CN101740436B

CN101740436B - Container for containing sheet

Info

Publication number: CN101740436B
Application number: CN2008101763777A
Authority: CN
Inventors: 郑琨壕
Original assignee: JIADENG PRECISE INDUSTRY Co Ltd
Current assignee: JIADENG PRECISE INDUSTRY Co Ltd; Gudeng Precision Industrial Co Ltd
Priority date: 2008-11-25
Filing date: 2008-11-25
Publication date: 2011-07-06
Anticipated expiration: 2028-11-25
Also published as: CN101740436A

Abstract

The invention relates to a container for containing a sheet, which mainly comprises a box body, a box door, a plurality of support columns and a latch device, wherein the box body is provided with an opening and an internal area, and at least one pair of movable buckling elements is pivoted near the opening; the box door is provided with an inner surface and used for sealing the opening of the box body; the support columns are configured on the inner surface of the box door and used for supporting the sheet; the latch device is configured in the box door; when the inner surface of the box door seals the opening of the box body, the latch device can move between a first position and a second position along a reciprocating direction; in the first position, the latch device is contained in the box door; in the second position, the latch device extends out of the box door and is in contact with the movable buckling elements of the box body, and the box door moves to a seal direction by the movable buckling elements so that the box door is sealed with the box body.

Description

The container of ccontaining thin plate

Technical field

The invention relates to a kind of container of ccontaining thin plate, particularly about a kind of container with ccontaining thin plate of good tight function.

Background technology

At present in semiconductor factory, about most normal formula interface (the standardized mechanical interface that adopts by Hewlett-Packard proposed of the storage and transportation apparatus of wafer, light shield, SMIF) system, this SMIF system are open in United States Patent (USP) No. 4532970 and No. 4534389.The purpose of SMIF system is will guarantee wafer, light shield in conveying and storage, and the gas around wafer, the light shield is static with respect to wafer, light shield basically, and the particulate in the dust free room also is unlikely in the environment that enters next-door neighbour's wafer, light shield.

Therefore, the transport box that uses in the SMIF system need possess good airtight effect, enters transport box with gas or the particulate of avoiding external environment.Seeing also shown in Figure 1A and Figure 1B, is that its box body of transport box and the box door of known technology reached airtight schematic diagram.This transport box is to comprise a box body 10 and a box door 20, and box door 20 has an outer surface 21 and an inner surface 22, and the inner surface 22 of box door 20 is in order to an opening 14 of enclosed box body 10.And be provided with a door latch apparatus in the inside of box door 20 (being between outer surface 21 and the inner surface 22), this door latch apparatus comprises a cam 200 and a pair of carriage 300 (carriage that only shows a side among the figure), and carriage 300 one ends then are provided with a pulley 301 and can slide in cam 200 tops; Therefore, when the bolt perforate 21H via box door 20 outer surfaces 21 came rotating cam 200, cam 200 can drive carriage 300 and flatly stretch out box door 20 (shown in Figure 1A).And being rotated further along with cam 200, carriage 300 its pulleys 301 are climbed up the platform 201 on the cam 200, cause carriage 300 toward its vertical offset of direct of travel originally, make carriage 300 further compress its lower edge of pothole 10L on the box body 10; At last, make whole box door 20 praise a little distance, cause the gas seal member 26 on the box door 20 to contact, and reach airtight (Figure 1B) with a convex body 17 on the box body toward the inside of box bodys 10.

Though above-mentioned transport box can be reached airtight function, right, the strength that box door 20 is praised toward box body 10 inside is not enough, causes easily between convex body 17 and the gas seal member 26 to have the space; And its structure of door latch apparatus is relatively complicated, and using pulley 301 to slide on cam 200 also has particle dust to produce easily, for significantly threatening liking of internal tank.

