CN101649927A - Ultrahigh vacuum automatic pressure relief valve - Google Patents
Ultrahigh vacuum automatic pressure relief valve Download PDFInfo
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- CN101649927A CN101649927A CN200810041712A CN200810041712A CN101649927A CN 101649927 A CN101649927 A CN 101649927A CN 200810041712 A CN200810041712 A CN 200810041712A CN 200810041712 A CN200810041712 A CN 200810041712A CN 101649927 A CN101649927 A CN 101649927A
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- body tube
- pressure relief
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Abstract
The invention discloses an ultrahigh vacuum automatic pressure relief valve, which comprises a valve body, a valve plate, a valve stem, a valve cover, an adjusting screw rod and an adjusting spring, wherein the valve body is provided with a valve body tube and a valve seat; the lower end of the valve body tube is connected with the valve seat, and a part of the valve body tube close to the valve seat is provided with holes for pressure relief and evacuation; a sealing member is arranged on the valve seat; the valve plate can move in the valve body; when the bottom of the valve plate is pressedon the sealing member on the valve seat of the valve body, the valve plate and the sealing member are in vacuum seal; the lower end of the valve stem is connected with the upper part of the valve plate so as to drive the valve plate to move in the valve body tube; the valve cover seals the upper end of the valve body tube and has a central hole; the adjusting screw rod is in threaded connection with the central hole of the valve cover and has a central hole; the upper end of the valve stem runs through the central hole of the adjusting screw rod, and the valve stem can move in the central hole of the adjusting screw rod; and the adjusting spring is sleeved on the valve stem and is limited between the valve plate and the adjusting screw rod, so the adjusting screw rod can be rotated to adjust the elasticity of the adjusting spring.
Description
Technical field
The present invention relates to the simultaneous vacuum valve of a kind of vacuum and pressure, when vacuum system pressure overrate, this valve is just opened relief and emptying automatically, to guarantee that the vacuum system internal pressure no longer continues to improve, reaches the vacuum system purpose of safety.
Background technique
The system that the vacuum automatic relief valve is used for vacuum and pressure and deposits, or have in the vacuum system of water source and thermal source coexistence, perhaps in the vacuum system in people vacuum experiment storehouse therein.
Because of misoperation pressurized gas delivery valve or fault increase system pressure, or water system leaks at high temperature, and pressure raises rapidly, or the people does pressure test in the storehouse, require antivoid valve to open relief and emptying rapidly otherwise components and parts and system in the light damage vacuum system during to container inflation overrate, serious even blast the people cruelly to death, this is the common occurrence feelings, and consequence is hardly imaginable.
It is not to require the automatic take-off of valve plate of valve to open under very high pressure for the vacuum automatic relief valve, but need require rapid take-off to open under the atmospheric faint pressure greater than one.In test cabin, the storehouse internal pressure is elevated to certain value as the people, requires the rapid take-off of valve plate of valve to open release, emptying during overrate, reach with atmospheric equilibrium and guarantee life safety.
This automatic relief valve, its pressure are to want the speed of Millisecond to open the valve plate of valve, relief and emptying under the faint pressure of 0.01MPa-0.02MPa in absolute pressure.Realize that this target is very high in technical requirements, difficulty is very big.
Along with national development and national economy, the also develop rapidly of high-tech hard-core technology needs the business unit of this class valve, institute to get more and more in the high-tech category.This class valve is all in import now, the purpose of relief and emptying is opened in the take-off that state other unit reaches the valve plate of autocontrol valve with the electronic circuit control system of the synthetic complexity of probe signal sensor groups, and this valve neither be definitely reliable, just in case electronic circuit breaks down, system will accidents happened.
Summary of the invention
The object of the present invention is to provide a kind of ultrahigh vacuum automatic pressure relief valve, it can be when vacuum system pressure overrate the time, and this valve is just opened relief and emptying automatically, to guarantee that the vacuum system internal pressure no longer continues to improve, reaches the vacuum system purpose of safety.
