CN101685026B - Method and device for calibrating zero position output value of sensitive shaft of tilt angle sensor - Google Patents

Method and device for calibrating zero position output value of sensitive shaft of tilt angle sensor Download PDF

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CN101685026B
CN101685026B CN2008101612955A CN200810161295A CN101685026B CN 101685026 B CN101685026 B CN 101685026B CN 2008101612955 A CN2008101612955 A CN 2008101612955A CN 200810161295 A CN200810161295 A CN 200810161295A CN 101685026 B CN101685026 B CN 101685026B
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value
acceleration transducer
sensitive
obliquity sensor
zero position
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CN101685026A (en
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易小刚
周翔
周继辉
王巍
李早平
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Sany Heavy Industry Co Ltd
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Sany Heavy Industry Co Ltd
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Abstract

The invention discloses a method for calibrating a zero position output value of a sensitive shaft of a tilt angle sensor. The tilt angle sensor is a tilt angle sensor of a capacitive type acceleration transducer. The method comprises the following steps: fixing a tilt angle sensor circuit board on a plane; making the sensitive shaft of the tilt angle sensor parallelling to the direction of gravity, and applying a first action force on a movable polar plate of a sensor capacitor; acquiring a first calibration factor value; applying a second action force on a movable polar plate of a sensor capacitor in the direction of the sensitive shaft; and ensuring that the second action force and the first action force have same strength and opposite directions by taking the capacitive type acceleration transducer as the reference; acquiring a second calibration factor value; and acquiring a zero position output value of the sensitive shaft, wherein the zero position output value is equal to 1/2 of the sum of the first calibration factor value and the second calibration factor value. The method can accurately calibrate the zero position output value of the sensitive shaft of the tilt angle sensor, avoid the defect that the zero position output value is manually calibrated and ensure that the tilt angle sensor can more accurately measure the tilt angle.

Description

The method of calibrating zero position output value of sensitive shaft of tilt angle sensor and obtain the method for its parameter
Technical field
The present invention relates to a kind of scaling method and device of zero position output value of sensitive shaft of obliquity sensor; Be particularly related to a kind of scaling method of zero position output value of sensitive shaft of obliquity sensor of capacitance acceleration transducer, also relate to the device of calibrating zero position output value of sensitive shaft of tilt angle sensor.
Background technology
In engineering machinery field such as building machinery, pavement construction machinery, harbour machinery, hoisting machinery,, require obliquity sensor can accurately measure the angle of inclination of the relative reference plane of certain parts in order to reach the purpose of machine performance monitoring and attitude control.
Traditional obliquity sensor is a pendulum sensor, comprises solid pendulum, liquid pendulum and gas pendulum obliquity sensor, and solid pendulum obliquity sensor volume and weight is all bigger; Liquid pendulum-type obliquity sensor peripheral circuit is complicated, and response frequency is low; Gas pendulum obliquity sensor gas motion is complicated, and measuring accuracy is lower.On the basis of traditional obliquity sensor; Having occurred is the obliquity sensor of new generation on basis with the capacitance acceleration transducer; Volume is little, low in energy consumption, response speed fast and the reliability advantages of higher because of obliquity sensor body of new generation possesses, and has been widely used in engineering machinery field.
Capacitance acceleration transducer is a sensor of measuring acceleration, and its principle of work is based on the characteristics of capacitor electric field, utilizes the difference of voltage between the electrode for capacitors to change acceleration is measured.As shown in Figure 1; Capacitor comprises the fixed plate 10 and fixed plate 30 that is positioned at two ends, and movable plate electrode 20 is positioned in the middle of two fixed electrode plates 10 and 30, and can move corresponding distance to both sides according to stressed varying in size; When moving, movable plate electrode 20 and fixed plate 10, distance change between 30.If setting the voltage of pole plate 10 is 0, the voltage of fixed plate 30 is U, and when movable plate electrode 20 was not stressed, the voltage of movable plate electrode 20 was 0.5U, and the voltage of exporting from movable plate electrode 20 and fixed plate 30 is 0.5U.When movable plate electrode 20 receives parallel with the capacitor electrode field direction; Behind the power F to the left, movable plate electrode 20 can be moved to the left certain distance, and the distance size is directly proportional with F; The voltage of output is (0.5+kl) U between movable plate electrode 20 and the fixed plate 30; Wherein k is a coefficient, therefore, can find out the voltage of output and being in proportion of stressed F; Be the basis with the capacitor output voltage, acceleration transducer can be exported the initial parameter proportional with condenser voltage.The initial parameter of acceleration transducer output can be the amount of aanalogvoltage; It also can be the dutycycle of pulse wave signal; The microprocessor of acceleration transducer can obtain the relevant acceleration data according to initial parameter; Detailed data can referenced patent number is the disclosed content of CN200310108891.4, open text that simultaneously can referenced patent application CN200610012638.2.
