CN101751013B - Auxiliary distribution system and auxiliary distribution method for semiconductor manufacturing production - Google Patents

Auxiliary distribution system and auxiliary distribution method for semiconductor manufacturing production Download PDF

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CN101751013B
CN101751013B CN2008101792591A CN200810179259A CN101751013B CN 101751013 B CN101751013 B CN 101751013B CN 2008101792591 A CN2008101792591 A CN 2008101792591A CN 200810179259 A CN200810179259 A CN 200810179259A CN 101751013 B CN101751013 B CN 101751013B
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product
factory
envelope
survey
auxiliary distribution
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CN101751013A (en
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顾荣华
罗钧
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Warship chip manufacturing (Suzhou) Limited by Share Ltd
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Hejian Technology Suzhou Co Ltd
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    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/02Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

Abstract

The invention discloses an auxiliary distribution system and an auxiliary distribution method. The auxiliary distribution system comprises the following parts: a memory module, a processing module, an input/output module and a terminal, wherein the memory module is used to store information for product production; the processing module is used to receive the required product information from the memory module, to calculate steps of the product in the next days, to distribute the product and to give notice; the input/output module is used to input the command of the terminal to the auxiliary distribution system and to issue the commands or information to the terminal; and the terminal is used by the user to receive the information output by the auxiliary distribution system and to input the required information. By adopting the novel auxiliary distribution system and the auxiliary distribution method for the semiconductor manufacturing production, the invention has the advantages that the workload of the relevant engineers is greatly reduced, the accuracy of the estimated capacity is improved, and the present and future product production statuses at each process step are known more actually; and the capacity utilization ratio is promoted to be maximized by the automatic distribution and conformation of the product.