In order to realize described purpose, ultrahigh vacuum automatic pressure relief valve of the present invention is characterized in comprising:
Valve body, it has valve body tube and valve seat, and the lower end of valve body tube is connected with valve seat, and the part of the close valve seat of valve body tube has the hole of relief and emptying, and valve seat is provided with Sealing;
Valve plate, valve plate can move in valve body, both vacuum seals when the bottom of valve plate is pressed in Sealing on the valve seat of valve body;
Valve rod, its lower end connects the top of valve plate, moves in valve body tube to drive valve plate;
Valve gap is sealed the upper end of valve body tube, has center hole;
Adjusting screw rod is threaded with the center hole of valve gap, has center hole, and the center hole of adjusting screw rod is passed in the upper end of valve rod, and valve rod can move in the center hole of adjusting screw rod; And
Regulation spring is nested with on valve rod, and is limited between valve plate and the adjusting screw rod, thus the rotation adjusting screw rod, its elastic force of can regulate.
Described ultrahigh vacuum automatic pressure relief valve, the hole that its further characteristics are described relief and emptyings are a plurality of slotted holes that form on the circumference of valve body tube, and these a plurality of slotted holes are filtered the net coating.
Described ultrahigh vacuum automatic pressure relief valve, its further characteristics be the relief and emptying that provides of all slotted holes area than the big 1.5-2 of drift diameter area of valve body tube doubly.
Described ultrahigh vacuum automatic pressure relief valve, its further characteristics are that valve plate comprises plate and lug, the bottom of plate is used for forming vacuum seal with valve seat, the centre on the top of plate is connected with lug, the tapped hole that lug has center hole and communicates with center hole, be formed with groove on the center hole wall of lug, also be formed with groove on the lower end outer surface of valve rod, after the center hole of lug is inserted in the lower end of valve rod, groove and the groove on the lug on the valve rod form a circular groove, a plurality of balls are put into from tapped hole, and tapped hole is sealed by a screw, thereby valve rod and valve plate have just linked together.
Described ultrahigh vacuum automatic pressure relief valve, its further characteristics are to be formed with a plurality of slotted eyes on the excircle of valve plate, on valve body tube, form many axial guiding grooves, a plurality of slotted eyes on the excircle of valve plate and many guiding grooves on the valve body tube align one by one, and between the slotted eye of alignment and guiding groove, place ball, thereby valve plate can not contact the valve body tube inwall and only can produce force of rolling friction when mobile in valve body tube.
Described ultrahigh vacuum automatic pressure relief valve, its further characteristics are to be embedded in a plurality of O shape guiding elements at adjusting screw rod, and valve rod contacts with this O shape guide rod when mobile in adjusting screw rod.
Described ultrahigh vacuum automatic pressure relief valve, its further characteristics are that this O shape guiding element is an O-ring seals.
Described ultrahigh vacuum automatic pressure relief valve, its further characteristics are this ultrahigh vacuum automatic pressure relief valves when installing, and the surface of the bottom of valve plate and the spacing of the Sealing on the valve seat are between 1mm-3mm.
Described ultrahigh vacuum automatic pressure relief valve, its further characteristics are that ball is a ceramic balls, and the cross section of described circular groove is circular.
Described ultrahigh vacuum automatic pressure relief valve, its further characteristics are that the Sealing on the valve seat is an O-ring seals, and described filter screen is the multilayer Stainless Steel Cloth.
The invention has the beneficial effects as follows: install if valve is a forward, when the pressure in the vacuum system surpasses predetermined pressure, valve plate is at valve plate, be pressed on the valve seat under the deadweight of valve rod and the effect of spring force, when vacuum system vacuumizes, can realize vacuum seal, if in case the pressure in the vacuum system raises, when surpassing the predetermined pressure that applies by valve plate, then valve plate moves up, thereby open valve, and carrying out the emptying release by the hole on the valve body tube, the stiffness coefficient by control spring like this can realize that valve takes notice of that the current moment of going out opens valve at different demands, avoid the generation of accident, because life-span of spring is long and its stable performance, with respect to the electronic circuit control system of complexity, people can worry fully that spring breaks down and valve can not be opened; If valve is to swing to when installing, the surface of the bottom of valve plate and the spacing of the Sealing on the valve seat are between 1mm-3mm, when vacuum system vacuumizes, can rapidly valve plate be inhaled with valve seat and fit, this moment, the sealing to valve also was to rely on pressure reduction, spring force and gravity to realize, in like manner, also was to rely on pressure reduction, spring force and gravity to realize to opening of valve, these factors all are stable, and people also needn't worry to occur valve should open the fortuitous event that Shi Buhui opens.
