direction perpendicular to rotation and to use the hole, and described buckle is with the steady pin that is inserted with in the hole as described bayonet unit, and, be preferably formed as the support portion with the chimeric ditch shape of described steady pin on the described shell.
In addition, electrical equipment of the present invention is characterised in that to have described motor.Thus, the present invention can provide a kind of electrical equipment, and the motor of its use can prevent reliably that thrust bearing from rotating with respect to shell, and keeps the machining accuracy of fixed axis, improves the assembly precision between its each parts.
And electrical equipment of the present invention preferably has pump chamber, and this pump chamber disposes impeller in a side that forms the stream that passes through for fluid.Thus, the present invention can provide a kind of electrical equipment as pump unit, and the motor of its use can prevent reliably that thrust bearing from rotating with respect to shell, and keeps the machining accuracy of fixed axis, improves the assembly precision between its each parts.
Utilize the pump unit of the first invention, division is formed with pump chamber between moulded resin body and cover, need not to use other parts as dividing plate, therefore can reduce number of spare parts, realizes cost degradation.In addition, be folded with the part of moulded resin body between stator and drive magnet, shared part is different, considerably thin from the dividing plate that forms by ester moulding, and stator and drive magnet are approached, and therefore can improve the efficient of magnetic circuit.
In addition, utilize the motor of the second invention and use the electrical equipment of this motor, can prevent reliably that thrust bearing from rotating with respect to shell, and improve machining accuracy and the assembly precision thereof of each part.
Description of drawings
Fig. 1 is the key diagram that the cross-section structure of pump unit of the present invention has been used in expression.
Fig. 2 is the exploded view of pump unit shown in Figure 1.
(A) of Fig. 3, (B) are respectively the transverse sectional view of stator shown in Figure 1, and the stereogram of the structure of expression coil-winding pipe and stator core.
Fig. 4 is the cutaway view of the electrical equipment of the motor of the use of one embodiment of the present invention with fixed axis.
Fig. 5 is the vertical view as the inner shell of the shell that consists of electrical equipment shown in Figure 1.
Fig. 6 is the upward view as the outer enclosure of the shell that consists of electrical equipment shown in Figure 1.
Fig. 7 is with the fixed axis biopsy cavity marker devices of one embodiment of the present invention illustrated front view in addition.
Fig. 8 is the vertical view of the thrust bearing of one embodiment of the present invention.
Fig. 9 is the exploded perspective view of major part of the electrical equipment of the motor of the use of one embodiment of the present invention with fixed axis.
Figure 10 is the exploded perspective view of major part of the electrical equipment of the motor of the use of the embodiment of the invention 2 with fixed axis.
Figure 11 is the exploded perspective view of major part of the electrical equipment of the motor of the use of the embodiment of the invention 3 with fixed axis.
Figure 12 is in the past as the cutaway view of the pump of electrical equipment.
Figure 13 is the exploded perspective view of the major part in the pump shown in Figure 12.
(symbol description)
1000 motors, 3000 stators
4000 rotors, 6000 pump chambers
3600 stator cores of 1100 pump units
3300 drive coils, 3500 fixed axis
4000 pump impellers, 5100 moulded resin bodies (shell)
5200 separator face 5200e recesses
Side walls 5300 covers of 5200f recess
1 electrical equipment, 2 covers
3 inner shell (shell) 3g thrust bearing holes (anti-rotation device)
3i, 3j wall section 3h support portion (bayonet unit)
4 armature chambers, 5 stator departments
7 outer enclosure 7e thrust bearing holes (anti-rotation device)
7f, 7g wall section 9,10 thrust bearings
9b, 9c, 10b, 10c cutting portion (anti-rotation device) 11 rotor portions
20 sleeves (radial bearing), 21 centrifugal fans (pump impeller, diffuser) (impeller) 41 steady pins (bayonet unit)
50 motors, 51 pumps (pump chamber)
Embodiment
Below, describe having used pump unit of the present invention and manufacture method thereof with reference to accompanying drawing.In addition, the first execution mode is the explanation that the first invention is carried out.
(the first execution mode)
(overall structure of pump unit)
Fig. 1 and Fig. 2 are the key diagrams that expression is equiped with the cross-section structure of the pump unit of having used motor of the present invention, and exploded view.
The pump unit 1100 of Figure 1 and Figure 2 is the pump unit that is commonly referred to the type of canned pump, in keep Give Electricity with KURA type brushless motor (hereinafter referred to as motor 1000) in the basic plate.
The outline of the pump unit 1100 of present embodiment is formed by the cover 5300 on the top of the moulded resin body 5100 that covers shape and Overmolded resinite 5100, and this moulded resin body 5100 is as the shell that covers following stator 3000.Form respectively porosely 5110,5310 on moulded resin body 5100 and the cover 5300, utilize these holes 5110,5310 general bolt 1500 is fixing, thereby moulded resin body 5100 and cover 5300 are formed as one.
