CN101857111B - Vacuum pumping system design for vacuum container volume 200m<3> grade - Google Patents
Vacuum pumping system design for vacuum container volume 200m<3> grade Download PDFInfo
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- CN101857111B CN101857111B CN 201010186424 CN201010186424A CN101857111B CN 101857111 B CN101857111 B CN 101857111B CN 201010186424 CN201010186424 CN 201010186424 CN 201010186424 A CN201010186424 A CN 201010186424A CN 101857111 B CN101857111 B CN 101857111B
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Abstract
The invention discloses a vacuum pumping system for a vacuum container volume 200m<3> grade, which mainly comprises a low vacuum pumping system, a high vacuum pumping system, a super-high vacuum pumping system and a vacuum container repressing system. A liquid nitrogen cold trap arranged in a vacuum pumping pipeline can prevent the system from returning oil and avoid polluting a vacuum container; two groups of adopted low vacuum pumping mechanical pumps can work simultaneously or independently so as to improve the running reliability of the system; four groups of adopted turbo-molecular pumps can work simultaneously or independently so as to improve the running reliability of the system; two groups of adopted refrigerator low-temperature pumps can work simultaneously or independently so as to improve the running reliability of the system; the vacuum pumping system is provided with a deflating valve for preventing the system from returning oil; the whole pumping system is clean; and except that the low-temperature pumps are imported, other components of the whole pumping system can be purchased at home with low price.
Description
[technical field]
The present invention relates to a kind of for vacuum vessel volume 200m
3The vacuum pumping system design of level.
[background technology]
The vacuum pumping system Main Function is that the various air extracting pumps by forming system are extracted into a certain degree of vacuum with the pressure of vacuum vessel.By the degree of vacuum requirement that will reach, extract system can be divided into low vacuum extract system, fine pumping system, ULTRA-HIGH VACUUM PUMPING system.Press vacuum pumping system and whether vacuum vessel is produced oil pollution, vacuum pumping system can be divided into oily vacuum pumping system, oil-free pumping system.
The low vacuum extract system refers to vacuum vessel pressure from 10
5Pa is evacuated to 10
-1The extract system of Pa.The effect of low vacuum extract system be make pressure in vacuum vessel reach the fine pumping system the pressure that can normally start.The low-suction pump that uses at present is all generally the oil-sealed rotary pump with oil lubrication and sealing.
The fine pumping system refers to vacuum vessel pressure from 10
-1Pa is evacuated to 10
-4The extract system of Pa.The exhaust capacity of low vacuum extract system is limited, is evacuated to 10
-1After Pa, the effective pumping speed of low vacuum extract system descends very greatly, is difficult to further improve degree of vacuum in vacuum vessel to satisfy requirement of experiment.
The ULTRA-HIGH VACUUM PUMPING system is evacuated to 10 with the vacuum vessel internal pressure
-4The extract system that Pa is following.For the demanding experiment of degree of vacuum, must could be with Pressure Drop to 10 by the superaltitude extract system
-4Below Pa.
There is oily vacuum pumping system to refer to produce in the vacuum pump working process extract system of oil molecule.Oil molecule enters vacuum vessel can produce very large counter productive to the cleaning of the degree of vacuum in vacuum vessel, vacuum vessel, the normal operation and maintenance of instrument.Therefore, present vacuum system is all avoided using in design process as far as possible and is returned the serious air extracting pump of oil.Adopt in the situation that have to and return oil air pump, consider to reduce by taking measures oil pollution.
The oil-free vacuum extract system refers to not produce in the vacuum pump working process extract system of oil molecule.In recent years along with the development of air extracting pump technology, the oil-free vacuum extract system is widely used, and is the developing direction of vacuum pumping system in future.
[summary of the invention]
The purpose of this invention is to provide a kind of for vacuum vessel volume 200m
3The vacuum pumping system design of level, this vacuum pumping system is cheap without the oil price lattice, can be used for thermal vacuum test and plume effect study.
A kind of for vacuum vessel volume 200m
3The vacuum pumping system of level mainly comprises low vacuum extract system, fine pumping system, ULTRA-HIGH VACUUM PUMPING system and the multiple pressing system of vacuum vessel.
