CN101764046A - Cavity door fixing device and sealing cavity structure with cavity door fixing device - Google Patents
Cavity door fixing device and sealing cavity structure with cavity door fixing device Download PDFInfo
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- CN101764046A CN101764046A CN200910215494A CN200910215494A CN101764046A CN 101764046 A CN101764046 A CN 101764046A CN 200910215494 A CN200910215494 A CN 200910215494A CN 200910215494 A CN200910215494 A CN 200910215494A CN 101764046 A CN101764046 A CN 101764046A
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- 238000007789 sealing Methods 0.000 title claims description 53
- 238000004519 manufacturing process Methods 0.000 claims abstract description 13
- 230000000295 complement effect Effects 0.000 claims description 5
- 238000000034 method Methods 0.000 description 6
- 230000005855 radiation Effects 0.000 description 4
- 230000005587 bubbling Effects 0.000 description 3
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 230000003749 cleanliness Effects 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000005240 physical vapour deposition Methods 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
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Abstract
The invention discloses a cavity door fixing device, which comprises a mounting seat, a pressure lever, a first rotating shaft, a handwheel and a holder, wherein the mounting seat comprises a base and two side blocks extending out of the base; the outer sides of the base corresponding to the two side blocks are respectively provided with a mounting hole; the two side blocks are respectively provided with a mounting seat shaft hole; one end of the pressure lever is clamped between the two side blocks; the pressure lever is provided with pressure lever shaft holes corresponding to the mounting seat shaft holes; the rotating shaft penetrates through the mounting seat shaft holes and the pressure lever shaft holes; the handwheel is arranged at the other end of the pressure lever; one end of the holder is fixed on a cavity door, and the other end thereof is provided with a neck; the holder is arranged between the side block and the handwheel and is fixedly clamped and connected with the pressure lever through the neck. The cavity door can be firmly compressed in a way that the pressure lever is pulled into the neck of the holder, and the handle is screwed tightly. The cavity door fixing device has the advantages of convenient use, easy manufacturing and mounting and high reliability.
Description
Technical field
The present invention relates to the cavity technical field of sealing technology, particularly a kind of cavity door fixing device and have the seal chamber structure of this cavity door fixing device.
Background technology
At present, make in the processing procedure in various vacuum, for example manufacturing process such as the chemical vapor deposition (CVD) of extensive use, physical vapor deposition (PVD), evaporation in semiconductor fabrication processes for a preferable process environments is provided, just need a kind of vacuum cavity equipment this time.
Based on some reason, need to change, transform, debug as the inside cavity parts, perhaps inside cavity needs cleaning, moreover, evaporation inside cavity deposition material replacing etc., operation for convenience can be to have chamber door and convenient vacuum cavity system of opening with the vacuum cavity system design when designing usually.Like this when design with regard to problems such as the fixing of sealing, chamber door and chamber wall that the providing of vacuum system, chamber door and chamber wall are provided, chamber door unlatchings.
Existing cavity door fixing device adopts the fixing fixed form of similar screw to be unfavorable for the convenient unlatching of chamber door, and is not suitable for disperseing to install, and long-term use can cause hinge deformation, influences the chamber vacuum effectiveness;
Therefore, be badly in need of a kind of annular seal space structure that is applicable to, open the cavity door fixing device of convenient and good sealing effect.
Summary of the invention
The purpose of this invention is to provide a kind of cavity door fixing device, be used for the chamber door that is articulated on the cavity is fixed, comprise mount pad, depression bar, first rotation axis, handwheel and deck, described mount pad comprises the base that is fixed on the described cavity and from extended two lateral mass of described base, the outside of the corresponding two described lateral mass of described base is respectively equipped with installing hole, two described lateral mass have the mount pad axis hole, described depression bar one end is held between the two described lateral mass, the corresponding described mount pad axis hole of described depression bar has the depression bar axis hole, described mount pad axis hole and depression bar axis hole are located along the same line, described rotation axis passes described mount pad axis hole and described depression bar axis hole, the other end of described depression bar passes described handwheel and meshes with described handwheel, one end of described deck is fixed on the door of described chamber, the other end of described deck protrudes out described chamber door and offers the draw-in groove that is complementary with described depression bar, enters in the described draw-in groove and rotates the realization of conflicting of described handwheel and described deck the chamber door is fixed on the cavity thereby rotate described depression bar.
