CN101840782B - Improvement of variable ceramic vacuum capacitor structure - Google Patents
Improvement of variable ceramic vacuum capacitor structure Download PDFInfo
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- CN101840782B CN101840782B CN2009100260008A CN200910026000A CN101840782B CN 101840782 B CN101840782 B CN 101840782B CN 2009100260008 A CN2009100260008 A CN 2009100260008A CN 200910026000 A CN200910026000 A CN 200910026000A CN 101840782 B CN101840782 B CN 101840782B
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- vacuum capacitor
- adjusting screw
- ceramic vacuum
- pull bar
- rod
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Abstract
The invention discloses an improved structure of variable ceramic vacuum capacitor. The variable ceramic vacuum capacitor comprises a sleeve, an adjusting screw rod, an adjusting screw nut, a pull rod, a positioning guide sleeve, a corrugated pipe, an electrode and a case; one end of the adjusting screw rod is fixedly connected with a driving part, the other end is freely meshed with the adjusting screw nut, the adjusting screw nut is fixedly connected with one end of the pull rod, the other end of the pull rod is fixedly connected with one end of the electrode, the outer side of the pull rod is provided with the positioning guide sleeve, one end of the positioning guide sleeve is fixedly connected with the inner wall of the case, the positioning guide sleeve, the sleeve and the pull rod are respectively provided with at least one air hole, heat generated by friction can be rapidly released, sliding is more smooth, so that the mechanical life of the variable ceramic vacuum capacitor is prolonged to be more than two million times, thus prolonging the service cycle of the variable ceramic vacuum capacitor and reducing use cost of semi-conductor processing equipment.
Description
Technical field
The present invention relates to a kind of variable ceramic vacuum capacitor, particularly a kind of variable ceramic vacuum capacitor structure-improved.
Background technology
At present, according to the requirement of standard GB/T 3788-1995, be 5,000 to 20,000 the mechanical endurance of variable ceramic vacuum capacitor, and this standard is applicable to the life requirements of variable ceramic vacuum capacitor in broadcast transmission and the high-frequency heating apparatus.Along with progress of science and technology, variable ceramic vacuum capacitor has been widely used in semiconductor processing equipment at present, and to having higher requirement the mechanical endurance of variable ceramic vacuum capacitor, this requirement is that existing universal architecture can't satisfy.
Summary of the invention
In order to remedy above deficiency, the invention provides a kind of variable ceramic vacuum capacitor structure-improved, improved the mechanical endurance of variable ceramic vacuum capacitor greatly, thereby reduced the use cost of semiconductor processing equipment.
The present invention for the technical scheme that solves its technical problem and adopt is: a kind of variable ceramic vacuum capacitor structure-improved, variable ceramic vacuum capacitor comprises sleeve, adjusting screw(rod), adjusting nut, pull bar, the location guide pin bushing, bellows, electrode and shell, adjusting screw(rod) one end and driving member are connected, the other end and adjusting nut freely mesh, adjusting nut and pull bar one end are connected, the pull bar other end and electrode one end are connected, the pull bar outside is arranged with the location guide pin bushing, location guide pin bushing one end and outer casing inner wall are connected, the guide pin bushing outside, location is arranged with bellows, jacket casing is located at outside adjusting screw(rod) and the adjusting nut and with shell and is connected, adjusting screw(rod) is the positive and negative alternate rotation under driving member drives, the rotation of adjusting screw(rod) then drives adjusting nut and does rectilinear motion up and down, adjusting nut then moves up and down by the drive pull bar and drives electrode moving linearly up and down, thereby regulate the electric capacity of variable ceramic vacuum capacitor, the location guide pin bushing, be respectively equipped with at least one pore on sleeve and the pull bar, when pull bar drives electrode up and down during rectilinear motion, because friction can produce heat, pore can be discharged heat, thereby prevents that pull bar and location guide pin bushing from having some setbacks because of fricative heat effects material surface causes sliding.
As a further improvement on the present invention, be provided with the lubricant grease that heat resistant and wear resistant decreases between location guide pin bushing and the pull bar and between adjusting screw(rod) and the adjusting nut, can prevent effectively that part is stuck in mechanical movement repeatedly, make motion more smooth and easy.
As a further improvement on the present invention, adjusting nut adopts high-abrasive material, Wear-resistant Treatment is carried out on adjusting screw(rod) and pull bar surface, wear resistant processing method has a lot, all be that the common engineers and technicians in this field are known, such as adopting CVD (Chemical Vapor Deposition) method to apply one deck attrition resistant materials, make the surface hard and smooth smooth at piece surface.
As a further improvement on the present invention, bellows list ripple displacement is brought up to 1.8mm, has effectively improved the sealing of bellows.
Useful technique effect of the present invention is: the present invention is under the situation that does not change the product installation dimension, brought up to more than 2,000,000 times the mechanical endurance of variable ceramic vacuum capacitor, thereby improved the life cycle of variable ceramic vacuum capacitor, reduced the use cost of semiconductor processing equipment.
Description of drawings
Fig. 1 is an internal structure schematic diagram of the present invention.
