CN101769935A - One-dimensional nanometer material based hot-wire flow velocity transducer and testing system - Google Patents
One-dimensional nanometer material based hot-wire flow velocity transducer and testing system Download PDFInfo
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- CN101769935A CN101769935A CN200910076074A CN200910076074A CN101769935A CN 101769935 A CN101769935 A CN 101769935A CN 200910076074 A CN200910076074 A CN 200910076074A CN 200910076074 A CN200910076074 A CN 200910076074A CN 101769935 A CN101769935 A CN 101769935A
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- flow velocity
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Abstract
The invention relates to a one-dimensional nanometer material based hot-wire flow velocity transducer, comprising a heat sensitive element, a support body and a substrate, wherein the heat sensitive element is arranged on the top of the support body; the heat sensitive element comprises a single nanometer material, an array comprising more than two strips of the nanometer material, or a beam of one-dimensional nanometer material or a film formed by N strips of the one-dimensional nanometer material. The invention also provides a measuring system manufactured by the nanometer material hot-wire type flow velocity transducer, wherein the nanometer material hot-wire type flow velocity transducer is arranged on a fine adjusting frame; the angle between the heat sensitive element in the hot-wire type flow velocity transducer and fluid flow velocity is adjusted through the fine adjusting frame; change of the heat sensitive element caused by the flow velocity is amplified through a constant current type (or constant temperature type) signal processing circuit, and is displayed by a voltmeter or a monitor; and the flow velocity measuring system formed by the nanometer material hot-wire type transducer can realize flow velocity measurement between 0.001 and 50m/s. The system has the characteristics of small size of the transducer, high sensitivity, high response speed, low power consumption, long service life and the like.
Description
Technical field
The present invention relates to a kind of hot-wire flow velocity transducer, particularly relate to a kind of based on monodimension nanometer material miniature hot-wire flow velocity transducer and utilize the system of the miniature hot-wire flow velocity transducer test of this monodimension nanometer material.
Background technology
The hot-wire flow velocity measurement is to utilize heat balance principle, by measuring the transmission of heat, tries to achieve fluid-flow rate.Promptly utilize the cooling rate of heating object and the relation between the rate of flow of fluid, obtain flow speed value by the temperature of measuring heating object.Room and time resolution height, the pass band of hot-wire flow velocity measuring method, background noise is low, price is relatively cheap, signal is continuous, stream field carries out spectrum analysis exactly, be suitable for various flow fields, particularly in low-speed flow and the research of low field of turbulent flow, shown bigger superiority.Therefore, the hot-wire flow velocity measuring method is still the classical instrument and the useful tool of turbulent flow and flow measurement so far.
The structural model of traditional hot-wire flow velocity transducer can list of references [1]: Chen J, Liu C.Development and Characterization of Surface Micromachined, Out-of-Plane Hot-Wire Anemometer J Microelectromech S, 2003,12:979-988 introduces, and as shown in Figure 1: traditional hot-wire flow velocity transducer is made up of hot line, supporter, substrate three parts; Wherein hot line is made by tungsten filament, platinum filament or platinum plating tungsten filament usually.The typical heat linear diameter is 0.5 micron-10 microns, and length is 1 millimeter-3 millimeters.If change the metal wire between the supporter into metallic film, just become the hot diaphragm type flow sensor.
The ultimate principle of hot-wire flow velocity transducer can be described with the King formula:
In the formula, I
wBe heating current (A), R
wFor the hot line temperature is T
wThe time hot line resistance (Ω); T
wBe the hot line temperature (℃), T
fBe fluid temperature (F.T.) (℃), the U fluid flows through the speed of hot line.X, Y are by the coefficient of the size of hot line, physical properties of fluids and flox condition decision, for given hot wire flow transducer and given detected fluid, can think that they are constant.
Make R
fFor temperature is T
fThe time hot line resistance (Ω), β is that the hot line material is at T
fThe time temperature-coefficient of electrical resistance, following relation of plane is then arranged:
R
w＝R
f[1+β(T
w-T
f)] (2)
Can get the static equation formula of hot line by (1), (2) two formulas:
This formula shows, under thermal equilibrium state, and the heating current I of hot line
w, the resistance R of hot line
w, R
fAnd exist definite relation between the average velocity U of fluid.
