CN101799596A - Liquid crystal tunable wave filter and configuration method thereof - Google Patents
Liquid crystal tunable wave filter and configuration method thereof Download PDFInfo
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Abstract
The invention discloses a liquid crystal tunable wave filter and a configuration method thereof. The wave filter comprises a plurality of stages of cascaded Leo configuration wave filter units, and each Leo configuration wave filter unit consists of polarizing sheets of both sides and birefraction optical elements in the middle, wherein parts of or all of the Leo configuration wave filter units are merged through two continuous cascades or three continuous cascades for forming a merged unit, the merging mode is an overlapped type or fan type merging mode, and the birefraction optical elements are liquid crystal tunable wave plates or fixed wave plates or the combination of the liquid crystal tunable wave plates and the fixed wave plates. The liquid crystal tunable wave filter of the invention has the advantages of high passing rate, narrow full width at half maximum, high shielding rate, adjustable light spectrum range, high stability, no need of mechanical rotation, real-time controllability and the like, and can be widely applied to various fields such as imaging, biology, medicine, materials, optics, photonics, astronomy and the like.
Description
Technical field
The present invention relates to a kind of adjustable filter, specifically is a kind of liquid crystal tunable filter and configuration method thereof.
Background technology
Wavelength tunable filter mainly contains following several: based on the adjustable filter of the adjustable filter of Mode Coupling, based semiconductor laser structure, Fiber Bragg Grating FBG (FBGs) etc.
Adjustable filter based on Mode Coupling is based on various Mode Coupling such as acousto-optic, electric light or magneto-optic effect.Incident light is at first handled through a monotype, as transverse electric (TE) pattern, by periodic perturbation, converts thereof into another pattern, as horizontal magnetic (TM) pattern.Utilization sound, electric or magnetic field can produce the periodic perturbation that depends on correlation effect, are having only the light wave within the extremely narrow wavelength coverage that satisfies the wave mode coupling condition to pass through under these disturbances, thereby have caused the wavelength output of high selectivity.The adjustable filter of based semiconductor laser structure is to provide the spectral filtering function according to semiconductor laser structure, the vertical wave mode selectivity in its decision work structure.Resonance frequency is subjected to electric current injection or influence of temperature variation and changes, and the speed of thermal tuning structure is very slow.The Fiber Bragg Grating FBG great majority all are fixed filters, but also can carry out slight and at a slow speed tuning with temperature or mechanical stretching, extension mode.In addition, waveguide optical grating also can be formed a wave filter with multifrequency laser, and the cascading Mach-Zehnder interferometer also can be used as tunable optic filter.Especially, the domestic main type that is in the research and the tunable wavelength wave filter of laboratory level has: acousto-optic tunable wavelength filter, Fabry-Perot (Fabry-Perot) mode filter and fiber grating mode filter.The principle of acousto-optic tunable filter is the light-splitting device of making according to the acoustooptic diffraction principle, it is made of crystal and bonding transducer thereon, transducer is converted to the RF driving electric signal (generally being about between tens megahertzes to two, hundred megahertzes) of high frequency in intracrystalline ultrasonic vibration, ultrasound wave has produced the modulation of space periodicity, and its effect resembles diffraction grating.To produce Bragg diffraction after incident illumination is mapped to this grating, the frequency of its diffraction light wavelength and high-frequency drive electric signal has work relation one to one.Therefore, as long as change the frequency of drive signal, can change the diffraction light wavelength, and then reach the purpose of beam split.Fabry-perot filter is a kind of extraordinary filter construction, is made of the resonator cavity that forms between two high reflectings surface, and its principle of work is the local light beam interferometer, and light beam again from interference, thereby produces peak value and null value earlier along separate routes in frequency domain.Fiber grating is the optical fibre device that a kind of optical fibre refractivity is subjected to periodic modulation, and the modulation of this refractive index will make the different mode of the light signal of transmission in the optical fiber be coupled.