The obliquity sensor of capacitance acceleration transducer is exactly a difference of utilizing the output initial parameter of acceleration transducer, realizes the measurement to the angle of inclination.In the obliquity sensor of capacitance acceleration transducer, in order to demarcate the angle of inclination of obliquity sensor place parts, also be provided with sensitive axes, said sensitive axes is parallel with the direction of an electric field of capacitor in the capacitance acceleration transducer.
The principle of work of capacitance acceleration transducer obliquity sensor is: during the capacitor horizontal positioned of capacitance acceleration transducer; Output relevant voltage value between movable plate electrode 20 and the fixed plate 30; Acceleration transducer can be exported an initial parameter with magnitude of voltage relation in direct ratio; The initial parameter value of this moment output is the output valve of sensitive shaft of tilt angle sensor when being zero degree, just zero position output value of sensitive shaft of tilt angle sensor zeroset.When the sensitive axes of obliquity sensor and surface level were angled, the movable plate electrode 20 of capacitor can produce corresponding displacement under action of gravity; Capacitance acceleration transducer can be exported and the corresponding initial parameter out of displaced plate this moment, through microprocessor the initial parameter of output is handled then, exports the angle of inclination data of corresponding sensitive shaft of tilt angle sensor; Concrete processing mode; Just the acquisition methods of angle-data is: α=arcsin{ (out-zeroset)/sensitivity}, and wherein α is the angle of sensitive axes and surface level, sensitivity is the sensitivity of acceleration transducer; Deducting zeroset with out is exactly the initial parameter that gravity produces at the axial component of sensitivity; Just can draw α through the trigonometric function relation, thereby realize measurement, obtain corresponding inclination data the inclination angle.
Current, because obliquity sensor is for produce general zero position output value of sensitive axes existence of obliquity sensor in batch; This general zero position output value is relevant with the position of capacitor movable plate electrode 20, but in process of production, the position of movable plate electrode can not be all consistent with the position of setting; Can produce corresponding error; Therefore, corresponding deviation is all arranged with respect to the zero position output value of sensitive shaft of each obliquity sensor of general zero position output value, such as: the general deviation of the zeroset of acceleration transducer ADXL213 is up to ± 2%; Compensate if obliquity sensor is not carried out the zero position output value deviation, will influence the measuring accuracy of obliquity sensor.Therefore, need the zero position output value of sensitive shaft of the obliquity sensor of each capacitance acceleration transducer be demarcated in use, obliquity sensor zeroset deviation is compensated.
Current, in order to demarcate the zeroset of acceleration transducer sensitive axes, normally sensor is placed on certain plane, manually look for the zero-bit of sensitive axes, the value of acceleration transducer output at this moment is as zeroset then.Current scaling method has two deficiencies: the one,, the zero-bit of manually looking for sensitive axes has certain error certainly, and also there is bigger error in the zeroset that obtain this moment; The second, in manual operation, can there be a dynamic acceleration, this dynamic acceleration also can influence the degree of accuracy of obtaining zeroset.
Summary of the invention
To above-mentioned defective; The method and apparatus that provides a kind of calibrating zero position output value of sensitive shaft of tilt angle sensor of catalogue of the present invention; In order to realize this catalogue; The present invention is in that a kind of method of obtaining the calibrating zero position output value of sensitive shaft of tilt angle sensor parameter is provided aspect first, to obtain corresponding demarcation factor value, for calibrating zero position output value of sensitive shaft of tilt angle sensor lays the foundation.
Aspect second, the method for calibrating zero position output value of sensitive shaft of tilt angle sensor is provided, to obtain zero position output value of sensitive shaft more accurately.
Providing on the basis of said method, device and the obliquity sensor of realizing said method also are provided.
In the method for obtaining the calibrating zero position output value of sensitive shaft of tilt angle sensor parameter provided by the invention, said obliquity sensor is the gradient sensor of capacitance acceleration transducer, and is provided with sensitive axes; Said obliquity sensor comprises the capacitance acceleration transducer that has capacitor, and said capacitance acceleration transducer can be measured the acceleration on the sensitive axes direction, and said capacitor comprises a movable plate electrode, and this method may further comprise the steps:
The obliquity sensor circuit board is fixed, on the sensitive axes direction, made movable plate electrode receive first acting force;
Obtain first of capacitance acceleration transducer output and demarcate factor value;
On the sensitive axes direction, make movable plate electrode receive second acting force, with the capacitance acceleration transducer reference, said second acting force equates with first amount of force, and in the opposite direction;
Obtain second of capacitance acceleration transducer output and demarcate factor value.
Preferably, the said concrete grammar that makes movable plate electrode receive second acting force is: with a straight line vertical with sensitive axes is axle, with fixing behind the obliquity sensor circuit board Rotate 180 degree.
Preferably, said the obliquity sensor circuit board being fixed, specifically is the obliquity sensor circuit board to be fixed on the plane, and to make the sensitive axes and the said plane parallel of said obliquity sensor; The said straight line vertical with sensitive axes is the straight line vertical with said plane.
