CN101799607B - Touch control reflective display panel and manufacturing method thereof - Google Patents
Touch control reflective display panel and manufacturing method thereof Download PDFInfo
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- CN101799607B CN101799607B CN2010101474134A CN201010147413A CN101799607B CN 101799607 B CN101799607 B CN 101799607B CN 2010101474134 A CN2010101474134 A CN 2010101474134A CN 201010147413 A CN201010147413 A CN 201010147413A CN 101799607 B CN101799607 B CN 101799607B
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Abstract
The invention relates to a touch control reflective display panel which comprises a front base plate, a plurality of scanning lines, a plurality of data lines, a plurality of pixel structures, a plurality of photoinduced components, a plurality of read-out components, a back base plate and a reflective display medium, wherein the front base plate is provided with an inner surface; the scanning lines and the data lines are mutually arranged on the inner surface of the front base plate in an interlacing way; the pixel structures are arranged on the inner surface of the front base plate; each pixel structure is electrically connected with corresponding scanning lines and data lines; the photoinduced components are arranged on the inner surface of the front base plate; each read-out component is electrically connected with the corresponding photoinduced components; the back base plate is opposite to the front base plate; the reflective display medium is sealed between the front base plate and the back base plate; and particularly, each photoinduced component comprises a transparent lower electrode, a photoinduced silica-rich dielectric layer and an upper electrode, wherein the transparent lower electrode is arranged on the inner surface of the front base plate; the photoinduced silica-rich dielectric layer is arranged on the transparent lower electrode; and the upper electrode is arranged on the photoinduced silica-rich dielectric layer.
Description
[technical field]
The invention relates to a kind of display panel and manufacturing approach thereof, and particularly relevant for a kind of touch control reflective display panel and manufacturing approach thereof.
[background technology]
In the development flat-panel screens, on the market for have gentlier, characteristic thinner and deflection is the target that following display is mainly pursued always.The employed display technique of such flexible display, Electronic Paper and e-book comprises lcd technology, electrophoretic display technology and electrochromism developing technology etc.Electrophoretic display device (EPD) comprises active assembly array base plate and is attached at the electrophoretic display thin film on the active assembly array base plate.Having one in the electrophoretic display thin film shows matrix and is distributed in a plurality of demonstration particles that show in the matrix.Show that matrix for example is a kind of demonstration solution, show that particle then is the particle that has positive electricity or negative electricity polarity.Active assembly array base plate then includes a plurality of image element structures of being made up of a driving component and a pixel electrode.
Generally speaking, if make electrophoretic display device (EPD) have touch controllable function, then can attach a condenser type or an electric resistance touch-control panel on the surface of last electrophoretic display device (EPD).But the subsides mode is attached at electrophoretic display device (EPD) with contact panel not only cost is higher beyond this kind, and the attaching program also can increase process complexity.Therefore, present someone proposes light sensing component is incorporated on the active assembly array base plate of electrophoretic display device (EPD).Yet because general display device of electronic paper must read having under the condition of surround lighting, so ambient light needs could arrive the light sensing component that is positioned on the active assembly array base plate through after the electrophoretic display thin film usually.Thereby tradition has the sensitive inadequately problem of touch-control sensing with the mode that light sensing component is incorporated on the active assembly array base plate of electrophoretic display device (EPD).
[summary of the invention]
The present invention provides a kind of touch control reflective display panel and manufacturing approach thereof, and it can solve the not good problem of touch-control sensing sensitivity of conditional electronic paper display device.
The present invention proposes a kind of touch control reflective display panel plate, and it comprises prebasal plate, multi-strip scanning line, many data lines, a plurality of image element structure, a plurality of light sensing component, a plurality of read assembly, metacoxal plate and reflective display medium.Prebasal plate has inside surface.Sweep trace and data line are arranged on the inside surface of prebasal plate and setting interlaced with each other.Image element structure is arranged on the inside surface of prebasal plate, and each image element structure electrically connects with corresponding scanning line and data line.Light sensing component is arranged on the inside surface of prebasal plate.Each read assembly electrically connects with corresponding light sensing component.Metacoxal plate and prebasal plate subtend are provided with.Reflective display medium is sealed between prebasal plate and the metacoxal plate.Particularly, above-mentioned each light sensing component comprises transparent bottom electrode on the inside surface that is arranged at prebasal plate, is arranged at the sensitization silicic dielectric layer on the transparent bottom electrode and is arranged at the top electrode on the sensitization silicic dielectric layer.