Preferably, described handwheel protrudes out cushion block towards described lateral mass, and the notch both sides of described draw-in groove protrude out two relative projections, and two relative described projections form the district that holds that holds described cushion block.Hold the district and hold cushion block, make more firm being connected in the draw-in groove of depression bar.
Preferably, the end both sides relative with described lateral mass that described depression bar is provided with the depression bar axis hole have rises as high as the banks, described rise as high as the banks and described lateral mass between accompany pad, rise as high as the banks and pad cooperates, help more smooth between biside plate, the rotating of depression bar; The two ends of described rotation axis also are arranged with a circlip for shaft respectively, and described circlip is close to the lateral wall of described lateral mass, and this circlip plays certain fixation to rotation axis, make the more stable rotation of rotation axis.
The present invention also provides a kind of seal chamber structure, comprise cavity, the chamber door, hinge means and cavity door fixing device, one side of described cavity has a doorframe, described doorframe offers a window, described chamber door is located at corresponding described window place, one end and the described doorframe of described hinge means are fixed, the other end of described hinge means and described chamber door are fixed, described chamber door is closed or is opened described window by described articulated mounting, described cavity door fixing device comprises mount pad, depression bar, first rotation axis, handwheel and deck, described mount pad comprises the base that is fixed on the described cavity and from extended two lateral mass of described base, the outside of the corresponding two described lateral mass of described base is respectively equipped with installing hole, two described lateral mass have the mount pad axis hole, described depression bar one end is held between the two described lateral mass, the corresponding described mount pad axis hole of described depression bar has the depression bar axis hole, described mount pad axis hole and depression bar axis hole are located along the same line, described rotation axis passes described mount pad axis hole and described depression bar axis hole, the other end of described depression bar passes described handwheel and meshes with described handwheel, one end of described deck is fixed on the door of described chamber, the other end of described deck protrudes out described chamber door and offers the draw-in groove that is complementary with described depression bar, enters in the described draw-in groove and rotates the realization of conflicting of described handwheel and described deck the chamber door is fixed on the cavity thereby rotate described depression bar.
Preferably, inboard over against the described chamber door of described doorframe offers inner ring groove, centre circle groove and the outer ring groove that is parallel to each other from the inside to the outside successively, described inner ring groove content is provided with the inner ring sealing ring and described inner ring sealing ring protrudes described inner ring groove, described outer ring groove content is provided with the outer ring sealing ring and described outer ring sealing ring protrudes described outer ring groove, the apolegamy mode of inner ring sealing ring and outer ring sealing ring double-layer seal circle is various, can adapt to various vacuum process environment; Described doorframe offers air vent hole, and an end of described air vent hole is communicated with towards the external world and with the tracheae that stretches into the external world, and the other end of described air vent hole and described centre circle groove are docked and connected when closing described chamber door.When opening the chamber door,, make the atmospheric pressure that is full of air and then counter balance pocket external body in the centre circle groove from the breather pipe bubbling air, make the chamber door can smooth opening, need not to throw air into, avoided dusty gas to introduce in the cavity toward cavity, cause the cavity cleanliness factor to reduce, influence the cavity operate as normal.
Preferably, described inner ring groove and described outer ring groove all are the dovetail structure, are respectively applied for inner ring sealing medium and outer ring sealing medium are installed; Described centre circle groove is square, as air channel.
Preferably, the inboard of described chamber door also is provided with at least one fabrication hole, and described fabrication hole runs through described inner ring groove, centre circle groove and described outer ring groove.When described inner ring sealing ring, when the outer ring sealing ring need be changed, inner ring sealing ring and outer ring sealing ring are blown afloat thereby can utilize air gun to blow or utilize sharp instruments to pass fabrication hole 26 to fabrication hole.
Preferably, the inboard of described chamber door also offers the 4th groove, described the 4th groove is located at the outside of described outer ring groove and parallel with described outer ring groove, and described the 4th groove content is provided with twines the 4th sealing ring wiry, and described the 4th sealing ring protrudes described the 4th groove.When described inside cavity has radiation source, twine the leakage that the 4th sealing ring wiry can prevent radiation source.