Preferably, the said concrete grammar that obtains the first demarcation factor value is: the demarcation factor of record capacitance acceleration transducer output predetermined quantity, and the value of the demarcation factor that occurrence number is maximum is demarcated factor value as first; The said concrete grammar that obtains the second demarcation factor value is: the demarcation factor of record capacitance acceleration transducer output predetermined quantity, the value of the demarcation factor that occurrence number is maximum is demarcated factor value as second.
In the method for a kind of calibrating zero position output value of sensitive shaft of tilt angle sensor provided by the invention, said obliquity sensor is the gradient sensor of capacitance acceleration transducer, and is provided with sensitive axes; Said obliquity sensor comprises the capacitance acceleration transducer that has capacitor, and said capacitance acceleration transducer can be measured the acceleration on the sensitive axes direction, and said capacitor comprises a movable plate electrode, and this method may further comprise the steps:
The obliquity sensor circuit board is fixed, on the sensitive axes direction, made movable plate electrode receive first acting force;
Obtain first of capacitance acceleration transducer output and demarcate factor value;
On the sensitive axes direction, make movable plate electrode receive second acting force, with the capacitance acceleration transducer reference, said second acting force equates with first amount of force, and in the opposite direction;
Obtain second of capacitance acceleration transducer output and demarcate factor value;
Obtain said zero position output value of sensitive shaft, described zero position output value equals first and demarcates 1/2 of the factor value and the second demarcation factor value sum.
Preferably, the said concrete grammar that makes movable plate electrode receive second acting force is: with a straight line vertical with sensitive axes is axle, with fixing behind the obliquity sensor circuit board Rotate 180 degree.
Preferably, said the obliquity sensor circuit board being fixed, specifically is the obliquity sensor circuit board to be fixed on the plane, and to make the sensitive axes and the said plane parallel of said obliquity sensor; The said straight line vertical with sensitive axes is the straight line vertical with said plane.
Preferably, the said concrete grammar that obtains the first demarcation factor value is: the demarcation factor of record capacitance acceleration transducer output predetermined quantity, and the value of the demarcation factor that occurrence number is maximum is demarcated factor value as first;
The said concrete grammar that obtains the second demarcation factor value is: the demarcation factor of record capacitance acceleration transducer output predetermined quantity, the value of the demarcation factor that occurrence number is maximum is demarcated factor value as second.
Preferably, said plane is the plane parallel with gravity direction; Saidly fixedly the time, make said sensitive axes keep parallel the obliquity sensor circuit board with gravity direction.
Preferably, the said sensitive axes that makes keeps the concrete grammar parallel with gravity direction to be: the angle of inclination of the output through obliquity sensor confirm sensitive axes whether with the gravity direction keeping parallelism.
In addition, the present invention also provides a kind of device that obtains the calibrating zero position output value of sensitive shaft of tilt angle sensor parameter, and this device comprises capacitance acceleration sensing module, microprocessor and output terminal; The capacitance acceleration sensing module can be exported electric signal to microprocessor; Described microprocessor can receive electric signal, and can electric signal be handled, and obtains the demarcation factor value; Described microprocessor can be exported the rotation indication after obtaining and demarcating factor value by output terminal.
Preferably; The device that obtains the calibrating zero position output value of sensitive shaft of tilt angle sensor parameter also comprises filtration module; The capacitance acceleration sensing module can be exported electric signal to microprocessor, specifically is, the capacitance acceleration sensing module can be exported electric signal to filtration module; Said filtration module can filter the electric signal that receives, and again electric signal is outputed to microprocessor.
Preferably, when described microprocessor is handled electric signal at every turn, can obtain the demarcation factor of predetermined quantity; Described microprocessor can obtain the demarcation factor value, specifically is, described microprocessor can be with the value of demarcating the demarcation factor that occurrence number is maximum in the demarcation factor that factor value confirms as predetermined quantity.
The device of calibrating zero position output value of sensitive shaft of tilt angle sensor provided by the invention comprises the above-mentioned device that obtains the calibrating zero position output value of sensitive shaft of tilt angle sensor parameter; Described microprocessor can also obtain zero position output value of sensitive shaft of tilt angle sensor, said zero position output value of sensitive shaft equal two said demarcation factor value summation 1/2.
Preferably, when described microprocessor is handled electric signal at every turn, can obtain the demarcation factor of predetermined quantity; Described microprocessor can obtain the demarcation factor value, specifically is, described microprocessor can be with the value of demarcating the demarcation factor that occurrence number is maximum in the demarcation factor that factor value confirms predetermined quantity.
A kind of obliquity sensor that is used to implement said method that the present invention also provides, this obliquity sensor comprises capacitance acceleration sensing module, microprocessor and output terminal, the capacitance acceleration sensing module can be exported electric signal to microprocessor; Described microprocessor can be handled the electric signal that receives and obtain the angle of inclination data; And the angle of inclination data are exported by output terminal; Described microprocessor can be handled electric signal according to the method described above; The corresponding rotation indication of output is obtained the first demarcation factor value and second and is demarcated factor value.The another kind of obliquity sensor that provides can also obtain the zero position output value of sensitive axes according to said method.
