CN101746129B - Film coating device and film coating method - Google Patents

Abstract

The present invention relates to a film coating device and a film coating method. The film coating device utilizes an ink-jet printer to form films on the surfaces of objects to be coated with coating liquid. The film coating device is provided with a print head unit capable of moving on the surfaces of objects to be coated along the first direction. For the print head unit, a plurality of print heads are successively arranged in a direction perpendicular to the first direction across the whole coating width.

Description

Film applying device and film coating method

The application is based on dividing an application of application number is 200580051399.5, denomination of invention for " ink gun and jetting exception detecting method thereof and film forming method ", the applying date is on August 24th, 2005 patent application.

Technical field

Jetting exception detecting method and its device of the ink gun that the present invention relates to ink gun and the ejection of ink gun is detected unusually, and film formation method (film coating method) and its device of using this ink gun.

Background technology

In recent years, utilize China ink in the situation that the printed mediums such as paper print, carry out at the substrates such as liquid crystal display (transparency carrier) in the situation of coating of the formation of alignment film and UV China ink, or in the situation of the substrate of OLED display coating colour filter, extensively adopt the so-called ink-jet method of having used ink gun.

For example, patent discloses the line style ink nozzle that possesses the nozzle that is equipped with row for No. 3073493.In addition, in this patent, such as Fig. 5～shown in Figure 7, also disclose the configuration of considering the line style ink nozzle, thereby make the Speed improving (patent documentation 1) of the processing of coating liquid material.

In addition, Unexamined Patent 9-138410 communique discloses following ink nozzle, that is: as the ink gun that forms uniform thickness, multirow, multiple row ground dispose nozzle in the zone of stipulating, and make the nozzle of going arbitrarily with respect to the arrangement of the nozzle of the row of adjacency configuration with staggering half pitch.In addition, also disclose in this communique, the mobile line style ink nozzle that has in series set the nozzle of ejection liquid material in zigzag ground applies simultaneously, forms uniform thickness (patent documentation 2).

In addition, as the unusual device of ejection that detects ink gun, for example put down in writing in the Unexamined Patent 5-149769 communique, to catch with the direction of this heading quadrature from the flight map picture of ink gun ejection and the drop that flies, and suppose that drop is Rotational Symmetry shape with respect to the central shaft of heading, with respect to the central shaft of drop, flight map is looked like to carry out integration, and calculate the volume (patent documentation 3) of drop.

In addition, record in the Unexamined Patent 11-227172 communique, setup times is poor, repeatedly makes a video recording from the drop of ink gun ejection, and by alternate position spike and time difference of a plurality of drop images of being made a video recording, and that measures drop drips speed (patent documentation 4).

In addition, record the illuminating method of taking the time among the JP 2001-322295, light source and image mechanism and scatter plate are relatively disposed, and make drop as determined object between light source and image mechanism and scatter plate, make light generation scattering from light source irradiation by scatter plate, and utilize image mechanism to drop make a video recording (patent documentation 5).

On the other hand, as one of manufacturing process of liquid crystal display cells, the operation that forms alignment films at transparency carrier is arranged.Alignment films applies oriented materials such as forming polyimides and forms alignment films at substrate for the control liquid crystal aligning.

As this oriented film coating formation method, be generally the aniline printing method based on the aniline printing device, but in recent years, proposed to use printhead to form the scheme (with reference to patent documentation 6 and patent documentation 7) of the so-called ink-jet method of alignment films at transparency carrier.

In the situation of aniline printing method, the pattern of alignment films forms easily and high productivity, but opposite, there is following problem: 1) be attached with in the situation of dust in relief surface, aligning film material is not applied to the bad repeatedly generation on the transparency carrier, 2) use amount of aligning film material is many, 3) in the situation that has stopped device owing to fault, need release (ア ニ ロ ッ Network) and clean relief printing plate etc., therefore resetting time is elongated, the running rate of device reduces, 4) can't apply for concavo-convex large substrate or substrate with curved surface.

Ink-jet method can solve the problem points of these aniline printing methods, can obtain stable quality.The ink-jet printer that ink-jet method is used has portable ink jet head unit.Usually be equipped with the as shown in figure 22 ink gun of one to six position (among Figure 22 being four) in the ink jet head unit.Ink jet head unit is moving back and forth with respect to the upper width along transparency carrier of direction (being above-below direction among Figure 22) as the direct of travel that is coated with the transparency carrier of application (being dextrad among Figure 22) 90 degree.And move back and forth synchronously with this, it is mobile intermittently that transparency carrier is followed into direction (length direction), thereby form alignment films at transparency carrier.

Patent documentation 1: specially permit No. 3073493 communiques (Fig. 5～Fig. 7)

Patent documentation 2: Unexamined Patent 9-138410 communique (Fig. 1, Fig. 4, Fig. 5)

Patent documentation 3: Unexamined Patent 5-149769 communique

Patent documentation 4: Unexamined Patent 11-227172 communique

Patent documentation 5: JP 2001-322295 communique

Patent documentation 6: Unexamined Patent 3-249623 communique

Patent documentation 7: Unexamined Patent 7-92468 communique

Yet for applying subtly liquid material, the injector spacing that needs will be equipped in the ink gun narrows down.But, injector spacing is narrowed down exist boundary physically.Therefore, in the domain type ink nozzle described in the above-mentioned patent documentation 2, injector spacing is narrowed down have boundary.In addition, the method that the mobile line style ink nozzle in zigzag ground applies simultaneously, because the mobile complexity of ink nozzle, so processing speed is slow.In addition, if the ink nozzle intricately is moved, it is crooked that then drop easily produces flight, is difficult to control accurately the attached position of bullet of drop.

Therefore, the first technical task of the present invention is as much as possible constriction injector spacing, in addition, can carry out aptly the adjustment of the attached position of bullet of drop.

On the other hand, as mentioned above, calculate position, the speed of drop the known image that has after taking drop, and it is unusual to detect ejection, but at the image that is difficult to utilize after drop taken in the past, the ejection that detects ink gun is unusual.

In addition, in the past, in to the situation of taking from the state of the nozzle of ink gun ejection liquid material, make camera and light source (stroboscopic light source) clip that liquid material is relative to be disposed, or the reverberation after the light of light source is reflected by drop incide the view finder of camera.But in the case, the light that incides in the view finder of camera is excessively strong, has the situation that produces halation.

Therefore, the second technical task of the present invention is easily and positively to carry out the unusual detection of ejection of ink gun.

In addition, use ink gun to form accurately in the situation of film of uniform film thickness in wish, have problem shown below.Namely, using ink gun to form in the situation of film, even equably liquid material is being coated in the situation of coated thing, utilize the drop that produces behind the ejection liquid material, the thickness of liquid material is temporarily roughly even, but then, the thickness in the dry run after drop merges changes, and it is poor that thickness produces.Think that this is the reason that begins drying owing to the surface of the liquid material after coating.Liquid material is being coated on equably in the situation of coated thing especially, is easily becoming evenly at the thickness of the central portion drop of film, at the circumference (edge part or bight) of film, in the dry run after drop merges thickness easily produce poor.Thereby, only merely consider the ejection characteristic of ink gun, and apply equably liquid material, be difficult to form accurately the film of uniform film thickness.In addition, in the situation of using a plurality of ink guns, because the ejection characteristic of each ink gun also is affected, be difficult to the thickness of adequate relief film forming.

Therefore, the 3rd technical problem of the present invention is to utilize ink gun to form as much as possible the film of uniform thickness.

In addition, the vital point in the ink-jet method is that stably from printhead ejection aligning film material, and the aligning film material that how will adhere to as countless points forms uniform alignment films on transparency carrier.Namely, if coated thing is the material such as the easy liquid-absorbing (China ink) of paper or cloth, then can not produce the non-cohesive of coating liquid on the surface of coated thing, if but coated thing is the material that glass or film etc. do not absorb or be very difficult to liquid-absorbing (China ink) fully, then form the some film of coating liquid in applicator surface, therefore, in the situation of part or all repetition of a film, there is the anxiety that produces film spot (non-uniform film thickness is even).Therefore, the correct mobile control of printhead is natural, also needs the viscosity adjustment of coating liquid and the degassed processing in the printhead.

Typical film spot is for producing the seam of film.The enlarged image of the seam B of the film after Figure 24 represents to apply.In the ink-jet method, also realize the homogenising of coating thickness for eliminating the film spots such as seam, overlapping coating is arranged or the technology of the coating of overlapping.That is, such as Figure 25 (A), the overlapping coating of staggering spacing in directions X and Y-direction, or shown in Figure 25 (B), carry out the overlapping coating of part.But, do not reach the degree of the film spot of the seam that sufficiently prevents film, in fact, still scolded about the problem on the film quality.

For eliminate as the seam of the film of above ink-jet method in problem points, need the large applicator surface of primary coating, consider in printhead unit, to arrange a plurality of printhead units, and the structure that coated thing is moved along the direction with this orientation quadrature.That is, spread all over a plurality of printheads of whole application width ground configuration such as Figure 23, coated thing G is moved, perhaps such as Figure 18, under the state of having fixed coated thing 70, the whole simultaneously edge coating of printhead direction is moved.Utilize this kind structure, finish coating by the once mobile of printhead and coated thing, so can form the seam that do not have film and high-quality the filming of film spot.

But in the former situation (Figure 23), the size of film applying device need to be more than the twice for the length of coated thing G.That is, the width that is made as L, printhead in the length with coated thing is made as in the situation of P, and the length of device is 2L+P+2 α, becomes very large device (α is the circumferential width of device).Therefore, in being called as the large-scale oriented film coating device in the 7th generation, because the size of transparency carrier (glass substrate) for example is 1870 * 2200mm, so device also is more than the twice of this length, correspondingly the displacement of coated thing G also becomes long distance, is very difficult to form the precision of machinery.The special relation that the place is the toilet that arranges owing to the oriented film coating device, reality is need to more save spatial mode is set.In addition, be directly proportional with the size of device, installation weight also becomes large weight, and the carrying during installation is difficult also.

On the other hand, such as Figure 18, at fixing coated thing 70, mobile in the situation that the printhead 73 that whole application width arranges applies, the length of device is essentially L+2P, compares greatly miniaturization with the device of Figure 23.

But, connect for coating liquid pipe arrangement from coating liquid to printhead that supply with, for holding wire from the coating data to the piezoelectric element of head that supply with, reach negative pressure pump etc. at printhead.Total radical of these pipe arrangements or distribution and the quantity of printhead increase pro rata.In the situation of as shown in figure 18 device, the total radical quantity tool that is connected in the coating pipe arrangement of a plurality of printheads and distribution is large, when printhead unit is moved, consists of large impedance.Use applying device such as the alignment films formation that is used for liquid crystal display cells, need the correct mobile control of printhead, this kind device can't be realized in fact.

As mentioned above, moveable printing head is suitable for saving the space, but is used for realizing that the problem points of this moveable printing head is as follows.(1) need to move province's pipe arrangement between side at film applying device and printhead.(2) need to move province's distribution between side at film applying device and printhead.(3) needs are oversimplified the liquid supplying tubing of printhead.(4) need to realize preventing shaking of black tank liquor face.(5) need between black groove and printhead, deaerating mechanism be installed.(6) need to control accurately the meniscus pressure of printhead.

These problem points below sequentially are described.

In the film applying device, as be connected in from fixation side to the printhead of mobile side the coating liquid pipe arrangement is arranged and to the electrical signal line of each printhead output, power line, to power line, the N of each equipment output ₂(nitrogen) exhaust (purge) pipe arrangement etc.For allowing printhead to move, these a plurality of pipe arrangements and distribution need to be contained in common cable and protect in the linear chain, but because the sum of pipe arrangement and distribution is very large, so province's distributionization of the omission pipe arrangement of above-mentioned (1) and above-mentioned (2) is indispensable especially.

Except above-mentioned, if each printhead pipe arrangement of mobile side is complicated, then a plurality of liquid must be supplied with control appliances and be arranged at the printhead side, correspondingly weight also increases, and also complicated of their control.Therefore, the liquid supplying tubing of printhead need to be oversimplified such as above-mentioned (3).

If will be installed on mobile side printhead to the black groove that printhead is supplied with coating liquid, then because the movement of printhead, the liquid level in the black groove shakes, and produces thus bubble, or the meniscus pressure that puts on printhead becomes large.Thereby what need above-mentioned (4) prevents shaking of black tank liquor face, and above-mentioned (5) between black groove and printhead, deaerating mechanism is installed, and the high accuracy of the meniscus pressure of the printhead of above-mentioned (6) control.

Therefore, the 4th technical task of the present invention is to realize the simplification of printhead pipe arrangement system on every side, and forms good coated film.

Summary of the invention

For solving above-mentioned the first technical problem, ink gun of the present invention is the mode with the 1/n spacing of the injector spacing that reciprocally staggered in the position of nozzle, and n sets the line style ink nozzle side by side, and the nozzle one that this line style ink nozzle will spray liquid material sets with being listed as.

The location regulation method of the line style ink nozzle that sets side by side of this kind ink gun for example, based on the image after by camera each the line style ink nozzle that sets side by side being taken, is adjusted to the line style ink nozzle assigned position that should be mounted.

In addition, for solving the first above-mentioned technical problem, other ink gun of the present invention is with along the staggered ground of the direction of the nozzle that sets the line style ink nozzle, differently the mode of staggered positions in series sets the ink nozzle unit mutually, described ink nozzle unit is in the mode of the 1/n spacing of the injector spacing that reciprocally staggered in the position of nozzle, n sets described line style ink nozzle side by side, and the nozzle one that described line style ink nozzle will spray liquid material sets with being listed as.

The location regulation method of the ink nozzle unit of this kind ink gun for example can be installed each ink nozzle unit with the datum plane contraposition of installation shaft ground, and this installation shaft will form a straight line as the datum plane of the benchmark of the installation site of ink nozzle unit.

On the other hand, for solving the second above-mentioned technical problem, the jetting exception detecting method of ink gun of the present invention is based on the image of taking behind the liquid material of the nozzle ejection of ink gun, position or the liquid width of cloth of the position calculation liquid material more than at least two places of the emission direction of nozzle, thus the ejection that detects nozzle is unusual.

In the case, when the liquid material of taking from the nozzle ejection, with with respect to the liquid material from nozzle ejection, opposition side and camera at camera are opposed, and, set light source from the mode of the view finder of direct not incident of the light camera of light source projects, from the direct light of light source projects by the refract light after the liquid material refraction of nozzle ejection by captured by camera, thereby liquid material is taken.