Embodiment
Embodiment: a kind of variable ceramic vacuum capacitor structure-improved, variable ceramic vacuum capacitor comprises sleeve 1, adjusting screw(rod) 2, adjusting nut 3, pull bar 4, location guide pin bushing 5, bellows 6, electrode 7 and shell 8, adjusting screw(rod) 2 one ends and driving member are connected, the other end and adjusting nut 3 freely mesh, adjusting nut 3 is connected with pull bar 4 one ends, pull bar 4 other ends and electrode 7 one ends are connected, pull bar 4 outsides are arranged with location guide pin bushing 5, location guide pin bushing 5 one ends and shell 8 inwalls are connected, guide pin bushing 5 outsides, location are arranged with bellows 6, sleeve 1 is sheathed on adjusting screw(rod) 2 and adjusting nut 3 outsides and is connected with shell 8, adjusting screw(rod) 2 is the positive and negative alternate rotation under driving member drives, the rotation of adjusting screw(rod) 2 then drives adjusting nut 3 and does rectilinear motion up and down, 3 of adjusting nuts move up and down and drive electrode moving linearly about in the of 7 by driving pull bar 4, thereby regulate the electric capacity of variable ceramic vacuum capacitor, location guide pin bushing 5, be respectively equipped with at least one pore 9 on sleeve 1 and the pull bar 4, when pull bar 4 drives electrodes about in the of 7 during rectilinear motion, because friction can produce heat, pore 9 can be discharged heat, thereby prevents that pull bar 4 and location guide pin bushing 5 from having some setbacks because of fricative heat effects material surface causes sliding.
Be provided with the lubricant grease that heat resistant and wear resistant decreases between described location guide pin bushing 5 and the pull bar 4 and between adjusting screw(rod) 2 and the adjusting nut 3, can prevent effectively that part is stuck in mechanical movement repeatedly, make motion more smooth and easy.
Described adjusting nut 3 adopts high-abrasive material, Wear-resistant Treatment is carried out on adjusting screw(rod) 2 and pull bar 4 surfaces, wear resistant processing method has a lot, all be that the common engineers and technicians in this field are known, such as adopting CVD (Chemical Vapor Deposition) method to apply one deck attrition resistant materials, make the surface hard and smooth smooth at piece surface.
Described bellows 6 single ripple displacements are brought up to 1.8mm, have effectively improved the sealing of bellows.
Claims (4)
1. variable ceramic vacuum capacitor structure-improved, variable ceramic vacuum capacitor comprises sleeve (1), adjusting screw(rod) (2), adjusting nut (3), pull bar (4), location guide pin bushing (5), bellows (6), electrode (7) and shell (8), adjusting screw(rod) (2) one ends and driving member are connected, the other end and adjusting nut (3) freely mesh, adjusting nut (3) is connected with pull bar (4) one ends, pull bar (4) other end and electrode (7) one ends are connected, pull bar (4) outside is arranged with location guide pin bushing (5), location guide pin bushing (5) one ends and shell (8) inwall are connected, location guide pin bushing (5) outside is arranged with bellows (6), sleeve (1) is sheathed on outside adjusting screw(rod) (2) and the adjusting nut (3) and with shell (8) and is connected, and it is characterized by: location guide pin bushing (5), be respectively equipped with at least one pore (9) on sleeve (1) and the pull bar (4).
2. a kind of variable ceramic vacuum capacitor structure-improved according to claim 1 is characterized by: be provided with the lubricant grease that heat resistant and wear resistant decreases between location guide pin bushing and the pull bar and between adjusting screw(rod) and the adjusting nut.
3. a kind of variable ceramic vacuum capacitor structure-improved according to claim 1 is characterized by: adjusting nut adopts high-abrasive material, and Wear-resistant Treatment is carried out on adjusting screw(rod) and pull bar surface.
4. a kind of variable ceramic vacuum capacitor structure-improved according to claim 1 is characterized by: bellows list ripple displacement is brought up to 1.8mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009100260008A CN101840782B (en) | 2009-03-16 | 2009-03-16 | Improvement of variable ceramic vacuum capacitor structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009100260008A CN101840782B (en) | 2009-03-16 | 2009-03-16 | Improvement of variable ceramic vacuum capacitor structure |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101840782A CN101840782A (en) | 2010-09-22 |
| CN101840782B true CN101840782B (en) | 2011-08-31 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2009100260008A Active CN101840782B (en) | 2009-03-16 | 2009-03-16 | Improvement of variable ceramic vacuum capacitor structure |
Country Status (1)
| Country | Link |
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| CN (1) | CN101840782B (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103578745B (en) * | 2012-07-24 | 2016-12-21 | 昆山国力真空电器有限公司 | The structure-improved of water-cooled ceramic vacuum capacitor |
| CN103366959A (en) * | 2013-06-19 | 2013-10-23 | 昆山国力真空电器有限公司 | Variable vacuum capacitor with two-way self-positioning structure |
| CN105185590B (en) * | 2015-07-13 | 2018-08-17 | 昆山国力电子科技股份有限公司 | Minimize variable ceramic vacuum capacitor |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005183844A (en) * | 2003-12-22 | 2005-07-07 | Meidensha Corp | Vacuum variable capacitor |
| CN201374254Y (en) * | 2009-03-16 | 2009-12-30 | 昆山国力真空电器有限公司 | Improved structure of variable ceramic vacuum capacitor |
-
2009
- 2009-03-16 CN CN2009100260008A patent/CN101840782B/en active Active
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005183844A (en) * | 2003-12-22 | 2005-07-07 | Meidensha Corp | Vacuum variable capacitor |
| CN201374254Y (en) * | 2009-03-16 | 2009-12-30 | 昆山国力真空电器有限公司 | Improved structure of variable ceramic vacuum capacitor |
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| Publication number | Publication date |
|---|---|
| CN101840782A (en) | 2010-09-22 |
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Address after: 215301 West Lake Road, Kunshan Development Zone, Jiangsu, China, No. 28, No. Patentee after: Kunshan national electronic Polytron Technologies Inc Address before: 215301 Changjiang Road, Kunshan Development Zone, Jiangsu, China, 179 Patentee before: Kunshan Guoli Vacuum Electric Co., Ltd. |