At this, be formed with pump chamber 6000 at moulded resin body 5100 and 5300 divisions of cover.That is to say, in the present embodiment, the wall of moulded resin body 5100 self formation and 5300 divisions of cover are formed with the separator face 5200 of pump chamber 6000.
Moulded resin body 5100 is formed with to the recess 5200e of the opposition side depression of pump chamber 6000 at the central portion of its separator face 5200, is concentric shape ground with recess 5200e and is formed with the 5200h of ditch section on the upper surface 5200g of the encirclement recess 5200e of moulded resin body 5100.The internal configurations of the 5200h of ditch section has zero ring 1200 as endless member, utilizes this zero ring 1200 can guarantee the seal of 5100 of cover 5300 and moulded resin bodies, can guarantee the seal of pump chamber 6000.Zero ring 1200 be such as can being formed by rubber or soft resin etc., yet in the present embodiment, is not limited to these materials, so long as can guarantee that the material of the seal of 5100 of cover 5300 and moulded resin bodies can.
Cover 5300 is the lid shape of lower aperture, is formed with the importing oral area 5500 that is opened in the top and the discharge oral area 5600 that is opened in the side.Thus, in pump chamber 6000, be formed with the stream 5700 that makes fluid flow to discharge oral area 5600 from importing oral area 5500, dispose the resinous pump impeller 4000 as impeller in the stream 5700.By making these pump impeller 4000 High Rotation Speeds make pump chamber 6000 interior formation negative pressure, thus, can from importing oral area 5500 to fluids such as pump chamber 6000 interior attraction warm water, this fluid be discharged from discharging oral area 5600.
(structure of motor)
The motor 1000 of present embodiment comprises: stator 3000, rotor 4000 and power supply substrate 2000.In this motor 1000, be formed with the 1st axis hole 5200b on the bottom surface 5200a of the recess 5200e of moulded resin body 5100, position relative with the 1st axis hole 5200b on the cover 5300 is formed with the 2nd axis hole 5300a, the two axial ends of fixed axis 3500 is subject to the support of the 1st axis hole 5200b and the 2nd axis hole 5300a, and fixed axis 3500 is the configuration of coaxial shape ground with importing oral area 5500.Following rotor 4000 can be supported rotatably around fixed axis 3500, maintains the bearing 3700,3800 with respect to rotor 4000 on the fixed axis 3500.
Stator 3000 comprises: the stator core 3600 that is consisted of by the laminate core of ring-type, and be wound on drive coil 3300 in the stator core 3600.Drive coil 3300 forms by coil windings 3100 is wound on the resinous coil-winding pipe 3200.Be extruded with 2 binding posts 3400 from coil-winding pipe 3200 to motor axis direction L, and reel each winding overhang (end of coil windings 3100) of finishing initial with the coiling of drive coil 3300 is connected.In addition, near stator 3000, with 30 ° of arranged spaced a plurality of magnetic force detecting units 4500 are arranged in the inboard of drive coil 3300, these magnetic force detecting units 4500 are for detection of the position of rotation of drive magnet 4200.
Power supply is with being formed with the confession hole run through of binding post 3400 or the section of running through that is made of slit on the substrate 2000, and is formed with multiple wiring diagram and terminal pad section.Thus, will power with substrate 2000 during with the 3200 relative configuration of coil-winding pipe, owing to binding post 3400 runs through the usefulness substrate 2000 of powering, so binding post 3400 can be connected with terminal pad section.In addition, power supply is with being formed with through hole that confession passes through from magnetic force detecting unit 4500 extended wires 4600 on the substrate 2000 and with respect to terminal pad section and the wiring diagram of wire 4600.And power supply drives the drive circuit (not shown) of controlling stator 3000 with being equipped with on the substrate 2000, and the power connector 7200 of accepting from the electric power of power supply is installed.
Thereby adopt the stator 3000 of said structure and power supply to carry out the resin molded inside that is sealed in moulded resin body 5100 with substrate 2000 by inlaying to be shaped, surround the recess 5200e that is formed on this moulded resin body 5100 and dispose peripherally stator 3000.At this, the side walls 5200f of recess 5200e is positioned at all sides of stator 3000, and this side walls 5200f as thin as a wafer.
Rotor 4000 is configured in the pump chamber 6000, have the sleeve-shaped that can be supported rotationally around fixed axis 3500 radial bearing 4100 and with the drive magnet 4200 of stator core 3000 relative configurations.Radial bearing 4100 is folded with resinous pump impeller 4000 ground with drive magnet 4200 and links, and can rotate with being integral.Drive magnet 4200 is to make the in a circumferential direction permanent magnet cylindraceous of alternating magnetization of the N utmost point and the S utmost point, in the inboard of the recess 5200e of moulded resin body 5100, the side walls 5200f ground across moulded resin body 5100 on respect to the radial direction inboard of stator 3000 is relative.
(detailed structure of stator and coil-winding pipe)
(A) of Fig. 3, (B) are respectively the transverse sectional view of having used the employed stator of motor of the present invention, and the stereogram of the structure of expression coil-winding pipe and stator core.