The low vacuum extract system is the forvacuum system, mainly is comprised of with the second thermal radiation vacuum gauge (44), the first liquid nitrogen cold trap (23) with the second lobe pump unit (46), the first valve (25), the second valve (27), the 3rd valve (36), the 4th valve (37), the 5th valve (40), the 6th valve (41), the 7th valve (42), the first thermal radiation vacuum gauge (43) the first slide valve pump (38) and the second slide valve pump (39), the first lobe pump unit (45).
the fine pumping system is mainly by the 8th valve (4), the 9th valve (5), the tenth valve (6), the 11 valve (7), the 12 valve (8), the 13 valve (9), the 14 valve (16), the 15 valve (17), the 16 valve (18), the 17 valve (19), the 18 valve (20), the 19 valve (21), the 20 valve (28), the 21 valve (29), the 22 valve (32), the 23 valve (33), the first refrigerator cryopump (10) and the second refrigerator cryopump (13), the first turbomolecular pump (11), the second turbomolecular pump (12), the 3rd turbomolecular pump (14), the 4th turbomolecular pump (15), the second liquid nitrogen cold trap (22), the 3rd liquid nitrogen cold trap (24), the first forepump (30), the second forepump (31), the 3rd forepump (34), the 4th forepump (35) forms.
The ULTRA-HIGH VACUUM PUMPING system mainly is comprised of heat sink, and heat sink mainly being arranged in vacuum vessel can be led to the cryogenic medias such as liquid nitrogen, liquid helium vacuum vessel is carried out ULTRA-HIGH VACUUM PUMPING.
The multiple pressing system of vacuum vessel mainly is comprised of filter (1), the 24 valve (2), vacuum vessel (3).
The advantage that the present invention has is: (a) in the vacuum suction pipeline, liquid nitrogen cold trap is installed, can prevents anti-oil of locking system, avoid polluting vacuum vessel; (b) adopt two groups of low vacuum sucking pump pumps, can work simultaneously also can work independently, and improves system operation reliability; (c) adopt four groups of turbomolecular pumps, can work simultaneously also can work independently, and improves system operation reliability; (d) adopt two groups of refrigerator cryopumps, can work simultaneously also can work independently, and improves system operation reliability; (e) vacuum pumping system is furnished with aie escape valve, and anti-locking system returns oil; (f) whole extract system totally cleans; (g) whole extract system is except cryopump needs import, but all the other domestic procurements all are cheap.
[description of drawings]
Fig. 1 is a kind of vacuum pumping system design schematic diagram for vacuum vessel volume 200m3 level
Wherein:
The 1-filter; The 2-valve; The 3-vacuum vessel; The 4-valve; The 5-valve; The 6-valve; The 7-valve; The 8-valve; The 9-valve; The 10-refrigerator cryopump; The 11-turbomolecular pump; The 12-turbomolecular pump; The 13-refrigerator cryopump; The 14-turbomolecular pump; The 15-turbomolecular pump; The 16-valve; The 17-valve; The 18-valve; The 19-valve; The 20-valve; The 21-valve; The 22-liquid nitrogen cold trap; The 23-liquid nitrogen cold trap; The 24-liquid nitrogen cold trap; The 25-valve; The 26-suction gage; The 27-valve; The 28-valve; The 29-valve; The 30-forepump; The 31-forepump; The 32-valve; The 33-valve; The 34-forepump; The 35-forepump; The 36-valve; The 37-valve; The 38-slide valve pump; The 39-slide valve pump; The 40-valve; The 41-valve; The 42-valve; The 43-thermal radiation vacuum gauge; The 44-thermal radiation vacuum gauge; 45-lobe pump unit; 46-lobe pump unit.
[specific embodiment]
Further illustrate the present invention below in conjunction with accompanying drawing.
A kind of vacuum pumping system for vacuum vessel volume 200m3 level shown in Figure 1 mainly comprises low vacuum extract system, fine pumping system, ULTRA-HIGH VACUUM PUMPING system and the multiple pressing system of vacuum vessel.
The low vacuum extract system is the forvacuum system, mainly is comprised of slide valve pump (38,39), lobe pump unit (45,46), valve (25,27,36,37,40,41,42), thermal radiation vacuum gauge (43,44), liquid nitrogen cold trap (23).The concrete method of attachment of low vacuum extract system: liquid nitrogen cold trap (23) one ends are connected with vacuum vessel (3) by pipeline, and the other end is connected with valve (36,37,40) respectively by triplate line; Slide valve pump (38) one ends are connected with valve (36) by pipeline, and the other end leads directly to atmosphere; Slide valve pump (39) one ends are connected with valve (37) by pipeline, and the other end leads directly to atmosphere; Lobe pump unit (45) one ends are connected 41 by pipeline with valve) be connected with valve (40), the other end leads directly to atmosphere; Lobe pump unit (46) one ends are connected 42 by pipeline with valve) be connected with valve (40), the other end leads directly to atmosphere; Valve (25) one ends are connected between slide valve pump (38) and valve (36) by pipeline, and the other end leads directly to atmosphere; Valve (27) one ends are connected between slide valve pump (39) and valve (37) by pipeline, and the other end leads directly to atmosphere; Thermal radiation vacuum gauge (43) is arranged on pipeline between lobe pump unit (45) and valve (41); Thermal radiation vacuum gauge (44) is arranged on pipeline between lobe pump unit (46) and valve (42).