Measurement has proposed more and more higher requirement to hot-wire flow velocity in the development of modern science and technology, except requiring high sensitivity and high dynamic responding speed, also need reduce probe size reducing the influence of stream field, and high-intensity probe material is to improve life-span and durability etc. as far as possible.
According to the principle of work of hot-wire flow velocity transducer, improve the sensitivity and the response speed of hot-wire flow velocity transducer, should reduce the size of hot line (film) on the one hand as far as possible; Should improve the surface area and the length-diameter ratio of hot line on the other hand as far as possible.
In recent years, the performance that appears as further raising hot-wire flow velocity transducer of monodimension nanometer material such as carbon nano-tube, nano wire provides new thinking.For example, monodimension nanometer materials such as carbon nano-tube, nano wire have the surface volume ratio of extra small size, superelevation, higher temperature-coefficient of electrical resistance, and these characteristics all help improving the sensitivity of hot-wire flow velocity transducer.Simultaneously, the intensity of nano material with superelevation makes it can bear high flow velocities to impact and have higher life-span and a durability.Therefore, utilize monodimension nanometer material will improve the performance and the durability of hot-wire flow velocity transducer effectively as sensitive element.
Summary of the invention
The objective of the invention is in order to satisfy the needs of modern science and technology, make hot-wire flow velocity transducer both have high sensitivity and high dynamic response speed, also need reduce probe size as far as possible to reduce the influence of stream field; Thereby a kind of high surface volume ratio of monodimension nanometer material, high temperature coefficient of resistance, high strength and low in power consumption utilized is provided, with it as the sensitive element in the hot-wire flow velocity transducer, making based on the monodimension nanometer material hot-wire flow velocity transducer.Should have characteristics such as high sensitivity and high response speed, extra small size, high durability based on the monodimension nanometer material hot-wire flow velocity transducer.
Another object of the present invention is for the system of the flow sensor test that a kind of miniature hot-wire flow velocity transducer that utilizes this monodimension nanometer material makes is provided.
The object of the present invention is achieved like this:
Nano material hot-wire flow velocity transducer provided by the invention (with reference to figure 2) comprises the substrate of heat-sensitive element (hot line 1), supporter and fixed support body, and wherein, described heat-sensitive element is arranged on the top of described supporter; It is characterized in that: described heat-sensitive element is single nano material, a branch of monodimension nanometer material, the array of being made up of 2 above nano materials or the film that is made of N root monodimension nanometer material.
In above-mentioned technical scheme, the diameter of described single nano material is 1nm-1mm, length range: 1nm-1cm.
In above-mentioned technical scheme, described N is more than 100.
In above-mentioned technical scheme, the described array of being made up of 2 above nano materials is that the nano material more than two or two is arranged in parallel and constitutes the spacing range in the array between the nano material: 1nm-1mm.
In above-mentioned technical scheme, described by 2 above nano materials form a branch of, can or be twisted into a strand shape by the parallel tight arrangement of single nano material and form.
In above-mentioned technical scheme, the described film like that constitutes by N root monodimension nanometer material, wherein the thickness of film is advisable to reach 1nm-1mm.
In above-mentioned technical scheme, also be included in the surface parcel or the coating insulation course of supporter and heat-sensitive element, make the insulation of supporter and nano material and measured medium.The material of described insulation course comprises quartz, glass, alundum (Al, various pottery, epoxy resin etc., and the thickness of its insulation course is from 10 dusts to 100 micron.
Monodimension nanometer material hot-wire flow velocity sensing testing system provided by the invention (with reference to figure 3) comprises monodimension nanometer material hot-wire flow velocity transducer, signal processing circuit, fine adjustment frame, voltage table or monitor, computing machine, power supply and cable; It is characterized in that the monodimension nanometer material hot-wire flow velocity transducer is installed on the fine adjustment frame, heat-sensitive element and signal processing circuit and voltage table or monitor show and are electrically connected; By heat-sensitive element in the fine adjustment frame adjusting hot-wire flow velocity transducer and the angle between the rate of flow of fluid; Flow velocity causes that the variation of heat-sensitive element is shown by voltage table or monitor after the signal processing circuit processing and amplifying, also can be by passing through screen display behind the computer data acquisition.