With the continuous high speed development of high-tech areas such as work photoelectron, optical communication, optical imaging and demonstration, the performance requirement of system's sun adjuster spare more and more is tending towards variation.Because the reaching its maturity of liquid crystal technology, at present a lot of businesses and institutions in the world based on the technology platform of liquid crystal just at the high-tech new product of development research dynamic adjustable.Use classification from technology, the liquid crystal optoelectronic device mainly can be divided into the light power controller spare of Wavelength-independent, light power controller spare and the Polarization Control device three major types that wavelength is relevant.Liquid crystal tunable filter on the ordinary meaning belongs to the relevant light power controller spare of wavelength, new and high technologies such as liquid collecting crystalline substance, new material, electronics, optics, spectroscopy, computing machine and robotization control are one, can control the wavelength that sees through within the specific limits by computer, realize filter function incident light.Liquid crystal tunable filter has advantages such as cost is low, tuning range is big, low in energy consumption.At present, liquid crystal tunable filter is only limited to the discussion of academic level at home, and its technology is in blank at home substantially.
Liquid crystal tunable filter can be divided into: liquid crystal Fabry-Bo Luo (Fabry-Perot) wave filter, liquid crystal Leo (Lyot) wave filter, liquid crystal dust literary composition (Evan) wave filter, liquid crystal Sol gram (Solc) wave filter, wherein the most frequently used basic configuration are that Leo configuration, dust literary composition separate first configuration and Sol gram configuration.Liquid crystal Fabry-Bo Luo wave filter is a TF structure of utilizing the adjustable F-P of liquid crystal chamber principle to design, changes light path by the refractive index of regulating liquid crystal, regulates the purpose of interfering wavelength thereby reach, and the range of adjustment of 80nm nearly can be realized in such F-P chamber.The wave filter of a Leo configuration is made up of many levels, optical birefringence unit in each grade is placed between two linear polarizer, this birefringent elements can be a liquid crystal composition or liquid crystal and the fixedly combination of wave plate, the configuration of optimizing is that the optical axis of birefringent light block learn is parallel or vertical with two polaroids at 45 degree, the thickness of optical birefringence unit (or light path) is the twice of optical birefringence element thickness (or light path) in the previous stage in the back one-level, so just can obtain the filtering performance (referring to Fig. 1) of dynamic adjustments then by the driving voltage that changes liquid crystal by obtaining narrower wavelength pass band behind the multistage cascade.The wave filter fact of a first configuration of dust literary composition separation is that two levels of Leo configuration are combined into into a level, go to eliminate a level and need be divided into two halves to the optical birefringence unit of this grade, be placed on the both sides of another grade birefringent elements and optical axis then at ± 45 °, the optical axis of center birefringent light block learn is parallel or perpendicular to polaroid, two polaroids of each grade are orthogonal, and therefore needed sum of series polaroid is Leo configuration required half (referring to Fig. 2).Liquid crystal Sol gram wave filter is the liquid crystal filter according to polycrystalline sheet Sol gram principle design, it between two polaroids the identical optical birefringence unit of a sequence thickness (or light path), these birefringent elements can be the combinations of liquid crystal composition or liquid crystal and wave plate, according to arranging of optical birefringence unit and polaroid, can be divided into two kinds of folded formula (Folded) and fan formulas (Fan).The polaroid of folded Shi Suoerke configuration is a quadrature, and according to the polarization direction that enters polaroid, the optical axis of odd number optical birefringence unit is oriented to the θ degree, and the optical axis of even number optical birefringence unit is oriented to negative θ degree (referring to Fig. 3); The polarization direction of two polaroids of fan Shi Suoerke configuration is parallel, and the optical axis sensing of optical birefringence unit is fan-shaped and is arranged in order (referring to Fig. 4).