The stator core 3600 of using in the stator 3000 is duplexers of ferromagnetism plate, shown in Fig. 3 (A), in the circumferential direction of the circle equidistantly to be formed with 12 outstanding salient pole 3600a of (center) to the inside from the annulus 3600c of the stator core 3600 of ring-type.Thus, shown in Fig. 3 (B), by each salient pole 3600a is inserted in the coiling pore 3200a of the coil-winding pipe 3200 that is wound with coil windings 3100, thereby drive coil 3300 is respectively installed on each salient pole 3600a of stator core 3600.Be extruded with 2 binding posts 3400 to motor axis direction L on the coil-winding pipe 3200, coil windings 3100 is being wound in the operation of coil-winding pipe 3200, winding overhang 3900a, the 3900b coiling of coil windings 3100 is initial and the end of reeling are wound in the foundation side of binding post 3400, and transfer to the assembling procedure of following motor 1000.
At this, drive coil 3300 belongs to any one in 3 phases (U, V, W phase) for example, Fig. 3 (A) expression is consisted of the U phase, is consisted of the V phase, is made of the appearance of W phase drive coil group 3300W by drive coil group 3300V by drive coil group 3300U respectively, drive coil group 3300U comprises 4 drive coil 3300Ua, 3300Ub, 3300Uc, 3300Ud, drive coil group 3300V comprises 4 drive coil 3300Va, 3300Vb, 3300Vc, 3300Vd, and drive coil group 3300W comprises 4 drive coil 3300Wa, 3300Wb, 3300Wc, 3300Wd.Each drive coil 3300 that consists of U, V, W phase is along the circumferencial direction of stator core 3600 successively repeated configuration.In addition, reel and connect these drive coils 3300Ua, 3300Ub, 3300Uc, 3300Ud to equidirectional, so that to the drive coil 3300Ua, the 3300Ub that consist of drive coil group 3300U, 3300Uc, when 3300Ud switches on, the magnetic pole that these drive coils 3300Ua, 3300Ub, 3300Uc, 3300Ud produce at each salient pole 3600a all is homopolarity.Similarly, drive coil 3300Wa, the 3300Wb, 3300Wc, the 3300Wd that consist of drive coil 3300Va, 3300Vb, 3300Vc, 3300Vd and the formation drive coil group 3300W of drive coil group 3300V also reel and connection to equidirectional.Successively these coils of transfer pair group switch on producing rotating magnetic field, thereby make rotor 4000 rotation around fixed axis 3500.
(diagrammatic illustration of the manufacture method of motor and pump unit)
Make this type of pump unit 1100, at first, shown in Fig. 3 (B), coil windings 3100 is wound on consists of drive coil 3300 on the coil-winding pipe 3200.At this moment, winding overhang 3900a, the 3900b coiling of coil windings 3100 is initial and the end of reeling are wound in the foundation side of binding post 3400.At this moment, also can winding overhang 3900a, the 3900b of coil windings 3100 be fixed in binding post 3400 by soldering.
Then, shown in Fig. 3 (A), (B), with respect to the salient pole 3600a of stator core 3600 coil-winding pipe 3200 is installed.
Then, as shown in Figures 1 and 2, will power with substrate 2000 and stator core 3600 and the 3200 relative configurations of coil-winding pipe.Therefore, binding post 3400 is in and runs through the state that power supply is also given prominence to the breakthrough part of substrate 2000 that is formed at.Then, after winding overhang 3900a, the 3900b that is wrapped in the drive coil 3300 on the binding post 3400 drawn with the top of substrate 2000 to power supply, by soldering winding overhang 3900a, 3900b are connected with the terminal pad section of power supply with substrate 2000.At this moment, binding post 3400 from power supply with substrate 2000 upward outstanding part also carry out soldering, making powers remains on the binding post 3400 with substrate 2000.So far, configuration of magnetic force detecting unit 4500 etc. finishes.Thus, assembling and the distribution of stator 3000 have been finished.
Then, stator 3000 and power supply are inlayed shaping with substrate 2000, and stator 3000 and power supply are utilized 5100 sealings of moulded resin body with substrate 2000.Particularly, stator 3000 is configured in the metal die, utilizes thermoset resin material BMC (Bulk Molding Compound) to inlay shaping.Therefore, stator 3000 and power supply can be sealed in the inside of moulded resin body 5100 with substrate 2000.BMC is with strengthening agent and filler, and the resin material that forms of the stirring such as catalyst after prescinding take unsaturated polyester resin as main component and with glass fibre.
Then, be equipped with under the state of thrust bearing 3700 at the base end side of fixed axis 3500, the base end side of fixed axis 3500 is embedded in the 1st axis hole 5200b of the bottom surface 5200a that is formed at recess 5200e.Then, radial bearing 4100 and drive magnet 4200 are folded with pump impeller 4000 ground and are integrally formed rotor 4000, after this rotor 4000 is installed to fixed axis 3500, thrust bearing 3800 are installed on the fixed axis 3500.
