CN101852643B - Temperature self-compensating double grating symmetrical push-pull type fiber grating vibrating sensor - Google Patents
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- CN101852643B CN101852643B CN2010101814899A CN201010181489A CN101852643B CN 101852643 B CN101852643 B CN 101852643B CN 2010101814899 A CN2010101814899 A CN 2010101814899A CN 201010181489 A CN201010181489 A CN 201010181489A CN 101852643 B CN101852643 B CN 101852643B
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Abstract
The invention discloses a temperature self-compensating double grating symmetrical push-pull type fiber grating vibrating sensor. The invention aims to realize a fiber grating vibrating sensor which has the function of temperature self-compensation and has high sensitivity and favorable low-frequency detection performance. The fiber grating vibrating sensor is composed of a shell, two elastic body blocks, a mass block, two sensing fiber Bragg gratings, two connecting seats and two support bases, wherein the mass block is positioned between the two elastic body blocks; the connecting seats are respectively attached to two end faces of the mass block, and respectively abuts against and adheres to one end of each of the two elastic body blocks; and the other end of each of the two elastic body blocks abuts against and adheres to each of the two support bases, thereby constituting a symmetrical push-pull type structure; the positions carved with fiber Bragg gratings on the two fibers are respectively packaged in the two elastic body blocks; and the mass block, the connecting seats, the elastic body blocks, the fiber gratings and the support bases form a sensing probe and are arranged in the shell. The invention can eliminate the effect of temperature drift, has the advantages of high sensitivity, favorable low-frequency detection performance, and can conveniently expand to three dimensions.
Description
Technical field
The present invention relates to a kind of Fibre Optical Sensor, especially a kind of optical fiber raster vibration sensor.
Background technology
Over the last couple of decades; People have carried out extensive and deep research to optical fiber Bragg raster (FBG) sensing technology; And obtained huge development; Strain, temperature, pressure be can be used for measuring and all can convert the physical quantity of strain, temperature into, military and civil each field have been widely used in.FBG acceleration vibrating sensing technology has become a new applied research field.In low-frequency vibration Application in Sensing field, the FBG acceleration transducer has advantages such as high stability, high precision, low-power consumption, good low frequency characteristic, antijamming capability are strong, so application potential is huge.Low-frequency vibration signal detects in Structural Engineering dynamics research (several hertz to several hertz of zero points), earthquake prediction and tsunami monitoring and warning (the ppt hertz is to the hundreds of hertz), geologic prospecting and new energy development (below 100 hertz), Aero-Space, biodynamics and biomedical sector, advanced Precision Machining and manufacturing technology field, national defense applications field, basic scientific research field and all is widely used.
Along with the development of vibration test technology and the needs of high precision measurement, it is imperative to develop high performance vibration transducer.The appearance of optical fiber sensing technology has brought unprecedented vitality for the development of sensor.Developed multiple optical fiber acceleration vibration transducer both at home and abroad; It is compared with traditional acceleration transducer; Not only can anti-electromagnetic interference (EMI), and body is little, light weight, wide dynamic range, precision are high, can under rugged surroundings, work, therefore receive the military very big attention with commercial field of each advanced country.The optical fiber acceleration transducer of various practicalities continues to bring out, and mainly contains two big types of intensity modulation type and phase modulation-types.That the intensity modulation formula has is reflective, transmission-type and polarization type or the like; The phase modulation (PM) formula has Mach-Zender interferometer, Michelson interferometer and Fabry-Perot interferometer, one dimension is arranged, and two dimension is also arranged; Have with hydrophone, group to lump together, the optical fiber acceleration transducer with the fibre optic gyroscope combination is also arranged, 2.5cm is long in minimum accomplishing, diameter is 0.25mm only, and measuring accuracy can reach 1 μ g, and resonant frequency can reach 10kHz.Because the sensor all is intensity modulation type and phase modulation-type acceleration transducer; Be subject to factor affecting such as light source fluctuation, optical fiber disturbance, thermal perturbation; The background low-frequency noise is very strong; It is bigger to the measurement of detection, the especially ultra-low frequency signal (0.01Hz-10Hz) of low-frequency vibration signal to be difficult to realization.Have the light channel structure of noise reduction capability though proposed some, in practical application, still can not effectively address this problem.