The fine pumping system mainly is comprised of valve (4,5,6,7,8,9,16,17,18,19,20,21,28,29,32,33), refrigerator cryopump (10,13), turbomolecular pump (11,12,14,15), liquid nitrogen cold trap (22,24), forepump (30,31,34,35).The concrete method of attachment of fine pumping system: refrigerator cryopump (10) one ends are connected to vacuum vessel (3) by pipeline and valve (4), and the other end is connected to liquid nitrogen cold trap (22) by pipeline and valve (16); Turbomolecular pump (11) one ends are connected to vacuum vessel (3) by pipeline and valve (5), and the other end is connected to liquid nitrogen cold trap (22) by pipeline and valve (17); Turbomolecular pump (12) one ends are connected to vacuum vessel (3) by pipeline and valve (6), and the other end is connected to liquid nitrogen cold trap (22) by pipeline and valve (18); Liquid nitrogen cold trap (22) other end is connected to forepump (30) by pipeline and valve (28); Forepump pump (30) other end is connected to forepump (31) by pipeline; Forepump (31) other end leads directly to atmosphere; Valve (29) one ends are connected on pipeline between liquid nitrogen cold trap (22) and valve (28) by pipeline, and the other end is connected on pipeline between forepump (30) and forepump (31) by pipeline.Refrigerator cryopump (13) one ends are connected to vacuum vessel (3) by pipeline and valve (7), and the other end is connected to liquid nitrogen cold trap (24) by pipeline and valve (19); Turbomolecular pump (14) one ends are connected to vacuum vessel (3) by pipeline and valve (8), and the other end is connected to liquid nitrogen cold trap (24) by pipeline and valve (20); Turbomolecular pump (15) one ends are connected to vacuum vessel (3) by pipeline and valve (9), and the other end is connected to liquid nitrogen cold trap (24) by pipeline and valve (21); Liquid nitrogen cold trap (24) other end is connected to forepump (34) by pipeline and valve (32); Forepump pump (34) other end is connected to forepump (35) by pipeline; Forepump (35) other end leads directly to atmosphere; Valve (33) one ends are connected on pipeline between liquid nitrogen cold trap (24) and valve (32) by pipeline, and the other end is connected on pipeline between forepump (34) and forepump (35) by pipeline.
The ULTRA-HIGH VACUUM PUMPING system mainly is comprised of heat sink, and heat sink mainly being arranged in vacuum vessel can be led to the cryogenic medias such as liquid nitrogen, liquid helium vacuum vessel is carried out ULTRA-HIGH VACUUM PUMPING.
The multiple pressing system of vacuum vessel mainly is comprised of filter (1), valve (2), vacuum vessel (3).The multiple concrete method of attachment of pressing system of vacuum vessel: valve (2) one ends are connected with vacuum vessel (3) by pipeline, and the other end is connected with filter (1) by pipeline; Filter (1) other end leads directly to atmosphere.
Coordinate corresponding vacuum TT﹠C system, can realize the vacuum suction to vacuum vessel.
The below is with vacuum vessel volume 200m
3The vacuum pumping system of level is example, and the principle of work of vacuum pumping system is described.
The low vacuum extract system is adopted 2 cover lobe pump unit JZJPH1200-24A, and JZJPH1200-24A is comprised of ZJP-1200 lobe pump, ZJP-600 lobe pump and H-150 slide valve pump.
The fine pumping system adopts 2 Coolvac60000BL-V LN2 cryopumps and 4 F-1600 turbomolecular pumps, and its forepump is comprised of ZJP-150 and 2X-30 sliding vane rotary pump.
During work, at first start the lobe pump unit, vacuum vessel is evacuated to 1Pa, this process about 1.2h of time that bleeds; Then start successively molecular pump, cryopump, vacuum vessel is evacuated to 10
-4Pa, this process about 1.5h of time that bleeds; Start at last the ULTRA-HIGH VACUUM PUMPING system, utilize heat sink vacuum vessel to be evacuated to 10
-4Below Pa, to reach the different tests requirement.