Then, cover 5300 is overlapped on the moulded resin body 5100 after being installed in O ring 1200 in the 5200h of ditch section, and the leading section of fixed axis 3500 is embedded in the 2nd axis hole 5300a that is formed on the cover 5300.Then utilize bolt 1500 that moulded resin body 5100 and cover 5300 are become one.Finish thus pump unit 1100.
(the main effect of the first execution mode)
As mentioned above, in the present embodiment, the shell of covering stator 3000 is made of moulded resin body 5100, and the wall of this moulded resin body 5100 self formation and 5300 divisions of cover are formed with the separator face 5200 of pump chamber 6000.Therefore, need not to consist of dividing plate by other parts, can reduce number of spare parts, thereby realize cost degradation.In addition, 4200 of stator 3000 and drive magnets are folded with the part (the side walls 5200f of recess 5200e) of moulded resin body 5100, and shared part is from different, considerably thin as the dividing plate that other part forms by ester moulding.Stator 3000 and drive magnet 4200 are closer configured, thereby improve the efficient of magnetic circuit.
In addition, because stator 3000 is by the resin molded inside that is sealed in moulded resin body 5100, therefore the fixed position of stator core 3600 can not misplace, can accurately guarantee and the relative position of drive magnet 4200, this drive magnet 4200 is across the side wall portion 5200f and stator core 3600 relative configurations of separator face 5200.In addition, only need mobile drive magnet 4200 sides get final product in the time of being set in the higher position of magnetic circuit efficient, so compare with pump unit in the past, more easily guarantee the positional precision of magnetic circuit.
In addition, in the present embodiment, rotor 4000 uses the motor 1000 of the axle fixation side that can be supported rotatably around fixed axis 3500, therefore is different from the rotary-type motor of axle, need not to form radial bearing etc. at moulded resin body 5100, therefore can simplify the structure of moulded resin body 5100.
And, in the present embodiment, use thermoset resin material as the resin material that consists of moulded resin body 5100, therefore be different from thermoplastic resin, can make the side wall portion 5200f that is located in 4200 of stator 3000 and drive magnets of moulded resin body 5100 form thinlyyer, therefore can improve the efficient of magnetic circuit.Especially in the present embodiment, adopt the BMC (Bulk Molding Compound) take unsaturated polyester resin as main component in the thermoset resin material, therefore can consist of moulded resin body 5100 by the resin material with good heat resistance, atmospheric corrosion resistance, chemical resistance and insulating properties.In addition, because the thermoset resin materials such as BMC almost do not shrink (shrinkage is roughly 0) when being shaped, therefore can consist of moulded resin body 5100 by high dimensional accuracy.And even under high temperature, high humidity environment, the moulded resin body 5100 that is made of BMC also has good dimensional stability.Thus, for example: even flow when high temperature fluid is arranged pump chamber 6000 is interior, the size that consists of the moulded resin body 5100 of pump chamber 6000 also is difficult for changing, therefore the size of pump chamber 6000 also is difficult for changing.Therefore, can suppress the characteristic variations of the pump unit 1100 that the change in size because of pump chamber 6000 causes, so that the characteristic of pump unit 1100 is not suffered a loss.
(the second execution mode)
Below, the preferred forms shown in reference to the accompanying drawings is elaborated to structure of the present invention.In addition, the second execution mode is the explanation that the second invention is carried out.And motor of the present invention has more than and is defined in pump unit, but in the present embodiment, electrical equipment is described as pump unit.
(overall structure)
Fig. 4 is the cutaway view of the electrical equipment of the motor of the use of one embodiment of the present invention with fixed axis.Fig. 5 is the vertical view as the inner shell of the shell that consists of electrical equipment shown in Figure 4, Fig. 6 is the upward view as the outer enclosure of the shell that consists of electrical equipment shown in Figure 4, Fig. 7 is with the fixed axis biopsy cavity marker devices of one embodiment of the present invention illustrated front view in addition, Fig. 8 is the vertical view of the thrust bearing of one embodiment of the present invention, and Fig. 9 is the exploded perspective view of major part.
In the present embodiment, electrical equipment 1 mainly consists of by motor 50 with as the pump 51 of pump chamber, and this motor 50 and pump 51 are incorporated in the space that outer enclosure 7 and cover 2 surround.
Pump 51 comprises as shown in Figure 4: introducing port 16 and the outlet 17 of pressure fluid (for example liquid); Be formed on from introducing port 16 to outlet the negative pressure chamber 19 of the middle part of 17 fluid path 18; As the centrifugal fan 21 at the impeller of negative pressure chamber's 19 interior rotations.
Centrifugal fan 21 is High Rotation Speed along with the rotation of the rotor portions 11 of a part that consists of motor 50, thereby negative pressure chamber's 19 interior formation negative pressure are sucked fluid from introducing port 16 after, this fluid is discharged from outlet 17 via fluid path 18.