The FBG sensing technology is on the basis of optical fiber sensing technology, to grow up, and analyzes from principle, and the FBG sensing is to utilize measurement Bragg wavelength change to realize sensing, does not receive factor affecting such as light source fluctuation, optical fiber disturbance basically.Therefore the FBG acceleration transducer not only has the advantage of the optical fiber acceleration transducer of above introduction; Overcome the weak point of these optical fiber acceleration transducers simultaneously; Can realize real-time online, the measurement of absolute number formula; Have that measurement range is wide, precision high and low frequency characteristic is good, antijamming capability is strong, need not zeroing, good long term stability, for high resolution capacity, high s/n ratio, pinpoint accuracy and the high confidence level that realizes vibrating sensing provides desirable technological means.
At present, to the research of optical fiber Bragg raster acceleration vibration transducer, mainly be to encapsulate through various structure and material, realize tuning to optical fiber Bragg raster centre wavelength, and realize enhanced sensitivity, improve the probe performance.That version mainly contains is embedded, disk type, overarm (arm) formula, mandrel spring oscillator formula etc., based on the optical fiber Bragg grating sensor of these structures its relative merits is arranged respectively.For example: the damascene structures free-running frequency is high, and sensitivity is low, is difficult to satisfy low frequency weak vibration measurement requirement such as geologic prospecting, engineering construction health monitoring.The sensitivity and the free-running frequency that want to reach desirable need increase the mass quality, use mollielast, but actually all are difficult to accomplish, and the damascene structures cross sensitivity is excessive.Though the disk type structure has better inhibited cross sensitivity ability; But sensitivity is too low; Want to improve sensitivity and need increase the mass quality, but be difficult to obtain higher sensitivity, and damascene structures and disk type structure all can not realize the temperature self-compensation function.The research of overarm formula structure is many, has occurred structures such as hollow beam, the beam of uniform strength, Xuan Beiliang, both arms beam at present.The vibration transducer of Wuhan University of Technology's (number of patent application 200510019733.0) and Nankai University's (number of patent application 200420028862.7) design all belongs to this class formation.Because the optical fiber Bragg raster grid region directly sticks on the semi-girder surface, easy generation is warbled or the multimodal phenomenon causes test inaccurate, and vibration signal is less than normal, and stability is not high, and the free vibration decay slowly influences the working sensor performance during work.And the cantilever structure of Institute of Semiconductors,Academia Sinica's (number of patent application 200710065323.9) and Tongji University's (number of patent application 200820059065) design has been eliminated this unfavorable factor; Their end through " L " lever arm is connected with optical fiber have been avoided the optical fiber Bragg raster grid region and has directly sticked on the semi-girder surface; Particularly the high sensitivity temperature self-compensation type optical fiber Bragg raster acceleration transducer of Tongji University's design adopts the double grating structure can realize temperature self-compensation; And sensitivity is higher, and sensitivity reaches 900pm/g, and the introducing rotation axis makes sensor construction more stable; Eliminate the influence of geometrical non-linearity; The correctness of enhancing signal and the permanance of sensor, but complex structure are not easy to expand to three-dimensional.
The three-component optical fiber Bragg raster vibration degree sensing (number of patent application 200720021749) of a kind of optical fiber Bragg raster vibration transducer (number of patent application 200720300082.7) of Wuhan University of Technology's design and Shandong University's design has adopted mandrel spring oscillator formula structure.The structure of Wuhan University of Technology is to adopt steel wire (or steel pipe) and mass to form elastic system; Double grating is as sensitive element, and two fiber gratings series connection welding back rigidity pastes steel duct, therefore also can produce and warble or the multimodal phenomenon; And vibration signal is less than normal; Sensitivity is not high, and sensitivity has only 1pm/g, is difficult to satisfy the high-quality measurement of low-frequency vibration signal.The structure of Shandong University is to adopt block rubber and mass to form elastic system; On three not corresponding block rubbers, paste respectively and be mounted with optical fiber grating sensing; Connect a block rubber respectively on six faces of mass; Be to adopt the monochromatic light grid on each dimension, do not possess the temperature self-compensation function as sensitive element.
Summary of the invention
The technical matters that the present invention will solve is a kind of new type light fiber Bragg grating acceleration vibration transducer of design, overcomes the deficiency of prior art, realizes the high-quality measurement to low-frequency vibration signal; Adopt double grating elastic body encapsulation symmetrical expression push-pull configuration, this structure has the temperature self-compensation function, high sensitivity and good low-frequency acquisition performance; Stability is high; Good directionality, simple in structure, conveniently expand to advantages such as three-dimensional.
