CN101741001B - DC (direct current) discharge slat CO2 laser with pulsed preionization - Google Patents
DC (direct current) discharge slat CO2 laser with pulsed preionization Download PDFInfo
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- CN101741001B CN101741001B CN2008102266790A CN200810226679A CN101741001B CN 101741001 B CN101741001 B CN 101741001B CN 2008102266790 A CN2008102266790 A CN 2008102266790A CN 200810226679 A CN200810226679 A CN 200810226679A CN 101741001 B CN101741001 B CN 101741001B
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Abstract
The invention provides a DC (direct current) discharge slat CO2 laser with pulsed preionization, which relates to laser technologies. A laser discharge area is formed in such a way that an upper metal flat plate side wall, a lower metal flat plate side wall, a left long strip-shaped metal main discharge anode and a right long strip-shaped metal main discharge cathode are enclosed; the inside of the discharge area is axially provided with at least one laser resonator; the two metal flat plate side walls are provided with cooling baths in which cooling liquid is filled; insulating layers are closely coated on the internal surfaces of the two metal flat plate side walls; the two metal flat plate side walls and the main discharge anode are electrically connected and grounded; the laser discharge area also comprises a preionized pulsed power supply and two fast high-voltage isolating diodes; the output end of the preionized pulsed power supply is electrically connected with the main discharge cathode and the input ends of the two isolating diodes; the input end of a main discharge DC power supply is electrically connected with the output end of one isolating diode; and the output end of the main discharge DC power supply, the input end of the preionized pulsed power supply and the output end of the other isolating diode are grounded. The invention has the advantages of favorable discharge stability, capability of operation in a pulse high repetition rate mode or a continuous mode, large output power, miniaturization and high efficiency.
Description
Technical field
The present invention relates to the laser technique field, particularly relate to a kind of diffusion cooling type direct-current discharge slat CO 2 laser that adopts preionization technique.
Background technology
CO
2Laser has important use in industrial processes and military affairs.CO just at present
2The period of the develop rapidly of laser application.For example, the demand in the every year of middle low power laser reaches tens thousand of aspect industrial processes; The above laser of multikilowatt has very big demand in application such as laser cutting, welding.Existing laser has polytype, and its pluses and minuses are respectively arranged.CO slab
2Laser utilizes large tracts of land diffusion cooling principle, and its power output has the advantage of " area amplification ".With common straight tube longitudinal discharge diffusion cooling CO
2Laser is compared, and power output can improve significantly.On the other hand, with fast axial flow type CO
2Laser and high repetition frequency TEA CO
2Laser is compared, and what slab laser adopted is the diffusion type of cooling, has saved heavy blower fan circulating cooling system, and this helps the miniaturization of laser, has an enormous advantage in actual use and necessity.The diffusion cooling CO slab of RF excited
2Laser has obtained widely to use in medium and small application, and the trend to high-power popularization is arranged further.Its reason is that rf discharge excitation has the positive impedance characteristic, and discharge evenly is difficult for the starting the arc.And continuous current excitation has negative resistance character, and discharge can not be diffused into whole region of discharge in the broad-area electrode discharge, is very easy to shrink the starting the arc.So radio-frequency technique makes area amplify notion and is achieved.Though in current diffusion cooling CO slab
2In the development of laser, the RF excited technology has accounted for leading position, but also there is certain shortcoming the RF excited source in itself: the high-power RF power volume is big, further development has technical difficulty, and need effective biological shield, pulse function mode in addition has certain difficulty, is difficult to produce high power pulsed laser.These increase the operating cost of laser and complexity.
Summary of the invention
The objective of the invention is to propose a kind of direct-current discharge slat CO 2 laser of impulse preionization, overcome the problem that the lath direct-current discharge must carry out the transition to arc light, adopt the mode of non-self-maintained discharge, utilize the impulse preionization discharge to cause and the control main discharge, reach the effect of even lath.The direct-current discharge slat CO 2 laser of this impulse preionization adopts direct-current discharge to be because DC power supply is made easily, and is with low cost, the high power DC radiationless generation of discharging; Direct-current discharge can spark by electric capacity and discharge big pulse energy in addition, thereby obtains highpowerpulse output.
For achieving the above object, technical solution of the present invention is:
A kind of DC (direct current) discharge slat CO 2 laser with pulsed preionization comprises two metal flat plate side walls, insulating barrier, main discharge anode, negative electrode, laserresonator, main discharge DC power supply; Region of discharge is formed by upper and lower metal flat plate side walls and left and right strip master metal discharge anode and negative electrode sealing, and at least one laserresonator axially is set in the region of discharge; Two metal flat plate side walls inside are provided with cooling bath, and cooling fluid is arranged in the cooling bath; Each closely is connected with insulating barrier two metal flat plate side walls inner surfaces; Two metal flat plate side walls link to each other and ground connection with main discharge anode electricity; It also comprises the preionization pulse power, two isolating diodes, preionization pulse power output links to each other with main discharge negative electrode, two isolating diode inputs electricity, the main discharge dc supply input links to each other main discharge dc power output end, preionization pulse power input and another isolating diode output head grounding with isolating diode output electricity.
