CN101664967B - Improved monocrystal silicon-rod cutting machine - Google Patents

Improved monocrystal silicon-rod cutting machine Download PDF

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Publication number
CN101664967B
CN101664967B CN200910182714A CN200910182714A CN101664967B CN 101664967 B CN101664967 B CN 101664967B CN 200910182714 A CN200910182714 A CN 200910182714A CN 200910182714 A CN200910182714 A CN 200910182714A CN 101664967 B CN101664967 B CN 101664967B
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China
Prior art keywords
axle
connects
lower carriage
cutting machine
upper bracket
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Expired - Fee Related
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CN200910182714A
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Chinese (zh)
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CN101664967A (en
Inventor
赵旭明
吴东晓
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Wuxi Machine Tools Co Ltd
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Wuxi Machine Tools Co Ltd
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Priority to CN200910182714A priority Critical patent/CN101664967B/en
Publication of CN101664967A publication Critical patent/CN101664967A/en
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Publication of CN101664967B publication Critical patent/CN101664967B/en
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Abstract

The invention provides an improved monocrystal silicon-rod cutting machine. After the cutting machine clamps a workpiece at one time, the feeding quantity of the monocrystal silicon rod is regulated by driving devices to cut the monocrystal silicon rod many times, thereby ensuring the parallelism of two end surfaces of the cut monocrystal silicon with high working efficiency. The cutting machine comprises a cutting part, a feeding part and a clamp, wherein the cutting part is connected with the feeding part by a connecting plate; and the clamp is supported on the upper end of the feeding part. The cutting machine is characterized in that the feeding part comprises an X-shaft feeding mechanism and a Z-shaft offsetting mechanism, and the exposed ends of the X-shaft feeding mechanism and the Z-shaft offsetting mechanism are respectively connected with the corresponding driving devices.

