CN101680107A - 改变半导体层结构的方法 - Google Patents
改变半导体层结构的方法 Download PDFInfo
- Publication number
- CN101680107A CN101680107A CN200880013183A CN200880013183A CN101680107A CN 101680107 A CN101680107 A CN 101680107A CN 200880013183 A CN200880013183 A CN 200880013183A CN 200880013183 A CN200880013183 A CN 200880013183A CN 101680107 A CN101680107 A CN 101680107A
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- semiconductor layer
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/06—Silicon
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B1/00—Single-crystal growth directly from the solid state
- C30B1/02—Single-crystal growth directly from the solid state by thermal treatment, e.g. strain annealing
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B13/00—Single-crystal growth by zone-melting; Refining by zone-melting
- C30B13/16—Heating of the molten zone
- C30B13/22—Heating of the molten zone by irradiation or electric discharge
- C30B13/24—Heating of the molten zone by irradiation or electric discharge using electromagnetic waves
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02367—Substrates
- H01L21/0237—Materials
- H01L21/0242—Crystalline insulating materials
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02518—Deposited layers
- H01L21/02521—Materials
- H01L21/02524—Group 14 semiconducting materials
- H01L21/02532—Silicon, silicon germanium, germanium
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02656—Special treatments
- H01L21/02664—Aftertreatments
- H01L21/02667—Crystallisation or recrystallisation of non-monocrystalline semiconductor materials, e.g. regrowth
- H01L21/02675—Crystallisation or recrystallisation of non-monocrystalline semiconductor materials, e.g. regrowth using laser beams
- H01L21/02678—Beam shaping, e.g. using a mask
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02656—Special treatments
- H01L21/02664—Aftertreatments
- H01L21/02667—Crystallisation or recrystallisation of non-monocrystalline semiconductor materials, e.g. regrowth
- H01L21/02691—Scanning of a beam
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Crystallography & Structural Chemistry (AREA)
- Computer Hardware Design (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Optics & Photonics (AREA)
- Thermal Sciences (AREA)
- Electromagnetism (AREA)
- Recrystallisation Techniques (AREA)
Abstract
Description
Claims (15)
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102007019229 | 2007-04-24 | ||
DE102007019229.2 | 2007-04-24 | ||
DE102007028394.8 | 2007-06-15 | ||
DE200710028394 DE102007028394A1 (de) | 2007-06-15 | 2007-06-15 | Verfahren zur Umstrukturierung von Siliziumschichten |
PCT/EP2008/003319 WO2008128781A1 (de) | 2007-04-24 | 2008-04-24 | Verfahren zur umstrukturierung von halbleiterschichten |
Publications (2)
Publication Number | Publication Date |
---|---|
CN101680107A true CN101680107A (zh) | 2010-03-24 |
CN101680107B CN101680107B (zh) | 2013-04-10 |
Family
ID=39563578
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN200880013183.3A Active CN101680107B (zh) | 2007-04-24 | 2008-04-24 | 改变半导体层结构的方法 |
Country Status (3)
Country | Link |
---|---|
CN (1) | CN101680107B (zh) |
DE (1) | DE112008000934B4 (zh) |
WO (1) | WO2008128781A1 (zh) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2014198668A1 (de) * | 2013-06-10 | 2014-12-18 | Limo Patentverwaltung Gmbh & Co. Kg | Verfahren zur herstellung einer kratzfesten schicht auf einem glassubstrat |
DE102014116213A1 (de) | 2014-11-06 | 2016-05-25 | Lilas Gmbh | Vorrichtung zur Erzeugung von Laserstrahlung sowie eine Vorrichtung für die Bearbeitung eines Werkstücks |