And, the ejection abnormality detection processing of abnormal detector and the control of camera and light source etc. can be used the recording medium by the embodied on computer readable of the program of the various functions of computer realization ejection abnormal detector, the described program of record, and the computer etc. that described program and recording medium be housed is realized.

And then for solving above-mentioned the 3rd technical problem, film formation method of the present invention is used ink gun ejection liquid material, forms uniform film at coated thing, and it comprises: thickness is set operation, and it is set in the thickness of the film that forms on the described coated thing; Examination ejection operation, it considers the ejection characteristic of described ink gun, adjusts ejection drop amount and dot spacing, and with the greyscale pattern of optional deep or light grade film is formed zone examination ejection liquid material; Deep or light ranking score Butut generates operation, it is based on the thickness of the film that forms in described examination ejection operation, in order to set the film that the thickness of setting in the operation forms even thickness with thickness, form the zone for the film that forms film at coated thing, generation is by the distribution map of the deep or light grade of the greyscale pattern of the liquid material of unit are setting ejection; Film forms operation, it maintains ejection drop amount and dot spacing after adjusting in the described examination ejection operation, simultaneously with the greyscale pattern based on the deep or light grade of the deep or light ranking score Butut that generates the regulation that generates in the operation at deep or light ranking score Butut, to coated thing ejection liquid material.

In addition, for solving the 4th above-mentioned technical task, device of the present invention is to utilize ink-jet printer to form the film applying device of the film of coating liquid on coated thing G surface, it is characterized in that possessing: the printhead unit that can move along first direction on described coated thing surface; For described printhead unit, with the direction of described first direction quadrature on, on whole application width, a plurality of printheads are installed continuously.

Utilize this structure, device length can be converged in fact in the scope of (length of coated thing)+2 * (width of printhead), and, finish coating with the once mobile of printhead, so coated film can not produce seam, there is not the film spot.Be to oversimplify the pipe arrangement system around the printhead, and subdue the pipe arrangement number between printhead and the fixation side, in the present invention, set black groove in the printhead side, curl up common liquor charging pipe arrangement near from this China ink groove to a plurality of printheads.And, connect from this common liquor charging pipe arrangement to the short distance between the printhead with independent liquor charging pipe arrangement.In addition, between the feed trough of black groove and fixation side, be connected with a supplying tubing with flexibility.Thus, with respect to printhead unit, even how many lift-launch number of printhead is, supplying tubing only needs one and gets final product, and can reduce significantly the mobile impedance of printhead unit.

In addition, follow the movement of printhead unit, the anxiety of bubble generation is arranged in black groove, but for this bubble is moved to printhead, in the present invention, the bubble that enters common liquor charging pipe arrangement by having the recovery pipe arrangement of flexibility, is recovered in the accumulator tank of fixation side.If this recovery pipe arrangement is connected separately with each printhead, then radical increases always, thus the large mobile impedance of formation printhead unit, thereby (removal bubble) is indispensable to have the pipe arrangement system of common liquor charging pipe arrangement and recovery pipe arrangement next degassed with combination.

Connect the distribution that is used for establishing from the nozzle spray coating liquid point at printhead.The kind of this distribution has power line, high-tension pulse to breast the tape and applies data signal line.If these many distributions are curled up fixation side by printhead, then have huge radical, it consists of large mobile impedance, thus printhead can not carry out correct mobile control.In the present invention, as the coating control part, for example, the shift register type interposer that serial input-parallel is exported is assemblied in the printhead unit, and power supply and the signal of the control part of self-retaining side supply to printhead unit in the future with a conveyer line.The coating data are from interposer to each printhead dispensing.Compare with the coating speed of printhead, the serial transfer speed of conveyer line has inundatory high-speed, so this kind structure possibility that becomes.

The present invention is for oversimplifying printhead conduits structure on every side, and positively be blended into the degassed of gas in the coating liquid, each independent liquor charging pipe arrangement of the coating liquid that is communicated with a plurality of printheads respectively being supplied with usefulness is connected in the common liquor charging pipe arrangement that is communicated with a black groove that accumulates a kind of coating liquid, and, the connecting portion of described common liquor charging pipe arrangement and each independent liquor charging pipe arrangement or each independent gas pipe arrangement of each printhead or the negotiable gas that their respectively are communicated with respectively between the two are connected in the common gas pipe arrangement that can open or close with respect to atmosphere.Herein, above-mentioned " printhead " meaned the hydrops section that is communicated with spray nozzle (for example a plurality of spray nozzles) in the inside of printhead particularly.

According to this kind structure, lodging in a coating liquid in the black groove supplies with to each printhead respectively by each independent liquor charging pipe arrangement from common liquor charging pipe arrangement, but in the process that this coating liquid is supplied to, if in common liquor charging pipe arrangement, there are the gases such as air, then this gas can from each independent gas pipe arrangement, be emitted in atmosphere by common gas pipe arrangement.If be described in detail, be coating liquid from black groove to starting stage that common liquor charging pipe arrangement begins to flow, exist the situation of gas more in the common liquor charging pipe arrangement, can produce this gas and coating liquid and jointly flow into each independent liquor charging pipe arrangement, and then flow into the situation of each printhead.But, being communicated with respectively each independent gas pipe arrangement between the two in each of the connecting portion of common liquor charging pipe arrangement and each independent liquor charging pipe arrangement or each printhead or they, these independent gas pipe arrangements are connected in can be with respect to atmosphere opening or the common gas pipe arrangement of closing.Thereby, jointly flow into the possible period of each printhead by each independent liquor charging pipe arrangement from common liquor charging pipe arrangement at coating liquid and gas, common gas pipe arrangement is formed the atmosphere opening state, and above-mentioned gas can be released to the atmosphere by common gas pipe arrangement from each independent gas pipe arrangement.Its result has avoided gas and coating liquid jointly to keep somewhere the situation of or printhead logical in common liquor charging pipe arrangement, thereby can effectively prevent from spraying coating liquid because gas exists to cause hindering from printhead.

And, flow through each independent liquor charging pipe arrangement to keeping somewhere in each printhead at coating liquid from common liquor charging pipe arrangement, gas is promptly discharged from common gas pipe arrangement by each independent gas pipe arrangement, therefore effectively avoids gas that the coating liquid of keeping somewhere in each printhead is brought harmful effect.Its result keeps somewhere respectively coating liquid in each printhead after inflow, forms each other uniform pressure, can not produce from each printhead ejection coating liquid inhomogeneous, and, under the state of having guaranteed good response, can be from each printhead ejection coating liquid.

In addition, each independent liquor charging pipe arrangement is connected in the common liquor charging pipe arrangement that is communicated with a black groove, and each independent gas pipe arrangement is connected in the common gas pipe arrangement that can be the atmosphere opening state, therefore realizes the simplification of all pipe arrangements of coating liquid and gas communication.In addition, also can form the controlling organization that is consisted of by control coating liquid from black groove to each printhead supply and the valve system that stops etc. in minority ground, and also can minority ground form the controlling organization that is consisted of with respect to atmosphere opening or the valve system of closing etc. by control gas, thereby realize the simplification of structure of liquid feeding device and cheapization of cost of manufacture.

In the case, preferably from the connecting portion of the independent gas pipe arrangement of described common liquor charging pipe arrangement and downstream or make gas be discharged to the structure of described common gas pipe arrangement near it.

So, the gas of the common liquor charging pipe arrangement that flows positively is discharged to common gas pipe arrangement, and is released in the atmosphere, therefore is difficult to produce gas residue at common liquor charging pipe arrangement or flow into the situation of each printhead from common liquor charging pipe arrangement.

And, be connected with in the situation of described each independent gas pipe arrangement at the connecting portion place of described common liquor charging pipe arrangement and each independent liquor charging pipe arrangement, with coating liquid jointly from black groove by the gas behind the common liquor charging pipe arrangement before flowing into each independent liquor charging pipe arrangement, connecting portion from these independent liquor charging pipe arrangements and common liquor charging pipe arrangement, by each independent gas pipe arrangement and common gas pipe arrangement, be released in the atmosphere.And the gas that has remained in each printhead is released to the atmosphere from the spray nozzle of each printhead.

In addition, be connected with in the situation of described each independent gas pipe arrangement at described each printhead, flow into the gas in each printhead and remain in the interior gas of each printhead by being connected in each independent gas pipe arrangement and the common gas pipe arrangement of each printhead, be released in the atmosphere.

In addition, described each between the two, be in the situation that is connected with described each independent gas pipe arrangement midway of each the independent liquor charging pipe arrangement between described each connecting portion and each printhead, even after jointly flowing into each independent liquor charging pipe arrangement by the gas behind the common liquor charging pipe arrangement from black groove and coating liquid, be released in the atmosphere by each independent gas pipe arrangement and common gas pipe arrangement.And in the case, the gas that has remained in each printhead is released to the atmosphere from the spray nozzle of each printhead.

In above structure, preferably connect the negative pressure pipe that is communicated with negative pressure source at described common gas pipe arrangement.

So, after making coating liquid flow into each printhead, it is closed condition that common gas pipe arrangement is formed relative atmosphere, by making each printhead that acts on common gas pipe arrangement and each independent gas pipe arrangement and be communicated with them via the negative pressure path from the negative pressure of negative pressure source, the interior drops of the coating liquid of each printhead, can effectively prevent from the vertical liquid of the what is called of spray nozzle front end, and can be in each printhead reduces each other equably pressure, thereby can not produce coating liquid is sprayed well.

In the case, described common gas pipe arrangement preferably has the bypass pipe arrangement that is communicated with negative pressure pipe, and leaves described each the independent gas pipe arrangement of predetermined distance ground connection at this bypass pipe arrangement.

So, act on via the bypass pipe arrangement from the negative pressure of negative pressure pipe and to leave on each independent gas pipe arrangement of arranging on predetermined distance ground, but therefore well, evenly and stably apply negative pressure for the coating liquid response in each printhead.

In above structure, preferably consisting of from the pressed gas force feed of the pneumatic supply mode to the inner space of described black groove.

So, by making the inner space that flows into black groove from the pressure air of pneumatic supply, the coating liquid that accumulates in the black groove utilizes pressure air to be entered in the common liquor charging pipe arrangement by baric flow, and is filled in each printhead by each independent liquor charging pipe arrangement.Thus, pressure is supplied with coating liquid to each printhead uniformly, and fills coating liquid from black groove to each printhead at the utmost point in the short time, thereby realizes fastization of padding and improve its operating efficiency.

In above structure, preferred described common gas pipe arrangement extends at the top position of the liquid level of described black groove along continuous straight runs, and described each independent gas pipe arrangement extends downwards from this common liquor charging pipe arrangement, simultaneously, described common liquor charging pipe arrangement is positioned at the lower position of described common gas pipe arrangement, and in the extension of the top position of described each printhead along continuous straight runs, and described each independent liquor charging pipe arrangement extends downwards from this common liquor charging pipe arrangement.

So, even be not provided in atmosphere, emitting the pump of gas, in coating liquid, float upward this natural phenomena based on gas, can really and effectively to atmosphere, emit gas from common liquor charging pipe arrangement or each printhead.

The invention effect

According to the ink gun of the present invention corresponding to above-mentioned the first technical problem, the line style ink nozzle that one row ground is equipped with the nozzle of ejection liquid material staggers mutually with the position of nozzle, and to set side by side n individual for the mode of 1/n amount of injector spacing, therefore whole as ink gun, but can be than the physical property boundary of constriction injector spacing constriction injector spacing further.In addition, because combination line style ink nozzle, thus by regulating the ejection timing of each line style ink nozzle, can carry out the adjustment of dot spacing, and can carry out simply the adjustment of rough covering and applying etc. from meticulous being coated to.In addition, location regulation method according to line style ink nozzle of the present invention, based on the image by each the line style ink nozzle that sets side by side of camera, each line style ink nozzle is adjusted to the position that should install, therefore can precision the line style ink nozzle be adjusted the position goodly.In addition, use the installation shaft that is formed with as the datum plane of the benchmark of the installation site of ink nozzle unit according to the location regulation method of ink nozzle of the present invention unit, and with the datum plane contraposition ground installation of each ink nozzle unit and described installation shaft.The datum plane of installation shaft is a plane, and the precision of guaranteeing its linearity, flatness is to be relatively easy to.Therefore, guarantee to install the precision of the datum level of ink nozzle unit and can carry out more simply, thus can precision adjust well the position of ink nozzle unit, thus install.These ink guns can the constriction injector spacing, and can carry out simply the adjustment of dot spacing, therefore for example is suitable for the ink gun that apparatus for forming alignment film is used.

In addition, the jetting exception detecting method of the of the present invention ink gun corresponding with above-mentioned the second technical problem, based on the image of taking behind the liquid material of the nozzle ejection of ink gun, position or the liquid width of cloth of the position calculation liquid material more than at least two places of the emission direction of nozzle, thus the ejection that detects nozzle is unusual.Exist in the unusual situation at nozzle, it is poor significantly to obtain in the characteristic quantity of the position of liquid material or the liquid width of cloth, can easily and carry out reliably the unusual detection of ejection of nozzle thus.In addition, with with respect to the liquid material from nozzle ejection, opposition side and camera at camera are opposed, and, set light source from the mode of the view finder of direct not incident of the light camera of light source projects, and by captured by camera from the direct light of light source projects via the refract light after the liquid material refraction of nozzle ejection, when liquid material is taken, the undesirable conditions such as halation can be suppressed, thereby liquid material can be taken more brightly.Thereby the ejection abnormal detector that so disposes light source is suitable for using above-mentioned jetting exception detecting method.

And then the of the present invention film formation method corresponding with above-mentioned the 3rd technical problem considered to set the thickness of the film of setting in the operation and the ejection characteristic of ink gun at thickness, with the tested ejection of the greyscale pattern of optional deep or light grade in examination ejection operation.In this examination ejection operation, because do not consider Thickness Variation in the dry run after drop merges, the situation that the film that therefore forms exists thickness to become inhomogeneous.Film formation method of the present invention is based on the thickness of the film that forms in examination ejection operation, in order to set the film that the thickness of setting in the operation forms even thickness with thickness, form the zone for the film that forms film at coated thing, generation is by the distribution map (deep or light ranking score Butut generates operation) of the deep or light grade of the greyscale pattern of the liquid material of unit are setting ejection.Thickness Variation reflection impact in the dry run after the deep or light ranking score Butut that generates in this deep or light ranking score Butut generation operation merges according to drop.Thereby, based on the greyscale pattern of the deep or light grade of the regulation that generates the deep or light ranking score Butut that generates in the operation at deep or light ranking score Butut, to coated thing ejection liquid material, thereby form the film of even thickness at coated thing.