Summary of the invention

According to its airtight effect of transport box of known technology not good or its use pulley to be easy to generate problems such as particle dust, the object of the present invention is to provide a kind of container with ccontaining thin plate of good airtight effect

For achieving the above object, the container of ccontaining thin plate provided by the invention, comprise: a box body, have an end face and four side surfaces adjacent with end face, end face and side surface form an interior zone and an opening, and wherein the two relative side surfaces in four side surfaces respectively are articulated with a movable fastener in interior zone; One box door has an inner surface, in order to the opening of enclosed box body; A plurality of support columns are disposed on the inner surface of box door, in order to support a thin plate; One gas seal member is located on the edge of inner surface of box door; An and door latch apparatus, be disposed in the box door, when the opening of the inner surfaces enclose box body of box door, it can be displaced between a primary importance and the second place according to a travel directions via a pair of carriage of a cam driven, and in primary importance, carriage is included in the box door, and in the second place, carriage then stretches out the box door and contacts the movable fastener of box body, and by movable fastener the box door is moved toward a sealing direction, makes box door and box body form sealing to utilize gas seal member.

The container of ccontaining thin plate of the present invention, power that its box door is up praised and distance are enough, can make between box body and the door body and form good airtight effect.

The container of ccontaining thin plate of the present invention, its door latch apparatus are the designs of not adopting pulley, can avoid opening or when closing the box door, pulley slides on its platform of cam, can reduce the generation of particle dust at every turn.

The container of ccontaining thin plate of the present invention is to use the door latch apparatus of a simplicity of design, only can cause carriage flatly to stretch out outdoors toward box, and carriage need not move on two different directions.

Description of drawings

Figure 1A and Figure 1B are that its box body of transport box and the box door of known technology reached airtight schematic diagram;

Fig. 2 is the schematic diagram of the container of a kind of ccontaining thin plate of the present invention;

Fig. 3 is the schematic diagram of its box body interior zone of container of the present invention;

Fig. 4 is the schematic diagram of its movable fastener of container of the present invention;

Fig. 5 A is that its box door of container of the present invention is in the schematic diagram when removing locking;

Fig. 5 B is that its box door of container of the present invention is in the schematic diagram when forming locking;

Fig. 6 is the schematic diagram of the side surface of its box door of container of the present invention;

Fig. 7 is the schematic diagram that its box door of container of the present invention is up praised through movable fastener;

Fig. 8 A and Fig. 8 B are that its button hook of movable fastener catches on and praise the schematic diagram of box after in front of the door;

Fig. 9 is the schematic diagram that its box door of container of the present invention is equipped with thin plate; And

Figure 10 is the schematic diagram that its box of container of the present invention Men Wei is equipped with thin plate.

Primary clustering symbol description in the accompanying drawing

10 box bodys, 11 end faces, 12 side surfaces, 13 interior zones, 14 openings, 15 hinged arms, 16 movable fasteners, 161 pivot holes, 162 acrosomes, 163 button hooks, the S spring assembly, 17 convex bodys, 20 box doors, 21 outer surfaces, 22 inner surfaces, 23 side surfaces, 24 windows, 241 wickets, 242 big windows, 243 overlappings place, 25 grooves, 26 gas seal members, 30 support columns, 31 pedestals, 311 top plan, 312 salient points, 313 link stopper projections, 40 door latch apparatus, 41 cams, 411 protuberances, 42 carriages, 421 arc notch, 422 latch arms, 423 rollers, 100 thin plates

Embodiment

For technology contents, goal of the invention that the present invention is used and the effect reached thereof have more complete and clearly understand, in elaborating in conjunction with the accompanying drawings down.

At first, see also shown in Figure 2ly, be the schematic diagram of the container of a kind of ccontaining thin plate of the present invention.This container mainly comprises a box body 10 and a box door 20, and box body 10 has the adjacent side surface 12 of an end face 11 and four and end face 11, and above-mentioned end face 11 and four side surfaces 12 form an interior zone (not being shown among the figure) and openings 14; Box door 20 then has an outer surface 21 and an inner surface 22, wherein, inner surface 22 is the openings 14 in order to enclosed box body 10, and four corners at inner surface 22 respectively are provided with a support column 30, to support a thin plate 100, this thin plate 100 can be light shield or semiconductor substrate, and the outer surface 21 of box door 20 then is provided with a bolt perforate (not being shown among the figure), box body 10 and box door 20 is formed locking or removes locking by rotating this bolt perforate with this.