Description of drawings
Fig. 1 is the schematic representation of the structure of one embodiment of the invention.
Fig. 2 is the structural representation of part of the periphery of the valve body among Fig. 1.
Fig. 3 is the sectional view along the B-B direction among Fig. 1.
Embodiment
To describe the preferred embodiments of the present invention in detail now, its example is shown in the drawings.Although employed term is to select from public term among the present invention, but some mentioned term then is that the claimant judges by it and selects in the specification of the present invention, and its detailed meanings should be understood according to the spirit that the present specification desire discloses.Usually, leak rate is less than 10
-2Pa.M
3The vacuum system of/S is called the rough vacuum system, and leak rate is less than 10
-9Pa.M
3The vacuum system of/S is called high vacuum system, and leak rate is less than 10
-10Pa.M
3The vacuum system of/S is called ultra-high vacuum system, yet therefore ultrahigh vacuum automatic pressure relief valve of the present invention will not be subjected to strict restriction, so long as vacuum system has corresponding demand just can use the present invention.
As shown in Figure 1, one embodiment of the invention comprise valve body 1, valve plate 2, case 3, valve rod 4, Regulation spring 5, valve gap 6, adjusting screw rod 7, pressing plate 8 and filter screen 9.
Valve body 1 comprises valve body tube 14, valve seat 13, lower linking tube 1-2 and lower flange 11.The flanging flange is established on the top of valve body tube 14, and establishes tapped hole on flange, so that be connected with valve gap 6.Establish many slotted holes 140 on the lower circumference of valve body tube 14, in the middle of two slotted holes 140, establish tapped hole (being used for fixedly filter screen of attachment screw), the groove (R groove) 141 that three sliver transvers sections become semicircle is set 120 degree places at interval at valve body tube 14 inwalls, R groove 141 mainly plays guide rail, guides moving of valve plate 2.
Be used to prevent dust, protect the filter screen 19 of sealing surface cleaning to coat the excircle of valve body tube 14, as shown in Figure 3, can only coat the excircle of the belt length slotted eye 140 of valve body tube 14.Filter screen 19 can be a multilayer, for example the 3-4 layer.Its means of fixation utilizes pressing plate 9 to push down the end of filter screen 19 as shown in Figure 3, and the screw that screw 1h is equipped with in valve body tube 14 fixes pressing plate 9 then, thus fixing filter screen 19.Screw 1h can not extend in the chamber of valve body tube 14.
Valve plate 2 comprises plate 21 and lug 22, the bottom of plate 21 is to be provided with recessed circular groove 220 in the middle of plane and the top, plate 21 is connected with lug 22 by this recessed circular groove 220, three shallow circular holes 210 are set on the circumferential surface of plate 21, ball 1f is placed in this shallow circular hole 210, and three shallow circular grooves 210 are preferably spent separately at interval 120.Lug 22 is arranged in the recessed circular groove 220 of centre on valve plate 2 tops, and lug 22 has central through bore, establishes the groove that cross section is a semicircle (R groove) in this central through bore, and the side of this central through bore is provided with screw and communicates with this R groove.Lug 22 and plate 21 link into an integrated entity.
The lower end of valve rod 4 also has the R groove, the central through bore of lug 22 is inserted in the lower end of valve rod 4, and the R groove in the R groove of valve rod 4 lower ends and the lug 22 synthesizes the conglobate circular groove of a cross section, the screw of the side of the central through bore of lug 22 is put into a plurality of ball 1d, seal up this screw again with screw 1e then, valve rod 4 and lug 22 have just linked together like this, and when valve rod 4 moved, valve plate 2 also moved thereupon.Being connected of lug 22 and valve rod 4 is unfixing dead, has certain floating, and so, just can overcome alignment error or foozle and cumulative error thereof.