In addition, according to the of the present invention device corresponding with above-mentioned the 4th technical problem, be to utilize ink-jet printer to form the film applying device of the film of coating liquid on coated thing surface, it possesses: the printhead unit that can move along first direction on described coated thing surface; With for described printhead unit, with the direction of described first direction quadrature on, a plurality of printheads of installing continuously, therefore the length with device is limited in fact (length of coated thing G)+2 * (width of printhead).In addition, because once mobile with printhead unit can be finished coating, so coated film do not produce seam, and do not have the film spot.Even and on the whole width of coated film, arrange side by side in the situation of a plurality of printheads, pipe arrangement system around the printhead is oversimplified, can significantly subdue the distribution piping number between printhead and the fixation side, therefore, pipe arrangement and distribution are housed in common cable protect in the linear chain, can subdue significantly the mobile impedance of printhead unit, and can carry out correct mobile control.

Description of drawings

Fig. 1 is the upward view of the structure of the described ink gun of expression the first embodiment of the present invention.

Fig. 2 is the figure of the installation procedure of expression line style ink nozzle that described ink gun is installed.

Fig. 3 is the top view of equipping position of the ink nozzle unit of expression variation described ink gun.

Fig. 4 is the top view of installation constitution (position adjustment) of the ink nozzle unit of expression variation described ink gun.

Fig. 5 is the A-A side end face figure of Fig. 4.

Fig. 6 is the side view of installation constitution (Height Adjustment) of the ink nozzle unit of expression variation described ink gun.

Fig. 7 is the plane of the structure of the described ejection abnormal detector of expression the second embodiment of the present invention.

Fig. 8 (a) is respectively the side view of described ejection abnormal detector (b).

Fig. 9 is the top view of the position relationship of the expression camera of described ejection abnormal detector and light source.

Figure 10 is the side view of the ejection abnormality determination method of the described ejection abnormal detector of expression.

Figure 11 is that expression utilizes described ejection abnormal detector to take the side view of the state of drop.

Figure 12 is the top view of flight bending of photography direction of the camera of expression liquid material.

Figure 13 is the figure that the described mould of expression the 3rd embodiment of the present invention forms the structure of device.

Figure 14 is the top view of the some position of the described ink gun of expression the 3rd embodiment of the present invention.

Figure 15 is the top view of some position of the greyscale pattern of the deep or light grade 100% of illustration.

Figure 16 is the top view of some position of the greyscale pattern of the deep or light class 5 0% of illustration.

Figure 17 (a) is the profile of the ejection state of the liquid material in the expression examination ejection operation, the figure of the thickness of the film that (b) to be expression formed by examination ejection operation.(c) being the profile that the expression film forms the ejection state of the liquid material in the operation, is to be illustrated in the figure that film forms the thickness of the film that forms in the operation (d).

Figure 18 is the top view of the described film applying device of the 4th embodiment of the present invention.

Figure 19 is the piping diagram of described film applying device.

Figure 20 (A) is the wiring diagram of described film applying device, (B) is the common wiring diagram of described film applying device.

Figure 21 (A) is the front view of black groove, (B) is the side view of black groove.

Figure 22 is the top view of film applying device in the past.

Figure 23 can eliminate the film seam, but becomes large-scale and top view film applying device not realization property.

Figure 24 is the impression figure that utilizes the film seam that the film applying device of Figure 22 forms.

Figure 25 (A) is the impression figure that utilizes the overlapping coating that the film applying device of Figure 22 forms, and (B) is the impression figure of coating of overlapping in the same manner.

Among the figure, 1-ink gun (ink nozzle unit); 2-line style ink nozzle; The 3-housing; The 4-nozzle; 5-nozzle installed surface; The 10-operating space; 11-housing fixed part; The 12-camera; The 13-control part; The 14-workbench; The 15-storage part; 16-move operation section; The 17-monitor; The 18-reference position; 20-ink gun (in series setting the mode of ink nozzle unit); The 21-installation shaft; The 22-datum plane; The 23-screw; The 24-connector; The position of 24a-connector longitudinal extension; The position that the 24b-connector is laterally extending; The 25-groove; 26,27-side; The 28-screw; 29,30-screw; The lower surface of 31-installation shaft; 32,33-screw; The side of 34-installation shaft (side of the opposition side of datum plane); The lower surface at the position that the 41-connector is laterally extending; The side at the position that the 42-connector is laterally extending; 44-assembly wall section; The side of the inboard of 45-assembly wall section; The upper surface of 46-housing; 47,48,49-screw; The coated thing of 51-; The 52-substrate; The long device of 53-side; The g-gap; J-sprays the zone; The P1-injector spacing.

The specific embodiment

Below, with reference to accompanying drawing embodiments of the present invention are described.

[the first embodiment]

Fig. 1～Fig. 6 illustration the first embodiment of the present invention.The described ink gun 1 of this first embodiment as shown in Figure 1, is made of the housing 3 that two line style ink nozzle 2a, 2b and line style ink nozzle 2a, 2b are installed.

Line style ink nozzle 2a, 2b set the nozzle 4 of ejection liquid material with the interval of regulation one row.Line style ink nozzle 2a, 2b shaping nozzle 4 side by side when being shaped, shape and the position of therefore can precision making each nozzle 4 goodly.In addition, this line style ink nozzle 2a, 2b supply with liquid materials from separately liquid material supply unit (omitting diagram) to each nozzle 4 respectively, and based on the jeting instruction signal of control device (omitting diagram), at the moment of regulation ejection liquid material.Thus, line style ink nozzle 2a, 2b can make each nozzle 4 ejection liquid material in the identical moment, also can make only ejection from several nozzles 4 of selecting of liquid material.

As shown in Figure 1, in the stagger mode of half pitch (1/2P1) amount of injector spacing P1 of the position that mutually makes nozzle 4, two are equipped on housing 3 to this ink gun 1 side by side with two line style ink nozzle 2a, 2b.It is very important to this ink gun 1 that precision is adjusted the relative position relation of two line style ink nozzle 2a, 2b goodly.

In the present embodiment, as shown in Figure 2, when line style ink nozzle 2a, 2b are installed in housing 3, in housing 3, setting CCD camera 12 (image capture apparatus, camera) across line style ink nozzle 2 and nozzle installed surface 5 relative positions, based on the image of CCD camera 12, make the position consistency of the nozzle 4 of line style ink nozzle 2a, 2b.

Carry out the operating space 10 of the assembly manipulation of ink gun 1, for example, as shown in Figure 2, possess: the control part 13 of the movement of the housing fixed part 11 of stationary housing 3, CCD camera 12 and control CCD camera 12.Among Fig. 2, the 15th, storage part, the 16th, move operation section, the 17th, show the monitor by the image of CCD camera 12 shootings.

This housing fixed part 11 is down fixing with nozzle installed surface 5 courts of housing 3.CCD camera 12 is with the state relative with the nozzle installed surface 5 of the housing 3 that is fixed in housing fixed part 11, with respect to nozzle installed surface 5 abreast mobile mode dispose.For example, CCD camera 12 is arranged on the XY worktable 14 that can critically adjust the position, thereby can adjust very well with respect to nozzle installed surface 5 precision the position of CCD camera 12.

In addition, control part 13 is set the XY coordinate take housing 3 optional positions as the reference position, and possesses the position coordinates (x1 that the optional position of storing respectively each line style ink nozzle 2a, 2b need to be positioned at, y1), (x2, y2), (x3, y3), (x4, y4) ... storage part 15, and the move operation section 16 that CCD camera 12 is moved according to the position coordinates that is stored in storage part 15.The move operation of CCD camera 12 can utilize computer to operate, so that CCD camera 12 is correctly mobile.

In the present embodiment, storage part 15 is with the reference position (0 as housing 3, the upper right corner 18 of the housing 3 of Fig. 1,0) sets the XY coordinate, and store respectively nozzle 4a1, the 4a2 at the two ends, the left and right sides of each line style ink nozzle 2a, 2b, the position coordinates (x1 of 4b1,4b2, y1), (x2, y2), (x3, y3), (x4, y4).

Next, expression has utilized the example that the position of line style ink nozzle 2a, 2b of the operating space 10 of the above-mentioned assembly manipulation that carries out ink gun 1 is adjusted.

In the position of line style ink nozzle 2a, 2b is adjusted, at first, in the installation site of the regulation of the nozzle installed surface 5 of housing 3, line style ink nozzle 2a, 2b are set and do not carry out correct position adjustment.In the present embodiment, housing 3 makes nozzle installed surface 5 towards down being installed on operating space 10, and line style ink nozzle 2a, 2b not to be dropping from nozzle installed surface 5, and it is solid temporarily to carry out the state of inching to the position.

The position adjustment of line style ink nozzle 2a, 2b is adjusted to the position coordinates (x1 that is stored in storage part 15 by nozzle 4a1,4a2,4b1, the 4b2 with the two ends, the left and right sides of each line style ink nozzle 2a, 2b, y1), (x2, y2), (x3, y3), (x4, y4) carry out.

In the present embodiment, in the image that mirrors monitor 17, with the doubling of the image that CCD camera 12 is taken, show the sign m (for example, the sign of cross) at expression shooting center at the center of image.

Make CCD camera 12 move to the overlapping position in the shooting center of CCD camera 12 and the reference position of housing 3 (in the present embodiment, as shown in Figure 1, the upper right corner 18 of housing 3).And, when the image of CCD camera 12 of regional s1 of the reference position 18 that comprises housing 3 has been taken in observation, operation XY worktable 14 moves CCD camera 12, so that the reference position 18 of the sign m at the shooting center of expression CCD camera 12 and housing 3 is overlapping.And, whether the reference position 18 of housing 3 is consistent with the shooting center of CCD camera 12, for example can process by the computer based image, the reference position 18 of identification housing 3, and consistent with the shooting center of CCD camera 12 by the reference position 18 of computer-made decision housing 3.

So, the position that the shooting center of CCD camera 12 is overlapped with the reference position of housing 3 is as the origin of coordinates of XY worktable 14.In the present embodiment, with the reference position 18 as housing 3, the upper right corner of housing 3, and get the XY coordinate with this position, but the reference position 18 of housing 3 can be set in the arbitrarily position of the nozzle installed surface 5 of housing 3.

Next, utilize control part 13 to move CCD camera 12 based on the position coordinates of the nozzle 4 of the line style ink nozzle 2a, the 2b that are stored in storage part 15.

In the present embodiment, based on the data of the position coordinates of the nozzle that is stored in storage part 15, the position (x1, y1) that the nozzle 4a1 that makes CCD camera 12 move to the right-hand member of line style ink nozzle 2a should be positioned at.At this moment, the sign m at the shooting center of expression CCD camera 12 represented line style ink nozzle 2a right-hand member nozzle 4a1 should position (x1, y1).And, fix the CCD camera 12 after so moving, and the position of adjustment line style ink nozzle 2a, so that in its image, the nozzle 4a1 of right-hand member of line style ink nozzle 2a of installation site that is arranged at aptly the regulation of housing 3 is broken forth, and the center superposition of the center of the nozzle 4a1 of the right-hand member of line style ink nozzle 2a and the sign m at the shooting center of expression CCD camera 12.

In the present embodiment, utilize image recognition mechanism, identify the circle of nozzle 4a1, and calculate the center of nozzle 4a1.And, when observing monitor 17, inching is carried out in the position of the line style ink nozzle 2 of the installation site of the regulation that suitably is positioned over housing 3, so that the center superposition of the center of nozzle 4a1 and the sign m at the shooting center of expression CCD camera 12.And, the coordinate of the center of the nozzle 4a1 in also can calculating take the reference position 18 of housing 3 as the XY coordinate system of benchmark, and the coordinate that makes the center of nozzle 4a1 is presented in the monitor 17, when observation is shown in coordinate figure in the monitor 17, inching is carried out in position to line style ink nozzle 2, so that the center of the coordinate of the center of nozzle 4a1 and nozzle 4a1 should position (x1, y1) consistent.

Thus, the center of the nozzle 4a1 of the right-hand member of line style ink nozzle 2a can be adjusted to should position (x1, y1).The nozzle of the left end of line style ink nozzle 2a is adjusted similarly.

Line style ink nozzle 2a also the position of nozzle 4a1, the 4a2 at two ends, the left and right sides side by side can be adjusted to should position (x1, y1), (x2, y2), and be fixed on the housing 3.Therefore, for example use two CCD cameras 12, side by side take nozzle 4a1, the 4a2 at the two ends, the left and right sides of line style ink nozzle 2a, thereby adjust the position of line style ink nozzle 2a.

In addition, other line style ink nozzle 2b similarly the position of two ends, left and right sides nozzle 4b1,4b2 is side by side adjusted to should position (x3, y3), (x4, y4), thereby precision is installed in the assigned position of housing 3 well.

So, can precision half spacing good and the injector spacing P1 that mutually staggered in the position of nozzle 4 set side by side two line style ink nozzle 2a, 2b (1/2 spacing).So set the ink gun 1 of line style ink nozzle 2 as a whole, equated by the state that half injector spacing (1/2P1) sets nozzle 4 with a line style ink nozzle 2.Thereby, with the injector spacing P1 constriction of line style ink nozzle 2 in the situation of boundary, this ink gun 1 can further be set to half with injector spacing as a whole.

In addition, this ink gun 1 can be regulated by each line style ink nozzle 2 ejection timing of liquid material.Thus, the adjustment that can carry out simply meticulous coating and rough cover dot spacings such as applying.For example, if only carry out the ejection of liquid material from a line style ink nozzle 2, then the injector spacing of ink gun 1 integral body becomes the injector spacing P1 of a line style ink nozzle 2a.In addition, if spray liquid material in the moment of regulation from two line style ink nozzle 2a, 2b, then ink gun 1 as a whole can be with narrow injector spacing (1/2p1) ejection liquid material.

More than, in the above-described embodiment, to a row ground being equipped with the line style ink nozzle 2 of the nozzle 4 that sprays liquid material, the mode of 1/2 amount of separation of injector spacing P1 so that stagger mutually in the position of nozzle 4, the ink gun 1 that has set side by side two is illustrated, but the number n of the line style ink nozzle 2 that sets side by side can at random increase.