Description

Auxiliary distribution system that a kind of semiconductor manufacturing is produced and auxiliary distribution method
Technical field
The present invention relates to the technical field of semiconductor manufacturing and production, auxiliary distribution system that particularly a kind of semiconductor manufacturing is produced and auxiliary distribution method.
Background technology
In present semiconductor manufacturing and production industry, in order to enhance productivity and product quality, many manufacturing enterprises have realized operating from traditional hand the conversion of semi-automatic even full automatic operating type.In field of semiconductor manufacture, produce the full-automatic necessary condition that each enterprise promotes competitive power that become.Because the inventionthe semiconductor industry design is made, encapsulation, test waits the further propelling of the division of labor, and the cooperation between the industry becomes more and more important.And how to make semiconductor respectively divide the work cooperation and each processing step of unit; For example the linking of the manufacturing of wafer (Manufacture) step, projection (BUMP) processing procedure, pin survey (CP) process, grinding (BL) process, encapsulation (ASSY) process and final test (FT) process becomes simple; Efficiently; Accurately, become the direction of each enterprise of industry effort all the time.
Traditional production capacity is estimated and product dispensation adopts manual work mode fully, and the slip-stick artist of leading portion wafer factory can be according to the present in-plant production status of product; The intended flow of each product, each seals the envelope survey situation of each product of surveying factory, the production capacity situation of each envelope survey factory itself at back segment at present; And their service quality all the time; Hobby of client or the like is gone to estimate the production capacity situation of each processing step, and corresponding product is distributed to envelope survey factory.Simultaneously, the slip-stick artist that envelope is surveyed factory can confirm whether accept to it, and this process is accomplished through both sides' mail fully, and possibly be an action repeatedly.And the product of wafer factory is very many; Both sides' slip-stick artist need do above-mentioned action to each product; This is loaded down with trivial details process still, the people of usually taking place be estimate and distribute inaccurate, make product processing to carry out smoothly; Cause the low of the rate of capacity utilization, even client's product is handed over the delay of phase.
Summary of the invention
Operations such as for overcoming the above problems, a kind of automatic production capacity of needs is estimated and product distributing system, and it is outer to estimate, distribute, confirm, entrust with realizing robotization, so that whole manufacturing process becomes efficiently, smoothness obtains greatest benefit.
In view of above-mentioned, the invention provides a kind of auxiliary distribution system, comprise with the lower part:
Memory module is used for the information of production in order to storage;
Processing module, in order to receiving required product information from storage part, the step of counting yield in following a couple of days, allocated product with give notice;
Input/output module, the instruction that is used for entry terminal be to auxiliary distribution system, and issuing command or message are to the terminal;
The terminal, the user receives the information and input information needed of auxiliary distribution system output through the terminal.
Wherein, above-mentioned processing module is divided into 5 modules at least: the Time Calculation module, process is estimated module, product dispensation module, the notification module and the outer module of entrusting automatically.The Time Calculation module is used for the time that counting yield also need be processed; Process is estimated module and is used to estimate the information that need do all products of each processing step in follow-up a period of time; The product dispensation module is used for surveying factory for different envelopes product dispensation according to various parameters; Notification module is used to notify the information of terminal user about product; The outer module of automatic committee can produce the worker Dan Yirang of committee automatically after envelope is surveyed factory's affirmation it begins to process.
The auxiliary distribution method that the present invention also provides a kind of semiconductor manufacturing to produce may further comprise the steps,
Step 1 provides the backup system of the production shown in claim 1-2;
Step 2, extraction has the product information of the product of required characteristic from storage part;
Step 3 is according to the time of the entering back-end process of the said goods information calculations product;
Step 4 is carried out suitable distribution with product.
Wherein, in the above-mentioned steps 2, the product of required characteristic is accomplished or product just aborning for producing.
Wherein, in the above-mentioned steps 2, product information comprises the remaining operation number of product, the time that product begins to produce.
Wherein, in the above-mentioned steps 3, the time method of the entering back-end process of counting yield does
Time+product that product begins to produce operation number * required time of per pass operation altogether.
Wherein, in the above-mentioned steps 4, above-mentioned distribution is an information of from database, transferring this product; Whether to envelope survey mechanism have qualification, if then give the envelope survey that limits mechanism with this product dispensation if inquiring about the affiliated client of this product; If not; Then inquire about optional envelope and survey mechanism, select the highest envelope of performance inventory to survey mechanism, then distribute to quantity and the model that this envelope is surveyed the product of mechanism according to the board quantity and the output decision of this envelope survey mechanism.
Wherein, the operation in the above-mentioned back-end process comprises BUMP, CP, BL, ASSY and FT at least.