Temperature self-compensation type double grating symmetry push-pull type optical fiber Bragg raster vibration transducer of the present invention is made up of housing, two elastomer blocks, a mass, two sense light fiber Bragg gratings, two Connection Blocks and two base for supporting.Mass is between the elastomer block of two symmetries; Be pasted with Connection Block on the mass both ends of the surface respectively; Two Connection Blocks dock cementation with two elastomer block one ends respectively, and the two elastomer block other ends dock cementation with two base for supporting respectively again, thereby form symmetrical push-pull type structure; Two optical fiber Bragg rasters are encapsulated in respectively in two elastomer blocks, form two optical fibre Bragg grating sensings.Adopt the modularization assembly structure, mass, Connection Block, elastomer block, optical fiber Bragg raster and base for supporting are formed sensing probe and are placed enclosure interior.
Mass is copper right cylinder; The cylinder two ends have first cylindrical groove; The first cylindrical groove degree of depth satisfies the fibre-optical bending requirement, and is excessive to prevent bending loss of optical fiber, and the first cylindrical groove diameter is identical with the cylinder shell external diameter that Connection Block one distal process goes out; So that dock, have the technology seam on first cylindrical groove so that tail optical fiber is drawn with Connection Block.
Connection Block plays with base for supporting and is connected supporting role, is copper material.Connection Block is collar plate shape parts; Have second cylindrical groove on disk one end face; The second cylindrical groove diameter is identical with the elastomer block diameter; The degree of depth is 1～2mm, have on the disk other end cylinder shell of protrusion be used for being inserted into mass first cylindrical groove and with the first cylindrical groove cementation, place, Connection Block axis is equipped with fabrication hole and is used to draw tail optical fiber.Base for supporting is a right cylinder; Be equipped with fabrication hole on the axis; Both ends of the surface have three cylindrical groove and the 4th cylindrical groove, and the three cylindrical groove diameter is identical with the elastomer block diameter, and the degree of depth is 1～2mm; The 4th cylindrical groove degree of depth satisfies the fibre-optical bending requirement, and has technology seam and be used to draw tail optical fiber.
Elastomer block is a right cylinder; Adopt resilient material (like the polyurethane sealing package material) to make; One end inserts second cylindrical groove of Connection Block and docks cementation with second cylindrical groove, and an end inserts the three cylindrical groove of base for supporting and docks cementation with the three cylindrical groove.Two elastomer blocks and mass are formed elastic system, and elastomer block is as the elastic system parts, and its elastic modulus E, radius R, high H are to the sensitivity S and the eigenfrequency f of sensor
0Direct influence is arranged, and the sensitivity of sensor and eigenfrequency formula are:
M is the gross mass of mass and Connection Block in the formula, λ
1And λ
2Be the wavelength of two optical fiber Bragg rasters, k is the elasticity coefficient of elastic system.E, R, H (are S and f by formula (1) and (2) according to different application requirements
0Requirement) be optimized the design obtain.
The position of being carved with optical fiber Bragg raster on the optical fiber is encapsulated on the elastomer block axis, and the encapsulation position is naked fibre, in encapsulation process, is added with on the optical fiber and desires tension force to prevent chirp.Two optical fiber Bragg rasters can be connected with the outside light signal demodulation process device of sensor through connecting the optical fiber series connection, also can draw with light signal demodulation process device through the parallel connection of connection optical fiber two-way to be connected.When adopting series connection method is the monochromatic light road, and subsequent optical signal demodulation process device will be to the signal distinguishing demodulation of two optical fiber Bragg rasters, and therefore the centre wavelength of two optical fiber Bragg rasters can not be the same.When employing and linked method is double light path, and the centre wavelength of two optical fiber Bragg rasters can be the same.
Housing is made up of barrel shell and lid, and barrel shell is the stainless steel cylindrical drum, has the optical fiber outlet on the barrel shell sidewall, is used for optical fiber and links to each other with light signal demodulation process device with external light source.Barrel shell is connected through screw with lid, covers and has the 5th cylindrical groove, and the 5th cylindrical groove diameter is identical with the base for supporting diameter, and the degree of depth is 1～2mm, and an end of base for supporting is inserted into the 5th cylindrical groove and docks cementation with the 5th cylindrical groove.