Then, seeing also shown in Figure 3ly, is the schematic diagram of its box body 10 interior zones 13 of said vesse.As seen from the figure, be provided with four hinged arms 15 (only showing two hinged arms among the figure) at the interior zone 13 of box body 10 and near the position of opening 14, wherein two hinged arms 15 are arranged on the side surface 12 of four side surfaces 12, and all the other two hinged arms 15 are arranged on above-mentioned side surface 12 its opposite side surfaces 12.Above-mentioned each hinged arm 15 respectively is articulated with a movable fastener 16, and as shown in Figure 4, movable fastener 16 has a pivot hole 161, and is extended with an acrosome 162 above pivot hole 161, and the outside then is extended with at least one button hook 163 below pivot hole 161; Movable fastener 16 is to be hubbed in the hinged arm 15 of box body 10 with its pivot hole 161, and makes movable fastener 16 and side surface 12 keeping parallelisms by a spring assembly S.

And shown in Fig. 5 A and Fig. 5 B, be that its box door 20 of said vesse is in the schematic diagram when removing locking and forming locking; Fig. 5 A and Fig. 5 B remove the inner surface 22 of box door 20.As mentioned before, its box door 20 of container of the present invention has outer surface 21 and inner surface 22, wherein, (also be exactly) to be provided with a door latch apparatus 40 between the outer surface 21 and inner surface 22 of box door 20 in box door 20, door latch apparatus 40 comprises a cam 41 and a pair of carriage 42, and cam 41 has a perforate (not being shown among the figure) and can communicate with the bolt perforate on the outer surface 21.In addition, cam 41 is provided with a pair of first guiding structure, and first guiding structure is by outward extending protuberance 411 of the central point of cam 41 or outstanding structure; And an end of each carriage 42 close cam 41 is provided with second guiding structure, this second guiding structure matches with its shape of first guiding structure, for example: with second guiding structure be arranged to the to coincide arc notch 421 of protuberance 411, and each carriage 42 forms two latch arms 422 away from the other end of cam 41, and above-mentioned latch arms 422 its positions are with respect to the movable fastener 16 in box body 10 interior zones 13.Because first guiding structure and the second guiding structure shape are coincide mutually, so can make above-mentioned first guiding structure and second guiding structure be an engagement or free state by rotating cam 41.When being in engagement, first guiding structure on the cam 41 is fit in second guiding structure on the carriage 42, and at this moment, carriage 42 its latch arms 422 are included in the box door 20; And when being in when freeing state, first guiding structure of cam 41 detaches second guiding structure on the carriage 42, and with carriage 42 its latch arms 422 toward extrapolated, make carriage 42 its latch arms 422 stretch out box door 20 and contact movable fastener 16.Clearly, the major function of door latch apparatus 40 is that carriage 42 and latch arms 422 thereof are displaced between above-mentioned two positions according to a travel directions, makes carriage 42 stretch out box door 20 so that form locking or carriage 42 is withdrawn box doors 20 so that remove locking with box body 10 with box body 10.And the cam 41 of above-mentioned door latch apparatus 40 or carriage 42 its materials can be metal or high molecule plastic or other material, are not limited at this.And the structure of door latch apparatus 40 does not also limit above-mentioned form.