Description

A kind of improved monocrystal silicon-rod cutting machine
(1) technical field
The monocrystalline silicon that the present invention relates to the solar energy industry cuts off technical field of processing equipment, is specially a kind of improved monocrystal silicon-rod cutting machine.
(2) background technology
Existing monocrystal silicon-rod cutting machine, after its workpiece clamped, every cut-out was once; Need unclamp anchor clamps, behind the amount of feeding through the manual adjustments silicon single crystal rod, clamping device again; Because the air spots of silicon single crystal rod is sliding, can produce stress after the clamping and concentrate, it often unclamps the depth of parallelism that has guaranteed not to cut off the workpiece both ends of the surface with clamping device; Influence crudy, and inefficiency is wasted time and energy in adjusting.
(3) summary of the invention
To the problems referred to above, the invention provides a kind of improved monocrystal silicon-rod cutting machine, behind its disposable clamping workpiece, the amount of feeding through drive unit adjusting silicon single crystal rod repeatedly cuts off, and can guarantee to cut off the depth of parallelism of back monocrystalline silicon both ends of the surface, and high efficiency.
Its technical scheme is such: it comprises cutting part, feeding part, anchor clamps; Said cutting part connects said feeding part through connecting plate; Said fixture supports is in said feeding part upper end; It is characterized in that: said feeding partly comprises X axle feed mechanism, Z axle offset mechanism, and said X axle feed mechanism, Z axle offset mechanism exposed junction connect its corresponding drive unit separately.
It is further characterized in that: said X axle feed mechanism comprises X axle servomotor, X axle shaft coupling, X shaft ball screw, X axle bearing seat, X axle line slideway; Said X axle servomotor output connects the input of said X shaft ball screw through said X axle shaft coupling; Said X shaft ball screw is supported in the said X axle bearing seat; Said X axle bearing seat is supported on the support of said feeding part, and said X axle servomotor is supported on said support, and said X shaft ball screw connects the X axle slide plate on its top through the feed screw nut; X axle linear guide bearings is in said support, and the bottom of said X axle slide plate and said X axle line slideway are connected;
Said Z axle offset mechanism comprises Z axle servomotor, Z axle shaft coupling, Z shaft ball screw, Z axle bearing seat, Z axle line slideway; Said Z axle servomotor output connects the input of said Z shaft ball screw through said Z axle shaft coupling; Said Z shaft ball screw is supported in the said Z axle bearing seat; Said Z axle bearing seat is supported on said X axle slide plate, and said Z axle servomotor is supported on said X axle slide plate, and said Z shaft ball screw connects the Z axle slide plate on its top through the feed screw nut; Z axle linear guide bearings is in said X axle slide plate, and the bottom of said Z axle slide plate and said Z axle line slideway are connected;
Said Z axle slide plate has the axial dovetail groove of Z, and dovetail upper rail and said dovetail groove cooperate to be installed, and said fixture supports is in said dovetail upper rail, and an end of said dovetail upper rail is connected with the axial feed cylinder of Z;
Said anchor clamps comprise upper bracket, lower carriage; Said lower carriage is fastenedly connected said dovetail upper rail, and said upper bracket, lower carriage both ends are connected respectively, in the inner cavity of the upper bracket after the said connection, lower carriage clamp is installed; The non-clamping end face of said clamp connects oscillating bearing; Said oscillating bearing is installed on bearing block inside, and said bearing block is installed in the installation through holes that said upper bracket or lower carriage open, and said bearing block connects the external drive part through connector;
It further is characterised in that: an end of said upper bracket, lower carriage has corresponding through hole on the silicon single crystal rod length direction of clamping; Said upper bracket, lower carriage are after nested corresponding the connection, and bearing pin connects said upper bracket, lower carriage through its corresponding through hole;
The other end of said upper bracket has vertical its and connects the through hole of end face; The other end of said lower carriage has mounting groove; The head of bolt is positioned at said mounting groove; The head of said bolt is connected in said lower carriage through bearing pin, and after the bolt of said bolt partly ran through the through hole of the other end of said upper bracket, its bolt end was equipped with rotary handle; The non-clamping end face of said clamp connects oscillating bearing through connecting support; Said external drive part is specially the longitudinal end rotary handle, said connector is specially connecting axle, and said connecting axle one end connects said bearing block, and the said connecting axle other end connects said longitudinal end rotary handle.
In the said structure of the present invention, behind said anchor clamps clamping finished piece(s), it accomplishes the contraposition to cutter of X axle feeding and Z-direction through corresponding drive unit; Accomplish clamping No. one time; Repeatedly cut off, can guarantee to cut off the depth of parallelism of back monocrystalline silicon both ends of the surface, and high efficiency.