The present invention proposes a kind of manufacturing approach of touch control reflective display panel plate again.
Prebasal plate at first is provided, and this prebasal plate has inside surface and it has a plurality of picture elements zone and a plurality of light sensing component district.On the inside surface of prebasal plate, form multi-strip scanning line and many data lines, its corresponding above-mentioned picture element zone.The pixel electrode that in corresponding picture element zone, forms switch module and electrically connect with switch module, wherein each switch module and corresponding scanning line and data line electrically connect.In the light sensing component district in corresponding picture element zone, form light sensing component and read assembly; Wherein each read assembly electrically connects with corresponding light sensing component, and each light sensing component comprises at the transparent bottom electrode on the inside surface of prebasal plate, at top electrode on the transparent bottom electrode and the sensitization silicic dielectric layer between transparent bottom electrode and top electrode.Metacoxal plate is stood in the prebasal plate group, and the sealing reflective display medium is between prebasal plate and metacoxal plate.
Based on above-mentioned, because the present invention is arranged on the inside surface of prebasal plate with light sensing component, therefore extraneous light can just get into reflective display medium earlier through after the light sensing component on the prebasal plate.So, can increase the induction sensitivity of light sensing component.In addition, light sensing component of the present invention is to utilize the sensitization silicic dielectric layer as its light conductive material, and it is a channel status when the irradiation state, and when irradiation not, is off state.This kind light sensing component answers thin film transistor (TFT) to have preferable photoinduction effect as light sensing component compared to traditional usability.
For letting the above-mentioned feature and advantage of the present invention can be more obviously understandable, hereinafter is special lifts embodiment, and cooperates appended graphic elaborating as follows.
[description of drawings]
Fig. 1 is the diagrammatic cross-section of touch control reflective display panel plate according to an embodiment of the invention.
Fig. 2 A be on the prebasal plate of touch control reflective display panel plate of Fig. 1 the picture element unit with light sensing component district and picture element zone on look synoptic diagram.
Fig. 2 B is that Fig. 2 A is along the diagrammatic cross-section of profile line A-A ' with profile line B-B '.
Fig. 3 A to Fig. 3 G is the assembly manufacturing process synoptic diagram on the prebasal plate of reflective display panel according to an embodiment of the invention.
Fig. 4 A be on the prebasal plate of touch control reflective display panel plate according to another embodiment of the present invention the picture element unit with light sensing component district and picture element zone on look synoptic diagram.
Fig. 4 B is that Fig. 4 A is along the diagrammatic cross-section of profile line A-A ' with profile line B-B '.
[primary clustering symbol description]
100: prebasal plate
101a: inside surface
101b: outside surface
102a: transparent storage capacitors electrode layer
102b: transparent bottom electrode
104,106: insulation course
110: the sensitization silicic dielectric layer
112: top electrode
116: extension
200: metacoxal plate
202: electrode layer
300: reflective display medium
302; Adhesion layer
T1: switch module
T2: read assembly
PS: light sensing component
L: light
F: finger
U: picture element unit
U1: picture element zone
U2: light sensing component district
SL1, SL2: sweep trace
DL: data line
CS: capacitance electrode line
IL: induced signal incoming line
RL: induction signal reading line
G1, G2: grid
CH1, CH2: channel
S1, S2: source electrode
D1, D2: drain electrode
C1, C2: contact hole/contact window
O: assembly opening
P: image element structure
PE: pixel electrode
[embodiment]
Fig. 1 is the diagrammatic cross-section of touch control reflective display panel plate according to an embodiment of the invention.Fig. 2 A be on the prebasal plate of touch control reflective display panel plate of Fig. 1 the picture element unit with light sensing component district and picture element zone on look synoptic diagram.Fig. 2 B is that Fig. 2 A is along the diagrammatic cross-section of profile line A-A ' with profile line B-B '.Please be simultaneously with reference to Fig. 1, Fig. 2 A and Fig. 2 B, the touch control reflective display panel plate of present embodiment comprises prebasal plate 100, multi-strip scanning line SL1, SL2, many data line DL, a plurality of image element structure P, a plurality of light sensing component PS, a plurality of read assembly T2, metacoxal plate 200 and reflective display medium 300.