The leading indicator of weighing liquid crystal filter is halfwidth (FWHM), transmitance (Transmission), shielding rate (Out of Band), resolution (Finesse), Free Spectral Range (FSR) or spectrum adjustable extent, the field of view (FOV) etc. that see through bandwidth or peak.In order to obtain a narrower wavelength pass band (or the halfwidth at peak), wide Free Spectral Range or spectrum adjustable extent and high resolving power, the liquid crystal filter of Leo configuration (referring to Fig. 1) needs multistage cascade, so the transmitance of wavelength pass band is low.In addition, the incident meeting of off-axis causes being with logical skew, therefore angle of light or visual field is had certain limitation.Ai Wen separates first configuration liquid crystal filter (referring to Fig. 2) and separates unit owing to distributing in the center element both sides two, compare with the Leo configuration, the incident of off-axis causes the logical skew of less band, thereby has improved this index of visual field, and owing to progression reduces by half the transmitance of light is increased.Sol gram configuration (referring to Fig. 3 and Fig. 4) is compared with the above two, can achieve the index that could obtain with multistage configuration (Leo configuration or separate first configuration), for example narrow halfwidth, wide Free Spectral Range and high resolution etc., and owing to having high permeability with less polaroid.For example, Fig. 5 is a Leo configuration liquid crystal filter, and it is composed as shown in Figure 6 to a light transmission in the 750nm at 400nm, and a light transmission spectrum of the liquid crystal filter (referring to Fig. 4) of corresponding Sol gram configuration as shown in Figure 7.Although Sol gram configuration has significant advantage, still have tangible edge peak value (Side-lope) in the wavelength pass band both sides, therefore influenced shielding rate.If want to reduce the edge peak value and improve shielding rate, the optical axis of birefringent elements is arranged and need be gone subtly to adjust, but the way of this reduction edge peak value and raising shielding rate can cause the increase of bandwidth, thereby has reduced resolution (referring to Fig. 8).Free Spectral Range has determined the spectrum adjustable extent in a sense, thereby has influenced the wavelength coverage of the actual use of liquid crystal tunable filter.If expect a big Free Spectral Range, no matter be the Leo configuration or separate first configuration, or Sol gram configuration that all need to reduce the optical path difference or the thickness of optical birefringence unit, this must make final passband as a result broaden or the halfwidth at peak becomes big.Go to address this problem, Leo configuration or separate the more level of first configuration needs, Sol gram configuration needs more birefringent elements, and this has caused that again transmitance reduces and influenced the visual field.An important indicator of weighing Free Spectral Range and halfwidth is a resolution, for example expect one 256 resolution, the wave filter of a Leo configuration needs at least 8 cascades, and the first configuration of separation needs at least 4 cascades, and a Sol gram configuration needs at least 255 birefringent elements.In a word, the main performance index of liquid crystal tunable filter influences each other, improve the performance that one of them or some performance index can reduce or influence other, this also just liquid crystal tunable filter therefore new invention and breakthrough need be arranged constantly in research and development, design with the difficult point in producing.
Summary of the invention
Technical matters to be solved by this invention provides a kind of narrow method that bandwidth, high shielding rate, wide Free Spectral Range, high-resolution liquid crystal tunable optic filter and this liquid crystal tunable filter make up that sees through that has on the filter cell basis of Leo configuration.
A kind of liquid crystal tunable filter of the present invention, the Leo configuration filter cell that comprises some grades of cascades, Leo configuration filter cell is made of the polaroid and the middle birefringent optical element of both sides, it is characterized in that part or all of Leo configuration filter cell merges the composition merge cells with continuous two cascades or three continuous cascades.
Above-mentioned merging mode is folded formula or fan formula merging mode.
Above-mentioned continuous two cascade merge cellses are made of the polaroid of both sides and middle three or four birefringent optical elements; Three continuous cascade merge cellses are made of the polaroid of both sides and middle seven or eight birefringent optical elements.
Above-mentioned merge cells can be two continuous cascade merge cellses, continuous three cascade merge cellses or continuous two cascade merge cellses and three continuous cascade merge cellses.
Above-mentioned merge cells can be folded formula merge cells, fan formula merge cells or folded formula merge cells and fan formula merge cells.
Above-mentioned merge cells can any order rearrangement.
Above-mentioned birefringent optical element is the adjustable wave plate of liquid crystal, fixedly wave plate or adjustable wave plate of liquid crystal and the fixedly combination of wave plate.
The configuration method of a kind of liquid crystal tunable filter of the present invention, the Leo configuration filter cell that comprises some grades of cascades, Leo configuration filter cell is made of the polaroid and the middle birefringent optical element of both sides, it is characterized in that part or all of Leo configuration filter cell merges the composition merge cells with continuous two cascades or three continuous cascades.
Above-mentioned merging mode is folded formula or fan formula merging mode.
Above-mentioned continuous two cascade merge cellses are made of the polaroid of both sides and middle three or four birefringent optical elements; Three continuous cascade merge cellses are made of the polaroid of both sides and middle seven or eight birefringent optical elements.
Above-mentioned merge cells can be two continuous cascade merge cellses, continuous three cascade merge cellses or continuous two cascade merge cellses and three continuous cascade merge cellses.
