CN101787575A - Preparation method for micro-nano piezoelectric fiber - Google Patents

Preparation method for micro-nano piezoelectric fiber Download PDF

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CN101787575A
CN101787575A CN 201010122870 CN201010122870A CN101787575A CN 101787575 A CN101787575 A CN 101787575A CN 201010122870 CN201010122870 CN 201010122870 CN 201010122870 A CN201010122870 A CN 201010122870A CN 101787575 A CN101787575 A CN 101787575A
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CN101787575B (en
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刘伟庭
李霏
傅新
P·达里奥
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Zhejiang University ZJU
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Abstract

本发明公开了一种针对微纳米级压电纤维的制备方法。利用微量注射泵将溶有压电材料的溶液由玻璃毛细管微型针头中挤出,通过三维操作平台的移动和拉伸过程中的溶剂蒸发,制备微纳米级压电纤维,再经后续的极化处理。本发明通过控制微型针头上溶液的温度和拉伸速度,以及聚偏氟乙烯溶液系统的粘弹性和流动性,可以调整所制备的微纳米级压电纤维的结构尺度,满足传感器设计的不同需求。相对于传统的微纳米级压电纤维制备方法,本发明步骤简单,控制方便,并可以对该压电纤维的制备位置进行精确定位。

Figure 201010122870

The invention discloses a preparation method for micro-nano piezoelectric fibers. Using a micro-injection pump, the solution containing the piezoelectric material is extruded from the glass capillary micro-needle, and the solvent evaporates during the movement and stretching of the three-dimensional operating platform to prepare micro-nano-scale piezoelectric fibers, and then undergo subsequent polarization. deal with. In the present invention, by controlling the temperature and stretching speed of the solution on the microneedle, and the viscoelasticity and fluidity of the polyvinylidene fluoride solution system, the structural scale of the prepared micro-nano piezoelectric fiber can be adjusted to meet the different requirements of sensor design . Compared with the traditional method for preparing micro-nano-scale piezoelectric fibers, the invention has simple steps, convenient control, and can accurately locate the preparation position of the piezoelectric fibers.

Figure 201010122870

Description

针对微纳米级压电纤维的制备方法 Preparation method for micro-nano-scale piezoelectric fibers

技术领域technical field

本发明涉及一种微纳米级纤维结构制备方法,尤其是涉及一种基于定向微纳米级压电纤维的制备方法。The invention relates to a method for preparing a micro-nano-scale fiber structure, in particular to a preparation method based on oriented micro-nano-scale piezoelectric fibers.

背景技术Background technique

微纤毛感受器是一种普遍存在于动物世界的机械刺激感知系统。这些微纤毛感受器的直径范围从纳米尺寸到几个微米,长度从20μm到1500μm不等,从而可以感知不同的特定频率的振动、力、速度和加速度。随着微加工技术的不断提高,通过模拟生物微纤毛感知系统的人工微纤毛结构的研究,成为近年来传感器与微制造领域的一个研究热点,如美国与欧盟框架项目都相继投入大量的研究基金启动了美国卡耐基梅隆纳米机器人实验室的Nanofiber项目、伊利诺斯大学纳米制造实验室的Artificial hair receptor项目以及欧盟的Cilia项目等。Microciliated receptors are a mechano-stimuli perception system ubiquitous in the animal world. These microciliated receptors range in diameter from nanometer size to a few micrometers and lengths from 20 μm to 1500 μm, allowing them to sense vibrations, forces, velocities and accelerations at different specific frequencies. With the continuous improvement of micro-processing technology, the research on the artificial micro-cilia structure by simulating the biological micro-cilia sensing system has become a research hotspot in the field of sensors and micro-manufacturing in recent years. Launched the Nanofiber project of the Carnegie Mellon Nano Robotics Laboratory in the United States, the Artificial hair receptor project of the Nanomanufacturing Laboratory of the University of Illinois, and the Cilia project of the European Union.