Valve plate 2 is placed in the valve body tube 14 and moving axially along valve body tube 14, the inwall of the outer peripheral surface of valve plate 2 and valve body tube 14 can directly not contact, as previously mentioned, the 120 degree places, interior interval of valve body tube 14 are provided with three axial R grooves 141,120 degree also are provided with three shallow circular grooves 210 at the excircle interval of valve plate 2, three grooves 210 on three grooves 141 of on the valve body tube 14 this and the valve plate 2 are aimed at, and place ball 1f between corresponding groove 141 and the groove 210, only there is rolling friction between valve plate 2 and the valve body tube 14, and moving by the leading of three grooves 141 of valve plate 2, valve plate 2 just moves easily and how has stablized like this.
As previously mentioned, valve seat 13 is provided with dovetail groove, in order to seal, is provided with O-ring seals 1g in dovetail groove, and when valve plate 2 bottoms were placed on the valve seat 13, both just can realize sealing.
Fig. 1 shows is the valve that is in normal state after assembling, when the valve that assembles is put upside down (after being about to Fig. 1 Rotate 180 degree), the lower flat of the plate 12 of valve plate 2 and the spacing between the O-ring seals 1g on the valve seat 13 are preferably between 0.5mm-2mm, also can be between 0.5mm-3mm, this spacing can realize by the elastic force that rotation adjusting screw rod 17 changes spring 5, like this, valve can also be installed and used.
When valve cut out, valve plate 2 just was pressed on the valve seat 13, the elastic force that the pressure that valve plate 2 imposes on valve seat 13 also has Regulation spring 5 to apply except the deadweight of valve plate 2 and valve rod 4, and these power are enough to realize vacuum seal.If it is big that the interior pressure of vacuum system becomes suddenly, surpass predetermined value, valve plate 2 can be opened by moment, and vacuum system just can be by slotted hole 141 relief and emptyings on the valve body tube 14 like this, preferably, these slotted hole 141 formed relief and emptying areas than the big 1.5-2 of valve drift diameter area doubly.
Though the present invention describes with reference to current specific embodiment, but those of ordinary skill in the art will be appreciated that, above embodiment is used for illustrating the present invention, under the situation that does not break away from spirit of the present invention, also can make the variation and the modification of various equivalences, for example, filter screen can be multilayer Stainless Steel Wire layer or other reticular structures, aforesaid all balls can be ceramic balls or other hardness height and the little ball of friction factor, therefore, if in connotation scope of the present invention to the variation of the foregoing description, modification all will drop in the scope of claims of the present invention.
Claims (10)
1. ultrahigh vacuum automatic pressure relief valve is characterized in that comprising:
Valve body, it has valve body tube and valve seat, and the lower end of valve body tube is connected with valve seat, and the part of the close valve seat of valve body tube has the hole of relief and emptying, and valve seat is provided with Sealing;
Valve plate, valve plate can move in valve body, both vacuum seals when the bottom of valve plate is pressed in Sealing on the valve seat of valve body;
Valve rod, its lower end connects the top of valve plate, moves in valve body tube to drive valve plate;
Valve gap is sealed the upper end of valve body tube, has center hole;
Adjusting screw rod is threaded with the center hole of valve gap, has center hole, and the center hole of adjusting screw rod is passed in the upper end of valve rod, and valve rod can move in the center hole of adjusting screw rod; And
Regulation spring is nested with on valve rod, and is limited between valve plate and the adjusting screw rod, thus the rotation adjusting screw rod, its elastic force of can regulate.
2. ultrahigh vacuum automatic pressure relief valve as claimed in claim 1, the hole that it is characterized in that described relief and emptying are a plurality of slotted holes that form on the circumference of valve body tube, and these a plurality of slotted holes are filtered the net coating.
3. ultrahigh vacuum automatic pressure relief valve as claimed in claim 2, the area that it is characterized in that the relief and emptying that all slotted holes provide are than the big 1.5-2 of drift diameter area of valve body tube doubly.