Above-mentioned merge cells can be folded formula merge cells, fan formula merge cells or folded formula merge cells and fan formula merge cells.
Above-mentioned merge cells can any order rearrangement.
Above-mentioned birefringent optical element is the adjustable wave plate of liquid crystal, fixedly wave plate or adjustable wave plate of liquid crystal and the fixedly combination of wave plate.
Configuration method of the present invention is that Leo configurational unit is independently carried out continuous two cascades or three continuous cascades, folds formula or fan formula simultaneously and merges.Because can carry out two cascades or three cascades merging, merged so continuous level is associated in the Leo configuration and may be selected in diverse location, the position difference according to being merged cascade can produce different configuration structures; According to folded formula merging, the merging of fan formula or their combination, can produce more configuration structure again simultaneously; In various concrete configuration structures, birefringent optical element is the adjustable wave plate of liquid crystal, fixedly wave plate or liquid crystal and the fixedly combination of wave plate.Produce different configuration structures according to this configuration method and also can carry out the inter-stage modulation.
Configuration method of the present invention and consequent various concrete configuration structure, the transmitance and the required birefringent optical element of wave filter that has significantly reduced simple Sol gram configuration of the wave filter of simple Leo configuration have not only been improved, also has the not available function of simple Leo configuration or Sol gram configuration, for example inter-stage modulation.This new configuration method according to the present invention and the designed liquid crystal tunable filter of different concrete configuration structures not only can obtain narrow bandwidth, wide Free Spectral Range, the high resolution of seeing through, also have high shielded rate and transmitance, therefore solve the main bottleneck problem of liquid crystal tunable filter development and improved every performance index comprehensively, thereby satisfied of the different requirements of its application, and then advanced the application of liquid crystal filter in each different high-tech areas to every performance index.
Novel liquid crystal tunable optic filter of the present invention, have high percent of pass, narrow halfwidth, shielding rate height, spectral range is adjustable, stability is strong, need not mechanical rotation, have in real time controlled etc. advantage, can be widely used in every field such as fluorescence imaging, micro-image, absorption imaging, fluorescence spectrum, Raman spectrum, Hyper spectral Imaging, biology, cell, medical science, medicine, material, optics, photoelectron, uranology, be the high sharp advanced instrument that national defence, colleges and universities, scientific research institutions, high-tech company, hospital and government survey mechanism should be equipped with.
Description of drawings
Fig. 1 is a Leo wave filter level Four cascade configuration,
Fig. 2 is that the dust literary composition separates first configuration,
Fig. 3 is folded Shi Suoerke configuration,
Fig. 4 is a fan Shi Suoerke configuration,
Fig. 5 is a Leo wave filter three-stage cascade configuration,
Fig. 6 is that three-stage cascade Leo wave filter sees through spectrum,
Fig. 7 is that Sol gram wave filter sees through spectrum,
Fig. 8 is that the Sol gram wave filter after optimizing sees through spectrum,
Fig. 9 is that the Leo configuration of level Four cascade carries out first kind of configuration structure after the merging,
Figure 10 is that the Leo configuration of level Four cascade carries out second kind of configuration structure after the merging,
Figure 11 is the configuration structure after the Leo configuration of level Four cascade carries out the third merging,
Figure 12 is six grades of cascade configurations of Leo structure,
Figure 13 is that six grades of cascade configurations of Leo structure is carried out first kind of configuration structure after the merging,
Figure 14 is that six grades of cascade configurations of Leo structure is carried out second kind of configuration structure after the merging,
Figure 15 is the configuration structure after six grades of cascade configurations of Leo structure is carried out the third merging,
Figure 16 is the tuning spectrum that sees through of the first order in Figure 14 configuration structure,
Figure 17 is the partial tuning spectrum that sees through in Figure 14 configuration structure,
Figure 18 is the tuning spectrum that sees through of the third level in Figure 14 configuration structure,
Figure 19 is the final tuning spectrum that sees through of of Figure 14 configuration structure.
Embodiment
Configuration method of the present invention can produce multiple different concrete configuration structure, the present invention is done specifying below in conjunction with example.