And, in the present embodiment, dispose the rotor portions 11 that consists of motor 50 in the negative pressure chamber 19.
(structure of motor)
In Fig. 4, motor 50 is made of stator department 5 and rotor portions 11, and rotor portions 11 comprises: as the sleeve 20 of the pottery system of radial bearing; Rotor magnet (permanent magnet) 22 with stator core 13 relative configurations; Be folded in the resinous centrifugal fan (comprising pump impeller and diffuser) 21 of 22 of sleeve 20 and rotor magnets.
Utilize the magnetic force of this rotor magnet 22 to make rotor portions 11 to the direction of rotation rotation of regulation with the electric current that flows through winding 15 according to Fleming's left hand rule.
Stator department 5 mainly is located at winding 15 in the stator core 13 by fixed axis 8, the thrust bearing 9,10 that is configured in fixed axis 8 both end sides, stator core 13 and by bobbin 14 volumes.
Fixed axis 8 is configured in the hollow cylinder of sleeve 20 as shown in Figure 4, and sleeve 20 slides and rotation at the outer peripheral face of fixed axis 8.
Fixed axis 8 is made and forms cylindric by pottery or the stainless steel of hard.In addition, fixed axis 8 as shown in Figure 7, its lower end side is formed with the buckle hole 8a that the vertical direction to rotation passed through for rotation runs through.This buckle is with the steady pin 41 that is penetrated with among the 8a of hole as the axle shape of bayonet unit.In addition, because buckle is simple through hole with hole 8a, even the therefore fixed axis 8 of the ceramic or stainless steel of hard for example also can easily utilize metal die to process.
In addition, one distolateral (upper end side of Fig. 4) of fixed axis 8 supported by outer enclosure 7, and its another distolateral (lower end side of Fig. 4) supported by inner shell 3.In addition, outer enclosure 7 consists of shell with inner shell 3.
In addition, in the present embodiment, as shown in Figure 4, inner shell 3 will be the open end sealing of the cover 2 that the round-ended cylinder shape is roughly arranged, and be formed with armature chamber 4 in the space that inner shell 3 and cover 2 form.
In addition, dispose drive circuit and the control circuit of CD-ROM drive motor 50 in the armature chamber 4, yet not shown at this, description will be omitted.
Inner shell 3 as shown in Figure 5, by being positioned at the 3a of round-ended cylinder section is arranged and being positioned at this and having the flange part 3b of the open ora terminalis of the 3a of round-ended cylinder section to be integrally formed into of armature chamber 4 inside.In addition, have the diapire central authorities of the 3a of round-ended cylinder section to be formed with the 3d of pedestal section, the 3d of this pedestal section is positioned on the same axle of fixed axis 8 and is formed with the axle supported hole 3c of an end that supports fixed axis 8.And, be formed with the through hole 3e that runs through for construction bolt 6 on the flange part 3b.In addition, be formed with annular groove 3f on the flange part 3b, insert in this annular groove 3f useful to guarantee and the ring-type liner 12 of the seal of 7 of outer enclosure.
Outer enclosure 7 wherein is formed centrally introducing port 16 and the outlet 17 of pressure fluid (being liquid at this) as shown in Figure 6.In addition, outer enclosure 7 and inner shell 3 form jointly from introducing port 16 to outlet 17 fluid path 18, and therein way section formation negative pressure chamber 19.And outer enclosure 7 is formed with the through hole 7a of construction bolt 6.In addition, externally be formed with the spiral helicine wall 7b that is used to form fluid path 18 on the shell 7.And, be formed with the axle supported hole 7d that is the circular shape at vertical view on the 7c of foot that extends to the center of outer enclosure 7.The center of this axle supported hole 7d is formed on the same axle of introducing port 16.
Cover 2 corresponding application targets (environment for use) are made of the metals such as the aluminium with rust-preventing characteristic or resin, are formed with the screw 2a that screws togather with construction bolt 6.
In addition, pump 51 is commonly referred to canned pump, as shown in Figure 4, in the space that cover 2 and inner shell 3 are surrounded, be formed with armature chamber 4, dispose the stator core 13 of the stator department 5 that consists of motor 50 in the armature chamber 4 and be located at winding 15 in the stator core 13 by bobbin 14 volumes.And, in the space that inner shell 3 and outer enclosure 7 are surrounded, dispose rotor portions 11 and the connected pump 51 (pump chamber) of motor 50, wherein dispose sleeve 20, rotor magnet 22 and resinous centrifugal fan (comprising pump impeller and diffuser) 21.
(anti-rotation device of thrust bearing)
Thrust bearing 9 (10) wherein is formed centrally the round-shaped axle through hole 9a (10a) that runs through for fixed axis 8 as shown in Figure 8.In addition, the profile of thrust bearing 9 (10) is non-circular shape, in the present embodiment, as shown in Figure 9, cutting portion 9b, 9c (10b, 10c) that 2 places of its periphery are cut off to form as anti-rotation device, form substantially elliptical at front view.