Preferably, described hinge means comprises hinge seat, hinge axis, hinge and hinge pad, described hinge seat comprises the hinge base of fixedlying connected with described cavity and from the extended two hinge lateral mass of described hinge base, the upper end of described hinge lateral mass offers waist through hole, the described hinge of stating comprises the outer connecting portion and the hinge connecting portion of fixedlying connected with the chamber door, described outer connecting portion is fixedlyed connected with described hinge connecting portion, described hinge connecting portion is provided with through hole, described hinge connecting portion is located between the two described hinge lateral mass, described hinge axis passes described through hole regularly and two ends are located in the described waist through hole slidably, described hinge pad is sheathed on the described hinge axis, and is sandwiched between described hinge connecting portion and the described hinge side plate.
Preferably, described hinge axis is connected with described waist through hole matched in clearance, and satisfy with formula the maximal clearance of described hinge axis and described waist through hole:
Wherein, C is the maximal clearance, and D is the external diameter of described inner ring sealing ring or outer ring sealing ring.So just can guarantee after closing described chamber door and screwing described cavity door fixing device, when vacuumizing on the sealing ring each point to bear the compressing amount that external pressure brings basic identical, guarantee that sealing effectiveness is good.
Preferably, also be provided with checkout gear between described doorframe and the described chamber door.Be used for the test chamber door and whether be in the optimal seal position.
Compared with prior art, a kind of cavity door fixing device of the present invention is used for fixing the chamber door, only needs depression bar is pulled in the draw-in groove of deck, screws handwheel then, just can be firm the compressing of chamber door.Easy to use, be easy to make and install, and the reliability height.
By following description also in conjunction with the accompanying drawings, it is more clear that the present invention will become, and these accompanying drawings are used to explain embodiments of the invention.
Description of drawings
Fig. 1 is the structure chart of seal chamber structure of the present invention.
Fig. 2 is the part exploded view of seal chamber structure of the present invention.
Fig. 3 is the exploded view of cavity fixture of the present invention.
Fig. 4 a is the partial sectional view of seal chamber structure of the present invention.
Fig. 4 b is the enlarged drawing of A part among Fig. 4 a.
Fig. 5 a is the structure chart of the inboard of the chamber door of seal chamber structure of the present invention.
Fig. 5 b is the enlarged drawing of B part among Fig. 5 a.
Fig. 6 is the structure chart of the hinge means of seal chamber structure of the present invention.
Embodiment
As shown in Figure 1, the present invention also provides a kind of seal chamber structure 100, comprise cavity 10, chamber door 20, hinge means 30, cavity door fixing device 40 and checkout gear 50, cavity 10 has a doorframe 11, and doorframe 11 offers a window 111, and chamber door 20 is located at corresponding window 111 places, hinge means 30 1 ends are fixed in a side of doorframe 11, the other end is fixed in chamber door 20 corresponding sides, and cavity door fixing device 40 is fixed in the opposite side of doorframe 11, is used to be fixed chamber door 20.Whether checkout gear 50 is located between doorframe 11 and the chamber door 20, be used for test chamber door 20 and close and put in place.
In conjunction with Fig. 3, cavity door fixing device 40 comprises mount pad 41, depression bar 42, rotation axis 43, handwheel 44, deck 45, pad 46, circlip 47 and cushion block 48.Mount pad 41 comprises base 411 and from extended two lateral mass 412 of base, the outside of base 411 corresponding two lateral mass 412 is respectively equipped with installing hole 413, two lateral mass 412 and has mount pad axis hole (figure does not show).Depression bar 42 is column type, the one end passes handwheel 44 and meshes with handwheel 44, the other end of depression bar 42 is a bare terminal end 421, bare terminal end 421 is held between two lateral mass 412, bare terminal end 421 and lateral mass 412 relative both sides have rises as high as the banks 422, two rise as high as the banks has a depression bar axis hole (figure do not show) between 422, pad 46 be sandwiched in rise as high as the banks 422 and lateral mass 412 between, thereby rotation axis 43 passes mount pad axis hole, depression bar axis hole and pad 46 depression bar 42 is connected on the mount pad 41 freely to rotate.Circlip 47 is sheathed on the two ends of rotation axis 43, and is close to the lateral wall of lateral mass 412.Deck 45 1 ends protrude out chamber door 20 and are provided with the draw-in groove 451 that is semicircle, are complementary with depression bar 42, and the other end has deck installing hole 452, and deck 45 is connected with chamber door 20 screw by clamping installing hole 452.Deck 45 is located between lateral mass 412 and the handwheel 44, and by draw-in groove 451 and fixedly clamping of depression bar 42.Depression bar 42 has protruded out cushion block 48 towards lateral mass 412.The notch both sides of draw-in groove 451 protrude out two relative projections, 453, two relative projections 453 form hold cushion block 48 hold district 454.Thereby hold district 454 and fix cushion block 48 depression bar 42 more firm being connected in the draw-in groove 451.Chamber door 20 is arranged between deck 45 and the mount pad 41.