Described DC (direct current) discharge slat CO 2 laser with pulsed preionization, its described laser region of discharge, the distance W between main discharge anode and the negative electrode is a width, and the gap h between two metal flat plate side walls is a height, and the ratio of width to height W/h is between 2～30.
Described DC (direct current) discharge slat CO 2 laser with pulsed preionization, its described insulating layer material is enamel or aluminium oxide.
Described DC (direct current) discharge slat CO 2 laser with pulsed preionization, its described laserresonator is unsteady cavity or stable cavity.
Described DC (direct current) discharge slat CO 2 laser with pulsed preionization, its described preionization pulse power, for the thyratron pulse power, pulse switch power supply, the thyristor pulse power wherein any.
Described DC (direct current) discharge slat CO 2 laser with pulsed preionization, its described main discharge DC power supply comprises a single capacitor.
Described DC (direct current) discharge slat CO 2 laser with pulsed preionization, its described main discharge DC power supply comprises a PFN Discharge circuit.
Described DC (direct current) discharge slat CO 2 laser with pulsed preionization, its described isolating diode is for quick high-pressure is isolated diode.
Described DC (direct current) discharge slat CO 2 laser with pulsed preionization, its described insulating barrier, thickness are between 200 μ m～800 μ m.
Described DC (direct current) discharge slat CO 2 laser with pulsed preionization, it exports laser continuously, laser pulse repetition frequency from pulse to 100kHz.
DC (direct current) discharge slat CO 2 laser with pulsed preionization of the present invention adopts diffusion cooling and non-self-maintained discharge mode, it is big to have power output, miniaturization, high-power advantage, and can satisfy simultaneously use in to the needs of high impulse peak power and high-average power.Not only be applicable to carbon dioxide laser but also be applicable to multiple gases lasers such as carbon monoxide, in laser processing, laser acquisition, laser medicine, laser radar, fields such as photochemistry have wide practical use.
Description of drawings
Fig. 1 is a DC (direct current) discharge slat CO 2 laser with pulsed preionization schematic diagram of the present invention;
Fig. 2 is the first embodiment of the present invention and the second embodiment schematic diagram;
Fig. 3 is the schematic diagram of the third embodiment of the present invention.
Embodiment
For further specifying feature of the present invention and structure, the present invention is described in detail below in conjunction with accompanying drawing.
See also Fig. 1, be DC (direct current) discharge slat CO 2 laser with pulsed preionization of the present invention, comprise metal flat plate side walls 1 and 2, insulating barrier 3 and 4, main discharge anode 5, main discharge negative electrode 6, laserresonator 7, main discharge DC power supply 8, the preionization pulse power 9, isolating diode 10 and 11.Region of discharge by metal flat plate side walls 1 and 2 and left and right two long- bar metal electrodes 5 and 6 the sealing form.Metal flat plate side walls inside is processed with cooling bath, passes to cooling fluid, and the surface closely is attached with the insulating barrier 3 and 4 of high heat conductance, and insulating layer material is enamel or aluminium oxide.The width of region of discharge is " the ratio of width to height " that the ratio W/h of distance W between main discharge anode 5 and the negative electrode 6 and the gap h between dull and stereotyped sidewall 1 and 2 is defined as the laser region of discharge.The ratio of width to height can change between 2 to 30.The heat that produces in DC pulse discharge or continuous discharge can be diffused into tube wall rapidly, and the insulating barrier by high heat conductance propagates into metal flat plate side walls 1 and 2, take away by cooling fluid again, and be to be " diffusion cooling " mode.Because insulating barrier very thin (being generally 200 μ m-800 μ m), and close attachment is in dull and stereotyped inside surface of side wall, so laser is cooled off fully.Laserresonator 7 can be unsteady cavity or stable cavity.
Two isolating diodes 10,11 are isolated diode for quick high-pressure.
When direct voltage is added between two long narrow main discharge electrodes 5 and 6, be impossible form uniform glow discharge not having under the situation of preionization at region of discharge.During when voltage in case above breakdown voltage threshold, between the two, produce electric arc immediately.The position of arc discharge is at random, ceaselessly moves on the length of electrode, rests on certain sometimes a bit.When voltage is lower than breakdown threshold, not discharge in region of discharge.In order to be implemented in glow discharge uniformly under the direct-current discharge condition, the present invention adopts the non-self-maintained discharge mode of impulse preionization.The voltage of main discharge DC power supply 8 is made as is lower than breakdown voltage threshold.After opening the preionization pulse power 9, obtain lath-shaped discharge very uniformly at once.
