CN101832352B - Low-frequency vibration isolator with three degrees of freedom - Google Patents
Low-frequency vibration isolator with three degrees of freedom Download PDFInfo
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- CN101832352B CN101832352B CN201010149413A CN201010149413A CN101832352B CN 101832352 B CN101832352 B CN 101832352B CN 201010149413 A CN201010149413 A CN 201010149413A CN 201010149413 A CN201010149413 A CN 201010149413A CN 101832352 B CN101832352 B CN 101832352B
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Abstract
The invention provides a low-frequency vibration isolator with three degrees of freedom, which relates to a vibration isolation device used for the precision field, the IC (integrated circuit) manufacturing field or the optical field. The vibration isolator comprises an air spring and a pair of hollow tubular permanent magnets, wherein the outer hollow tubular permanent magnet is fixed at the top of the main body of the air spring, and the inner hollow tubular permanent magnet is fixed on a rubber piston of the air spring, thereby realizing vibration isolation. The low-frequency vibration isolator can simultaneously realize low-frequency vibration isolation of multiple degrees of freedom, has good low-frequency vibration isolation effect, and has the advantages of few components, less mechanical wear, low cost, long service life, high accuracy and the like.
Description
Technical field
The present invention relates to a kind of a kind of device for vibration insutation that is used on accurate field, IC (intergrated circuit) manufacturing field or the optical field, be used for vibration and isolate, avoid vibrating influence equipment precision.
Background technique
Mechanical vibration all can produce quality of product, performance accuracy, life of product, production security, environment and health of human body etc. and have a strong impact on.Be accompanied by the progress and development of society, the raising of people's living standard, the control of vibration requires also increasingly high.The method of vibration control mainly contains weakening, vibration isolation and absorbing etc., but most widely usedly in mechanical system surely belongs to vibration isolation.
At present, vibration isolating mechanism both domestic and external mainly contains several kinds of forms: layer closes rubber, three string pendulums, pendulum, X put, wave ball etc.It is simple that rubber structure is closed in its middle level, but it is non-linear stronger, is difficult for the natural frequency that reaches lower.Fall pendulum and X pendulum for non-linear superlow frequency vibration isolating mechanism, be mainly used in astronomy and instrument industry.Along with the continuous development of science and technology and the continual renovation of product; Increasingly high to required precision; And, high requirement having been proposed vibrating isolation system progressively to the nanometer development. the design object of vibration isolator is to make the natural frequency of vibrating isolation system low as far as possible, and vibration isolation efficiency is high as far as possible.
Along with the development of industries such as ultraprecise, the innovation research that gos deep into of vibration isolating mechanism is inevitable, need the further new vibration isolator of further investigation.The best vibration isolator of effect is pneumatic spring or permanent magnetic spring at present, and pneumatic spring has good vibration isolating effect to dither, is a kind of comparatively ideal vibration isolation technique, can improve the precision and the testing efficiency of equipment, but can only realize the vibration isolation of one degree of freedom.
Summary of the invention
The objective of the invention is to propose a kind of low-frequency vibration isolator with three degrees of freedom, can isolate the vibration of different direction in vertical and the horizontal plane simultaneously.
The objective of the invention is to realize through following technological scheme:
A kind of low-frequency vibration isolator with three degrees of freedom; It is characterized in that: described low-frequency vibration isolator with three degrees of freedom comprises pneumatic spring, hollow tubular permanent magnet and external hollow tubular permanent magnet; Described pneumatic spring comprises pneumatic spring main body and rubber piston, the throttle orifice that the pneumatic spring main body contains upper chamber, lower chambers and is communicated with chamber up and down; Hollow tubular permanent magnet and external hollow tubular permanent magnet coaxial arrangement in described; External hollow tubular permanent magnet is fixed on the top of pneumatic spring main body; In hollow tubular permanent magnet be fixed on the described rubber piston, and two hollow tubular permanent magnet homopolarities are relative, diametrical magnetization.
The present invention compared with prior art, effect with high-lighting has the following advantages:
1. low frequency vibration isolation is effective: the natural frequency of pneumatic spring and permanent magnetic spring is lower; Be generally less than 2-3Hz; The vibration isolator that the present invention is a body design with pneumatic spring and two hollow tubular permanent magnets has less natural frequency, can realize vibration isolation better to IC equipment or other precision equipment.
2. can realize simultaneously that multivariant vibration isolation isolates: rubber vibration isolator or metal spring are generally realized the vibration isolation of single-degree-of-freedom, are difficult to realize simultaneously the multi-freedom degree vibration isolation.This low-frequency vibration isolator with three degrees of freedom utilizes pneumatic spring to realize vibration isolation in vertical direction; Use pair of hollow shape permanent magnet to realize the vibration isolation of all directions in both direction or the horizontal plane in the horizontal direction, if use the vibration isolation that in mechanical system, can realize three directions simultaneously.
3. the assembly of this vibration isolator is few: this low-frequency vibration isolator with three degrees of freedom has three parts to be formed, and promptly pneumatic spring and two hollow tubular magnets are easy to manufacturing, have solved complex structure, the problem of processing difficulties.
4. this low-frequency vibration isolator with three degrees of freedom mechanical wear is little, and cost is low, when work, also has characteristics such as no friction, working stability, long service life, precision height.
Description of drawings
Fig. 1 provides the structural principle schematic representation (main sectional view) of low-frequency vibration isolator with three degrees of freedom for the present invention.
Fig. 2 is the structural representation of inside and outside hollow tubular permanent magnet.