In above-mentioned technical scheme, described signal processing circuit can be a constant-current source circuit, and its electric current output area is amp-1 ampere of 1 skin, can adjust according to actual needs;
In above-mentioned technical scheme, described signal processing circuit can be a constant-temperature circuit, and its function is by the electric current of adjusting heat-sensitive element it to be worked all remaining under the stationary temperature under the different in flow rate;
In above-mentioned technical scheme, described fine adjustment frame can be realized x direction, y direction, z direction and around the adjusting bracket of the motion of x axle, y axle, z axle six-freedom degree.
The invention has the advantages that:
The present invention utilizes monodimension nanometer material to realize the measurement of flow velocity as sensitive element (hot line 1), because monodimension nanometer material has advantages such as high surface volume ratio, high temperature coefficient of resistance, extra small size, high strength, so this kind hot-wire flow velocity transducer has high sensitivity, high response speed, life-span and advantage such as grows.
Monodimension nanometer material hot-wire flow velocity transducer provided by the invention reaches following the key technical indexes: heat-sensitive element can be made of single, array, a branch of or film like monodimension nanometer material.If adopt single or a branch of structure, diameter single or a branch of nano material is 1nm-1mm, length range: 1nm-1cm, and a branch of nano material can or be twisted into a strand shape by the parallel tight arrangement of single nano material and form; If adopt membrane structure, the then thickness range of film: 1nm-1mm; If adopt array format, then array is arranged in parallel by the nano material more than two or two and constitutes the spacing range in the array between the nano material: 1nm-1mm.
Signal processing circuit adopts constant temperature or constant-current circuit, and its electric current output area is amp-1 ampere of 1 skin, and can adjust according to actual needs; The fine adjustment frame is at x, y, and the bearing accuracy of z direction can reach 0.1 micron-100 microns, around the rotational positioning precision of x axle, y axle, z axle: 0.01 °-1 °.
The flow velocity measuring system that the monodimension nanometer material hot wire sensor that the present invention of utilization provided by the invention makes is formed can be realized the fluid-velocity survey of 0.001-50m/s.Characteristics such as this system has not only that size sensor is little, highly sensitive, response speed is fast, low in energy consumption, long-life, and monodimension nanometer material hot line (film) has higher intensity, can test higher flow velocity.This technology can be applicable to fields such as the test in flow velocity, flow, flow field and analysis.
Description of drawings
Fig. 1 is the structure principle chart of traditional hot-wire flow velocity transducer of providing of document [1]
Fig. 2 (a)-Fig. 2 (d) is the monodimension nanometer material hot-wire flow velocity transducer synoptic diagram that the present invention proposes
Fig. 3 is that the monodimension nanometer material hot-wire flow velocity sensor-based system that the present invention proposes is formed synoptic diagram
The drawing explanation:
1, tinsel (hot line) 2, supporter; 3, substrate;
4, single nanometer materials 5, monodimension nanometer material array; 6, a branch of monodimension nanometer material;
7, one-dimensional nano material film; 8, fine adjustment frame; 9, signal processing circuit;
10, computing machine;
Embodiment
In order to make purpose of the present invention, technical scheme and advantage clearer, further describe below in conjunction with drawings and Examples.
Embodiment 1
With reference to figure 2 (a), make based on the single nanometer materials hot-wire flow velocity transducer.
The single nanometer materials 4 that present embodiment adopts is carbon nano-tube or nano wire, the diameter of this carbon nano-tube or nano wire, for example be 1nm, 100nm, 500nm-1mm, length range: 1nm, 100nm, 1000nm-1cm all can as heat-sensitive element with this carbon nano-tube, nano wire.Substrate 3 adopts conventional insulating material to make; (the known conductive material of those skilled in the art) that supporter 2 is made by 2 conductive materials, the spacing of 2 supporters are 10 nanometers to 10 millimeter; The bottom of this supporter 2 is fixed in the substrate 3, and the top of 2 supporters 2 is single nanometer materials 4 fixedly, i.e. the tinsel 1 (hot line) that replaces in the prior art with single nanometer materials 4.With one or the fixing mode of monodimension nanometer materials such as a branch of carbon nano-tube, nano wire, be to adopt welding, method bonding or bonding to be fixed in the end of supporter, these all are that those skilled in the art is adequate.This sensor construction is mainly used in one dimension, two dimension or the three-dimensional measurement of gas flow rate, also can measure the liquid of insulation.
