CN101750268A - A kind of detection method of air particles in clean room - Google Patents
A kind of detection method of air particles in clean room Download PDFInfo
- Publication number
- CN101750268A CN101750268A CN200810241275A CN200810241275A CN101750268A CN 101750268 A CN101750268 A CN 101750268A CN 200810241275 A CN200810241275 A CN 200810241275A CN 200810241275 A CN200810241275 A CN 200810241275A CN 101750268 A CN101750268 A CN 101750268A
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- China
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- decontamination chamber
- hard disks
- particle
- detection method
- clean room
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Abstract
The invention discloses a kind of detection method of air particles in clean room, earlier hard disks is placed in the decontamination chamber, the particle in the collection and purification room air carries out quantitative test to the particle that deposits on the hard disks again.A plurality of hard disks are set, are positioned over corners different in the decontamination chamber respectively to collect airborne particle.Owing to directly use hard disks to collect the particle that deposits in the air, can reflect the validity of decontamination chamber's environment purification on the one hand, be convenient to analyze decontamination chamber's dynamic purification index, for the state that improves in the decontamination chamber provides foundation.Also can directly reflect the deposition conditions of flying dust particle on hard disks on the other hand, thereby understand of the influence of decontamination chamber's environment hard disks.Method of the present invention is simple and easy effectively, is applicable to the clean-up effect of long trace analysis decontamination chamber.
Description
Technical field
The present invention relates to a kind of detection method, specifically relate to a kind of detection method of air particles in clean room.
Background technology
The decontamination chamber that uses in the hard disk manufacture process need be by static, dynamically cleanliness factor test.In general, being furnished with its The result of dynamic test of the qualified back of the static test of decontamination chamber of advanced cleaning equipment often can not be satisfactory.This activity with the people is relevant, and is also relevant with the factor such as structure, layout in the decontamination chamber.For example, allow in the decontamination chamber that a small amount of flying dust particle of existence can be deposited on ground, corner, clean, when more ventilating, be not easy to take away these particles.And the people will stir the particle of these depositions sometimes in the purification indoor activity, influences indoor cleanliness factor.Generally can't detect flying dust particle everywhere in the decontamination chamber in the existing technology, the particle that especially deposits, thus can't make comprehensive evaluation to decontamination chamber's purification state everywhere.
Summary of the invention
The objective of the invention is to propose a kind of detection method of air particles in clean room, can detect decontamination chamber's sedimentation state of flying dust particle in use.
The objective of the invention is to be achieved by the following technical programs.
The characteristics of the detection method of this air particles in clean room are, hard disks is placed in the decontamination chamber, and the particle in the collection and purification room air carries out quantitative test to the particle that deposits on the hard disks again.Collect the particle that deposits in the air owing to directly use hard disks, the validity that can reflect decontamination chamber's environment purification on the one hand, be convenient to analyze decontamination chamber's dynamic purification index, also can directly reflect the deposition conditions of the heavy particle of flying dust on hard disks on the other hand, thereby understand of the influence of decontamination chamber's environment the hard disks in producing.
In the detection method of above-mentioned air particles in clean room, place in the decontamination chamber 24h～168h to collect airborne particle hard disks.Sufficiently long acquisition time is of value to the actual state in the reflection decontamination chamber.
In the detection method of above-mentioned air particles in clean room, a plurality of hard disks are set, are positioned over corners different in the decontamination chamber respectively.Can detect diverse location in the decontamination chamber like this, accumulate the position of particle especially easily, thereby provide foundation for the state that improves in the decontamination chamber.
In the detection method of above-mentioned air particles in clean room, hard disks is placed in the decontamination chamber overhead 0.1m～1.5m place.
Method of the present invention is simple and easy effectively, can reflect the local or whole purge cases in the decontamination chamber, is applicable to the clean-up effect of long trace analysis decontamination chamber.
