CN101728231A - Automatic lifting mechanism of organic glass door for rapid heat-treatment furnace - Google Patents
Automatic lifting mechanism of organic glass door for rapid heat-treatment furnace Download PDFInfo
- Publication number
- CN101728231A CN101728231A CN200810224641A CN200810224641A CN101728231A CN 101728231 A CN101728231 A CN 101728231A CN 200810224641 A CN200810224641 A CN 200810224641A CN 200810224641 A CN200810224641 A CN 200810224641A CN 101728231 A CN101728231 A CN 101728231A
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- China
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- glass door
- organic glass
- guide rail
- lifting mechanism
- air cylinder
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Abstract
The invention discloses a rapid lifting mechanism of an organic glass door, relating to a rapid heat-treatment furnace and belonging to the field of semiconductor manufacture. The structure comprises a pair of linear motion guide rail pairs, two guide rail brackets, two guide rail sliding block brackets, an air cylinder and an organic glass door, wherein the organic glass door is fixedly connected with the guide rail sliding block through screws; the guide rail bracket is vertically and fixedly connected with a mechanism body; the air cylinder is fixedly connected with the sliding block bracket; the organic glass door ascends by a jacking driving force of the air cylinder; and the organic glass door descends when the air cylinder retracts. The linear motion guide rail pairs have high motion precision; and the air cylinder used as a driving force source has large driving force and simple action.
Description
Technical field
The present invention is a kind of automatic lifting mechanism of organic glass door of rapid heat-treatment furnace, is used for the automatic lifting organic glass door.Belong to field of semiconductor devices.
Technical background
Rapid thermal treatment is in the very short time, and single wafer is heated to a kind of method in 400～1300 ℃ of scopes, because it is the Fast Heating fast cooling, rapid heat-treatment furnace has reduced heat budget greatly.Because manipulator, wafer case pallet, the wafer cooling stage of the wafer transmission system of rapid heat-treatment furnace all are in low clean area, in order to improve the cleanliness factor of wafer transmission system, it is arranged in the airtight space transmits, the replacing of the wafer case the during batch processing of wafer for convenience simultaneously and the state of observing wafer transmission system, special at organic glass door that can hoist automatically of the front of machine design.Transparent polymethyl methacrylate is convenient to observe at any time the movement position of manipulator, and the organic glass door of automatic lifting is beneficial to and changes wafer case efficiently, is beneficial to the cleanliness factor that keeps wafer transmission system, has improved the reliability and the process efficiency of machine system.
Summary of the invention
The quick lifting mechanism of organic glass door of the present invention adopts guideway to carry out member for motion, uses cylinder as the motion-promotion force source mechanism.The slide block of guideway is contained on the slider bracket, on the rail brackets that guide rail is fixed on machine room is fixedlyed connected, the organic glass door of motion links to each other by screw with slider bracket, the slider bracket and the cylinder on the left side are fixedly linked, whole guideway accomplishes that motion steadily, the inlet pressure of cylinder is adjustable to be changed the sliding speed of slide block, reaches the lifting velocity of regulating organic glass door.
This mechanism is by constituting with lower member: stator 1 on two rail bracketses, two guide rails 2, organic glass door 3, Four-slider 4, stator 5 under two rail bracketses, one cylinder contiguous block, 6, one cylinders, 7, two rail bracketses 8, two slider brackets 9,10 sunk screw 10, two organic glass door press strips 11, machine room mounting panel 12.Shown in figure one and figure two.
The top of stator 1 fixed guide support on the described rail brackets guarantees vertically sliding of guide rail.
Totally two on described guide rail 2 is screwed on rail brackets 8, and slide block 4 slides thereon.
Described organic glass door 3 is used screw and is linked to each other with slider bracket 9, by its lifting of drive up and down of slide block 4.
Totally four of described slide blocks 4, left and right rail was last two, cooperates on guide rail 2 and slides.
The bottom of stator 5 fixed guide supports 8 under the described rail brackets.
Described cylinder contiguous block 6 connects together cylinder 7 with slider bracket 9, pass to move to slider bracket 9 for cylinder 7.
Described cylinder 7 is power sources of a motion, the up-downgoing that charges and discharge the corresponding slider bracket of gas of cylinder 7.
Described rail brackets 8 upper support fixed guides 2.
Description of drawings
Fig. 1 is the end view of the fast lifting mechanism of organic glass door
Fig. 2 is the front view of the fast lifting mechanism of organic glass door
Embodiment
The invention will be described further below in conjunction with accompanying drawing, but not as the qualification to invention.