For example, omit diagram, if with the position of nozzle 4 every the mode that the 1/3 amount of separation ground of injector spacing P1 staggers mutually, set side by side three line style ink nozzles 2, then the injector spacing of ink gun integral body can be formed line style ink nozzle 2 injector spacing P1 1/3.In addition, if with the position of nozzle 4 every the mode that the 1/4 amount of separation ground of injector spacing P1 staggers mutually, set side by side four line style ink nozzles 2, then the injector spacing of ink gun integral body can be formed line style ink nozzle 2 injector spacing P1 1/4.Similarly, if with the position of nozzle 4 every the mode that the 1/n of injector spacing P1 amount of separation ground staggers mutually, set side by side n line style ink nozzle 2, then the injector spacing of ink gun integral body can be formed the 1/n of the injector spacing P1 of line style ink nozzle 2.

More increase the number n of the line style ink nozzle 2 that sets so side by side, more can reduce the injector spacing of ink gun integral body.But, get over the number n that increases the line style ink nozzle 2 that sets side by side, the distance between the line style ink nozzle of the front of line style ink nozzle 2 arranged side by side and the line style ink nozzle at rear becomes large.Therefore, in the bad purposes (for example, forming the purposes of alignment films etc.) that becomes problem of the fusion of liquid material of ejection, adjust the number n of the line style ink nozzle that sets side by side, to reach the degree that does not have problems.Under present situation, think that in these purposes the number of the line style ink nozzle installed side by side is with interior more suitable about 4 or 5.

Next, as an ink nozzle unit, and the ink gun that its assembled in series is consisted of describes to the ink gun 1 after as described above line style ink nozzle 2 being made up side by side.

As shown in Figure 3, this ink gun 20 is modes that liquid material that the two ends, the left and right sides with the ejection of the liquid material of ink nozzle unit 1 zone j are connected to the ink nozzle unit 1 of adjacency sprays regional j, in series sets ink nozzle unit 1.

As shown in Figure 4, in the present embodiment, on the width of installation shaft 21, in the both sides that clip installation shaft 21, staggeredly, mutually differently be equipped with ink nozzle unit 1.On the side (among Fig. 4, the side of upside) of a side of installation shaft 21, be formed with datum plane 22.This datum plane 22 sets ink nozzle unit 1 for precision goodly, has guaranteed the flatness that needs.In the present embodiment, datum plane 22 guarantees on the whole ± flatness of 5 μ m, and then guaranteed partially ± flatness of 1/160mm.In addition, at the lower surface of installation shaft 21, in the longitudinal direction, be formed with the screw 23 of installation ink nozzle unit 1 (the T word connector 24 described later of ink nozzle unit 1) with the interval of regulation.

Such as Fig. 4, shown in Figure 5, ink nozzle unit 1 possesses roughly via upper surface that the connector 24 of the flat shape of T word is installed on installation shaft 21.Connector 24 precision are shaped very goodly.Ink nozzle unit 1 is with under the laterally extending position 24b of the connector 24 of T word, and the mode that sets line style ink nozzle 2 along the laterally extending position 24b at the connector 24 of T word is installed.Ink nozzle unit 1 is installed on the position of regulation goodly with respect to T word connector 24 precision.In the present embodiment, connector 24 is installed on installation shaft 21, then, with the ink nozzle cellular installation in connector 24.Usually, when unloading the ink nozzle unit, can connector 24 being remained under the state that is installed on installation shaft 21, only the ink nozzle unit be unloaded from connector 24.

Such as Fig. 4, shown in Figure 5, connector 24 possesses the groove 25 that installation shaft 21 is installed at the central portion of the position of longitudinal extension 24a.Guarantee the flatness with datum plane 22 same degree of installation shaft 21 in the longitudinally two sides 26,27 of groove 25.On the bottom surface of groove 25, be formed with accordingly the screw 28 that screw is housed with the screw 23 of installation shaft 21.This screw 28 forms the large hole of diameter with respect to the diameter of the screw of installing, can regulate minutely the relative position relationship of installation shaft 21 and connector 24.In addition, be respectively equipped with screw hole 29,30 in the both sides of groove 25, it is used for installing the screw (omitting diagram) that in the vertical side (26 or 27) of connector 24 is crimped on datum plane 22.

When connector 24 is installed on installation shaft 21, as shown in Figure 5, the groove 25 of connector 24 is embedded into the lower surface of installation shaft 21, is installed in installation shaft 21 at the position 24a of the longitudinal extension of the connector 24 of T word in the mode with respect to installation shaft 21 quadratures.And as shown in Figure 4, each connector 24 is fixed in installation shaft 21 with the datum plane 22 contrapositions ground of installation shaft 21.

In the present embodiment, in advance the side (26 or 27) of a side of the groove 25 of the connector 24 of T word is crimped on the datum plane 22 of installation shaft 21, with respect to installation shaft 21 precision connector 24 is installed goodly, and then ink nozzle unit 1 precision is installed on the connector 24 goodly, thereby guaranteed the installation accuracy of ink nozzle unit 1 with respect to installation shaft 21.

The installation of connector 24 for example is installed in the groove 25 of the connector 24 of T word the lower surface 31 of installation shaft 21, and under this state, from the lower surface mounting screw 32,33 of connector 24, thereby connector 24 is fixed on (solid temporarily) on the installation shaft 21 lightly.And, side 34 sides at the opposition side of the datum plane 22 of installation shaft 21, mounting screw in the screw (29 or 30) of the side (26 or 27) of groove 25 (omitting diagram) screws togather this screw, and the front end of screw is crimped on the side 34 of installation shaft 21.Thus, datum plane 22 sides in installation shaft 21, the side (27 or 26) that makes groove 25 and datum plane 22 butts, thus connector 24 precision that form the T word well with the state of installation shaft 21 quadratures, and by screw 32,33 connector 24 is fixed in installation shaft 21.Thus, can make well along under the state of the position 24a of the longitudinal extension of the connector 24 of T word and installation shaft 21 quadratures in precision, connector 24 is fixed in installation shaft 21.

More specifically, in connector 24 as shown in Figure 5, in the side 26,27 of groove 25, relative with the datum plane 22 of installation shaft 21 in the side 26 of the front of the vertical upwardly extending position 24a of T word.In the case, the front end of the screw (omitting diagram) in the screw 30 of the base end side by will being screwed together among the figure left side is crimped on the side 34 of installation shaft 21, makes the side 26 on right side among the figure and datum plane 22 butts of installation shaft 21.

Although diagram is omitted, but in the side 26,27 of the groove 25 of connector 24, at (Fig. 5 about arbitrarily in the opposite situation) in the relative situation of the datum plane 22 of the side 27 of the base segment side of the position 24a of the longitudinal extension of T word and installation shaft 21, also can make screw be screwed together in the screw 29 of front, and the front end of screw is crimped on the side 34 of installation shaft 21, thereby the side 27 of the base end side of connector 24 is crimped on the datum plane 22 of installation shaft 21.

So, in the present embodiment, form datum plane 22 in the side of installation shaft 21 1 sides, and cooperate these datum plane 22 ground that all connectors 24 are installed.So, if precision is guaranteed the datum plane 22 of installation shaft 21 well, then can precision be installed by all connectors 24 well, can easily carry out so guarantee the installation accuracy of connector 24.

Next, the method that is installed on well ink nozzle unit 1 being installed in precision so on the connector 24 of installation shaft 21 describes.Ink nozzle unit 1 is being installed in the situation of connector 24, is similarly requiring to guarantee the installation accuracy of height with the installation of above-mentioned connector 24.

In the present embodiment, ink nozzle unit 1 is installed in the bottom of the laterally extending position 24b of the connector 24 that is mounted, for guaranteeing the installation accuracy of above-mentioned height, precision is processed lower surface and the side 42 of the laterally extending position 24b of connector 24 well.

Particularly, the side 42 of the laterally extending position 24b of connector 24 is to form with the side 26 of the groove 25 of connector 24,27 parallel modes, the mode of lower surface 41 at right angles to extend with respect to the side 42 of laterally extending position 24b of the laterally extending position 24b of connector 24, precision forms goodly.And the lower surface 41 of the laterally extending position 24b of connector 24 and side 42 form with the flatness with the datum plane same degree of installation shaft 21.

In addition, the housing 3 ' of ink nozzle unit 1, as shown in Figure 5, side edge part on the top of housing 3 ' (face of the opposition side of nozzle installed surface 5) has the assembly wall section 44 that vertically erects, and precision is processed the side 45 of inboard of assembly wall section 44 and the upper surface 46 of housing 3 ' goodly respectively.

Particularly, the side 45 of the inboard of assembly wall section 44 is at right angles extended and is formed with respect to the upper surface 46 of housing 3 ', and the side 45 of the inboard of assembly wall section 44 and the upper surface 46 of housing 3 ' form with the flatness with datum plane 22 same degree respectively.

Ink nozzle unit 1 is being installed in the situation of connector 24, at first, as shown in Figure 5, at first the side 45 of the inboard of the upper surface 46 of the housing 3 ' of ink nozzle unit 1 and assembly wall section 44 is crimped on lower surface 41 and the side 42 of the laterally extending position 24b of connector 24.Next, utilize the screw 47,48 on the laterally extending position 24b that is installed in connector 24 lightly the housing 3 ' of ink nozzle unit 1 to be fixed in connector 24 (solid temporarily).

Next, utilize the screw 49 that is installed to from the outside in the assembly wall section 44 of housing 3 ', the mode that offsets with the side 42 with the side 45 of assembly wall section 44 and the laterally extending position 24b of connector 24 screws gently.And adjustment housings 3 ' is alternatively tightened screw 47,48,49 simultaneously, thereby ink nozzle unit 1 is fixed in connector 24 with respect to the position of the horizontal direction of connector 24.So, in the present embodiment, by with the upper surface 46 of housing 3 ' and the lower surface 41 of the laterally extending position 24b of connector 24, and under the state of the side 42 difference crimping of the laterally extending position 24b of the side 45 of the inboard of assembly wall section 44 and connector 24, fixedly the housing 3 ' of ink nozzle unit 1 has been guaranteed the installation accuracy of ink nozzle unit 1 with respect to connector 24 thus.

According to the installation method of the described ink nozzle of present embodiment unit 1, usually when unloading ink nozzle unit 1, can keep being installed under the state of installation shaft 21 at connector 24, only ink nozzle unit 1 is unloaded from connector 24.And, ink nozzle unit 1 is being installed in the situation of connector 24, alternatively tighten as described above screw 47,48,49, thereby ink nozzle unit 1 is fixed on the connector 24, then can precision be installed by ink nozzle unit 1 goodly.Thereby, the installation of ink nozzle unit 1 with unload and can easily carry out.

Next, the adjustment of the gap g (with reference to Fig. 6) between the coated thing 51 of ink nozzle unit 1 and coating liquid material described.If gap g is excessive, it is crooked then easily to generate flight, if narrow, the following hydrops and the coated thing 51 that then accumulate in ink nozzle unit 1 come in contact.Therefore, the lower limit of gap g is located at 0.5mm above (more preferably more than the 0.7mm), and the upper limit of gap g is adjusted to the value of the regulation of 1.2mm following (more preferably below 1.0).

In the present embodiment, as shown in Figure 6, the mode that the upper surface that is adjusted at coated thing 51 of gap g stretches out from coated thing 51 with the end is placed substrate 52 (glass substrate).In addition, the face with the nozzle 4 that is equipped with ink nozzle unit 1 relatively sets length meter 53.In the present embodiment, length meter 53 uses the length meter (laser length meter) of optical profile type for can correctly carry out range determination.And, utilize length meter 53, the distance L 1 between the nozzle face of mensuration length meter 53 and ink nozzle unit 1.Next, make the substrate 52 that is positioned on the coated thing 51 enter into the top of length meter 53, measure the distance L 2 between the lower surface of length meter 53 and substrate 52.Gap g between the upper surface of the nozzle face of line style ink nozzle 2 and coated thing 51 calculates as poor (g=L1-L2) of distance L 1 with distance L 2.And also capable of regulating is equipped with the height of the installation shaft 21 of ink nozzle unit 1, so that the gap g that measures reaches predefined gap width.

Thus, adjusting play g accurately, and can easily carry out from the control of the attached position of bullet of the liquid material of each nozzle 4 ejection of ink nozzle unit 1, and can prevent that hydrops is attached to coated thing.

As described above, according to this ink gun 20, be equipped with the ink nozzle 2 of the nozzle 4 that sprays liquid material in the mode of the 1/n amount of the injector spacing P1 that staggered mutually in the position of nozzle 4 with one with being listed as, n ink gun 1 that sets side by side uses as the ink nozzle unit, therefore, injector spacing that as a whole can constriction line style ink nozzle 2.In addition, this ink gun 20 can be regulated by each line style ink nozzle 2 of each ink nozzle unit 1 ejection timing of liquid material.Thus, the adjustment of dot spacing can be carried out, and the adjustment of rough covering and applying etc. from meticulous being coated to can be carried out simply.

And, as mentioned above, by a plurality of ink nozzles unit 1 precision is installed on the installation shaft 21 goodly, but the zone that can guarantee the primary coating liquid material, thus can make the Speed improving of processing.

The described ink gun 20 of present embodiment will be made as aligning film material from the liquid material of ink gun 20 ejections, the coated thing of coated with orientation membrane material for example is made as in the situation of liquid crystal cell substrate, can take the length of installation shaft 21 is guaranteed as with the corresponding length of the width of liquid crystal cell substrate, and whole of the width of liquid crystal cell substrate and ink nozzle unit 1 relative mode sets ink nozzle unit 1.

Thus, to liquid crystal cell substrate coated with orientation membrane material the time, can once apply, thereby can make the uniform film thickness of aligning film material, and can make the Speed improving of processing.So, this ink gun will make up the ink gun of line style ink nozzle side by side as an ink nozzle unit, and it is in series assembled and consist of, and the adjustment of injector spacing and dot spacing is easy, and, by with the ink nozzle units in series set the length of regulation, can apply equably liquid material, the speed of processing also improves.Therefore, be particularly suitable for as needs coated liquid material being merged without spot ground, and guarantee the ink gun that the inhomogeneity apparatus for forming alignment film of thickness is used.

More than, the described ink gun of the first embodiment of the present invention is illustrated, but the present invention is not limited to above-mentioned embodiment.For example, the shape of each structure member such as housing 3, installation shaft 21, connector 24 or the mutual installation constitution between each structure member etc. can have various changes.