Wherein, The record that envelope is surveyed the performance of mechanism comprises that treating in the stipulated time seal the number percent of waiting to seal the shipment number of surveying product of total lot number of surveying product and this stipulated time, and treating in the stipulated time sealed the shipment number of surveying product and the number percent of the shipment number of affirmation in advance of this stipulated time.
Wherein, after the step 4, also comprise allocation result is sent to the step of storing in the database.
The present invention has replaced artificial operating type originally; Use auxiliary distribution system that new semiconductor manufacturing produces and the auxiliary distribution method can the very big load that must alleviate correlation engineering teacher; And improved the accuracy that production capacity is estimated, make product can be grasped more really at the current of each processing step and following production status; The automatic distribution and the affirmation of product have promoted the maximization of the rate of capacity utilization, and make cooperation between enterprises become efficient and simple; Automatically the outer function of committee then makes the linking of each processing step become more rapid, has guaranteed in time carrying out of production and reaching smoothly of client's product friendship phase.This invention has maximized the effectiveness of the division of labor and the cooperation of inventionthe semiconductor industry, has brought very big benefit for each enterprise, is the fabulous example that the IT technology combines with manufacturing technology.
Below in conjunction with accompanying drawing, specific embodiments of the invention is described in further detail.For the person of ordinary skill in the field, from detailed description of the invention, above-mentioned and other purposes of the present invention, feature and advantage will be obvious.
Description of drawings
Fig. 1 is the synoptic diagram of the auxiliary distribution system of the present invention's one preferred embodiment.
Fig. 2 is the synoptic diagram of the auxiliary distribution method of the present invention's one preferred embodiment.
Embodiment
The auxiliary distribution system and the method for a kind of semiconductor manufacturing of the present invention being produced below in conjunction with accompanying drawing and specific embodiment are described in further detail.
At first, the invention provides the auxiliary distribution system AMAS that a kind of semiconductor manufacturing is produced, be used for carrying out automatic production capacity and estimate and product dispensation according to existing allocation model and correlation properties, as shown in Figure 1, comprise with the lower part:
Memory module is used for the information of production in order to storage, comprises the production phase of product, for example produces; Produce to accomplish or product to be produced, comprise also wherein which production phase product specifically is in, Manufacture for example, BUMP; CP, BL, ASSY, FT etc.
Processing module; In order to receive required product information from storage part, the step of counting yield in following a couple of days, allocated product; Comprise again specifically that wherein Time Calculation module, process estimate module and notification module; Time module is used to calculate the information such as time that this product also need be produced, and process is estimated module and estimated the required residue manufacturing step of product according to the manufacturing step that product has carried out, and notification module is used to notify the various information of the user at terminal about product.
Input/output module; The instruction that is used to import the user is to auxiliary distribution system; The user that notification module notice is used the terminal is about the situation of the information of product to be produced and the product produced, and the user is input to input/output module through the terminal with the assignment information of product etc.
The assignment information that terminal, the user receives auxiliary distribution system output through the terminal information and input are judged by the user etc., confirmation etc.
System can find all to produce the product of accomplishing and producing from AMAS automatically; Choose and to do wherein that back segment envelope surveys; Flow process according to them estimates the time that it gets into back segment, simultaneously, and for doing the product that the back segment envelope is surveyed; According to its current production status and its follow-up flow process, need do the information of the product of each processing step after estimating every day in envelope survey factory.The relevant board of each processing step current and following estimated in the scope of business of surveying factory according to each envelope again and its factory utilizes situation; And combine each envelope survey factory service performance all the time to survey the different fancy grade of factory for these envelopes with different clients, finally automatically each product dispensation is surveyed factory to each envelope.System provides the network platform to let each factory engineering teacher make final affirmation and sign-off again; After having confirmed, system will follow the trail of the machining status of these products automatically through BMES, confirm good associated process steps in case enter into; Then produce the worker of committee list automatically and get goods and follow-up processing to notify envelope to survey the related personnel of factory; And the quality of crudy and processing result can be estimated and the parameter condition of product dispensation as automatic production capacity again, the operation after the influence.
The auxiliary distribution method that the present invention also provides a kind of semiconductor manufacturing to produce promptly according to the method for the information distribution product of the product in a certain production stage or some production stage, may further comprise the steps,
Step 1, processing module are found out the product information of having produced completion or product just aborning from memory module, wherein extract the information with required characteristic;
Step 2; Time Calculation module in the processing module and process are estimated the time of module according to the entering back-end process of the said goods information calculations product; Just according to the flow process of production and the present residing step of product, required time of each step, the estimation product gets into the excess time of back-end process;