Thrust bearing 9 is chimeric with the axle supported hole 3c of the 3d of pedestal section that is formed at inner shell 3.
Particularly, the axle supported hole 3c that is formed at the 3d of pedestal section is in the end face upper shed of the 3d of pedestal section and be formed to the short transverse middle part of the 3d of pedestal section.In addition, the upper periphery ground that surrounds axle supported hole 3c of the 3d of pedestal section is formed with the thrust bearing hole 3g at the shallow concavity of the thickness of the end face upper shed of the 3d of pedestal section and specific thrust bearing 9.Thrust bearing hole 3g is the hole of non-circular shape, is roughly the same shape and size with the profile of chimeric thrust bearing 9.And, being formed with the 3j of wall section, 3i in the 3g of thrust bearing hole, the shape of the 3j of this wall section, 3i is with roughly the same with the section shape of cutting portion 9b, the 9c of 2 D of place tangent plane shapes of the periphery of thrust bearing 9.
In addition, be formed with the support portion 3h as the ditch shape of bayonet unit on the 3d of pedestal section, this support portion 3h is towards the end face opening of the 3d of pedestal section and be positioned at the inboard of thrust bearing hole 3g and across axle supported hole 3c.This support portion 3h forms to such an extent that specific thrust dead eye 3g is deeply shallow than axle supported hole 3c.
Outer enclosure 7 is formed with the axle supported hole 7d that is the circular shape at vertical view at the 7c of foot that extends to its center as shown in Figure 6.The upper periphery ground that surrounds axle supported hole 7d of the 7c of foot is formed with the thrust bearing hole 7e at the shallow concavity of the thickness of the end face upper shed of the 7c of foot and specific thrust bearing 10.Thrust bearing hole 7e is the hole of non-circular shape, is roughly the same shape and size with the profile of chimeric thrust bearing 10.And, being formed with the 7f of wall section, 7g in the 7e of thrust bearing hole, the shape of the 7f of this wall section, 7g is with roughly the same with the section shape of cutting portion 10b, the 10c of 2 D of place tangent plane shapes of the periphery of thrust bearing 10.
Next, the assemble method of fixed axis 8, thrust bearing 9,10, inner shell 3 and outer enclosure 7 described.
At first, as shown in Figure 9, the buckle of fixed axis 8 is with inserting and be connected with steady pin 41 in the 8a of hole.Then, thrust bearing 9 is enclosed within on the fixed axis 8, and with steady pin 41 butts.
Under this state, fixed axis 8 inserted in the axle supported hole 3c on the 3d of pedestal section that is formed on inner shell 3.Thus, as shown in Figure 4, when steady pin 41 (bayonet unit) was chimeric with the support portion 3h (bayonet unit) of ditch shape, thrust bearing 9 was chimeric with thrust bearing hole 3g.That is to say, cutting portion 9b, the 9c and the thrust bearing hole 3g that are formed on the thrust bearing 9 are chimeric.Thus, cutting portion 9b, the 9c that is formed on the D tangent plane shape on the thrust bearing 9 is relative with the 3j of wall section, 3i in being formed at thrust bearing hole 3g, so that thrust bearing 9 can't move in the circumferential direction of the circle.That is to say, thrust bearing 9 has anti-rotating function.
In addition, when thrust bearing 9 is chimeric with thrust bearing hole 3g, can utilize adhesive etc. to carry out temporary fixed.Like this, when assembling operation, can prevent that thrust bearing 9 from extracting in the 3g of thrust bearing hole.
Similarly, thrust bearing 10 is chimeric with the thrust bearing hole 7e that is formed on the outer enclosure 7.That is to say, cutting portion 10b, the 10c and the thrust bearing hole 7e that are formed on the thrust bearing 10 are chimeric.Thus, cutting portion 10b, the 10c that is formed on the D tangent plane shape on the thrust bearing 10 is relative with the 7f of wall section, 7g in being formed at thrust bearing hole 7e, so that thrust bearing 10 can't move in the circumferential direction of the circle.That is to say, thrust bearing 10 has anti-rotating function.In addition, when thrust bearing 10 is chimeric with thrust bearing hole 7e, can utilize adhesive etc. to carry out temporary fixed.Like this, when assembling operation, can prevent that thrust bearing 10 from extracting in the 7e of thrust bearing hole.
After in the 3c of pedestal section that fixed axis 8 is installed to inner shell 3, the rotor portions 11 of motor 50 is enclosed within on the fixed axis 8.Particularly, make fixed axis 8 be applied in hollow as the centre of the sleeve 20 of radial bearing in.After fixed axis 8 is run through, the outer enclosure 7 that thrust bearing 10 is installed is enclosed within on the fixed axis 8.
As mentioned above, in the electrical equipment 1 that assembles, after rotor portions 11 rotations of motor 50, the two ends of sleeve 20 are subject to the thrust loading that thrust bearing 9,10 applies.
