CN101785904B - Method for preparing metal wire biological microelectrode - Google Patents
Method for preparing metal wire biological microelectrode Download PDFInfo
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- CN101785904B CN101785904B CN 201010300280 CN201010300280A CN101785904B CN 101785904 B CN101785904 B CN 101785904B CN 201010300280 CN201010300280 CN 201010300280 CN 201010300280 A CN201010300280 A CN 201010300280A CN 101785904 B CN101785904 B CN 101785904B
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- tinsel
- thin glue
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- microelectrode
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Abstract
The invention discloses a method for preparing a metal wire biological microelectrode, which belongs to the technical field of biomedical engineering, and comprises: applying a polymer adhesive on the surface of a substrate by spin coating, curing the polymer adhesive to obtain an elastic polymer thin adhesive, releasing the elastic polymer thin adhesive from the substrate and cutting the elastic polymer thin adhesive into blocks; and cleaning a metal wire, passing the metal wire through the elastic polymer thin adhesive serving as a protective layer, depositing a polymer on the structure to form an electrode insulating layer of the metal wire microelectrode, and stripping the elastic polymer thin adhesive to obtain the metal wire microelectrode. The metal wire biological microelectrode prepared by the method has the advantages that: the technology is simple in process and easy in operation, the electrode width is controllable and the manufacturing precision is high; the insulating layer is formed by a polymer depositing method, has a high bonding force with the metal wire and is insusceptible to falling off; and the integration of the metal wire microelectrode is high, a plurality of electrode points can be made on one metal wire, a function of synchronously stimulating at multiple points is provided, the electrode points are exposed along the circumferential direction of the metal wire, and the muscle stimulation effect of the electrode is improved.
Description
Technical field
The present invention relates to a kind of microelectrode manufacture method of biomedical engineering field, specifically is a kind of preparation method of tinsel biological microelectrode.
Background technology
The situation of eyes-closed function forfeiture generally can appear in facial paralysis patient, and the patient for wherein can not spontaneous recovery adopts Therapeutic Method such as acupuncture, anastomosis of facial nerve operation.Some patient's eyes-closed function may recover or recover to a certain extent, but also some intractable, permanent facial paralysis patient's function can't be recovered, and therefore can cause bitot's patches, cornea inflammation, can cause blind when serious.The patient of facial paralysis generally is lateralized, and the nerve of strong side, the function of muscle are normal often.Because microelectric technique and development of biology make and can carry out electricity irritation to muscle with implantable microstimulation device, thereby recover patient's eyes-closed function of facial paralysis patient.
In various implantable electric stimulations, the microelectrode that is used for functional neuromuscular is stimulated is a very important part, and the performance of electrode is directly connected to electric pulse to the effect of stimulation of neurocyte.At present, the electrode that stimulates for muscle such as orbicularis oculi mainly adopts coat polymers insulating barrier on tinsel, makes tinsel one end expose fraction as electrode points.In order to reduce the damage of electrode pair muscular tissue, microelectrode generally adopt corrosion-resistant and biocompatibility better polymerization thing coating as electrode dielectric layer.Polymer commonly used has: Teflon (Teflon) and C type Parylene polymer such as (Parylene-C).
Find by prior art documents, Liming Li, Pengjia Cao, Mingjie Sun etc. write articles " Intraorbital optic nerve stimulation with penetrating electrodes:in vivo electrophysiology study in rabbits " (" using optic nerve in the penetrance electrode stimulating eye socket " " GRAEFE document: clinical and test the ophthalmology ") at " GRAEFE ' S ARCHIVE FOR CLINICAL AND EXPERIMENTAL OPHTHALMOLOGY " 247 (2009) p349-361.The manufacture method of mentioning in this article that is used for the microelectrode of muscular irritation in the eye socket is to adopt coated polymer on tinsel, exposes the fraction metal as electrode points at tinsel one end.The insulation coating layer thickness of the electrode of Zhi Zuoing is uncontrollable like this, coating and adhesion wiry are not strong yet, the also inaccuracy of the width control of wire electrode point, and only expose electrode points at metal one side end points, make that the electrode integrated level is lower, when multiple spot stimulates, need to implant many wire electrodes, make implantation process complicated and unreliable, influence the electrode stimulating effect.