Among the figure: 1-pneumatic spring main body; Hollow tubular permanent magnet in the 2-; 3-external hollow tubular permanent magnet; The 4-dividing plate; The 5-throttle orifice; 6-upper chamber; The 7-lower chambers; The 8-rubber piston.
Embodiment
Below in conjunction with accompanying drawing structure of the present invention, principle and working procedure are further described.
Fig. 1 provides the structural principle schematic representation (main sectional view) of low-frequency vibration isolator with three degrees of freedom for the present invention; This low-frequency vibration isolator with three degrees of freedom comprise pneumatic spring, in hollow tubular permanent magnet 2 and external hollow tubular permanent magnet 3; Pneumatic spring comprises pneumatic spring main body 1 and rubber piston 8, throttle orifice 5 compositions that the pneumatic spring main body contains upper chamber 6, lower chambers 7 and is communicated with chamber up and down; In hollow tubular permanent magnet and external hollow tubular permanent magnet coaxial arrangement; External hollow tubular permanent magnet is fixed on the top of pneumatic spring main body; In hollow tubular permanent magnet be fixed on the rubber piston main body, and two hollow tubular permanent magnet homopolarities are relative, diametrical magnetization.
The working principle of this low-frequency vibration isolator with three degrees of freedom is following:
Vibration isolating mechanism in vertical direction is a pneumatic spring; The rubber piston 8 of pneumatic spring upper end receives when vibrating, and rubber piston 8 deforms, and the volume of pneumatic spring upper chamber 6 changes; Air in the upper chamber 6 flows to lower chambers 7 through the throttle orifice on the dividing plate 45; Because the throttle effect of throttle orifice 5, the kinetic energy of mechanical system vibration is changed into heat energy be consumed, realize the vibration isolating effect of Vertical direction.
This low-frequency vibration isolator with three degrees of freedom is realized vibration isolation by interior hollow tubular permanent magnet 2 and external hollow tubular permanent magnet 3 in horizontal plane; When any direction in the horizontal plane has vibration; With pneumatic spring upper end rubber piston fixing in hollow tubular permanent magnet 2 depart from the equilibrium position because the same pole of inside and outside two permanent magnets is relative, under the effect of hollow outside tubular permanent magnet 3 repulsion; Hollow tubular permanent magnet 2 constantly returns to the equilibrium position in making, and realizes the vibration isolation of substantially horizontal.
This invention can be used as parts separately when reality is used, and also can several vibration isolator parallel connections be used, and realizes the isolation of vibration.
Claims (1)
1. low-frequency vibration isolator with three degrees of freedom; It is characterized in that: described low-frequency vibration isolator with three degrees of freedom comprise pneumatic spring, in hollow tubular permanent magnet (2) and external hollow tubular permanent magnet (3); Described pneumatic spring comprises pneumatic spring main body (1) and rubber piston (8), and described pneumatic spring main body is made up of upper chamber (6), lower chambers (7) and the throttle orifice (5) that is communicated with chamber up and down; Hollow tubular permanent magnet and external hollow tubular permanent magnet coaxial arrangement in described; External hollow tubular permanent magnet is fixed on the top of pneumatic spring main body; In hollow tubular permanent magnet be fixed on the described rubber piston, and two hollow tubular permanent magnet homopolarities are relative, diametrical magnetization; This low-frequency vibration isolator with three degrees of freedom utilizes pneumatic spring to realize vibration isolation in vertical direction; Use pair of hollow shape permanent magnet to realize the vibration isolation of all directions in both direction or the horizontal plane in the horizontal direction, if use the vibration isolation that in mechanical system, can realize three directions simultaneously; The scope of low frequency is 2～3Hz.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201010149413A CN101832352B (en) | 2010-04-15 | 2010-04-15 | Low-frequency vibration isolator with three degrees of freedom |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201010149413A CN101832352B (en) | 2010-04-15 | 2010-04-15 | Low-frequency vibration isolator with three degrees of freedom |
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| CN101832352A CN101832352A (en) | 2010-09-15 |
| CN101832352B true CN101832352B (en) | 2012-10-10 |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN109263165B (en) * | 2018-10-26 | 2024-01-30 | 西南交通大学 | Multiband-selected-control medium-low frequency absorption and vibration isolation metamaterial |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2685649Y (en) * | 2003-04-22 | 2005-03-16 | 天津森氏精密仪器有限公司 | A new magnetic damper |
| CN201065906Y (en) * | 2007-06-19 | 2008-05-28 | 刘新广 | Magnetic shock-absorber |
| CN101398052A (en) * | 2008-09-17 | 2009-04-01 | 华中科技大学 | Heavy load precision damper and vibration reduction system formed thereby |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101012860A (en) * | 2007-02-02 | 2007-08-08 | 常熟理工学院 | Composite magnetic damping vibration absorber |
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Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2685649Y (en) * | 2003-04-22 | 2005-03-16 | 天津森氏精密仪器有限公司 | A new magnetic damper |
| CN201065906Y (en) * | 2007-06-19 | 2008-05-28 | 刘新广 | Magnetic shock-absorber |
| CN101398052A (en) * | 2008-09-17 | 2009-04-01 | 华中科技大学 | Heavy load precision damper and vibration reduction system formed thereby |
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Effective date of registration: 20151118 Address after: 100084 Beijing box office,,, Tsinghua University Patentee after: Tsinghua University Patentee after: U-PRECISION TECH CO., LTD. Address before: 100084 Beijing box office,,, Tsinghua University Patentee before: Tsinghua University |