In conjunction with Fig. 1-2, Fig. 4 a-4b, the outside of chamber door 20 is provided with handle 27.The inboard of chamber door 20 is provided with sealing ring, and sealing ring comprises inner seal ring 211 and exterior seal ring 212.The inboard of chamber door 20 also is provided with inner ring groove 22, at the outer ring groove 23 and the centre circle groove 24 between inner ring groove 22 and outer ring groove 23 in inner ring groove 22 outsides, inner seal ring 211 and exterior seal ring 212 correspondence respectively are located in inner ring groove 22 and the outer ring groove 23.Inner ring sealing ring 211 is various with the apolegamy mode of outer ring sealing ring 212 double-layer seal circles, can adapt to various vacuum process environment.Inner ring groove 22 and outer ring groove 23 are dovetail groove, and sealing ring is installed in the dovetail groove more firm, better tightness; Centre circle groove 24 is a square groove, and this centre circle groove 24 serves as the passage that feeds gas from the external world.When chamber 113 internal temperatures during less than 250 ℃ and non-corrosiveness reacting gas, inner ring sealing ring 211 and outer ring sealing ring 212 are selected O shape rubber seal for use; Higher when cavity 10 internal temperatures, when surpassing 250 ℃, inner ring sealing ring 211 selects for use metal o-ring, outer ring sealing ring 212 to select O shape rubber seal for use; When having the corrosivity reacting gas in the cavity 10, inner ring sealing ring 211 selects for use metal o-ring, outer ring sealing ring 212 to select O shape rubber for use.One side of doorframe 11 also is provided with the breather pipe 112 that is connected with centre circle groove 24.When opening chamber door 20, from breather pipe 112 bubbling airs, make and be full of air and then balance cavity 10 atmosphere outside pressure in the centre circle groove 24, make the chamber door 20 can smooth opening, need not to throw air into toward cavity 10, avoid dusty gas to introduce in the cavity 10, caused cavity 10 cleanliness factors to reduce, influenced cavity 10 operate as normal.
The preferably, shown in Fig. 5 a-5b, the inboard of chamber door 20 also is provided with the 4th groove 25, the 4th groove 25 is located at the outside of outer ring groove 23 and parallel with outer ring groove 23, the 4th groove 25 contents are provided with the 4th sealing ring (figure does not show), in the present embodiment, the 4th sealing ring also is an O shape rubber seal, is wound with wire 214 on the 4th sealing ring.When inside cavity has radiation source, twine the leakage that wire can prevent radiation source on the 4th sealing ring.
The preferably, the inboard of chamber door 20 also is provided with at least one fabrication hole 26, and fabrication hole 26 runs through inner ring groove 22, centre circle groove 24 and outer ring groove 23.When inner ring sealing ring 211, outer ring sealing ring 212 needs to change, can utilize air gun to blow or utilize sharp instruments to fabrication hole 26, as screwdriver, inner ring sealing ring 211 and outer ring sealing ring 212 are blown afloat thereby pass fabrication hole 26.
In conjunction with Fig. 6, hinge means 30 comprises hinge seat 31, hinge axis 32, hinge 33 and hinge pad 34, hinge seat 31 comprises the hinge base 311 of fixedlying connected with cavity 10 and from hinge base 311 extended two hinge lateral mass 312, hinge lateral mass 312 is one-body molded with hinge base 311.The upper end of hinge lateral mass 312 offers waist through hole 313, hinge 33 comprises the outer connecting portion 331 and the hinge connecting portion 332 of fixedlying connected with chamber door 20, outer connecting portion 331 is one-body molded with hinge connecting portion 332, hinge connecting portion 332 is provided with through hole 333, hinge connecting portion 332 is located between the two hinge lateral mass 312, and be sheathed on the middle part of hinge axis 32 regularly by through hole 333, hinge pad 34 is sheathed on the hinge axis 32, and be sandwiched between hinge connecting portion 332 and the hinge side plate 312, the two ends of hinge axis 32 are located in the waist through hole 313 slidably, also can be free to slide in waist through hole 313 when hinge axis 32 freely rotates.The two ends of hinge base 311 are respectively equipped with first installing hole 314, and hinge means 30 is fixed in a side of doorframe 11 by first installing hole 314.The two ends of outer connecting portion 331 are respectively equipped with second installing hole 334, and hinge means 30 is fixed in a side of chamber door 20 by second installing hole 334.