Two elastomer blocks and mass are formed elastic system to respond extraneous mechanical vibration, and adopting two optical fiber Bragg rasters is sensitive element.Under the original state, the gravity of mass and elastomeric restoring force interact, and make elastic body be in initial equilibrium state.Be parallel to the axial acceleration of elastic body
component vertically and do the time spent when elastic system receives; Mass is because inertia effect applies stretching and force of compression respectively to two elastic cylinders; These two power equal and opposite in directions, in the opposite direction; Thereby force two elastic bodys to compress respectively in the axial direction and elongate; Optical fiber is with elastic body generation axial strain; And then the Bragg wavelength is modulated, thus mechanical oscillation signal is converted into the modulation signal of optical fiber Bragg raster, optical fiber passes the signal along to the outside signal demodulation process device of sensor.
Adopt the present invention can reach following technique effect:
1. the present invention realizes strict temperature self-compensation through two optical fiber Bragg raster structures; Because its symmetrical push-pull type structure; The just in time constant amplitude repercussion of vibration dependent variable of two sense light fiber Bragg grating impressions in the elastic body; And two sensing grating environmental facies of living in together; Influenced by ambient temperature identical, therefore can eliminate influences such as temperature drift through the Signal Matching (two optical fiber Bragg raster wavelength difference are tried to achieve in demodulation) of two sense light fiber Bragg gratings, can effectively improve sensor low-frequency acquisition performance.
2. the advantage of push-pull type structure is that its symmetry is good; When vibration is axial perpendicular to elastic body; Two elastic bodys produce identical deformation (promptly two sensing grating strain facies together); Two optical fiber Bragg raster wavelength difference are constant, thus sensor the component that makes progress at elastic shaft of responsive just acceleration, thereby have good directivity.Make mass into hexahedron, be connected with elastomer block respectively on six faces of mass, just can make three-component optical fiber raster vibration degree sensor, therefore can expand to three-dimensional easily, realize the vector vibration sensing.
3. E of the present invention, R, H obtain through optimal design, have high sensitivity, great dynamic range, and sensitivity can reach more than the 500pm/g.The elastic body encapsulating structure can effectively improve the stability and the accommodative ability of environment of probe; Eliminate the influence of geometrical non-linearity; The correctness of enhancing signal and the permanance of sensor adopt the elastic body encapsulating structure to have effect of enhanced sensitivity simultaneously, and the efficient extn dynamic range.
Description of drawings
Fig. 1 is a general structure wiring layout of the present invention;
Fig. 2 is mass 5 a parts engineerings processing synoptic diagram;
Fig. 3 is Connection Block 6 a parts engineerings processing synoptic diagram;
Fig. 4 is base for supporting 2 a parts engineerings processing synoptic diagram.
Embodiment
As shown in Figure 1, the present invention is made up of housing, 2 elastomer blocks 3, mass 5, the first sense light fiber Bragg grating 8, the second sense light fiber Bragg grating 9, two Connection Blocks 6 and two base for supporting 2.Mass 5 is between the solid elastomer block 3 of two symmetries; Be pasted with Connection Block 6 respectively on mass 5 both ends of the surface; Connection Block 6 docks cementation with elastomer block 3, and two elastomer blocks 3 dock cementation with base for supporting 2 respectively again, thereby forms symmetrical push-pull type structure; Two sensor fibre gratings are encapsulated in respectively in the elastomer block 3, form two optical fiber Bragg grating sensors.Adopt the modularization assembly structure, mass 5, elastomer block 3, the first sense light fiber Bragg grating 8, the second sense light fiber Bragg grating 9, Connection Block 6 are formed sensing probes with base for supporting 2 and are placed enclosure interior.
As shown in Figure 2; Mass 5 is copper right cylinder, and the degree of depth that the cylinder two ends have first cylindrical groove, 52, the first cylindrical grooves 52 satisfies the fibre-optical bending requirement; Excessive to prevent bending loss of optical fiber; The diameter of first cylindrical groove 52 is identical with cylinder shell 61 external diameters that Connection Block 6 one distal process go out, so that dock with Connection Block 6, and has first technology seam 51 on first cylindrical groove 52 so that tail optical fiber is drawn.
As shown in Figure 3; Connection Block 6 is copper collar plate shape parts; Have second cylindrical groove 62 on disk one end face and be used for docking with elastomer block 3 fixing, second cylindrical groove, 62 diameters are identical with the elastic body diameter, and the degree of depth is 1～2mm; Have the cylinder shell 61 of protrusion to be used for docking with mass 5 on the disk other end, place, Connection Block axis is equipped with first fabrication hole 63 and is used to draw tail optical fiber.