Secondly, as shown in Figure 6, four side surfaces 23 are arranged in that the inner surface 22 of box door 20 is adjacent, two opposite side surfaces 23 in these four side surfaces 23 respectively have two windows 24, wherein, each window 24 comprises the wicket 241 of the first half and the big window 242 of Lower Half, the wicket 241 of the first half allows that carriage 42 its latch arms 422 of box door 20 inside stretch out, and contact the acrosome 162 of movable fastener 16, the big window 242 of Lower Half allows that then movable fastener 16 its button hooks 163 pass through, so that movable fastener 16 its button hooks 163 catch on overlapping place 243 between wicket 241 and the big window 242.(this figure only stays the hinged arm 15 and structures such as movable fastener 16 and door body 20 in the box body 10) as shown in Figure 7, carriage 42 its latch arms 422 are stretched out after the box door 20, contact or compress movable fastener 16 its acrosomes 162 earlier, making movable fastener 16 is the center rotation with axis hole 161, become perpendicular to side surface 12 by originally being parallel to side surface 12, and at the same time, movable fastener 16 its button hooks 163 catch on overlapping place 243 between 242 mouthfuls of above-mentioned wicket 241 and the windows greatly, make box door 20 up praise a distance.

Then, seeing also Fig. 8 A and Fig. 8 B, is the schematic diagram that movable fastener 16 its button hooks 163 caught on and praised box door 20 front and back.As seen from the figure, have a groove 25 on the edge of box door 20 inner surfaces 22, have a gas seal member 26 in the groove 25, and have a convex body 17 in box body 10 its positions with respect to gas seal member 26; Therefore, when carriage 42 its latch arms 422 of box door 20 inside are stretched out box door 20 and are contacted acrosome 162, movable fastener 16 its button hooks 163 are up praised box door 20, cause convex body 17 closely to contact with gas seal member 26, make box body 10 and box door 20 form airtight or sealing.And above-mentioned direction of up praising or claim the sealing direction is that the travel directions with carriage 42 its latch arms 422 is a vertical angle approximately.And the gas seal member 26 of above-mentioned use can be a kind of rubber strip or airtight circle, and its material can be rubber or high molecule plastic or other material.Again, in order to reduce the contact area between latch arms 422 and the acrosome 162, and avoid the generation of particle dust, latch arms 422 its free ends can include a roller 423 and roller 423 surfaces coat a kind of wear-resisting consumptive material, for example: polyether-ether-ketone (polyetheretherketone, PEEK).

Secondly, seeing also Fig. 9, is the schematic diagram that its box door of container of the present invention is equipped with thin plate.Remove thin plate and keep the schematic diagram of a plurality of support columns and Figure 10 is above-mentioned box door.As shown in the figure, four support columns 30 are positioned at four corners of box door 20 inner surfaces 22, wherein, each support column 30 comprises a pedestal 31, the bottom of pedestal 31 is fixed on the inner surface 22 of box door 20, and its other end forms a top plan 311, and top plan 311 is provided with a salient point 312, supports thin plate 100 to utilize this salient point 312; And be provided with the link stopper projection 313 that at least one up extends in the edge of top plan 311, go out support column 30 to prevent thin plate 100 landings.And be equipped with at container under the normal condition of thin plate 100, above-mentioned thin plate 100 only is supported in salient point 312 tops, does not contact with each other with link stopper projection 313; This support column 30 can use together with the keeper (not being shown among the figure) that is fixed in box body 10 interior zones 13, and thin plate 100 is fixed between keeper and the support column 30.And when container of the present invention bears an impact, for example: when container dropped from workbench, link stopper projection 313 just can be brought into play function at this moment, to keep out or to avoid thin plate 100 to skid off support column 30.

Though the present invention describes as above with aforesaid preferred embodiment; right its is not in order to limit the present invention; those skilled in the art without departing from the spirit and scope of the present invention; when can doing a little change and retouching, therefore scope of patent protection of the present invention must be looked the content that the claim scope of the present patent application defined and is as the criterion.

Claims

1. the container of a ccontaining thin plate comprises:

One box body has an opening and an interior zone, and in articulate at least one pair of movable fastener near this opening part;

One box door has an inner surface, in order to seal this opening of this box body;

A plurality of support columns are disposed at four corners on this inner surface of this box door, in order to support a thin plate; And

One door latch apparatus, be disposed in this box door, when this opening of this this box body of inner surfaces enclose of this box door, it can be displaced between a primary importance and the second place according to a travel directions, and in this primary importance, this door latch apparatus is included in this box door, and in this second place, this door latch apparatus then stretches out this box door and contacts those movable fasteners of this box body, and by those movable fasteners this box door is moved toward a sealing direction, makes this box door and this box body form sealing.

