CN101719735A - Large-moment double-rotor stress type longitudinal-torsional composite ultrasonic motor and electric excitation method thereof - Google Patents

Large-moment double-rotor stress type longitudinal-torsional composite ultrasonic motor and electric excitation method thereof Download PDF

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CN101719735A
CN101719735A CN201010017669A CN201010017669A CN101719735A CN 101719735 A CN101719735 A CN 101719735A CN 201010017669 A CN201010017669 A CN 201010017669A CN 201010017669 A CN201010017669 A CN 201010017669A CN 101719735 A CN101719735 A CN 101719735A
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piezoelectric ceramic
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longitudinal vibration
longitudinal
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CN101719735B (en
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赵淳生
杨淋
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JIANGSU FENGKE UTRASONIC MOTORS TECHNOLOGY Co Ltd
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Nanjing University of Aeronautics and Astronautics
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Abstract

The invention discloses a large-moment double-rotor stress type longitudinal-torsional composite ultrasonic motor and an electric excitation method thereof, belonging to the technical field of ultrasonic motors. The motor comprises a stator assembly and a rotor assembly, wherein the stator assembly comprises a friction sheet, a first group of longitudinal vibration piezoelectric ceramics, a first balance weight block, a first group of torsional vibration piezoelectric ceramics, a flange, a second group of torsional vibration piezoelectric ceramics, a second balance weight block, a second group of longitudinal vibration piezoelectric ceramics, a fastening bolt and two radial bearings; and the rotor assembly comprises a rotating shaft, a locking nut, a spring cover, a spring, a first rotor, a key, a friction material and a second rotor. The method is operated by the first-order torsional vibration in a stator and the second-order longitudinal vibration in the whole of the motor, and the longitudinal vibration piezoelectric ceramics are placed near the contact surface of the stator and the rotors, namely the pitch plane of the longitudinal vibration to fully excite and apply the longitudinal vibration of the motor. Compared with the prior art, the invention has larger rotor blocking torsion.

