CN101738947B - High-speed high-precision process parameter online calibration tester - Google Patents

High-speed high-precision process parameter online calibration tester Download PDF

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CN101738947B
CN101738947B CN2009101537766A CN200910153776A CN101738947B CN 101738947 B CN101738947 B CN 101738947B CN 2009101537766 A CN2009101537766 A CN 2009101537766A CN 200910153776 A CN200910153776 A CN 200910153776A CN 101738947 B CN101738947 B CN 101738947B
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module
precision
speed
converter
calibration
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CN101738947A (en
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程晓崇
张雪菁
赵郑洲
桂晓燕
应浩升
潘青松
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HANGZHOU KINGER DISPLAY CO Ltd
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HANGZHOU KINGER DISPLAY CO Ltd
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Abstract

The invention relates to a measuring instrument for an automation meter and discloses a high-speed high-precision process parameter online calibration tester. The tester comprises a microprocessor which is connected with a PC computer and used for data communication, and a measuring module, an output module, a power distribution management module and a signal conditioning module which are connected with the microcomputer; the measuring module comprises a high-speed high-precision constant-cycle multiple oblique integral A/D convertor; and the output module comprises a high-speed high-precision A/D convertor, wherein a low-temperature drift low-noise voltage reference source is connected between the high-speed high-precision constant-cycle multiple oblique integral A/D convertor and the high-speed high-precision A/D convertor. The tester is mainly used for measuring an industrial autocontrol system (DCS and PLC) and other automation meters and performing automatic high-precision calibration testing on output signals, can be used for research and development of products and quality detection and control of the products on a production line, and is widely applied to the maintenance and calibration of apparatus and instruments in the production process in electric power, petrifaction, metallurgy and the like.

Description

A kind of high-speed high-precision process parameter online calibration tester
Technical field
The present invention relates to the surveying instrument of industrial automation control system instrument and meter for automations such as (DCS and PLC), relate in particular to a kind of high-speed high-precision process parameter online calibration tester.
Background technology
In recent ten years; Along with the fast development of Industrial-Enterprises in China,, improve the competitive edge of self for the reply intense market competition; The instability of avoiding product quality to bring because of manually-operated, robot control system(RCS) and instrument that enterprise more and more relies on various advanced persons improve product quality and production efficiency.Various industrial automation control systems and in-situs tester table (like DCS, PLC, industrial computer, recording instrument without paper, pressure unit, flowmeter, valve etc.) obtain unprecedented development, and industrial automation control system and in-situs tester table are also by the nineties initial stage in last century external several transnational enterprise domestic up till now thousands of families instrument and meter for automation of dominance and control system manufacturing enterprise.
Since in production automation instrument and the control system process needed high-precision signal calibration testing equipment and core technology all by external renowned company (like U.S. FLUKE, HP, GE) monopolization; Cost an arm and a leg; F743 like U.S. FLUKE; Unit price more than 70,000 is mixed system software and necessary modular pressure, and price is more than 150,000.The new DPI620 that releases of U.S. GE company, a whole set of price is also about 150,000.FLUKE 5520 prices are about about 300,000, have only minority metrological service above the provincial level and petroleum chemical enterprise just to afford.And domestic calibration testing instrument producer all produces between 0.1% to 0.02% precision basically, and function singleness, lacks the market competitiveness with offshore company.Cause being difficult to substituting import one calibration testing equipment.According to statistics, only U.S. FLUKE process signal calibration testing equipment at home Chinese market sales volume in 2008 greatly about 6,000 ten thousand U.S. dollars.
Simultaneously, domestic most instrument and producer of system adopt the low precision calibration testing equipment of tradition such as resistance box (precision 0.1%), DC potentiometer (precision 0.1%) to come artificial calibration testing product.The product precision that they produce is low, thereby directly influences the control system overall performance.At present, though domestic have high-precision calibration testing product, owing to adopt ∑-Δ analog to digital converter technology, essence is to adopt the scheme of changing resolution with speed, is difficult to satisfy the needs of online high-speed, high precision calibration testing.Thereby to solve instrument product high-speed, high precision on-line calibrations test such as present industrial enterprise, instrument producer, control system producer be very urgent and significant.Instrument producer of thousands of family and more system integrator, engineering corporation, wide industrial enterprise are enormous and latent market.