Compared with prior art; Method provided by the invention is utilized the characteristics of capacitance acceleration transducer condenser voltage; Earlier the obliquity sensor circuit board is fixed, made the movable plate electrode of capacitor receive first acting force, obtain first of capacitance acceleration transducer output and demarcate factor value; Then, movable plate electrode is received with first amount of force equate, and second acting force in the opposite direction; Obtain second of capacitance acceleration transducer output and demarcate factor value; Demarcate the zero position output value of sensitive shaft that factor value are obtained the capacitance acceleration obliquity sensor according to these two, avoided manually making the parallel error that causes of sensitive axes, reduced measuring error to greatest extent with surface level; Improve the precision of demarcating zero position output value, thereby can improve the measuring accuracy of obliquity sensor greatly.
In further technical scheme, the obliquity sensor circuit board is fixed on the plane, with obliquity sensor circuit board Rotate 180 degree, the capacitor anglec of rotation is controlled more easily then, the zero position output value error that reduces to obtain further.
In further technical scheme; Obtain a plurality of demarcation factors earlier; And then select the maximum demarcation factor value of occurrence number as the basis of demarcating zero position output value; Can guarantee to alleviate to greatest extent the influence of dynamic acceleration, the zero position output value error that reduces to obtain to zero position output value.
more further in the technical scheme, make the plane of fixed angle sensor parallel, and make sensitive axes keep parallel with gravity direction with gravity direction, can make the values of two demarcation factors differ bigger, change more obvious, the zero position output value error that reduces to obtain.
The method and apparatus of relevant calibrating zero position output value of sensitive shaft of tilt angle sensor provided by the invention is applicable to the demarcation of the zero position output value of sensitive shaft of acceleration obliquity sensor, is specially adapted to the demarcation of the zero position output value of sensitive shaft of capacitance acceleration obliquity sensor.
Description of drawings
Fig. 1 is the capacitance acceleration transducer fundamental diagram;
Fig. 2 is that the present invention has implemented to provide the method flow diagram of demarcating the zero position output value of sensitive shaft of obliquity sensor;
Fig. 3 is obliquity sensor capacitor state sketch before rotation;
Fig. 4 is a state sketch behind the obliquity sensor capacitor Rotate 180 degree;
Fig. 5 is the method flow diagram of zero position output value of sensitive shaft of the obliquity sensor of the demarcation dual-axis capacitance type acceleration transducer that provides of another embodiment of the present invention;
Fig. 6 is the apparatus structure block diagram that the invention provides the zero position output value of sensitive shaft parameter of obtaining the obliquity sensor of demarcating the dual-axis capacitance type acceleration transducer.
Embodiment
Describe the present invention below in conjunction with accompanying drawing, the description of this part only is exemplary and explanatory, should any restriction not arranged to protection scope of the present invention.
Obliquity sensor can be provided with a sensitive axes, also can establish two or more sensitive axes.For the convenience of describing, the method for the calibrating zero position output value of sensitive shaft of tilt angle sensor that embodiment one provides is that the obliquity sensor with the acceleration transducer that is provided with a sensitive axes is that example is described.
As shown in Figure 2, when the beginning manner of execution, need to start the calibrating procedure module of obliquity sensor, be about to related circuit and be communicated with, obtain corresponding initial parameter through the obliquity sensor output terminal, or corresponding initial parameter is stored in the memory module.When demarcating zero position output value of sensitive shaft zeroset, the initial parameter of output is called the demarcation factor.In this example, be with the interface short circuit that starts the demarcation degree, begin to carry out following steps then.
Step S101 is fixed on the obliquity sensor circuit board on the plane, and makes the sensitive axes and the said plane parallel of said obliquity sensor.Among the embodiment, be that the obliquity sensor circuit board is fixed in the vertical plane through thimble.It will be understood by those skilled in the art that the obliquity sensor circuit board and restart calibrating procedure after fixing, can avoid of the influence of moving acceleration movable plate electrode, make demarcation factor that obliquity sensor obtains sooner, more accurate.
Step S102 obtains first of capacitance acceleration transducer output and demarcates factor value z1.Because with calibrating procedure interface short circuit, at this moment, what the obliquity sensor output terminal was exported is the demarcation factor that acceleration transducer produces, the value of the demarcation factor of output and capacitor output voltage relation in direct ratio, the demarcation factor value of obtaining can be used as z1; Demarcating factor can be aanalogvoltage, can be the dutycycle of pulse wave signal also, and in this example, demarcating factor is the dutycycle of pulse wave signal.It will be understood by those skilled in the art that obtaining the demarcation factor can carry out according to the indication that the input end of obliquity sensor is imported; In this example, be according to preestablishing, obtaining automatically by microprocessor.In fact and since in the capacitor movable plate electrode stressed after, have corresponding vibrations; Therefore, the value of the demarcation factor of output can constantly change, in order to reduce the error of the z1 that obtains; Avoid dynamic acceleration to demarcating the influence of factor; Can write down a plurality of demarcation factors, then, select the maximum demarcation factor value of occurrence number again as z1.In this example, be to make the microprocessor of obliquity sensor write down the demarcation factor of 200 outputs automatically, the microprocessor demarcation factor value that occurrence number of selection is maximum automatically then, stores z1 in the memory module of obliquity sensor as z1 then.The demarcation factor that it will be understood by those skilled in the art that record is many more, and the z1 that obtains is more approaching desirable demarcation factor value just, therefore can be in microprocessor, and design digital-to-analogue piece, setting recording is demarcated the number of times of factor, writes down more a plurality of demarcation factors.The concrete maximum demarcation factor value of occurrence number of selecting can have multiple implementation method, can in microprocessor, establish corresponding program module, obtains z1 through executive routine.