Corresponding to the Leo configuration (referring to Fig. 1) of a level Four cascade of the prior art, configuration method of the present invention can produce several new concrete configuration structures, and we only enumerate three kinds of concrete configuration structures (referring to Fig. 9, Figure 10 and Figure 11) here.Configuration structure shown in Figure 9 is that preceding two continuous Leo cascades and latter two continuous Leo cascade are merged respectively, has all adopted four birefringent optical elements in each merges.Figure 10 and configuration structure shown in Figure 11 are that three continuous Leo cascades are merged, seven birefringent optical elements in merging, have all been adopted, different is the position difference of selected three continuous cascades when merging, Figure 10 merges first three Leo cascade, and Figure 11 merges back three Leo cascades.In addition, it is identical with the chopped-off head wave plate thickness that is merged to merge back wave plate thickness at different levels, and what adopt such as Fig. 9 is the 1st, 2 grade of merging, the 3rd, 4 grade of merging, then merge back first order wave plate thickness with merge preceding the 1st grade identical, and it is identical with the preceding 3rd level of merging to merge the second level, back wave plate thickness.What Figure 10 adopted is the 1st, 2,3 grade of merging, and the 4th grade is constant, then merge back first order wave plate thickness with merge preceding the 1st grade identical, and after merging second level wave plate thickness and merging preceding the 4th grade identical.The merging mode can be folded formula or the merging of fan formula, merges such as the previous stage among Fig. 9 and can adopt folded formula to merge, and also can adopt the fan formula to merge; Same, back one-level merges also can adopt folded formula merging or the merging of fan formula, so just multiple preference pattern can be arranged.In addition, the merge cells after the merging can be any the order rearrangement, also can be placed on back, the second level after the merging such as the first order after the merging shown in Figure 9.
Correspond to the Leo configuration (referring to Figure 12) of six grades of cascades, adopt configuration method of the present invention can produce multiple concrete configuration structure, we also only exemplify three kinds of concrete configuration structures (referring to Figure 13, Figure 14 and Figure 15) here.Configuration structure shown in Figure 13 is that preceding 3 the Leo cascades among Figure 12 and back 3 Leo cascades are merged respectively, has all adopted seven birefringent optical elements in each merges.Configuration structure shown in Figure 14 is with the 1st among Figure 12,2 Leo cascades, the 3rd, 4 Leo cascades, and the 5th, 6 Leo cascades merge respectively, have all adopted three birefringent optical elements in each merges.Figure 15 then is the 1st Leo cascade nonjoinder, and the 2nd, 3 Leo cascades and the 4th, 5,6 Leo cascades is merged three birefringent optical elements and seven birefringent optical elements of having adopted not at the same level after merging respectively.
Correspond to the Leo configuration of Pyatyi cascade, seven grades of cascades, eight grades of cascades, can produce multiple different concrete configuration structure with this new configuration method, particularly correspond to the more Leo configuration of multi-stage cascade, the present invention can produce more kinds of different concrete configuration structures with this new configuration method, and we here can not exemplify one by one.Can design the novel liquid crystal tunable optic filter of various different concrete structures according to this new configuration method and different configuration structures.
This has not only improved the transmitance and the required birefringent optical element of wave filter that has significantly reduced simple Sol gram configuration of the wave filter of simple Leo configuration the present invention, also has the not available function of simple Leo configuration or Sol gram configuration, for example inter-stage modulation.This modulation comprises and suitably increases and decreases birefringent optical element, suitably changes birefringent optical element or the adjustable wave plate of tuning liquid crystal.By modulating each level, optimize the matching relationship between them, to obtain optimal results.
Therefore novel liquid crystal tunable optic filter of the present invention has solved the developing main bottleneck problem of liquid crystal tunable filter, has improved every performance index comprehensively, for example narrow bandwidth, wide spectral range, high resolution, the high shielding rate etc. of seeing through.As an instantiation, according to the designed novel liquid crystal tunable optic filter of the concrete configuration structure of Figure 14, tuning by tuning and inter-stage in the level, obtained narrow bandwidth, wide spectral range, high resolution, high (referring to Figure 16, Figure 17, Figure 18 and Figure 19) such as shielding rates of seeing through.Figure 16, Figure 17 and Figure 18 are respectively the tuning spectrum that sees through of the first order, the second level and the third level one, and Figure 19 is through the final tuning spectrum that sees through tuning in the level and that the tuning postfilter of inter-stage obtains.