[the second embodiment]

Fig. 7～Figure 11 illustration the second embodiment of the present invention.The ejection abnormal detector 1 of the described ink gun of this second embodiment is shown in Fig. 7 and Fig. 8 (a), by the camera 5 to taking from the liquid material 4 of nozzle 3 ejection of ink gun 2; The light source 6 of the light that needs is taken in irradiation; The image that processing is taken by camera 5, thus detection sprays unusual ejection abnormity detection portion 7 and consists of.And in the present embodiment, as shown in Figure 7, ink gun 2 forms single ink gun 2a in the longitudinal direction staggeredly mutual differently staggered positions and the structure that sets that will in series be equipped with nozzle 3.

Camera 5 as shown in Figure 7, with from the direction of the emission direction quadrature of ink gun 2, can the mode of taking from the liquid material 4 (with reference to Fig. 8 (a)) of ink gun 2 ejections be set.And the focusing of camera 5 is when liquid material normally sprays from ink gun 2, to overlap with liquid material 4.

Light source 6 is provided in the opposition side of camera 5 across liquid material 4, for not making the view finder 5a of the direct incident camera 5 of light (directly light) from light source 6 irradiations, not with camera 5 over against, from the position of positive control camera 5 along horizontal, tiltedly or above-below direction staggered positions a little, thereby with respect to the shooting direction of camera 5, from oblique irradiation light.Thus, from the light (directly light) of light source 6 irradiations, as shown in Figure 9, with the view finder 5a of light (refract light 12) the incident camera 5 after liquid material 4 refractions.

Utilize said structure, if shine light from light source 6, and take with camera 5, then because the speed of the drop of liquid material 4 ejection is fast, thereby as shown in figure 10, liquid material 4 appears as the fluid column shape.In addition, if shine light from light source 6 moments ground, and take with camera 5, then as shown in figure 11, can take liquid material 4 with the state of drop.

In addition, in the present embodiment, as shown in Figure 7, possesses the control part 8 that camera 5 and light source 6 are relatively moved with respect to ink gun 2.

The focus of camera 5 relatively moves according to camera 5 and light source 6, situation about always normally spraying from nozzle 3 in supposition, and the focus of camera 5 is controlled with the mode that liquid material 4 overlaps.

In the present embodiment, shown in Fig. 8 (b), control part 8 control cameras 5 and the position relationship of light source 6 with respect to nozzle 3, so that relatively moving with respect to camera 5 and light source 6, the focus of camera 5 always in the situation that supposition normally sprays from nozzle 3, overlaps with liquid material 4.Namely, in the present embodiment, when the liquid material 4 of the single ink gun 2a2 ejection on right side from be equipped on figure is taken, when being taken, the liquid material 4 of the ink gun 2a1 ejection in left side from be equipped on figure compares, camera 5 and light source 6 move right, when the liquid material 4 of the single ink gun 2a2 ejection in left side from be provided in figure was taken, camera 5 and light source 6 were moved to the left on the contrary.

And, when Fig. 8 (a) is illustrated in the liquid material 41 of the single ink gun 2a1 ejection in left side from be equipped on figure is taken, camera 5 and light source 6 be with respect to the position of ink gun 2.When in addition, Fig. 8 (b) is illustrated in the liquid material 42 of the single ink gun 2a2 ejection on right side from be equipped on figure is taken, camera 5 and light source 6 be with respect to the position of ink gun 2.

Ejection abnormity detection portion 7, as shown in Figure 7, image based on the liquid material 4 of being taken by camera 5, position more than at least two places of the emission direction of nozzle 3, calculate position or the liquid width of cloth of liquid material 4, and in the position of calculating respectively liquid material 4 or the position of the liquid width of cloth, position or the liquid width of cloth of the liquid material 4 when normally spraying liquid material 4 from nozzle 3 are compared, thereby the ejection that detects nozzle 3 is unusual.

In the present embodiment, ejection abnormity detection portion 7 possesses: storage is by the image storage part 16 of the image of camera 5 shootings; The position of liquid material 4 or the calculating part 17 of the liquid width of cloth are calculated in position more than at least two places of the emission direction of nozzle 3; Store the normal value storage part 18 of the normal value of the position of the liquid material 4 when normally spraying liquid material 4 from nozzle 3 or the liquid width of cloth; Judge the unusual detection unit 19 of ejection of nozzle.

Calculating part 17 extracts the binary conversion treatment of liquid material 4 based on the image that is stored in the image storage part 16, determines to calculate the position of liquid material 4 or the position of the liquid width of cloth, and calculates position or the liquid width of cloth of liquid material 4.

Binary conversion treatment is the feature that is conceived on the images such as brightness or color, each pixel that is stored in the image in the image storage part 16 is arranged threshold value, and under the discernible state of computer, from the image that is stored in image storage part 16, extract the processing of liquid material 4.Thus, the liquid material 4 of can extraction and application camera 5 taking into the fluid column shape.In the binary image that has extracted liquid material 4, for example, what can make part beyond liquid material 4 or the liquid material 4 a kind ofly is shown as whitely, and another is shown as black.

The position of next, position or the liquid width of cloth of liquid material 4 being calculated is selected from the position more than two that the emission direction with respect to nozzle 3 leaves at least.In the present embodiment, as shown in figure 10, emission direction S for nozzle 3, near the position of nozzle 3 with away from the position of nozzle 3, the emission direction S of nozzle 3 is with the width of regulation, and two imaginary A, the B that will extend abreast with respect to the lower surface of ink gun 2 are applied to binary image.And intersect by each piece A, B computing block A, B and liquid material 4 four intersect coordinate a～d.And, intersect coordinate a～d by these four and calculate near the position of nozzle 3 with away from position and the liquid width of cloth of the liquid material 4 of the position of nozzle 3.

The position of liquid material 4 for example can be by each piece A, B, and calculate at intersect as piece A, B and liquid material 4 four centers that intersect coordinate a～d (piece A, B intersect with liquid material 4 and the center of gravity of the tetragonal abcd that retouches).In addition, the liquid width of cloth of liquid material 4 for example can be used as that piece A, B intersect with liquid material 4 and the mean value of the bottom and upper segment of the tetragonal abcd that retouches calculates.

Next, detection unit 19 judges that based on the position of the liquid material 4 that is calculated by calculating part 17 and the calculated value of the liquid width of cloth ejection of ink gun 2 is unusual.

Normal value storage part 18 stores threshold value, this threshold value is for the position of emission direction S that utilizes calculating part 17 to calculate the nozzle 3 of the position of liquid materials 4 and the liquid width of cloth, and regulation can be judged respectively the scope of the suitable normal value of the position of the liquid material 4 that liquid material 4 normally sprays from each nozzle 3 of ink gun 2 and the liquid width of cloth.And threshold value can at random be set as the suitable value that can judge that liquid material 4 normally sprays from nozzle 3.In the present embodiment, in normal value storage part 18, be set with for determined by imaginary A, B near the position of nozzle 3 with away from the position of nozzle 3, for position and the liquid width of cloth of liquid material 4, judge respectively the threshold value that liquid material 4 normally sprays from each nozzle 3 of ink gun 2.

In addition ia, detection unit 19 judge whether the calculated value that is calculated by calculating part 17 is arranged in the scope by the normal value of the threshold value defined that is stored in normal value storage part 18.In the present embodiment, the unusual judgement of ejection be judge by piece A, B determine near the position of nozzle 3 and whether be arranged in the scope of the threshold value that is stored in normal value storage part 18 away from each calculated value of the position of nozzle 3.

Thus, judge that whether liquid material 4 normally sprays from each nozzle 3 of ink gun 2, will be in each nozzle 3, near the position A of nozzle 3 with away from two places of the position B of nozzle 3, the calculated value of the position of liquid material 4 and the liquid width of cloth is positioned in the situation of scope of normal value, and the ejection of nozzle 3 is judged to be normally to be carried out.In addition, the ejection of liquid material is judged to be unusually.

For example, as shown in figure 10 nozzle N1, N2, N4, N7, N9, at liquid material 4 normally in the situation of nozzle 3 ejection of ink gun 2, near the position A of nozzle 3 with away from two places of the position B of nozzle 3, the position of liquid material 4 and the liquid width of cloth converge in the scope of ejection normal condition, therefore, the ejection from nozzle 3 can be judged as normally.

Such as nozzle N3, in the situation that liquid material 4 is not ejected, near the position A of nozzle 3 with away from two places of the position B of nozzle 3, the position of liquid material 4 and the liquid width of cloth are not determined, thereby it is bad to be judged as ejection.In addition, such as nozzle N5 or N6, in the situation of the crooked flight of drop, at the B place, position away from nozzle 3, the scope that the position deviation of liquid material 4 obtains in normal situation, therefore by the position of liquid material 4 can be judged as spray bad.In addition, as shown in figure 12,, under crooked situation is flown in the shooting direction generation of camera 5, at the B place, position away from nozzle 3, because the focal shift of camera 5, so shown in dotted line f, the liquid material 4 of shooting becomes large.Therefore, even produce in the crooked situation of flight in the shooting direction of camera 5, can judge that by the width of liquid material 4 ejection is bad.

In addition, such as nozzle N8, liquid material 4 by unusual situation about spraying widely under, near the position A of nozzle 3 with away from two places of the position B of nozzle 3, liquid material 4 is taken significantly, it is bad therefore to utilize the liquid width of cloth of liquid material 4 to be judged as ejection.In addition, such as nozzle 10, at (drop little situation under) in the few situation of the ejection material of liquid material 4, because the liquid width of cloth of liquid material 4 more carefully taken, therefore to be judged as ejection bad for the liquid width of cloth by liquid material 4.

Bad each of above-mentioned ejection judge can be in can judging the suitable scope that liquid material 4 each nozzle 3 from ink gun 2 is normally sprayed setting threshold, and judge that the position of the liquid material 4 that calculates and the liquid width of cloth are whether in this threshold value.

So, image after this ejection abnormal detector 1 is taken based on the liquid material 4 that the nozzle 3 from ink gun 2 is sprayed, in the plural at least position of the emission direction of nozzle 3, calculate position and the liquid width of cloth of liquid material 4, thereby the ejection that detects nozzle 3 is unusual.Exist in the unusual situation of ejection at nozzle, it is poor significantly to obtain in the characteristic quantity of the position of liquid material or the liquid width of cloth.Thus, the unusual detection of the ejection of nozzle can be carried out easily and positively.

In addition, this ejection abnormal detector 1 sets light source 6 as follows, that is: with respect to the liquid material 4 from nozzle 3 ejections, opposition side and camera 5 at camera 5 are opposed, and from the view finder 5a of the direct light 11 not incident cameras 5 of light source 6 projection, take thereby make by the view finder 5a from the refract light 12 incident cameras 5 of liquid material 4 refractions of nozzle 3 ejections.Thus, can suppress the undesirable conditions such as halation, thereby can more brightly liquid material 4 be taken, and can calculate more accurately position and the liquid width of cloth of liquid material 4, thereby the unusual accuracy of detection of ejection of ejection abnormal detector 1 is improved.

And, if this ejection abnormal detector 1 shines light from light source 6 moments ground, and taken by camera 5, then as shown in figure 11, can take from the liquid material 4 of nozzle 3 ejections with the state of drop.And, if based on the image of under the state of drop, taking, measure the interval D of drop, then can measure the spouting velocity of nozzle 3.Thereby this ejection abnormal detector 1 can judge whether liquid material 4 sprays from nozzle 3 with normal spouting velocity.

More than, the ejection abnormal detector of the described ink gun of one embodiment of the present invention has been described, but the ejection abnormal detector of ink gun of the present invention is not limited to above-mentioned embodiment.

For example, in the above-described embodiment, for the image of the liquid material after taking, determine that the method for the position more than at least two places on the emission direction of nozzle is not limited to above-mentioned embodiment, can adopt the whole bag of tricks.For the position of the emission direction of the nozzle of the position of calculating liquid material and the liquid width of cloth, as long as can judge the crooked undesirable condition that waits of flight, also can suitably select the position of the emission direction of offset nozzle.

[the 3rd embodiment]

Figure 13～Figure 17 illustration the 3rd embodiment of the present invention.The described membrane formation device of the 3rd embodiment as shown in figure 13, possesses: ink gun 10, thickness configuration part 20, thickness data store 30, deep or light ranking score Butut generating unit 40 and film forming portion 50.

In this embodiment, ink gun 10 is that the line style ink nozzle 12 that a row ground is equipped with the nozzle 11 of ejection liquid material is formed with the ink nozzle unit 13 that mode that the half spacing 1/2Pn of injector spacing Pn measures sets side by side that reciprocally staggers, the position of nozzle 11, and be staggered ground, mutual staggered positions differently along the direction that is equipped with the nozzle 11 of line style ink nozzle 12, in series set this ink nozzle unit 13.

This ink gun 10 is equipped with the line style ink nozzle 12 of the nozzle 11 of ejection liquid material in the mode of half amount of separation of the injector spacing that staggered mutually in the position of nozzle 11 with setting side by side row.Therefore, as ink gun 10 integral body, compare with physical boundaries that can the constriction injector spacing, further the constriction injector spacing.And then by regulating the ejection timing of each line style ink nozzle 12, the adjustment of dot spacing can be carried out simply, adjusts thereby can rough cover to apply from meticulous being coated to simply.In addition, but the ink nozzle unit 13 of this ink gun 10 has the width that coverlay forms peak width, thereby can by scanning once, apply liquid material in film forms regional whole zone.

In the present embodiment, each line style ink nozzle 12 of ink gun 10 is supplied with liquid material from liquid material supply unit (omitting diagram) to each nozzle respectively, and the ejection command signal based on control device (omitting diagram) produces sprays liquid material in the moment of regulation.In addition, although diagram is omitted, the mechanical vibration that each nozzle 11 adopts by piezoelectric vibration device is from the pressure controling mode of aperture (orifice) ejection drop.Among Figure 13 15 is the Jet control sections that send the signal of telecommunication to each piezoelectric vibration device of ink gun 10.

And in the present invention, the ejection mode of the structure of ink gun and each nozzle of ink gun is not limited to above-mentioned embodiment.For example, in the above-described embodiment, ink gun has in parallel and in series is equipped with the structure of a plurality of line style ink nozzles, but the line style ink nozzle can be one, even and using in a plurality of situations, also can set by the configuration beyond above-mentioned.

In the membrane formation device that has used this ink gun 10, thickness T is determined by solid component concentration S and five key elements of ejection pattern Vp of injector spacing Pn, dot spacing Pd, ejection drop amount Vj, liquid material.

Thickness T for example, mathematical expression described as follows (formula 1) can multiply by the thickness coefficient by the total ejection drop amount in unit are (10mm angle) and calculate.