Summary of the invention
The present invention is directed to the low precision calibration testing equipment that exists in the conventional art and can directly influence the control system overall performance; And minority high-precision calibration test products is owing to adopt ∑-Δ analog to digital converter technology; Essence is to adopt the scheme of changing resolution with speed; Be difficult to satisfy shortcomings such as online high-speed, high precision calibration testing needs, and a kind of high-speed high-precision process parameter online calibration tester is provided.It has realized the high-acruracy survey and the simulation output of nearly all process signals such as pressure, DC voltage, DC current, frequency, millivolt, resistance, thermopair, thermal resistance and switching value; Precision is up to 0.01%; Temperature is floated coefficient 3PPM/ ℃; Can realize simultaneously analog transmitter output, functions such as form, database are preserved, generated to 24V distribution, the automatic verification of valve opening, test data automatically.
In order to solve the problems of the technologies described above, the present invention is able to solve through following technical proposals:
High-speed high-precision process parameter online calibration tester; Comprising links to each other with PC the go forward side by side microprocessor of line data communication; Also comprise the measurement module, output module, the distribution management module that link to each other with microprocessor; Microprocessor (2) links to each other with the first signal condition module (7) through the switching of first range, and microprocessor (2) links to each other with secondary signal conditioning module (7) through the switching of second range; Said measurement module comprises the permanent cycle many skew products fraction A/D converter (ADC) of high-speed, high precision; Said output module comprises high-speed, high precision D/A converter (DAC); Wherein, be connected with low temperature drift low noise voltage-reference between permanent cycle many skew products fraction A/D converter of high-speed, high precision and the high-speed, high precision D/A converter; Described microprocessor (2) also links to each other with the switching of first range through the permanent cycle many skew products fraction A/D converter of high-speed, high precision (3), and described microprocessor (2) also links to each other with the switching of second range through high-speed, high precision D/A converter (5).
As preferably, said measurement module comprises overvoltage crowbar and low noise low temperature drift amplifying circuit, and said output module comprises overvoltage crowbar.
As preferably; Said high-speed high-precision process parameter online calibration tester also comprises system control program, and system control program comprises that parameter setting module, port assignment module, distribution distribution module, measurement calibration module, output calibration module, error analysis module, form form module, data recordin module and printed report module.
As preferably, the permanent cycle many skew products fraction A/D converter of said high-speed, high precision comprises integrator, slope amplifier and comparer.
As preferably, said overvoltage crowbar comprises high withstand voltage signal relay, forward protection device, reverse protection device, high input impedance voltage follower and recovers over-current protection device certainly.
The present invention has produced highly effective technique effect owing to adopt above technical scheme: permanent cycle many skew products fraction A/D change-over circuit of employing, improved conversion accuracy when improving the A/D slewing rate; Through Cadence CAD platform emulation technology, optimized the reference source PCB layout, reduced the loss of significance in the high-precision voltage reference signals transmission; Adopt the bridge-type overvoltage crowbar, follow, reduced the holding circuit leakage current, when having realized circuit protection, reduced the trueness error that holding circuit causes through the biasing of protection diode.The present invention is mainly used in the automatic, high precision calibration testing is carried out in the measurement of industrial automation control system instrument and meter for automations such as (DCS and PLC) and output signal; Both can be used for research and development of products; Also can be used for product on production line quality testing and control, be widely used in the maintenance calibration of production run instrument and meters such as electric power, petrochemical industry, metallurgy.
Description of drawings
Fig. 1 is an embodiment of the invention theory structure synoptic diagram in use.