As shown in Figure 4, base for supporting 2 is copper right cylinder, is equipped with second fabrication hole 23 on the axis; Both ends of the surface have three cylindrical groove 24 and the 4th cylindrical groove 22, the three cylindrical grooves 24 are used for docking cementation with elastomer block, and three cylindrical groove 22 diameters are identical with the elastomer block diameter; The degree of depth is 1～2mm; The 4th cylindrical groove 23 degree of depth satisfy the fibre-optical bending requirement, have second technology seam 21, are used to draw tail optical fiber.
As shown in Figure 1, the right cylinder of elastomer block 3 for adopting the polyurethane sealing package material to process.
Housing is made up of barrel shell 4 and two lids 1, and barrel shell 4 is the stainless steel cylindrical drum, has optical fiber outlet 10 on barrel shell 4 sidewalls, is used for optical fiber and links to each other with demodulating system with external light source.Barrel shell 4 is connected through screw with two lids 1, covers that to have the 5th cylindrical groove 11, the five cylindrical grooves 11 diameters on 1 identical with base for supporting 2 diameters, and the degree of depth is 1～2mm, is convenient to dock with base for supporting 2 fix.
Be carved with on the optical fiber on the first sense light fiber Bragg grating 8, another root optical fiber and be carved with the second sense light fiber Bragg grating 9; The position of being carved with optical fiber Bragg raster is encapsulated on elastomer block 3 axis; And the encapsulation position is naked fibre, in encapsulation process, is added with on the grating and desires tension force to prevent chirp.The first sense light fiber Bragg grating 8, the second sense light fiber Bragg grating 9 can be connected with the outside light signal demodulation process device of sensor through connecting the optical fiber series connection, also can draw with light signal demodulation process device through the parallel connection of connection optical fiber two-way to be connected.
As shown in Figure 1 when employing and linked method, the second technology seam 21 of two connection optical fiber one ends on base for supporting 2 drawn from optical fiber outlet 10, and two connection optical fiber other ends do not link to each other.Two connect the first technology seam 51 of optical fiber one ends on mass 5 and draw continuously when adopting series connection method, and two connect the optical fiber other ends and draw with the outside light signal demodulation process device of sensor from optical fiber outlet 10 and be connected.
Claims (7)
1. temperature self-compensation type double grating symmetry push-pull type optical fiber raster vibration sensor, this vibration transducer is made up of with two base for supporting (2) housing, two elastomer blocks (3), a mass (5), two optical fiber Bragg rasters (8,9), two Connection Blocks (6); Mass (5) is positioned between the elastomer block (3) of two symmetries; Be pasted with Connection Block (6) respectively on mass (5) both ends of the surface; Two Connection Blocks (6) dock cementation with two elastomer blocks (3) one ends respectively, and two elastomer blocks (3) other end docks cementation with two base for supporting (2) respectively again, thereby form symmetrical push-pull type structure; It is characterized in that two optical fiber Bragg rasters (8,9) are encapsulated in respectively in two elastomer blocks (3), form two optical fibre Bragg grating sensings; Adopt the modularization assembly structure, mass (5), Connection Block (6), elastomer block (3), optical fiber Bragg raster and base for supporting (2) are formed sensing probe and are placed enclosure interior; Said elastomer block (3) is a right cylinder; The employing resilient material is made; One end inserts second cylindrical groove (62) of Connection Block (6) and docks cementation with second cylindrical groove (62), and an end inserts the three cylindrical groove (24) of base for supporting (2) and docks cementation with three cylindrical groove (24); Two elastomer blocks (3) and mass (5) are formed elastic system, and elastomer block (3) is as the elastic system parts, and its elastic modulus E, radius R, high H are to the sensitivity S and the eigenfrequency f of sensor
0Direct influence is arranged, and the sensitivity of sensor and eigenfrequency formula are:
M is the gross mass of mass (5) and Connection Block (6) in the formula, λ
1And λ
2Be the wavelength of two optical fiber Bragg rasters, k is the elasticity coefficient of elastic system, E, R, H according to formula (1) and (2) according to S and f
0Requirement be optimized the design obtain.