Summary of the invention
The objective of the invention is at the deficiencies in the prior art and defective, a kind of preparation method of tinsel biological microelectrode is provided, make microelectrode can be used in stimulation to muscle such as orbicularis oculi, electrode integrated level height, the multiple spot that can carry out muscle simultaneously stimulates, and electrode points width controllability and make the precision height, and electrode points circumferentially exposes at wire electrode, can improve effect of stimulation.
The present invention is achieved by the following technical solutions; the present invention at first uses spin coating technique to prepare polymer thin glue and is heating and curing; make it have elasticity; discharge thin glue then and be cut to fritter; tinsel is passed the thin glue of elastomeric polymer, make thin glue as protective layer, deposited polymer is as the electrode dielectric layer of tinsel microelectrode on this structure; with elastomeric polymer protective layer stripping metal silk, obtain final needed tinsel microelectrode at last.
The present invention includes following steps:
The first step, at substrate surface spin on polymers glue, after cured, make the thin glue of elastomeric polymer, the thin glue of elastomeric polymer is discharged the back stripping and slicing from substrate;
Described polymer latex is polydimethylsiloxane.
Described cured refers to: the thin glue of polymer poly dimethyl siloxane is inserted in the baking oven, with 85 ℃ of temperature bakings 2 hours.
Second step, tinsel is passed the thin glue of elastomeric polymer after cleaning, make thin glue as protective layer, deposited polymer is peeled off the thin glue of elastomeric polymer at last as the electrode dielectric layer of tinsel microelectrode on this structure, makes the tinsel microelectrode.
Described cleaning refers to use ultrasonic wave concussion to clean;
Described deposited polymer is Parylene, the hydrocarbon polymer of vapour deposition;
Compared with prior art, it is simple to operation that the present invention prepares gained tinsel biological microelectrode technical process, electrode width controllability and making precision height; Insulating barrier uses the polymer deposition method, and is good with the tinsel adhesion, is not easy to come off; Tinsel microelectrode integrated level height can be made a plurality of electrode points on an one metal wire, multiple spot stimulatory function simultaneously can be provided.Because the thin glue of elastomeric polymer is at tinsel circumferencial direction parcel, when removing the thin glue of elastomeric polymer, electrode points is exposed at the wire electrode circumferencial direction, is conducive to improve the effect of stimulation of muscle.
Description of drawings
Fig. 1 is embodiment 1 sketch map.
Fig. 2 is embodiment 2 sketch maps.
Fig. 3 is embodiment 3 sketch maps.
The specific embodiment
Below embodiments of the invention are elaborated, present embodiment is being to implement under the prerequisite with the technical solution of the present invention, provided detailed embodiment and concrete operating process, but protection scope of the present invention is not limited to following embodiment.
Embodiment 1
As shown in Figure 1, present embodiment is prepared by following steps:
The first step, cleaning platinum silk;
Described cleaning refers to use ultrasonic wave concussion to clean.
Second step, clean sheet glass, with 1500 rev/mins speed spin coating polydimethylsiloxane 30 seconds, the thin glue thickness of polydimethylsiloxane was 100 μ m on sheet glass, and the polydimethylsiloxane proportioning is the weight ratio 10: 1 of stock solution and firming agent;
The 3rd step, the thin glue of curing elastic polymer poly dimethyl siloxane, and make it have elasticity;
Described curing referred to the thin glue of polymer poly dimethyl siloxane is inserted in the baking oven, with 85 ℃ of temperature bakings 2 hours.