Fig. 2 is the theory diagram of the embodiment of the invention.
Fig. 3 is the theory diagram of measurement module and output module in the embodiment of the invention.
Fig. 4 is the system control program process flow diagram of the embodiment of the invention.
Fig. 5 is the functional block diagram of the system control program of the embodiment of the invention.
Fig. 6 is the schematic diagram of double oblique-ing A/D converter in the prior art.
Fig. 7 is the voltage oscillogram that integrator is exported in the double oblique-ing A/D converter in the prior art.
Fig. 8 is the schematic diagram of ∑ in the prior art-Δ type A/D converter.
Fig. 9 is the functional block diagram of ∑ in the prior art-Δ analog to digital converter chip.
Figure 10 is the circuit theory diagrams of permanent cycle many skew products fraction A/D converter in the embodiment of the invention.
Figure 11 is the voltage oscillogram of the integrator output of permanent cycle many skew products fraction A/D converter in the embodiment of the invention.
Figure 12 is the earthing wiring schematic diagram that the PCB layout adopts in the embodiment of the invention.
Figure 13 is the reference voltage noise waveform figure that arrives metering circuit when adopting traditional ground connection.
Figure 14 is the reference voltage noise waveform figure that arrives metering circuit when adopting the earthing of the embodiment of the invention.
Figure 15 is the theory diagram of overvoltage crowbar in the embodiment of the invention.
Embodiment
Below in conjunction with accompanying drawing 1 to Figure 15 and embodiment the present invention is described in further detail:
The embodiment high-speed high-precision process parameter online calibration tester; As shown in Figure 1; Comprising links to each other with PC 1 the go forward side by side microprocessor 2 of line data communication; Also comprise the measurement module, output module, distribution management module 6 and the signal condition module 7 that link to each other with microprocessor 2, said measurement module comprises the permanent cycle many skew products fraction A/D converter 3 of high-speed, high precision, and said output module comprises high-speed, high precision D/A converter 5; Wherein, be connected with low temperature drift low noise voltage-reference 4 between permanent cycle many skew products fraction A/D converter 3 of high-speed, high precision and the high-speed, high precision D/A converter 5.
Equipment 9 to be calibrated (like DCS, PLC, recording instrument without paper; Measuring and controlling equipments such as various transmitters) be linked into prover through terminal assignment mouth 8, because the terminal position of various secondary instruments is different, signal type is also different; So need in PC 1, carry out the terminal assignment setting to every kind of equipment under test; These information are stored in the database of PC 1, in the production calibration testing process of reality, only need on PC 1, select corresponding model to get final product.Terminal assignment mouth 8 is after over-allocation, and signal to be measured is linked into the measurement module of prover automatically, and program control output source signal is linked into the output module of prover automatically.
Measurement module carries out range by the size of signal range and switches according to signal kinds after the signal condition module, enter into the permanent cycle many skew products fraction A/D converter of high-speed, high precision then and measure.Because measuring rate is directly restricting the speed of calibration testing, when particularly on-line calibration was tested, measuring rate directly affected production efficiency; And measuring accuracy affects the effect of calibration testing, so not only at a high speed but also high-precision measurement, is the basic demand of online procedure parameter calibration testing.The present invention adopts can two-forty again can high-precision A/D change-over circuit; Utilize constant cycle integral method and positive and negative benchmark fixed number of times access method, compensated the influence that the analog switch leakage current causes, and through real-time school zero technology; Various non-systematic error values such as follow the tracks of that temperature is floated in real time; And in final calculating, these error amounts are used as fixed bias and remove, thereby when improving measuring rate, improved the precision of measuring greatly.
Output module is according to signal kinds, and the voltage signal that High Speed and High Accuracy D C is exported outputs to terminal interface after the overrange conversion.Measurement and program control output source use same voltage reference, and this helps guaranteeing to measure and export the unitarity of signal.