The invention provides a kind of thinking and implementation method of liquid crystal tunable filter; the above only is a preferred implementation of the present invention; should be understood that; for those skilled in the art; under the prerequisite that does not break away from the principle of the invention; can also make some improvement, these improvement also should be considered as protection scope of the present invention.
Claims (14)
1. liquid crystal tunable filter, the Leo configuration filter cell that comprises some grades of cascades, Leo configuration filter cell is made of the polaroid and the middle birefringent optical element of both sides, it is characterized in that part or all of Leo configuration filter cell merges the composition merge cells with continuous two cascades or three continuous cascades.
2. liquid crystal tunable filter according to claim 1 is characterized in that the merging mode is folded formula or fan formula.
3. liquid crystal tunable filter according to claim 1 and 2 is characterized in that two continuous cascade merge cellses are made of the polaroid of both sides and middle three or four birefringent optical elements; Three continuous cascade merge cellses are made of the polaroid of both sides and middle seven or eight birefringent optical elements.
4. liquid crystal tunable filter according to claim 1 and 2 is characterized in that merge cells is two continuous cascade merge cellses, continuous three cascade merge cellses or continuous two cascade merge cellses and three continuous cascade merge cellses.
5. liquid crystal tunable filter according to claim 1 and 2 is characterized in that merge cells is folded formula merge cells, fan formula merge cells or folded formula merge cells and fan formula merge cells.
6. liquid crystal tunable filter according to claim 1 and 2 is characterized in that merge cells resequences with any order.
7. liquid crystal tunable filter according to claim 1 and 2 is characterized in that birefringent optical element is the adjustable wave plate of liquid crystal, fixedly wave plate or adjustable wave plate of liquid crystal and the fixedly combination of wave plate.
8. the configuration method of a liquid crystal tunable filter, the Leo configuration filter cell that comprises some grades of cascades, Leo configuration filter cell is made of the polaroid and the middle birefringent optical element of both sides, it is characterized in that part or all of Leo configuration filter cell merges the composition merge cells with continuous two cascades or three continuous cascades.
9. the configuration method of liquid crystal tunable filter according to claim 8 is characterized in that the merging mode is folded formula or fan formula.
10. according to Claim 8 or the configuration method of 9 described liquid crystal tunable filters, it is characterized in that two continuous cascade merge cellses are made of the polaroid of both sides and middle three or four birefringent optical elements; Three continuous cascade merge cellses are made of the polaroid of both sides and middle seven or eight birefringent optical elements.
11. according to Claim 8 or the configuration method of 9 described liquid crystal tunable filters, it is characterized in that merge cells is two continuous cascade merge cellses, continuous three cascade merge cellses or continuous two cascade merge cellses and three continuous cascade merge cellses.
12. according to Claim 8 or the configuration method of 9 described liquid crystal tunable filters, it is characterized in that merge cells is folded formula merge cells, fan formula merge cells or folded formula merge cells and fan formula merge cells.
13. according to Claim 8 or the configuration method of 9 described liquid crystal tunable filters, it is characterized in that merge cells resequences with any order.
14. according to Claim 8 or the configuration method of 9 described liquid crystal tunable filters, it is characterized in that birefringent optical element is the adjustable wave plate of liquid crystal, fixedly wave plate or adjustable wave plate of liquid crystal and the fixedly combination of wave plate.
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| CN102722024A (en) * | 2012-06-27 | 2012-10-10 | 北京国科世纪激光技术有限公司 | Light tunable filtering device and method |
| WO2014036844A1 (en) * | 2012-09-05 | 2014-03-13 | 天津奇谱光电技术有限公司 | Polarization-irrelevant tunable fabry-perot filter |
| CN106482833A (en) * | 2016-12-16 | 2017-03-08 | 中国科学院合肥物质科学研究院 | A kind of Wavelength calibration device based on single-stage Lyot type optical filter |
| CN106547124A (en) * | 2016-12-07 | 2017-03-29 | 中国工程物理研究院流体物理研究所 | A kind of bandwidth adjusting method of Lyot types liquid crystal tunable optical filter |
| CN111193083A (en) * | 2020-02-26 | 2020-05-22 | 京东方科技集团股份有限公司 | Band-pass filter, manufacturing method and driving method thereof, and electronic device |
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| CN111193083A (en) * | 2020-02-26 | 2020-05-22 | 京东方科技集团股份有限公司 | Band-pass filter, manufacturing method and driving method thereof, and electronic device |
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