4. ultrahigh vacuum automatic pressure relief valve as claimed in claim 1, it is characterized in that valve plate comprises plate and lug, the bottom of plate is used for forming vacuum seal with valve seat, the centre on the top of plate is connected with lug, the tapped hole that lug has center hole and communicates with center hole, be formed with groove on the center hole wall of lug, also be formed with groove on the lower end outer surface of valve rod, after the center hole of lug is inserted in the lower end of valve rod, groove and the groove on the lug on the valve rod form a circular groove, a plurality of balls are put into from tapped hole, and tapped hole is sealed by a screw, thereby valve rod and valve plate have just linked together.
5. ultrahigh vacuum automatic pressure relief valve as claimed in claim 1, it is characterized in that on the excircle of valve plate, being formed with a plurality of slotted eyes, on valve body tube, form many axial guiding grooves, a plurality of slotted eyes on the excircle of valve plate and many guiding grooves on the valve body tube align one by one, and between the slotted eye of alignment and guiding groove, place ball, thereby valve plate can not contact the valve body tube inwall and only can produce force of rolling friction when mobile in valve body tube.
6. ultrahigh vacuum automatic pressure relief valve as claimed in claim 1 is characterized in that being embedded in a plurality of O shape guiding elements at adjusting screw rod, and valve rod contacts with this O shape guide rod when mobile in adjusting screw rod.
7. ultrahigh vacuum automatic pressure relief valve as claimed in claim 6 is characterized in that this O shape guiding element is an O-ring seals.
8. ultrahigh vacuum automatic pressure relief valve as claimed in claim 1, when it is characterized in that this ultrahigh vacuum automatic pressure relief valve is installed, the surface of the bottom of valve plate and the spacing of the Sealing on the valve seat are between 1mm-3mm.
9. ultrahigh vacuum automatic pressure relief valve as claimed in claim 4 is characterized in that ball is a ceramic balls, and the cross section of described circular groove is circular.
10. ultrahigh vacuum automatic pressure relief valve as claimed in claim 1 is characterized in that the Sealing on the valve seat is an O-ring seals, and described filter screen is the multilayer Stainless Steel Cloth.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2008100417122A CN101649927B (en) | 2008-08-15 | 2008-08-15 | Ultrahigh vacuum automatic pressure relief valve |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2008100417122A CN101649927B (en) | 2008-08-15 | 2008-08-15 | Ultrahigh vacuum automatic pressure relief valve |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101649927A true CN101649927A (en) | 2010-02-17 |
| CN101649927B CN101649927B (en) | 2012-01-11 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2008100417122A Active CN101649927B (en) | 2008-08-15 | 2008-08-15 | Ultrahigh vacuum automatic pressure relief valve |
Country Status (1)
| Country | Link |
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| CN (1) | CN101649927B (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104455600A (en) * | 2014-12-05 | 2015-03-25 | 大连维钛克科技股份有限公司 | Safety valve for vacuum coating device |
| CN104499263A (en) * | 2014-12-15 | 2015-04-08 | 拓卡奔马机电科技有限公司 | Vacuum automatic adjusting device of cutting bed |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4941503A (en) * | 1988-05-13 | 1990-07-17 | Air Techniques Incorporated | Vacuum assembly including an improved vacuum relief valve assembly |
| CN2083229U (en) * | 1990-11-06 | 1991-08-21 | 永嘉县引配阀门厂 | Negative pressure safety valve |
| US5226442A (en) * | 1992-08-13 | 1993-07-13 | Taylor Julian S | Vacuum/pressure release valve |
| CN200986045Y (en) * | 2006-12-08 | 2007-12-05 | 上海海事大学 | Differential pressure controlled vacuum release valve |
-
2008
- 2008-08-15 CN CN2008100417122A patent/CN101649927B/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104455600A (en) * | 2014-12-05 | 2015-03-25 | 大连维钛克科技股份有限公司 | Safety valve for vacuum coating device |
| CN104499263A (en) * | 2014-12-15 | 2015-04-08 | 拓卡奔马机电科技有限公司 | Vacuum automatic adjusting device of cutting bed |
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| Publication number | Publication date |
|---|---|
| CN101649927B (en) | 2012-01-11 |
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