Distribution management module 6 is responsible for being provided with the mode of distribution and the size of distribution.As when the calibration loop electric current, the distribution that often need apply 24V to the instrument that is calibrated or equipment, and the mode of connection is divided into three-wire system and four-wire system etc., so the function of distribution management module is absolutely necessary.
Microprocessor 2 is responsible for the co-ordination of each module in the entire circuit, and accepts the host computer order, accomplishes various calibrations and test job.
Fig. 2 is the theory diagram of the embodiment of the invention; High-speed high-precision process parameter online calibration tester; Adopt permanent cycle many slopes integration type A/D change-over circuit technology, both guaranteed that the measurement of system and output signal can meet or exceed 0.01% accuracy, had reached the purpose of measuring at a high speed again.Native system both can be used for research and development of products, also can be used for product on production line quality testing and control, was widely used in the maintenance calibration of production run instrument and meters such as electric power, petrochemical industry, metallurgy.Also can separate unit or many form complete High-Speed Automatic calibration test system with Control Software.
Fig. 3 is the theory diagram of measurement module and output module in the embodiment of the invention.The temperature of A/D conversion accuracy, signal noise, hardware is floated because the factor that influences the accuracy of signal mainly contains, hardware the time float etc.; The present invention has adopted the low noise amplifying technique; Temperature floats, the time float the automatic cancellation technology of hardware, efficiently solve signal and realize high-precision technical bottleneck.
Fig. 4 is the system control program process flow diagram of the embodiment of the invention.System control programming has been realized process signal calibration testing robotization, comprises system parameter setting module, seized instrument routine information acquisition module, seized instrument signal data acquisition and management functions such as record, report printing and real-time data base and historical data base.In the online procedure parameter calibration, powerful software function is absolutely necessary for improving the automaticity or the efficient of producing.Software section among the present invention can be divided into parameter setting module, port assignment module, distribution distribution module, measurement calibration module, output calibration module, error analysis module, form formation module, data recordin module and printed report module by function.
Each functional module is as shown in Figure 5,
Wherein, parameter setting module: mainly be used for permitting parameters such as value, calibration testing point according to range, distribution system, the error of the type that is calibrated the type setting signal of equipment, signal.
Port assignment module: mainly be used for confirming the access way that signal terminal is sub according to the model that is calibrated equipment.
The distribution distribution module: distribution distributes and whether to comprise the size of distribution and distribution; Available distribution voltage is 24V or 12V.
Measure calibration module: measure calibration and comprise a series of measurement calibration operations; At first, output to the equipment of being calibrated, read the measurement result of the equipment of being calibrated then through program control source according to the value of parameter setting calibration testing point partly; The value of this result and test point is compared, and the output calibration result.
The output calibration module: the output calibration comprises a series of output calibration operations; At first according to the value of the calibration testing point of parameter setting part; Let the equipment that is calibrated export this value through the RS232 communication interface; Measure then and should be worth, and the value of measurement result and test point is compared, export calibration result then.
The error analysis module: error analysis is used for the test after being calibrated equipment and calibrating is used for verifying calibration result; And statistic error value, this function can be used to generate automatically the performance parameter of the equipment that is calibrated.
Form forms module: this part is used for the result data of calibration is carried out form, as is calibrated the parameter report of product, the parameter backup of each numbering product etc.
Data recordin module: data recording be used for the production of product calibration to batch calibration result form all kinds of supplemental characteristics, be used for filing and analyzing.
Printed report module: be used for necessary parameter is printed, can be used for generating the stray parameter tabulation of product.
Analog/digital conversion (ADC) technology that a core technology of process signal calibration system is exactly two-forty, pin-point accuracy.The analog/digital converter that at present existing similar products use is double oblique integral formula A/D converter (Dual Slope A/D Converter) and ∑-Δ pattern number converter basically.