At this moment, especially with the High Rotation Speedization of centrifugal fan 21 pro rata the negative pressure in the negative pressure chamber 19 increase gradually, rotor portions 11 is along the axis of fixed axis 8 to negative pressure chamber's 19 side displacements, yet can guarantee reliably that the thrust bearing 10 that is configured in negative pressure chamber's 19 sides does not rotate with respect to outer enclosure 7, more stably bearing thrust load therefore compared with the past.
(the main effect of the second execution mode)
In the electrical equipment 1 with motor 50 and pump 51, thrust bearing 9,10 profile are non-circular shape, be formed with shape, size and this non-circular shape roughly the same thrust bearing hole 3g, 7e in inner shell 3 and outer enclosure 7, therefore can prevent reliably that thrust bearing 9,10 from rotating with respect to inner shell 3 and outer enclosure 7 as shell, and improve machining accuracy and the assembly precision thereof of these parts.
And, in the electrical equipment 1, the anti-rotation device of thrust bearing 9 is that the thrust bearing hole 3g of the cutting portion 9b, the 9c that utilize thrust bearing 9 and inner shell 3 forms, similarly, the anti-rotation device of thrust bearing 10 is that the thrust bearing hole 7e of the cutting portion 10b, the 10c that utilize thrust bearing 10 and outer enclosure 7 forms.Thus, thrust bearing 9,10 axle through hole 9a, 10a and fixed axis 8 can be kept the generation that high manufacturing accuracy and assembly precision rock to suppress axle.Therefore, need not each parts is carried out high accuracy processing, therefore can shorten process time, control cost.
In addition, the anti-rotation device of thrust bearing 9 is that the thrust bearing hole 3g of the cutting portion 9b, the 9c that utilize thrust bearing 9 and inner shell 3 forms, similarly, the anti-rotation device of thrust bearing 10 is that the thrust bearing hole 7e of the cutting portion 10b, the 10c that utilize thrust bearing 10 and outer enclosure 7 forms.Thus, fixed axis 8 can not apply very large counter-force to thrust bearing 9,10, therefore, can not concentrate as in the past case.Thus, can prolong thrust bearing 9, life-span of 10.
And in the electrical equipment 1, the thrust bearing hole 3g of inner shell 3 is holes of non-circular shape, i.e. the peripheral shape in the hole of D tangent plane shape, and thrust bearing 9 is the non-circular shape that engage with the hole of D tangent plane shape, namely forms cutting portion 9b, the 9c of D tangent plane shape.Similarly, the thrust bearing hole 7e of outer enclosure 7 is holes of non-circular shape, i.e. the peripheral shape in the hole of D tangent plane shape, and thrust bearing 10 is the non-circular shape that engage with the hole of D tangent plane shape, namely forms cutting portion 10b, the 10c of D tangent plane shape.Therefore thus, owing to being that the D tangent plane can prevent from rotating by simple processing reliably, improve inside, outer enclosure 3,7 and the machining accuracy of thrust bearing 9, each part such as 10, and the raising assembly precision.
In addition, in the electrical equipment 1, the buckle of fixed axis 8 with insert in the 8a of hole and be fixed with as with the steady pin 41 of the bayonet unit of inner shell 3 buckles, so fixed axis 8 do not affect by thrust bearing 9,10 machining accuracy can, can be snapped in reliably on the inner shell 3.
And electrical equipment 1 has pump chamber 51, and this pump chamber 51 disposes centrifugal fan 21 in a side that is formed with the fluid path 18 that passes through for pressure fluid (for example liquid).Thus, can provide a kind of electrical equipment 1, the motor 50 of its use can prevent reliably that thrust bearing 9,10 from rotating with respect to inside, outer enclosure 3,7, and keeps the machining accuracy of fixed axis 8, improves the assembly precision between its each parts.
Above-mentioned execution mode is the example in the preferred forms of the present invention, yet is not limited thereto, and can carry out various distortion in the scope that does not break away from purport of the present invention.
In addition, be arranged on the steady pin 41 on the fixed axis 8, except the part of above-mentioned axle shape, also can use the part of peddling on the markets such as split pin.And steady pin 41 need not to run through fixed axis 8, and the one end is engaged with fixed axis 8, and its other end is engaged with inner shell 3.At this moment, also can utilize steady pin 41 grades that fixed axis 8 is fixed in outer enclosure 7.
(variation of the second execution mode)
Figure 10 is the exploded perspective view of major part of electrical equipment of the variation of second embodiment of the invention.
In the above-mentioned present embodiment, cutting portion 9b, 9c that 2 places with thrust bearing 9,10 periphery cut off to form and the anti-rotation device of cutting portion 10b, 10c are disclosed, yet in the execution mode 2 shown in Figure 10, be formed with the 1 cutting portion 69b of place, 70b on thrust bearing 69,70 the periphery.
In addition, for matching thrust bearing 69,70 shape, for example can on the 3d of pedestal section of inner shell 3, form again 1 3i of wall section, also can form as illustrated in fig. 62 wall sections.