Step S103 is on said plane, with fixing behind the obliquity sensor circuit board Rotate 180 degree.In this example; Realize that through pilot lamp on the obliquity sensor promptly microprocessor can send corresponding rotation indication after obtaining z1; The corresponding pilot lamp of rotation indication control; Operating personnel judge whether to obtain z1 according to pilot lamp, after confirming to have obtained z1, with fixing behind the obliquity sensor circuit board Rotate 180 degree.It will be understood by those skilled in the art that microprocessor can send rotation indication through more mode, such as can be through the demonstration of display terminal, operating personnel can be according to the circuit board of corresponding rotation indication rotation obliquity sensor.
Step S104 obtains second of capacitance acceleration transducer output and demarcates factor value z2.The concrete mode of this step is identical with step S102, repeats no more.
Step S105 obtains the zeroset of sensitive axes, said zeroset=(z1+z2)/2.In this example, z1 and z2 that microprocessor will be stored in the memory module automatically carry out handled, obtain zeroset.
The method principle of calibrating zero position output value of sensitive shaft of tilt angle sensor provided by the invention is following; As shown in Figure 1; Suppose that the capacitor electrode field direction is parallel with surface level, just during the sensitive axes level of obliquity sensor, the demarcation factor value of acceleration transducer output is ML; The zeroset of obliquity sensor just should equal ML, and M is a coefficient.Under state as shown in Figure 3; The sensitive axes and the surface level of obliquity sensor are not parallel, have certain angle, and the component of gravity on the sensitive axes direction can make movable plate electrode 2 receive first acting force; First acting force can make movable plate electrode 2 produce certain displacement; Suppose that the displacement that movable plate electrode 2 produces is A, at this moment, z1=M2L-M (the L-A)=M (L+A) of acceleration transducer output; Fig. 4 is the state after fixing behind the Rotate 180 degree on the basis of Fig. 3; Because the component of gravity on sensitive axes be identical, so second acting force that movable plate electrode 2 receives equates with first amount of force, and is in the opposite direction; The displacement that produces also is A; Opposite states among direction and Fig. 3, at this moment, z2=M2L-M (the L+A)=M (L-A) of acceleration transducer output.(z1+z2)/2={M (L+A)+M (L-A) so }/2=ML=zeroset.No longer whether level is relevant with the timing signal sensitive axes for the zeroset that obtains like this, is 180 degree as long as guarantee the anglec of rotation, and sensitive axes and horizontal direction can be arbitrarily angled.It will be understood by those skilled in the art that to guarantee the Rotate 180 degree parallel with surface level simply easy more than guaranteeing sensitive axes, thereby the zeroset that can guarantee to obtain obliquity sensor is more accurate.
Description according to above-mentioned principle; The method of demarcation obliquity sensor zeroset provided by the invention can have more kinds of selections; Such as, in step S101, during the fixed angle sensor; Do not limit and be fixed on a vertical plane, the angular relationship of fixed angle sensor plane, place and surface level does not influence in itself obtains zeroset; It will be appreciated by those skilled in the art that; Make the obliquity sensor fixed plane parallel with gravity direction; Under the sensitive axes situation identical with horizontal plane angle; Can make 2 displacements of capacitor movable plate electrode bigger, make the z1 and the z2 that obtain before and after the rotation differ bigger, so that the zeroset error of obtaining is littler; Based on same purpose; During the fixed angle sensor circuit board; Can make sensitive shaft of tilt angle sensor parallel with gravity direction as far as possible; Certainly sensitive axes and the not parallel zeroset that do not influence of gravity direction just make parallel with the gravity direction as far as possible z1 and the z2 that obtain before and after the rotation of can making of sensitive axes differ bigger.As far as possible parallel with the gravity direction obliquity sensor that can utilize of sensitive axes is realized, specifically can be to be communicated with the angle of inclination outlet line of obliquity sensor; Angle of inclination data through obliquity sensor output are positioned near 90 degree sensitive axes; Make sensitive axes parallel as far as possible with gravity direction, certainly, for fear of the switching of obliquity sensor routine interface; Also can judge, not require the parallel of sensitive axes and gravity direction strictness here through operating personnel's experience.
