CN101728202A - Voltage-equalizing structure of 360kV high-frequency and high-voltage multiplier - Google Patents
Voltage-equalizing structure of 360kV high-frequency and high-voltage multiplier Download PDFInfo
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- CN101728202A CN101728202A CN200810224639A CN200810224639A CN101728202A CN 101728202 A CN101728202 A CN 101728202A CN 200810224639 A CN200810224639 A CN 200810224639A CN 200810224639 A CN200810224639 A CN 200810224639A CN 101728202 A CN101728202 A CN 101728202A
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- voltage
- grading ring
- multiplier
- rosette
- metal disc
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Abstract
The invention discloses a voltage-equalizing structure which is applied to a 360kV high-voltage multiplier and comprises nine stages of voltage-equalizing rings, nine pairs of spherical fixed bolts, an upper metal disc and a lower metal disc; two ends of a circuit board of the high-voltage multiplier are respectively fixed on the upper metal disc and the lower metal disc, the nine stages of voltage-equalizing rings are evenly distributed between the upper metal disc and the lower metal disc, and all voltage-equalizing rings are respectively fixed on the circuit board of the multiplier by using insulating straps; each stage of voltage-equalizing ring right faces to a middle hit screw hole of a voltage-multiplying rectification plate, and a leading-out wire is fixed by a pair of spherical fixed bolts and is connected to the voltage-multiplying rectification plate. The high-voltage multiplier which aims at novel oil-free design has concise design and simple assembly, effectively realizes that the 360kv high voltage at two ends of the high-voltage multiplier is evenly distributed, and effectively restricts the space discharge phenomenon of the multiplier due to uneven high-voltage distribution.
Description
Technical field
The present invention relates to a kind of equal laminated structure of high-frequency and high-voltage dupler, particularly a kind of 360kv direct current that is applied in the energetic ion implanter does not have the equal laminated structure that innage is pressed dupler.Belong to field of semiconductor devices.
Background technology
The develop rapidly of ic manufacturing technology is had higher requirement to each semiconductor manufacturing equipment.Ion implantor is also had higher requirement as one of key equipment of semiconductor ion doping processing line, especially line index, bundle can purity, save aspects such as control deeply, implantation homogeneity and production efficiency and all be subjected to severe challenge.
In order to reach the energy indexes of technological requirement, particularly high energy injects, and we do not have innage pressure dupler for the high energy implanter of newly developing has designed a kind of novel 360kv direct current.This provides the high direct voltage of 360kv can for the accelerating tube two-stage, makes ion obtain enough energy in accelerating field.This has higher requirement to the control of dupler space electric field compared to the dupler design of 200kv before.Under the 360kv space electric field, uneven Electric Field Distribution can cause that internal field is too high, punctures air, causes the discharge sparking.This phenomenon has a strong impact on the injection index, damages equipment life, can not be allowed in the injection production process.So having innage at the 360kv direct current, we do not press dupler to design this 9 grades of equal laminated structures.It can evenly distribute direct current space electric field of 360kv effectively suppresses dupler space electric discharge phenomena.
Summary of the invention
In order to solve the problem of above-mentioned existence, the purpose of this invention is to provide the equal laminated structure of high direct voltage dupler a kind of simple in structure, easy for installation.
Technical scheme of the present invention is achieved in that this equal laminated structure, comprises rosette, following rosette, 9 grades of grading rings, 9 pairs of two ball set bolts.On the rosette, at the 9 grades of grading rings that evenly distribute between the rosette up and down, each grading ring was tied up with insulation respectively and is fixed on the dupler circuit board about wherein the circuit board two ends of Cockcroft-Walton accelerator were separately fixed at.Beat screw at every grade of grading ring over against the center of voltage multiplying rectifier plate, fixedly draw lead-in wire by two spherical gim pegs and receive on the voltage multiplying rectifier plate.
Described grading ring adopts pure aluminum material, and cross section is circular, the smooth no burr of smooth surface.
Screw is perforation on the described grading ring, and the front and rear gaps face designs for counterbore.
Described two spherical set bolt is: the out course strap bolt passes grading ring, lifts one's head, and inside ball is beaten screw, compresses lead-in wire and is connected and fixed with out course.The smooth no burr of interior ectosphere smooth surface, tangent with the grading ring counterbore, smooth connection.
Compare with the equal laminated structure that adopts before, the invention has the beneficial effects as follows:
1, simple in structure, easy to assembly.
2, can be applied on the 360kv Cockcroft-Walton accelerator, being evenly distributed of implementation space electric field effectively suppresses the space electric discharge phenomena of dupler, in atmosphere, can make dupler can not have the above high pressure of influence output 360KV.
Embodiment
Below in conjunction with the drawings and specific embodiments the present invention is described in further detail, but not as a limitation of the invention.