现有的微纳纤维制备技术主要包括传统的刻蚀微加工方法,相分离法,自组装法,拉伸成丝法和静电纺丝法。但它们各自的局限性限制其在传感器领域的应用前景。传统的刻蚀微加工方法在制备悬空纤维结构时,工艺过于复杂;相分离和自组织法所需的时间过于冗长;而拉伸成丝法是一种工业上常用的用于连续制备化学纤维的方法,但其所获得的化学纤维一般尺寸较大;静电纺丝法尽管可以制备直径从几个纳米到几个微米的聚合物微纳纤维,但通常只能获得方向随意弯曲的、纤维连续的无纺垫结构,而无法在特定位置制备纤维机构。因此,有必要发展出新的聚合物微纳米级纤维制备方法,以达到在特定位置制备微纳米级功能性纤维结构的目的,从而适应传感器领域的需求。The existing micro-nanofiber preparation technologies mainly include traditional etching microfabrication methods, phase separation methods, self-assembly methods, stretching filament methods and electrospinning methods. But their respective limitations limit their application prospects in the field of sensors. The traditional etching microfabrication method is too complicated for the preparation of the suspended fiber structure; the time required for the phase separation and self-organization method is too lengthy; and the stretching filament method is a commonly used method in the industry for continuous preparation of chemical fibers. method, but the obtained chemical fibers are generally large in size; although the electrospinning method can prepare polymer micro-nano fibers with diameters ranging from several nanometers to several microns, it usually only obtains fibers that are randomly bent and continuous. The non-woven mat structure cannot be prepared in a specific position. Therefore, it is necessary to develop a new preparation method of polymer micro-nano-scale fibers to achieve the purpose of preparing micro-nano-scale functional fiber structures at specific positions, so as to meet the needs of the sensor field.

发明内容Contents of the invention

本发明的目的在于提供一种针对微纳米级压电纤维的制备方法,降低制备成本和简化制备的复杂工艺,达到在特定位置制备微纳米级功能性纤维结构的要求。The purpose of the present invention is to provide a preparation method for micro-nano-scale piezoelectric fibers, which reduces the preparation cost and simplifies the complicated preparation process, and meets the requirement of preparing micro-nano-scale functional fiber structures at specific positions.

本发明解决其技术问题采用的技术方案是:The technical scheme that the present invention solves its technical problem adopts is:

本发明利用微量注射泵将溶有压电材料的溶液由玻璃毛细管微型针头中挤出,通过三维操作平台的移动和拉伸过程中的溶剂蒸发,制备微纳米级压电纤维;其拉伸制备与后续的极化处理方法的具体步骤如下:The invention utilizes a micro-injection pump to extrude a solution in which a piezoelectric material is dissolved from a glass capillary micro-needle, and prepares a micro-nano-scale piezoelectric fiber by moving the three-dimensional operating platform and evaporating the solvent in the stretching process; the stretching preparation The specific steps of the subsequent polarization processing method are as follows:

(1)常温下,将聚偏氟乙烯溶于二甲基甲酰胺溶液,通过搅拌的方式使其混合均,混合质量比15%-30%;(1) Dissolve polyvinylidene fluoride in dimethylformamide solution at room temperature, and mix them evenly by stirring, with a mixing mass ratio of 15%-30%;

(2)将加热板固定于自动三维操作平台上,基底固定该加热板上,将玻璃毛细管微型针头安装于手动三维操作平台上,该玻璃毛细管微型针头的前端垂直正对于基底,后端与微量注射泵相连;(2) The heating plate is fixed on the automatic three-dimensional operation platform, the base is fixed on the heating plate, and the glass capillary microneedle is installed on the manual three-dimensional operation platform. Syringe pump connected;

(3)调节手动三维操纵平台以调整玻璃毛细管微型针头相对于基底的初始位置;控制加热板温度为60℃-75℃;并通过微量注射泵将溶液从玻璃毛细管微型针头中挤出到基底之上,移动载有基底的自动三维操纵平台从而对挤出的溶液进行拉伸,在拉伸过程中,溶液中的溶剂蒸发,溶液发生固化,从而形成悬空的具有压电特性的微纳米级纤维,重复以上(2)步骤和(3)步骤,在基底上制备出微纳米级压电纤维阵列;(3) Adjust the manual three-dimensional manipulation platform to adjust the initial position of the glass capillary micro-needle relative to the substrate; control the temperature of the heating plate at 60°C-75°C; and extrude the solution from the glass capillary micro-needle to the substrate through a micro-injection pump The extruded solution is stretched by moving the automatic three-dimensional manipulation platform carrying the substrate. During the stretching process, the solvent in the solution evaporates and the solution solidifies, thereby forming suspended micro-nano-scale fibers with piezoelectric properties. , repeating the above steps (2) and (3) to prepare a micro-nano-scale piezoelectric fiber array on the substrate;

(4)将基底连同其上的微纳米级压电纤维阵列一同置于由两金属极板和介电材料所组成纤维极化装置中,在两金属极板间施加10kV电压,以完成压电纤维阵列的极化。(4) Place the substrate together with the micro-nano-scale piezoelectric fiber array on it in a fiber polarization device composed of two metal plates and dielectric materials, and apply a 10kV voltage between the two metal plates to complete the piezoelectric Polarization of fiber arrays.