Description

Large-moment double-rotor stress type longitudinal-torsional composite ultrasonic motor and electric excitation method thereof
Technical field
The invention belongs to the ultrasound electric machine technical field, be specifically related to a kind of large-moment double-rotor stress type longitudinal-torsional composite ultrasonic motor.
Background technology
Ultrasound electric machine is to utilize the inverse piezoelectric effect of piezoelectric ceramic and the new type power output device of ultrasonic vibration.Compare with electromagnetic machine, have compact conformation, low speed high torque, response fast (Millisecond), cut off self-lock, position and speed control are good, be not subjected to advantages such as electromagnetic interference and low noise operation.Longitudinal-torsional compound ultrasonic motor is a macrotaxonomy of ultrasound electric machine, roughly can trace back to late 1980s to its research, and up to the present, its structure kind is as many as tens kinds.Longitudinal-torsional compound ultrasonic motor contains two oscillators-longitudinal vibration usually and reverses oscillator, indulges, reverses oscillator and inspire two orthogonal vibrations respectively, and two kinds of vibrations can be regulated separately, are not coupled mutually.Longitudinal-torsional compound ultrasonic motor has characteristics such as output torque is big, controllability strong, rotating characteristic unanimity, low-speed stability is good, dynamic response performance is good, now receives much attention.But general longitudinal-torsional compound ultrasonic motor all adopts sandwich structure to bring into play the effect of longitudinal vibration piezoelectric ceramic, and this utilance to the longitudinal vibration piezoelectric ceramic piece is lower.1998, Ueha develops a kind of longitudinal-torsional compound ultrasonic motor of dual-rotor structure, this motor can effectively utilize the vibration of longitudinal vibration piezoelectric ceramic piece, but shortcoming is: at first, part longitudinal vibration piezoelectric ceramic piece is placed on epitrochanterian structure and makes this motor must add the brush structure could to work the processing technology complexity of motor; Secondly, because contact occurs between the piezoelectric ceramic piece, the making of friction pair becomes complicated and difficulty.These have all limited the further lifting of motor output torque.
Summary of the invention
The present invention seeks to defective at the prior art existence, provide a kind of longitudinal vibration mode to be distributed in double-rotor stress type longitudinal-torsional composite ultrasonic motor in the stator and rotor simultaneously, this motor does not need the brush structure in the vibration that effectively utilizes the longitudinal vibration piezoelectric ceramic piece, and can carry out the pairing of friction pair easily, thereby improve the output torque of motor effectively.
The present invention adopts following technical scheme for achieving the above object:
Large-moment double-rotor stress type longitudinal-torsional composite ultrasonic motor of the present invention, comprise stator module and rotor assembly, it is characterized in that: described stator module by friction plate, first group of longitudinal vibration piezoelectric ceramic, first balancing weight (, first group of torsional oscillation piezoelectric ceramic, ring flange, second group of torsional oscillation piezoelectric ceramic, second balancing weight, second group of longitudinal vibration piezoelectric ceramic piece, fastening bolt and two journal bearings form; Rotor assembly is made up of rotation axis, locking nut, two spring cups, spring, the first rotor, key, friction material, second rotors; Stator module and rotor assembly corotation moving axis are provided with; Wherein, fastening bolt passes successively from left to right and fastening first balancing weight, first group of torsional oscillation piezoelectric ceramic, ring flange, second group of torsional oscillation piezoelectric ceramic and second balancing weight, first group of longitudinal vibration piezoelectric ceramic pasted in the left side of first balancing weight, second group of longitudinal vibration piezoelectric ceramic pasted in the right side of second balancing weight, friction plate is pasted on the outer face of first, second group longitudinal vibration piezoelectric ceramic respectively, and first, second balancing weight is connected with rotation axis by journal bearing respectively; The first rotor and second rotor are enclosed within on the rotation axis and are circumferentially fixing by key and rotation axis respectively, between the first rotor and second rotor bottom and the friction plate friction material is set, the two ends of rotation axis are passed respectively by two spring cups and are stepped up two precompression devices that spring constitutes, and the precompression device is arranged at the top of the first rotor and second rotor respectively and is anchored on the rotation axis by locking nut.
The motivational techniques of large-moment double-rotor stress type longitudinal-torsional composite ultrasonic motor, it is characterized in that: when first, second group longitudinal vibration piezoelectric ceramic polarization arrangement is opposite, be that 90 ° sinusoidal signal encourages first, second group torsional oscillation piezoelectric ceramic and first, second to organize the longitudinal vibration piezoelectric ceramic simultaneously with two phase differences; When first, second group longitudinal vibration piezoelectric ceramic polarization arrangement is identical, utilize three sinusoidal signals to encourage, wherein to add phase difference be 180 ° sinusoidal signal for first group of longitudinal vibration piezoelectric ceramic and second group of longitudinal vibration piezoelectric ceramic group, phase place is designated as respectively
Figure G2010100176693D00021
With
Figure G2010100176693D00022
Be applied to and then be the identical sinusoidal signal of phase place on first, second group torsional oscillation piezoelectric ceramic, and phase place is
Figure G2010100176693D00023
Exciting with phase difference frequently is 1 rank twisting vibration on 90 ° the stator module and 2 rank extensional vibrations of described ultrasound electric machine integral body, thereby drives rotor rotation.
The present invention compares with background technology has bigger stalling torque, and in the ultrasound electric machine under equivalent diameter size (Φ 20mm), the motor rotation blockage moment that the present invention proposes reaches 1.28Nm, has met or exceeded the highest level in the world (0.8Nm).
Description of drawings
Fig. 1 is that the structure of the large-moment double-rotor stress type longitudinal-torsional composite ultrasonic motor that proposes of the present invention is partly cutd open figure, and each label title is respectively among the figure:
The 11-friction plate; The 12-journal bearing; 13-first balancing weight; 14-second balancing weight; The 15-ring flange; The 16-installing hole; The 17-fastening bolt;
First group of longitudinal vibration piezoelectric ceramic of 21-; Second group of longitudinal vibration piezoelectric ceramic of 22-;
First group of torsional oscillation piezoelectric ceramic of 31-; Second group of torsional oscillation piezoelectric ceramic of 32-;
The 41-rotation axis; The 42-locking nut; The 43-spring cup; The 44-spring; The 45-the first rotor; The 46-key; The 47-friction material; 48-second rotor.
Fig. 2 is the operation mode of the large-moment double-rotor stress type longitudinal-torsional composite ultrasonic motor that proposes of the present invention.1 is the 1 rank torsional oscillation mode vibration shape that is distributed in the stator among the figure, the 2nd, be distributed in 2 rank longitudinal vibration Mode Shape in the motor integral body, and wherein, 1 rank torsional oscillation mode pitch plane is positioned on the ring flange, and 2 rank longitudinal vibration mode pitch planes are positioned on the stator and rotor contact-making surface.
Fig. 3 is the first kind of piezoelectric ceramic polarization arrangement and the electric excitation mode of the large-moment double-rotor stress type longitudinal-torsional composite ultrasonic motor that proposes of the present invention.First group of longitudinal vibration piezoelectric ceramic polarization arrangement (2) is identical with second group of longitudinal vibration piezoelectric ceramic polarization arrangement (3) among the figure, two groups of torsional oscillation piezoelectric ceramic polarization arrangements (4) are identical, need three sinusoidal signals to encourage, the phase difference between them is respectively shown in (11), (12) and (13).
Fig. 4 is the second kind of piezoelectric ceramic polarization arrangement and the electric excitation mode of the large-moment double-rotor stress type longitudinal-torsional composite ultrasonic motor that proposes of the present invention.First group of longitudinal vibration piezoelectric ceramic polarization arrangement (2) is opposite with second group of longitudinal vibration piezoelectric ceramic polarization arrangement (3) among the figure, two groups of torsional oscillation piezoelectric ceramic polarization arrangements (4) are identical, only need two sinusoidal signals to encourage, phase difference between them is 90 °, shown in (11) and (12).
Fig. 5 is the driving process of large-moment double-rotor stress type longitudinal-torsional composite ultrasonic motor in an Energizing cycle that the present invention proposes.Among the figure for clarity sake, the epitrochanterian friction material that do not draw, tooth does not draw yet on the friction plate of stator two ends.The number in the figure title is respectively: the 1-stator and rotor are in the axial elongation state; The 2-stator and rotor are in the axial shrinkage state; 3-stator faces twisting vibration direction; Stressed and the rotation direction of 4-rotor.
Embodiment
Be elaborated below in conjunction with the technical scheme of accompanying drawing to invention:
Large-moment double-rotor stress type longitudinal-torsional composite ultrasonic motor of the present invention comprises stator module and rotor assembly as shown in Figure 1.Stator module is made up of friction plate 11, first group of longitudinal vibration piezoelectric ceramic 21, first balancing weight 13, first group of torsional oscillation piezoelectric ceramic 31, ring flange 15, second group of torsional oscillation piezoelectric ceramic 32, second balancing weight 14, second group of longitudinal vibration piezoelectric ceramic piece 22, fastening bolt 17 and two journal bearings 12; Rotor assembly is made up of rotation axis 41, locking nut 42, spring cup 43, spring 44, the first rotor 45, key 46, friction material 47, second rotor 48.At first, first balancing weight 13, first group of torsional oscillation piezoelectric ceramic 31, ring flange 15, second group of torsional oscillation piezoelectric ceramic 32, second balancing weight 14 is arranged in a rod shaped structure in regular turn, and compress and fix by fastening bolt 17, place two journal bearings 12 at the two ends of first balancing weight 13 and second balancing weight 14 then, then utilize epoxy glue to be pasted on the end face of first balancing weight 13 and second balancing weight 14 respectively first group of longitudinal vibration piezoelectric ceramic 21 and second group of longitudinal vibration piezoelectric ceramic 22, with 11 outer faces that are pasted on two groups of longitudinal vibration piezoelectric ceramic respectively of friction plate of two surperficial tooth punchings, the stator assembling finishes so at last.Rotation axis 41 passes stationary part and supports by two journal bearings 12, the first rotor 45 and second rotor 48 are enclosed within on the rotation axis and by key 46 and rotation axis 41 and circumferentially fix, be bonded with certain thickness friction material 47 on two rotor bottom and the face that stator contacts, and utilize spring 44 to press them against respectively on two end faces of stator, final realize whole motor, it is one shaft-like that motor integral body is.Ring flange 15 edges have 4 aperture 16 are installed, and are used to install motor.
Above-mentioned large-moment double-rotor stress type longitudinal-torsional composite ultrasonic motor stator surface is pasted with the tooth punching friction plate, friction plate directly is pasted on longitudinal vibration piezoelectric ceramic surface, the effect of tooth punching friction plate is: in time get rid of the fine powder that the stator and rotor duration of work produces, make motor energy steady operation.
The operation mode of above-mentioned large-moment double-rotor stress type longitudinal-torsional composite ultrasonic motor is characterized in that: 1 rank torsional oscillation mode is excited by vibration piezoelectric ceramic, and only is distributed in the stator, and two end faces of stator are done rightabout twisting vibration; 2 rank longitudinal vibration mode are excited by the longitudinal vibration piezoelectric ceramic piece, are distributed in the motor integral body, and the pitch plane of longitudinal vibration mode is positioned near the rotor contact-making surface.
The piezoelectric ceramic polarization arrangement of above-mentioned large-moment double-rotor stress type longitudinal-torsional composite ultrasonic motor, it is characterized in that: two groups of torsional oscillation piezoelectric ceramic are in phase vibration, and two groups of longitudinal vibration piezoelectric ceramic are vibrate in opposite phase, therefore two groups of torsional oscillation piezoelectric ceramic polarization arrangement unanimities, two groups of longitudinal vibration piezoelectric ceramic piece polarization arrangements then both can be identical also can be opposite.
The motivational techniques of above-mentioned large-moment double-rotor stress type longitudinal-torsional composite ultrasonic motor, it is characterized in that: when first, second group longitudinal vibration piezoelectric ceramic 21,22 polarization arrangements are opposite, be that 90 ° sinusoidal signal encourages first, second group torsional oscillation piezoelectric ceramic 31,32 and first, second to organize longitudinal vibration piezoelectric ceramic 21,22 simultaneously with two phase differences; When first, second group longitudinal vibration piezoelectric ceramic 21,22 polarization arrangements are identical, utilize three sinusoidal signals to encourage, wherein to add phase difference be 180 ° sinusoidal signal for 22 groups of first group of longitudinal vibration piezoelectric ceramic 21 and second group of longitudinal vibration piezoelectric ceramic, and phase place is designated as respectively
Figure G2010100176693D00041
With
Figure G2010100176693D00042
Be applied to and then be the identical sinusoidal signal of phase place on first, second group torsional oscillation piezoelectric ceramic 31,32, and phase place is
Figure G2010100176693D00043
Exciting with phase difference frequently is 1 rank twisting vibration on 90 ° the stator module and 2 rank extensional vibrations of described ultrasound electric machine integral body, thereby drives rotor rotation.Figure 2 shows that the operation mode of motor, electric machine structure reasonable in design makes that 2 rank longitudinal vibration model frequencies of 1 rank torsional oscillation mode frequency of stator and motor integral body are consistent, so just can make the stator faces particle form suitable elliptic motion and drives rotor rotation.Require the pitch plane of 2 rank longitudinal vibration Mode Shape to drop near the stator and rotor contact-making surface in the design, and the longitudinal vibration piezoelectric ceramic is positioned near the stator and rotor contact-making surface, this has two purposes: the one, and according to the ultrasound electric machine design principle, the longitudinal vibration piezoelectric ceramic is positioned over the longitudinal vibration mode that longitudinal vibration pitch plane sheet could motivate motor fully; The 2nd, at the pitch plane place of longitudinal vibration mode, motor shaft to the stress maximum, thereby when stator and rotor contact, the axial contact force maximum that can provide, so motor can obtain maximum output torque.
One has 4 groups of piezoelectric ceramic in the motor, for the large-moment double-rotor stress type longitudinal-torsional composite ultrasonic motor, two kinds of piezoelectric ceramic polarization arrangements can be arranged, respectively as shown in Figure 3 and Figure 4.The polarization arrangement of these two kinds of piezoelectric ceramic different electric excitation modes to correspondence respectively, when two groups of longitudinal vibration piezoelectric ceramic polarization arrangements are identical, the electric excitation sinusoidal signal phase place that applies is respectively shown in Fig. 3 (11), (12) and (13), when two groups of longitudinal vibration piezoelectric ceramic polarization arrangements were opposite, the electric excitation sinusoidal signal phase place that applies was respectively shown in Fig. 4 (11) and (12).These two kinds polarization arrangement and electric excitation mode final purpose unanimities all are in order to make the vibration of two groups of longitudinal vibration piezoelectric ceramic opposite, promptly when wherein one group when doing the axial elongation vibration, make axial shrinkage for other one group.The vibration phase of torsional oscillation pottery then all differs 90 ° with two groups of longitudinal vibration piezoelectric ceramic.
The driving process of motor in an Energizing cycle as shown in Figure 5.During stable state, motor stator drives once respectively the two ends rotor in a drive cycle.The preceding half period is (in 0~T/2), the left-half stator and rotor extend simultaneously, begin contact, simultaneously the stator left side begin from speed be zero, the displacement maximum vibrates to the equilbrium position, left side rotor is subjected to the effect of friction-driven moment, begins to rotate, the right half part stator and rotor shrink simultaneously, be in disengaged position, be not subjected to the effect of moment of friction, drive by left side rotor and rotate; The later half cycle is (in the T/2~T), the left-half stator and rotor shrink simultaneously, be in disengaged position, be not subjected to the effect of moment of friction, and the right half part stator and rotor extend simultaneously, begin contact, simultaneously the stator right side begin from speed be zero, the displacement maximum vibrates to the equilbrium position, the right rotor is subjected to the effect of friction-driven moment, begin to rotate, and drive left side rotor is rotated further.

Claims (4)

1. large-moment double-rotor stress type longitudinal-torsional composite ultrasonic motor, comprise stator module and rotor assembly, it is characterized in that: described stator module is made up of friction plate (11), first group of longitudinal vibration piezoelectric ceramic (21), first balancing weight (13), first group of torsional oscillation piezoelectric ceramic (31), ring flange (15), second group of torsional oscillation piezoelectric ceramic (32), second balancing weight (14), second group of longitudinal vibration piezoelectric ceramic piece (22), fastening bolt (17) and two journal bearings (12); Rotor assembly is made up of rotation axis (41), locking nut (42), two spring cups (43), spring (44), the first rotor (45), key (46), friction material (47), second rotor (48); Stator module and rotor assembly corotation moving axis (41) are provided with; Wherein, fastening bolt (17) passes and fastening first balancing weight (13) from left to right successively, first group of torsional oscillation piezoelectric ceramic (31), ring flange (15), second group of torsional oscillation piezoelectric ceramic (32) and second balancing weight (14), first group of longitudinal vibration piezoelectric ceramic (21) pasted in the left side of first balancing weight (13), second group of longitudinal vibration piezoelectric ceramic (22) pasted in the right side of second balancing weight (14), friction plate (11) is pasted on first respectively, second group of longitudinal vibration piezoelectric ceramic (21,22) outer face, first, second balancing weight (13,14) be connected with rotation axis (41) by journal bearing (12) respectively; The first rotor (45) and second rotor (48) are enclosed within rotation axis (41) and upward and respectively circumferentially fix by key (46) and rotation axis (41), between the first rotor (45) and second rotor (48) bottom and the friction plate (11) friction material (47) is set, the two ends of rotation axis (41) are passed respectively by two spring cups (43) and are stepped up two precompression devices that spring (44) constitutes, and the precompression device is arranged at the top of the first rotor (45) and second rotor (48) respectively and is anchored on the rotation axis (41) by locking nut (42).
2. large-moment double-rotor stress type longitudinal-torsional composite ultrasonic motor as claimed in claim 1, it is characterized in that: the surperficial uniform profile of tooth projection of friction plate (11), friction plate (11) inside/outside diameter size is identical with first, second longitudinal vibration piezoelectric ceramic (21,22) inside/outside diameter size.
3. large-moment double-rotor stress type longitudinal-torsional composite ultrasonic motor as claimed in claim 1 is characterized in that: first, second group torsional oscillation piezoelectric ceramic (31,32) polarization arrangement unanimity.
4. the electric excitation method thereof of large-moment double-rotor stress type longitudinal-torsional composite ultrasonic motor as claimed in claim 1, it is characterized in that:, be that 90 ° sinusoidal signal encourages first, second group torsional oscillation piezoelectric ceramic (31,32) and first, second to organize longitudinal vibration piezoelectric ceramic (21,22) simultaneously with two phase differences when first, second group longitudinal vibration piezoelectric ceramic (21,22) polarization arrangement when opposite; When first, second group longitudinal vibration piezoelectric ceramic (21,22) polarization arrangement is identical, utilize three sinusoidal signals to encourage, wherein to add phase difference be 180 ° sinusoidal signal to first group of longitudinal vibration piezoelectric ceramic (21) and second group of longitudinal vibration piezoelectric ceramic (22) group, and phase place is designated as respectively
Figure F2010100176693C00011
With
Figure F2010100176693C00012
Be applied to and then be the identical sinusoidal signal of phase place on first, second group torsional oscillation piezoelectric ceramic (31,32), and phase place is
Figure F2010100176693C00013
Exciting with phase difference frequently is 1 rank twisting vibration on 90 ° the stator module and 2 rank extensional vibrations of described ultrasound electric machine integral body, thereby drives rotor rotation.
CN2010100176693A 2010-01-12 2010-01-12 Large-moment double-rotor stress type longitudinal-torsional composite ultrasonic motor and electric excitation method thereof Expired - Fee Related CN101719735B (en)

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Cited By (10)

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CN101943243A (en) * 2010-06-25 2011-01-12 哈尔滨工程大学 Electromagnetic type two-degree-of-freedom semi-active vibration absorber
CN102931874A (en) * 2012-11-22 2013-02-13 上海交通大学 Piezoelectric motor driven by longitudinal-torsional piezoelectric ceramic cylinder
CN103042281A (en) * 2012-12-29 2013-04-17 苏州市职业大学 Ultrasonic and electric spark combined machining vibrator on basis of longitudinal-torsional combined mode
CN105305876A (en) * 2015-11-16 2016-02-03 南京航空航天大学 Rib plate stress type longitudinal-torsional composite ultrasonic motor
CN105478332A (en) * 2015-11-20 2016-04-13 哈尔滨工业大学 Longitudinal-torsional resonance ultrasonic vibration device
CN106487273A (en) * 2015-08-27 2017-03-08 中原大学 Single-type hybrid, dual-hybrid piezoelectric motor and hybrid piezoelectric motor combination
CN106911263A (en) * 2015-12-23 2017-06-30 上海交通大学 Multiaxis piezoelectric micro motor
CN111555657A (en) * 2020-06-03 2020-08-18 集美大学 Traveling wave rotary ultrasonic motor friction plate with groove
CN113595438A (en) * 2020-04-30 2021-11-02 华侨大学 Rhombic double-longitudinal-vibration sandwich type excitation double-foot linear ultrasonic motor and stator thereof
CN113595438B (en) * 2020-04-30 2024-06-07 华侨大学 Rhombic double longitudinal vibration sandwich type excitation bipedal linear ultrasonic motor and stator thereof

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CN101943243B (en) * 2010-06-25 2012-02-01 哈尔滨工程大学 Electromagnetic type two freedom degree semi-active vibration absorber
CN101943243A (en) * 2010-06-25 2011-01-12 哈尔滨工程大学 Electromagnetic type two-degree-of-freedom semi-active vibration absorber
CN102931874B (en) * 2012-11-22 2016-02-10 上海交通大学 The piezoelectric motor that longitrorse type piezoelectric ceramic cylinder drives
CN102931874A (en) * 2012-11-22 2013-02-13 上海交通大学 Piezoelectric motor driven by longitudinal-torsional piezoelectric ceramic cylinder
CN103042281A (en) * 2012-12-29 2013-04-17 苏州市职业大学 Ultrasonic and electric spark combined machining vibrator on basis of longitudinal-torsional combined mode
CN103042281B (en) * 2012-12-29 2016-01-27 苏州市职业大学 Based on the ultrasonic edm Compound Machining oscillator of Hybrid transducer mode
CN106487273A (en) * 2015-08-27 2017-03-08 中原大学 Single-type hybrid, dual-hybrid piezoelectric motor and hybrid piezoelectric motor combination
CN106487273B (en) * 2015-08-27 2019-02-15 中原大学 Single-type hybrid, dual-hybrid piezoelectric motor and hybrid piezoelectric motor combination
CN105305876A (en) * 2015-11-16 2016-02-03 南京航空航天大学 Rib plate stress type longitudinal-torsional composite ultrasonic motor
CN105478332A (en) * 2015-11-20 2016-04-13 哈尔滨工业大学 Longitudinal-torsional resonance ultrasonic vibration device
CN106911263A (en) * 2015-12-23 2017-06-30 上海交通大学 Multiaxis piezoelectric micro motor
CN106911263B (en) * 2015-12-23 2020-04-03 上海交通大学 Multi-shaft piezoelectric micromotor
CN113595438A (en) * 2020-04-30 2021-11-02 华侨大学 Rhombic double-longitudinal-vibration sandwich type excitation double-foot linear ultrasonic motor and stator thereof
CN113595438B (en) * 2020-04-30 2024-06-07 华侨大学 Rhombic double longitudinal vibration sandwich type excitation bipedal linear ultrasonic motor and stator thereof
CN111555657A (en) * 2020-06-03 2020-08-18 集美大学 Traveling wave rotary ultrasonic motor friction plate with groove
CN111555657B (en) * 2020-06-03 2021-09-21 集美大学 Traveling wave rotary ultrasonic motor friction plate with groove

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CF01 Termination of patent right due to non-payment of annual fee

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