DE102015100940A1 (de) | 2015-01-22 | 2016-07-28 | Lilas Gmbh | Verfahren und Vorrichtung zur Herstellung eines Bauteils mit einer zumindest abschnittsweise gekrümmten Oberfläche |
DE102017213168A1 (de) | 2017-07-31 | 2019-01-31 | Carl Zeiss Smt Gmbh | Verfahren zum Behandeln eines reflektiven optischen Elements für den EUV-Wellenlängenbereich, Verfahren zu dessen Herstellung sowie Vorrichtung zur Behandlung |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58106836A (ja) * | 1981-12-18 | 1983-06-25 | Hitachi Ltd | レ−ザ−アニ−ル装置 |
GB2177256A (en) * | 1985-06-18 | 1987-01-14 | Sony Corp | Manufacturing crystalline thin films |
US5840118A (en) * | 1994-12-19 | 1998-11-24 | Semiconductor Energy Laboratory Co., Ltd. | Laser process system and method of using the same |
US20040232126A1 (en) * | 2001-08-09 | 2004-11-25 | Koichi Tatsuki | Laser annealing apparatus and method of fabricating thin film transistor |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6855584B2 (en) * | 2001-03-29 | 2005-02-15 | Semiconductor Energy Laboratory Co., Ltd. | Method of manufacturing a semiconductor device |
JP2005129769A (ja) | 2003-10-24 | 2005-05-19 | Hitachi Ltd | 半導体薄膜の改質方法、改質した半導体薄膜とその評価方法、およびこの半導体薄膜で形成した薄膜トランジスタ、並びにこの薄膜トランジスタを用いて構成した回路を有する画像表示装置 |
-
2008
- 2008-04-24 WO PCT/EP2008/003319 patent/WO2008128781A1/de active Application Filing
- 2008-04-24 CN CN200880013183.3A patent/CN101680107B/zh active Active
- 2008-04-24 DE DE112008000934.1T patent/DE112008000934B4/de active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58106836A (ja) * | 1981-12-18 | 1983-06-25 | Hitachi Ltd | レ−ザ−アニ−ル装置 |
GB2177256A (en) * | 1985-06-18 | 1987-01-14 | Sony Corp | Manufacturing crystalline thin films |
US5840118A (en) * | 1994-12-19 | 1998-11-24 | Semiconductor Energy Laboratory Co., Ltd. | Laser process system and method of using the same |
US20040232126A1 (en) * | 2001-08-09 | 2004-11-25 | Koichi Tatsuki | Laser annealing apparatus and method of fabricating thin film transistor |
Also Published As
Publication number | Publication date |
---|---|
DE112008000934A5 (de) | 2010-08-19 |
CN101680107B (zh) | 2013-04-10 |
WO2008128781A1 (de) | 2008-10-30 |
DE112008000934B4 (de) | 2022-10-27 |
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C06 | Publication | ||
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C53 | Correction of patent of invention or patent application | ||
CB02 | Change of applicant information |
Address after: Borussia Dortmund Applicant after: Hentze Lissotschenko Patentver Address before: German Guy Sten Green Applicant before: Hentze Lissotschenko Patentver |
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C14 | Grant of patent or utility model | ||
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Effective date of registration: 20170407 Address after: Jiangsu Province, Suzhou Wuzhong Economic Development Zone the River Street Wuzhong Road No. 2888, building 6, room 515 D513 Patentee after: Laser technology (Suzhou) Co., Ltd. Address before: Borussia Dortmund Patentee before: Hentze Lissotschenko Patentver |
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Effective date of registration: 20190917 Address after: 523808 2nd Floor, 8th Building, Small and Medium-sized Enterprise Pioneering Park, North Songshan Lake High-tech Industrial Development Zone, Dongguan City, Guangdong Province Patentee after: Torchlight (Dongguan) Microoptics Co., Ltd. Address before: Room D513 and 515, Room 2888 Wuzhong Avenue, Yuexi Street, Wuzhong Economic Development Zone, Suzhou, Jiangsu Province Patentee before: Laser technology (Suzhou) Co., Ltd. |
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