与其它的微纳米级纤维制备技术相比,本发明具有的有益效果是:Compared with other micro-nano-scale fiber preparation technologies, the present invention has the following beneficial effects:

利用聚合物溶液的粘弹性特性,对其进行拉伸成丝,避免了传统微加工技术的复杂流程;整个制备过程耗时短,效率高;在材料方面仅用到少量的聚合物溶液,材料成本低;可以在特定位置制备单根微纳米级纤维或微纳米级纤维阵列,其阵列结构可自由调节;适用于聚合物纤维的制备;所制备的微纳米级纤维直径一般为370纳米至20微米,具有压电特性;通过改变溶剂中的组分,这一纤维制备方法还可用于制备具有其它特性的功能性微纳米级纤维。Using the viscoelastic properties of the polymer solution, it is stretched into filaments, avoiding the complicated process of traditional micro-processing technology; the entire preparation process is time-consuming and efficient; only a small amount of polymer solution is used in terms of materials. Low cost; a single micro-nano-scale fiber or micro-nano-scale fiber array can be prepared at a specific position, and its array structure can be adjusted freely; it is suitable for the preparation of polymer fibers; the diameter of the prepared micro-nano-scale fiber is generally 370 nm to 20 nm Micron, with piezoelectric properties; by changing the components in the solvent, this fiber preparation method can also be used to prepare functional micro-nano-scale fibers with other properties.

附图说明Description of drawings

图1是微纳米级压电纤维拉伸制备实验台的示意图。Fig. 1 is a schematic diagram of a test bench for stretching and preparing micro-nano-scale piezoelectric fibers.

图2是微纳纤维拉伸制备工艺的示意图。Figure 2 is a schematic diagram of the micro-nano fiber stretching preparation process.

图3是微纳米级压电纤维极化装置示意图。Fig. 3 is a schematic diagram of a micro-nanoscale piezoelectric fiber polarization device.

图中:1、实验台架,2、自动三维操作平台,3、加热板,4、微量注射泵,5、玻璃毛细管微型针头,6、基底,7、手动三维操作平台,8、金属电极,9、介电材料,10、微纳米级压电纤维阵列,(a)拉伸前针头与基底的位置,(b)调节手动三维操纵平台以初始化玻璃毛细管微型针头相对于基底的位置,(c)移动载有基底的自动三维操作平台从而对挤出的溶液进行拉伸,(d)拉伸过程中溶液中的溶剂蒸发,材料发生固化,(e)拉伸完成,针头离开基底,悬空的具有压电特性的微纳米级纤维结构形成,In the figure: 1. Experimental platform, 2. Automatic three-dimensional operation platform, 3. Heating plate, 4. Micro injection pump, 5. Glass capillary micro needle, 6. Base, 7. Manual three-dimensional operation platform, 8. Metal electrodes, 9. Dielectric material, 10. Micro-nano piezoelectric fiber array, (a) the position of the needle and the substrate before stretching, (b) adjust the manual three-dimensional manipulation platform to initialize the position of the glass capillary micro-needle relative to the substrate, (c ) Move the automatic three-dimensional operation platform carrying the substrate to stretch the extruded solution, (d) the solvent in the solution evaporates during the stretching process, and the material is solidified, (e) the stretching is completed, the needle leaves the substrate, and the suspended Formation of micro-nano-scale fiber structures with piezoelectric properties,

具体实施方式Detailed ways

下面结合附图和实施例对本发明作进一步说明。The present invention will be further described below in conjunction with drawings and embodiments.

本发明利用微量注射泵将溶有压电材料的溶液由玻璃毛细管微型针头中挤出,通过三维操作平台的移动和拉伸过程中的溶剂蒸发,在基底特定位置制备微纳米级压电纤维。The invention utilizes a micro-injection pump to extrude a solution in which piezoelectric materials are dissolved from a glass capillary micro-needle, and prepares micro-nano-scale piezoelectric fibers at a specific position of a substrate through movement of a three-dimensional operating platform and solvent evaporation during stretching.