(4) description of drawings
Fig. 1 is a structural representation of the present invention;
Fig. 2 is the structural representation of the left view of Fig. 1;
Fig. 3 is the local structure for amplifying sketch map in the A place of Fig. 1;
Fig. 4 is anchor clamps 3 local structure for amplifying sketch mapes among Fig. 2;
Fig. 5 is that the C-C of Fig. 4 cuts open local structure for amplifying sketch map;
Fig. 6 is the local structure for amplifying sketch map in the D place of Fig. 4.
(5) specific embodiment
See Fig. 1, Fig. 2, Fig. 3, Fig. 4, Fig. 5, Fig. 6; The present invention includes cutting part 1, feeding part 2, anchor clamps 3; Cutting part 1 connects feeding part 2 through connecting plate 4; Anchor clamps 3 are supported on feeding part 2 upper ends, and feeding part 2 comprises X axle feed mechanism, Z axle offset mechanism, and X axle feed mechanism, Z axle offset mechanism exposed junction connect its corresponding drive unit separately.X axle feed mechanism comprises X axle servomotor 5, X axle shaft coupling 6, X shaft ball screw 7, X axle bearing seat 8, X axle line slideway 9; X axle servomotor 5 outputs connect the input of X shaft ball screw 7 through X axle shaft coupling 6; X shaft ball screw 7 is supported in the X axle bearing seat 8; X axle bearing seat 8 is supported on the support 10 of feeding part 2, and X axle servomotor 5 is supported on support 10, and X shaft ball screw 7 connects the X axle slide plate 12 on its top through feed screw nut 11; X axle line slideway 9 is supported on support 10, and the bottom of X axle slide plate 12 and X axle line slideway 9 are connected;
Z axle offset mechanism comprises Z axle servomotor 13, Z axle shaft coupling 14, Z shaft ball screw 15, Z axle bearing seat 16, Z axle line slideway 17; Z axle servomotor 13 outputs connect the input of Z shaft ball screw 15 through Z axle shaft coupling 14; Z shaft ball screw 15 is supported in the Z axle bearing seat 16; Z axle bearing seat 16 is supported on X axle slide plate 12, and Z axle servomotor 13 is supported on X axle slide plate 12, and Z shaft ball screw 15 connects the Z axle slide plate 37 on its top through feed screw nut 18; Z axle line slideway 17 is supported on X axle slide plate 12, and the bottom of Z axle slide plate 37 and Z axle line slideway 17 are connected;
Z axle slide plate 37 has the axial dovetail groove of Z 19, and dovetail upper rail 20 cooperates with dovetail groove 19 to be installed, and anchor clamps 3 are supported on dovetail upper rail 20, and an end of dovetail upper rail 20 is connected with the axial feed cylinder of Z 21:
See Fig. 4; Anchor clamps 3 comprise upper bracket 22, lower carriage 23; Lower carriage 23 is fastenedly connected dovetail upper rail 20, and upper bracket 22, lower carriage 23 both sides are connected respectively, and an end of lower carriage 23 has corresponding through hole on silicon single crystal rod 24 length directions of clamping; Upper bracket 22, lower carriage are after 23 nested corresponding connections, and bearing pin 25 connects upper bracket 22, lower carriage 23 through its corresponding through hole; The other end of upper bracket 22 has vertical its and connects the through hole of end face 26; The other end of lower carriage 23 has mounting groove 27; The head of bolt 28 is positioned at said mounting groove 27; The head of bolt 28 is connected in lower carriage 23 through bearing pin 29, and after the bolt of bolt 28 partly ran through the through hole of the other end of upper bracket 22, its bolt end was equipped with rotary handle 30; In upper bracket 22 after the connection, the inner cavity of lower carriage 23 clamp 31 is installed; The non-clamping end face of clamp 31 connects oscillating bearing 33 through connecting support 32; Oscillating bearing 33 is installed on bearing block 34 inside, and bearing block 34 is installed in the installation through holes that upper bracket 22 or lower carriage 23 opened, and bearing block 34 connects longitudinal end rotary handle 36 through connecting axle 35; Connecting axle 35 1 end connecting axle bearings 34, connecting axle 35 other ends connect longitudinal end rotary handle 36.
Its operation principle is following: during clamping silicon single crystal rod 24, turn on rotary handle 30, upper bracket 22 is opened it around bearing pin 25 rotations; Put silicon single crystal rod 24; Upper bracket 22 is rotated to original position around bearing pin 25, tighten rotary handle 30 and close upper bracket 22, then through regulating longitudinal end rotary handle 36; Drive bearing block 34 and in installation through holes, move, and then drive clamp 31 clamping silicon single crystal rods 24 through oscillating bearing 33.The non-clamping end face of clamp 31 connects oscillating bearing 33, because oscillating bearing 33 can rotate in certain scope, so it can be adjusted according to the uneven surface of workpiece automatically, makes clamp 10 stressed even.Behind each clamp silicon single crystal rod 24; Regulate its amount of feeding at X axis, the axial side-play amount (tool position that cooperates cutting part 1) of Z respectively through X axle servomotor 5, Z axle servomotor 13 and the axial feed cylinder 21 of Z, cutting obtains the silicon single crystal rod length that needs then.