In the present embodiment, has the picture element unit U that a plurality of arrays are arranged on the inside surface 101a of prebasal plate 100.Those skilled in the art in Fig. 1 and Fig. 2 A and Fig. 2 B, only show a picture element unit U and explain, so that can clearly understand the present invention.What deserves to be mentioned is, in picture element unit (pixel unit) U that Fig. 2 A and Fig. 2 B give an example, comprise picture element zone (pixel region) U1 and light sensing component district (photo sensing device region) U2.So, the present invention does not limit each picture element unit U and must comprise picture element zone U 1 and light sensing component district U2.According to an embodiment, can a light sensing component district U2 be set at every N picture element unit U and get final product, and picture element zone U1 only is set among other picture element unit U.
Please with reference to Fig. 2 A and Fig. 2 B, sweep trace SL1, SL2 and data line DL are arranged on the inside surface 101a of prebasal plate 100, and sweep trace SL1, SL2 and data line DL setting interlaced with each other.In other words, the bearing of trend of the bearing of trend of data line DL and sweep trace SL1, SL2 is not parallel, and preferably, the bearing of trend of data line DL is vertical with the bearing of trend of sweep trace SL1, SL2.In addition, sweep trace SL1, SL2 belong to different retes with data line DL.Based on considering of electric conductivity, sweep trace SL1, SL2 and data line DL generally are to use metal material.So, the invention is not restricted to this, according to other embodiment, sweep trace SL1, SL2 and data line DL also can use other conductive material.
Image element structure P is arranged on the inside surface 101a of prebasal plate 100, and each image element structure P electrically connects with corresponding scanning line SL1 and data line DL.More detailed, all be provided with image element structure P among the picture element zone U1 of each the picture element unit U on the inside surface 101a of prebasal plate 100.According to present embodiment, image element structure P comprises switch module T1 and pixel electrode PE.Switch module T1 and sweep trace SL1 and data line DL electrically connect, and pixel electrode PE and switch module T1 electric connection.More detailed, switch module T1 comprises grid G 1, channel CH1, source S 1 and drain D 1.Grid G 1 sweep trace SL1 electrically connects.Channel CH1 is positioned at the top of grid G 1.Source S 1 and drain D 1 are positioned at the top of channel CH1, and source S 1 electrically connects with data line DL.In addition, pixel electrode PE electrically connects through the drain D 1 of contact hole C1 and switch module T1.Above-mentioned switch module T1 is to be that example is explained with the bottom grid film transistor, but the invention is not restricted to this.According to other embodiment, above-mentioned switch module T1 is also with the top grid type thin film transistor (TFT).
According to one embodiment of the invention, comprise more in above-mentioned picture element zone U1 being provided with a transparent storage capacitors electrode layer 102a that it is on the inside surface 101a of prebasal plate 100 and between the inside surface 101a of pixel electrode PE and prebasal plate 100.Transparent storage capacitors electrode layer 102a almost takes the area of picture element zone U1.And transparent storage capacitors electrode layer 102a, pixel electrode PE be positioned at transparent storage capacitors electrode layer 102a and pixel electrode PE insulation course (for example being the insulation course 104,106 shown in Fig. 2 B) between the two can constitute reservior capacitor.In addition, according to present embodiment, on the surface of transparent storage capacitors electrode layer 102a, more comprise being provided with storage capacitors capacitance electrode line CS.Storage capacitors capacitance electrode line CS directly electrically contacts with transparent storage capacitors electrode layer 102a.The bearing of trend of storage capacitors capacitance electrode line CS is parallel with the bearing of trend of sweep trace SL1, SL2, and storage capacitors capacitance electrode line CS and sweep trace SL1, SL2 belong to same rete.Share voltage (Vcom) because storage capacitors capacitance electrode line CS is electrically connected to one, thus transparent in each picture element zone U1 on the prebasal plate 100 storage capacitors electrode layer 102a can it has share voltage (Vcom) through capacitance electrode line CS.