2. temperature self-compensation type double grating symmetry push-pull type optical fiber raster vibration sensor as claimed in claim 1; It is characterized in that said mass (5) is copper right cylinder; The cylinder two ends have first cylindrical groove (52); First cylindrical groove (52) degree of depth satisfies the fibre-optical bending requirement, and first cylindrical groove (52) diameter is identical with cylinder shell (61) external diameter that Connection Block (6) one distal process go out, and has first technology seam (51) on first cylindrical groove (52).
3. temperature self-compensation type double grating symmetry push-pull type optical fiber raster vibration sensor as claimed in claim 1; It is characterized in that said Connection Block (6) and base for supporting (2) are copper material; Connection Block (6) is collar plate shape parts; Have second cylindrical groove (62) on disk one end face, second cylindrical groove (62) diameter is identical with elastomer block (3) diameter, and the degree of depth is 1～2mm; Have the cylinder shell (61) of protrusion to be inserted in mass (5) first cylindrical grooves (52) and with first cylindrical groove (52) on the disk other end and dock cementation, place, Connection Block (6) axis is equipped with first fabrication hole (63); Base for supporting (2) is a right cylinder; Be equipped with second fabrication hole (23) on the axis; Both ends of the surface have three cylindrical groove (24) and the 4th cylindrical groove (22), and three cylindrical groove (24) diameter is identical with elastomer block (3) diameter, and the degree of depth is 1～2mm; The 4th cylindrical groove (22) degree of depth satisfies the fibre-optical bending requirement, and has second technology seam (21).
4. temperature self-compensation type double grating symmetry push-pull type optical fiber raster vibration sensor as claimed in claim 1; It is characterized in that said housing by barrel shell (4) with the lid (1) form; Barrel shell (4) is the stainless steel cylindrical drum, has optical fiber outlet (10) on barrel shell (4) sidewall, and barrel shell (4) is connected through screw with lid (1); Have the 5th cylindrical groove (11) on the lid (1); The 5th cylindrical groove (11) diameter is identical with base for supporting (2) diameter, and the degree of depth is 1～2mm, and an end of base for supporting (2) is inserted into the 5th cylindrical groove (11) and docks cementation with the 5th cylindrical groove (11).
5. temperature self-compensation type double grating symmetry push-pull type optical fiber raster vibration sensor as claimed in claim 1; It is characterized in that the position of being carved with optical fiber Bragg raster on the said optical fiber is encapsulated on elastomer block (3) axis; And the encapsulation position is naked fibre, in encapsulation process, is added with desire tension force on the optical fiber Bragg raster.
6. temperature self-compensation type double grating symmetry push-pull type optical fiber raster vibration sensor as claimed in claim 1; It is characterized in that said two optical fiber Bragg rasters (8,9) are connected with the outside light signal demodulation process device of sensor through connecting the optical fiber series connection; Be the monochromatic light road this moment, the central wavelength lambda of two optical fiber Bragg rasters
1And λ
2Can not be the same; The first technology seam (51) of two connection optical fiber one ends on mass (5) drawn continuous, and two connection optical fiber other ends are drawn with the outside light signal demodulation process device of sensor from optical fiber outlet (10) and are connected.
7. temperature self-compensation type double grating symmetry push-pull type optical fiber raster vibration sensor as claimed in claim 1; It is characterized in that said two optical fiber Bragg rasters (8,9) draw with light signal demodulation process device and be connected through connecting the parallel connection of optical fiber two-way; Be double light path this moment; Connect the second technology seam (21) of optical fiber one end on base for supporting (2) and draw from optical fiber outlet (10), two connect the optical fiber other end and do not link to each other.
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| CN2578832Y (en) * | 2002-11-14 | 2003-10-08 | 钟少龙 | Temperature self-compensated differential optical fibre acceleration sensor probe |
| US6955085B2 (en) * | 2003-06-02 | 2005-10-18 | Weatherford/Lamb, Inc. | Optical accelerometer or displacement device using a flexure system |
| US7137299B2 (en) * | 2005-04-21 | 2006-11-21 | Northrop Grumman Corporation | Fiber optic accelerometer |
| CN201155991Y (en) * | 2007-12-20 | 2008-11-26 | 武汉理工大学 | Optical fibre grating acceleration sensor |
| CN201203508Y (en) * | 2008-05-29 | 2009-03-04 | 同济大学 | High-sensitivity temperature self-compensation type optical fiber grating acceleration sensing device |
-
2010
- 2010-05-25 CN CN2010101814899A patent/CN101852643B/en active Active
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