T=(10 ÷ Pn) * (10 ÷ Pd) * Vj * Vp * S * M ... (formula 1)

In above-mentioned formula 1, T is thickness

Pn is injector spacing (μ m), and Pd is dot spacing (μ m), and Vj is ejection ink droplet quantity (pL), and Vp is ejection pattern proportion (%), and S is solid component concentration (%), and M is the thickness coefficient

Wherein, injector spacing Pn is the interval of the nozzle of ink gun 10.Injector spacing Pn is according to the mechanical structure of ink gun 10, except situations such as exchange ink guns 10, can not change them.

Dot spacing Pd is the interval that is ejected into the drop on the coated thing.Because dot spacing Pd is according to the ejection timing of ejecting head 10, therefore, can with the direction that relatively moves (direct of travel) change of coated thing, but can't change at its orthogonal direction (width).

Ejection drop amount Vj is the liquid measure from the drop of nozzle 11 ejections.Ejection drop amount Vj is determined by voltage and the pulse width of the ejection command signal (signal of telecommunication) that sends to line style ink nozzle 12, but each line style ink nozzle 12 has respectively intrinsic ejection characteristic in the relation of ejection command signal (voltage and pulse width) and ejection drop amount Vj.Therefore, even send the ejection command signal of identical voltage and pulse width, from the drop amount of each line style ink nozzle 12 ejection, also have some uneven.In addition, in the present embodiment, the pulse width that sends to the ejection command signal of line style ink nozzle 12 always is made as constant, adjusts ejection drop amount Vj by changing voltage.

The solid component concentration S of liquid material is the ratio of the solid state component of expression in the liquid material, be expression dry after as film and the concentration of residual solid state component.Solid component concentration S is the intrinsic characteristic of liquid material, after filling liquid material, and can't be easily with its change.

Ejection pattern Vp is the pattern from the some position of ink gun 10 ejection liquid materials.Ejection pattern Vp can electric control from the nozzle 11 of ink gun 10 ejection liquid materials, change is than being easier to.In the present embodiment, ejection pattern Vp adopts the uniform greyscale pattern in ejection position (greypattern) of liquid material.Be described in detail about the greyscale pattern back.

Determine in five key elements of thickness T that injector spacing Pn is not easy to change, dot spacing Pd can change to a certain extent, thereby can change whole thickness T, but can't change partly thickness T.In addition, the solid component concentration S of liquid material is the inherent characteristic of the liquid material after an end is filled, and therefore is difficult to easily change.

The described membrane formation device 1 of present embodiment is at first selected a certain ejection pattern Vp, because injector spacing Pn and solid component concentration S fix, and with its numerical value substitution mathematical expression 1, and the thickness substitution thickness T of the film that wish is formed.Thus, can try to achieve with ejection drop amount Vj and dot spacing Pd be divided by (Vj/Pd).Relation sprays the relation that drop amount Vj and dot spacing Pd have ratio thus.And, when spraying liquid material with the ejection pattern Vp that selects, adjust ejection drop amount Vj and dot spacing Pd, to cause aptly the fusion of drop.

That is, ejection drop amount Vj and dot spacing Pd have the relation of ratio, if increase ejection drop amount Vj, then dot spacing Pd becomes large.If too increase ejection drop amount Vj and dot spacing Pd, then be formed on the fusion that produces drop on the injector spacing direction, but on the direction of dot spacing, do not produce the state of the fusion of drop.In addition, if too reduce to spray drop amount Vj and dot spacing Pd, then be formed on the fusion that produces drop on the dot spacing direction, but on the direction of injector spacing, do not produce the state of the fusion of drop.The adjustment of ejection drop amount Vj and dot spacing Pd is so that adjust in both fusions of generation drop of the direction of the direction of dot spacing and injector spacing.

In addition, spraying in the constant situation of drop amount Vj and dot spacing Pd, if spray liquid material with the greyscale pattern of deeper degree, then can increase thickness, if spray liquid material with the greyscale pattern of more shallow degree, then can reduce thickness.This membrane formation device 1 uses described method of adjustment, be ejected into the ejection pattern that film forms the liquid material in zone by the unit are correction, and be adjusted at the thickness of the film that forms on the coated thing by unit are, thereby form the film of even thickness at coated thing.

Be the described method of adjustment of specific implementation, this membrane formation device 1 possesses thickness configuration part 20, thickness data store 30, deep or light ranking score Butut generating unit 40 and film forming portion 50.In the present embodiment, thickness configuration part 20, thickness data store 30, deep or light ranking score Butut generating unit 40 and film forming portion 50 are respectively by computer with utilize the program of each function of computer realization to come specific implementation.

Thickness configuration part 20 is set in the thickness of the film that forms on the coated thing.In the present embodiment, utilize computer to be set in the thickness of the film that forms on the coated thing, the thickness of setting is stored in the storage part of computer (for example memory).The operation that is set in the thickness of the film that forms on the coated thing is called thickness sets operation.

Thickness data store 30 is considered the ejection characteristic of ink gun 10, adjust ejection drop amount and dot spacing, and, with the greyscale pattern of the deep or light grade at random selected, film is formed the zone try equably to spray liquid material, and storage is sprayed the thickness of the film that forms by examination.

In the present embodiment, thickness data store 30 also comprises: ejection characteristic storage part 31, ejection drop amount adjustment part 32, greyscale pattern storage part 33 and examination ejection control part 34.

Ejection characteristic storage part 31 stores the ejection characteristic of ink gun 10.In the present embodiment, in the line style ink nozzle 12 of each ink gun 10, the ejection voltage of command signal and the relation of pulse width and ejection drop amount Vj have intrinsic characteristic, but the pulse width that will spray command signal always is made as constant, by changing voltage, adjust ejection drop amount Vj.Therefore, ejection characteristic storage part 31 is stored in the voltage and the relation that sprays drop amount Vj under the described pulse width values.

Ejection drop amount adjustment part 32 possesses the function that ejection drop amount and the dot spacing of ink gun 10 are adjusted.The adjustment that sprays the drop amount at first possesses the ejection characteristic that consideration is stored in the ink gun in the ejection characteristic storage part 31, and voltage and the pulse width of control ejection command signal, to spray the function of the ejection drop amount Vj that stipulates.In the present embodiment, always be made as the pulse width of ejection command signal constant, by changing voltage, adjust ejection drop amount Vj, so ejection drop amount adjustment part 32 is based on the voltage and the relation that sprays drop amount Vj that are stored in the ejection characteristic storage part 31, the voltage of control ejection command signal is adjusted ejection drop amount, so that the ejection drop amount Vj of regulation is ejected.

Next, ejection drop amount Vj and dot spacing Pd are adjusted in ejection drop amount adjustment part 32, so that in mathematical expression (formula 1), be formed on the greyscale pattern of selecting in the examination ejection operation described later about ejection pattern Vp, and the fusion that produces drop two sides of the direction of the direction of dot spacing, injector spacing.

Greyscale pattern storage part 33 is by the greyscale pattern of the liquid material of deep or light class stores ejection unit are.

Greyscale pattern is the pattern (the ejection pattern of liquid material) of the drop of ejection per unit area.For example, from all nozzles 11 of ink gun 10, spray the ejection pattern of liquid material as the greyscale pattern of deep or light grade 100% take whole dot spacings.

For example, as shown in figure 14, with the some position that can spray liquid material by the injector spacing Pn1 of regulation and dot spacing Pd1 clathrate the situation (in figure, the round d1 of solid line and the round d2 of dotted line represent respectively to spray the some position of liquid material) that sets greyscale pattern is described.And the round d1 of solid line is positioned at the some position of the odd number of injector spacing direction in the odd column of dot spacing direction, in the even column of dot spacing direction, be positioned at the some position of the even number of injector spacing direction.In addition, the round d2 of dotted line is positioned at the some position of the even number of injector spacing direction in the odd column of dot spacing direction, in the even column of dot spacing direction, be positioned at the some position of the odd number of injector spacing direction.

Ejection pattern at all some position ejection liquid materials that can spray liquid material is called deep or light grade 100%.The greyscale pattern of deep or light grade 100% in the case as shown in figure 15, is that both the some position of the round d2 of the round d1 of the solid line in Figure 14 and dotted line has sprayed liquid material.And 100% ejection herein correctly also may be interpreted as and is not comprised in " gray scale " this concept, but in the present invention, for simplicity, the ejection of described state is called the greyscale pattern of deep or light grade 100%.

Next, as shown in figure 16,50% greyscale pattern is that the some position of the round d1 of the only solid line in Figure 14 has sprayed liquid material.Its result, 50% greyscale pattern is compared with the greyscale pattern of deep or light grade 100%, is the some position of ejection liquid material is removed 50% and form equably.

In the present embodiment, as shown in figure 13, use one in the mode of half amount of separation of the injector spacing that reciprocally staggered in the position of nozzle 11, with row be equipped with the ink nozzle unit 13 that the line style ink nozzle 12 of nozzle 11 sets side by side, therefore, about each ink nozzle unit 13, by a dot spacing amount ground ejection liquid material that the moment of line style ink nozzle 12 ejections of moment of the line style ink nozzle 12 ejection liquid materials of first row and secondary series is staggered respectively, can be with the greyscale pattern ejection liquid material of deep or light class 5 0%.

Although diagram is omitted, the greyscale pattern of deep or light grade 70% is similarly compared with the greyscale pattern of deep or light grade 100%, is the some position that liquid material is ejected, and removes equably 30% and form at the per unit face.In addition, the greyscale pattern of deep or light grade 30% is compared with the greyscale pattern of deep or light grade 100%, and the some position that liquid material is ejected removes 70% equably at per unit area.

In the present embodiment, greyscale pattern storage part 33 is stored respectively from deep or light grade 0% to 100%, and the some position greyscale pattern that remove equably at per unit area, any deep or light grade that similarly liquid material is ejected.And, greyscale pattern storage part 33 illustrations the storage storage part of the greyscale pattern of deep or light grade arbitrarily respectively, but be not limited thereto, for example, for deep or light grade arbitrarily, also can store the function of calculating and trying to achieve its corresponding greyscale pattern, possess the function of calculating and trying to achieve the greyscale pattern corresponding with each arbitrarily deep or light grade.

Next, examination ejection control part 34 is ejection drop amount Vj and the dot spacing Pd with the ink gun 10 after being adjusted by ejection drop amount adjustment part 32, and the greyscale pattern of the deep or light grade of selecting in the greyscale pattern with the arbitrarily deep or light grade from be stored in greyscale pattern storage part 33, control forms the examination ejection that the zone sprays liquid material equably to film.Spray control part 34 to the Jet control section 15 transmission ejection command signals of ink gun 10 from examination, and control ink gun 10, thereby spray liquid material with the greyscale pattern of regulation.The operation that to carry out this examination ejection is called examination ejection operation.

In the present embodiment, in the examination ejection, the thickness T based on being set by thickness configuration part 20 utilizes mathematical expression (formula 1), sets ejection drop amount Vj, dot spacing Pd and ejection pattern Vp (the deep or light grade of greyscale pattern).In the present embodiment, be the greyscale pattern with deep or light class 5 0%, and the thickness of being set by thickness configuration part 20 forms film, adjust ejection drop amount Vj and dot spacing Pd, and in the examination ejection, spray liquid material with the greyscale pattern of deep or light class 5 0%.

In the present embodiment, the injector spacing of each ink nozzle unit 13 is small, and ejection drop amount Vj and dot spacing Pd are adjusted in examination sprays the greyscale pattern with selected deep or light class 5 0%, the amount that can merge between the ink droplet after being ejected of adjacency.

Thus, in examination ejection operation, shown in Figure 17 (a), form the zone for film and can spray equably liquid material, the fusion of the drop after being ejected forms among the regional m at all films and similarly produces, and the thickness of liquid material forms uniform thickness for the time being.And, keep the state shown in Figure 17 (a), if liquid material is dry, then shown in Figure 17 (d), should form film with the thickness of being set by thickness configuration part 20.

But in fact, because dry surface generation from liquid material, therefore in dry run, shown in Figure 17 (b), thickness changes.And, forming the central portion m1 of regional m at film, thickness not too changes, but forms the circumference m2 (edge part and bight) of regional m at film, and thickness easily changes.In addition, the fusion of drop and dried thickness have following tendency, if that is: drop spray volume Vj, dot spacing Pd and ejection pattern Vp are identical, dry condition is identical, then produce fusion and the drying of roughly the same drop, form existing together mutually of regional m at film and form identical thickness.In the present embodiment, shown in Figure 17 (b), the circumference m2 that film forms regional m stretches out laterally from the edge e that film forms regional m in dry run.

The thickness of the film that the above-mentioned examination ejection of thickness data store 30 memory by using forms.In the present embodiment, thickness is measured and is stored by the zone corresponding with the unit are of greyscale pattern.In the case, the data of the thickness of thickness data store 30 are by forming the zone with respect to film, record the tables of data (data map) of thickness and consist of by the unit are of the greyscale pattern of ejection liquid material.

Next, deep or light ranking score Butut generating unit 40 is described.

Deep or light ranking score Butut generating unit 40 considers to spray in examination the thickness of the film that forms in the operation, for forming uniform film with the thickness that the thickness configuration part is set, presses the deep or light grade of the greyscale pattern of unit are correction ejection liquid material.

Particularly, possess the data based on the thickness in the examination ejection operation that is stored in the thickness data store 30, form the zone for film, by the unit are of greyscale pattern of ejection liquid material, generate the function of deep or light ranking score Butut of deep or light grade of the greyscale pattern of the liquid material of having set ejection.In the present embodiment, deep or light ranking score Butut at shading ranking score Butut generates in the operation, consideration is in the deep or light grade of the greyscale pattern in examination ejection stage, and the thickness of the per unit area in the examination ejection operation, changes the deep or light grade of greyscale pattern of this unit are.

For example, shown in Figure 17 (c), the thickness of the film that forms in examination ejection operation is thicker than the thickness part q (with reference to Figure 17 (b)) that is set by thickness configuration part 20 the deep or light grade of the greyscale pattern of this unit are is changed into shallow grade.The thickness of the film that forms in this external examination ejection operation is thinner than the thickness part r (with reference to Figure 17 (b)) that is set by thickness configuration part 20, and the deep or light grade of the greyscale pattern of this unit are is changed into dark grade.The change degree of deep or light grade is adjusted with the degree of the difference of the thickness of setting in thickness configuration part 20 by the thickness that is stored in the thickness data store 30.Described adjustment can be by calculating, and perhaps also can adjust according to the data based on to a certain degree experience.To in deep or light ranking score Butut generating unit 40, the operation of shading ranking score Butut be called deep or light ranking score Butut generation operation.And in the present embodiment, shown in Figure 17 (b), the circumference m2 that film forms regional m stretches out laterally slightly from the edge e that film forms regional m in dry run.Therefore, in the operation of shading ranking score Butut, shown in Figure 17 (c), consider that circumference m2 that film forms regional m stretches out laterally slightly from the edge e that film forms regional m in the process of drying, thereby the outer rim that will spray the zone of liquid material is set in the slightly inboard of edge e.