According to the description of the invention described above principle, realize that key of the present invention is to make the obliquity sensor circuit board under two states, movable plate electrode 2 produces identical, the in the opposite direction displacement of size on the sensitive axes direction; And to guarantee this point, will make movable plate electrode 2 under two states, on the sensitive axes direction; Receive equal and opposite in direction, first acting force and second acting force in the opposite direction; At the acting force that receives is that gravity is under the component situation on the sensitive axes, as long as before and after the state change, sensitive axes is identical with the angle of surface level; Just can guarantee to achieve the above object, be an optimized technical scheme with obliquity sensor circuit board Rotate 180 degree.Theoretical according to space geometry; Achieving the above object to have more kinds of modes; As long as guarantee that the component of gravity on sensitive axes is identical, the sense of displacement that capacitor movable plate electrode 2 is produced is opposite, just can relatively obtain the demarcation factor; Obtain zeroset exactly, realize accurate demarcation the obliquity sensor zeroset of capacitance acceleration transducer.
In this example, be to adopt the obliquity sensor circuit board is fixed on the plane, and then Rotate 180 degree method realization state exchange.In order to guarantee Rotate 180 degree front and back; It is identical that the movable plate electrode of capacitor produces displacement; Among the embodiment obliquity sensor circuit board being fixed on a method on the plane is: two clamping plate are contacted with the obliquity sensor circuit board in both sides, and keep two clamping plate and obliquity sensor surface of contact to be parallel to each other; When rotated; Only rotate the obliquity sensor circuit board; Two clamping plate keep motionless, as long as keep before and after the obliquity sensor rotation, both sides contact with two clamping plate and just can guarantee to greatest extent that the obliquity sensor circuit board anglec of rotation is 180 degree; The movable plate electrode generation displacement that guarantees capacitor is identical, in the opposite direction.
Foregoing description is the complete method of calibrating zero position output value of sensitive shaft of tilt angle sensor, in concrete the use, can this method separately be carried out; Such as, can z1 and z2 be stored in the memory module in advance, in order to using; When measuring the angle of inclination, obtain zeroset again; Certainly, also can demarcate the factor group with two that are made up of a plurality of demarcation factors earlier is stored in the memory module, for future use; When measuring the angle of inclination, obtain z1 and z2 according to above-mentioned method, obtain zeroset again.According to foregoing description, the present invention can also provide a kind of method of obtaining the calibrating zero position output value of sensitive shaft of tilt angle sensor parameter.
In addition, during last example was described, the microprocessor of obliquity sensor possessed automatic record, storage and processing capacity; It will be appreciated by those skilled in the art that; Also can use manual mode to realize above-mentioned method, promptly when obtaining z1 and z2, write down corresponding data through operating personnel; Certainly operating personnel also can draw zeroset, realize the object of the invention.
More than describe is to be that example is described with the obliquity sensor that is provided with a sensitive axes; In actual production, the obliquity sensor of double-axel acceleration sensor is used more extensive, and another embodiment provides a kind of method of demarcating the zero position output value of sensitive shaft of double-shaft tilt angle sensor; Said double-shaft tilt angle sensor comprises two sensitive axes: first sensitive axes and second sensitive axes; Said first sensitive axes is vertical each other with second sensitive axes, and like Fig. 5, this method comprises with the following step:
Step S201 is fixed on the obliquity sensor circuit board on the plane, and makes first sensitive axes and second sensitive axes and the said plane parallel of said obliquity sensor.
Step S202 obtains the demarcation factor value z11 of capacitance acceleration transducer output, and the z11 that obtains this moment is for demarcating first parameter of the first sensitive axes zeroset.
Step S203 on said plane, revolves the obliquity sensor circuit board that to turn 90 degrees the back fixing.
Step S204; Obtain the demarcation factor value z21 of capacitance acceleration transducer output; At this moment; Obtain output source and z11 and the different capacitors output voltage relation in direct ratio of z21, when demarcating zeroset, should distinguish, the z21 that obtains is for demarcating first parameter of the second sensitive axes zeroset.
Step S205 on said plane, revolves the obliquity sensor circuit board to turn 90 degrees afterwards again and fixes.First sensitive axes this moment Rotate 180 degree.
Step S206 obtains the demarcation factor value z12 of capacitance acceleration transducer output, and z12 is for demarcating second parameter of the first sensitive axes zeroset.
Step S207 on said plane, revolves the obliquity sensor circuit board to turn 90 degrees afterwards again and fixes.Also Rotate 180 degree of second sensitive axes this moment.
Step S208 obtains the demarcation factor value z22 of capacitance acceleration transducer output, and z22 is for demarcating second parameter of the second sensitive axes zeroset.
Step S209 obtains the zeroset of first sensitive axes, said zeroset=(z11+z12)/2; With, obtain the zeroset of second sensitive axes, said zeroset=(z21+z22)/2.
So just can demarcate first sensitive axes and second sensitive axes zero position output value separately, for the measurement at obliquity sensor angle of inclination lays the foundation.In addition; It will be understood by those skilled in the art that if can degree of will speed up sensor the value of demarcation factor of output be associated with corresponding sensitive axes because the angle of zeroset that obtains and sensitive axes and surface level has nothing to do; Also can obtain the z11 of first sensitive axes and the z21 of second sensitive axes fixedly the time at obliquity sensor; Behind obliquity sensor Rotate 180 degree, obtain the z12 of first sensitive axes and the z22 of second sensitive axes again, obtain zeroset through corresponding method again.