Preferably, the two ends of hinge axis 32 are connected with waist through hole 313 matched in clearance, and hinge axis 32 is calculated as follows by C with the maximal clearance of waist through hole 313:
Wherein, C is the maximal clearance, and D is the external diameter of sealing ring.So just can guarantee after closing chamber door 20 and screwing cavity door fixing device 40, when vacuumizing on the sealing ring each point to bear the compressing amount that external pressure brings basic identical, guarantee that sealing effectiveness is good.
When using seal chamber structure 100 of the present invention, manual-lock chamber door 20, the depression bar 42 of cavity door fixing device 40 is pulled in the draw-in groove 451 of deck 45, manually screw handwheel 44 and show that up to checkout gear 50 chamber door 20 has arrived default optimal seal position, make door 20 pressurizeds in chamber superimposed on doorframe 11, thus tight window 111 envelopes, utilize vacuum extractor that the air in the cavity 10 is extracted out then, at this moment, cavity 10 forms vacuum environment, can carry out each processing procedure work.When needs were opened chamber door 20, the handwheel 44 of at first outwarding winding was pulled draw-in groove 451 from deck 45 with depression bar 42, then from breather pipe 112 bubbling airs, makes to be full of air and then balance cavity 10 atmosphere outside pressure in the centre circle groove 24, made the chamber door 10 can smooth opening.
Above invention has been described in conjunction with most preferred embodiment, but the present invention is not limited to the embodiment of above announcement, and should contain various modification, equivalent combinations of carrying out according to the essence of present embodiment.
Claims (11)
1. cavity door fixing device, be used for the chamber door that is articulated on the cavity is fixed, it is characterized in that: comprise mount pad, depression bar, first rotation axis, handwheel and deck, described mount pad comprises the base that is fixed on the described cavity and from extended two lateral mass of described base, the outside of the corresponding two described lateral mass of described base is respectively equipped with installing hole, two described lateral mass have the mount pad axis hole, described depression bar one end is held between the two described lateral mass, the corresponding described mount pad axis hole of described depression bar has the depression bar axis hole, described mount pad axis hole and depression bar axis hole are located along the same line, described rotation axis passes described mount pad axis hole and described depression bar axis hole, the other end of described depression bar passes described handwheel and meshes with described handwheel, one end of described deck is fixed on the door of described chamber, the other end of described deck protrudes out described chamber door and offers the draw-in groove that is complementary with described depression bar, enters in the described draw-in groove and rotates the realization of conflicting of described handwheel and described deck the chamber door is fixed on the cavity thereby rotate described depression bar.
2. cavity door fixing device as claimed in claim 1 is characterized in that: described handwheel protrudes out cushion block towards described lateral mass, and the notch both sides of described draw-in groove protrude out two relative projections, and two relative described projections form the district that holds that holds described cushion block.
3. cavity door fixing device as claimed in claim 1, it is characterized in that: the end both sides relative with described lateral mass that described depression bar is provided with the depression bar axis hole have rises as high as the banks, described rise as high as the banks and described lateral mass between accompany pad, the two ends of described rotation axis also are arranged with a circlip for shaft respectively, and described circlip is close to the lateral wall of described lateral mass.
4. seal chamber structure, comprise cavity, the chamber door, hinge means and cavity door fixing device, one side of described cavity has a doorframe, described doorframe offers a window, described chamber door is located at corresponding described window place, one end and the described doorframe of described hinge means are fixed, the other end of described hinge means and described chamber door are fixed, described chamber door is closed or is opened described window by described articulated mounting, it is characterized in that: described cavity door fixing device comprises mount pad, depression bar, first rotation axis, handwheel and deck, described mount pad comprises the base that is fixed on the described cavity and from extended two lateral mass of described base, the outside of the corresponding two described lateral mass of described base is respectively equipped with installing hole, two described lateral mass have the mount pad axis hole, described depression bar one end is held between the two described lateral mass, the corresponding described mount pad axis hole of described depression bar has the depression bar axis hole, described mount pad axis hole and depression bar axis hole are located along the same line, described rotation axis passes described mount pad axis hole and described depression bar axis hole, the other end of described depression bar passes described handwheel and meshes with described handwheel, one end of described deck is fixed on the door of described chamber, the other end of described deck protrudes out described chamber door and offers the draw-in groove that is complementary with described depression bar, enters in the described draw-in groove and rotates the realization of conflicting of described handwheel and described deck the chamber door is fixed on the cavity thereby rotate described depression bar.