Shown in Fig. 1-2, a kind of 360kv does not have the equal laminated structure of oily high direct voltage dupler:
1. 6. pairs of spherical set bolts of circuit board support bar
2. dupler functional circuit plate 7. voltage multiplying rectifier plates
3. rosette on the aluminium matter grading ring 8.
4. 9. times rosettes of insulband
5. connection lead
Wherein, dupler functional circuit plate 2 is fixedly connected by circuit board support bar 1, and dupler functional circuit plate 2 and voltage multiplying rectifier plate 7 two ends are screwed respectively on last rosette 8 and following rosette 9.9 grades of aluminium matter grading rings 3 evenly distribute between last rosette 8 and following rosette 9, are fixed on dupler functional circuit plate 2 and the voltage multiplying rectifier plate 7 by insulband 4.Beat screw at every grade of aluminium matter grading ring 3 over against the center of voltage multiplying rectifier plate 7, fixedly draw by two spherical set bolt bolts 6 and connect lead 5 and receive on the voltage multiplying rectifier plate 7.Aluminium matter grading ring 3 and two spherical set bolt 6 surfaces and junction all guarantee smooth smooth, no burr.
The equal laminated structure of such nothing oil high direct voltage dupler can guarantee the even distribution of 360kv dc high voltage electric field, has effectively suppressed the space electric discharge phenomena of Cockcroft-Walton accelerator, can make the direct voltage of the stable output of dupler greater than 360kv.And this structural design is simple, and is easy to assembly.
Specific embodiment of the present invention elaborates content of the present invention.For persons skilled in the art, any conspicuous change that it is done all constitutes the infringement to patent of the present invention, with corresponding legal responsibilities without departing from the premise in the spirit of the present invention.
Claims (4)
1. an equal laminated structure that is applied to the 360kv Cockcroft-Walton accelerator comprises 9 grades of grading rings, 9 pairs of spherical gim pegs, last rosette and following rosette.On the rosette, at the 9 grades of grading rings that evenly distribute between the rosette up and down, each grading ring was fixed on the dupler circuit board with insulband respectively about the circuit board two ends of Cockcroft-Walton accelerator were separately fixed at.Beat screw at every grade of grading ring over against the center of voltage multiplying rectifier plate, fixedly draw lead-in wire by two spherical gim pegs and receive on the voltage multiplying rectifier plate.
2. a kind of equal laminated structure that is applied to the 360kv Cockcroft-Walton accelerator according to claim 1, its feature: described grading ring is a pure aluminum material, cross section is circular, the smooth no burr of smooth surface.
3. aluminum material grading ring according to claim 2, its screw is characterized as: perforation, the front and rear gaps face designs for counterbore.
4. according to claim 1 described two spherical set bolts, it is characterized by: the out course strap bolt passes grading ring, lifts one's head, and inside ball is beaten screw, compresses lead-in wire and is connected and fixed with out course.The smooth no burr of interior ectosphere smooth surface, tangent with the grading ring counterbore, smooth connection.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200810224639A CN101728202A (en) | 2008-10-22 | 2008-10-22 | Voltage-equalizing structure of 360kV high-frequency and high-voltage multiplier |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200810224639A CN101728202A (en) | 2008-10-22 | 2008-10-22 | Voltage-equalizing structure of 360kV high-frequency and high-voltage multiplier |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN101728202A true CN101728202A (en) | 2010-06-09 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN200810224639A Pending CN101728202A (en) | 2008-10-22 | 2008-10-22 | Voltage-equalizing structure of 360kV high-frequency and high-voltage multiplier |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN101728202A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103106940A (en) * | 2011-11-14 | 2013-05-15 | 中国原子能科学研究院 | Neutron collimation system of high-voltage doubler |
| CN105309050A (en) * | 2013-07-11 | 2016-02-03 | 株式会社日立医疗器械 | High-voltage generation device and X-ray generation device |
-
2008
- 2008-10-22 CN CN200810224639A patent/CN101728202A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103106940A (en) * | 2011-11-14 | 2013-05-15 | 中国原子能科学研究院 | Neutron collimation system of high-voltage doubler |
| CN105309050A (en) * | 2013-07-11 | 2016-02-03 | 株式会社日立医疗器械 | High-voltage generation device and X-ray generation device |
| US10050550B2 (en) | 2013-07-11 | 2018-08-14 | Hitachi, Ltd. | High-voltage generation device and X-ray generation device |
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|---|---|---|---|
| C57 | Notification of unclear or unknown address | ||
| DD01 | Delivery of document by public notice |
Addressee: Zhao Na Document name: Notification of Passing Preliminary Examination of the Application for Invention |
|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Open date: 20100609 |