Claims (7)

1. improved monocrystal silicon-rod cutting machine; It comprises cutting part, feeding part, anchor clamps; Said cutting part connects said feeding part through connecting plate; Said fixture supports is in said feeding part upper end, and it is characterized in that: said feeding partly comprises X axle feed mechanism, Z axle offset mechanism, and said X axle feed mechanism, Z axle offset mechanism exposed junction connect its corresponding drive unit separately; Said X axle feed mechanism comprises X axle servomotor, X axle shaft coupling, X shaft ball screw, X axle bearing seat, X axle line slideway; Said X axle servomotor output connects the input of said X shaft ball screw through said X axle shaft coupling; Said X shaft ball screw is supported in the said X axle bearing seat; Said X axle bearing seat and said X axle servomotor all are supported on the support of said feeding part; Said X shaft ball screw connects the X axle slide plate on its top through the feed screw nut, and X axle linear guide bearings is in said support, and the bottom of said X axle slide plate and said X axle line slideway are connected; Said Z axle offset mechanism comprises Z axle servomotor, Z axle shaft coupling, Z shaft ball screw, Z axle bearing seat, Z axle line slideway; Said Z axle servomotor output connects the input of said Z shaft ball screw through said Z axle shaft coupling; Said Z shaft ball screw is supported in the said Z axle bearing seat; Said Z axle bearing seat is supported on said X axle slide plate, and said Z axle servomotor is supported on said X axle slide plate, and said Z shaft ball screw connects the Z axle slide plate on its top through the feed screw nut; Z axle linear guide bearings is in said X axle slide plate, and the bottom of said Z axle slide plate and said Z axle line slideway are connected.
2. according to the said a kind of improved monocrystal silicon-rod cutting machine of claim 1; It is characterized in that: said Z axle slide plate has the axial dovetail groove of Z; Dovetail upper rail and said dovetail groove cooperate to be installed; Said fixture supports is in said dovetail upper rail, and an end of said dovetail upper rail is connected with the axial feed cylinder of Z.
3. according to the said a kind of improved monocrystal silicon-rod cutting machine of claim 2; It is characterized in that: said anchor clamps comprise upper bracket, lower carriage; Said lower carriage is fastenedly connected said dovetail upper rail, and said upper bracket, lower carriage both ends are connected respectively, in the inner cavity of the upper bracket after the said connection, lower carriage clamp is installed; The non-clamping end face of said clamp connects oscillating bearing; Said oscillating bearing is installed on bearing block inside, and said bearing block is installed in the installation through holes that said upper bracket or lower carriage open, and said bearing block connects the external drive part through connector.
4. according to the said a kind of improved monocrystal silicon-rod cutting machine of claim 3; It is characterized in that: an end of said upper bracket, lower carriage has corresponding through hole on the silicon single crystal rod length direction of clamping; Said upper bracket, lower carriage are after nested corresponding the connection, and bearing pin connects said upper bracket, lower carriage through its corresponding through hole.
5. according to the said a kind of improved monocrystal silicon-rod cutting machine of claim 4; It is characterized in that: the other end of said upper bracket has vertical its and connects the through hole of end face; The other end of said lower carriage has mounting groove, and the head of bolt is positioned at said mounting groove, and the head of said bolt is connected in said lower carriage through bearing pin; After the bolt of said bolt partly ran through the through hole of the other end of said upper bracket, its bolt end was equipped with rotary handle.
6. according to the said a kind of improved monocrystal silicon-rod cutting machine of claim 5, it is characterized in that: the non-clamping end face of said clamp connects oscillating bearing through connecting support.
7. according to the said a kind of improved monocrystal silicon-rod cutting machine of claim 6; It is characterized in that: said external drive part is specially the longitudinal end rotary handle, said connector is specially connecting axle; Said connecting axle one end connects said bearing block, and the said connecting axle other end connects said longitudinal end rotary handle.
CN200910182714A 2009-09-03 2009-09-03 Improved monocrystal silicon-rod cutting machine Expired - Fee Related CN101664967B (en)

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Application Number Priority Date Filing Date Title
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CN101664967B true CN101664967B (en) 2012-09-05

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Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103359470B (en) * 2013-06-15 2015-04-29 浙江晶盛机电股份有限公司 Automatic flaw-piece delivery mechanism and delivery method for monocrystal silicon cutting-grinding integrated machine
CN104157731B (en) * 2014-07-24 2017-04-05 镇江环太硅科技有限公司 A kind of microtome Auxiliary Track support
CN105835246B (en) * 2016-05-14 2018-02-06 洛阳金诺机械工程有限公司 A kind of method cut to crystalline silicon rod and its cutter device

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002184721A (en) * 2000-11-27 2002-06-28 Samsung Electronics Co Ltd Vertical-type wafer sawing device
CN1387979A (en) * 2002-07-03 2003-01-01 沈阳科晶设备制造有限公司 Automatically controlled high-precision crystal wire electrode cutting machine
CN1951658A (en) * 2005-10-20 2007-04-25 冯金生 Monocrystalline silicon square-cutting machine
CN201505930U (en) * 2009-09-03 2010-06-16 无锡机床股份有限公司 Single crystal silicon rod cutting machine

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002184721A (en) * 2000-11-27 2002-06-28 Samsung Electronics Co Ltd Vertical-type wafer sawing device
CN1387979A (en) * 2002-07-03 2003-01-01 沈阳科晶设备制造有限公司 Automatically controlled high-precision crystal wire electrode cutting machine
CN1951658A (en) * 2005-10-20 2007-04-25 冯金生 Monocrystalline silicon square-cutting machine
CN201505930U (en) * 2009-09-03 2010-06-16 无锡机床股份有限公司 Single crystal silicon rod cutting machine

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