In addition, in the light sensing component district of prebasal plate 100 U2, be provided with light sensing component PS.Particularly, light sensing component PS comprises transparent bottom electrode 102b on the inside surface 101a that is arranged at prebasal plate 100, is arranged at the sensitization silicic dielectric layer 110 on the transparent bottom electrode 102b and is arranged at the top electrode 112 on the sensitization silicic dielectric layer 110.According to one embodiment of the invention, above-mentioned transparent storage capacitors electrode layer 102a and the transparent bottom electrode 102b of light sensing component PS are same rete (shown in Fig. 2 B).Therefore, the material of transparent storage capacitors electrode layer 102a can be identical with the material of the transparent bottom electrode 102b of light sensing component PS.In addition; The sensitization silicic dielectric layer 110 of light sensing component PS comprises silicon rich silicon oxide layer (SiOx), silicon-rich silicon nitride layer (SiNy), Silicon-rich silicon oxynitride layer (SiOxNy), Silicon-rich silicon carbide layer (SiCz), Silicon-rich oxidation of coal silicon layer (SiOxCz), hydrogenation silicon rich silicon oxide layer (SiHwOx), hydrogenation silicon-rich silicon nitride layer (SiHwNy), hydrogenation Silicon-rich silicon carbide layer (SiHwCz) or its combination, wherein 0＜w＜4,0＜x＜2,0＜y＜1.34,0＜z＜1.Moreover the top electrode 112 of light sensing component PS is a transparency electrode, and itself and pixel electrode PE belong to same rete (shown in Fig. 2 B).Therefore, the material of the top electrode 112 of light sensing component PS can be identical with the material of pixel electrode PE.
In addition, comprise also in the light sensing component district of prebasal plate 100 U2 being provided with read assembly T2 that this read assembly T2 and light sensing component PS electrically connect.According to present embodiment, read assembly T2 comprises grid G 2, channel CH2, source S 2 and drain D 2.Grid G 2 sweep trace SL2 electrically connect.Channel CH2 is positioned at the top of grid G 2.Source S 2 and drain 2 be positioned at channel CH2 the top.Source S 2 is connected with an extension 116 (also can be described as the source electrode extension), so the source S 2 of read assembly T2 is to see through extension 116 to electrically connect with the top electrode 112 of light sensing component PS with contact hole C2.Above-mentioned read assembly T2 is to be that example is explained with the bottom grid film transistor, but the invention is not restricted to this.According to other embodiment, above-mentioned read assembly T2 is also with the top grid type thin film transistor (TFT).
According to present embodiment, comprise more on the inside surface 101a of prebasal plate 100 being provided with many induction signal reading line RL that each induction signal reading line RL electrically connects with corresponding read assembly T2.More detailed, the drain D 2 of induction signal reading line RL and read assembly T2 electrically connects.In addition, comprise more on the inside surface 101a of prebasal plate 100 being provided with more comprising many induced signal incoming line IL that each induced signal incoming line IL electrically connects with the transparent bottom electrode 102b of corresponding light sensing component PS.In the embodiment shown in Fig. 2 B, induction signal incoming line IL is set directly on the surface of transparent bottom electrode 102b of light sensing component PS, so both directly electrically contacts.
Please return Fig. 1, metacoxal plate 200 is arranged on the subtend of prebasal plate 100.According to one embodiment of the invention, more comprise on the surface of metacoxal plate 200 being provided with an electrode layer 202.Because touch-control display panel of the present invention is reflecting type touch-control display panel, so metacoxal plate 200 can be opaque substrate or transparency carrier, and it for example can adopt metal substrate, glass substrate or soft substrate plate.
Reflective display medium 300 is to be sealed between prebasal plate 100 and the metacoxal plate 200.Reflective display medium 300 refers to as light L and injects and when arriving reflective display medium 300, reflective display medium 300 can and penetrate it with light L reflection once more from prebasal plate 100 from prebasal plate 100.Reflective display medium 300 for example is capsule-type electrophoretic display medium (as shown in Figure 1), micella formula electrophoretic display medium, cholesterol liquid crystal electrophoretic display medium or the reflective electrophoretic display medium of other kind.Between prebasal plate 100, display medium 300 and metacoxal plate 200, can stick together together through adhesion layer 302.In addition, between prebasal plate 100, display medium 300 and metacoxal plate 200, also protective layer material be can insert, assembly or rete on protection prebasal plate 100 and the metacoxal plate 300 used.
In above-mentioned reflective display panel, because light sensing component PS utilizes sensitization silicic dielectric layer 110 as its light conductive material.When light sensing component PS is a channel status during at the irradiation state.As the touch control operation assembly for example be not to use person's finger F carry out touch control operation when stopping that light L injects light sensing component PS when irradiation (just not) then light sensing component PS be off state.Detect the sensing signal change through this kind mode and can sense position of touch.
Based on the above, because of the foregoing description is the inside surface 101a that light sensing component PS is arranged on prebasal plate 100, therefore extraneous light L can just get into reflective display medium 300 earlier through after the light sensing component PS on the prebasal plate 100.So, can increase the induction sensitivity of light sensing component PS.
Fig. 3 A to Fig. 3 G is the assembly manufacturing process synoptic diagram on the prebasal plate of reflective display panel according to an embodiment of the invention.This is the assembly manufacturing process on the prebasal plate shown in Fig. 2 A and Fig. 2 B.Please with reference to Fig. 2 A, Fig. 2 B and Fig. 3 A; Has a plurality of picture elements unit U on the inside surface 101a of this prebasal plate 100; And picture element unit U has picture element zone U1 and light sensing component district U2 (shown in Fig. 2 A), and wherein Fig. 3 A only shows the section place of corresponding B-B ' of section place and light sensing component district U2 of corresponding A-A ' of picture element zone U1.Similarly, the present invention does not limit each picture element unit U and must comprise picture element zone U1 and light sensing component district U2.According to an embodiment, can a light sensing component district U2 be set at every N picture element unit U and get final product, and picture element zone U1 only is set among other picture element unit U.On prebasal plate 100, form transparent bottom electrode 102b.According to present embodiment, when forming transparent bottom electrode 102b, more be included among each picture element zone U1 and form transparent storage capacitors electrode layer 102a.
Please, on the inside surface 101a of prebasal plate 100, form sweep trace SL1, SL2 with reference to Fig. 2 A, Fig. 2 B and Fig. 3 B.Simultaneously, in the U1 of picture element zone, form the grid G 1 that electrically connects with sweep trace SL1 and in light sensing component district U2, form the grid G 2 that electrically connects with sweep trace SL2.According to present embodiment, forming sweep trace SL1, SL2 with the time with gate pole G1, G2, more be included in above-mentioned transparent storage capacitors electrode layer 102a and go up and form a storage capacitors electrode wires CS, it electrically contacts with transparent storage capacitors electrode layer 102a.In addition, forming sweep trace SL1, SL2 with the time, comprise more forming induced signal incoming line IL that it is to be formed directly on the surface of transparent bottom electrode 102b with gate pole G1, G2.
Please with reference to Fig. 3 C, on prebasal plate 100, form first insulation course 104, it covers above-mentioned formed structure (comprising sweep trace SL1, SL2, grid G 1, G2, induced signal incoming line IL, transparent storage capacitors electrode layer 102a and transparent bottom electrode 102b).Then, forming channel CH1 on first insulation course 104 above the grid G 1 and on first insulation course 104 above the grid G 2, forming channel CH2.The material of channel CH1, CH2 comprises that through doped amorphous silicon preferably the surface of channel CH1, CH2 also comprises ohmic contact layer.
Please, on the inside surface 101a of prebasal plate 100, form data line DL with reference to Fig. 3 D.Simultaneously, form source S 1 and drain D 1 on the channel CH1 in the U1 of picture element zone, wherein source S 1 electrically connects with data line DL, and upward forms source S 2 and drain D 2 in channel CH2.At this moment, grid G 1, channel CH1, source S 1 and drain D 1 constitute switch module T1, and grid G 2, channel CH2, source S 2 and drain D 2 constitute read assembly T2.According to present embodiment, when forming source S 1, drain D 1, source S 2 and drain D 2, comprise more forming extension 116 and induction signal reading line RL that extension 116 electrically connects with source S 2, induction signal reading line RL and drain D 2 electric connections.
Please with reference to Fig. 3 E, form second insulation course 106, it covers above-mentioned formed structure (comprising data line DL, switch module T1, reading assembly T2, extension 116 and induction signal reading line RL).Then, in second insulation course 106, form contact hole and open C1, it exposes the drain D 1 of switch module T1, and in second insulation course 106 of light sensing component district U2 and first insulation course 104, forms assembly opening O, and it exposes transparent bottom electrode 102b.At the same time, comprise more in second insulation course 106 being formed with contact window C2 that it exposes extension 116.