如图1所示,微纳米级压电纤维的制备平台由实验台架1、自动三维操作平台2、加热板3、基底6、玻璃毛细管微型针头5及微量注射泵4组成。将加热板3固定于自动三维操作平台2上,基底6固定该加热板3上,基底所用材料为聚酰亚胺。玻璃毛细管微型针头5夹持安装于手动三维操作平台7上,该微型针头的前端垂直正对于基底6,后端与微量注射泵4相连,自动三维操作平台2和手动三维操作平台7均安装在实验台架1上。As shown in Figure 1, the preparation platform of micro-nano piezoelectric fibers consists of an experimental bench 1, an automatic three-dimensional operation platform 2, a heating plate 3, a substrate 6, a glass capillary microneedle 5 and a micro-injection pump 4. The heating plate 3 is fixed on the automatic three-dimensional operation platform 2, the base 6 is fixed on the heating plate 3, and the material used for the base is polyimide. The glass capillary micro-needle 5 is clamped and installed on the manual three-dimensional operation platform 7. The front end of the micro-needle is vertically facing the substrate 6, and the rear end is connected with the micro-injection pump 4. Both the automatic three-dimensional operation platform 2 and the manual three-dimensional operation platform 7 are installed on the On the experimental bench 1.

制备中所需的溶液由聚偏氟乙烯粉末和二甲基甲酰胺溶剂在常温下相混合而成,并通过搅拌的方式使其混合均,混合质量比15%-30%。为达到均匀混合的效果,不同浓度溶液所需的混合时间如下表所示:The solution required in the preparation is prepared by mixing polyvinylidene fluoride powder and dimethylformamide solvent at normal temperature, and the mixture is uniformly mixed by means of stirring, and the mixing mass ratio is 15%-30%. In order to achieve a uniform mixing effect, the mixing time required for different concentrations of solutions is shown in the table below:

Figure GSA00000055637100031
Figure GSA00000055637100031

在制备微纳米级压电纤维之前,首先应通过调节手动三维操纵平台2初始化玻璃毛细管微型针头5相对于基底6的位置;并使载有基底的加热板温度控制在60℃-75℃;微纳米级压电纤维的拉伸制备流程如图2所示,待针头位置设定完毕后,锁定手动三维操作平台,并通过微量注射泵4将溶液从玻璃毛细管微型针头5中挤出到基底6之上,等待一段时间后,移动载有基底6的自动三维操纵平台2从而对挤出的溶液进行拉伸,在拉伸过程中,溶液中的溶剂蒸发,材料发生固化,从而形成悬空的具有压电特性的微纳米级纤维。重复以上的定位-拉伸的步骤,可在基底6上制备出微纳米级压电纤维阵列10。制备结果如下表所示:Before preparing the micro-nano-scale piezoelectric fiber, the position of the glass capillary microneedle 5 relative to the substrate 6 should be initialized by adjusting the manual three-dimensional manipulation platform 2; The stretching preparation process of nanoscale piezoelectric fibers is shown in Figure 2. After the needle position is set, the manual three-dimensional operation platform is locked, and the solution is extruded from the glass capillary microneedle 5 to the substrate 6 through the micro-injection pump 4 Above, after waiting for a period of time, move the automatic three-dimensional manipulation platform 2 carrying the substrate 6 to stretch the extruded solution. During the stretching process, the solvent in the solution evaporates and the material solidifies, thereby forming a suspended structure with Micro-nanoscale fibers with piezoelectric properties. By repeating the above positioning-stretching steps, the micro-nano scale piezoelectric fiber array 10 can be prepared on the substrate 6 . The preparation results are shown in the table below:

溶液浓度Solution concentration 加热温度heating temperature 等待时间waiting time 拉伸速度stretching speed 微量注射泵泵出速率Microsyringe Pump Pumping Rate 制备出的纤维直径Prepared fiber diameter  制备出的纤维长度Prepared fiber length   15%15%   70℃70   2分钟 2 minutes   25毫米/秒25 mm/s   1微升/小时1 microliter/hour   375纳米375nm  5微米5 microns   30%30%   70℃70℃   30秒 30 seconds   25毫米/秒25 mm/s   1微升/小时1 microliter/hour   20微米20 microns  2毫米2mm