The preionization pulse power 9 produces the negative high voltage burst pulse, capacitor C by the power supply internal output terminal is added on the main discharge negative electrode 6, at first near whole rectangular main discharge negative electrode 6, produce uniform ionization, expand to main discharge anode 5 gradually and produce uniformly initial preionization (this process is very fast) at whole region of discharge, then between main discharge anode 5 and negative electrode 6, produce uniform pulsed discharge, become stronger secondary preionization.Under the effect of preionization, the main discharge voltage that originally was positioned at the main discharge DC power supply 8 under the breakdown threshold of controlling oneself has reached breakdown threshold, and the main discharge of being powered by main discharge DC power supply 8 has taken place.Above process is the non-self-holding direct-current discharge that impulse preionization causes and controls.Each preionization pulse causes a main discharge pulse and produces a laser pulse.Pulse recurrence rate can depend on the air pressure of laser gas and the parameter of discharge power supply from pulse to 100kHz.When repetition rate was enough high, because the relaxation time of carbon dioxide laser energy level is longer than the pulse spacing, laser output had become continuous.Under the non-self-maintained discharge condition, main discharge E/P value (ratio of electric field and air pressure) is lower, helps gas molecule and is energized into upper state, thereby improved the energy conversion efficiency of laser.
Fig. 2 is the first embodiment of the present invention, and wherein main discharge DC power supply 8 is a pulse forming network, and the preionization pulse power 9 adopts the thyratron pulse generator.
The second embodiment of the present invention is also referring to Fig. 2, and wherein the preionization pulse power 9 adopts the burst pulse Switching Power Supply or the thyristor pulse power.
Fig. 3 is the third embodiment of the present invention, and wherein main discharge DC power supply 8 circuit are the capacitor pulse discharge circuit.The capacitor pulse discharge is the special case of PFN Discharge.
Claims (10)
1. a DC (direct current) discharge slat CO 2 laser with pulsed preionization comprises two metal flat plate side walls, insulating barrier, main discharge anode, negative electrode, laserresonator, main discharge DC power supply; Region of discharge is formed by upper and lower metal flat plate side walls and left and right strip master metal discharge anode and negative electrode sealing, and at least one laserresonator axially is set in the region of discharge; Two metal flat plate side walls inside are provided with cooling bath, and cooling fluid is arranged in the cooling bath; Each closely is coated with insulating barrier two metal flat plate side walls inner surfaces; Two metal flat plate side walls link to each other and ground connection with main discharge anode electricity; It is characterized in that, adopt the mode of non-self-maintained discharge, utilize the impulse preionization discharge to cause and the control main discharge, comprise the preionization pulse power, two isolating diodes, preionization pulse power output links to each other with main discharge negative electrode, two isolating diode inputs electricity, and the main discharge dc supply input links to each other main discharge dc power output end, preionization pulse power input and another isolating diode output head grounding with isolating diode output electricity.
2. DC (direct current) discharge slat CO 2 laser with pulsed preionization as claimed in claim 1, it is characterized in that, described laser region of discharge, the distance W between main discharge anode and the negative electrode is a width, gap h between two metal flat plate side walls is a height, and the ratio of width to height W/h is between 2～30.
3. DC (direct current) discharge slat CO 2 laser with pulsed preionization as claimed in claim 1 is characterized in that, described insulating layer material is enamel or aluminium oxide.
4. DC (direct current) discharge slat CO 2 laser with pulsed preionization as claimed in claim 1 is characterized in that, described laserresonator is unsteady cavity or stable cavity.
5. DC (direct current) discharge slat CO 2 laser with pulsed preionization as claimed in claim 1 is characterized in that, the described preionization pulse power, for the thyratron pulse power, pulse switch power supply, the thyristor pulse power wherein any.
6. DC (direct current) discharge slat CO 2 laser with pulsed preionization as claimed in claim 1 is characterized in that, described main discharge DC power supply comprises a single capacitor.
7. DC (direct current) discharge slat CO 2 laser with pulsed preionization as claimed in claim 1 is characterized in that, described main discharge DC power supply comprises a PFN Discharge circuit.
8. DC (direct current) discharge slat CO 2 laser with pulsed preionization as claimed in claim 1 is characterized in that, described two isolating diodes are quick high-pressure and isolate diode.
9. DC (direct current) discharge slat CO 2 laser with pulsed preionization as claimed in claim 1 is characterized in that, described insulating barrier, thickness are between 200 μ m～800 μ m.
10. DC (direct current) discharge slat CO 2 laser with pulsed preionization as claimed in claim 1 is characterized in that, laser pulse repetition frequency from pulse to 100kHz.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2008102266790A CN101741001B (en) | 2008-11-19 | 2008-11-19 | DC (direct current) discharge slat CO2 laser with pulsed preionization |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2008102266790A CN101741001B (en) | 2008-11-19 | 2008-11-19 | DC (direct current) discharge slat CO2 laser with pulsed preionization |
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| CN101741001A CN101741001A (en) | 2010-06-16 |
| CN101741001B true CN101741001B (en) | 2011-06-29 |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1510802A (en) * | 2002-12-20 | 2004-07-07 | 中国科学院电子学研究所 | Pulse preionization high-frequency discharging panel gas laser |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1510802A (en) * | 2002-12-20 | 2004-07-07 | 中国科学院电子学研究所 | Pulse preionization high-frequency discharging panel gas laser |
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Granted publication date: 20110629 Termination date: 20121119 |