2. container as claimed in claim 1, wherein, its edge all around of this inner surface of this box door is provided with a gas seal member, and this box body is provided with a convex body with respect to this gas seal member place, when those movable fasteners move this box door toward the sealing direction, this convex body compresses this gas seal member, makes this box door and this box body form sealing.

3. container as claimed in claim 1, wherein, this movable fastener has a pivot hole, and this pivot hole is arranged in its hinged arm near this opening part of this box body.

4. container as claimed in claim 3, wherein, this movable fastener comprises an acrosome and at least one button hook, this acrosome is up to be extended and this button hook is to be extended toward the below outside by this pivot hole by this pivot hole, this acrosome is that axle center this button hook of rotation drive triggers this box door for this door latch apparatus contact and with this pivot hole, and this box door is moved toward the sealing direction.

5. the airtight container of a ccontaining thin plate comprises:

One box body has an end face and four side surfaces adjacent with this end face, and this end face and this side surface form an interior zone and an opening, and wherein the two relative side surfaces in these four side surfaces respectively are articulated with a movable fastener in this interior zone;

A plurality of support columns are disposed at four corners on this inner surface of this box door, in order to support a thin plate;

One gas seal member is located on the edge of this inner surface of this box door; And

One door latch apparatus, be disposed in this box door, when this opening of this this box body of inner surfaces enclose of this box door, it is displaced between a primary importance and the second place according to a travel directions via a pair of carriage of a cam driven, in this primary importance, this is included in this box door carriage, and in this second place, those movable fasteners that this then stretches out this box door and contact this box body carriage, and by those movable fasteners this box door is moved toward a sealing direction, make this box door and this box body form sealing to utilize this gas seal member.

6. container as claimed in claim 5, wherein, this travel directions is vertical with the sealing direction.

7. container as claimed in claim 5, wherein, this box body is provided with a convex body with respect to this gas seal member place, and when those movable fasteners moved this box door toward the sealing direction, this convex body compressed this gas seal member, made this box door and this box body form sealing.

8. container as claimed in claim 5, wherein, this inner surface of this box door is adjacent four side surfaces, and two opposite side surfaces in these four side surfaces respectively have a window, for this carriage are stretched out this box door.

9. container as claimed in claim 5, wherein, these two relative side surfaces respectively have a hinged arm in this interior zone of this box body, have this movable fastener in a pivot hole to be pivoted.

10. container as claimed in claim 9, wherein, this movable fastener comprises an acrosome and at least one button hook, this acrosome is up to be extended and this button hook is to be extended toward the below outside by this pivot hole by this pivot hole, this acrosome is that axle center this button hook of rotation drive triggers this box door for this carriage contact and with this pivot hole, and this box door is moved toward the sealing direction.

11. container as claimed in claim 5, wherein, this cam is provided with a pair of first guiding structure, and this is provided with one second guiding structure to carriage one end, makes this first guiding structure and this second guiding structure intermesh along with the rotation of this cam or frees.

12. container as claimed in claim 11, wherein, when this first guiding structure and this second guiding structure intermeshed, this was included in this box door carriage.

13. container as claimed in claim 11, wherein, when this first guiding structure and this second guiding structure are freed mutually, those movable fasteners that this then stretches out this box door and contact this box body carriage.

14. container as claimed in claim 5, wherein, each support column of these a plurality of support columns comprises:

One pedestal is fixed on this inner surface of this box door, and this pedestal has a top plan, and this top plan is provided with a salient point, supports this thin plate to utilize this salient point; And

One link stopper projection is positioned at the edge of this top plan of this pedestal, and this link stopper projection can prevent that this thin plate landing from going out this support column.