Providing on the basis of said method, the device that can realize said method also is provided.
As shown in Figure 6, a kind of device that obtains the calibrating zero position output value of sensitive shaft of tilt angle sensor parameter at first is provided, comprise capacitance acceleration sensing module 2, microprocessor 4 and output terminal 7, can also establish memory module 5; Capacitance acceleration sensing module 2 can be to microprocessor 4 output electric signal, and the movable plate electrode displacement is directly proportional in the electric signal of output and the capacitor; Described microprocessor 4 can receive electric signal, and can electric signal be handled, and obtains the demarcation factor, can store in the memory module 5 subsequent usely with demarcating factor value, certainly, also can corresponding demarcation factor value be exported through output terminal; Described microprocessor 4 can be exported the rotation indication after obtaining and demarcating factor value by output terminal 7; The mode of output rotation indication can be pilot lamp or pass through to show that output terminal shows specifying information that operating personnel can determine whether to rotate the obliquity sensor circuit board through corresponding rotation information.It will be understood by those skilled in the art that to obtain and demarcate that factor can be obtained by calibrating procedure automatically, record; Also can be through corresponding input end input command adapted thereto, microprocessor 4 carries out record according to command adapted thereto again, obtains the demarcation factor.Concrete principle of work is identical with above-mentioned corresponding method, repeats no more here.
In order to eliminate or reduce the fluctuation of electric signal as far as possible, the said device that obtains the calibrating zero position output value of sensitive shaft of tilt angle sensor parameter also comprises filtration module 3, and capacitance acceleration sensing module 2 is to filtration module 3 output electric signal; Said filtration module 3 can filter the electric signal that receives, and again electric signal is outputed to microprocessor 4, eliminates the instability of electric signal.
In order to make the demarcation factor value of obtaining more accurate; Described microprocessor 4 is when handling electric signal; Can obtain a plurality of; The demarcation factor of predetermined quantity just, and then the value of the demarcation factor that occurrence number is maximum is demarcated zeroset as one and is demarcated factor value, also can the demarcation factor of predetermined quantity be formed a parameter group; Then, the value of confirming the demarcation factor that occurrence number is maximum in each parameter group is demarcated zeroset demarcation factor value as one.Obtain two as stated above and demarcate factor value, also with regard to z1 and z2 among the embodiment one.Concrete principle of work please refer to above-mentioned description to correlation method.
On the basis that the device that obtains the calibrating zero position output value of sensitive shaft of tilt angle sensor parameter is provided; A kind of device of calibrating zero position output value of sensitive shaft of tilt angle sensor also is provided; This device comprises the above-mentioned device that obtains the calibrating zero position output value of sensitive shaft of tilt angle sensor parameter; Microprocessor 4 can also obtain, or from memory module, reads two predetermined demarcation factor value, and can obtain zero position output value of sensitive shaft of tilt angle sensor; Said zero position output value of sensitive shaft equal two said demarcation factor value summation 1/2; Can zero position output value of sensitive shaft of tilt angle sensor be stored in the memory module, or through corresponding output unit output, so that when measuring the angle of inclination, use.Certainly, obtaining zero position output value of sensitive shaft of tilt angle sensor can carry out after obtaining two demarcation factor value according to program setting automatically; Also can carry out according to the respective input input instruction.
In addition, can also utilize existing obliquity sensor to implement above-described method, obliquity sensor comprises capacitance acceleration sensing module, microprocessor and output terminal, and the capacitance acceleration sensing module can be exported electric signal to microprocessor; Described microprocessor can be handled the electric signal that receives and obtain the angle of inclination data; And the angle of inclination data are passed through output terminal export; In addition, described microprocessor can be according to the method described above described in step electric signal is handled, obtain the demarcation factor value; After described microprocessor obtains and demarcates factor value; Can the rotation indication be exported by output terminal; Operating personnel can be according to the rotation prompting of output; The rotation obliquity sensor is demarcated factor value for two that obtain behind the obliquity sensor circuit board Rotate 180 degree, and the step of describing in is according to the method described above obtained zeroset.Obliquity sensor can also comprise memory module; Described microprocessor can be with respective data storage in memory module.
The above only is a preferred implementation of the present invention; Should be pointed out that for those skilled in the art, under the prerequisite that does not break away from the principle of the invention; Can also make some improvement and retouching, these improvement and retouching also should be regarded as protection scope of the present invention.