With reference to figure 2 (c), be manufactured with a branch of hot-wire flow velocity transducer of monodimension nanometer material.
Specifically form with embodiment 1, just heat-sensitive element adopts a branch of monodimension nanometer material 6, this a branch of monodimension nanometer material 6 is by 2,6 or 16 diameters are 1nm, 100nm, 500nm-1mm, the carbon nano-tube of length range: 1nm, 100nm, 1000nm-1cm or nano wire are formed a branch of, and with 2,6 or 16 carbon nano-tube or the parallel tight arrangement of nano wire form, or carbon nano-tube or nano wire be twisted into one and form; Be fixed on the top of 2 supporters 2 again, the other end of 2 supporters 2 is fixed in the substrate 3 of insulation.Make the conductive material of 2 supporters, the supporter made of metallic copper for example, spacing 100 nanometers of supporter.
With reference to figure 2 (b), make array monodimension nanometer material hot-wire flow velocity transducer.
Specifically form with embodiment 1, just heat-sensitive element adopts monodimension nanometer material array 5, this monodimension nanometer material array 5 is to be arranged in parallel by 4,6 or 8 carbon nano-tube, carbon nanocoils to constitute the spacing range in the array between carbon nano-tube, the carbon nanocoils: all can between the 1nm-1mm.In the substrate of insulation (the conventional plastic material that uses of those skilled in the art), make 2 supporters of making by conductive material 2,5 millimeters of the spacings of supporter.Adopt welding, method bonding or bonding to be fixed in the end of supporter carbon nano-tube, carbon nanocoils array.This sensor construction is mainly used in one dimension, two dimension or the three-dimensional measurement of gas flow rate, also can measure the liquid of insulation.
With reference to figure 2 (d), make diaphragm type monodimension nanometer material hot-wire flow velocity transducer.
Specifically form with embodiment 1, just heat-sensitive element adopts one-dimensional nano material film 7, and this one-dimensional nano material film 7 is films of being made thickness 1nm-1mm by 60 or 100 carbon nano-tube; In the substrate 3 of insulation, make 2 supporters of making by conductive material, spacing 10 nanometers of supporter 2 or 10 millimeters.Adopt welding, method bonding or bonding to be fixed in the end of supporter 2 carbon nano-tube, the nano wire film 7 of thickness 1nm-1mm.This sensing arrangement is mainly used in one dimension, two dimension or the three-dimensional measurement of gas flow rate, also can measure the liquid of insulation.
Embodiment 5
With reference to figure 1, with reference to figure 2 (a)-(d), make diaphragm type monodimension nanometer material hot-wire flow velocity transducer, its structure just has following difference with embodiment 1-4:
On the basis of embodiment 1,2,3 and 4,, make the insulation of supporter and nano material and measured medium at the surface of supporter and nano material parcel or coating insulation course.The material of insulation course can be that quartz, glass, alundum (Al, various pottery or epoxy resin etc. are all passable, and the thickness of its insulation course can all can between 10 dusts to 100 micron.This sensing arrangement not only can be used for the measurement of gas flow rate, also can be used for the measurement of flow rate of liquid.
With reference to figure 3, the monodimension nanometer material hot-wire flow velocity transducer of the present invention that utilizes embodiment 1,2,3,4 and 5 to be provided is made the flow sensor measures system, and concrete structure is as follows:
The flow sensor measures system of present embodiment can adopt embodiment 1,2,3,4 and 5 any monodimension nanometer material hot-wire flow velocity transducers of making; Any monodimension nanometer material hot-wire flow velocity transducer of Fig. 2 (a)-(d) is installed on the fine adjustment frame 8, and heat-sensitive element and signal processing circuit and voltage table or monitor are realized being electrically connected; By heat-sensitive element in the fine adjustment frame adjusting hot-wire flow velocity transducer and the angle between the rate of flow of fluid; Flow velocity causes that the variation of heat-sensitive element is shown by voltage table or monitor after signal processing circuit 9 processing and amplifying.Can also comprise a computing machine 10, by passing through screen display after computing machine 10 image data.