Utilize such structure, but thrust bearing 69,70 structure are further simplified, although and diameter identical with above-mentioned execution mode but can guarantee and contact area that 20 in sleeve is larger.
(other variation of the second execution mode)
Figure 11 is the exploded perspective view of major part of electrical equipment of other variation of second embodiment of the invention.
In the above-mentioned electrical equipment, disclose in thrust bearing 9,10,69,70 periphery and be formed with 1 place or cutting portion 9b, the 9c of 2 D of place tangent plane shapes and the anti-rotation device of cutting portion 10b, 10c, yet in the execution mode 3 shown in Figure 11, be formed with 1 place little notch part 89d, 90d on thrust bearing 89,90 the periphery.
In addition, be matching thrust bearing 89,90 shape, for example can on the 3d of pedestal section of inner shell 3, form again 1 protruding wall 3k of engaging.
Utilize such structure, but thrust bearing 89,90 structure are further simplified, although and diameter and embodiment 1,2 identical but can guarantee and contact area that 20 in sleeve is larger.
(other variation of other of the second execution mode)
As mentioned above, among the embodiment 1~3, as electrical equipment pump is illustrated, yet also can be used for other device, the structure that liquid or gas is imported, discharges as pressure fluid and with this pressure fluid such as the electric fan of electric dust collector or ventilation fan etc. is all applicable to the present invention.

Claims (12)

1. a motor is characterized in that, comprising: fixed axis; Support the shell at the two ends of described fixed axis; Relatively configure and rotatable radial bearing with described fixed axis; Bear the thrust bearing of the thrust of this radial bearing, be formed with the anti-rotation device of described thrust bearing on the described shell, on described fixed axis, be formed with buckle along the direction perpendicular to rotation and use the hole, and be inserted with steady pin at described buckle in the hole, described fixed axis utilizes described steady pin and is buckled on the described shell.
2. motor as claimed in claim 1 is characterized in that, described anti-rotation device is the hole of non-circular shape, and the peripheral shape of described thrust bearing is the non-circular shape that engages with the hole of described non-circular shape.
3. motor as claimed in claim 2 is characterized in that, described non-circular shape is that the part of the periphery of described thrust bearing is cut off formed D tangent plane shape.
4. motor as claimed in claim 3 is characterized in that, described D tangent plane shape is with formed shape after the cutting off along 2 places on the relative periphery of radial direction of described thrust bearing.
5. motor as claimed in claim 1 is characterized in that, described anti-rotation device is the hole that the part has the non-circular shape of protuberance, and the peripheral shape of described thrust bearing is the non-circular shape that is formed with the recess that engages with described protuberance.
6. motor as claimed in claim 5 is characterized in that, described protuberance is the protruding wall of engaging of inwardly giving prominence in week from the periphery in the hole of described non-circular shape.
7. motor as claimed in claim 1 is characterized in that, is formed with the support portion with the chimeric ditch shape of described steady pin on the described shell.
8. motor as claimed in claim 7 is characterized in that, described fixed axis forms cylindric, and, be formed with the axle supported hole that inserts for described fixed axis and the support portion of the described ditch shape that forms in the mode across this axle supported hole at described shell.
9. motor as claimed in claim 8, it is characterized in that, be formed with pedestal section at described shell, be formed with the support portion of described axle supported hole and described ditch shape in this pedestal section, and, be formed with the thrust bearing hole in this pedestal section, this thrust bearing hole is with the end face upper shed in described pedestal section of the mode of the periphery of surrounding described axle supported hole, and forms concavity with can chimeric described thrust bearing.
10. motor as claimed in claim 9 is characterized in that, forms described anti-rotation device by the hole that described thrust bearing hole shape is become non-circular shape.
11. an electrical equipment is characterized in that, has each described motor in the claim 1 to 10.
12. electrical equipment as claimed in claim 11 is characterized in that, described electrical equipment has pump chamber, and this pump chamber disposes impeller in a side that forms the stream that passes through for fluid.
CN 201010182914 2006-04-10 2007-04-04 Motor and electric device using the same Expired - Fee Related CN101860111B (en)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2006-107147 2006-04-10
JP2006107147A JP4716505B2 (en) 2006-04-10 2006-04-10 Motor and electric device using the same
JP2006180194A JP2008008222A (en) 2006-06-29 2006-06-29 Pump device
JP2006-180194 2006-06-29

Related Parent Applications (1)

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CN 200710096853 Division CN101054978A (en) 2006-04-10 2007-04-04 Pump device, motor and electric device using the motor

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CN101860111B true CN101860111B (en) 2013-02-13

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11286940B2 (en) 2018-02-14 2022-03-29 Nidec Sankyo Corporation Pump device
JP7267560B2 (en) * 2018-12-21 2023-05-02 ニデックインスツルメンツ株式会社 pumping equipment

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
JP平7-279884A 1995.10.27

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