Claims (4)
1. one kind is used for vacuum vessel volume 200m
3The vacuum pumping system of level is comprised of low vacuum extract system, fine pumping system, ULTRA-HIGH VACUUM PUMPING system, vacuum vessel measuring system and the multiple pressing system of vacuum vessel; It is characterized in that: can realize vacuum vessel volume 200m
3The vacuum suction of level, leak detection, measurement and multiple the pressure;
described low vacuum extract system is the forvacuum system, mainly is comprised of with the second thermal radiation vacuum gauge (44), the first liquid nitrogen cold trap (23) with the second lobe pump unit (46), the first valve (25), the second valve (27), the 3rd valve (36), the 4th valve (37), the 5th valve (40), the 6th valve (41), the 7th valve (42), the first thermal radiation vacuum gauge (43) the first slide valve pump (38) and the second slide valve pump (39), the first lobe pump unit (45), the fine pumping system is mainly by the 8th valve (4), the 9th valve (5), the tenth valve (6), the 11 valve (7), the 12 valve (8), the 13 valve (9), the 14 valve (16), the 15 valve (17), the 16 valve (18), the 17 valve (19), the 18 valve (20), the 19 valve (21), the 20 valve (28), the 21 valve (29), the 22 valve (32), the 23 valve (33), the first refrigerator cryopump (10) and the second refrigerator cryopump (13), the first turbomolecular pump (11), the second turbomolecular pump (12), the 3rd turbomolecular pump (14), the 4th turbomolecular pump (15), the second liquid nitrogen cold trap (22), the 3rd liquid nitrogen cold trap (24), the first forepump (30), the second forepump (31), the 3rd forepump (34), the 4th forepump (35) forms, the ULTRA-HIGH VACUUM PUMPING system mainly is comprised of heat sink, the multiple pressing system of vacuum vessel mainly is comprised of filter (1), the 24 valve (2).
2. as claimed in claim 1 a kind of for vacuum vessel volume 200m
3The vacuum pumping system of level is characterized in that: in the vacuum suction pipeline, liquid nitrogen cold trap is installed, the first liquid nitrogen cold trap (23) is arranged on pipeline between vacuum vessel (3) and the 3rd valve (36), the 4th valve (37), the 5th valve (40); The second liquid nitrogen cold trap (22) is arranged on pipeline between the 14 valve (16), the 15 valve (17), the 16 valve (18) and the 20 valve (28), and the 3rd liquid nitrogen cold trap (24) is arranged on pipeline between the 17 valve (19), the 18 valve (20), the 19 valve (21) and the 22 valve (32).
3. as claimed in claim 1 a kind of for vacuum vessel volume 200m
3The vacuum pumping system of level is characterized in that: the low vacuum extract system adopts two groups of low vacuum sucking pump pumps.
4. as claimed in claim 1 a kind of for vacuum vessel volume 200m
3The vacuum pumping system of level, it is characterized in that: the low vacuum extract system is furnished with the first valve (25), the second valve (27), and the first valve (25) is arranged on pipeline between the 3rd valve (36) and the first slide valve pump (38); The second valve (27) is arranged on pipeline between the 4th valve (37) and the second slide valve pump (39).
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201010186424 CN101857111B (en) | 2010-05-21 | 2010-05-21 | Vacuum pumping system design for vacuum container volume 200m<3> grade |
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|---|---|---|---|
| CN 201010186424 CN101857111B (en) | 2010-05-21 | 2010-05-21 | Vacuum pumping system design for vacuum container volume 200m<3> grade |
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| CN101857111A CN101857111A (en) | 2010-10-13 |
| CN101857111B true CN101857111B (en) | 2013-05-15 |
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Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102536735A (en) * | 2010-12-20 | 2012-07-04 | 北京卫星环境工程研究所 | Cleaning vacuum air exhaust technology for large-sized space environmental simulator |
| FR3017425A1 (en) * | 2014-02-12 | 2015-08-14 | Adixen Vacuum Products | PUMPING SYSTEM AND PRESSING DESCENT METHOD IN LOADING AND UNLOADING SAS |
| CN106527331B (en) * | 2016-10-18 | 2018-05-22 | 中国原子能科学研究院 | A kind of control system for Electromagnetic isotope separator vacuum system |
| CN113153775A (en) * | 2021-04-29 | 2021-07-23 | 中国原子能科学研究院 | Control device and control method for vacuum unit |
Citations (1)
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|---|---|---|---|---|
| CN2260228Y (en) * | 1995-06-13 | 1997-08-20 | 机械工业部第七设计研究院 | Apparatus for filling or recovering gas SF6 of oil-free type |
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2010
- 2010-05-21 CN CN 201010186424 patent/CN101857111B/en not_active Expired - Fee Related
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2260228Y (en) * | 1995-06-13 | 1997-08-20 | 机械工业部第七设计研究院 | Apparatus for filling or recovering gas SF6 of oil-free type |
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| Title |
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| 刘国青,黄本诚,邹定忠.大型氦制冷低温真空系统的设计研究.《真空》.2000,(第4期),27-30. * |
| 张春元,黄本诚,许忠旭,黄威,茹晓勤,邵容平.试验设备检漏技术.《中国空间科学技术》.2002,(第3期),49-55. * |
| 杨乃恒,巴德纯,王晓冬,于治明.有害气体的抽除与清洁真空的获得.《真空》.2004,第41卷(第4期),15-20. * |
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