Please with reference to Fig. 3 F, in light sensing component district U2, form sensitization silicic dielectric layer 110, it is inserted in the assembly opening O in second insulation course 106 and first insulation course 104.Sensitization silicic dielectric layer 110 is an example with the silicon rich silicon oxide layer; Use the chemical vapor deposition (CVD) processing procedure; In reaction chamber, feed silicon-containing gas and oxygen-containing gas, and suitably adjust gas ratio, make the content of silicon in the silicon rich silicon oxide layer of formation be higher than oxidation content.Because this is known by this art, therefore repeat no more.
Please with reference to Fig. 3 G, form pixel electrode PE in the U1 of picture element zone, wherein pixel electrode PE more inserts contact window C1 and electrically connects with the drain D 1 with switch module T1.At the same time, more on the sensitization silicic dielectric layer 10 of light sensing component district U2, form top electrode 112.Top electrode 112 with more insert in the contact window C2 to electrically connect with extension 116.Because extension 116 electrically connects with the source S 2 of read assembly T2, so top electrode 112 is able to electrically connect with the source S 2 of read assembly T2 through extension 116 and contact window C2.
After the step of Fig. 3 G, promptly accomplish the making of the assembly on the prebasal plate 100.Then, can prebasal plate 100 be stood in for 200 groups with metacoxal plate, and sealing reflective display medium 300 can form the touch control reflective display panel plate between prebasal plate 100 and metacoxal plate 200.
Fig. 4 A be on the prebasal plate of touch control reflective display panel plate according to another embodiment of the present invention the picture element unit with light sensing component district and picture element zone on look synoptic diagram.Fig. 4 B is that Fig. 4 A is along the diagrammatic cross-section of profile line A-A ' with profile line B-B '.Picture element unit shown in Fig. 4 A and Fig. 4 B is similar with the picture element unit shown in Fig. 2 B with Fig. 2 A, and therefore identical assembly is represented with identical label, and no longer repeats to give unnecessary details at this.
Please with reference to Fig. 4 A and Fig. 4 B; Being in light sensing component PS that the picture element unit of Fig. 4 A and Fig. 4 B is different with the picture element unit of Fig. 2 A and Fig. 2 B comprises transparent bottom electrode 102b, sensitization silicic dielectric layer 110 and top electrode 112, and wherein top electrode 112 is a metal electrode.According to present embodiment, the top electrode 112 of light sensing component PS is directly to electrically connect with extension 116, and extension 116 is source S 2 electric connections with read assembly T2.
And the manufacturing process of the manufacturing process of the picture element unit of Fig. 4 A and Fig. 4 B and Fig. 2 A and the picture element unit of Fig. 2 B is also with similar shown in Fig. 3 A to Fig. 3 G; Different locating only is in the step of Fig. 3 D; When forming source S 1, drain D 1, source S 2, drain D 2 and extension 116; Promptly form top electrode 112 simultaneously, and extension 116 directly and top electrode 112 link together.In the present embodiment, owing to when forming extension 116, promptly form top electrode 112 simultaneously, therefore follow-up when forming pixel electrode PE, promptly do not need to form again the top electrode of light sensing component PS.
In sum, because the present invention is arranged on the inside surface of prebasal plate with light sensing component, therefore extraneous light can just get into reflective display medium earlier through after the light sensing component on the prebasal plate.So, can increase the induction sensitivity of light sensing component.
In addition, light sensing component of the present invention is to utilize the sensitization silicic dielectric layer as its light conductive material, and it is a channel status when the irradiation state, and when irradiation not, is off state.The present invention uses the sensitization silicic dielectric layer to make light sensing component, and this kind light sensing component answers thin film transistor (TFT) to have preferable photoinduction effect as light sensing component compared to traditional usability.
Though the present invention discloses as above with embodiment; Right its is not in order to limit the present invention; Has common knowledge the knowledgeable in the technical field under any; Do not breaking away from the spirit and scope of the present invention, when doing a little change and retouching, so protection scope of the present invention is as the criterion when looking accompanying the claim person of defining.
Claims (23)
1. touch control reflective display panel plate comprises:
One prebasal plate, it has an inside surface, and this prebasal plate is towards a user and a surround lighting;
The multi-strip scanning line is arranged on this inside surface of this prebasal plate;
Many data lines are arranged on this inside surface of this prebasal plate and staggered with those sweep traces;
A plurality of image element structures are arranged on this inside surface of this prebasal plate, and each image element structure electrically connects with this corresponding sweep trace and this data line;
A plurality of light sensing component are arranged on this inside surface of this prebasal plate, and each light sensing component comprises:
One transparent bottom electrode is arranged on this inside surface of this prebasal plate;
One sensitization silicic dielectric layer is arranged on this transparent bottom electrode; And
One top electrode is arranged on this sensitization silicic dielectric layer;
A plurality of read assemblies, each read assembly electrically connects with this corresponding light sensing component;
One metacoxal plate is provided with this prebasal plate subtend; And
One reflective display medium is sealed between this prebasal plate and this metacoxal plate.