The 4th step, the thin glue of release elasticity polydimethylsiloxane, and be cut into 3mm * 3mm square;
The 5th step, the platinum silk is passed the 1 thin glue of polydimethylsiloxane, and the thin glue of polydimethylsiloxane is placed platinum silk electrode points position;
The 6th the step, being installed with deposited polymer Parylene 4～5 μ m on the platinum silk of the thin glue of polydimethylsiloxane, as the platinum electrode insulating barrier;
The 7th step, peel off polydimethylsiloxane Thin Elastic glue, the electrode points that to expose 1 width be 100 μ m.
It is 1 that polymer in the present embodiment is protected the electrode points number of thin glue protection, and it is 100 μ m that polymer is protected the electrode points width of thin glue protection.
Diameter wiry in the present embodiment is 100 μ m, and this metal is platinum; It is polydimethylsiloxane that described polymer is protected thin glue; Described polymer insulation layer is Parylene.
Embodiment 2
As shown in Figure 2, present embodiment is prepared by following steps:
The first step, cleaning platinum silk; Described cleaning refers to use ultrasonic wave concussion to clean.
Second step, clean sheet glass, with 2000 rev/mins speed spin coating polydimethylsiloxane 30 seconds, making the thin glue thickness of polydimethylsiloxane was 80 μ m on sheet glass, and the polydimethylsiloxane proportioning is the weight ratio 10: 1 of stock solution and firming agent;
The 3rd step, the thin glue of curing elastic polymer poly dimethyl siloxane, and make it have elasticity; Described curing referred to the thin glue of polymer poly dimethyl siloxane is inserted in the baking oven, with 85 ℃ of temperature bakings 2 hours.
The 4th step, the thin glue of release elasticity polydimethylsiloxane, and be cut into 3mm * 3mm square;
The 5th step, the platinum silk is passed 2 thin glue of polydimethylsiloxane, and the thin glue of polydimethylsiloxane is placed platinum silk electrode points position;
The 6th the step, being installed with deposited polymer Parylene 4～5 μ m on the platinum silk of the thin glue of polydimethylsiloxane, as the platinum electrode insulating barrier;
The 7th step, peel off polydimethylsiloxane Thin Elastic glue, the electrode points that to expose 2 width be 80 μ m.
It is 2 that polymer in the present embodiment is protected the electrode points number of thin glue protection, and it is 80 μ m that polymer is protected the electrode points width of thin glue protection.Diameter wiry in the present embodiment is 100 μ m, and this metal is platinum; It is polydimethylsiloxane that described polymer is protected thin glue; Described polymer insulation layer is Parylene.
Embodiment 3
As shown in Figure 3, present embodiment is prepared by following steps:
The first step, cleaning platinum silk; Described cleaning refers to use ultrasonic wave concussion to clean.
Second step, clean sheet glass, with 3000 rev/mins speed spin coating polydimethylsiloxane 30 seconds, making the thin glue thickness of polydimethylsiloxane was 60 μ m on sheet glass, and the polydimethylsiloxane proportioning is the weight ratio 10: 1 of stock solution and firming agent;
The 3rd step, the thin glue of curing elastic polymer poly dimethyl siloxane, and make it have elasticity; Described curing referred to the thin glue of polymer poly dimethyl siloxane is inserted in the baking oven, with 85 ℃ of temperature bakings 2 hours.
The 4th step, the thin glue of release elasticity polydimethylsiloxane, and be cut into 3mm * 3mm square;
The 5th step, the platinum silk is passed 3 thin glue of polydimethylsiloxane, and the thin glue of polydimethylsiloxane is placed platinum silk electrode points position;
The 6th the step, being installed with deposited polymer Parylene 4～5 μ m on the platinum silk of the thin glue of polydimethylsiloxane, as the platinum electrode insulating barrier;
The 7th step, peel off polydimethylsiloxane Thin Elastic glue, the electrode points that to expose 3 width be 60 μ m.