Step 3; Processing module is carried out suitable distribution according to information with product; Information comprises product; The scope of business, the envelope that production status, flow, the envelope that to be wafer survey factory in envelope surveyed factory surveyed the relevant board of each processing step in the factory current and following estimate utilize situation, envelope to survey information such as factory's service performance, client's hobby product is distributed to each envelope survey factory automatically, notification module is notified desired terminal through input/output module with distribution result;
Step 4, the Production Engineer confirms and work such as information input and output through terminal and network.
Existing is that base description should auxiliary distribution method with a plurality of instances.
Instance 1: the product manufacturing step is estimated flow process
At first; The processing module of auxiliary distribution system is at first sought product information from the database of memory module; Comprise producing and accomplish or the product information of product just aborning, the number of steps information LayerNum of the operation (Layer) that need do altogether of storage also in the database, and this product time StartTime of beginning to produce; The average production time CycleTimeLayer of per pass operation estimates and obtains this product and get into the back-end process time and do from beginning to produce
StartTime+LayerNum*CycleTimeLayer。
Step 2; Computing module is according to the time of the entering back-end process of above information calculations product; Just according to the flow process of production and the present residing step of product, required time of each step, the estimation product gets into the excess time of each step in the back-end process.Be specially; For the technology in a plurality of back-end process of back segment product, each outsourcing factory all can be each road manufacturing step, surveys (CP) process, grinding (BL) process, encapsulation (ASSY) process and final test (FT) process like manufacturing (Manufacture) step, projection (BUMP) processing procedure, the pin of aforesaid wafer; Give a CycleTimeStage; Be that operation in each back-end process is wanted the time spent, this value normally can not become, for example CycleTimeCP, CycleTimeASSY etc.; The database of auxiliary simultaneously distribution system have each product after getting into back segment the last part technology that will do and in proper order.The entering back segment time of calculating above adding, can calculate the time that each product got into and finished each last part technology.
For example a product entering back segment time is InBackendTime; Last part technology of doing and order thereof are CP, ASSY, FT; The time that then gets into CP is InBackendTime; The time that gets into ASSY is InBackendTime+CycleTimeCP, and the time that gets into FT is InBackendTime+CycleTimeCP+CycleTimeASSY.
Instance 2: product dispensation and affirmation flow process
Computing module is according to its current production status and its follow-up flow process in envelope survey factory, the information of the product of each processing step that need do every day after estimating.The relevant board of each processing step current and following estimated in the scope of business of surveying factory according to each envelope again and its factory utilizes situation; And combine each envelope survey factory service performance all the time to survey the different fancy grade of factory for these envelopes with different clients, finally automatically with each product dispensation.
Auxiliary distribution system is an information of from database, transferring this product distributing above-mentioned distribution; And the relevant board of each processing step current and following estimated in the envelope scope of business of surveying factory and its factory utilizes situation; Inquire about the affiliated client of this product and whether there is qualification in envelope survey mechanism; If, then survey mechanism for the envelope that limits this product dispensation, if not; Then inquire about optional envelope and survey mechanism; Judge the performance before of each outsourcing factory, select the highest envelope of performance inventory to survey mechanism, the record that envelope is surveyed the performance of mechanism comprises that sealing measurement information according to history produces CVP Report and C/T Report; Be that treating in the stipulated time sealed total lot number of survey product and the number percent of waiting to seal the shipment number of surveying product of this stipulated time, treating in the stipulated time sealed the shipment number of survey product and the number percent of the shipment number of confirming in advance of this stipulated time.Production capacity information such as the board quantity of then surveying mechanism according to this envelope and output obtain the free time amount that this envelope is surveyed each processing step that mechanism can provide, and distribute to quantity, model and the processing batch etc. of the product of this envelope survey mechanism with decision.
C/T=reaches total shipment lot number of total lot number/this week * 100% of certain product in the processing time of standard in one week
Output aggregate shipment amount * 100% of the some outsourcings of the product turnout amount of CVP=particular type of some outsourcings factory in one week/in week factory.
At last, auxiliary distribution system is given notice to the terminal through network, and each factory engineering teacher makes final affirmation and sign-off.
Particularly, can may further comprise the steps:
Step 1, quantity, process of living in, the process that will carry out and the entry date of from memory module, confirming product, the client of this product; Search the envelope that to accomplish this process and survey factory, confirm that each envelope survey factory that can accomplish this process surveys the service mark of factory in the free time of entry date amount and envelope;
