CN101672624A - 一种光电位移传感器及其制备方法 - Google Patents
一种光电位移传感器及其制备方法 Download PDFInfo
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- CN101672624A CN101672624A CN200910308373A CN200910308373A CN101672624A CN 101672624 A CN101672624 A CN 101672624A CN 200910308373 A CN200910308373 A CN 200910308373A CN 200910308373 A CN200910308373 A CN 200910308373A CN 101672624 A CN101672624 A CN 101672624A
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
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CN2009103083734A CN101672624B (zh) | 2009-10-16 | 2009-10-16 | 一种光电位移传感器及其制备方法 |
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CN2009103083734A CN101672624B (zh) | 2009-10-16 | 2009-10-16 | 一种光电位移传感器及其制备方法 |
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CN101672624A true CN101672624A (zh) | 2010-03-17 |
CN101672624B CN101672624B (zh) | 2011-07-06 |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
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CN102095379A (zh) * | 2010-08-27 | 2011-06-15 | 中国科学院长春光学精密机械与物理研究所 | 绝对式光栅尺 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
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CN1645040A (zh) * | 2005-01-20 | 2005-07-27 | 上海交通大学 | 微位移的平面光波导测量装置 |
CN101135553A (zh) * | 2007-10-17 | 2008-03-05 | 吴茹菲 | 一种光电位移传感器及位移测量方法 |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
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CN102095379A (zh) * | 2010-08-27 | 2011-06-15 | 中国科学院长春光学精密机械与物理研究所 | 绝对式光栅尺 |
CN102095379B (zh) * | 2010-08-27 | 2012-11-07 | 中国科学院长春光学精密机械与物理研究所 | 绝对式光栅尺 |
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CN101672624B (zh) | 2011-07-06 |
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Address after: No. 3, North Tu Cheng West Road, Chaoyang District, Beijing Patentee after: Institute of Microelectronics, Chinese Academy of Sciences Address before: 100029 Microelectronics Institute, Chinese Academy of Sciences, 3 north earth road, Chaoyang District, Beijing Patentee before: Institute of Microelectronics, Chinese Academy of Sciences |
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Effective date of registration: 20210104 Address after: 510000 601, building a, 136 Kaiyuan Avenue, Huangpu District, Guangzhou City, Guangdong Province Patentee after: AoXin integrated circuit technology (Guangdong) Co.,Ltd. Address before: 100029 Beijing city Chaoyang District Beitucheng West Road No. 3 Patentee before: Institute of Microelectronics, Chinese Academy of Sciences |
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Effective date of registration: 20220506 Address after: 510000 room 710, Jianshe building, No. 348, Kaifa Avenue, Huangpu District, Guangzhou, Guangdong Patentee after: Ruili flat core Microelectronics (Guangzhou) Co.,Ltd. Address before: 510000 601, building a, 136 Kaiyuan Avenue, Huangpu District, Guangzhou City, Guangdong Province Patentee before: AoXin integrated circuit technology (Guangdong) Co.,Ltd. |