In addition, in the present embodiment, in examination ejection operation, for the greyscale pattern with deep or light class 5 0% forms the film of the thickness of being set by thickness configuration part 20, adjust ejection drop amount and dot spacing, and with the greyscale pattern ejection liquid material of deep or light class 5 0%, so generate in the operation at deep or light ranking score Butut, with deep or light class 5 0% to dark direction, the also identical adjustment region of oriented shallow direction, the correction of deep or light grade is carried out easily.And, so, generate in the operation at deep or light ranking score Butut, need to be with the adjustment of deep or light grade namely to dark direction also to shallow direction adjustment, therefore, examination ejection operation is necessarily carried out the ejection of liquid material with the deep or light grade more shallow than 100% deep or light grade.

In addition, in the drying process, compare with the central portion m1 that film forms regional m especially, the thickness of circumference m2 (edge part and bight) easily changes.Therefore, the film that in examination ejection operation, forms, shown in Figure 17 (b), the thickness of central portion m1 that forms regional m at film is roughly even, produces poor tendency but have at circumference m2 (edge part and bight) thickness.Generate in the operation at deep or light ranking score Butut, be conceived to this tendency, shown in Figure 17 (c), the e central portion m1 that film forms regional m revises the deep or light grade of greyscale pattern equably, and circumference m2 is by the deep or light grade of unit are correction greyscale pattern.Thus, the operation that deep or light ranking score Butut generates operation can be saved, and the high efficiency that operates can be realized.

In addition, film form regional m circumference m2 since drop after merging dry run and the tendency of the tendency of the thickness that produces at edge part and the thickness that produces in the bight is not limited to edge part and bight separately, have roughly the same tendency.Generate in the operation at deep or light ranking score Butut, be conceived to this tendency, to copy to the result of a certain edge part after by the deep or light grade of unit are correction other edge part, the result of a certain bight after by the deep or light grade of unit are correction also be copied to other edge part.Thus, the operation that deep or light ranking score Butut generates operation can be further saved, and the high efficiency that operates can be further realized.

Next, film forming portion 50 possesses the deep or light ranking score Butut that generates based in described deep or light ranking score Butut generating unit 40, to coated thing ejection liquid material, thus the function of formation film.Film forming portion 50 is sent ejection instruction control signal to the Jet control section 15 of ink gun 10, and controls ink gun 10 based on the deep or light ranking score Butut that is generated by deep or light ranking score Butut generating unit 40, with the ejection liquid material.

Because in deep or light ranking score Butut generating unit 40, result based on examination ejection operation, correction is ejected into the deep or light grade of the greyscale pattern of the liquid material that is ejected thing, thereby form the film of even thickness with the thickness of in thickness configuration part 20, setting, so film forming portion 50 shown in Figure 17 (d), can form the film of even thickness.

More than, as the explanation of carrying out, this membrane formation device utilizes above-mentioned thickness configuration part 20, thickness data store 30, deep or light ranking score Butut generating unit 40, reaches film forming portion 50, can form the more uniform film of thickness.

In addition, this membrane formation device 1 also can as, examination ejection operation → deep or light ranking score Butut generates operation → film formation operation (secondary examination ejection operation) → deep or light ranking score Butut generation operation → film and forms operation (examination ejection operation for the third time) ..., repeat for several times deep or light ranking score Butut and generate operation.So, to form the film that forms in the operation at film and regard the film that in examination ejection operation, forms as, again carry out deep or light ranking score Butut and generate operation, and will form the film that forms in the operation at film and regard the film that in examination ejection operation, forms as, further carry out deep or light ranking score Butut and generate operation, thereby generate operation by repeating for several times deep or light ranking score Butut, can form to very high degree of precision the film of even thickness.

In addition, in the situation of the indoor manufacturing film constant such as environment such as toilets, the fusion of drop tendency is also constant, and the drying condition of drying machine is also constant, if thereby the deep or light ranking score Butut after once generating high accuracy and adjusting, then utilize sustainably this deep or light ranking score Butut in the volume production stage.Thus, can produce accurately the film of even thickness in batches.

More than, the film formation method in the one embodiment of the present invention and membrane formation device are illustrated, but the invention is not restricted to above-mentioned embodiment.

Also have, in Figure 13 in the illustrative ink gun 10, injector spacing is not only to surmount and can be made the physics limit that injector spacing narrows down and the meaning that injector spacing is narrowed down, and the position of the nozzle of the some position ejection of adjacency is between the some position of adjacency on the injector spacing direction, and the time difference of ejection liquid material is little.Therefore, suitably carry out the fusion of the drop between the some position of adjacency.Therefore this ink gun 10 has such characteristic, is one of preferred mode that adopts in the uniform membrane formation device of the present invention of film thickness difference that causes of the Thickness Variation in the dry run of wanting to make after the fusion of the fusion of drop and drop.

[the 4th embodiment]

Figure 18～Figure 25 is the figure of illustration the 4th embodiment of the present invention.In the 4th embodiment, the present invention is applicable to the oriented film coating device of the transparency carrier of liquid crystal indicator.As shown in figure 18, the film applying device has: will be as the fixing base station 71 that loads of transparency carrier 70 levels of coated thing and the printhead unit 72 that moves to the arrow A direction along the guide rail (omitting diagram) that is installed on this base station 71.Transparency carrier 72 utilizes known a plurality of clamp mechanism (the omitting diagram) level on the base station 72 to fix.Printhead unit 72 can utilize arbitrarily, and driving mechanism moves to the arrow A direction.Superior as the most suitable constant speed stability of driving mechanism, and do not have the linear motor mode of backlash fully.That is, be arranged at printhead unit 72 is installed on the line slideway of base station 72, and printhead unit 72 is slided freely, utilize a plurality of magnet of the opposed faces that is attached to guide rail and printhead to consist of linear motors.As driving mechanism, in addition, for example, can use the tape drive mechanism of combination motor, pulley and toothed band or the screw rod driving mechanism of combination motor and screw rod.With regard to tape drive mechanism, establish the toothed band of ring-type at the left and right directions of Figure 18, this toothed band is wrapped in the pulley at two ends, the left and right sides.The part of toothed band and printhead unit 72 are linked, utilize servomotor etc. that either party's pulley forward or reverse is driven, make thus printhead unit 72 advance and retreat at left and right directions.With regard to the screw rod driving mechanism, set screw rod at Figure 18 left and right directions, utilize guide rail can slide freely, but will be screwed together in screw rod to glide direction as the part that can not center on the printhead unit 72 of central shaft rotation in the situation of central shaft observation, utilize the forward or reverse drivings such as servomotor, thus, make printhead unit 72 advance and retreat at left and right directions.

Be equipped with a plurality of printheads 73 at printhead unit 72.In Figure 18, schematically illustrating the state that only carries 7 printheads 73 with staggered, but the number of printhead 73 can be according to the width increase and decrease of transparency carrier 70.For example, be in the situation of 1500mm at the width of transparency carrier 70, the lift-launch number of printhead 73 is generally 40～50.The staggered configuration of printhead 73 is for fear of between the printhead 73 of adjacency, between the some film of coating liquid not too sky open.

Figure 19 is that expression is to the figure of the supplying tubing 13 of the coating liquid of printhead 73 or the recovery pipe arrangement 83 of coating liquid etc., piping system.In apparatus of the present invention, feed trough 12, supply pump 15 and accumulator tank 8 are disposed at the fixation side lower position of film applying device.Therefore, need to be to supplying tubing 13 and the recovery pipe arrangement 83 of printhead 73.If in printhead unit 72 residue of having living space, then feed trough 12, supply pump 15 and accumulator tank 8 are equipped on mobile side, are on the printhead unit 72, with supplying tubing 13 with reclaim pipe arrangement 83 and also be equipped on printhead unit 72 and also can.Because N ₂Supplying tubing 80 and atmosphere opening pipe arrangement 81 can not omit, therefore, and as the piping system between fixation side and the mobile side, with N ₂Supplying tubing 80 and atmosphere opening pipe arrangement 81 amount to two as subsistence level.The N of N2 supplying tubing 80 and fixation side ₂High-pressure gas container connects.Atmosphere opening pipe arrangement 81 is connected with solvent exhaust-gas treatment system in the factory.

Supplying tubing 13, recovery pipe arrangement 83, N ₂81 4 pipe arrangements of supplying tubing 80 and atmosphere opening pipe arrangement are contained in shared cable and protect in the linear chain (ケ one Block Le ベ ア) 82.Cable protect linear chain 82 with a side of the circular-arc warpage moving direction (direction of advance or direction of retreat) towards printhead unit 72.

Feed trough 12 is that the upper end is to the vertical jerrycan of atmosphere opening, its internal storage coating liquid.One end of supplying tubing 13 impregnated in the coating liquid of inside of feed trough 12.In the position near feed trough 12, to supplying tubing 13 supply pump 15 is installed.Send coating liquid with this supply pump 15 to supplying tubing 13.In the position of the close supply pump 15 in the downstream of supply pump 15, to supplying tubing 13 supply valves 14 are installed.

China ink groove 1 is closed, stores a kind of coating liquid.This China ink groove 1 is equipped on the position higher than feed trough 12 or accumulator tank 8, the level switch 16 that detects the coating liquid level and interior pressure is installed with pressure gauge 17.With its detection, make supply pump 15 operations in the situation below the height that the coating liquid level of level switch 16 in black groove 1 obtains stipulating, the coating liquid level in the black groove 1 is kept constant often.Interior pressure detects the pressure of black groove 1 with pressure gauge 17.

China ink groove 1 and N ₂Supplying tubing 80 is connected with the atmosphere opening pipe arrangement side by side and is connected.N ₂Supplying tubing 80 is used inert gas to pressurizations such as black groove 1 interior importing nitrogen, will be pressurised into authorized pressure in the black groove 1, promotes to fill to the coating liquid of printhead 73.The pressure of atmosphere opening pipe arrangement 81 in black groove 1 reaches in the situation more than the authorized pressure, emits unnecessary pressurization gas in atmosphere, will be maintained the pressure of regulation in the black groove 1.N ₂The upstream extremity of supplying tubing 80 is positioned at fixation side, is connected with inert gas source with pressurizations such as nitrogen baths.At N ₂The upstream side of supplying tubing 80 is equipped with blow off pressure adjuster 31, venting pressure gauge 32, venting valve 33 successively.The downstream of vent valve 33 is communicated with the inner and upper space of black groove 1 via a part and the groove valve 26 of pressure at right angle control pipe arrangement 29, the variable basigamy pipe 25 of horizontal pressure force.Pressure control pipe arrangement 29 is connected with the pars intermedia of changeable pressure basigamy pipe 25.The pars intermedia of pressure control pipe arrangement 29 and level are returned respectively end that pipe arrangement 34 is connected with the horizontal branch pipe arrangement and are connected.The other end that returns pipe arrangement 34 is connected with the upstream side of blow off pressure adjuster 31.Upstream side from blow off pressure adjuster 31 on the venting pipe arrangement 34 is equipped with atmosphere opening adjuster 34, atmosphere opening pressure gauge 36 and atmospheric open valve 37 successively.Atmosphere opening lens 35 are connected the pipe arrangement 34 that returns of the centre of pressure gauge 36 to be connected with secondary branch pipe arrangement 38 with atmosphere opening.This secondary branch pipe arrangement 38 is to be connected with atmosphere opening pipe arrangement 81 with branch pipe arrangement 39 shapes in parallel.Negative pressure pump 41 and negative pressure valve 42 are installed successively from the downstream on branch's pipe arrangement 39.Negative pressure pump 41 is controlled gas forced exhaust in the atmosphere opening pipe arrangement 81 in the pipe arrangement 29 with pressure.Changeable pressure basigamy pipe 25 is connected via the pars intermedia of by-passing valve 27 with bypass pipe arrangement 18a.

Supply with coating liquid via common liquor charging pipe arrangement 2 and indivedual liquor charging pipe arrangement 3 to each printhead 73 from black groove 1.Indivedual liquor charging pipe arrangements 3 from common liquor charging pipe arrangement 2 with branch uniformly-spaced.The end of indivedual liquor charging pipe arrangements 3 is connected with printhead 73 via deaerating mechanism 5.Each printhead 73 and deaerating mechanism 5 as shown in the figure, as separate component separate also can, integratedly also can.At the two ends of common liquor charging pipe arrangement 2, namely for the current upstream side of indivedual liquor charging pipe arrangements 3 of the upstream-most position of common liquor charging pipe arrangement 2 with for the current downstream of indivedual liquor charging pipe arrangements 3 of the downstream position of common liquor charging pipe arrangement 2, be equipped with liquor charging valve 7 and recovery valve 10.Recovery valve 10 is connected with recovery pipe arrangement 83 via reclaiming sensor 11.

Each printhead 73 is connected with indivedual flowing gas pipe arrangements 19 of erectting to vertical direction.The upper end of these indivedual flowing gas pipe arrangements 19 is gathered and is extended to above the liquid level of black groove 1, and 18a is connected with the horizontal bypass pipe arrangement.Bypass pipe arrangement 18a is in the high top position of the highest liquid level than black groove 1, and along continuous straight runs extends.The end of bypass stock 18a is connected with indivedual flowing gas pipe arrangements 19 of upstream, the lower end of bypass pipe arrangement 18a is via gas bleeder 23 and common gas pipe arrangement 18, with the upstream extremity that reclaims pipe arrangement 83, namely the link position for the recovery sensor 11 that reclaims pipe arrangement 83 is connected.

The indivedual flowing gas that are connected in the downstream of common liquor charging pipe arrangement 2 are connected with the lower end of liquor charging flowing gas pipe arrangement 20.The upper end of this liquor charging flowing gas pipe arrangement 20 confirms that via liquid filling sensor 21 is connected with the valve pipe arrangement 18a of the current upstream side of gas bleeder 23.