The principle of double-bevel ADC, as shown in Figure 6, and the voltage oscillogram of integrator output, as shown in Figure 7.Its major advantage is linear good, highly sensitive, is particularly suppressing to have obvious superiority aspect the mains frequency series mode interference.But double-bevel A/D switch technology has a very big deficiency, and promptly switching rate is lower, and the resolution of establishing counter is the n position, then carries out a full scale measurement required time to be: T=2 * 2n * T0; Wherein T0 is the clock period.It is thus clear that when measuring accuracy is had relatively high expectations, when promptly figure place is higher, will greatly prolong the switching time of double oblique-ing A/D converter, be not suitable for the occasion that measuring rate is had relatively high expectations; The fatal shortcoming that another one influences its conversion accuracy is that double-bevel ADC is very high to the requirement of integrating capacitor, and does not have the switch leakage current debugging functions, makes its full scale linearity be difficult to improve.
Present double-bevel ADC being integrated, what commercially available process signal prover used is single-chip A/D converter scheme basically, conversion accuracy reaches four and half precision, but is difficult to improve again, and temperature float with the time float error and be difficult to control.And three skew product fraction ADC have improved the speed of conversion, but still can't reduce the error that switch leakage current, integrating capacitor charge-discharge characteristic are caused, thereby are difficult in the performance that converter fundamentally is provided.
∑-Δ pattern number converter is called over-sampled converter again; With low level quantizer (normally 1) and very high sample rate with analog signal digital; Utilize oversampling technique, noise shaping and digital filtering technique increase effective resolution, and essence is to adopt the scheme of changing resolution with speed.∑-Δ pattern number converter contains a comparer, switch, one or several integrator and a simulation summing circuit (being so-called integration or summation ∑) and complicated digital signal processing circuit, is divided into analog part 15 and numerical portion 21, and is as shown in Figure 8.
Existing market is popular has ∑-Δ analog to digital converter chip of 24, the highlyest realizes 6 display precisions, and during the high precision conversion, switching rate is slower.Fig. 9 is the functional block diagram of ∑-Δ analog to digital converter chip.
∑-Δ analog to digital converter has the advantage of himself, but shortcoming is also obvious, and that is not suitable for the discrete component assembling exactly, and what the process signal prover used is single chip solution basically; Use the shortcoming of single chip solution to be; Though the ∑ of single-chip-Δ analog to digital converter chip has very outstanding performance, whole calibration system can both keep this performance, the same outstanding peripheral circuit of just essential usability; Like signal conditioning circuit, range switch circuit and holding circuit etc.; Complete machine structure is complicated, and cost is higher, and be not easy to solve temperature float, the time float problem; On the other hand, the design feature of ∑-Δ analog to digital converter has determined its switching rate to be difficult to do height, and the full precision measure speed of present 24 single-chip ∑-Δ analog to digital converters on the market is generally the several times per second; This is the bottleneck of restriction on-line calibration test macro efficient.
The present invention starts with from the inherent error that reduces converter, has adopted permanent cycle many skew products fraction A/D converter, and the characteristics of existing integral a/d converter like power frequency string mould signal suppressing function, can realize that again the high speed of signal is measured; And the constant cycle compensate function of its innovation; Reduction is to the performance requirement of peripheral components; Its automatic calibration function can significantly reduce temperature float with the time influence of floating; Make machine performance only depend on the performance of base modules, thereby reduced the performance requirement of most devices, further reduced the cost of product.
The integral time of diclinic rate A/D converter is long partially, and bigger voltage margin is provided often need for the charge and discharge integrating capacitor, so that it can be unlikely to saturated after the integration period for a long time.In many slopes integrating A/D converter, periodically be removed or be added in integration period or some electric charges of charge period (upslope phase, i.e. integration phase), so unknown input voltage is to make integrator output saturated never; Only leave less relatively electric charge and remain on the integrating capacitor, these residual charges are going integration (deintegrate) phase or discharge phase (the downslope phase i.e. the reverse integral phase, is gone integration period) to be removed.In integration period, remove or the adding electric charge, its quantity is counted, and its count value is with deciding final measured voltage values.This many skew product branch technology also are used in integration or downslope stage, to shorten the discharge time of integrating capacitor, help to improve the sensitivity and the switching rate of converter like this.Find in the practice that the maintained switch number of times is constant when measuring, and the positive voltage reference with negative alternately is connected on the integrator, so because non-linear will being greatly reduced that the leakage current of switch causes.