Step 2, the service mark of surveying factory based on envelope are judged product dispensation are surveyed the A of factory to the higher envelope of service mark; Then survey the free time amount allocated product of the A of factory based on the higher envelope of this service mark; If envelope is surveyed the quantity of the free time amount of the A of factory less than product; Then the product dispensation that will equate with the free time amount of the envelope survey A of factory surveys the A of factory for envelope, entering step 3; If envelope is surveyed the quantity of the free time amount of the A of factory more than or equal to product, then product is all distributed to envelope and surveyed the A of factory, finish this process;
Step 3, then inquiry service mark all the other envelopes of being lower than A are surveyed factories again; Find and wherein serve the highest envelope survey B of factory of mark; Then survey the remaining product of free time amount distribution of the B of factory based on envelope; Survey the quantity of the free time amount of the B of factory less than remaining product if be somebody's turn to do envelope, then the product dispensation that will equate with the free time amount of the envelope survey B of factory surveys the B of factory for envelope, entering step 4; If envelope is surveyed the quantity of the free time amount of the B of factory more than or equal to remaining product, then remaining product is all distributed to envelope and surveyed the B of factory, finish this process;
Step 4, repeating step 3 continue to search and distribute remaining product, up to distributing all products.
For example; If 100 of the products of client A are arranged at present; And these 100 will get into the CP processing step, and the scope of business that envelope survey B of factory and envelope are surveyed the C of factory all comprises CP, estimate the board that seals the survey B of factory according to present situation about handling of the envelope survey B of factory and predetermined situation and have 200 free time amount in the day after tomorrow; Estimate the board that seals the survey C of factory according to present situation about handling of the envelope survey B of factory and predetermined situation and have 60 free time amount in the day after tomorrow; The mark of service in the past that envelope is surveyed the B of factory is 80, and the mark of service in the past that envelope is surveyed the C of factory is 90, and client's hobby does not have any requirement to B and C.Then: first pays the utmost attention to client hobby, because do not require, so second preferentially see service mark, 90>80, so earlier with product dispensation to C.Because the board of C will have only 60 free time in the day after tomorrow, so remaining 100-60=40 can distribute to B.So finally in these 100,60 give C, 40 give B.
Step 4, auxiliary distribution system is given notice to the terminal through network, and envelope is surveyed the B of factory and is sealed the slip-stick artist who surveys the C of factory and make final affirmation and sign-off respectively.
Instance 3: the automatic trace flow of product back segment manufacturing.
After having confirmed; Auxiliary distribution system will be followed the trail of the machining status of these products automatically through back segment manufacturing execution system BMES; Through carrying out data interaction with the manufacturer of leading portion and the envelope survey factory of back segment, the up-to-date situation of each product and the history of passing by constantly are deposited in the middle of its database.Confirm good associated process steps in case enter into; Certain product needed of system discovery gets into then the worker of committee of generation automatically list and gets goods and follow-up processing with the notice envelope survey related personnel of factory; Way of bailment can be the form of Mail and/or FTP, certainly, and Mail address wherein; Information such as FTP address all are that correlation engineering teacher defines in advance in the our factory, are pre-stored in this auxiliary distribution system.And the quality of crudy and processing result can be estimated and the parameter condition of product dispensation as automatic production capacity again, feeds back in the database, carries out stored record by database, as the assigning process after the parameter influence.
Be example from the technology of CP technology → ASSY flow process for example with product; If present certain product P WKG working CP technology; To do ASSY technology afterwards, and back segment manufacturing execution system BMES meeting is constantly made data alternately to get the up-to-date machining status of product up till now with the system that seals survey factory.After above-mentioned module is distributed to product P envelope and is surveyed the A of factory and do ASSY technology and confirm; The tracking that BMES will not stop; Finish when will enter into ASSY technology in case find CP technology, will notify auxiliary distribution system, the automatic thus worker of the committee single-pass that produces is known envelope survey factory.
The present invention has replaced the outer operating type of original affirmation and committee.Automatically production capacity is estimated the very big load that must alleviate correlation engineering teacher of function, and has improved the accuracy that production capacity is estimated, and makes product can be grasped more really at the current of each processing step and following production status; The automatic distribution and the affirmation of product have promoted the maximization of the rate of capacity utilization, and make cooperation between enterprises become efficient and simple; Automatically the outer function of committee then makes the linking of each processing step become more rapid, has guaranteed in time carrying out of production and reaching smoothly of client's product friendship phase.The use of this invention has maximized the effectiveness of the division of labor and the cooperation of inventionthe semiconductor industry, has brought very big benefit for each enterprise, is the fabulous example that the IT technology combines with manufacturing technology.
The above is merely preferred embodiment of the present invention, is not to be used for limiting practical range of the present invention; If do not break away from the spirit and scope of the present invention, the present invention is made amendment or is equal to replacement, all should be encompassed in the middle of the protection domain of claim of the present invention.

