CN101832755A - Digital processing method for detecting micro beam deflection of micro cantilever focal plane array - Google Patents
Digital processing method for detecting micro beam deflection of micro cantilever focal plane array Download PDFInfo
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- CN101832755A CN101832755A CN201010190288A CN201010190288A CN101832755A CN 101832755 A CN101832755 A CN 101832755A CN 201010190288 A CN201010190288 A CN 201010190288A CN 201010190288 A CN201010190288 A CN 201010190288A CN 101832755 A CN101832755 A CN 101832755A
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Abstract
The invention discloses a digital XOR method for detecting the micro beam deflection of a micro cantilever, which is mainly applied in a bi-material micro cantilever infrared imaging system. A fine difference between a primary frame image and each subsequent frame image can be detected and a high-precision digital quantity result can be obtained by performing bit XOR operation on the digital image data acquired by the system. The method has simple principles and is easy to realize, reduces the complexity of the design of the system at the same time, can better resist external interference and brings great convenience to subsequent processing.
Description
Technical field
Patent of the present invention relates to a kind of digital processing method that is used to detect the beam deflection of micro of micro-cantilever focal plane arrays (FPA), this method is mainly used in the bi-material microcantilevel infrared imaging system, than the method that present infrared imaging system of the same type generally adopts, this method can better be resisted external interference when reducing design complexities.
Background technology
At present, based on the infrared imaging system of bi-material microcantilevel in order to read the amount of deflection that focal plane array lists micro-cantilever, usually receiving after optical read goes out the data of module, must carry out two two field picture phase reducings, promptly receive data with the high s/n ratio ccd image sensor, carry out real-time digital picture then and get poorly, get the amount of deflection that poor result is exactly a bi-material microcantilevel.But, though this method of subtracting each other based on two two field pictures that subtract the shadow art is theoretical simple, but in practice, use this method can make design comparatively complicated, because ccd image sensor is mainly surveyed light intensity, the slight change of external environment all can be reflected on the CCD, negative may appear in the operation of two width of cloth image subtractions, therefore at first need the compared pixels size, cause data to be overflowed in case negative occurs, be unfavorable for follow-up processing, thereby and when gathering infrared video, be subjected to external environmental interference to produce ground unrest easily.
Summary of the invention
For overcome existing bi-material microcantilevel infrared imaging system the deficiency of digital processing method of beam deflection of micro of the detection micro-cantilever focal plane arrays (FPA) that generally adopts, patent of the present invention provides a kind of principle more simple, it is more easy to realize, the while can reduce design complexities and can better resist the method for external interference.This method is exactly the method for digital XOR.
The technical scheme that this method adopted is: at first, design is based on the Flame Image Process hardware platform of FPGA (Field-ProgrammableGate Array), receive after micro-cantilever infrared imaging system optical read goes out the data of module at CCD, preserve the numer of initial frames digital image data by FPGA control SDRAM (Synchronous Dynamic RandomAccess Memory), then each frame image data is carried out the step-by-step xor operation with the initial frame view data respectively.Because the gray scale of each pixel of digital picture is to determine by each binary value of the data of this pixel of expression is common, under the effect of step-by-step XOR, corresponding position binary value result is 1 when two two field picture respective pixel point data are different, be 0 when identical, thereby detected the nuance of each two field picture and initial frame image thereafter and its form with digital quantity has accurately been exported, reached the purpose of the amount of deflection of reading micro-cantilever.
Beneficial effect
The beneficial effect of this method is, because the core concept of this method is by two frame of digital view data are carried out the beam deflection of micro that the step-by-step xor operation is detected the micro-cantilever focal plane arrays (FPA) accurately, compare and old method, principle is more simple and realization is easy, reduce the complexity of system design simultaneously and reduced the operand of real-time processing, can better resist external interference.Even if show by experiment and adopt the lower cmos image sensor of signal to noise ratio (S/N ratio) still can obtain better effects, not only reduced cost but also provided very big facility for subsequent treatment.
Embodiment
The first step is set up with FPGA as handling core, and SDRAM is as outer extension memory, and has digital CCD interface, can carry out the Flame Image Process hardware platform of exchanges data with CCD;
Second step, start the micro-cantilever infrared imaging system, its core sensor---bi-material microcantilevel focal plane arrays (FPA) detects after the extraneous infrared radiation, and the micro-cantilever on the array deflects, thereby the light intensity that reflects from focal plane arrays (FPA) is changed;
The 3rd step, receive the light that focal plane arrays (FPA) reflects with CCD, be converted into after the data image signal, enter the FPGA image processing system, open up two block cache district A1 and A2 among the high-speed memory SDRAM by being controlled at of FPGA, this two block caches district size is identical and can hold a frame of digital image;
The 4th step deposited the numer of initial frames digital image data in buffer area A1 and remains unchanged under FPGA control, A2 is then as a variable interim buffer area, thereafter each frame image data is carried out a frame in the A2 the inside deposit;
The 5th step, the data of the view data of buffer area A1 and variable cache district A2 are carried out the step-by-step XOR of high-speed parallel in FPGA the inside, then with the data after computing output, thereby can detect the nuance of initial frame image and each two field picture thereafter and obtain high-precision digital quantity result.
Claims (2)
1. digital XOR method that is used to detect the beam deflection of micro of micro-cantilever focal plane arrays (FPA), this method is mainly used in the bi-material microcantilevel infrared imaging system, it is characterized in that: introduce binary step-by-step XOR method and detect the nuance of initial frame image and each two field picture thereafter and obtain high-precision digital quantity result in the micro-cantilever infrared imaging system.
2. digital XOR method according to claim 1 is characterized in that: the step-by-step XOR method with two frame of digital images replaces the method for two frame of digital image subtractions to carry out the accurate comparison of two frame image datas.
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
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CN102547155A (en) * | 2012-01-10 | 2012-07-04 | 北京理工大学 | Windowing-XOR-based micro-cantilever array infrared image reconstruction method |
CN106595786A (en) * | 2016-12-22 | 2017-04-26 | 西安交通大学 | Silicon micro-flow sensor chip with arrayed cantilever beam membrane structure |
Citations (3)
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CN101046735A (en) * | 2006-03-30 | 2007-10-03 | 华为技术有限公司 | Video data compression method |
JP2008014785A (en) * | 2006-07-05 | 2008-01-24 | Mec:Kk | Inspection system and inspection method |
CN101163364A (en) * | 2006-10-13 | 2008-04-16 | 北方工业大学 | Monitoring system and method for monitoring operation of electric element using the system |
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CN101046735A (en) * | 2006-03-30 | 2007-10-03 | 华为技术有限公司 | Video data compression method |
JP2008014785A (en) * | 2006-07-05 | 2008-01-24 | Mec:Kk | Inspection system and inspection method |
CN101163364A (en) * | 2006-10-13 | 2008-04-16 | 北方工业大学 | Monitoring system and method for monitoring operation of electric element using the system |
Non-Patent Citations (1)
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102547155A (en) * | 2012-01-10 | 2012-07-04 | 北京理工大学 | Windowing-XOR-based micro-cantilever array infrared image reconstruction method |
CN106595786A (en) * | 2016-12-22 | 2017-04-26 | 西安交通大学 | Silicon micro-flow sensor chip with arrayed cantilever beam membrane structure |
CN106595786B (en) * | 2016-12-22 | 2019-06-14 | 西安交通大学 | A kind of array cantilever beam diaphragm structure silicon microflow sensor chip |
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Application publication date: 20100915 |