如图3所示,由聚偏氟乙烯和二甲基甲酰胺溶液制备的具有压电特性的微纳纤维,在封装之前还需进行极化处理以提高其压电系数。将基底6连同其上的微纳米级压电纤维阵列10一同置于由两金属极板8和介电材料9所组成纤维极化装置中,在两金属极板8间施加10kV电压,持续1小时,完成压电纤维阵列10的极化。As shown in Figure 3, micro-nano fibers with piezoelectric properties prepared from polyvinylidene fluoride and dimethylformamide solutions need to be polarized before packaging to increase their piezoelectric coefficients. Place the substrate 6 together with the micronanoscale piezoelectric fiber array 10 on it in a fiber polarization device composed of two metal plates 8 and a dielectric material 9, and apply a voltage of 10 kV between the two metal plates 8 for 1 Hours, the polarization of the piezoelectric fiber array 10 is completed.

如图1、图2、图3所示,利用微量注射泵将溶有压电材料的溶液由玻璃毛细管微型针头中挤出,通过三维定位平台的移动对一部分溶液进行拉伸成丝,在成丝过程中溶液中的溶剂蒸发,材料发生固化,从而在需要的位置形成微纳米级纤维结构,在纤维结构制备完成后对纤维进行极化处理,从而得到具有压电特性的微纳米级悬空纤维。其制备和极化处理方法分为四个步骤:As shown in Figure 1, Figure 2, and Figure 3, the solution containing the piezoelectric material is extruded from the microneedle of the glass capillary using a micro-injection pump, and a part of the solution is stretched into filaments by the movement of the three-dimensional positioning platform. During the silking process, the solvent in the solution evaporates and the material solidifies to form a micro-nano-scale fiber structure at the required position. After the fiber structure is prepared, the fiber is polarized to obtain a micro-nano-scale suspended fiber with piezoelectric properties. . Its preparation and polarization treatment method is divided into four steps:

(1)室温下,将聚偏氟乙烯粉末溶于二甲基甲酰胺溶液,通过搅拌的方式使其混合均匀,溶液系统的拉伸可纺性可由下式进行判断,(1) At room temperature, dissolve the polyvinylidene fluoride powder in the dimethylformamide solution, and mix it evenly by stirring. The tensile spinnability of the solution system can be judged by the following formula,

P=hs·μ/σP=h s ·μ/σ

其中,P是用来描述溶液系统拉伸可纺性的参量,小的P值代表这一溶液系统更加适合拉伸纺丝,hs为溶剂的蒸发率,μ为溶液系统的粘度,σ为溶液的表面张力,本发明中,为使溶液系统的流变学特性适于纤维拉伸,混合质量比控制在15%-30%。Among them, P is a parameter used to describe the stretching spinnability of the solution system, a small value of P means that the solution system is more suitable for stretching and spinning, h s is the evaporation rate of the solvent, μ is the viscosity of the solution system, and σ is The surface tension of the solution, in the present invention, in order to make the rheological properties of the solution system suitable for fiber drawing, the mixing mass ratio is controlled at 15%-30%.

(2)微纳米级压电纤维的拉伸制备平台如图1所示。将加热板3固定于自动三维操作平台2上,基底6固定该加热板上,,将玻璃毛细管微型针头5安装于手动三维操作平台7上,该针头的前端垂直对于基底,后端与微量注射泵4相连。其中,玻璃毛细管微型针头采用玻璃管拉伸设备在加热熔融状态下拉伸而成,该针头被安装于手动三维操作平台上以便于在拉伸前初始化微型针头相对于基底的位置,使挤出的液体能够与基底材料相接触并在一段时间后与基底材料牢固结合;(2) The stretching preparation platform of micro-nano-scale piezoelectric fibers is shown in Fig. 1 . The heating plate 3 is fixed on the automatic three-dimensional operation platform 2, the base 6 is fixed on the heating plate, and the glass capillary microneedle 5 is installed on the manual three-dimensional operation platform 7. The front end of the needle is perpendicular to the base, and the rear end is connected to the micro injection Pump 4 is connected. Among them, the glass capillary microneedle is stretched by glass tube stretching equipment under heating and melting. The needle is installed on the manual three-dimensional operation platform to initialize the position of the microneedle relative to the substrate before stretching, so that The liquid can come into contact with the base material and bond firmly with the base material after a period of time;