Embodiment
A kind of detection method of air particles in clean room may further comprise the steps:
1) a plurality of hard disks are placed each corner in the decontamination chamber respectively, as indoor four jiaos of places, purifying air is not easy to arrive circulation place, dish faces up and places 24h～168h, the flying dust particle in the collection and purification room air.Hard disks places in the decontamination chamber overhead 0.1m～1.5m place.In the meantime, personnel's work as usual in the decontamination chamber.The long actual state that helps reflecting the long-term use in decontamination chamber of the time that hard disks is placed.Directly use the hard disks collecting granules, and place the short time and help being directly acquainted with of the influence of decontamination chamber's environment the hard disks of producing.
2) particle of collecting on the hard disks is carried out quantitative test, comprise the situation such as size, quantity of particle.Use microscopic examination and add up the dust granules number, or the particle size and the quantity that adopt various corpuscular counter statistics collections to arrive.Can be according to the time of collecting, the recording disk video disc is placed the amounts of particles of collecting behind 24h, 48h, 72h, the 168h, to analyze relatively.By analysis to the particle collected on the hard disks that is placed on diverse location place in the decontamination chamber, can find to purify the relatively poor zone of indoor purifying state, thereby, such as the easy laying dust in some zone, need add forced ventilation, improve clean-up effect etc. for the state that improves in the decontamination chamber provides foundation.
Above content be in conjunction with concrete preferred implementation to further describing that the present invention did, can not assert that concrete enforcement of the present invention is confined to these explanations.For the general technical staff of the technical field of the invention, without departing from the inventive concept of the premise, can also make some simple deduction or replace, all should be considered as belonging to protection scope of the present invention.
Claims (4)
1. the detection method of an air particles in clean room is characterized in that: earlier hard disks is placed in the decontamination chamber, the particle in the collection and purification room air carries out quantitative test to the particle that deposits on the hard disks again.
2. the detection method of air particles in clean room as claimed in claim 1 is characterized in that: a plurality of hard disks are set, are positioned over corners different in the decontamination chamber respectively to collect airborne particle.
3. the detection method of air particles in clean room as claimed in claim 2 is characterized in that: place in the decontamination chamber 24h～168h to collect airborne particle hard disks.
4. the detection method of air particles in clean room as claimed in claim 3 is characterized in that: hard disks is placed in the decontamination chamber overhead 0.1m～1.5m place.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200810241275A CN101750268A (en) | 2008-12-17 | 2008-12-17 | A kind of detection method of air particles in clean room |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200810241275A CN101750268A (en) | 2008-12-17 | 2008-12-17 | A kind of detection method of air particles in clean room |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN101750268A true CN101750268A (en) | 2010-06-23 |
Family
ID=42477567
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN200810241275A Pending CN101750268A (en) | 2008-12-17 | 2008-12-17 | A kind of detection method of air particles in clean room |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN101750268A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104568686A (en) * | 2015-01-09 | 2015-04-29 | 中国计量学院 | System and method for testing deposition coefficient of sub-micron particles in box body and average coagulation coefficient |
| CN105575839A (en) * | 2014-11-11 | 2016-05-11 | 上海凸版光掩模有限公司 | Micro particle-based measurement method |
-
2008
- 2008-12-17 CN CN200810241275A patent/CN101750268A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105575839A (en) * | 2014-11-11 | 2016-05-11 | 上海凸版光掩模有限公司 | Micro particle-based measurement method |
| CN104568686A (en) * | 2015-01-09 | 2015-04-29 | 中国计量学院 | System and method for testing deposition coefficient of sub-micron particles in box body and average coagulation coefficient |
| CN104568686B (en) * | 2015-01-09 | 2017-09-12 | 中国计量学院 | The test system and method for Submicron Particles sedimentation coefficient and average coagulation coefficient in a kind of casing |
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Legal Events
| Date | Code | Title | Description |
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| C06 | Publication | ||
| PB01 | Publication | ||
| C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Open date: 20100623 |