As Fig. 1 and Fig. 2, a kind of novel organic glass door fast lifting mechanism is by constituting with lower member: stator 1, two guide rail 2 on two rail bracketses, organic glass door 3, stator 5, one cylinder contiguous blocks 6 under Four-slider 4, two rail bracketses, one cylinder 7,9,10 sunk screws 10 of two rail bracketses, 8, two slider brackets, two organic glass door press strips 11, machine room mounting panel 12.
Specific embodiment of the present invention elaborates content of the present invention.For persons skilled in the art, any conspicuous change that it is done all constitutes the infringement to this heat treatment patent, with corresponding legal responsibilities without departing from the premise in the spirit of the present invention.
Claims (3)
1. the fast lifting mechanism of an organic glass door is characterized in that: two linear motion guide rail pairs, a driving cylinder, two guide rail slider brackets, an organic glass door.Organic glass door is connected by screw with the guide rail slide block, and rail brackets is connected with machine body vertical fixing, and cylinder is fixedlyed connected with slider bracket again
2. as claimed in claim 1, it is characterized in that two linear motion guide rail pairs, be that two line slideways and Four-slider are formed, the precision of rectilinear motion height, kinetic friction force is very little.
3. the fast lifting mechanism of a kind of organic glass door as claimed in claim 1, it is characterized in that: the motion drive force source cylinder of described glass door is a high speed single-piston rod type, the band air cushioning prevents that glass door from having bump to produce too soon when descending.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200810224641XA CN101728231B (en) | 2008-10-22 | 2008-10-22 | Automatic lifting mechanism of organic glass door for rapid heat-treatment furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200810224641XA CN101728231B (en) | 2008-10-22 | 2008-10-22 | Automatic lifting mechanism of organic glass door for rapid heat-treatment furnace |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101728231A true CN101728231A (en) | 2010-06-09 |
| CN101728231B CN101728231B (en) | 2012-07-04 |
Family
ID=42448901
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN200810224641XA Active CN101728231B (en) | 2008-10-22 | 2008-10-22 | Automatic lifting mechanism of organic glass door for rapid heat-treatment furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN101728231B (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103131974A (en) * | 2011-12-01 | 2013-06-05 | 湖南晟通科技集团有限公司 | Bearing sliding door of aluminum foil continuous annealing furnace |
| CN103131973A (en) * | 2011-12-01 | 2013-06-05 | 湖南晟通科技集团有限公司 | Slide bar door of aluminum foil continuous annealing furnace |
| CN106273105A (en) * | 2015-05-27 | 2017-01-04 | 天津市富利达橡胶制品有限公司 | A kind of high security vulcanizing press |
| CN107270717A (en) * | 2017-06-19 | 2017-10-20 | 中国核电工程有限公司 | A kind of electric stove door mechanical structure |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN200999259Y (en) * | 2006-12-18 | 2008-01-02 | 中国电子科技集团公司第四十八研究所 | Automatic furnace gate opening gear |
-
2008
- 2008-10-22 CN CN200810224641XA patent/CN101728231B/en active Active
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103131974A (en) * | 2011-12-01 | 2013-06-05 | 湖南晟通科技集团有限公司 | Bearing sliding door of aluminum foil continuous annealing furnace |
| CN103131973A (en) * | 2011-12-01 | 2013-06-05 | 湖南晟通科技集团有限公司 | Slide bar door of aluminum foil continuous annealing furnace |
| CN103131974B (en) * | 2011-12-01 | 2016-03-23 | 湖南晟通科技集团有限公司 | The bearing sliding gate of aluminium foil continuous annealing furnace |
| CN103131973B (en) * | 2011-12-01 | 2016-04-20 | 晟通科技集团有限公司 | The Slide bar door of aluminium foil continuous annealing furnace |
| CN106273105A (en) * | 2015-05-27 | 2017-01-04 | 天津市富利达橡胶制品有限公司 | A kind of high security vulcanizing press |
| CN107270717A (en) * | 2017-06-19 | 2017-10-20 | 中国核电工程有限公司 | A kind of electric stove door mechanical structure |
Also Published As
| Publication number | Publication date |
|---|---|
| CN101728231B (en) | 2012-07-04 |
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| C57 | Notification of unclear or unknown address | ||
| DD01 | Delivery of document by public notice |
Addressee: Zhao Na Document name: Notification of Passing Preliminary Examination of the Application for Invention |
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| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |