CN101719712A - 一种动铁式直线电机线圈阵列功率驱动分配方法 - Google Patents
一种动铁式直线电机线圈阵列功率驱动分配方法 Download PDFInfo
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- CN101719712A CN101719712A CN200910243477A CN200910243477A CN101719712A CN 101719712 A CN101719712 A CN 101719712A CN 200910243477 A CN200910243477 A CN 200910243477A CN 200910243477 A CN200910243477 A CN 200910243477A CN 101719712 A CN101719712 A CN 101719712A
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
- H02K41/02—Linear motors; Sectional motors
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Application Number | Priority Date | Filing Date | Title |
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CN2009102434771A CN101719712B (zh) | 2009-12-24 | 2009-12-24 | 一种动铁式直线电机线圈阵列功率驱动分配方法 |
PCT/CN2010/079782 WO2011076069A1 (zh) | 2009-12-24 | 2010-12-14 | 一种动铁式直线电机线圈阵列功率驱动分配方法 |
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CN2009102434771A CN101719712B (zh) | 2009-12-24 | 2009-12-24 | 一种动铁式直线电机线圈阵列功率驱动分配方法 |
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CN101719712A true CN101719712A (zh) | 2010-06-02 |
CN101719712B CN101719712B (zh) | 2011-10-26 |
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WO (1) | WO2011076069A1 (zh) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2011076069A1 (zh) * | 2009-12-24 | 2011-06-30 | 清华大学 | 一种动铁式直线电机线圈阵列功率驱动分配方法 |
CN103064256A (zh) * | 2011-09-09 | 2013-04-24 | Asml控股股份有限公司 | 线性电机和包括线性电机的光刻布置 |
CN103760795A (zh) * | 2013-12-31 | 2014-04-30 | 清华大学 | 一种基于广播通讯的多通道线圈电流切换装置 |
CN103956880A (zh) * | 2014-05-23 | 2014-07-30 | 清华大学 | 一种动铁式直线电机多盘式线圈切换装置及方法 |
CN103973074A (zh) * | 2014-05-23 | 2014-08-06 | 清华大学 | 一种动铁式直线电机单盘式线圈切换装置及方法 |
WO2019007202A1 (zh) * | 2017-07-06 | 2019-01-10 | 上海合栗智能科技有限公司 | 线性传输系统及其控制装置和多动子协同控制系统 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3907566B2 (ja) * | 2002-09-27 | 2007-04-18 | キヤノン株式会社 | 位置決め装置における測定手段を初期化する方法 |
CN1684347A (zh) * | 2004-04-17 | 2005-10-19 | 戴开煌 | 长行程动铁型直流直线电机 |
CN100566096C (zh) * | 2007-11-19 | 2009-12-02 | 哈尔滨工业大学 | 长行程恒加速度直线电机及其控制方法 |
CN101719712B (zh) * | 2009-12-24 | 2011-10-26 | 清华大学 | 一种动铁式直线电机线圈阵列功率驱动分配方法 |
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2009
- 2009-12-24 CN CN2009102434771A patent/CN101719712B/zh active Active
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2010
- 2010-12-14 WO PCT/CN2010/079782 patent/WO2011076069A1/zh active Application Filing
Cited By (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2011076069A1 (zh) * | 2009-12-24 | 2011-06-30 | 清华大学 | 一种动铁式直线电机线圈阵列功率驱动分配方法 |
CN103064256A (zh) * | 2011-09-09 | 2013-04-24 | Asml控股股份有限公司 | 线性电机和包括线性电机的光刻布置 |
US9083227B2 (en) | 2011-09-09 | 2015-07-14 | Asml Holding N.V. | Linear motor and lithography arrangement including linear motor |
CN103760795A (zh) * | 2013-12-31 | 2014-04-30 | 清华大学 | 一种基于广播通讯的多通道线圈电流切换装置 |
CN103956880A (zh) * | 2014-05-23 | 2014-07-30 | 清华大学 | 一种动铁式直线电机多盘式线圈切换装置及方法 |
CN103973074A (zh) * | 2014-05-23 | 2014-08-06 | 清华大学 | 一种动铁式直线电机单盘式线圈切换装置及方法 |
CN103973074B (zh) * | 2014-05-23 | 2016-09-28 | 清华大学 | 一种动铁式直线电机单盘式线圈切换装置及方法 |
WO2019007202A1 (zh) * | 2017-07-06 | 2019-01-10 | 上海合栗智能科技有限公司 | 线性传输系统及其控制装置和多动子协同控制系统 |
CN109217767A (zh) * | 2017-07-06 | 2019-01-15 | 上海合栗智能科技有限公司 | 线性传输系统及其控制装置和多动子协同控制系统 |
CN109217767B (zh) * | 2017-07-06 | 2020-08-18 | 上海合栗智能科技有限公司 | 线性传输系统及其控制装置和多动子协同控制系统 |
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Publication number | Publication date |
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CN101719712B (zh) | 2011-10-26 |
WO2011076069A1 (zh) | 2011-06-30 |
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Address after: 100084 Beijing box office,,, Tsinghua University Patentee after: TSINGHUA University Patentee after: BEIJING U-PRECISION TECH Co.,Ltd. Address before: 100084 Beijing box office,,, Tsinghua University Patentee before: Tsinghua University Patentee before: U-PRECISION TECH Co.,Ltd. |
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