It is 3 that polymer in the present embodiment is protected the electrode points number of thin glue protection, and it is 60 μ m that polymer is protected the electrode points width of thin glue protection.Diameter wiry in the present embodiment is 100 μ m, and this metal is platinum; It is polydimethylsiloxane that described polymer is protected thin glue; Described polymer insulation layer is Parylene.
The technology of above-described embodiment is simple, electrode width controllability and make the precision height; Insulating barrier and tinsel adhesion are good; The tinsel microelectrode can provide simultaneously to functional nervimuscular multiple spot stimulatory function.Because the thin glue of elastomeric polymer is at tinsel circumferencial direction parcel, when removing the thin glue of elastomeric polymer, electrode points is exposed at the wire electrode circumferencial direction, is conducive to improve the effect of stimulation of muscle.
Claims (6)
1. the preparation method of a tinsel biological microelectrode is characterized in that, may further comprise the steps:
The first step, at the thin glue of substrate surface spin coating polydimethylsiloxane, after cured, make the thin glue of elastomeric polymer, the thin glue of elastomeric polymer is discharged the back stripping and slicing from substrate;
Second step, the thin glue of elastomeric polymer tinsel passed stripping and slicing after cleaning after; make thin glue as protective layer; deposit the deposition Parylene as the electrode dielectric layer of tinsel microelectrode at the tinsel that is installed with thin glue; peel off the thin glue of elastomeric polymer at last; expose electrode points, make the tinsel microelectrode.
2. the preparation method of tinsel biological microelectrode according to claim 1 is characterized in that, the number of described electrode points is identical with the sheet number of the thin glue of elastomeric polymer that tinsel passes, and the width of electrode points is identical with the thickness of the thin glue of elastomeric polymer.
3. the preparation method of tinsel biological microelectrode according to claim 1 is characterized in that, described thickness of insulating layer is 2～20 μ m.
4. the preparation method of tinsel biological microelectrode according to claim 1 is characterized in that, described polydimethylsiloxane proportioning is the weight ratio 10:1 of stock solution and firming agent.
5. the preparation method of tinsel biological microelectrode according to claim 1 is characterized in that, described cured refers to: polymer thin glue is inserted in the baking oven, with 85 ℃ of temperature bakings 2 hours.
6. the preparation method of tinsel biological microelectrode according to claim 1 is characterized in that, described cleaning refers to use ultrasonic wave concussion to clean.
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| CN102500055B (en) * | 2011-10-25 | 2014-02-26 | 上海交通大学 | Auxiliary implantable flexible microelectrode of non-absorbable suture line and production method thereof |
| CN102815664A (en) * | 2012-08-02 | 2012-12-12 | 上海交通大学 | Flexible tubular microelectrode and preparation method thereof |
| CN105559778A (en) * | 2016-02-02 | 2016-05-11 | 上海交通大学 | Brain electrode for collecting brain electrical signals for long time and preparation method thereof |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1518467A (en) * | 2001-06-21 | 2004-08-04 | ���Ʒ�չ�о���������˾ | Needle electrode |
| CN101006953A (en) * | 2007-01-18 | 2007-08-01 | 上海交通大学 | Artificial retina neural flexible microelectrode array chips and processing method thereof |
| CN101284159A (en) * | 2008-05-29 | 2008-10-15 | 上海交通大学 | Metal fibril electrode array producing method for optic nerve stimulation |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN1518467A (en) * | 2001-06-21 | 2004-08-04 | ���Ʒ�չ�о���������˾ | Needle electrode |
| CN101006953A (en) * | 2007-01-18 | 2007-08-01 | 上海交通大学 | Artificial retina neural flexible microelectrode array chips and processing method thereof |
| CN101284159A (en) * | 2008-05-29 | 2008-10-15 | 上海交通大学 | Metal fibril electrode array producing method for optic nerve stimulation |
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