Claims (4)

1. the auxiliary distribution method that the semiconductor manufacturing is produced is characterized in that may further comprise the steps,
Step 1, extraction has the product information of the product of required characteristic;
Step 2 is according to the time of the entering back-end process of the said goods information calculations product;
Step 3 is carried out suitable distribution with product;
Wherein, Above-mentioned steps 1 is specially quantity, process of living in, the process that will carry out and the entry date of confirming product, the client of this product; Search the envelope that to accomplish this process and survey factory, confirm that each envelope survey factory that can accomplish this process surveys the service mark of factory in the free time of entry date amount and envelope;
In the above-mentioned steps 1, product information comprises the remaining operation number of product, the time that product begins to produce;
In the above-mentioned steps 2, the time method of the entering back-end process of counting yield is: time+product that product begins to produce operation number * required time of per pass operation altogether;
Above-mentioned steps 3 is specially:
The first step; Survey the service mark of factory based on envelope and judge that product dispensation is arrived the higher envelope of service mark surveys the A of factory; Then survey the free time amount allocated product of the A of factory based on the higher envelope of this service mark; If envelope is surveyed the quantity of the free time amount of the A of factory less than product, then the product dispensation that will equate with the free time amount of the envelope survey A of factory surveys the A of factory for envelope, gets into next step; If envelope is surveyed the quantity of the free time amount of the A of factory more than or equal to product, then product is all distributed to envelope and surveyed the A of factory;
Second step; The inquiry service mark is lower than all the other envelopes survey factories of A again; Find and wherein serve the highest envelope survey B of factory of mark, then survey the remaining product of free time amount distribution of the B of factory, survey the quantity of the free time amount of the B of factory less than remaining product if be somebody's turn to do envelope according to envelope; The product dispensation that then will equate with the free time amount of the envelope survey B of factory surveys the B of factory for envelope, gets into next step; If envelope is surveyed the quantity of the free time amount of the B of factory more than or equal to remaining product, then remaining product is all distributed to envelope and survey the B of factory;
The 3rd step repeated a step, continued to search and distributed remaining product, up to distributing all products.
2. a kind of auxiliary distribution method according to claim 1 is characterized in that, the operation in the above-mentioned back-end process comprises lug manufacturing process, pin survey process, process of lapping, encapsulation process and final test process.
3. a kind of auxiliary distribution method according to claim 1; It is characterized in that; The record that envelope is surveyed the performance of factory comprises that treating in the stipulated time seal the number percent of waiting to seal the shipment number of surveying product of total lot number of surveying product and this stipulated time, and treating in the stipulated time sealed the shipment number of surveying product and the number percent of the shipment number of affirmation in advance of this stipulated time.
4. a kind of auxiliary distribution method according to claim 1 is characterized in that, after the step 4, also comprises allocation result is sent to the step of storing in the database.
CN2008101792591A 2008-12-04 2008-12-04 Auxiliary distribution system and auxiliary distribution method for semiconductor manufacturing production Active CN101751013B (en)

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CN102566450A (en) * 2010-12-08 2012-07-11 和舰科技(苏州)有限公司 Cabinet program control management method and system
CN103886440B (en) * 2012-12-20 2017-06-27 上海华虹宏力半导体制造有限公司 The distribution system and distribution method of a kind of wafer
CN106327084A (en) * 2016-08-26 2017-01-11 广东坚美铝型材厂(集团)有限公司 Aluminum section product order completion time calculation system and method

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Address after: 215123 333 Xinghua street, Suzhou Industrial Park, Jiangsu

Patentee after: Warship chip manufacturing (Suzhou) Limited by Share Ltd

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Patentee before: Hejian Technology (Suzhou) Co., Ltd.