(3)微纳米级压电纤维的拉伸制备过程如图2所示。首先调节手动三维操纵平台7以调整玻璃毛细管微型针头5相对于基底6的初始位置;控制加热板3温度为60℃-75℃;待针头位置设定完毕后,锁定手动三维操作平台,并通过微量注射泵将0.01-0.03ml溶液从微型针头中挤出到基底之上,等待一分钟后,载有基底的自动三维操纵平台以20-30mm/s的速度沿拉伸方向移动,从而对挤出的溶液进行拉伸。在拉伸过程中,溶液中的溶剂蒸发,材料发生固化,从而形成悬空的具有压电特性的微纳米级纤维。(3) The stretching preparation process of the micro-nano piezoelectric fiber is shown in Fig. 2 . First, adjust the manual three-dimensional manipulation platform 7 to adjust the initial position of the glass capillary microneedle 5 relative to the substrate 6; control the temperature of the heating plate 3 to 60°C-75°C; after the needle position is set, lock the manual three-dimensional manipulation platform, and pass The micro-injection pump extrudes 0.01-0.03ml of solution from the microneedle onto the substrate, and after waiting for one minute, the automatic three-dimensional manipulation platform loaded with the substrate moves along the stretching direction at a speed of 20-30mm/s, thereby The resulting solution is stretched. During the stretching process, the solvent in the solution evaporates and the material solidifies, forming suspended micro-nano-scale fibers with piezoelectric properties.

(4)微纳米级压电纤维在应用前仍然需要后续的极化处理以提高其压电系数,其极化过程如图3所示。将基底6连同其上的微纳米级压电纤维阵列10一同置于金属电极8所形成的高压电场中,在两电极间施加12kV电压以完成压电纤维的极化。由于尺寸较小,为了避免击穿,将介电材料9制成的薄膜被置于两极板间。(4) Micro-nano-scale piezoelectric fibers still need subsequent polarization treatment to increase their piezoelectric coefficients before application, and the polarization process is shown in Figure 3. The substrate 6 together with the micro-nano-scale piezoelectric fiber array 10 thereon is placed in the high-voltage electric field formed by the metal electrode 8, and a voltage of 12 kV is applied between the two electrodes to complete the polarization of the piezoelectric fiber. Due to the small size, a thin film of dielectric material 9 is placed between the two plates in order to avoid breakdown.

Claims (1)

1. preparation method at micro-nano piezoelectric fiber, it is characterized in that: utilize micro-injection pump will be dissolved with the solution of piezoelectric by extruding in the miniature syringe needle of capillary glass tube, by the solvent evaporation in the mobile and drawing process of three-dimensional manipulating platform, preparation micro-nano piezoelectric fiber; Its concrete steps that prepare with follow-up method for polarized treatment that stretch are as follows:
(1) under the normal temperature, Kynoar is dissolved in dimethyl formamide solution, by the mode that stirs it is mixed all, mixing quality compares 15%-30%;
(2) heating plate (3) is fixed on the automatic three-dimensional manipulating platform (2), substrate (6) is fixed on this heating plate (3), the miniature syringe needle of capillary glass tube (5) is installed on the manual three-dimensional manipulating platform (7), the front end of the miniature syringe needle of this capillary glass tube (5) vertically is right against substrate (6), and the rear end links to each other with micro-injection pump (4);
(3) regulate manual Three dimensional steerable platform (7) to adjust the initial position of the miniature syringe needle of capillary glass tube (5) with respect to substrate (6); Control heating plate (3) temperature is 60 ℃-75 ℃; And from the miniature syringe needle of capillary glass tube (5), be expressed into solution on the substrate (6) by micro-injection pump (4), move be loaded with the automatic Three dimensional steerable platform (2) of substrate (6) thus the solution of extruding is stretched, in drawing process, solvent evaporation in the solution, solution solidifies, thereby form unsettled micro nano-scale fiber, repeat above (2) step and (3) step, in substrate (6), prepare micro-nano piezoelectric fiber array (10) with piezoelectric property;
(4) substrate (6) is together placed by two metal polar plates (8) and dielectric material (9) together with the micro-nano piezoelectric fiber array (10) on it formed the fiber polarization device, between two metal polar plates (8), apply 10kV voltage, to finish the polarization of array of piezoelectric fibres (10).
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