2. touch control reflective display panel plate according to claim 1 is characterized in that, each this image element structure comprises:
One switch module, it electrically connects with corresponding this sweep trace and this data line; And
One pixel electrode, itself and this switch module electrically connects.
3. touch control reflective display panel plate according to claim 2 is characterized in that, more comprises a transparent storage capacitors electrode layer, on the inside surface of this prebasal plate and between this pixel electrode and this prebasal plate.
4. touch control reflective display panel plate according to claim 3 is characterized in that, the transparent bottom electrode of this of this transparent storage capacitors electrode layer and this light sensing component is same rete.
5. touch control reflective display panel plate according to claim 1 is characterized in that, this of this light sensing component very metal electrode that powers on.
6. touch control reflective display panel plate according to claim 5 is characterized in that, direct and this read assembly electric connection of this top electrode of this light sensing component.
7. touch control reflective display panel plate according to claim 1 is characterized in that, this of this light sensing component very transparency electrode that powers on.
8. touch control reflective display panel plate according to claim 7 is characterized in that, this top electrode of this light sensing component sees through a contact hole and this read assembly electrically connects.
9. touch control reflective display panel plate according to claim 1; It is characterized in that this sensitization silicic dielectric layer of this light sensing component is drawn together silicon rich silicon oxide layer, silicon-rich silicon nitride layer, Silicon-rich silicon oxynitride layer, Silicon-rich silicon carbide layer, Silicon-rich oxidation of coal silicon layer, hydrogenation silicon rich silicon oxide layer, hydrogenation silicon-rich silicon nitride layer, hydrogenation Silicon-rich silicon carbide layer or its combination.
10. touch control reflective display panel plate according to claim 1 is characterized in that, more comprises many induction signal reading line, and each induction signal reading line electrically connects with this corresponding read assembly.
11. touch control reflective display panel plate according to claim 1 is characterized in that, more comprises many induced signal incoming lines, each induced signal incoming line electrically connects with this transparent bottom electrode of corresponding this light sensing component.
12. touch control reflective display panel plate according to claim 1 is characterized in that, this reflective display medium comprises capsule-type electrophoretic display medium, micella formula electrophoretic display medium, cholesterol liquid crystal electrophoretic display medium.
13. the manufacturing approach of a touch control reflective display panel plate comprises:
One prebasal plate is provided, and this prebasal plate has an inside surface, and it has a plurality of picture elements zone and a plurality of light sensing component district, and this prebasal plate is used for towards a user and a surround lighting;
On this inside surface of this prebasal plate, form multi-strip scanning line and many data lines, corresponding those picture element zones;
In corresponding picture element zone, form the pixel electrode that a switch module and this switch module electrically connect, wherein each switch module electrically connects with corresponding this sweep trace and this data line;
In this light sensing component district in corresponding picture element zone, form a light sensing component and a read assembly; Wherein each this read assembly electrically connects with this corresponding light sensing component, and each this light sensing component comprises at the transparent bottom electrode on this inside surface of this prebasal plate, at top electrode on this transparent bottom electrode and the sensitization silicic dielectric layer between this transparent bottom electrode and this top electrode; And
One metacoxal plate is stood in this prebasal plate group, and seal a reflective display medium between this prebasal plate and this metacoxal plate.
14. the manufacturing approach of touch control reflective display panel plate according to claim 13 is characterized in that, when forming this transparent bottom electrode of this light sensing component, more is included in and forms a transparent storage capacitors electrode layer in each picture element zone.
15. the manufacturing approach of touch control reflective display panel plate according to claim 14; It is characterized in that; When forming this sweep trace, more be included in and form a storage capacitors electrode wires on this transparent storage capacitors electrode layer, it electrically contacts with this transparent storage capacitors electrode layer.