The theory diagram of permanent cycle many inclineds integral form simulation-digital quantizer (ADC) is shown in figure 10 among the present invention, comprises integrator 12, slope amplifier 13 and comparer 14; Integration is carried out in 12 pairs of measured signals of integrator; Simultaneously positive and negative reference current is also under the effect of microprocessor 2; Join the input end of integrator 12 selectively; Microprocessor 2 confirms to add the polarity of reference current according to the output of comparer 14, to reduce the output voltage amplitude of integrator 12.Going integration period, input voltage breaks off, and carries out count measurement with high-speed counter to changing slowly the slope, thereby obtains higher precision and accuracy.
Controller (microprocessor 2) is being controlled the access of positive and negative benchmark, and makes with a kind of special switch order and not expect iunjected charge (leak charge of the switch) minimum that has on the integrator.That is, before connecting switch, guaranteed that other switch all breaks off, and each has only the input end of a reference voltage (the positive or negative) integrator that is added to constantly.In integration period, 2 switch closures can not be arranged simultaneously, and when controller is checked comparer output, all break off.The number of times of these 2 switches is consistent.Remains during the integration period switch change-over and keep counting, and the number of times of switch change-over is consistent, in addition when 2 benchmark are all closed not the switch of frequent operation also insert conversion, with the quantity that guarantees switch change consistent.This operation has increased the linearity and has shortened the time of integration period.The switch number of times of positive and negative benchmark and the output state of comparer are followed the tracks of and write down to processor, and judge that with this which benchmark of next moment should insert.Between integration period, the closure time of positive and negative voltage reference switch is counted respectively, and this stage is carried out bigness scale.Go integration phase, carrying out accurate measurement; Add with the bigness scale result of integration phase is exactly The ultimate results together.Under the input voltage of opposed polarity, the output voltage waveform of integrator is shown in figure 11.This shows that the present invention has also improved conversion accuracy when improving slewing rate.
The performance index of integrated circuit depend on the performance of voltage reference circuit among the present invention.Because the functional module of circuitry is more, the number of components and parts is more, thus A/D converter in voltage reference unit and the metering circuit and program control source circuit the unusual key of PCB layout.And what wherein have the greatest impact is exactly the layout of ground wire, owing to need reference voltage be provided to a plurality of modules, the cabling of reference source and each intermodule can not be recently, and the cabling of growing slightly can have bigger influence to the reference voltage that reality arrives each module.
Traditional solution is to use the multilayer board large tracts of land to apply copper and walks line technology, or the deposited copper face of PCB is gold-plated, to reduce the impedance of ground wire cabling; Yet large-area deposited copper can make and apply the equivalent condenser that forms an irregular pole plate shape between copper face and the power supply ground, and near the leak charge of circuit this equivalent capacitor can absorb reduces the signal to noise ratio (S/N ratio) of the reference voltage that arrives each module.
The present invention carries out emulation through Cadence CAD platform emulation technology to the PCB ground wire cabling layout that is designed, and finds to use " chrysanthemum type " earthing effect the most obvious.Shown in figure 12, be the wiring schematic diagram of " chrysanthemum type " earthing.
Improve effect contrast figure such as Figure 13 and shown in Figure 14, Figure 13 arrives the reference voltage noise waveform figure of metering circuit for using traditional earthing; Figure 14 arrives the reference voltage noise waveform figure of metering circuit for using " chrysanthemum type " earthing.
Measuring or the holding circuit of calibration equipment is absolutely necessary, is that the surge current that prevents powered on moment impacts on the one hand, or thunder and lightning, strong alternating electromagnetic field disturb; On the other hand, also under the situation of maloperation, protect hardware circuit for the user.