Claims (5)

1. method of obtaining the calibrating zero position output value of sensitive shaft of tilt angle sensor parameter, said obliquity sensor is the gradient sensor of capacitance acceleration transducer, and is provided with sensitive axes; Said obliquity sensor comprises the capacitance acceleration transducer that has capacitor, and said capacitance acceleration transducer can be measured the acceleration on the sensitive axes direction, and said capacitor comprises a movable plate electrode, it is characterized in that, this method may further comprise the steps:
The obliquity sensor circuit board is fixed on the plane; Said plane is the plane parallel with gravity direction, and makes the sensitive axes of said obliquity sensor parallel with gravity direction; On the sensitive axes direction, make movable plate electrode receive first acting force;
Obtain first of capacitance acceleration transducer output and demarcate factor value;
On the sensitive axes direction, make movable plate electrode receive second acting force, with the capacitance acceleration transducer reference, said second acting force equates with first amount of force, and in the opposite direction; The said concrete grammar that makes movable plate electrode receive second acting force is: with a straight line vertical with sensitive axes is axle, with fixing behind the obliquity sensor circuit board Rotate 180 degree; The said straight line vertical with sensitive axes is the straight line vertical with said plane;
Obtain second of capacitance acceleration transducer output and demarcate factor value.
2. the method for obtaining the calibrating zero position output value of sensitive shaft of tilt angle sensor parameter according to claim 1 is characterized in that,
The said concrete grammar that obtains the first demarcation factor value is: the demarcation factor of record capacitance acceleration transducer output predetermined quantity, and the value of the demarcation factor that occurrence number is maximum is demarcated factor value as first;
The said concrete grammar that obtains the second demarcation factor value is: the demarcation factor of record capacitance acceleration transducer output predetermined quantity, the value of the demarcation factor that occurrence number is maximum is demarcated factor value as second.
3. the method for a calibrating zero position output value of sensitive shaft of tilt angle sensor, said obliquity sensor is the gradient sensor of capacitance acceleration transducer, and is provided with sensitive axes; Said obliquity sensor comprises the capacitance acceleration transducer that has capacitor, and said capacitance acceleration transducer can be measured the acceleration on the sensitive axes direction, and said capacitor comprises a movable plate electrode, it is characterized in that, this method may further comprise the steps:
The obliquity sensor circuit board is fixed on the plane, and said plane is the plane parallel with gravity direction, and makes said sensitive axes keep parallel with gravity direction; On the sensitive axes direction, make movable plate electrode receive first acting force;
Obtain first of capacitance acceleration transducer output and demarcate factor value;
On the sensitive axes direction, make movable plate electrode receive second acting force, with the capacitance acceleration transducer reference, said second acting force equates with first amount of force, and in the opposite direction; The said concrete grammar that makes movable plate electrode receive second acting force is: with a straight line vertical with sensitive axes is axle, with fixing behind the obliquity sensor circuit board Rotate 180 degree; The said straight line vertical with sensitive axes is the straight line vertical with said plane;
Obtain second of capacitance acceleration transducer output and demarcate factor value;
Obtain said zero position output value of sensitive shaft, described zero position output value equals first and demarcates 1/2 of the factor value and the second demarcation factor value sum.
4. the method for calibrating zero position output value of sensitive shaft of tilt angle sensor according to claim 3 is characterized in that,
The said concrete grammar that obtains the first demarcation factor value is: the demarcation factor of record capacitance acceleration transducer output predetermined quantity, and the value of the demarcation factor that occurrence number is maximum is demarcated factor value as first;
The said concrete grammar that obtains the second demarcation factor value is: the demarcation factor of record capacitance acceleration transducer output predetermined quantity, the value of the demarcation factor that occurrence number is maximum is demarcated factor value as second.
5. the method for calibrating zero position output value of sensitive shaft of tilt angle sensor according to claim 3 is characterized in that,
The said sensitive axes that makes keeps the concrete grammar parallel with gravity direction to be: the angle of inclination of the output through obliquity sensor confirm sensitive axes whether with the gravity direction keeping parallelism.
CN2008101612955A 2008-09-24 2008-09-24 Method and device for calibrating zero position output value of sensitive shaft of tilt angle sensor Active CN101685026B (en)

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CN103659806B (en) * 2012-09-06 2016-05-25 沈阳新松机器人自动化股份有限公司 A kind of industrial robot zero-position scaling method
CN103698556A (en) * 2012-09-27 2014-04-02 北京同步科技有限公司 Device and method for improving accuracy of acceleration sensors
CN103697859A (en) * 2012-09-27 2014-04-02 上海西门子医疗器械有限公司 Measuring device for measuring tilt angle and medical equipment
CN104802802B (en) * 2014-01-23 2017-04-05 南京聚特机器人技术有限公司 A kind of error identification method for swing arm caterpillar robot zero adjustment
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CN105571615B (en) * 2015-12-29 2019-01-01 大连陆海科技股份有限公司 The calibration method and system of double-shaft tilt angle sensor peculiar to vessel
CN106491138B (en) * 2016-10-26 2019-04-09 歌尔科技有限公司 A kind of motion state detection method and device
CN106767697A (en) * 2016-12-31 2017-05-31 嘉兴市纳杰微电子技术有限公司 Dual axis inclinometer and scaling method
CN112697170B (en) * 2020-12-11 2023-08-29 西安电子工程研究所 Method for calibrating more than two inclination angle sensors on carrier
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CN113295184B (en) * 2021-05-06 2022-06-10 厦门乃尔电子有限公司 Calibration method of high-precision double-shaft tilt angle sensor
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