Wherein, described signal processing circuit can be a constant-current source circuit, and its electric current output area is amp-1 ampere of 1 skin, can adjust according to actual needs; Or constant-temperature circuit, its function is by the electric current of adjusting heat-sensitive element it to be worked all remaining under the stationary temperature under the different in flow rate;
Wherein, described fine adjustment frame can adopt the precision optics adjusting bracket that uses in the optical test or the mechanical adjustment frame 9 of other the motion that can realize six-freedom degree; Can realize x direction, y direction, z direction and can around the adjusting bracket of the motion of x axle, y axle, z axle six-freedom degree.
Should be noted that and understand, under the situation that does not break away from the desired the spirit and scope of the present invention of accompanying Claim, can make various modifications and improvement the present invention of foregoing detailed description.Therefore, the scope of claimed technical scheme is not subjected to the restriction of given any specific exemplary teachings.
Claims (10)
1. the hot-wire flow velocity transducer based on nano material comprises the substrate of heat-sensitive element, supporter and fixed support body, and wherein, described heat-sensitive element is arranged on the top of described supporter; It is characterized in that: described heat-sensitive element is single nano material, a branch of monodimension nanometer material, the array of being made up of 2 above nano materials or the film that is made of N root monodimension nanometer material.
2. by the hot-wire flow velocity transducer of the described nano material of claim 1, it is characterized in that described array is to be arranged in parallel by nano material to constitute the spacing range in the array between the nano material: 1nm-1mm.
3. by the hot-wire flow velocity transducer of the described nano material of claim 1, it is characterized in that described a branch of monodimension nanometer material is by the parallel tight arrangement of single nano material or be twisted into a strand shape and form.
4. by the hot-wire flow velocity transducer of the described nano material of claim 1, it is characterized in that, the described film like that constitutes by N root monodimension nanometer material, wherein, N is the radical of employed monodimension nanometer material, is as the criterion at 1nm-1mm to reach film thickness.
5. press the hot-wire flow velocity transducer of claim 1,2,3 or 4 described nano materials, it is characterized in that, described single nano material is carbon nano-tube or nano wire, and the diameter of described carbon nano-tube or nano wire is 1nm-1mm, length range: 1nm-1cm.
6. by the hot-wire flow velocity transducer of the described nano material of claim 1, it is characterized in that, also be included in the surface parcel or the coating insulation course of supporter and heat-sensitive element; The material of described insulation course is quartz, glass, alundum (Al, various pottery or epoxy resin, and the thickness of its insulation course is from 10 dusts to 100 micron.
7. a monodimension nanometer material hot-wire flow velocity sensing testing system comprises nano material hot-wire flow velocity transducer, signal processing circuit, fine adjustment frame, voltage table or monitor, power supply and cable; It is characterized in that the nano material hot-wire flow velocity transducer is installed on the fine adjustment frame, heat-sensitive element is electrically connected by cable and signal processing circuit and voltage table or monitor; By heat-sensitive element in the fine adjustment frame adjusting hot-wire flow velocity transducer and the angle between the rate of flow of fluid, flow velocity causes that the variation of heat-sensitive element is shown by voltage table or monitor after the signal processing circuit processing and amplifying;
The hot-wire flow velocity transducer of described nano material is the top that heat-sensitive element is arranged on supporter, and the other end of supporter is fixed in the substrate; Described heat-sensitive element is single nano material, a branch of monodimension nanometer material, the array of being made up of 2 above nano materials or the film that is made of N root monodimension nanometer material.
8. by the described monodimension nanometer material hot-wire flow velocity of claim 7 sensing testing system, it is characterized in that also comprise computing machine, described computing machine is electrically connected with signal processing circuit and monitor respectively, by passing through screen display behind the computer data acquisition.
9. by the described monodimension nanometer material hot-wire flow velocity of claim 7 sensing testing system, it is characterized in that described signal processing circuit is a constant-current source circuit, its electric current output area is amp-1 ampere of 1 skin; Or constant-temperature circuit.
10. by the described monodimension nanometer material hot-wire flow velocity of claim 7 sensing testing system, it is characterized in that described fine adjustment frame is a kind of realization x direction, y direction, z direction, and around the adjusting bracket of the motion of x axle, y axle, z axle six-freedom degree.
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