The key points in design here is: 1, really reliable protection can be provided; 2, add these circuit and should not influence precision.In thermometrically is used, be necessary for amplifier outlet terminal, energy supply and similar components and parts overvoltage protection is provided.The classic method that realizes this task is with clamp diode, between power rail or other threshold voltages, increases resistance in series at output node, and the shortcoming of this method is under the overload situations, and energy dissipation is high on the series connection device.
Because metering circuit; Input impedance like tension measuring circuit is very big; The leakage current of protection device can join pre-amplification circuit as a kind of bias current, though can eliminate this biased error through demarcating, because input voltage is uncertain; So the size of the leakage current of protection device often also is unfixed, and has very sensitive temperature characterisitic; These leakage currents are negligible in the not high occasion of accuracy requirement, but in design of the present invention, float characteristic if guarantee full scale precision and temperature, so still need handle accordingly these leakage currents of setovering.
Shown in figure 15, overvoltage crowbar 10 comprises high withstand voltage signal relay 16, forward protection device 17, reverse protection device 18, high input impedance voltage follower 19 and recovers over-current protection device 20 certainly.When operate as normal, follow biasing to protecting device to apply, make the current potential at its two ends equate that the big young pathbreaker of its leakage current becomes very little so; And when adding bigger voltage suddenly, because the restriction of bias voltage, the pressure drop at protection device two ends will become very big, and protect device will reach snowslide or breakdown critical point this moment, thereby the voltage at its two ends is remained on the safe voltage value.
In a word, the above is merely preferred embodiment of the present invention, and all equalizations of doing according to claim of the present invention change and modify, and all should belong to the covering scope of patent of the present invention.

Claims (5)

1. high-speed high-precision process parameter online calibration tester; Comprising links to each other with PC (1) the go forward side by side microprocessor (2) of line data communication; It is characterized in that: also comprise the measurement module, output module, the distribution management module (6) that link to each other with microprocessor (2); Described microprocessor (2) links to each other with the first signal condition module through the switching of first range, and microprocessor (2) links to each other with the secondary signal conditioning module through the switching of second range; Said measurement module comprises the permanent cycle many skew products fraction A/D converter (3) of high-speed, high precision; Said output module comprises high-speed, high precision D/A converter (5); Wherein, be connected with low temperature drift low noise voltage-reference (4) between permanent cycle many skew products fraction A/D converter (3) of high-speed, high precision and the high-speed, high precision D/A converter (5); Described microprocessor (2) also links to each other with the switching of first range through the permanent cycle many skew products fraction A/D converter of high-speed, high precision (3), and described microprocessor (2) also links to each other with the switching of second range through high-speed, high precision D/A converter (5).
2. high-speed high-precision process parameter online calibration tester according to claim 1 is characterized in that: said measurement module comprises overvoltage crowbar (10) and low noise low temperature drift amplifying circuit (11), and said output module comprises overvoltage crowbar (10).
3. high-speed high-precision process parameter online calibration tester according to claim 1; It is characterized in that: also comprise system control program, said system control program comprises that parameter setting module, port assignment module, distribution distribution module, measurement calibration module, output calibration module, error analysis module, form form module, data recordin module and printed report module.
4. high-speed high-precision process parameter online calibration tester according to claim 1 is characterized in that: the permanent cycle many skew products fraction A/D converter of said high-speed, high precision (3) comprises integrator (12), slope amplifier (13) and comparer (14).
5. high-speed high-precision process parameter online calibration tester according to claim 2 is characterized in that: said overvoltage crowbar (10) comprises high withstand voltage signal relay (16), forward protection device (17), reverse protection device (18), high input impedance voltage follower (19) and recovers over-current protection device (20) certainly.
CN2009101537766A 2009-11-09 2009-11-09 High-speed high-precision process parameter online calibration tester Expired - Fee Related CN101738947B (en)

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