The present invention supplies with a common liquor charging pipe arrangement 2 that adopts sharing with pipe arrangement system as shown in figure 19 to the coating liquid of a plurality of printheads 73.That is, be not to printhead 73 coating liquids of supplying with in parallel, but series connection supply with, therefore considerably less to the number of pipe arrangement system that printhead 73 is supplied with and control appliance, simplify the structure.This also is to make of essential factor that the mode of the present invention of printhead 73 side shiftings can realize.

Between fixation side and mobile side, use cable to protect linear chain 82 from a party's feed fluid, gas, electric mechanism.This cable protects linear chain 82 and is supported for naturally with the state of the pipe arrangement that compiles flexibility, distribution class that warpage makes as the printhead unit 72 of mobile side mobile in the few situation of resistance freely.Cable protects linear chain 82 and for example is made of the pipe of the flat section of flexibility, and many distribution piping classes are accommodated by section within it.

But, as the film applying device of the transparency carrier 70 of one liquid crystal display cells of applicable object of the present invention, need in the device of high-precision mobile control, wishing to be contained in cable, to protect the radical of distribution piping class of linear chain as far as possible few.The cable that uses among the present invention protects linear chain 82 as mentioned above, and the pipe arrangement class between fixation side and the mobile side amounts to and only is 4, therefore, can realize simultaneously with the high precision movement control of printhead unit 72.

On the other hand, for as the distribution of the printhead 73 of the mobile side of film applying device in consideration method in the past, usually as Figure 20 (B) shown in, 73 configurations apply data signal lines 91, high-tension pulse and breast the tape 92 and power line 93 to printhead respectively with the form of wirning harness 95 from coating control part 94 with computer.But, in this case, needing to be contained in cable corresponding to the wirning harness 95 of the amount of the number of printhead 73 protects in the linear chain 82, therefore, whole width at transparency carrier 70 is arranged in the situation of a plurality of printheads 73, can not protect linear chain 82 interior collecting post live wire bundles 95 to cable.

Solve mechanism as this, shown in Figure 20 (A), configuration applies control part 94 near printhead 73, connects the control part 96 of this coating control part 94 and fixation side with a conveyer line 85 (for example, load mode is the differential mode of RS-422).Coating data or high-voltage pulse data communication device cross conveyer line 85 by serial transfer to applying control part 84.Be provided with serial ports at coating control part 94 and import the parallel port into and spread out of shift register (serial in parallel out shift register) type interposer, will apply data or high-voltage pulse data via described interposer to each printhead 73 transmission.Like this, utilize a conveyer line 85 data that are used for a plurality of printheads 73 that send in parallel, can significantly cut down thus cable and protect distribution number in the linear chain 82, therefore, this also is to make one of essential factor that the mode of the present invention of printhead 73 side shiftings can realize.

In addition, in Figure 20 (B), use the bleeder of " magnetic valve " or confirm that as the liquid filling of " detector " sensor utilizes multiconductor cable 97 to protect linear chain 82 and 94 wiring of coating control part by cable, but in apparatus of the present invention, shown in Figure 20 (A), bleeder 33 or liquid filling can be confirmed that sensor 21 is via omitting distributing system 90 (for example, CC connector or device network) and control part 96 wiring.Thus, bleeder 33 or liquid filling can be confirmed that it is a cable that the wiring lead of sensor 21 compile, can cut down cable and protect distribution radical in the linear chain 82.CC connector (Control﹠amp; Communication Link) or device network be simultaneously and the network system in field of the data processing of realization of High Speed control and information, carry out easily interconnecting between the control appliances such as PLC, calculator (PC), sensor, actuator.CC connector and device network are all as known by the technology of omitting distribution reduction distribution cost.

Other distributions, and the power line of the supply pump 15 of Figure 19 and negative pressure pump 41 as Figure 20 (A) (B) shown in, protect linear chain 82 directly and the fixation side wiring by cable.

As mentioned above, Figure 20 (A) and (B) as can be known relatively, as to mobile side feed fluid, gas or electric mechanism, the use cable protects linear chain, to be contained in the distribution radicals that cable protects in the linear chain 82 be Min. but in order to control accurately the movement of printhead 72, to make.In Figure 20 (B), if the number that sets of printhead 73 increases, then the radical of wirning harness 95 also is proportional to this and increases, and in fact can not realize the film applying device.To this, in Figure 20 (A), even the number that sets of printhead 73 increases, also wirning harness 95 is wired to the coating control part 94 that is positioned at mobile side and gets final product, do not need to increase and be contained in the distribution radical that cable protects linear chain 82.Thereby, many distributions of power supply relation in the situation of sharing not with the direct wiring of fixation side, but the distribution of absolute many data relationship can utilize serial ports to import the parallel port into to spread out of shift register on the radical, utilizing the high speed conveyer line to compile is one.

Even total radical of the electric wire of total radical of the pipe arrangement of Figure 19 and Figure 20 (A) is added up, also be fully to be contained in the total radical that cable protects linear chain 82, can realize possessing a plurality of printheads 73, and large-scale, can high precision movement the moveable printing head unit 72 of control.

The present invention as mentioned above, arrange a plurality of printheads 73 by utilizing high precision movement control to make at the whole width of coated thing G, with the amount of the length of the mobile coated thing G of the direction of described orientation quadrature successively, the whole surface of coated thing does not have the gap of film, thereby can form the good applicator surface that thickness does not have uneven uniform pressure fully.

Secondly, prevent about the swing of the liquid level of black groove 1, as shown in figure 21, the moving direction width H of black groove 1 is made as thin, and black groove 1 in, vertically to block the form that applies liquid level many baffle plates 100 are set in parallel to each other.And then the translational speed of control printhead unit is waved the little amplitude of liquid level of black groove 1.Specifically, the acceleration of control printhead unit when the long side direction of coated thing G begins mobile starting.Utilize two such countermeasures, the liquid level of black groove 1 is not swung, thereby do not produce bubble, can be with stable meniscus (meniscus) pressure, 73 supply with coating liquid from black groove 1 to printhead.Thus, stable from the coating liquid ejection of printhead 73, the even thickness that point-like is filmed.

Coating liquid is supplied with to printhead 73 by black groove 1 from the feed trough 12 of Figure 19, if but liquid swing in black groove 1, then the degassed degree of coating liquid lowers.In order to remedy this, need with small-sized deaerating mechanism 5 be installed on printhead 73 near.

By supplying with degassed coating liquid to printhead 73, can be from the stable coating liquid of printhead 73 ejections.

In the situation that black groove 1 or the printhead 73 of Figure 19 moves, if unstable, then unstable from the coating liquid ejection of printhead 73 as the meniscus pressure of the internal pressure of printhead 73.

Thereby, the meniscus pressure of the negative pressure pump 41 by Figure 19 (wishes that fluctuation pressure+5Pa is following) the accurately black groove 1 of control and printhead 73,, can make the coating liquid ejection of printhead 73 stable.

Secondly, the supply from black groove 1 to the coating liquid of printhead 73 is elaborated.Control about the storage capacity of the coating liquid in the black groove 1 utilizes the operation of supply pump 15, supplies with coating liquid by the supply valve 14 that is in out the valve state to black groove 1 from the feed trough 12 of storing jumbo coating liquid.In this case, the height of the liquid level of the coating liquid in the black groove 1 utilizes level switch 16 controls, therefore, will often be maintained the state of the coating liquid of storing ormal weight in the black groove 1.

Secondly, carrying in the situation of coating liquid to a plurality of printheads 73 from black groove 1, pressure is controlled bleeder 33 on the pipe arrangement 29 and the groove valve 26 on the changeable pressure basigamy pipe 25 with the gases such as upper space escort nitrogen of the state of the driving valve liquid level in the black groove 1, make to press liter in described.Under such state, gas bleeder 23 on liquor charging valve 7 on the common liquor charging pipe arrangement 2 and recovery valve 10 and the bypass pipe arrangement 18a (common gas pipe arrangement 18) is driven valve, the coating liquid in the black groove 1 is delivered to each printhead 73 by common liquor charging pipe arrangement 2 and each indivedual liquor charging pipe arrangements 3.At this moment, flow into bypass pipe arrangement 18a (common gas pipe arrangement 18) with the coexist gas of common liquor charging pipe arrangement 2 interior conveyings of coating liquid one by recovery valve 10, emit in atmosphere, and the gas in each printhead 73 flows into bypass pipe arrangement 18a by each flowing gas pipe arrangement 19, is released in the atmosphere by gas bleeder 23.

Then, by continuous conveying coating liquid, fill coating liquid to each printhead 73, but this time inscribe because under the existence of the bypass pipe arrangement 18a of common gas pipe arrangement 18, the interior pressure of each printhead 73 is homogenized, therefore, coating liquid is filled in each printhead 37 equably.Also have, coating liquid from common liquor charging pipe arrangement 2 by recovery valve 10 arrive reclaim sensors 11 the time inscribe, recovery valve is closed.And then, liquid filling confirm sensor 21 detect coating liquid in liquor charging flows pipe arrangement 20, rise to assigned position the time inscribe, close gas vent valve 23, and arrive the nozzle of each printhead 73 and inscribe when dripping at the coating liquid that is filled in each printhead 73, close vent valve 33 and liquor charging valve 7, finish thus the liquor charging action from black groove 1 to each printhead 73.In this case, the China ink liquid level position of groove 1 and liquid filling confirm that the setting position of sensor 21 is set as same or sustained height position roughly, therefore, becoming coating liquid in each indivedual flowing gas pipe arrangement 19 rises to liquid filling and confirms the same or same height and position roughly of the setting position of sensor 21.

This time inscribe, the inside of each printhead 73 and black groove 1 becomes pressurized state, therefore, at first opens atmospheric open valve 37, makes and presses to atmospheric pressure state in these.In this case, atmosphere opening adjuster 35 is emitted nitrogen by secondary branch pipe arrangement 38 often with 0.1kPa in atmosphere, makes not adverse current of atmosphere, and therefore, secondary branch pipe arrangement 38 is in roughly atmospheric pressure state, is atmospheric pressure state by atmospheric open valve 37 decompressions.Then, close atmospheric open valve 37, and open negative pressure valve 42, groove valve 26, by-passing valve 27 and liquor charging valve 7, utilize thus the action of negative pressure pump 41, negative pressure with the internal drop of each printhead 73 is extremely stipulated forms the state that can suitably spray from the nozzle of printhead 73 coating liquid thus.This time inscribe, coating liquids in each printhead 73 are subject to acting on the negative pressure of the upper space of the liquid level in the black groove 1, and act on the impact of the negative pressure of bypass pipe arrangement 18a, thereby, for the coating liquid in these each printheads 73, the effect that negative pressure is even and response is good and stable.

Claims (12)

1. film applying device, it utilizes ink-jet printer to form the film of coating liquid on coated thing surface, it is characterized in that possessing:

The printhead unit that on described coated thing surface, can move along first direction;

For described printhead unit, with the direction of described first direction quadrature on, on whole application width, a plurality of printheads of installing continuously,

Mobile side identical with described printhead has the coating control part that the coating state of a plurality of printheads is controlled, and,

Be connected and fixed the control part of side and the coating control part of described mobile side by conveyer line.

2. film applying device according to claim 1 is characterized in that,

When the length with coated thing is made as L, when the width of printhead was made as P, the length of the first direction of described film applying device was in fact in the scope of L+2P.

3. film applying device according to claim 1 is characterized in that,

Lower position in fixation side sets feed trough, supply pump and the accumulator tank that coating liquid is used, set the black groove that coating liquid is used in the mobile side identical with printhead, the China ink groove is equipped on than feed trough or the high position of accumulator tank, connect successively feed trough, supply pump and black groove by the supplying tubing with flexibility, and connect described printhead and accumulator tank by the recovery pipe arrangement with flexibility.

4. film applying device according to claim 3 is characterized in that,

To send the conveyer line that many holding wires that apply data are gathered in a serial transfer to printhead, and the end at conveyer line connects the shift register type interposer that serial input-parallel is exported, and from described interposer to each printhead dispensing coating data.

5. film applying device according to claim 1 is characterized in that,

The black groove that will accumulate the coating liquid that printhead uses is equipped on printhead unit, and, on the coating liquid level in described black groove, with the direction of described first direction quadrature on, erect and be provided with baffle plate.

6. film applying device according to claim 1 is characterized in that,

The a plurality of independent liquor charging pipe arrangement of the coating liquid that is communicated with a plurality of printheads respectively being supplied with usefulness is connected in the common liquor charging pipe arrangement that is communicated with a black groove that accumulates a kind of coating liquid side by side, but and will be connected in the independent gas pipe arrangement of each connecting portions of described each common liquor charging pipe arrangement and a plurality of independent liquor charging pipe arrangements or each printhead or the gas communication that they respectively are communicated with between the two can be to atmosphere opening or the common gas pipe arrangement of closing.

7. film applying device according to claim 6 is characterized in that,

Make gas be discharged to described common gas pipe arrangement near the connecting portion of the independent gas pipe arrangement of described common liquor charging pipe arrangement and downstream or its.

8. film applying device according to claim 7 is characterized in that,

Connect the negative pressure pipe that is communicated with negative pressure source at described common gas pipe arrangement.

9. film applying device according to claim 8 is characterized in that,

Described common gas pipe arrangement has the bypass pipe arrangement that is communicated with described negative pressure pipe, and separates described each the independent gas pipe arrangement of predetermined distance ground connection at this bypass pipe arrangement.

10. film applying device according to claim 6 is characterized in that,

Be connected with force feed in the inner space of described black groove from the pressed gas supplying tubing of the pressed gas of pneumatic supply.

11. film applying device according to claim 6 is characterized in that,

Described common gas pipe arrangement extends at the top position of the liquid level of described black groove along continuous straight runs, and described each independent gas pipe arrangement extends downwards from this common liquor charging pipe arrangement, simultaneously, described common liquor charging pipe arrangement is positioned at the lower position of described common gas pipe arrangement, and in the extension of the top position of described each printhead along continuous straight runs, and described each independent liquor charging pipe arrangement extends downwards from this common liquor charging pipe arrangement.

12. a film coating method, it is to utilize ink-jet printer to form the method for the film of coating liquid on coated thing surface, it is characterized in that,

The printhead unit that use can be moved along first direction on described coated thing surface, with for described printhead unit with the direction of described first direction quadrature on, a plurality of printheads of on whole application width, installing continuously, make described a plurality of printhead side by side mobile on first direction, thereby once finish coating

Mobile side identical with described printhead has the coating control part that the coating state of a plurality of printheads is controlled, and,

Be connected and fixed the control part of side and the coating control part of described mobile side by conveyer line.

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