5. seal chamber structure as claimed in claim 4, it is characterized in that: the inboard over against the described chamber door of described doorframe offers the inner ring groove that is parallel to each other from the inside to the outside successively, centre circle groove and outer ring groove, described inner ring groove content is provided with the inner ring sealing ring and described inner ring sealing ring protrudes described inner ring groove, described outer ring groove content is provided with the outer ring sealing ring and described outer ring sealing ring protrudes described outer ring groove, described doorframe offers air vent hole, one end of described air vent hole is communicated with towards the external world and with the tracheae that stretches into the external world, and the other end of described air vent hole and described centre circle groove are docked and connected when closing described chamber door.
6. seal chamber structure as claimed in claim 5 is characterized in that: described inner ring groove and described outer ring groove all are the dovetail structure, and described centre circle groove is square.
7. seal chamber structure as claimed in claim 5 is characterized in that: the inboard of described chamber door also is provided with at least one fabrication hole, and described fabrication hole runs through described inner ring groove, centre circle groove and described outer ring groove.
8. seal chamber structure as claimed in claim 5, it is characterized in that: the inboard of described chamber door also offers the 4th groove, described the 4th groove is located at the outside of described outer ring groove and parallel with described outer ring groove, described the 4th groove content is provided with twines the 4th sealing ring wiry, and described the 4th sealing ring protrudes described the 4th groove.
9. seal chamber structure as claimed in claim 5, it is characterized in that: described hinge means comprises hinge seat, hinge axis, hinge and hinge pad, described hinge seat comprises the hinge base of fixedlying connected with described cavity and from the extended two hinge lateral mass of described hinge base, the upper end of described hinge lateral mass offers waist through hole, the described hinge of stating comprises the outer connecting portion and the hinge connecting portion of fixedlying connected with the chamber door, described outer connecting portion is fixedlyed connected with described hinge connecting portion, described hinge connecting portion is provided with through hole, described hinge connecting portion is located between the two described hinge lateral mass, described hinge axis passes described through hole regularly and two ends are located in the described waist through hole slidably, described hinge pad is sheathed on the described hinge axis, and is sandwiched between described hinge connecting portion and the described hinge side plate.
10. seal chamber structure as claimed in claim 9 is characterized in that: described hinge axis is connected with described waist through hole matched in clearance, and satisfy with formula the maximal clearance of described hinge axis and described waist through hole:
Wherein, C is the maximal clearance, and D is the external diameter of described inner ring sealing ring or outer ring sealing ring.
11. seal chamber structure as claimed in claim 4 is characterized in that: also be provided with checkout gear between described doorframe and the described chamber door.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009102154944A CN101764046B (en) | 2009-12-30 | 2009-12-30 | Cavity door fixing device and sealing cavity structure with cavity door fixing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009102154944A CN101764046B (en) | 2009-12-30 | 2009-12-30 | Cavity door fixing device and sealing cavity structure with cavity door fixing device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101764046A true CN101764046A (en) | 2010-06-30 |
| CN101764046B CN101764046B (en) | 2011-11-09 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2009102154944A Expired - Fee Related CN101764046B (en) | 2009-12-30 | 2009-12-30 | Cavity door fixing device and sealing cavity structure with cavity door fixing device |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108966621A (en) * | 2018-07-20 | 2018-12-07 | 上海空间电源研究所 | Electromagnetic shielding case with shock-absorbing function |
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2009
- 2009-12-30 CN CN2009102154944A patent/CN101764046B/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108966621A (en) * | 2018-07-20 | 2018-12-07 | 上海空间电源研究所 | Electromagnetic shielding case with shock-absorbing function |
| CN108966621B (en) * | 2018-07-20 | 2020-01-31 | 上海空间电源研究所 | Electromagnetic shielding case with shock-absorbing function |
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| Publication number | Publication date |
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| CN101764046B (en) | 2011-11-09 |
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