16. the manufacturing approach of touch control reflective display panel plate according to claim 13 is characterized in that, the method that forms this switch module, this light sensing component and this read assembly comprises:
In this light sensing component district, form this transparent bottom electrode;
In this picture element zone, form a first grid and in this light sensing component district, form a second grid;
Form one first insulation course, cover this first grid, this second grid and this transparent bottom electrode;
Form one first channel on this first insulation course above this first grid and on this first insulation course above this second grid, forming a second channel;
On this first channel, form one first source electrode and one first drain electrode, and on this second channel, form one second source electrode and one second drain electrode;
Form one second insulation course, cover this first insulation course and this first source electrode, this first drain electrode, this second source electrode and this second drain electrode;
In this second insulation course, form a contact window, expose this first drain electrode, and in this second insulation course in this light sensing component district and this first insulation course, form an assembly opening, expose this transparent bottom electrode;
In this light sensing component district, form this sensitization silicic dielectric layer, it is inserted in this assembly opening; And
On this sensitization silicic dielectric layer, form this top electrode, wherein this second source electrode of this top electrode and this read assembly electrically connects.
17. the manufacturing approach of touch control reflective display panel plate according to claim 16 is characterized in that, this top electrode and this pixel electrode are to form simultaneously.
18. the manufacturing approach of touch control reflective display panel plate according to claim 16; It is characterized in that; When forming this first grid, more comprise forming an induced signal incoming line this transparent bottom electrode electric connection of itself and this light sensing component with this second grid.
19. the manufacturing approach of touch control reflective display panel plate according to claim 16; It is characterized in that; When forming this first source electrode, this first drain electrode, this second source electrode and this second drain electrode; More comprise forming an induction signal reading line this second drain electrode electric connection of its and this read assembly.
20. the manufacturing approach of touch control reflective display panel plate according to claim 13 is characterized in that, the method that forms this switch module, this light sensing component and this read assembly comprises:
In this light sensing component district, form this transparent bottom electrode;
In this picture element zone, form a first grid and in this light sensing component district, form a second grid;
Form one first insulation course, cover this first grid, this second grid and this transparent bottom electrode;
Form one first channel on this first insulation course above this first grid and on this first insulation course above this second grid, forming a second channel;
In this first insulation course in this light sensing component district, form an assembly opening, expose this transparent bottom electrode;
In this assembly opening, form this sensitization silicic dielectric layer; And
On this first channel, form one first source electrode and one first drain electrode, on this second channel, form one second source electrode and one second drain electrode, and on this sensitization silicic dielectric layer, form a top electrode, wherein this top electrode and this second source electrode electrically connect.
21. the manufacturing approach of touch control reflective display panel plate according to claim 20; It is characterized in that; When forming this first grid, more comprise forming an induced signal incoming line this transparent bottom electrode electric connection of itself and this light sensing component with this second grid.
22. the manufacturing approach of touch control reflective display panel plate according to claim 20; It is characterized in that; In form this first source electrode, this first drain electrode, this second source electrode, this second drains and during this top electrode; More comprise forming an induction signal reading line this second drain electrode electric connection of its and this read assembly.
23. the manufacturing approach of touch control reflective display panel plate according to claim 13 is characterized in that, this reflective display medium comprises capsule-type electrophoretic display medium, micella formula electrophoretic display medium, cholesterol liquid crystal electrophoretic display medium.
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| CN2010101474134A CN101799607B (en) | 2010-03-17 | 2010-03-17 | Touch control reflective display panel and manufacturing method thereof |
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| CN103376609B (en) * | 2012-04-25 | 2016-07-13 | 蔡熊光 | Refection type vision interface device |
| TW201604637A (en) * | 2014-07-21 | 2016-02-01 | 元太科技工業股份有限公司 | Electronic paper display device |
| CN112947787B (en) * | 2021-02-23 | 2024-09-06 | 北京京东方显示技术有限公司 | Touch panel, display device, display system and touch method |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN1829951A (en) * | 2003-07-29 | 2006-09-06 | 皇家飞利浦电子股份有限公司 | Display and input device |
| CN101625496A (en) * | 2008-07-09 | 2010-01-13 | 奇信电子股份有限公司 | Electronic paper display with function of touch control |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1829951A (en) * | 2003-07-29 | 2006-09-06 | 皇家飞利浦电子股份有限公司 | Display and input device |
| CN101625496A (en) * | 2008-07-09 | 2010-01-13 | 奇信电子股份有限公司 | Electronic paper display with function of touch control |
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